DE102021207980A1 - METHOD AND DEVICE FOR SYNCHRONIZING MULTIPLEX MEASUREMENTS WITH OPTICAL SENSORS - Google Patents

Abstract

A device for synchronizing multiplex measurements comprises a detector, which is designed to detect at least one first electromagnetic measuring beam and to convert it into an electrical measurement signal, and detector electronics, which are designed to assign at least one first status signal in terms of time and/or synchronously to obtain the detection of the electromagnetic measuring beam and to couple the status signal with the electromagnetic measuring signal for informational purposes.

Description

technical field

Embodiment of the present invention relates to a device for the non-contact measurement of distances or layer thicknesses, in particular to a device for measuring distances or layer thicknesses by means of an image recording. Exemplary embodiments according to the present invention relate to optical sensors, in particular distance measuring sensors or non-contact measuring of distances between sensor and measurement object. The present invention further relates to a device for synchronizing multiplex measurements with optical sensors and to a method for providing a device for synchronizing multiplex measurements.

background

Distance sensors or optical sensors are able to carry out non-contact measurements in which a measurement radiation radiates along a propagation direction between the sensor and the measurement object. A technical area of application for optical sensors is the non-contact measurement of distances between the sensor and the measurement object. In this case, an optical distance sensor usually determines only a single distance along a propagation direction of the measurement radiation. If it is necessary to monitor further distances in other directions or even at other measurement locations, additional distance sensors are required. In the field of optical distance sensors, it can be economical to use a measuring device not only for distance measurements in one direction or at one measuring point, but for distance measurements in several directions or at several measuring points. This is called multiplexing. A distinction is made between spatial multiplexing and time multiplexing.

With local multiplexing, the measurement radiation can be divided into two beam paths at a beam splitter, for example, in order to record the distances to two different measurement locations at the same time. This works as long as the measurement signals can be distinguished from one another and do not interfere with one another during the evaluation. In order to monitor and control industrial processes, a clear assignment of a measured distance to the measurement location is absolutely necessary. As the number of simultaneously measured distances increases, the complexity of clearly assigning a measured distance to the measurement location increases significantly.

• • Scannen: die Messstrahlung wird z. B. mit einem elektromagnetisch bewegten Spiegel abgelenkt.
• • Schalten: die Messstrahlung wird, wenn sie z. B. in einem Lichtwellenleiter geführt wird, von einem elektronisch ansteuerbaren faseroptischen Schalter wahlweise in Richtung verschiedener, weiterführender Lichtwellenleiter gelenkt. Eine Alternative ist die Verwendung mehrerer Strahlquellen, die auf jeweils unterschiedliche Messorte strahlen und zeitversetzt aktiv geschaltet werden.

The term "time multiplexing" refers to measurements with a measuring device that take place in a chronological sequence at different measuring locations. In other words, measurements with an optical sensor can be carried out in different spatial directions or at different measurement locations. Typical procedures are:

• • Scanning: the measuring radiation is z. B. deflected with an electromagnetically moving mirror.
• • Switching: the measuring radiation is switched on if it is e.g. B. is guided in an optical waveguide, optionally directed by an electronically controllable fiber-optic switch in the direction of different, further optical waveguides. An alternative is the use of several beam sources, which each radiate to different measurement locations and are activated with a time delay.

In order to be able to unambiguously assign the measurement result and measurement location to one another, the chronological sequence can be specified in advance or the system status can be continuously recorded. The procedure for pre-determining the chronological sequence happens before the start of the measurement and provides information about the sequence and the measurement location. A scanner or a switch and an evaluation unit receive z. B. from a control entity before the start of a measurement, the information in which order the measurements are carried out at specified measurement locations. Scanning or switching processes usually have to start synchronously with the measurement beam detection. If a scanning, switching or detection process is not carried out as specified for any reason, subsequent measurements and measurement locations can no longer be correctly assigned to one another.

Continuous measurements with additional acquisition and transmission of system states with internal time stamps are expensive and may require the use of additional or complex data lines. Depending on the type of measurement information, the amount of time stamp data can even be significantly larger than the amount of measurement data itself. In addition, the chronological assignment of the data sets usually requires an interpolation of the position or measurement information, which is associated with losses in accuracy. An object of the present invention is therefore to provide a device z. B. to create a distance sensor that can measure several distances simultaneously or in a chronological sequence in different directions and at different measuring locations, and is designed to enable quick changes of the measuring locations and a clear assignment of a measured distance or several measured distances to the to ensure the respective measurement location.

