DE10321962A1 - Simulation device for simulating the rotation of a micro-mechanical Coriolis sensor, for its calibration and characterization, has acceleration, compensation and frequency information units - Google Patents

Abstract

The angular velocity sensor is of a micro-mechanical type, configured for Coriolis measurement of acceleration forces. The calibration device has a first unit for applying a first acceleration to a first vibrating unit (100) in a primary direction (102) and a second acceleration in a secondary direction (104); a unit for compensating deflection of the vibrating unit in primary and secondary directions and; a unit for provision of frequency information. The device units are used to excite the vibrating unit in a manner analogous to rotation of a body. Independent claims are also included for three associated calibration or re-calibration device and four associated calibration or re-calibration methods.

Description

The The present invention relates to yaw rate sensors and in particular on the calibration of yaw rate sensors. Micromechanical Coriolis force rotation rate sensors possess diverse Fields of application, for example position determination of an automobile or an aircraft. Generally possess such sensors have a movable mechanical structure, which too a periodic vibration is excited. This periodic, Vibration generated by excitation is also called the primary vibration designated. learns the sensor rotates about an axis perpendicular to the primary vibration or primary movement, so leads the movement of the primary vibration to a Coriolis force that is proportional to the measurand, d. H. the angular velocity. The Coriolis force makes one second, for primary vibration orthogonal vibration excited. This second, to the primary vibration Orthogonal vibration is also called secondary vibration or movement designated. The secondary vibration, which is also referred to as a detection oscillation, can be different Measurement methods are recorded, with the recorded size as a measure of the serves the yaw rate sensor acting yaw rate. About the primary vibration thermal, piezoelectric, electrostatic and inductive processes used in the Technology are known. To capture the secondary vibration are piezoelectric, piezoresistive or capacitive principles Stand of the technique.

Gyroscopes can be carried out in a variety of ways. All rotation rate sensors have in common, however, that they include an oscillating device, by a primary excitation device in the primary movement is relocatable and that they have a secondary detection device, which is a secondary movement can measure based on a rotation rate acting on the rotation rate sensor. With uncoupled sensors one and the same vibrating mass both the primary movement and also the secondary movement out. This oscillating device is then designed in such a way that it comprises a mass which can be moved both in the x-direction and in the y-direction suspended becomes. Without restriction The general assumption is that the x-direction is the direction of the primary movement or the primary vibration and that the y direction is the direction of the secondary motion or the secondary vibration is, and that the rotation rate on the vibrating device in the z direction acts.

The WO 98/15799 discloses rotation rate sensors with decoupled movements the vibrating device. The vibrating device is in a primary vibrator and a secondary transducer divided up. The primary vibrator leads one Vibration in the primary direction through and so is with the secondary transducer coupled that the primary vibration transferred to the secondary transducer becomes. The primary vibrator is however suspended from a substrate in such a way that it only in the primary direction can move, but not in the secondary direction. So one leads on the primary transducer Coriolis force due to a rotation rate does not mean that the primary vibrator in the secondary direction is deflected because this degree of freedom due to its suspension for the primary oscillator does not exist. In contrast, the secondary oscillator is suspended in such a way that he both in the primary direction as well as in the secondary direction can move. The secondary movement leads to, that the secondary vibrator in the secondary direction be moves, this secondary movement through the secondary detection device is detectable. The secondary detection device is preferably included trained so that it does not capture the primary movement that the secondary transducer yes only because to be "sensitive" to the Coriolis force. The connection between the primary transducers and the secondary transducer is further designed in order to achieve an even better coupling, that while the primary vibration from the primary transducer transferred to the secondary transducer is that however the secondary vibration not on the primary transducer transferred back becomes.

Such a rotation rate sensor, as is known from WO 98/15799, is shown in 5 shown. The rotation rate sensor 500 has a primary transducer 506 on that via a primary vibration suspension 504 consisting of four anchors 504a and four cantilevers 504b is attached to a base body (not shown). In order to excite the primary oscillator, ie to set it in vibration, it comprises an electrode group on two opposite sides 508 leading to a fixed electrode group 510 , ie to an electrode group connected to the base body 510 , is arranged to form a so-called comb drive to the primary transducer 506 to stimulate capacitively. The primary transducer suspension 504 is designed to vibrate the primary vibrator 506 allow in the x direction while moving the primary transducer 506 is effectively avoided in the other two directions. The cantilevers 504 therefore have a rectangular cross section, the narrow side of the cross section being selected along the x direction, while the long side of the cross section is running along the z direction. It should also be noted here that in addition to the cross-sectional geometry of the cantilevers, the aniso tropic stiffness of the primary and secondary vibration suspension can also be achieved by arranging several cantilevers with the same cross-sectional geometries in appropriate places.

A secondary vibrator 514 is about secondary transducer suspensions 512 with the primary transducer 506 connected as it is in 5 is shown. The secondary transducer 514 has secondary oscillator electrode groups arranged parallel to the x-axis 550 on that in fixed secondary vibration detection electrode groups 552 are arranged in a comb-like manner to engage in a capacitive detection of the movement of the secondary oscillator 514 enable in the y direction.

The rotation rate sensor 500 with an angular velocity Ω _y around the axis of symmetry of the secondary oscillator 514 or rotated parallel to this axis of symmetry, i.e. to an axis parallel to the y-axis, acts on the secondary oscillator 514 a Coriolis force which leads to an essentially translatory movement of the secondary oscillator in the z direction. The translatory movement of the secondary vibrator 514 in the z-direction can by a detection electrode 516 that under the secondary transducer 514 is arranged to be capacitively detected.

The rotation rate sensor 500 with an angular velocity Ω _z around an axis that is perpendicular through the center of the secondary transducer 514 runs and is parallel to the z-axis or generally rotated to an axis parallel to the z-axis, a Coriolis force acts on the secondary oscillator, causing it to move in the y-direction. This movement in the y direction of the secondary vibrator 514 represents a translatory vibration, since the primary oscillator also carries out a translational vibration. The detection of the movement of the secondary vibrator 514 in the y direction takes place capacitively through the secondary vibrating electrode group 550 and by the fixed detection electrode groups 552 instead of. The cantilevers 512 comprise an essentially square cross-sectional configuration, since they allow deflection both in the z direction and in the y direction, in such a way that biaxial detection can take place. A relative movement of the secondary vibrator 514 and the primary transducer 506 is due to the arrangement of the cantilever 512 prevents which all run parallel to the x-axis. If the in 5 rotation rate sensor shown should be designed as a single-axis sensor with a secondary movement in the xy direction, the spring bar cross sections are designed rectangular.

The primary transducer suspension ensures that the primary transducer 504 cannot be moved in the y or z direction by the Coriolis force, since movement of the primary oscillator in the z direction is due to the cross-sectional configuration of the cantilevers 504b is made impossible, in addition the arrangement of the cantilever 504b movement in the y direction of the primary oscillator is prevented parallel to the y axis. The anchorages also have 504a a corresponding stiffness so that they do not allow any deflection in the y direction.

WO 98/15799 also discloses a large number of further rotation rate sensors with different types of primary and secondary vibrations, which are based on the fact that the primary vibration is decoupled from the secondary vibration. During the in 5 rotation rate sensor shown executes a linear oscillation both in the primary direction and in the secondary direction, other rotation rate sensors are also described, namely those which perform a rotational movement in the primary direction and which likewise perform a rotational movement in the secondary direction. Alternative rotation rate sensors are also that z. B. the primary movement is rotational, but the secondary movement is linear and vice versa.

The price for micromechanical rotation rate sensors is essentially by the costs for the manufacture of the silicon chip, the assembly and connection technology as well as testing and calibrating the sensors. For larger quantities the costs are distributed approximately evenly. The Silicon chip and the assembly and connection technology together two thirds while the time-consuming testing and calibration of the rotation rate sensors up to accounts for a third of the total cost. The reason for the very high cost of the test and calibrations is the fact that completely built-up rotation rate sensors usually individually tested for functionality on a turntable and need to be calibrated. Measurements over the entire temperature range are particularly cost-intensive, in which the rotation rate sensor should work. Especially for automotive Applications this temperature range is considerable, it will differ from minus degrees extend up to high plus degrees in the entire temperature range, in which a motor vehicle works, for a z. B. Navigation of the Vehicle available to be.

In the context of the steadily increasing technical requirements, particularly regarding reliability and performance parameters, micromechanical rotation rate sensors should meet specifications with very high demands, which so far have only been met by fiber-optic gyroscopes, which ei can be assigned to a price range of several thousand euros. Examples of applications with specifications of high demands are most military applications and navigation systems of the aerospace.

Next the time-consuming individual calibration of the rotation rate sensors on a turntable that generates a rotation rate for the rotation rate sensor, and possibly is available in a laboratory, it is also necessary the functionality of the sensor to monitor in operation. In particular with micromechanical rotation rate sensors exist strong temperature influences, in particular when the vibrating device is in view on the primary movement is operated in resonance to a sensor with high sensitivity to achieve what is only possible is when the resonance peaks due the primary side Resonance is exploited. A recalibration due to the temperature variations of the sensor in normal operation therefore took place in that the Temperature of the sensor was measured and due to in the laboratory readjusted temperature specifications Has. Alternatively and additionally are also primary-sided Amplitude and phase controls are known in that the primary amplitude and primary frequency of the primary excitation signal always changed like this that the rotation rate sensor is always in the primary side Resonance is operated and that on the other hand the amplitude of the primary oscillation is constant or at least one downstream evaluation electronics is known.

Problematic is on these measures, that they are particularly relevant to those recorded in the laboratory Temperature variations can only approximate a real case because Second order variations, such as mechanical aging heavily used structure is not taken into account overall. For this Reason it is known, plausibility checks of the output signal by the readout electronics generating a test signal, the above electrostatic forces a force corresponding to the Coriolis force to the rotation rate sensor imprints, which in turn provides an output signal. The test output signal is compared with a determined initial output signal and if the deviation is too large, an error message is issued. This self test can also be a functionality the sensor by applying a defined voltage to a designated one Include pin.

in the State of the art therefore uses the initial calibration a turntable to generate a real rotation rate or several Rates of rotation take place, with only one recalibration during operation takes place on the basis of temperature variations determined in the laboratory. Furthermore, the plausibility of the output signal of the sensor can be checked, to in the case of a too big one Deviation to signal a malfunction of the sensor Remove the sensor, bring it to the laboratory and recalibrate it, or to be replaced with a new (freshly calibrated) sensor.

adversely in this approach is the fact that for one thing like it accomplished calibration has been very time-consuming and therefore costly is because a turntable is needed to calibrate the sensor, and furthermore the entire temperature response must be recorded at least approximately maintain good recalibration of the sensor during operation.

Farther disadvantageous is the fact that if the plausibility check indicates that the sensor no longer delivers plausible output signals complete removal of the sensor combined with recalibration or a complete one Replacement needed can be what especially in automotive applications or in applications in air and Space travel is not tolerable or is not possible.

The The object of the present invention is to create a more efficient one and more tolerant concept for calibrating yaw rate sensors to accomplish.

This The object is achieved by a device for characterizing a rotation rate sensor according to claim 1, a method for characterizing a Rotation rate sensor according to claim 16, a device for simulating a rotation rate according to claim 17, a method for simulating a rotation rate according to claim 21, a device for calibration a rotation rate sensor according to claim 22, a method for Calibrating a rotation rate sensor according to claim 25, a Device for recalibrating a rotation rate sensor according to claim 26, a method for recalibrating a rotation rate sensor according to Claim 39 or a computer program according to claim 40 solved.

The present invention is based on the knowledge that both the initial calibration of a Yaw rate sensor and the recalibration of a yaw rate sensor can be decisively simplified if no known yaw rate is exerted on the sensor (e.g. by a turntable), but if the vibrating device is excited in a secondary movement in such a way that a precisely quantified yaw rate is simulated. Simulating a precisely quantified yaw rate by means of a control signal to a secondary excitation device, which is preferably identical to the secondary detection device, makes it possible, on the one hand, to carry out an initial calibration of the yaw rate sensor using two different simulated yaw rates completely without using a turntable.

