DE102017100755A1 - Apparatus and method for processing glass or glass ceramic elements by means of a laser - Google Patents

Abstract

The object of the invention is to provide a device and a method by means of which separation lines can be written into a component to be processed by means of a laser in a manner that is as fast as possible. For this purpose, a device (1) for laser processing of a glass or glass ceramic element (2) is provided, comprising: - an ultrashort pulse laser (10), - a focusing optics (3) to the laser beam (7) of the ultrashort pulse laser (10) to a long focus concentrate, wherein the pulse power of the ultrashort pulse laser (10) is sufficient to produce filament-shaped damage (6) within the glass or the glass ceramic by the focused in glass or glass ceramic laser pulses, wherein the focusing optics (3) - one in the beam path of the ultrashort pulse laser A lens movement device (9) is provided, by means of which the lens (4) is movable transversely to the beam direction (70), so that the position of the optical axis (40) of the lens (40). 4) relative to the position of the laser beam (7) is variable. A change in position relative to the laser beam (7) shifts the point of incidence (71) of the laser beam on the glass or glass ceramic element (2), so that by movement of the lens (4) of the impact point (71) of the laser beam (7) along a dividing line (12) forming predetermined path is feasible.

Description

The invention generally relates to the processing of glass or glass ceramic parts. In particular, the invention relates to a method and apparatus for separating glass or glass ceramic elements to separate parts from the elements.

In principle, the filamentation is known, while a damage is introduced into the glass, the particular is that this is not punctiform, such. with stealth dicing but through special optics line along the cutting edge. If one then places several damages on each other, one obtains a dividing line at which one can separate the glass by introducing tension.

From the prior art, various devices for producing dividing lines by intensive laser beams are known. In this case, a plasma is generated in the glass along the laser beam by ultrashort high-intensity laser pulses, which causes a filament-shaped damage in the material. The laser beam is moved along an intended track, so that adjacent damage tracks are inserted. The glass part can then be separated on this track.

Process for the preparation of filamentous damage for separation preparation are known for example from WO 2012/006736 A2 and DE 10 2012 110 971 A1 known.

The EP 2 781 296 A1 further describes a method for producing inner contours, wherein in a contour definition step a plurality of individual zones of internal damage is generated in the substrate material by means of a laser beam guided over the substrate along a contour line characterizing the contour to be generated. Substrate material is then removed or removed by plastic deformation or material removal in a material removal or deformation step carried out after the contour definition step.

In many cases special optics are used to form a linear focus for producing the elongate zones of damage. In particular, an axicon or optics with a targeted spherical aberration is suitable for shaping focal lines or a linear focus. The special optics are currently available only as fixed optics. For processing, the substrate to be processed is moved under the optics. At high speeds in the range of up to 2m / s, however, problems can arise in the case of geometries with the smallest radii, since the axes can not move the high mass of the substrate with high speeds and the necessary accelerations in a geometrically reliable manner. This is especially the case for radii smaller than 10mm, especially for radii smaller than 1mm.

A further development, especially for substrates with high masses, are gantry systems, whereby not the substrate under the optics but the optics is moved over the substrate. Due to the lower mass, even smaller radii of 4-10mm can be produced with higher velocities in a geometrically correct manner. However, here is the mass to be accelerated relatively high and this is not enough to produce smallest radii <1mm geometrically true. Disadvantage here is that the beam path is not rigid, which can easily lead to misalignment. Furthermore, the length of the beam path changes, which affects beam diameter and delays.

From the JP 2016/105178 For example, a laser processing apparatus is known in which a pair of wedge prisms are provided to deflect the laser beam. By means of the prisms, the beam is deflected so that the angle of incidence can be varied while the focus is fixed. Thus, this is a so-called Trepanieroptik, in which the laser beam can be precessed by a tumbling point. By means of this optics can then be adjusted by adjusting the angle of the beam to the workpiece normal, the inclination of the cutting surface generated by the laser. In order to guide the focus along an intended dividing line, however, the workpiece is again moved, with the above-mentioned disadvantage of the high mass to be moved.

The invention is therefore based on the object to provide a device and a method with which dividing lines can be written by means of a laser into an element to be processed quickly and as accurately as possible.

This object is solved by the subject matter of the independent claims. Advantageous developments of the invention are specified in the respective dependent claims.

The invention is based on the recognition that in the filamentation, depending on the beam diameter and the lens used, a deflection of the laser beam by positioning the lens is possible without noticeably influencing the quality of the filaments produced.