This object is solved by the subject matter of the independent patent claim. A core idea of the present invention consists in having recognized that a system status signal is time-fixedly linked to the exposure of a detector in order to synchronize multiplex measurements with optical sensors.

Summary of the Invention

An embodiment according to the present invention comprises a device for non-contact measurement, e.g. B. Multiplex measurements with at least one detector that is designed to detect a first electromagnetic measuring beam originating from at least one electromagnetic radiation source and to convert it into an electrical measurement signal, and detector electronics that are designed to generate a first status signal, for example starting from the electromagnetic radiation source, in terms of time unambiguously assignable and/or synchronous to the detection of the first electromagnetic measuring beam and to couple the first status signal and the first electromagnetic measuring beam for informational purposes. For example, the first electromagnetic measuring beam can include a measuring beam that z. B. along a first propagation direction and z. B. radiates or is guided along a second propagation direction, starting from the electromagnetic radiation source. In other words, during non-contact measurement, the device can synchronize the first status signal and the electromagnetic measuring beam, so that the information of the status signal is coupled with the information of the electromagnetic measuring beam.

For example, the electromagnetic radiation source can be electrically connected to the detector electronics. For example, the electromagnetic radiation source can be integrated in a common housing of the device and z. B. form an optoelectric sensor or be electrically coupled to the device as an external system or installation, circuit, i.e. outside or spatially separated in another housing from the device. For example, the detector electronics can detect the electrical status signal via at least one synchronization input. In other words, the optoelectronic sensor can be, for example, a light source, e.g. B. electromagnetic radiation source, a light receiver, z. B. detector, optical lenses, a logic circuit, z. B. have detector electronics and a switching output. The optical, non-contact detection of distances, layer thicknesses and the associated status signals is carried out, for example, with measuring frequencies from 1 kHz to 1 MHz.

For example, an embodiment according to the present invention includes the first status signal and a second status signal. The explicit information of the time, for example by a time stamp or a chronological sequence, is not necessary, since the status information is transmitted directly to the detector electronics and is recorded synchronously with the measurement signal or in a time-specific manner. The status signal contains status information, for example, which indicates whether a radiation source is active. The number of radiation sources is not limited to a single one. Rather, a large number of radiation sources are possible, each of which is electrically coupled to the device and transmits or sends status information to the device in order to record the essential status information in the status signal in a time-assignable and/or synchronous manner with the electrical measurement signal, so that the status signal is fixed in time with is coupled to the exposure of the detector. The status information can thus contain information about which radiation sources are active, for example. Additional status information may include, for example, a status of a fiber optic switch, a status and/or a position of a rotary encoder, a glass scale, a traversing device or a robot. Furthermore, status information z. B. switch positions, modulation frequencies, wavelengths, beam diameters, radiation intensities, pulse durations, polarization states, range and scanning distance.

According to a further exemplary embodiment, the device includes the detector, the detector being designed to detect a second electromagnetic measuring beam and to convert it into an electrical measuring signal. The device also includes the detector electronics, which are designed to receive a second status signal that can be assigned in terms of time and/or synchronously with the detection of the second electromagnetic measuring beam and to couple the second status signal and the second electromagnetic measuring beam for informational purposes. In other words, the detector can detect a large number of electromagnetic measurement beams and convert them, for example, into an electrical measurement signal and/or into a large number of electrical measurement signals. In this case, the number of electromagnetic measuring beams can be equal to the number of electrical measuring signals. Likewise, the number of electromagnetic measuring beams can differ from the number of electrical measuring signals and can be smaller or larger, for example. For example, two or more electromagnetic measurement beams that strike the detector can be converted into an electrical measurement signal. Conversely, for example, an electromagnetic measuring beam on the detector meet and there z. B. separately detected by polarization or wavelength and converted into two or more electrical measurement signals.

According to a further exemplary embodiment, the device comprises the detector electronics, which are designed to vary a start of exposure and an exposure duration of the detector exposure, e.g. B. by external control signals or by synchronization signals. In other words, the start of exposure and the duration of exposure can be variably controlled by a clock generator or a predetermined synchronization frequency, for example. For example, the exposure can be changed by means of pulse duration modulation, pulse length modulation, pulse width modulation or pulse width modulation. In particular, part of a status signal can also be used to control the exposure duration.