Farther allows it is simulating a precisely quantified yaw rate that a Recalibration of the rotation rate sensor can be carried out, without having to remove the yaw rate sensor, and without that for the rotation rate sensor must be required, for example, that the vehicle in which the rotation rate sensor is located in a defined situation.

Farther allows it the simulation according to the invention a precisely quantified yaw rate that on the record a temperature change in the laboratory can be omitted if one primary side Scheme is provided. Then on the basis of one the primary side Regulation changed Drive frequency or drive amplitude exactly to be simulated quantified rotation rate are readjusted in such a way that at the rotation rate to be simulated by deflecting the oscillating device in the secondary direction the results of the primary Regulation can be used even with changed temperature conditions to simulate a correct and defined quantified yaw rate and based on this, perform a calibration of the rotation rate sensor to be able to.

to Simulation of a precisely quantified yaw rate of the yaw rate sensor the rotation rate sensor is characterized according to the invention by the oscillating device has a first acceleration in the direction of the primary movement exercised and then by a compensation signal to compensate for the Deflection is determined based on the first acceleration. In order to the sensitivity of the primary drive, i.e. the ratio of the on the primary drive acting force, equal to the product of the mass of the primary drive and the first acceleration is that to the primary drive determined electrical signal to be applied for compensation purposes.

Corresponding is for the secondary detection device or the required secondary drive proceeded with the secondary drive will typically be identical to the secondary detection device, this is particularly the case in the electrostatic case of a comb drive as a secondary detection device will be like this. Here again the secondary drive with a second one Acceleration deflected in the direction of the secondary movement, whereby this deflection then by applying a signal to the secondary drive is compensated, the compensation signal thus obtained in turn serves to increase the sensitivity of the secondary drive to investigate. The sensitivity of the secondary drive is again that relationship the force on the secondary drive acts and the product of the mass of the secondary vibrator and the second Acceleration, the electrical to be applied to the secondary drive Signal for compensation of the generated deflection taken into account becomes.

Further the rotation rate sensor is calibrated in such a way that the frequency response of the secondary transducer it is determined what happens without using a turntable, that a drive signal with different frequencies is applied and the movement of the secondary vibrator based on the drive signal, preferably by amount and phase is recorded. From the resonance curve is then easily the resonance frequency of the vibrating device in secondary movement and preferably also the quality or damping can be determined, which is already sufficient as frequency response information.

at the preferred embodiment the vibrating device is outside in the secondary direction operated the resonance, so that in this case no frequency response information about the Vibrating device in the secondary movement direction needed become. However, the vibrating device in the secondary movement direction also operated in resonance or very close to resonance, so is preferably the frequency response of the secondary device recorded.

On the basis of the compensation signals, the frequency response information and the numerical value of the rotation rate to be simulated, an amplitude signal to be applied to the secondary drive device can then be determined, which still depends on the amplitude of the excitation signal and the frequency of the excitation signal, and that when it is applied to the secondary drive device leads to a deflection of the oscillating device in the secondary direction, which is exactly the same as if no signal would be applied to the secondary detection device, but if a real instead of the simulated yaw rate Rotation rate would exist with exactly the same quantity.

On The advantage of the present invention is that the initial Calibration of a rotation rate sensor no longer requires a turntable. Another advantage of the present invention is that due to the possible In-service recalibration no complete temperature changes must be recorded in advance in the laboratory.

On Another advantage of the present invention is that the sensor can be recalibrated during operation, so that there is no longer a plausibility check is necessary, and that in particular aging situations individually Can be taken into account, which leads to a sensor only then needs to be replaced if it mechanically destroyed is, but not if he has just lost the calibration.

According to the invention on the one hand the effort for the final tests of built-up rotation rate sensors by the independent initial or initial calibration reduced without using a turntable. On the other hand, the implementation of a preferably permanent independent Control during of sensor operation and also through an independent recalibration while the performance of the rotation rate sensors, in particular the drift of the sensor parameters scale factor and zero point, improved.

at According to the invention, the total costs of the rotation rate sensors are compared high cost of reduces time-consuming testing and calibration. In particular the very cost-intensive testing of the sensors over the entire temperature range becomes obsolete in connection with the recalibration according to the invention is based on the simulation of a precisely quantified yaw rate. Furthermore, the steadily increasing demands on the reliability as well as performance parameters by minimizing the biggest mistakes in terms of the sensor stability or sensor accuracy, which is caused by the drifting of the scale factor and the zero point arise, taken into account.

at a preferred embodiment of the present invention is the rotation rate sensor under consideration Rotation rate sensor with orthogonally decoupled vibrations, i.e. with a primary vibration, that of the secondary vibration is orthogonally decoupled, in such a way that the oscillating device primary oscillator and one from the primary transducer separated and connected by a special coupling secondary transducer includes. It is also preferred to linearly excite the primary oscillator and a linear secondary movement to get, so the characterization of the rotation rate sensor and in particular the primary excitation device and the secondary detection device can take place with linear accelerations. In particular then it is preferred as a linear acceleration both for deflection of the primary drive as well as secondary registration to use the gravitational acceleration that is everywhere and its Value in particular is almost constant. In order to characterize the Rotation rate sensor not even generate an acceleration it can do it anywhere existing gravitational acceleration is used as a precisely known reference become. This is achieved in that the rotation rate sensor is such is arranged in the gravitational field that in a first step the acceleration due to gravity is a deflection of the vibrating device in primary movement causes, and that in a second calibration step, the rotation rate sensor so regarding the gravitational field is arranged that gravitational acceleration a deflection of the oscillating device in the direction of the secondary movement causes. It is particularly advantageous here that there are no accelerations must be generated. Only the control of the orientation of the rotation rate sensor in the Gravitational field, for example, using a simple one Spirit level device or a pendulum etc. is required in order to be able to determine a sufficiently precise compensation signal.

preferred embodiments of the present invention are hereinafter referred to the accompanying drawings explained in detail. Show it:

1 a block diagram of the inventive device for characterizing a rotation rate sensor;

2 a device for simulating a rotation rate in an in 2 rotation rate sensor also shown;

3 a device for the initial calibration of a rotation rate sensor;

4 a device for the operational recalibration of a rotation rate sensor;

5 a plan view of a known rotation rate sensor with orthogonally decoupled vibration modes in the primary and secondary directions;

6 a voltage / rotation rate diagram to explain the in-service recalibration;

7 a voltage / rotation rate diagram to explain the calibration of the zero point during operation of the rotation rate sensor; and

8th a detailed representation of a control or readout electronics according to a preferred embodiment of the present invention.

In the following, reference is made to 2 generally shown a rotation rate sensor, which is initially characterized according to the invention, in order to then simulate a rotation rate, which, for. B. can be used for the initial calibration of the sensor or for the operational recalibration of the sensor. The rotation rate sensor generally comprises an oscillating device 100 which, depending on the embodiment, a single vibratory mass or, as it is based on 5 has been shown, can comprise a primary oscillator and a secondary oscillator or any number of primary and secondary oscillators. In general, the vibrating device 100 suspended, on the one hand a primary movement 102 for example, to be able to execute in the x direction, and by a secondary movement 104 z. B. to be able to execute in the y direction. The primary movement 102 is by a primary excitation device 106 achieved, which is generally designed to an input signal 107 with an amplitude Ux 107a and a frequency ω 107b in a movement of the vibrating device 100 in the primary direction 102 implement.

The rotation rate sensor also includes a secondary device 108 which, depending on the embodiment, can be divided into a secondary detection device 108a and a secondary excitation device 108b which, however, can also be based on the same physical elements. It is typically sufficient to arrange a single electrode structure on the secondary side, by means of which both a secondary movement can be measured and a secondary movement can be excited. In this case, the elements 108a and 108b in a single facility 108 merge. The same applies to the primary excitation device 106 , which can also be divided into an actual excitation device and a primary-side detection device. However, it can also e.g. B. a common comb drive, so an arrangement with interlocking electrodes can be used to both the vibrating device 100 in the primary direction 102 stimulate as well as the movement of the vibrating device 100 in the primary direction of movement 102 capture.

The secondary capture device 108 is designed to output a signal V, which is proportional to an applied rotation rate Ω in a normal rotation rate sensor. The secondary excitation device 108b is analogous to the primary excitation device with regard to the mechanical design 106 designed to generate a secondary excitation signal 109 , which again has a secondary excitation amplitude Uy 109a and a secondary excitation frequency ω 109b includes, in a secondary movement y of the vibrating device 100 implement. The element 106 in 2 would the electrodes 508 . 510 in 5 match while the item 108 in 2 on the one hand the electrodes 550 . 552 or the electrodes 514 . 516 of 5 would correspond.

The in 2 rotation rate sensor shown comprises a device 20 for generating the secondary excitation signal 109 , ie the secondary excitation amplitude U _y 109a and the secondary excitation frequency ω 109b (= Drive frequency ω _drive ), the device 20 is designed to be used as input variables for generating the secondary excitation signal 109 simulates the rotation rate Ω to be _simulated 21 , Frequency response information of the primary excitation device 22 as well as compensation signals 23 to obtain. While _simulating to be simulated rotation rate Ω 21 is entered from outside, the frequency response information 22 and the compensation signals 23 from a facility 24 to provide this information. The facility 24 can either on-line the information 22 . 23 deliver as referenced later 1 is pictured. Alternatively, the facility 24 can also be designed as a storage to provide the frequency response information 22 as well as the compensation signals 23 can be read out from a memory if necessary at some point, namely as the rotation rate sensor 100 . 106 . 108 has left the factory. The facility 24 for providing can also be designed to provide only an input function such that an operator of the yaw rate sensor uses the information provided by him during the characterization of the yaw rate sensor, as will be referred to later 1 is shown, determined frequency response information 22 and compensation signals 23 to obtain.

At this point it should be noted that the signal V, which is from the secondary detection device tung 108 is output in the case where an external rotation rate Ω 101 is applied, is _measured in proportion to the applied so measured rotation rate Ω. If there is no rotation rate, it is only a rotation rate due to the secondary excitation signal 109 simulates, the secondary detection device "measures" 108 This simulated rotation rate Ω _simulated and outputs a signal V out which is proportional to the simulated _simulated rotation rate Ω.

In order to illustrate the present invention, the characterization principle is explained in general below, before then 1 is detailed. The "simulation" of a rotation rate is based on impressing a force F _E on the inertial mass, that is to say the oscillating device or the secondary oscillator of the oscillating device in the case of orthogonally decoupled oscillation modes, that is to say the Coriolis force, that is to say an impressing force that is proportional to the primary movement a secondary movement and thus an output signal V generated which has the same value as when no force would be imprinted on the inertial mass in the direction of the secondary movement, but would act an external rate of rotation, the value of which is equal to the simulated rotation rate Ω is _simulated.

The physical principle of the force F _E to be impressed is arbitrary. In the following, however, reference is made to the special decoupled rotation rate sensor from 5 or the general rotation rate sensor from 2 a force injection by means of an electrostatic field is shown by applying an alternating voltage to the detection electrodes of the secondary oscillator. The Coriolis force is simulated according to the invention on the basis of the known quantities of the impressed force, and a rotation rate is simulated or simulated according to the invention.