• - einen Ultrakurzpulslaser,
• - eine Fokussierungsoptik, um den Laserstrahl des Ultrakurzpulslasers zu einem langgezogenen Fokus zu konzentrieren, und durch die mit der in Glas oder Glaskeramik fokussierten Laserpulse filamentförmige Schädigungen innerhalb des Glases oder der Glaskeramik zu erzeugen, wobei die Fokussierungsoptik
• - eine im Strahlengang des Ultrakurzpulslasers angeordnete Linse umfasst. Mit einer Linsenbewegungs-Einrichtung ist die Linse quer zur Strahlrichtung bewegbar, so dass die Lage der optischen Achse der Linse relativ zur Lage des Laserstrahls veränderbar ist. Die Linse ist so geformt, dass eine Bewegung der Linse relativ zum Laserstrahl den Laserstrahl ablenkt und damit den Auftreffpunkt des Laserstrahls auf dem Glas- oder Glaskeramikelement verschiebt, so dass durch Bewegung der Linse der Auftreffpunkt des Laserstrahls entlang eines eine Trennlinie bildenden vorgegebenen Pfades führbar ist.

Accordingly, the invention provides an apparatus for laser processing a glass or glass ceramic element, comprising:

• an ultrashort pulse laser,
• - Focusing optics to focus the laser beam of the ultrashort pulse laser to a long focus, and to create filamentous damage within the glass or the glass-ceramic with the focused in glass or glass ceramic laser pulses, wherein the focusing optics
• a lens arranged in the beam path of the ultrashort pulse laser. With a lens movement device, the lens is movable transversely to the beam direction, so that the position of the optical axis of the lens relative to the position of the laser beam is variable. The lens is shaped so that a movement of the lens relative to the laser beam deflects the laser beam and thus shifts the point of impact of the laser beam on the glass or glass ceramic element, so that the impact point of the laser beam along a line forming a parting line can be guided by movement of the lens ,

In order to enable the insertion of filamentous damage, an ultrashort pulse laser with a correspondingly high pulse power is selected.

Particularly preferably, the lens, with which the laser beam is deflected, has a positive focal length, ie is a converging lens, so that this lens can concentrate the laser beam in one focus without a further focusing lens.

• - mit der Fokussierungsoptik der Laserstrahl des Ultrakurzpulslasers zu einem langgezogenen Fokus im Glas- oder Glaskeramikelement konzentriert wird, wobei
• - eine Pulsleistung des Ultrakurzpulslasers eingestellt wird, die ausreicht, um durch die mit der in Glas oder Glaskeramik fokussierten Laserpulse filamentförmige, beziehungsweise langgestreckte Schädigungen innerhalb des Glases oder der Glaskeramik zu erzeugen, wobei die Fokussierungsoptik eine im Strahlengang des Ultrakurzpulslasers angeordnete Linse umfasst.

An inventive method for laser processing of a glass or glass ceramic element which can be carried out with the device is based on the fact that

• - Focused with the focusing optics of the laser beam of the ultrashort pulse laser to a long focus in the glass or glass ceramic element, wherein
• - A pulse power of the ultrashort pulse laser is adjusted, which is sufficient to produce filament-shaped or elongated damage within the glass or the glass ceramic by the focused in glass or glass ceramic laser pulses, wherein the focusing optics comprises a arranged in the beam path of the ultrashort pulse laser lens.

With the invention, the point of impact of the laser beam can be easily adjusted by changing the position of the lens relative to the beam position. For example, with a beam diameter of 12 mm and a biconvex lens with a diameter of 16 mm, a beam deflection of + -1 mm is possible without having to accept a significant deterioration in the beam geometry or the maximum intensity.

By means of the lens movement device, the lens is moved transversely to the beam direction during the operation of the ultrashort pulse laser, that is, while it emits a laser beam, so that the position of the optical axis of the lens is changed relative to the position of the laser beam. The lens is shaped so that the movement of the lens relative to the laser beam deflects the laser beam and thus shifts the point of incidence of the laser beam on the glass or glass ceramic element, the impact point being guided by movement of the lens along the predetermined path forming the separation line.

There are several ways in which the movement of the laser beam across the surface is controlled. According to one embodiment, a computing device is provided, which is adapted to deliver successive control signals to the lens movement device, so that guided by the lens movement means movement of the lens transversely to the beam direction, the point of impact of the laser beam along a predetermined line forming a parting line becomes. Thus, the movement of the laser beam over the glass or glass ceramic element is particularly preferably controlled by a computer.