According to a further exemplary embodiment, the status signal is detected before, at the beginning, during, at the end and/or after the exposure of the detector. In other words, the detection electronics can detect the state of the electromagnetic radiation source before, at the beginning, during, at the end and/or after the exposure of the detector or the detection of the measurement radiation and the measurement and state information recorded in a temporally assignable and/or synchronous manner using a Transmit output signal to an evaluation unit. Evaluation units are, for example, personal computers, field programmable gate arrays (FPGAs) and microcontrollers. For example, the state of the electromagnetic radiation source or the state signal can be encoded in binary. Since there is no chronological assignment of time stamps by means of an interpolation of the measurement information, the accuracy of the measurement can be improved. Since a large number of items of status information can be assigned in terms of time and/or recorded synchronously with the measurement signal, continuous measurements can be implemented with little post-processing effort.

According to a further exemplary embodiment, the detector electronics include a digital input or an analog input as the synchronization input. Thus, for example, digital signals, z. B. from microcontrollers, or analog signals, z. B. of engines detect.

According to a further exemplary embodiment, the device comprises a detector, the detector having a light-sensitive line detector or an area detector in order to convert the electromagnetic measuring beam from at least one electromagnetic radiation source into the electrical measuring signal. For example, the detector can be a semiconductor detector, e.g. B. consists of a one-dimensional field or array of photodetectors or other detector elements. In other words, the one-dimensional array can have an arrangement of similar elements, for example the detectors, in a fixed manner. Furthermore, CCD, CMOS, InGaAs, InSb, HgTe and bolometric sensors as well as analog sensors are possible.

Further exemplary embodiments create devices in which the detector electronics are designed to combine the electrical measurement signal and the status signal in a line image or an area image, with at least one first pixel of the line image or of the area image providing measurement information based on the electrical measurement signal, and at least one pixel at least has status information based on the status signal. For example, the line image or the area image can be combined in a line detector or an area detector. For example, a pixel of the line image or of the area image can have the measurement information and the status information, for example as coded status information. Furthermore, a first pixel can have measurement information based on the measurement signal and a second pixel can have the coded status information based on the status signal. In other words, the state of the electromagnetic radiation source is detected via digital synchronization inputs and binary coded in a pixel z. B. written a camera image. As a result, the state of the electromagnetic radiation source can be integrated directly into the camera image at the corresponding point in time when the image was recorded, in order to be able to assign the state and the image recorded in a data record, e.g. B. to get the camera image. The use of a selected pixel does not usually represent any relevant loss of image information, since, for example, an image with 1920 x 1080 pixels (Full HD) consists of around two million pixels. Since the status information or the measurement information is not interpolated, a high degree of accuracy of the status information or the measurement information in the output signal can be ensured. In other words, measurement and status information is transmitted together as an image to an evaluation unit after it has been combined.

According to one embodiment, the device includes measurement information that reaches the detector as a spectrally resolved interferogram. In other words, the measurement information can include a superimposition of electromagnetic waves, for example the first electromagnetic measurement beam from the first radiation source and/or other electromagnetic measurement beams. With the help of the interferogram, the Superimposed wave can be recorded with a detector, for example, and used for distance measurement, refractive index measurement, angle measurement and spectroscopic measurements.

Further exemplary embodiments create devices in which the detector is designed to convert the first and/or further electromagnetic measuring beams, starting from at least two electromagnetic radiation sources, into the electrical measuring signal. In other words, an electromagnetic radiation source can be integrated within the device and further electromagnetic radiation sources can be arranged outside or spatially separated or adjacent to the device, so that the detector detects direct and/or reflected measurement radiation, for example. The electromagnetic measuring beams from the electromagnetic radiation sources can, for example, strike a measurement object at different locations or strike different measurement objects and thus enable measurement at a number of locations or measurement objects.

According to one exemplary embodiment, the device includes the detector, which is designed to combine the electromagnetic measuring beam of the at least two electromagnetic radiation sources before or after an interaction with at least one measurement object in such a way that the electromagnetic measuring beams are three-dimensionally superimposed and hit the detector together. In particular, the measuring beams can strike the detector with a time delay, so that only the light from a single beam source strikes the detector during an exposure. In particular, beam splitters or fiber networks can be used to superimpose the electromagnetic measuring beams.

According to a further exemplary embodiment, the device comprises a detector which is designed to convert the electromagnetic measurement beams, starting from at least two electromagnetic radiation sources, into the electrical measurement signal, for example, with no, one or more electromagnetic radiation sources being active at the same time. In other words, the detector can convert a large number of measurement beams, starting from a large number of electromagnetic radiation sources, into an electrical measurement signal. In this case, none of the radiation sources can be active or only one or more radiation sources can be active at the same time. For example, a radiation source can serve as a reference signal and a further radiation source can serve as measurement radiation. Optionally, the first radiation source can emit the measurement radiation along a first propagation direction and a further radiation source can emit the measurement radiation along a second propagation direction. The response times of the radiation sources are, for example, in the nano to microsecond range. The switching frequencies of the radiation sources or other electro-optical elements of optical sensors are, for example, in the hertz to megahertz range.