The The present invention is advantageous in that a rotation rate can be simulated without geometry data of the yaw rate sensor, because everyone geometry dependencies of the rotation rate sensor due to the compensation signals and the frequency response in measurable Signals or calculable variables are “transformed”. This concerns in particular, geometry parameters that vary locally on the wafer or the chip such as the so-called trench broadening, the variation the height the silicon layer and the variation of the distance between the substrate and sensor structure. Have these sizes direct influence on the performance parameters of the individual sensors or sensor chips. According to the invention Optimization of the accuracy of the simulated yaw rate that is chip or sensor specific Simulation of the defined and precisely quantified yaw rate independent of the technological process tolerances, so that on the one hand a independent initial calibration by force injection and on the other hand a In-service recalibration also by means of force injection is obtained by simulating a rotation rate.

To simulate the rotation rate regardless of technological tolerances, an electrostatic force (the "output signal" of the block 108b in 2 ) used to generate the simulated or pseudo rotation rate. Furthermore, it is preferred to use the acceleration due to gravity as a reference and to use a special digital evaluation for the individual characterization of the movement modes in a preferred embodiment.

In general, the following relationship applies to the velocity ν impressed on the primary oscillator and the yaw rate Ω for the Coriolis force F _C acting on the inertial mass ms (mass of the secondary oscillator):

The above equation applies to perpendicular axes of motion. The impressed speed ν corresponds to the time derivative of the sinusoidal drive or primary movement of the sensor and can be represented with the amplitude x ₀ and the phase φ _{p of} the primary vibration and the drive frequency ω by the following equation: ν (t) = ẋ (t) = –x 0 · Ω · sin (ωt - φ p )

In the above equation, the amplitude x _{0 of} the primary vibration is represented as follows, where ω _{p is} the drive frequency:

The phase φ _{p of} the primary vibration is as follows:

In the above equations, F _{CD0 stands} for the amplitude of the sinusoidal driving force on the primary _vibrator . m _p indicates the mass of the primary oscillator, while β _{p represents} the damping of the primary movement.

According to the invention, the frequency-dependent amplitude and phase curve is determined “by measurement” for the primary vibration and, if required, also for the secondary vibration. From this, further frequency characteristic parameters characterizing the sensor, such as the damping or quality, are calculated, and in particular also the For this purpose, a control device, for example within a digital signal processor, is provided in order to pass through different excitation frequencies and on the primary excitation device 106 to record the reaction of the primary transducer to the corresponding excitation. Thus, it is preferred to impress a primary vibration with a certain amplitude and a certain primary frequency at a first point in time and to measure the primary movement on the basis of the impressed signal. At another point in time, a primary oscillation with the predetermined amplitude and a different frequency is then preferably impressed, and the deflection of the primary oscillator based on this excitation is again measured. If this procedure is repeated for several frequencies, with one drive frequency before the resonance of the primary oscillator and another frequency after the resonance of the primary oscillator, this results in several drive frequency / reaction value pairs, which are recorded ascending with the frequency, the resonance curve or indicate the resonance increase curve of the primary transducer. The resonance frequency of the primary oscillator can be derived from the excessive resonance curve by any measures. The resonance frequency of the primary oscillator is the excitation frequency at which a maximum reaction of the primary oscillator takes place due to the predetermined impressed amplitude. The quality can be derived from the 3 dB bandwidth of the resonance peak curve. The same applies to the damping, which, as is known in the art, is coupled to the quality.

Analogous can for the secondary transducer be followed, if the resonance curve of the secondary transducer needed becomes. Typically, however, it is preferred to use rotation rate sensors to operate with decoupled vibration modes in such a way that the resonance frequency of the secondary transducer in the secondary movement direction from the resonance frequency of the primary transducer in the primary direction of movement differentiates. In this case the frequency response of the secondary oscillator not required, because the secondary vibrator in the secondary movement direction outside the resonance is operated and thus no resonance increase occurs. Becomes the primary transducer too the frequency response information is not operated in resonance such that it indicates that the primary vibrator is outside the resonance is operated. Because of the significantly increased sensitivity however, it is preferred to operate the primary oscillator in resonance and in particular the point of maximum amplitude, i.e. the frequency track the excitation oscillation with a phase control in such a way that even with changed temperature conditions the primary vibrator always in resonance or in a defined range around the resonance is operated around.

Either for the primary oscillator for as well the secondary transducer the information about amplitude and phase of the primary or secondary transducer preferably by means of I / Q demodulation in the digital signal processor realized. Based on the metrological determinations of the amplitude and the phase profile of the oscillators can then be the other required Parameters such as resonance frequency, quality and damping are extracted.

It should be noted that the so-called frequency responses, that is to say the acquisition of the frequency information for each sensor, are chip-specific and sensor-specific and are therefore independent of the technological process tolerances. This is the case because the technological process tolerances are reflected to a certain extent in the frequency response of the primary oscillator and are contained in the information about the resonance frequency, quality or damping, that is to say in the frequency response information. Taking the resonance parameters into account, the Coriolis force is represented as follows:

The above equation contains the resonance information with regard to the resonance in the denominator frequency of the primary oscillator ω _p and the damping of the primary oscillator β _p . However, the above equation also contains geometry-dependent variables in the form of the masses m _p and m _s (mass of the primary oscillator m _p and mass of the secondary oscillator m _s ) and the amplitude F _{CD0 of} the driving force of the primary oscillator.

The amplitude of the driving force F _CD0 is calculated according to the following equation with the amplitude of the drive _signal , ie 107a in 2 related: F CD0 = K x · U x 2

The constant K _x represents the geometry of the comb drive, for example, when electrostatic excitation in the form of a comb drive is used. The constant K _x thus takes into account the acting homogeneous as well as inhomogeneous electric fields of the comb drive. In the case of known K _x, the real driving force can be determined and set. It should be noted that a similar constant K _{x can of} course be defined for any other excitations, for example piezoelectric, inductive etc. excitations, which generally indicate a relationship between the driving force F _CD0 and the excitation _{signal amplitude} U _x . In such a case, the signal U _x does not always have to appear quadratic in this equation, but can also occur linearly or cubically etc. Furthermore, it should be pointed out that the drive signal, although hereinafter referred to as voltages, does not necessarily have to be a voltage, but that the drive signal is also a current or another variable that can be applied, which is determined by an amplitude 107a and a frequency 107b in 2 is representable.

In a preferred embodiment of the present invention, the geometry-dependent constant K _x is determined using the acceleration of gravity as a reference. This is achieved by tilting the yaw rate sensor during the characterization so that the simple gravitational acceleration acts on the primary oscillator, ie the entire moving mass. At the in 2 Embodiment shown, in which a primary movement in the x direction is applied, the rotation rate sensor is therefore tilted so that the primary movement direction 102 is parallel to the earth's gravitational field. The gravitational force of the earth, i.e. the force that results from the product of the mass of the primary vibrator and the acceleration due to gravity, thus results in a deflection of the vibrating device in the primary direction. This static deflection is detected (V _1xg ) or compensated or regulated by applying an electrical voltage U _x1g equivalent to simple gravitational acceleration. A direct voltage U _x is therefore coupled to the primary excitation device, the value of this direct voltage being set such that the deflection of the oscillating device in the primary direction of movement x is again set essentially to 0. The value of the compensation voltage that can be read when the deflection is set to 0 due to gravity is equal to the first compensation _signal U _x1g . From the equivalence of the driving force with an applied voltage of U _x1g and the weight on the primary _vibrator , the constant K _x sensor or chip specific can be represented as follows:

In the above equation, g represents the acceleration due to gravity, which has a value of 9.81 N / m ² . If the above equation is inserted into the Coriolis force equation, the following relationship results:

In the above equation is only the mass of the secondary vibrator ms available, which still has a geometry dependency, i.e. one Size is which cannot easily be determined by measurement or evaluation is.

In accordance with the real driving force, the real electrostatic force F _E , i.e. the force to be applied to the detection electrodes of the secondary oscillator for generating the secondary oscillation without the presence of a rotation rate, can generally be represented as a function of the drive voltage U _y and a chip or sensor-specific constant K _y become. The force F _E to be impressed is as follows: F e = F E0 Sin (ωt - φ p ))

The amplitude F _{E0 of} the above equation is calculated as follows using the sensor-specific constant K _y : F E0 = K y · U y 2

Analogous to K _x , K _{y represents} the geometry of the detection electrodes and takes into account both homogeneous and inhomogeneous electric fields. According to the described procedure for determining K _x , K _{y is determined as} follows:

Here U _{y1g is} the voltage equivalent to the simple gravitational acceleration of the inertial mass of the secondary _oscillator in the direction of the secondary _oscillation . U _y1g is again determined by tilting the _yaw rate sensor, but the _yaw rate sensor is now tilted orthogonally to the previous tilt direction, namely in such a way that the secondary movement direction 104 out 2 is parallel to the gravitational force, so that the secondary vibrator or the vibrating device 100 is generally deflected in the direction of the secondary movement. The second compensation _signal U _x1g is now again the value of the secondary _{excitation device} 108b applied DC voltage, which is necessary to the deflection of the oscillating device 100 in the secondary movement direction 104 to compensate for the acceleration due to gravity, ie to "bring it back" to 0.

From the equivalence of the Coriolis force and the force to be impressed, taking into account the equations for the constant K _y , the following relationship results for a rotation rate Ω to be simulated:

If the primary oscillator is also operated in resonance, which is typically preferred, the above equation is simplified to the following equation:

The two equations above now provide the numerical relationship between a rotation rate Ω to be impressed or simulated and the amplitude of the excitation signal U _x ( 107a in 2 ) and the amplitude of the secondary excitation signal U _y ( 109a of 2 ), so that now with a rotation rate to be simulated Ω and with a known excitation signal amplitude U _x as well as with a known excitation frequency ω the amplitude of the secondary excitation device 108b signal to be fed 109a can be calculated. Alternatively, of course, a certain amplitude 109a into the secondary excitation device 108b be fed in, then an amplitude 107a of the primary excitation device 106 set the fed signal in such a way that a certain rotation rate Ω is simulated. If Ω and U _{x are} given, U _{y is} calculated as it is in a block 16 in 1 is shown in equation.

The concept according to the invention for characterizing a rotation rate sensor with an oscillating device is described below 100 , a primary excitation device 106 for driving the vibrating device for a primary movement 102 , a secondary detection device 108 for outputting an output signal V, which depends on a secondary movement of the oscillating device due to a rotation rate of the rotation rate sensor about a sensitive axis.

In particular, the device for characterizing a rotation rate sensor, as described in 1 is shown, a facility 10 for exerting a first acceleration on the oscillating device 100 in the direction of the primary movement and a second acceleration on the oscillating device in the direction of the secondary movement. The inventive device from 1 also includes a device 12 to the Compensating the deflections in the primary and secondary _directions , as has been shown above, by a first compensation _signal U _x1g 12a and a second compensation _signal U _y1g 12b to deliver. The characterizing device according to the invention further comprises a device 14 to provide frequency response information for the primary movement, the frequency response information preferably the resonance frequency ω _p , the damping β _p or the quality Q _{p of} the oscillating device 100 in the primary direction of movement 102 include.

The through the in 1 shown device determined information about the frequency response, which in 2 also with 22 and the two compensation signals for characterizing the sensitivities of the primary excitation device and the secondary detection device 12a . 12b allow, according to that in the block 16 shown to simulate any numerical rotation rate by a signal 109 that according to the block 16 is determined to the secondary excitation device 108b which are preferably identical to the secondary detection device 108b is created. Such a secondary excitation signal 109 with a secondary excitation amplitude 109a and a secondary excitation frequency 109b to the secondary detection device 108 of the rotation rate sensor, the secondary oscillator executes a movement which is identical to the movement which it would carry out if no secondary excitation signals were impressed, but if the rotation rate sensor has the rotation rate Ω 101 would be subject to the same value as that in the block 16 of 1 assumed value is Ω. Of course, the secondary detection device 108a of 2 a corresponding output signal V output that is equal to the simulated rotation rate Ω is _simulated, or the equal to a measured rotational rate Ω would be _measured when the corresponding measured rotation rate were actually present instead of the simulated turning rate.