To enable larger movements, the glass or glass ceramic element can be moved relative to the ultrashort pulse laser during the irradiation of the laser beam with a movement device, so that the point of incidence of the laser beam is guided along a predetermined path forming the parting line, which by the superimposition of the means of the adjusting device and the moving means set positions is formed. Also, an intermittent operation can be provided in which by means of Moving device certain positions are approached on the glass or glass ceramic element, where then by means of the lens movement according to the invention, the dividing line is traversed.

• 1 eine erste Ausführungsform einer Vorrichtung zur Laserbearbeitung,
• 2 eine Linsenbewegungs-Einrichtung,
• 3 eine weitere Ausführungsform einer Linsenbewegungs-Einrichtung,
• 4 eine Raytracing-Simulation des Laserstrahls bei zentrisch angeordneter Linse,
• 5 und 6 Raytracing-Simulationes des Laserstrahls bei exzentrisch angeordneter Linse,
• 7 und 8 lichtmikroskopische Aufnahmen des Querschnitts eines Glaselements mit eingefügten filamentförmigen Schädigungen,
• 9 eine Trennlinie auf einem Glas- oder Glaskeramikelement mit einer Abweichung vom vorgesehenen Verlauf,
• 10 ein Glas- oder Glaskeramikelement mit einer Vielzahl von Trennlinien,
• 11 Geschwindigkeits-Zeit-Diagramme der Linsenbewegungs-Einrichtung,
• 12 ein Glas- oder Glaskeramikelement mit bearbeiteter Aussenkontur.

The invention will be explained in more detail below with reference to the accompanying figures. Show it:

• 1 a first embodiment of a device for laser processing,
• 2 a lens movement device,
• 3 another embodiment of a lens movement device,
• 4 a raytracing simulation of the laser beam with centrically arranged lens,
• 5 and 6 Raytracing simulation of the laser beam with an eccentrically arranged lens,
• 7 and 8th photomicrographs of the cross section of a glass element with inserted filamentous damage,
• 9 a dividing line on a glass or glass ceramic element with a deviation from the intended course,
• 10 a glass or glass ceramic element with a plurality of dividing lines,
• 11 Speed-time diagrams of the lens movement device,
• 12 a glass or glass ceramic element with machined outer contour.

1 shows a side view of a device 1 for laser processing of a glass or glass ceramic element 2 , with the volume of the element 2 along a dividing line adjacent filamentous damage 6 be generated. The glass or glass ceramic element 2 can then be easily separated along the dividing line by the inserted damage. The device 1 includes an ultrashort pulse laser 10 and a focusing optics 3 with which the laser beam 7 of the ultrashort pulse laser 10 41 becomes concentrated to a long focus. This is at least one lens 4 as part of the focusing optics 3 intended. In the case of an optical structure consisting of a plurality of beam-forming elements, this lens is preferably the material facing the front lens of the imaging optics. Next to the lens 3 can the focusing optics 3 also one or more other optical elements 30 for example, to expand and / or collimate the laser beam. In general, without being limited to the illustrated example, according to one embodiment of the invention, the diameter of the lens is on the lens 4 meeting the laser beam 7 smaller than the aperture of the lens. This can be the lens 4 be moved in a certain range with respect to the laser beam, without the laser beam is shaded. The ratio of beam diameter of the laser beam 7 However, to the diameter of the aperture of the lens is preferably at least 0.25, more preferably at least 0.5, most preferably at least 2/3, but the ratio should remain less than 1 due to the unfavorable shading.

As ultrashort pulse laser, for example, an Nd: YAG laser with a wavelength of 1064 nm is suitable. With such a laser can be achieved with a pulse duration of 10ps, pulse energies of 200-250μJ. In particular, the laser can also be operated in burst mode, in which the pulse energy is emitted in the form of pulse packets (also referred to as bursts). In a burst with 1-8 individual pulses, the total energy of a burst according to an embodiment is 400-800 μJ, the burst frequency, ie the interval between the pulses of a burst 50MHz, the distance between two filaments produced with one burst 4 - 8μm, where the repetition frequency of the bursts is between 5-200kHz.

In general, the following parameters of the ultrashort pulse laser are particularly suitable for the invention:

The power of the ultrashort pulse laser is preferably in a range of 20 to 300 watts.

The pulse energy of a burst is preferably more than 400 microjoules, more preferably more than 500 microjoules.

When operating the ultrashort pulse laser in burst mode, the repetition rate is the repetition rate of delivery of bursts. The pulse duration is essentially independent of whether a laser is operated in single-pulse mode or in burst mode. The pulses within a burst typically have a similar pulse length as a pulse in single pulse mode. The burst frequency may be in the range of 15 MHz to 90 MHz, preferably in the range of 20 MHz to 85 MHz.