Further exemplary embodiments create devices in which at least one electromagnetic radiation source comprises a semiconductor emitter, in particular a superluminescent diode and/or a laser diode. For example, the device can have two semiconductor emitters that are switched on and off alternately by a higher-level controller or by the device itself. The digital synchronization output can be switched on and off by switching the diode currents on and off. For example, the state of the semiconductor emitters can be transmitted from driver electronics to the semiconductor emitters themselves to the detector electronics. For example, the state of the semiconductor emitters may include a change in on/off switching frequency or repeated use of a semiconductor emitter, for example. In order to be able to ensure the reliability and accuracy of the time multiplexing, a very fast change in the microsecond range or also nanosecond range between different states, e.g. B. when switching electromagnetic radiation sources required. Semiconductor emitters, in particular, can carry out abrupt switching processes with rise times in the nanosecond range and can thus realize very rapid changes between different states, ie between different radiation sources or measurement locations, with little time expenditure.

Further exemplary embodiments create devices in which at least one electromagnetic radiation source is designed to switch the first electromagnetic measuring beam between at least two beam paths or between at least two radiation states. For example, the electromagnetic radiation source can have a first beam path for the first measurement radiation and a second beam path for the second measurement radiation, e.g. B. to achieve a temporal and / or spatial deviation of the measurement radiation. Alternatively, the electromagnetic radiation source can switch between two radiation states, for example "activated" and "deactivated". For example, the radiation state can include a change in the radiation intensity or the polarization in order to adapt the measurement conditions to a measurement object and thus to provide an optimal measurement result.

According to a further exemplary embodiment, at least one beam path of the first electromagnetic measuring beam is deflected by means of a beam deflection direction changeable. For example, the beam path can also include a change in the direction of the beam path of the electromagnetic measuring beam, which can be changed, deflected or modified, for example, by means of the beam deflection device. Examples of beam deflection devices are galvanometer scanners, polygon scanners, piezo tilting systems, MEMS systems and acousto-optical modulators. For example, by connecting a beam path to a first measurement location and the second beam path to a second measurement location, e.g. B. adjacent to the first measurement location, a line or an area can be scanned by time multiplexing.

According to one embodiment, at least one of the beam paths of the electromagnetic measuring beam can be selectable by means of an optical switch or a fiber optic switch. In other words, at least one beam path can be connected to an optical switch or a fiber optic switch in order to distribute an electromagnetic measurement radiation to two or more beam paths or to guide the electromagnetic measurement radiation from two or more beam paths to one or more detectors.

Further exemplary embodiments create devices in which a sequence of the switching on and off processes of the at least two electromagnetic radiation sources or a sequence between the at least two beam paths or between at least two radiation states can be defined and/or changed at runtime. In other words, e.g. B. by another controller, the sequence of switching on and off or the sequence of the circuit or the sequence of the radiation states of the radiation sources or the beam paths can be defined and changed at runtime in order to increase the setting options of the measuring beam of the electromagnetic radiation sources. The information about the sequence can be transmitted from the further controller to the radiation source in order to compare and adapt the sequence of the switching on and off processes with the radiation sources.

The method is based on the same considerations as the device for synchronizing non-contact measurements described above.

The method can optionally be supplemented with all the features, functionalities and details that are also described here with regard to the device, both individually and in combination.

It should also be pointed out that all of the exemplary embodiments described above can optionally be supplemented by the features, functionalities and details described below, both individually and in combination.

character list

• 1 ein schematisches Blockschaltbild einer Vorrichtung zum Synchronisieren von Multiplex-Messungen gemäß einem Ausführungsbeispiel der vorliegenden Erfindung;
• 2 ein schematisches Diagramm eines Verfahrens zum Synchronisieren von Multiplex-Messungen gemäß einem Ausführungsbeispiel der vorliegenden Erfindung;
• 3 ein schematisches Diagramm eines Verfahrens zum Synchronisieren von Multiplex-Messungen gemäß einem weiteren Ausführungsbeispiel der vorliegenden Erfindung;
• 4 ein schematisches Diagramm eines Verfahrens zum Synchronisieren von Multiplex-Messungen gemäß einem weiteren Ausführungsbeispiel der vorliegenden Erfindung;
• 5 eine schematische Darstellung einer Vorrichtung zum Synchronisieren von Multiplex-Messungen gemäß einem weiteren Ausführungsbeispiel der vorliegenden Erfindung;
• 6 eine schematische Darstellung einer Vorrichtung zum Synchronisieren von Multiplex-Messungen gemäß einem weiteren Ausführungsbeispiel der vorliegenden Erfindung; und
• 7 ein schematisches Diagramm eines Verfahrens zur Anpassung der Belichtungszeit bei synchronisierten Multiplex-Messungen gemäß einem weiteren Ausführungsbeispiel der vorliegenden Erfindung.