A rotation rate acting on the sensor can thus be simulated to excite the secondary detection device in the direction of the secondary movement, with an amplitude of the secondary excitation signal 109 for stimulating the oscillation of the oscillating device depends on a primary excitation amplitude U _x , a primary excitation frequency ω, the first compensation signal, the second compensation signal, the frequency response information and the rotation rate to be simulated Ω _simulated .

In deviation from the exemplary embodiment described above, in which the device for exerting a first and a second acceleration (device 10 in 1 ) is designed to tilt the rotation rate sensor only in accordance with the acceleration, linear accelerations deviating from the acceleration due to gravity can also be applied, if appropriate devices are available, which is particularly advantageous if the acceleration due to gravity is insufficient and e.g. B. larger accelerations are required, or if the acceleration due to gravity is too strong and smaller accelerations are required.

Is the vibrating device 100 The device can be set into a rotary primary movement 10 designed to exert an acceleration, not a linear acceleration, but a rotational acceleration in the primary movement direction or in the secondary movement direction on the oscillating device 100 to exercise when the vibrating device simultaneously performs a rotary secondary movement. A rotational acceleration can e.g. B. can be achieved in that a defined torsional force is exerted on the primary or secondary vibrator by suitable manipulators, for the compensation of which a compensation signal can then again be calculated.

It it should also be noted that the primary transducer and the secondary transducer exerted Accelerations do not necessarily have to be identical. are they identical, so shorten them out of expression for the rotation rate Ω. If they are not identical, they are retained in the expression for Ω. In this case, if the accelerations are not the same, it is advantageous to know the individual values. the equation for Ω, however also predictable if only the ratio of the two accelerations is known because the two "reference accelerations" only in their relationship occur to each other in the equation.

According to the invention, a rotation rate is thus impressed or simulated or, in other words, simulated. This enables technological process tolerances and the influence on the chip-specific sensor geometry and thus on the sensor parameters to be eliminated. As can be seen from the above equation, the simulated yaw rate is represented as a function of parameters which are either “measured” (resonance frequency ω _p ), “calculated” (quality or damping) or “set” (drive frequency ω, voltages U _x and U _y ) or "regulated" (voltages U _x1g and U _y1g ). By applying voltages U _{y of} different magnitudes to the detection electrodes of the secondary oscillator, rotation rates dependent on the voltage magnitudes can now be simulated in a defined manner.

In the following, reference is made to 3 the initial calibration of yaw rate sensors using impressed yaw rates. It should already be pointed out that the initial calibration can be carried out more cost-effectively according to the invention since a rotary table is no longer required. Even if a turntable already exists in a laboratory, the calibration is nevertheless simplified according to the invention, since the placement of the rotation rate sensors on the turntable and the measurement of the rotation rate sensors on the turntable no longer have to be carried out.

Two quantities are typically determined for the calibration of the rotation rate sensors, namely the proportionality factor between the rotation rate Ω to be measured and the output signal V, which is also referred to as the scale factor SF (the scale factor converts the rotation rate into a voltage-equivalent quantity), and the so-called zero point NP ₀ that is to be adjusted to a specified value in certain embodiments. The relationship between the output signal V, the scale factor SF ₀ and the zero point NP ₀ is given as follows: V = SF 0 Ω + NP 0

The linear relationship between the output voltage V or generally the output signal V and the applied yaw rate Ω or the impressed or “simulated” yaw rate Ω is inherent linear due to the definition equation for the Coriolis force set out above. A zero point NP ₀ , ie an output signal of the sensor, if no rotation rate is present, is required for certain applications, for example consider the case in which the output signal V should assume values between 0 V and 5 V due to external circumstances the yaw rate sensor should measure yaw rates that should take values between –Ω _max and + Ω _max In such a case, a yaw rate of 0, ie Ω = 0, would correspond to a value of the output signal V of 2.5 V. This zero point shift becomes artificial generated, so that, as stated depending on external circumstances, a receiving the output signal V Signal processing block knows that an output voltage of 0 V corresponds to the value Ω _max , an output signal of 2.5 V corresponds to a rotation rate of 0, and that an output signal of +5 V corresponds to a rotation rate of + Ω _max . If the zero point shift were not carried out, the output signal would be between -2.5 and +2.5 V. If this signal is considered to be suitable for a subsequent signal processing block which processes the output signal between −2.5 V and +2.5 V, no zero point shift has to be carried out. A zero point shift is only required if the downstream signal processing block, for example, cannot work with negative voltages or should not work for certain reasons.

Before going into the present invention, an initial calibration with a turntable will first be described. To calibrate the scale factor SF ₀ using a calibrated turntable, the rotation rate sensor is operated at at least two different rotation rates Ω ₁ and Ω ₂ , the rotation rates defining the measuring range being normally used. With the associated, resulting output signals V ₁ and V ₂ , the unmatched scale factor SF ₀ * results from the following equation:

die nach Auflösung nach dem Skalenfaktor den Multiplikator k_SF liefert. Die Berechnung von k_SF sowie die Multiplikation der Ausgangssignale mit k_SF erfolgt im digitalen Signalprozessor, auf den später noch Bezug nehmend auf 8 eingegangen wird. Aufgrund der Differenzbildung zweier Signale gemäß dem vorstehenden Prozedere ist die Kenntnis des Nullpunkts zur Kalibrierung des Skalenfaktors nicht notwendig, wobei eine vernachlässigbare Drift zwischen den Messungen vorausgesetzt wird.The determined scale factor SF ₀ * is compared to the specified value SF ₀ by multiplying (or dividing) the output signals with a suitable multiplier, which of course can also be less than 0 and thus acts as a divisor, which is based on the ratio of target Scale factor SF ₀ to actual scale factor SF ₀ * is determined. The following equation results

which provides the multiplier k _SF after resolution according to the scale factor. The calculation of k _SF and the multiplication of the output signals by k _{SF are} carried out in the digital signal processor, to which reference will be made later 8th is received. Due to the difference between two signals according to the above procedure, knowledge of the zero point for calibration of the scale factor is not necessary, whereby a negligible drift between the measurements is assumed.

The zero point NP ₀ is calibrated by measuring the output signal V ₀ without the presence of a rotation rate. The result is the non-adjusted zero point NP ₀ *, which is defined as follows: NP 0 = V (Ω = 0) = V 0

The zero point NP ₀ * determined is compared to the specified value NP ₀ by adding (or subtracting) the output signal V ₀ to a suitable constant k _NP , which is determined from the difference between the target zero point NP ₀ and the actual zero point NP ₀ becomes. The adjusted zero point NP ₀ results from the following equation: NP 0 * = V 0 + k NP

The zero point constant k _NP results directly from the above equation by solving the above equation for k _NP . The calculation of k _NP and the addition of the output signal with k _{NP are} carried out as well as the scale factor calibration in the digital signal processor, as exemplified in 8th is shown. Due to the fact that the calibration of the zero point is carried out without the presence of a rotation rate, it is not necessary to know a defined rotation rate during the initial calibration of the zero point.

For the initial calibration described above using a turntable to generate the rotation rates Ω ₁ and Ω ₂ , as has been stated, a turntable is required. The initial calibration must therefore take place under laboratory conditions, essentially under defined and preferably constant ambient conditions.

In the following, reference is made to 3 discussed the initial calibration according to the invention without using a turntable. A device for initial calibration comprises a device 30 to simulate a first and a second rotation rate, the device 30 is formed to the secondary excitation signals 109 for the two rotation rates using the one in block 16 of 1 to show the correlations shown. In detail is the facility 30 designed to generate a first secondary _{excitation signal amplitude} U _y1 for simulating the first rotation rate Ω ₁ and the secondary _{excitation device} 108b of 2 supply. The facility 30 for simulation is further _configured to generate a second secondary _{excitation signal amplitude} U _y2 using the relationships of 1 , Block 16 to be calculated and the secondary excitation device 108b of 2 supply. In the 3 The device shown further comprises a device 32 for measuring the output signals V ₁ , V ₂ at the output of the rotation rate sensor, wherein V ₁ is measured when the first rotation rate Ω _{1 is} generated by supplying the first secondary _excitation signal U _y1 , and V _{2 is} measured when the second rotation rate Ω ₂ by supplying the secondary _{excitation signal} U _y2 to the secondary _{excitation device} 108b is simulated.

In the 3 The initial calibration device shown further comprises a device 34 to calculate k _SF according to the in block 34 shown definition equation for k _SF . The facility 34 receives as input values from the facility 32 for measuring the output signals V ₁ , V ₂ . The facility 34 also receives the values of the simulated yaw rate Ω ₁ , Ω ₂ and the target scale factor SF ₀ , which is also typically dictated by external factors. The scale factor results from the fact that a range of rotation rates to be measured is usually mapped to a defined output voltage range. The target scale factor therefore corresponds to the quotient of V _max - V _min divided by Ω _max - Ω _min .

The facility 34 provides the calibration factor k _{SF on the} output side, which is then used to unambiguously convert an output signal V generated by the rotation rate sensor into a rotation rate, in accordance with the in 3 equation shown below. In the in 3 Equation shown below denotes Ω the applied or simulated yaw rate, V means the sensor output signal, NP ₀ means the sensor's target zero point, k _{NP means} the zero correction value, SF _{0 means} the target scale factor and k _SS finally means the calibration factor according to the initial calibration 3 has been calculated.

The zero point correction value k _NP is calculated analogously to the calibration of the zero point using a rotary table. The zero point correction value k _NP can, as has been stated, be determined without applying a rotation rate.

At this point it should be pointed out that it is in principle irrelevant what the nature of the output signal V is, as long as the output signal V is proportional to the rotation rate Ω, such that the relationship between V and Ω due to the above-mentioned straight line equation with the scale factor as the slope and the zero point can be represented as a zero shift. Thus, the signal V can actually be a DC voltage determined after prolonged signal processing, as it appears at the output of the 8th digital signal processor shown is obtained. However, V can also be a signal, e.g. B. reproduces the amplitude of the translation of the secondary transducer. Alternatively, V can of course also change the variable capacity of the Represent comb drive for example for the secondary detection device, etc. However, it is preferred to have, as V, a DC voltage that has already been processed, which has a scale factor that is equal to the product of the target scale factor and the calibration factor and a zero offset that is equal to the sum of the target zero offset and the zero offset correction value. is related to the measured or simulated yaw rate.

In the following, reference is made to 4 discussed another preferred application of the simulated yaw rate in order to obtain an in-service recalibration, ie an in-operation determination of a calibration factor k _SF and, if desired, the zero point correction value k _NP . This enables permanent control of the scale factor and zero point or independent recalibration of the zero point and scale factor during sensor operation. The concept for recalibration, ie for determining and comparing the sensor parameters scale factor and zero point during sensor operation, is referred to below 4 shown.

In order not to influence the sensor operation during recalibration, it is preferred to excite the primary oscillator frequency-selectively with two drive frequencies ω ₁ and ω ₂ , so that the simultaneous measurement of two output signals can be carried out at the same rotation rate. When the sensor rotates about its sensitive axis, the primary oscillation of the first drive frequency (ω ₁ ) supplies the output signal V ₁ to be observed or recalibrated, the index “1” representing the relationship to the drive frequency ω ₁ (in contrast to ω ₂ ) , and where the index "2" indicates the observation drive frequency.

An output signal V ₂ therefore represents the contribution in the output signal based on the second drive frequency ω _2. The respective drive frequencies are preferably selected such that the first drive frequency is equal to the resonance frequency of the primary oscillator or the oscillating device in primary movement, that is to say ω ₁ = ω _p . The second drive frequency is preferably chosen so that it is not too far from the first drive frequency, that s. however, it is not too close to the first drive frequency, so that it can still be processed relatively well frequency-selectively with respect to the first drive frequency. Thus, it is preferred to select the second drive frequency with respect to the first drive frequency in such a way that it is less than 0.95 times the first drive frequency or greater than 1.05 times the first drive frequency. Furthermore, the second drive frequency is chosen such that it is greater than 0.5 times the first drive frequency and less than 2 times the first drive frequency, such that the observation frequency is sufficiently distant from the drive frequency to include components due to the two To be able to selectively process frequencies in the output signal, but the observation frequency should not be selected too far away from the drive frequency so that it still fulfills its observation function. This is the case when there is a sufficiently good correlation between the ratios at the drive frequency and the ratios at the observation frequency.