The number of pulses in the burst is preferably between 1 and 10 pulses, eg 6 or 8 pulses.

The laser beam 7 of the ultrashort pulse laser 10 is in time succession delivered laser pulses 8th subdivided. Here is the pulse power of the ultrashort pulse laser transported with the pulses 10 sufficient to pass through the laser pulses focused in glass or glass ceramic 8th filamentous damage 6 within the glass or glass ceramic. These filamentous lesions 6 form along the elongated, preferably linear focus 41 out.

The Lens 4 is now not only used for the drawn because of the large spherical aberration linear focus 41 in the volume of the glass or glass ceramic element 2 to create. Rather, the lens 4 also shaped so that a change in position of the lens 4 relative to the laser beam 7 the laser beam 7 deflects and by the thus caused change in direction of the exiting laser beam 7 the point of impact 71 of the laser beam 7 on the glass or glass ceramic element 2 shifts. This is used to make the laser beam 7 to guide and so the desired path along the intended dividing line. In general, without limitation to the illustrated embodiments is a lens 4 is provided, which has a spherical aberration, which is sufficient to laterally displace the focus of the laser beam at a lateral displacement of the laser beam on the lens.

Thus the impact point 71 of the laser beam 7 can be moved along the predetermined path forming the parting line, is a lens movement device 9 provided by means of the lens 4 can be moved transversely to the beam direction. Such a position change transversely to the beam direction, in particular perpendicular to the beam direction leads to a change in the distance of the optical axis of the lens 4 to the Strahlmittte the laser beam 7. In other words, the lens 4 by means of the lens movement device 9 be positioned so that the laser beam optionally passes through the lens eccentrically.

The Lens 4 itself has only a comparatively low mass and can therefore be moved very quickly. The invention thus makes it possible to produce geometry even with the smallest radii, as required for products in electronics and microfluidics, at high speeds in a geometrically correct manner.

So can the impact point 71 without limitation to the special construction of the 1 be moved over the glass or glass ceramic element by means of a movement of the lens at a speed of more than 0.05 meters per second, preferably at a speed of up to 0.1 meters per second. At the same time, even the narrowest curvatures of the parting line can be realized independently of the speed with which the intended dividing line is traversed. For this purpose, it is provided according to an embodiment of the method according to the invention that by the movement of the lens 4 a dividing line is traveled, which has a radius of curvature in the range of 0.05 mm to 1 mm.

According to a preferred embodiment of the invention is a computing device 15 provided which successive control signals to the lens movement device 9 gives off, so the position of the lens 4 with the computing device 15 can be controlled and changed. In this way, by the lens movement device 9 exerted movement of the lens 4 computer-controlled transversely to the beam direction of the impact point 71 of the laser beam 7 the intended path on the glass or glass ceramic element 2 be guided along. Accordingly, in the example of 1 a computing device 15 to the lens movement device 9 connected.

In general, for example, piezo actuators or electromagnetic actuators as part of the lens movement device 9 suitable. If necessary, several actuator types can be combined with each other.

The lens movement device 9 It can include two motors to move the lens in two independent directions, perpendicular to the beam direction, to flexibly image any geometry. According to one embodiment, the lens movement device comprises 9 that is, two adjusting devices for movement along two non-parallel directions transverse to the beam direction 70 of the laser beam 7 , 2 shows in plan view, that is viewed along the beam direction of the laser beam, an example of such a lens movement device 9 with an associated lens 4 , The lens movement device 9 includes two adjusting devices 91 . 92 which the lens 4 each can move and position along a direction indicated by a double arrow. The two directions are in a plane preferably perpendicular to the beam direction and preferably still perpendicular to each other. As shown, both actuators 91, 92 can be separated from each other by the computing device 15 be controllable. For the two directions, different movement parameters can be set in this way become. In general, acceleration sections or accelerated movements can also be provided.

According to yet another embodiment of the invention, movement of the lens transversely to the beam direction and relative to the beam center is effected by rotating the lens eccentrically. In this way, the optical axis of the lens moves 4 on a circular path around the axis of rotation. Accordingly, according to this embodiment, a means for eccentric rotation of the lens as part of the lens movement means 9 intended. According to a development of the invention, a static and / or dynamic balancing may be provided in this case in order to avoid that the rotating lens generates vibrations and transmits them to the optical system.