Preferred embodiments of the present invention are explained below with reference to the accompanying drawings. Show it:

• 1 a schematic block diagram of a device for synchronizing multiplex measurements according to an embodiment of the present invention;
• 2 12 is a schematic diagram of a method for synchronizing multiplex measurements according to an embodiment of the present invention;
• 3 12 is a schematic diagram of a method for synchronizing multiplex measurements according to another embodiment of the present invention;
• 4 12 is a schematic diagram of a method for synchronizing multiplex measurements according to another embodiment of the present invention;
• 5 a schematic representation of a device for synchronizing multiplex measurements according to a further embodiment of the present invention;
• 6 a schematic representation of a device for synchronizing multiplex measurements according to a further embodiment of the present invention; and
• 7 a schematic diagram of a method for adjusting the exposure time in synchronized multiplex measurements according to a further embodiment of the present invention.

In the following, examples of the present disclosure are described in detail and using the attached figures. In the accompanying specification, many details are set forth in order to provide a more thorough explanation of examples of the disclosure. However, it will be apparent to those skilled in the art that other examples can be implemented without these specific details. Features of the different examples described can be combined with one another, unless features of a corresponding combination are mutually exclusive or such a combination is expressly excluded.

It should be noted that the same or similar elements or elements that have the same functionality can be provided with the same or similar reference numbers or are referred to in the same way, with a repeated description of elements provided with the same or similar reference numbers or being the same are denoted, is typically omitted. Descriptions of elements that have the same or similar reference numerals or are labeled the same are interchangeable.

Detailed description

1 FIG. 1 shows a schematic block diagram of a device 100 for synchronizing multiplex measurements according to an embodiment of the present invention. The device 100 comprises at least one detector 110 which is designed to detect a first electromagnetic measurement beam 132 and to convert it into an electrical measurement signal 112 . Device 100 also includes detector electronics 120, which are designed to receive a first status signal 134 that can be assigned in time and/or synchronously with the detection of first electromagnetic measuring beam 132 and to couple first status signal 134 and first electromagnetic measuring beam 132 for information purposes.

2 FIG. 2 shows a schematic diagram of a method 200 for synchronizing multiplexed measurements according to an embodiment of the present invention. The method 200 includes converting 210 electromagnetic radiation into an electrical measurement signal, synchronously detecting 220 a status signal and the electrical measurement signal, and permanently coupling the status signal to the electrical measurement signal.

3 12 shows a schematic diagram of a method 300 for synchronizing multiplex measurements according to an embodiment of the present invention, in which steps 310, 320, 330 and 340 can optionally be combined with the method 200 for synchronizing multiplex measurements.

First, in step 310, an exposure start and an exposure duration are variably controlled. Step 310 can, for example, follow step 230 and e.g. B. be controlled by a detector electronics within the device or by means of external control or synchronization signals.

In a further step 320, a status signal changes before, at the beginning, during, at the end and/or after an exposure. Step 220 of the method 200 can have steps 310 and 320, so that the synchronous detection of the status signal and the electrical measurement signal also detects a change in the status signal before, at the beginning, during, at the end and/or after the exposure. In other words, the detection 220 of the status signal or detection 320 of the variable status signal can take place before, at the beginning, during, at the end and/or after the exposure, so that the status signal can be processed, for example, by means of detector electronics.

In a further action step 330, the electrical measurement signal and the status signal are combined in a line image or an area image. Step 330 can follow step 230, for example, so that the status signal, fixed in time to the exposure time or the exposure, is combined with the measurement signal in a line image or a surface image. Furthermore, at least one pixel can contain measurement information and at least one pixel can contain at least binary-coded status information. Furthermore, a single pixel can contain both measurement information and binary-coded status information.

In a further step 340, a status signal with status information is transmitted. Step 340 may follow step 330. For example, the state of the measurement radiation can be transmitted to a synchronization input of detector electronics, or the state of the binary-coded status information can be transmitted to an evaluation unit.