This is how it is in 4 is shown, a facility 40 trained to generate a primary signal that the control of the primary drive device 106 of 2 serves, wherein the primary control signal or primary signal has a first control component at the drive frequency ω ₁ and a second control component at the observer frequency ω ₂ . The amplitudes of the control signal for the drive frequency and the observer frequency can in principle be selected as desired, but can also be equated.

The device according to the invention for recalibrating a preset scale factor of a rotation rate sensor further comprises a device for frequency-selective detection in order to determine an output signal component V ₁ which is based on the drive frequency ω ₁ and to detect an output signal component V ₂ which is based on the observer frequency ω ₂ , This facility is in 4 generally with 42 designated. In the 4 shown recalibrating device further comprises a device 44 to simulate a rotation rate Ω _E with respect to the observer frequency ω ₂ . There is also a sequence control device 46 as well as a facility 48 provided for calculating a current calibration factor k _SF . The facility 44 to simulate a rotation rate Ω _E with respect to the observer frequency ω ₂ is also preferably with a primary phase and amplitude control device 49 coupled in order to take into account temperature variations in the simulation of the rotation rate Ω _E at the observer frequency ω ₂ , which are at least indirectly caused by the primary-side phase and amplitude control device 49 are recorded, as will be described later.

The realization of the sensor operation with two different primary control frequencies and the detection of the resulting output signals takes place, as will be explained later, using the in 8th shown digital evaluation electronics, which on the in the DE 10059775 A1 described Evaluation concept for processing analog output signals from capacitive sensors is based, as will be explained in more detail below.

The concept according to the invention for recalibration or recalibration is divided into two parts, similar to the initial calibration. First, the current scale factor or the calibration factor k _SF on which the current scale factor is based is determined and adjusted as part of a first measurement cycle. The determination and adjustment of the zero point is then carried out in a second measurement cycle (with adjusted scale factor). It is again assumed here that no further drift or change in the sensor parameters occurs between the two measurement cycles. This assumption is usually met without further ado, since the particularly problematic temperature changes or changes due to the aging of the sensors take place rather slowly, while the measuring cycles can be carried out relatively quickly in succession.

If the relationship described above is used for the relationship between the respective output signals, scale factors and zero points in the presence of a rotation rate Ω *, the output signal V ₁ can generally be represented as follows: V 1 = SF 1 Ω * + NP 1

The following applies analogously to the observer signal V ₂ : V 2 = SF 2 Ω * + NP 2

SF ₁ and SF _{2 represent} the scale factors associated with the primary vibrations associated with the different drive frequencies. NP ₁ and NP ₂ represent the corresponding zero points. The scale factor SF ₁ and the zero point NP ₁ are known or specified in accordance with an initial calibration provided. They correspond to the values SF ₀ and NP ₀ described above. On the other hand, knowledge of SF ₂ and NP ₂ corresponding to an initial calibration is not necessary for the recalibration concept described below.

If a change in the scale factors and zero points due to temperature and environmental factors is assumed during operation of the sensors, the output signals V ₁ '' and V ₂ '' result as follows with an identical rotation rate Ω *: V 1 '' = SF 1 '· Ω * + NP 1 ' V 2 '' = SF 2 '· Ω * + NP 2 ' SF ₁ 'and SF ₂ ' each represent the "current" scale factors. Analogously, NP ₁ 'and NP ₂ ' represent the corresponding "current" zero points. The index "'" each represents a respective sensor parameter changed by external influences.

The aim now is to adjust the currently changed scale factor SF ₁ 'using a calibration factor k _SF to be calculated to the value of the initial calibration SF ₁ or to the target scaling factor. In contrast, the adjustment of SF ₂ 'to a value corresponding to an initial calibration is not necessary due to the fact that the output signal V ₂ ''associated with the frequency ω _{2 is} only used as an "observer signal". However, SF ₂ ' is preferably determined to determine SF ₁ 'from it.

In the 4 The sequence control shown is now designed to operate the device at two different times i, j 40 and the establishment 42 to be activated, wherein a randomly present rotation rate Ω _{i is} taken into account at time i, and a randomly present rotation rate Ω _{j is} taken into account at time j. The facility 42 for frequency-selective detection then delivers output _signals V _1i ″, V _1j ″, V _2i ″ and V _2j ″, these values then being provided in the device 48 be saved for calculating a current calibration factor. It should be noted that in 4 the dashes ("''") have been omitted for reasons of clarity. The following relationship therefore applies to times i and j:

Knowing at least one rotation rate or knowing the difference between two rotation rates is required to determine the "current" scale factor SF ₁ '. Therefore, at time k in the presence of the unknown rotation rate Ω _k, frequency-selective with the frequency ω ₂ of the sensor signal used for observation becomes one defined rotation rate Ω _E by the device 44 embossed, the device 44 is activated by the sequence control at time k, and the device 42 for frequency-selective detection at time k also by the sequence control 46 is activated to take a measurement. The facility 44 of 4 is designed to generate a secondary excitation signal 109 of 2 to generate, the frequency 109b of the secondary excitation signal is ω ₂ , and wherein the amplitude of the secondary drive signal, ie 109a in 2 , is chosen as it is in the block 16 of 1 is shown. In particular, for the parameter ω is in the block 16 in 1 to use the observer frequency ω ₂ . Furthermore, for Ω in the block 16 of 1 use the known simulation rotation rate Ω _E to be impressed.

The amplitude U _{x of} the control signal is the amplitude of the control signal at the observer frequency ω ₂ , so that due to the relationship in the block 16 in 1 that of the facility 44 can be obtained to simulate the rotation rate with respect to ω ₂ signal to be generated.

As has been mentioned, the drive frequency ω _{1 is} chosen to be identical to the resonance frequency ω _{p of} the primary oscillator or the oscillating device in the primary direction, so that with the requirement ω ₁ not equal to ω ₂ for the rotation rate Ω _E to be impressed, the resonance increase curve, i.e. the frequency response information, of the Primary vibrator must be taken into account because ω _{2 is} outside the resonance. In connection with the following reference to 8th Read-out method explained in particular, in particular with the frequency-selective (and phase-selective) demodulation of the superimposed movement of the secondary oscillator for realizing the individual signals V ₁ and V ₂ or V ₁ ″ and V ₂ ″ is Ω by the frequency-selective impressing of the defined simulation rotation rate _E with the frequency ω ₂ does not influence the actual sensor operation, ie the output signal to be observed or recalibrated (primary oscillation with frequency ω ₁ ). The following relationship therefore applies for the time k:

The facility 48 is therefore also designed to calculate in order to obtain the output signals at time k and, as shown below, to offset them with one another in order finally to obtain the current calibration factor k _SF .

To this end, reference is made to the in 6 shown diagram referred to, in which the rotation rate Ω is plotted along the x-axis, while the output signal V is plotted along the y-axis. In 6 are two lines 60 . 61 drawn in, the straight line 60 to the output signal-rotation rate characteristic of the rotation rate sensor at the drive frequency ω ₁ , while the straight line 61 relates to the output signal rotation rate characteristic of the rotation rate sensor at the observer frequency ω ₂ . The intersection of the straight lines 60 and 61 with the y axis in 6 , ie for Ω = 0, the current zero offsets NP ₁ 'and NP ₂ ' result directly. Based on the in 6 straight lines shown 60 and 61 the scale factor of each straight line can also be determined without further ado, that is to say the scale factor SF ₁ 'on the basis of the straight line 60 and the scale factor SF ₂ 'based on the straight line 61 , where the scale factors each equal the slope, ie a delta-y to a delta-x of the equations.

In principle, the order of the straight lines Ω _i , Ω _j and Ω _k on the Ω axis is arbitrary. For better clarity, however, the in 6 shown order selected. By appropriately forming the difference between the signals at times i, j and k, the zero points NP ₁ 'and NP ₂ ' can first be eliminated, so that the following relationship results:

folgt nach Einsetzen in die beiden letztgenannten Differenzgleichungen (mit dem Index „2") und nach einigen algebraischen Umformungen folgender Ausdruck:

From the latter two equations of difference, that is, where the index k occurs, and in particular from the differences of the signals with the index “2”, it can be seen that for known differences (Ω _k - Ω _i ) or (Ω _k - Ω _j ) the predictability of SF ₂ 'follows with the following equations

after insertion into the last two difference equations (with the index "2") and after some algebraic transformations, the following expression follows:

Equating the differences (Ω _j - Ω _i ) in the above equation for the difference j - i provides the relationship between SF ₁ 'and SF ₂ ' as follows:

This means that a closed expression can be given for the "current" scale factor SF ₁ '. The above equation is also directly from a geometric consideration of 6 evident since the equations 60 and 61 are each clearly related to each other by the V _1i , V _1j , V _2i and V _2j , since the measurement values V mentioned are both related to the two rotation rates Ω _i and Ω _j .

In contrast to the adjustment of the scale factor during the initial calibration, the adjustment of the scale factor. SF ₁ 'to the value SF ₁ not all DC signals (output signals after the "second" demodulation stage, referring to FIG 8th will be discussed, multiplied by the index "1" with a suitable constant. The adjustment of the scale factor SF ₁ 'to the initial or the specified value is carried out by phase-selective multiplication only of the signal components dependent on the rotation rate Ω with the index "1" the second demodulation stage after the ADC and a bandpass with a suitable constant k _SF (which results from the ratio of the desired scale factor to the actual scale factor), as has been explained.

The multiplication by k _SF is phase-selective so that the signal components proportional to the zero point NP ₁ 'are not multiplied. Overall, this results in the balanced scale factor SF ₁ on the condition of an amplification of the value “1” (corresponding to the evaluation electronics) of the second demodulator level to:

The calibration factor k _SF can now easily be determined alternatively from one of the two above equations if one of the two above equations is solved for k _SF . It should be recalled that SF _{1 is} the target scale factor, with reference to 3 with regard to an initial calibration. It should be pointed out that the concept according to the invention for recalibrating determines the current scale factor SF ₁ 'without disturbing the actual sensor operation or without influencing the actual sensor operation and can essentially permanently adapt or regulate it to the specified or initial value by repeatedly a new current calibration factor k _{SF is} calculated at either regular or irregular intervals. As with the initial calibration, knowledge of the current zero point is not required when recalibrating the scale factor. Correcting the scale factor already significantly improves the resulting drift of the scale factor SF ₁ after the correction, in particular since the quantities required for determining the scale factor can either be measured directly or, like the rotation rate Ω _E , can be impressed in a defined manner.

According to the invention, the temperature dependency of the defined impressed rotation rate Ω _E can also be adjusted by adapting the voltage U _Y applied to the detection _electrodes in conjunction with a phase and amplitude control of the primary vibrations, which in 4 generally with 49 is referred to, be compensated for both the primary movement with the drive frequency ω ₁ and for the primary movement with the drive frequency ω ₂ .

The phase regulation of the drive vibrations enables the determination of the respective current frequency ω _p '= ω ₁ ' and ω ₂ 'and the current damping β _p ' of the primary vibration. The index “'” in each case clarifies the value of the corresponding parameter that has changed, for example, due to a change in temperature or environment. The voltage U ′ _y to be applied to the detection electrodes at temperature T, the impressed rotation rate Ω _E being assumed to be constant, ie Ω _E = Ω ' _E , results from the following expression:

U _x 'represents the ω to the primary vibration at the frequency _2' is controlled drive voltage. _X U and U _y representing ₀ in each case to voltages applied at a differential temperature T, where it is preferable to take as a reference temperature T _{0 is} the temperature at the initial calibration was present.