4 shows a schematic diagram of a method 400 for synchronizing multiplex measurements according to an exemplary embodiment of the present invention, in which the measurement radiation is generated by at least two radiation sources or divided into at least two beam paths. In other words, the measurement radiation can be generated by at least one radiation source whose radiation can be switched between at least two beam paths or two radiation states.

First, in step 410, the electromagnetic radiation or measurement radiation from at least two electromagnetic radiation sources, beam paths and/or beam directions is combined before or after an interaction with at least one measurement object, so that the electromagnetic measurement radiation is three-dimensionally superimposed.

At step 420, the electromagnetic radiation is converted to the electrical signal with none, one or more radiation sources, beam paths or beam directions active at the same time. Step 420 can thus follow step 410, in which the measurement radiation is generated by at least two radiation sources or comprises two beam paths.

In step 425, the active radiation sources, beam paths or beam directions are detected based on the status signal.

In step 430, the electromagnetic measurement radiation is switched between at least two beam paths or between at least two radiation states in order to be able to generate two beam paths of the measurement radiation with at least one radiation source. In addition, it is possible to switch two beam sources on and off alternately in order to switch between the beam paths of the measurement radiation. In 5 a schematic block diagram of a device with two radiation sources 130 is shown. Step 430 may follow step 410, step 420, or step 425.

In step 440, the sequence of the switching on and off processes of the at least two electromagnetic radiation sources or a sequence between the at least two beam paths or between the at least two radiation states is defined. Further, step 440 may optionally include changing the sequencing of the power-on and power-off operations at run time so that the sequencing can be adjusted. For example, step 440 can be performed by a higher-level controller so that the status of the sequence is transmitted to the respective radiation sources.

5 FIG. 5 shows an alternative embodiment of the measuring device 500. FIG 1 , in which two beam sources 130` and 130" are used for the multiplex measurement at two measurement locations 512` and 512". The electromagnetic measuring radiation 132 of the two beam sources 130' and 130'' impinges on the measuring object 510 at respectively different measuring positions 512' and 512''. The radiation 132 reflected or scattered at the measurement object 510 is spatially superimposed and impinges on a common detector 110 where it is converted into the electrical measurement signal 112 . The detector electronics 120 detects the electrical measurement signal 112 synchronously with the status signals 134 of the beam sources 130` and 130". " the measurement takes place. The beam guidance shown schematically in 5 is greatly simplified here. It is obvious to the person skilled in the art that, depending on the measuring method used, for example interferometry, laser triangulation or confocal methods, further optical elements 150, a fiber-optic beam guide and/or additional or modified beam paths may be necessary or advantageous. Likewise, it is obvious to the person skilled in the art that the measurement can also take place in transmission instead of in reflection, depending on the measurement method.

6 FIG. 6 shows a further alternative embodiment of the measuring device 600. FIG 1 , in which the electromagnetic measurement radiation 132 of a single beam source 130 can be directed at an optical deflection element 610 onto two beam paths and thus measurement positions 512` and 512" on the measurement object 510. The optical deflection element 610 can be, for example, fiber-optic switches, movable mirrors , in particular scanner mirrors, act as electro- or acousto-optical deflectors.The radiation 132 reflected or scattered on the measurement object 510 is converted into the electrical measurement signal 112 at the detector 110 and is detected by the detector electronics 120 synchronously with the status signal 134 of the deflection device 610. The status signal 134 comprises at least one piece of information regarding the active beam path, for example the switch position or the angular position of a mirror 6 is again greatly simplified. It is obvious to the person skilled in the art that, depending on the measuring method used, for example interferometry, laser triangulation or confocal methods, further optical elements 150, a fiber-optic beam guide and/or additional or modified beam paths may be necessary or advantageous. Likewise, it is obvious to the person skilled in the art that the measurement can also take place in transmission instead of in reflection, depending on the measurement method.

7 FIG. 7 shows a schematic diagram of a method 700 that extends method step 310. FIG. In other words, method 700 may precede step 320, for example. First, in step 710, the start of an exposure is triggered, for example using a fixed frequency or an external signal. In step 720, at least one first status signal is detected synchronously with the beginning of the exposure time. In optional step 730, the first status signal is used to determine the duration of the exposure. For example, the first status signal can include information about the power of a beam source or about the orientation and/or reflection properties of a measurement object, so that the optimal exposure time for the measurement method can be determined. In option In step 740, at least one second status signal is detected at the end of the exposure time.

Although some aspects have been described in the context of a device, it is understood that these aspects also represent a description of the corresponding method, so that a block or a component of a device is also to be understood as a corresponding method step or as a feature of a method step. Similarly, aspects described in connection with or as a method step also constitute a description of a corresponding block or detail or feature of a corresponding device. Some or all of the method steps may be performed by hardware apparatus (or using a hardware Apparatus), such as a microprocessor, a programmable computer, or an electronic circuit. In some embodiments, some or more of the essential process steps can be performed by such an apparatus.

Depending on particular implementation requirements, embodiments of the invention may be implemented in hardware or in software. The implementation may be performed using a digital storage medium such as a DVD, Blu-ray Disc, CD, ROM, PROM, EPROM, EEPROM, or FLASH memory, hard disk, or other magnetic or optical storage medium which electronically readable control signals are stored, which interact with a programmable computer system in such a way that the respective method is carried out. Therefore, the digital storage medium can be computer-readable.

Thus, some embodiments according to the invention comprise a data carrier having electronically readable control signals capable of interacting with a programmable computer system in such a way that one of the methods described herein is carried out.

In general, embodiments of the present invention can be implemented as a computer program product with a program code, wherein the program code is effective to perform one of the methods when the computer program product runs on a computer.

The program code can also be stored on a machine-readable carrier, for example.

Other exemplary embodiments include the computer program for performing one of the methods described herein, the computer program being stored on a machine-readable carrier.

In other words, an exemplary embodiment of the method according to the invention is therefore a computer program that has a program code for performing one of the methods described herein when the computer program runs on a computer.

A further exemplary embodiment of the method according to the invention is therefore a data carrier (or a digital storage medium or a computer-readable medium) on which the computer program for carrying out one of the methods described herein is recorded. The data carrier, digital storage medium, or computer-readable medium is typically tangible and/or non-transitory.

A further exemplary embodiment of the method according to the invention is therefore a data stream or a sequence of signals which represents the computer program for carrying out one of the methods described herein. For example, the data stream or sequence of signals may be configured to be transferred over a data communication link, such as the Internet.

Another embodiment includes a processing device, such as a computer or programmable logic device, configured or adapted to perform any of the methods described herein.

Another embodiment includes a computer on which the computer program for performing one of the methods described herein is installed.

A further exemplary embodiment according to the invention comprises a device or a system which is designed to transmit a computer program for carrying out at least one of the methods described herein to a recipient. The transmission can take place electronically or optically, for example. For example, the recipient may be a computer, mobile device, storage device, or similar device. The device or the system can, for example, comprise a file server for transmission of the computer program to the recipient.

In some embodiments, a programmable logic device (e.g., a field programmable gate array, an FPGA) may be used to perform some or all of the functionality of the methods described herein. In some embodiments, a field programmable gate array may cooperate with a microprocessor to perform any of the methods described herein. In general, in some embodiments, the methods are performed on the part of any hardware device. This can be hardware that can be used universally, such as a computer processor (CPU), or hardware that is specific to the method, such as an ASIC.

The devices described herein may be implemented, for example, using hardware apparatus, or using a computer, or using a combination of hardware apparatus and a computer.

The devices described herein, or any components of the devices described herein, may be implemented at least partially in hardware and/or in software (computer program).

The methods described herein may be implemented, for example, using hardware apparatus, or using a computer, or using a combination of hardware apparatus and a computer.

The methods described herein, or any components of the methods described herein, may be performed at least in part by hardware and/or by software.

The embodiments described above are merely illustrative of the principles of the present invention. It is understood that modifications and variations to the arrangements and details described herein will occur to those skilled in the art. Therefore, it is intended that the invention be limited only by the scope of the following claims and not by the specific details presented in the description and explanation of the embodiments herein.

Claims (24)