At this point it should be noted that the primary phase and amplitude control 49 operates in such a way that it sends a control signal to the primary excitation device 106 delivers, and that at the same time the movement of the vibrating device in the primary direction, that is, the primary movement 102 of 2 z. B. is monitored by the comb structures, via which the primary excitation takes place. The actual value of the current primary movement is compared with a target value, in the event of a deviation the frequency of the primary control signal and / or the amplitude of the primary control signal from a certain original value, which is the value at the reference temperature T ₀ without restriction of generality , to be updated to an updated value, this updated value in the above equation is symbolized by the "'". This means that the resonance frequency ω' _p and the amplitude U ' _x can be directly based on the primary phase and amplitude control 49 be read. To determine the changed observer frequency ω ₂ ', for reasons of simplicity, it is preferred to use either the same absolute change as the drive frequency ω _p experienced, the same relative change or a weighted absolute or relative change.

With regard to the damping β _p 'which changes as a result of temperature or environmental changes or aging changes, there are various possibilities for determining this value. A table could be accessed using the changed resonance frequency in order to determine an attenuation changed to a changed resonance frequency on the basis of previously determined resonance frequency-damping pairs. It is preferred only for high-precision applications, e.g. B. as part of an initial calibration for each sensor to record the frequency response at different temperature values, so to speak to obtain a customized resonance frequency attenuation correspondence table.

With the determination and comparison of SF ₁ 'to SF ₁ using the by the facility 48 of 4 determined calibration factor k _SF , the output signal according to the invention is generally represented by a balanced scale factor SF ₁ and an uncalibrated zero point NP ₁ 'by the following relationship: V 1 '= SF 1 Ω + NP 1 '

Based on this approach, a renewed measurement by the device is carried out at time 1 in one exemplary embodiment of the present invention 42 of 4 taken, taking into account the randomly present yaw rate Ω _l at time l, and the output _signals V ' _1l and V _2l ''being measured at time l and being stored in the DSP. The following therefore applies to time l:

To explain these measures, click on 7 Referred to, one to 6 identical coordinate system is shown, but now three straight lines 70 . 71 . 72 are drawn. Straight 72 provides the output signal rotation rate relationship for the observer frequency ω ₂ . Straight 71 provides the output signal rotation rate relationship with unbalanced scale factor for the drive frequency ω ₁ during the straight line 70 shows the output signal rotation rate relationship for the case in which the zero point NP ₁ 'is not adjusted, while the scale factor SF _{1 has} already been adjusted using SF ₁ ' and k _SF .

To determine the current zero point NP ₁ ', the measurement signals V _1i ″ and V _2i ″ at the time i (or at the time j) at the rotation rate Ω _i (or at the rotation rate Ω _j ), whereby changes in the sensor parameters during the measuring cycle (i or j and l) are again neglected. Alternatively, two simultaneous signals V ₁ ″ and V ₂ ″ can be used at any time. By forming the difference between the output signals with the index "2" in 7 the difference between the rotation rates Ω _l and Ω _i can be represented as follows:

From the difference between the output _signals V _1l 'and V _1i '', a closed expression of measured or calculable quantities can then be given by algebraic transformations for the rotation rate Ω _i , which is as follows:

By inserting the above equation into an equation at time j or at time i, the following expression results for zero point NP ₁ ':

With the following relationship SF 1 = k SF · SF 1 ' The zero point NP ₁ 'then results exclusively from the measurement signals and the calculated current calibration factor k _SF , which is determined by the device 48 of 4 as determined above, dependent relationship for the current zero point NP ₁ ':

The zero point NP ₁ 'determined is compared to the initial or target zero point NP _{1 in} accordance with the explanations for the initial calibration by adding or subtracting the current zero point NP ₁ ' or the output signals with the index "1" with the zero point -Calibration factor k _NP , which is again determined from the difference between the nominal zero point NP ₁ and the actual zero point NP ₁ ', which gives the following value for the adjusted zero point NP ₁ :

The zero point _correction factor k _NP is again obtained by solving the above equation according to k _NP using NP ₁ as the nominal zero point.

According to the invention, the recalibration concept according to the invention, as described in 4 is shown and has been explained in more detail above, it is possible to adapt or regulate the current zero point NP ₁ 'essentially permanently to the specified value without the sensor operation being disturbed or influenced. The drift of the zero point is thus significantly improved. By "subsequent" adjustment of the signal V _1j '' to V _1j '(straight line 71 in 7 to straight 70 in 7 ) by preferably phase-selective multiplication of the signal components of V _1j ″, which are dependent on the rotation rate, by k _SF , the second measuring cycle at time l can also be omitted. This is immediately over 7 can be seen since the current zero point NP ₁ 'is determined as the value to which the straight line 70 and 71 cut, making the straight line 70 and 71 on the one hand by V _1i '' at time Ω _i and on the other hand a balanced value in which the new scale factor SF _{1 has been} taken into account, i.e. to a value which in 7 With 73 is clearly defined.

Furthermore, it should be pointed out that the determination of the zero point can in principle be dispensed with if a detailed characterization of the behavior of the sensor parameters scale factor and zero point over temperature has been carried out during the initial calibration. Due to the reference to 6 calculated current calibration factor k _SF can be determined, for example, by looking up in a table the zero point correction value k _NP corresponding to a corresponding calibration factor k _SF . The temperature and thus the current zero point NP ₁ 'can thus be inferred from the currently determined scale factor SF ₁ '. This "table access method" can thus also be used to carry out an online recalibration.

In the following, reference is made to 8th a signal processing concept is shown, which is preferred according to a preferred embodiment of the present invention from a signal / noise point of view. The signal processing concept is grouped around the MEMS structure, as shown for example in 5 is shown and in 8th With 800 is designated. The MEMS structure comprises a device for applying control signals 801 that the control signal 107 in 2 correspond. The MEMS structure also includes 800 a secondary acquisition output 802 as well as how it is in the DE 10059775 A1 is described, an entrance 803 for impressing an RF carrier, for example 600 kHz on the secondary detection device and an input 804 for impressing a further RF carrier at preferably about 400 kHz on the primary excitation structure in order to be applied to the secondary detection device 802 on the one hand and to obtain a signal at the primary detection device, not shown, which is modulated onto the HF carrier, for example of 600 kHz, or onto the HF carrier, for example of 400 kHz. At the exit 802 the secondary detection device is initially amplified the output signal 805 and high pass filtered 806 to receive only the output signals modulated onto the carrier of 600 kHz. Then two A / D converters follow 807 by a signal generator 808 be triggered, the signal generator 808 in turn by a bar 809 is controlled. Now there are three signal processing trains, which in 8th are designated with primary (f2), primary (f1) and secondary. Each signal processing train includes a bandpass filter 810 , two downstream demodulators 811 , two low passes 812 , two PI controllers 813 as well as a signal generator 814 , In the primary signal processing branches there is also between the low pass in the upper branch and the PI controller in the upper branch, as in FIG 8th a comparator is shown 815 arranged, which is an actual value from the low pass 812 with a desired value.

At the output of the signal generator 814 is a D / A converter 816 intended. The primary processing branches or the D / A converters assigned to the primary processing branches drive amplification stages 817 to use the 4 to generate the described in-operation recalibration method of primary control signal which has a drive signal component at f1 on the one hand and an observer signal component at f2 on the other hand. The scheme based on the comparator 815 takes place, serves to carry out the temperature compensation in order to keep the drive signal at the current resonance frequency ω _{p of} the MEMS structure, and to track the observer signal in accordance with the tracking of the drive signal.

Furthermore, reference is made to 8th noted that the output signal of the PI controller in the secondary processing branch of an interface 818 is supplied, which outputs the output signal V, which is proportional to the rotation rate (block 819 ). Furthermore, the signal generator 814 used in the secondary branch to the input 803 to drive into the MEMS structure like it out 8th can be seen. In the 8th The circuit shown thus allows two different frequencies and additional high-frequency carrier signals (in particular on the primary drive comb structures) to be fed into the drive, so that an amplitude-modulated signal at the output is used to improve the signal-to-noise ratio 802 results. The processing of this signal in the frequency range provides the high-frequency carrier frequency with the corresponding sidebands of the primary resonance frequency or the reference frequency (observer frequency), with this high-frequency spectrum due to the high pass 806 is determined. The undersampling by means of the analog-digital converter thus pushes the high-frequency carrier to a certain extent into the zero point (ie to 0 Hz), so that in addition the information about the primary resonance frequency or about the reference oscillation is obtained. Thus it becomes possible from the signal at the output 802 the MEMS structure to read in the components based on the drive frequency and the observer frequency and process them accordingly. If the demands on the signal-to-noise ratio are not so high, the separation could also be done by bandpass filtering at the output 802 take place in order to separate the signal components related to ω ₁ and ω ₂ already in the baseband, that is to say without impressing the high-frequency carrier signals.

It should also be noted that the signal generator 814 is configured to on the secondary detection device 108 of 2 , which can simultaneously serve as a secondary excitation device, impress the signal by means of which a rotation rate is simulated. The signal generator 814 would thus the establishment 20 of 2 for generating a secondary excitation signal 109 correspond, wherein the secondary excitation signal 109 is the signal that the signal generator 814 in the secondary branch (with different polarities) to the digital / analog converter 820 and 822 outputs. The signal generator 814 is thus designed to block in 16 of 1 The equation shown must be taken into account in order to generate corresponding secondary control signals from compensation signals, frequency response information and information about a numerically desired rotation rate, which are then sent to the secondary excitation or detection device 108 of 2 within the MEMS structure 800 are feedable.

Depending on the current circumstances, the method according to the invention for characterizing a yaw rate sensor, the method for simulating a yaw rate or the method for initial calibration or the method for recalibration can be implemented in hardware or in software. The implementation can take place on a digital storage medium, in particular a floppy disk or CD with electronically readable control signals, which can interact with a programmable computer system in such a way that the corresponding method is carried out. In general, the invention thus also consists in a computer program product with a program code stored on a machine-readable carrier for carrying out the method or methods according to the invention when the computer program product runs on a computer. In other words, the invention thus also provides a computer program with a program code for carrying out the method if the Com computer program runs on a computer.

The present invention is distinguished by the following advantages:
The invention represents a simple method for the initial calibration of micromechanical yaw rate sensors without the use of a turntable and is correspondingly more economical in comparison to calibration with turntables due to the significantly lower outlay.

Furthermore, due to the recalibration, the preferred embodiment of the present invention is preferably omitted in connection with the reference 8th shown digital evaluation electronics during sensor operation, the time-consuming and therefore costly temperature measurements normally required during the initial calibration.

The inventive concept results in particular with regard to the recalibration in operation in a significantly better drift behavior of the sensor parameters scale factor and zero point, so that also improve accuracy and hence the general performance of the sensors is reached.

The inventive method the determination enables, in particular with regard to the recalibration and the comparison of the sensor parameters scale factors and zero point while of sensor operation and in particular without influencing sensor operation.

Further allows the concept of the invention permanent recalibration of the functionality of the rotation rate sensors for recalibration, which in particular in an increase of reliability results from the functional check.