Device (100;500;600) for non-contact measurement, with the following features: at least one detector (110), which is designed to detect a first electromagnetic measuring beam (132) and to convert it into an electrical measuring signal (112), Detector electronics (120) that are designed to receive a first status signal (134) that can be assigned in terms of time and/or synchronously with the detection of the first electromagnetic measuring beam (132) and to receive the first status signal (134) and the first electromagnetic measuring beam (132) as information to pair. Device (100; 500; 600) according to claim 1 , wherein the status signal (134) contains information regarding a radiation source (130; 130`; 130") and/or information regarding the on/off status of at least one radiation source (130; 130`; 130") and/or information regarding a switch and/or information regarding a position of the device and/or the alignment of the measurement radiation of the radiation source (130). Device (100; 500; 600) according to claim 2 , wherein the non-contact measurement takes place with a clear assignment of the measurement information to a measurement position (512`;512"), without the time information being explicitly recorded. Device (100; 500; 600) according to claim 3 , The detector (110) being designed to detect one or more further electromagnetic measuring beams (132) and to convert them into an electrical measuring signal (112). Device (100; 500; 600) according to claim 4 , wherein the detector electronics (120) are designed to receive one or more additional status signals (134) in a time-assignable and/or synchronous manner with the detection of the one or more additional electromagnetic measuring beams (132) and the one or more additional status signals (134) and informationally couple the one or more further electromagnetic measuring beams (132). Apparatus (100;500;600) according to any one of the preceding claims, wherein detecting the status signal (134) comprises detecting a change in the status signal before, at the beginning, during, at the end and/or after the exposure of the detector (110). . Device (100; 500; 600) according to one of the preceding claims, in which the detector electronics (120) comprises at least one synchronization input for detecting the status signal (134). Device (100; 500; 600) according to claim 7 , in which the synchronization input for acquisition sen of the status signal (134) comprises at least one digital input. Device (100; 500; 600) according to one of the preceding claims, wherein the detector (110) has a line detector or an area detector in order to transmit the first and/or several further electromagnetic measuring beams (132) from at least one electromagnetic radiation source (130) into the to convert electrical measurement signal (112). Device (100; 500; 600) according to one of the preceding claims, in which the detector electronics (120) are designed to combine the electrical measurement signal (112) and the first and/or several further status signals (134) in a line image or a surface image, wherein at least one first pixel of the line image or of the area image has measurement information based on the electrical measurement signal (112) and at least one pixel has at least one piece of status information based on the first and/or a plurality of further status signals (134). Device (100; 500; 600) according to claim 10 , in which the measurement information of the line image or the area image has an interferogram. Device (100; 500; 600) according to one of the preceding claims, in which the detector (110) is designed to convert the first and/or several further electromagnetic measuring beams (132) starting from at least two electromagnetic radiation sources (130). Device (100; 500; 600) according to one of the preceding claims, in which the detector (110) or an upstream device is formed, the first and / or several further electromagnetic measuring beams (132) of the at least two electromagnetic radiation sources before or after an interaction to be combined with at least one measurement object in such a way that the first and/or a plurality of further electromagnetic measurement beams (134) impinge on the detector (110) in a spatially superimposed manner. Device (100; 500; 600) according to one of the preceding claims, in which the detector (110) is designed to convert the first and/or a plurality of further electromagnetic measuring beams (132) starting from at least two electromagnetic radiation sources, with none, one or several electromagnetic radiation sources are active at the same time. Apparatus (100;500;600) according to any one of the preceding claims, wherein at least one electromagnetic radiation source (130) comprises an emitter, the emitter being electronically coupled to a synchronization input of the detector electronics (120). Device (100; 500; 600) according to claim 15 , In which the synchronization input of the detector electronics (120) comprises at least one digital input. Device (100; 500; 600) according to one of the preceding claims, in which at least one electromagnetic radiation source (130) comprises a semiconductor emitter, preferably a superluminescent diode or a laser diode. Device (100; 500; 600) according to one of the preceding claims, in which at least one electromagnetic radiation source (130) is designed to switch the first and/or a plurality of further electromagnetic measuring beams (132) between at least two beam paths or between at least two radiation states. Device (100; 500; 600) according to one of the preceding claims, in which the detector (110) is formed between at least two beam paths or between at least two radiation states of the first and / or second electromagnetic measuring beam (132) before or after their interaction to be combined with at least one measurement object in such a way that the first and/or second electromagnetic measurement beam (132) impinges on the detector (110) in a three-dimensionally superimposed manner. Device (100; 500; 600) according to one of the preceding claims, in which at least one beam path of the first and/or several further electromagnetic measuring beams (132) can be changed by means of a beam deflection device (610). Device (100; 500; 600) according to claim 20 , wherein the beam deflection device (610) comprises an optical switch, preferably a fiber optic switch. Device (100; 500; 600) according to one of the preceding claims, in which the electromagnetic radiation source (130) is designed to define a sequence of the switching on and off processes of the at least two electromagnetic radiation sources or a sequence between at least two beam paths or between at least two radiation states and/or change. Method (200;300;400;700) for synchronizing multiplex measurements, comprising the following steps: converting (210) an electromagnetic measurement radiation into an electrical measurement signal; synchronously acquiring (220) a status signal and the electrical measurement signal; and time-coupling (230) the status signal to an exposure. procedure according to Claim 23 , further comprising: variably controlling an exposure start and an exposure duration; detecting the variable status signal before, at the beginning, during, at the end and/or after exposure, combining the electrical measurement signal and the status signal in a line image or an area image; and transmitting the status signal.

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