Claims (41)

Device for characterizing a rotation rate sensor with an oscillating device ( 100 ), a primary excitation device ( 106 ) to drive the vibrating device ( 100 ) to a primary movement ( 102 ), a secondary detection device ( 108 ) for outputting an output signal resulting from a secondary movement ( 104 ) of the vibrating device ( 100 ) and a rotation rate ( 101 ) of the rotation rate sensor depends on a sensitive axis of the same, with the following features: a device ( 10 ) to exert a first acceleration on the vibrating device ( 100 ) in the direction of the primary movement ( 102 ) and a second acceleration on the vibrating device ( 100 ) in the direction of the secondary movement ( 104 ); a device for compensating for a first deflection of the oscillating device ( 100 ) due to the first acceleration to a first compensation signal ( 12a ) and to compensate for a second deflection of the oscillating device ( 100 ) due to the second acceleration to a second compensation signal ( 12b ) to obtain; and a facility ( 14 ) to provide frequency response information ( 22 ) of the vibrating device due to an excitation by the primary excitation device ( 106 ), so that by exciting the vibrating device ( 102 ) in the direction of the secondary movement ( 104 ) a rotation rate acting on the sensor can be simulated, an amplitude ( 109a ) of a secondary excitation signal ( 109 ) to excite the vibrating device ( 100 ) from a primary excitation amplitude ( 107a ) to excite the primary excitation device ( 106 ), a primary excitation frequency ( 107b ), the first compensation signal ( 12a ), the second compensation signal the second compensation signal ( 12b ), the frequency response information ( 22 ) and the rotation rate to be simulated depends. The device of claim 1, wherein the means ( 14 ) for providing the frequency response information has the following features: a device for controlling the primary excitation device ( 106 ) with a number of different primary excitation frequencies ( 107b ); a device for detecting a deflection of the oscillating device ( 100 ) in the direction of the primary movement ( 102 ) for each of the number of primary excitation frequencies to obtain a number of frequency response support information; and a device for evaluating the frequency response support information in order to obtain the frequency response information. Apparatus according to Claim 2, in which the device is designed to evaluate a resonance frequency (ω _p ) and a quality factor (Q _p ) or damping (β _p ) of the oscillating device ( 100 ) due to an excitation of the vibrating device ( 100 ) in the direction of the primary movement ( 102 ) to investigate. Device according to Claim 2 or 3, in which the device for detecting a deflection of the oscillating device ( 100 ) in the primary direction of movement ( 102 ) is designed to receive a detection signal, and in which the device is designed to subject the detection signal to IQ demodulation for each primary excitation frequency using the primary excitation frequency as a local oscillator in order to provide an amplitude-frequency response and a phase response as frequency response information. Get frequency response. Device according to one of the preceding claims, in which the oscillating device ( 100 ) is designed to perform a linear primary movement ( 102 ) and a linear secondary movement ( 104 ), the first and the second acceleration being linear accelerations. The device of claim 5, wherein the first linear Acceleration is the acceleration of gravity, and at which the second linear acceleration is also the acceleration due to gravity. Device according to one of the preceding claims, in which the device ( 10 ) is designed to exert the first and the second linear acceleration in order to position the rotation rate sensor such that the first acceleration in the direction of the primary movement ( 102 ) of the vibrating device and in which the device ( 10 ) for exercising is also designed to position the rotation rate sensor so that the second acceleration acts in the direction of the secondary movement. Apparatus according to claim 7, wherein the device ( 10 ) has a sequence control for exercising, which is designed to first position the rotation rate sensor in such a way that acceleration acts on the oscillating device, and then the device ( 12 ) to compensate with a signal such that a deflection due to the applied acceleration is compensated for in order to obtain a compensation signal ( 12a ) in order to then position the rotation rate sensor so that the other acceleration on the vibrating device ( 100 ) works, then the device ( 12 ) to compensate with such a different signal that a deflection due to the other acceleration is compensated to the other compensation signal ( 12b ) to obtain. Device according to one of the preceding claims, in which the first and the second acceleration are the gravitational acceleration due to the gravitational force of the earth, in which the device ( 10 ) is designed to be exerted in order to tilt the rotation rate sensor from a standard position, such that the primary direction of movement is parallel to the acceleration due to gravity, and wherein the device ( 10 ) for exercising is also designed to tilt the yaw rate sensor out of the standard position so that the secondary direction of movement ( 104 ) is parallel to the acceleration due to gravity. Device according to one of the preceding claims, in which the rotation rate sensor comprises a primary oscillator ( 506 ) and a secondary transducer ( 514 ) which is from the primary oscillator ( 506 ) is orthogonally decoupled such that the primary oscillator and the secondary oscillator together form the oscillation device ( 100 ) form, the primary oscillator being suspended so that the secondary movement cannot be carried out substantially, the secondary oscillator being designed to be able to carry out the primary oscillation and the secondary oscillation, and the primary oscillator being connected to the secondary oscillator such that the primary oscillation of is transferable from the primary oscillator to the secondary oscillator, but that the secondary oscillation cannot be transmitted from the secondary oscillator to the primary oscillator. Device according to one of the preceding claims, which the oscillating device in the direction of a primary resonance frequency the primary movement has, in which the oscillating device in the direction of a secondary resonance frequency the secondary movement has, the primary vibration resonance frequency and the secondary vibration resonance frequency are different, and wherein the primary excitation device can be operated is to the vibrating device in the direction of the primary movement to operate in resonance. Device according to one of the preceding claims, in which the rotation rate sensor is designed to perform a linear primary movement ( 102 ) and a linear secondary movement ( 104 ) to carry out. Device according to one of the preceding claims, further comprising a device for providing further frequency response information of the oscillating device ( 100 ) due to a suggestion from the Schwin device in the secondary movement direction ( 104 ) having. Device according to Claim 13, in which the device for providing further frequency response information has the following features: a device for exciting the secondary movement in the secondary movement direction ( 104 ); and wherein the secondary detection device is designed to detect a secondary movement of the oscillating device on the basis of the excitation by the device for exciting the secondary movement. Device according to one of the preceding claims, in which the rotation rate sensor is a capacitive primary excitation device ( 106 ) and a capacitive secondary detection device ( 108 ) having. Method for characterizing a rotation rate sensor with an oscillating device ( 100 ), a primary excitation device ( 106 ) to drive the vibrating device ( 100 ) to a primary movement ( 102 ), a secondary detection device ( 108 ) for outputting an output signal resulting from a secondary movement ( 104 ) of the vibrating device ( 100 ) and a rotation rate ( 101 ) of the rotation rate sensor depends on a sensitive axis of the same, with the following steps: 10 ) a first acceleration on the vibrating device ( 100 ) in the direction of the primary movement ( 102 ) and a second acceleration on the vibrating device ( 100 ) in the direction of the secondary movement ( 104 ); Compensating for a first deflection of the oscillating device ( 100 ) due to the first acceleration to a first compensation signal ( 12a ) and to compensate for a second deflection of the oscillating device ( 100 ) due to the second acceleration to a second compensation signal ( 12b ) to obtain; and deploy ( 14 ) of frequency response information ( 22 ) of the vibrating device due to an excitation by the primary excitation device ( 106 ), so that by exciting the vibrating device ( 102 ) in the direction of the secondary movement ( 104 ) a rotation rate acting on the sensor can be simulated, an amplitude ( 109a ) of a secondary excitation signal ( 109 ) to excite the vibrating device ( 100 ) from a primary excitation amplitude ( 107a ) to excite the primary excitation device ( 106 ), a primary excitation frequency ( 107b ), the first compensation signal ( 12a ), the second compensation signal ( 12b ), the frequency response information ( 22 ) and the rotation rate to be simulated depends. Device for simulating a rotation rate, which acts on a rotation rate sensor, the rotation rate sensor being an oscillating device ( 100 ), a primary excitation device ( 106 ) to drive the vibrating device ( 100 ) to a primary movement ( 102 ), a secondary detection device ( 108 ) for outputting an output signal resulting from a secondary movement ( 104 ) of the oscillation device and depends on a rotation rate of the rotation rate sensor about a sensitive axis thereof, with the following features: a device ( 24 ) for providing a value of a first compensation signal ( 12a ) and a value of a second compensation signal ( 12b ), the values of the first and the second compensation signal being selected such that a deflection of the oscillating device due to a first acceleration in the direction of the primary movement is compensated, and that a deflection of the oscillating device due to a second acceleration in the direction of the secondary movement ( 104 ) is compensated, and to provide frequency response information ( 22 ) of the vibrating device ( 100 ) due to an excitation by the primary excitation device ( 106 ); and a facility ( 20 ) for generating and applying a simulation signal ( 109 ) to the secondary recording device ( 108 ) to a secondary movement of the vibrating device ( 100 ) to generate, wherein a frequency of the simulation signal is equal to a frequency of a primary excitation signal ( 107 ) for the primary excitation device ( 106 ), and where an amplitude ( 109a ) of the simulation signal from the first compensation signal ( 12a ), from the second compensation signal ( 12b ), an amplitude of the primary excitation signal, the frequency of the primary excitation signal and the frequency response information ( 22 ) and a value of the rotation rate to be simulated, so that the oscillating device ( 100 ) a defined secondary movement can be carried out that corresponds to a secondary movement ( 104 ) of the vibrating device ( 100 ) within a predetermined range that the vibrating device ( 100 ) if the simulated yaw rate is the actual yaw rate ( 101 ) would concern. The apparatus of claim 17, wherein the amplitude of the simulation signal is determined according to the following equation:

where U _{x1g is} the first compensation _signal , where U _{y1g is} the second compensation _signal , where ω is a frequency of the primary _{excitation signal} , where ω _{p is} a resonance frequency of the vibrating _{device in} the _{primary direction of movement} , where β _{p is} a damping of the vibrating device ( 100 ) is in the primary direction of movement, where Ω is the rotation rate to be simulated, and where U _{x is} an amplitude of the primary excitation signal. Apparatus according to claim 17, wherein the frequency of the primary excitation signal is equal to the resonance frequency of the oscillating device in the primary direction of movement, wherein the amplitude of the simulation signal is determined according to the following equation:

Apparatus according to claim 18, wherein the device ( 24 ) is designed to provide according to one of claims 1 to 15. Method for simulating a yaw rate acting on a yaw rate sensor, the yaw rate sensor being an oscillating device ( 100 ), a primary excitation device ( 106 ) to drive the vibrating device ( 100 ) to a primary movement ( 102 ), a secondary detection device ( 108 ) for outputting an output signal resulting from a secondary movement ( 104 ) of the oscillating device and depends on a yaw rate of the yaw rate sensor about a sensitive axis thereof, with the following steps: 24 ) a value of a first compensation signal ( 12a ) and a value of a second compensation signal ( 12b ), the values of the first and the second compensation signal being selected such that a deflection of the oscillating device due to a first acceleration is compensated, and that a deflection of the oscillating device due to a second acceleration in the direction of the secondary movement ( 104 ) is compensated, and to provide frequency response information ( 22 ) of the vibrating device ( 100 ) due to an excitation by the primary excitation device ( 106 ); and create ( 20 ) and applying a simulation signal ( 109 ) to the secondary recording device ( 108 ) to a secondary movement of the vibrating device ( 100 ) to generate, wherein a frequency of the simulation signal is equal to a frequency of a primary excitation signal ( 107 ) for the primary excitation device ( 106 ), and where an amplitude ( 109a ) of the simulation signal from the first compensation signal ( 12a ), from the second compensation signal ( 12b ), an amplitude of the primary excitation signal, the frequency of the primary excitation signal and the frequency response information ( 22 ) and a value of the rotation rate to be simulated, so that the oscillating device ( 100 ) a defined secondary movement can be carried out that corresponds to a secondary movement ( 104 ) of the vibrating device ( 100 ) within a predetermined range that the vibrating device ( 100 ) if the simulated yaw rate is the actual yaw rate ( 101 ) would concern. Device for calibrating a rotation rate sensor with an oscillating device ( 100 ), a primary excitation device ( 106 ) to drive the vibrating device ( 100 ) to a primary movement ( 102 ), a secondary detection device ( 108 ) for outputting an output signal resulting from a secondary movement ( 104 ) of the vibrating device ( 100 ) and a rotation rate ( 101 ) of the rotation rate sensor depends on a sensitive axis of the same, with the following features: a device ( 24 ) for providing a value of a first compensation signal ( 12a ) and a value of a second compensation signal ( 12b ), the values of the first and second compensation signals being selected such that a deflection of the oscillating device due to a first acceleration in the direction of the primary movement is compensated, and that a deflection of the oscillating device due to a second acceleration in the direction of the secondary movement ( 104 ) is compensated, and for providing frequency response information of the oscillating device ( 100 ) due to an excitation by the primary excitation device ( 106 ); a facility ( 20 ) for generating and applying a simulation signal ( 109 ) to the secondary recording device ( 108 ) to a secondary movement of the vibrating device ( 100 ) to generate, wherein a frequency of the simulation signal is equal to a frequency of a primary excitation signal ( 107 ) for the primary excitation device ( 106 ), and where an amplitude ( 109a ) of the simulation signal from the first compen station signal ( 12a ), from the second compensation signal ( 12b ), an amplitude of the primary excitation signal, the frequency of the primary excitation signal and the frequency response information ( 22 ) and a value of the rotation rate to be simulated, so that the oscillating device ( 100 ) a defined secondary movement can be carried out that corresponds to a secondary movement ( 104 ) of the vibrating device ( 100 ) within a predetermined range that the vibrating device ( 100 ) if the simulated yaw rate is the actual yaw rate ( 101 ) would concern; means for measuring a first output signal (V ₁ ) based on an applied first simulation signal; a device for applying a second simulation signal with a frequency different from the frequency of the first simulation signal; a facility ( 32 ) for measuring a second output signal based on the second simulation signal; and a facility ( 34 ) for calculating calibration information, which depends on a multiplier (k _SF ) for a desired scaling factor, on the basis of the first output signal (V ₁ ), on the basis of the second output signal (V ₂ ), on the basis of the first rotation rate (Ω ₁ ), on the basis of the second rate of rotation (Ω ₂ ) and due to the target scaling factor. The apparatus of claim 22, wherein the first rate of rotation defines a first limit of a specified measurement range, and wherein the second rate of rotation (Ω ₂ ) defines a second limit of a specified measurement range. Apparatus according to claim 22 or 23, further comprising: means for calculating a zero point adjustment value (k _NP ) based on a measured output signal (NP ₀ *) of the means for measuring ( 32 ) without a simulation signal. Method for calibrating a rotation rate sensor with an oscillating device ( 100 ), a primary excitation device ( 106 ) to drive the vibrating device ( 100 ) to a primary movement ( 102 ), a secondary detection device ( 108 ) for outputting an output signal resulting from a secondary movement ( 104 ) of the vibrating device ( 100 ) and a rotation rate ( 101 ) of the rotation rate sensor around a sensitive axis of the same, with the following steps: 24 ) a value of a first compensation signal ( 12a ) and a value of a second compensation signal ( 12b ), the values of the first and the second compensation signal being selected such that a deflection of the oscillating device due to a first acceleration is compensated, and that a deflection of the oscillating device due to a second acceleration in the direction of the secondary movement ( 104 ) is compensated, and for providing frequency response information of the oscillating device ( 100 ) due to an excitation by the primary excitation device ( 106 ); Generation of a simulation signal and application ( 20 ) of the simulation signal ( 109 ) to the secondary recording device ( 108 ) to a secondary movement of the vibrating device ( 100 ), wherein a frequency of the simulation signal is equal to a frequency of a primary excitation signal ( 107 ) for the primary excitation device ( 106 ), and where an amplitude ( 109a ) of the simulation signal from the first compensation signal ( 12a ), from the second compensation signal ( 12b ), an amplitude of the primary excitation signal, the frequency of the primary excitation signal and the frequency response information ( 22 ) and a value of the rotation rate to be simulated, so that the oscillating device ( 100 ) a defined secondary movement can be carried out that corresponds to a secondary movement ( 104 ) of the vibrating device ( 100 ) within a predetermined range that the vibrating device ( 100 ) if the simulated yaw rate is the actual yaw rate ( 101 ) would concern; Measuring a first output signal (V ₁ ) based on an applied first simulation signal; Generating and applying a second simulation signal with a frequency different from the frequency of the first simulation signal; Measure up ( 32 ) a second output signal based on the second simulation signal; and calculate ( 34 ) of calibration information, which depends on a multiplier (k _SF ) for a desired scaling factor, on the basis of the first output signal (V ₁ ), on the basis of the second output signal (V ₂ ), on the basis of the first rotation rate (Ω ₁ ), on the basis of the second rotation rate (Ω ₂ ) and due to the target scaling factor. Device for recalibrating a preset scale factor of a rotation rate sensor with an oscillating device ( 100 ), a primary excitation device ( 106 ) to drive the vibrating device ( 100 ) to a primary movement ( 102 ), a secondary detection device ( 108 ) for outputting an output signal resulting from a secondary movement ( 104 ) of the vibrating device ( 100 ) and a rotation rate ( 101 ) of the rotation rate sensor depends on a sensitive axis of the same, with the following features: a primary device ( 40 ) to control the primary drive device with a primary control signal, which has a first control component at a drive frequency (ω ₁ ) and a second control component at an observer frequency (ω ₂ ); a facility ( 42 ) for frequency-selective detection of the output signal in order to obtain a first output signal component (V ₁ ) on the basis of the first drive component and a second output signal component (V ₂ ) on the basis of the second drive component; An institution ( 44 ) to simulate a rotation rate (Ω _E ) by exciting the vibrating device ( 100 ) in the direction of the secondary movement ( 104 ) with a secondary control signal that is set so that the defined yaw rate (Ω _E ) is simulated, the secondary control amplitude depending on the second control component with the observer frequency (ω ₂ ); a sequence control device ( 46 ) to read the device ( 42 ) for frequency-selective detection at a first point in time (i), at a second point in time (j) and at a third point in time (k), the sequence control device ( 46 ) is also effective to establish ( 44 ) for simulation, so that at the third point in time (k) the secondary detection device ( 108 ) with the secondary control signal ( 109 ) controls; and a facility ( 48 ) for calculating calibration information that depends on a current calibration factor (k _SF ) using an output signal of the device ( 42 ) for frequency-selective detection at the first point in time (i), the second point in time (j) and the third point in time (k) and using the defined rotation rate (Ω _E ). Apparatus according to claim 26, wherein the device ( 48 ) is designed to calculate to determine the current correction factor from a ratio between the preset scale factor and a calculated current scale factor in order to correct an output signal based on the first drive component using the current correction factor and the preset scale factor in order to obtain a recalibrated output signal , Apparatus according to claim 26 or 27, in which the means for calculating is designed to operate using the following equation:

where V _1i '' is the first output signal _component at time i, V _2i '' is the second output signal component at time i, V _1j '' is the first output signal component at time j, V _2j '' is the second output signal component at time j, and where V _1k "is the first output signal component at time k, where V _2k " is the second output signal component at time k, where k _{SF is} the current calibration factor, where Ω _{E is} the rotation rate simulated at time k, and where SF _{1 is} the preset scale factor. Apparatus according to claim 26, wherein the device ( 48 ) is designed to compute to operate using the following equation:

where V _1i ″ is the first output signal _component at time i, V _2i ″ is the second output signal _component at time i, V _1j ″ is the first output signal _component at time j, V _2j ″ is the second output signal _component at time j and where V _1k "is the first output signal component at time k, where V _2k " is the second output signal component at time k, where k _{SF is} the current calibration factor, where Ω _{E is} the rotation rate simulated at time k, and where SF _{1 is} the preset scale factor. Device according to one of Claims 26 to 28, in which the device ( 42 ) is designed for simulation in order to apply a secondary drive signal with a frequency equal to the observer frequency. Device according to one of Claims 26 to 29, in which the device ( 44 ) is designed for simulation in order to set an amplitude of the secondary drive signal such that the amplitude ( 109a ) of the Se secondary excitation signal ( 109 ) to excite the vibrating device ( 100 ) from a primary excitation amplitude ( 107a ) to excite the primary excitation device ( 106 ), a primary excitation frequency ( 107b ), the first compensation signal ( 12a ), the second compensation signal ( 12b ), the frequency response information ( 22 ) and the rotation rate to be simulated, so that by exciting the oscillating device ( 102 ) in the direction of the secondary movement ( 104 ) a rotation rate acting on the sensor can be simulated. Device according to one of claims 26 to 30, wherein the Drive frequency equal to a resonance frequency of the vibrating device due to a primary movement is. Device according to one of Claims 26 to 31, in which the device ( 44 ) is designed to simulate the secondary control signal depending on a regulation ( 49 ) of the primary control signal. Apparatus according to claim 32, wherein the rotation rate sensor further comprises a control device ( 49 ) to perform an amplitude and / or phase control of the primary drive signal. Apparatus according to claim 32 or 33, wherein an amplitude of the secondary drive signal is defined as follows:

where U _y 'is an amplitude of the secondary drive signal at a temperature (T), where ω _{p is} a primary resonance frequency of the oscillating device at a reference temperature, where ω _{2 is} the observer frequency at the reference temperature, where β _{p is} a primary attenuation at the reference temperature, where U _{x is} a primary drive amplitude at the reference temperature, where U _{y is} a secondary drive amplitude at the reference temperature, where ω ' _{p is} a primary resonance frequency at the current temperature, where ω ₂ ' is an observer frequency at the current temperature, with β ' _{p being} a primary damping at current temperature is. Apparatus according to any one of claims 26 to 34, further comprising: means for calculating a current zero point signal based on a first output signal at a first time and a second output signal at another time and based on the current correction factor (k _SF ); and means for calculating a calibrated zero point for the first output signal component based on a difference between the current zero point signal and a target zero point signal. Apparatus according to claim 35, in which the means for calculating is designed to calculate the current zero point signal as follows:

where NP ₁ 'is the current zero point _signal , where V _1i ''is the first output signal _component at time i, where V _2i ''is the second output signal _component at time i, where V' _{1l is} the first output signal _component at time i, where V '' _{2l is} the second output signal _component at time l, where k _{SF is} the current calibration _factor . Apparatus according to any one of claims 26 to 34, the following Feature has: a device for calculating a current Zero point signal based on a first output signal first time and a first corrected with the scale factor Output signal at the first time. Device according to one of claims 26 to 34, having the following feature: a device for providing a characterization of sensor parameters scale factor and zero point over temperature; and means for recovering a current zero point signal based on the calculated current scale factor. Method for recalibrating a preset scale factor of a rotation rate sensor with an oscillating device ( 100 ), a primary excitation device ( 106 ) to drive the vibrating device ( 100 ) to a primary movement ( 102 ), a secondary detection device ( 108 ) for outputting an output signal resulting from a secondary movement ( 104 ) of the vibrating device ( 100 ) and a rotation rate ( 101 ) of the yaw rate sensor depends on a sensitive axis of the same, with the following steps: 40 ) the primary drive device with a primary control signal, which has a first control component at a drive frequency (ω ₁ ) and a second control component at an observer frequency (ω ₂ ); frequency selective detection ( 42 ) of the output signal in order to obtain a first output signal component (V ₁ ) due to the first drive component and a second output signal component (V ₂ ) due to the second drive component; Simulate ( 44 ) a rotation rate (Ω _E ) by exciting the oscillating device ( 100 ) in the direction of the secondary movement ( 104 ) with a secondary control signal that is set so that the defined yaw rate (Ω _E ) is simulated, the secondary control amplitude depending on the second control component with the observer frequency (ω ₂ ); wherein the step of frequency-selective detection is carried out at a first point in time (i), at a second point in time (j) and at a third point in time (k), and the step of simulating is carried out at the third point in time (k); and calculate ( 48 ) calibration information that depends on a current calibration factor (k _SF ) using an output signal of the device ( 42 ) for frequency-selective detection at the first point in time (i), the second point in time (j) and the third point in time (k) and using the defined rotation rate (Ω _E ). Computer program with a program code for performing the Method according to one of the claims 16, 21, 25 or 39.