3 shows an example of such a lens movement device 9 , This includes a lens holder 33 which by means of a motor 92 is rotatably mounted. The optical axis 40 of the lens 4 is spaced from the axis of rotation 43 the holder 33 , Therefore, the optical axis performs 40 during rotation of the lens holder 33 a circular path 44 around the axis of rotation 41 , This is also the point of impact 71 of the laser beam 7 guided on a circular path. Their radius is generally smaller than the radius of the circular path 44 the optical axis 40 around the axis of rotation 43 ,

This embodiment can with the movement in two independent directions by means of two actuators as the embodiment of the 2 shows, combined. Furthermore, the driving of the lens movement device 9 by means of the computing device 15 by successive delivery of control signals also to the embodiment of 3 be applied so that the lens 4 the focusing optics 3 transverse to the beam direction 70 is moved and the position of the optical axis 40 the lens 4 relative to the position of the laser beam 7 changed, causing the impact point 71 of the laser beam 7 on the glass or glass ceramic element 2 is moved.

The movement of the lens 4 Although now allows a very fast and accurate guidance of the laser beam 7 , On the other hand, the deflection of the beam but also limited by the maximum possible, determined by the lens edge displacement of the lens relative to the laser beam. In a preferred embodiment of the invention it is therefore provided that the beam guidance means of the lens 4 combined with another movement mechanism. Accordingly, in a further development of the invention is a movement device 17 provided with which the glass or glass ceramic element 2 relative to the ultrashort pulse laser 10 during the irradiation of the laser beam 7 is movable, so the impact point 71 of the laser beam 7 along a predetermined path forming the dividing line, which can be guided by the superimposition of the means of the lens movement device 9 and the movement device 17 set positions is formed. Of course, the movement device 17 and the lens movement device 9 to be operated intermittently.

At the in 1 embodiment shown comprises the movement device 17 an xy table. So here is the filed on the table glass or glass ceramic element 2 moved relative to the laser source. Also possible is an embodiment as a portal system, in which the optics for traversing the parting line with a suitable movement device 17 over the glass or glass ceramic element 2 is moved. Furthermore, both a movement device 17 for movement of the glass or glass ceramic element 2 , as well as another movement device 17 be provided for moving the optics. Regardless of the specific embodiment of the movement device 17 this is also like the lens movement device according to a preferred embodiment 9 by a computing device 15 controlled.

The following is the mechanism of the beam guidance by displacement of the lens 4 explained in more detail by means of examples. 4 shows a simulation of the focused laser beam 7 in the case of a lens arranged centrally, that is to say in the case of the beam axis or the beam center 73 of the laser beam 7 with the optical axis 4 the biconvex lens 4 coincides. At the in 5 The example shown is the lens 4 shifted by 0.4 millimeters from the center of the beam. In the in 6 Simulation shown is the parallel offset between the beam center 73 and optical axis 40 1.0 millimeters. The off the shift of the lens 4 transverse to the laser beam 7 resulting beam deflection and thus the shift of the point of impact 71 of the laser beam 7 on the glass or glass ceramic element is smaller and in the representations of 5 and 6 not highlighted. At the beam offset of 0.4 millimeters according to 5 shifts the point of impact 71 by .388 millimeters, in which 6 illustrated beam offset of 1 millimeter is the displacement of the point of impact 71 0.979 millimeters. As can be seen from the simulations, the quality of the focus of the laser beam remains essentially substantially despite the offset, so that the process of filamentation or plasma formation along the linear focus is unaffected. The maximum beam intensity of the deflected beam is generally at least 85 percent, typically even at least 90 percent, or even at least 95 percent of the maximum intensity of a center through the lens 4 focused beam.

In general, according to one embodiment of the invention, it is provided that the point of impact 71 on the glass or glass ceramic element 2 opposite to a position with centered lens 4 is deflected by a distance that is smaller than the displacement of the lens 4 , The reduction factor between the displacement of the lens 4 and the shift of the impact point 71 is generally beneficial to high-precision small structures in a glass or glass ceramic element 2 , in particular to insert exact openings with a small diameter. The lens is preferably selected according to an embodiment of the invention such that the reduction factor is in the range of 0.25 to 0.95.

7 and 8th show light micrographs of the cross section of a glass element with inserted filamentous damage.

At the in 7 Example shown were the two filamentous lesions 6 made by the lens 4 each 400 microns was moved out of the center position. The distance between the two lens positions is therefore 800 μm. In contrast, the distance between the filamentous damage is only 575.95 μm, that is about 600 μm.

Thus, the deflection of the point of impact is reduced by a factor of ¾ with respect to the deflection of the lens. In general, without limitation to the exemplary embodiments, it is provided in a further development of the invention that the impact point 71 is deflected on the glass or glass ceramic element with respect to a position with centered lens by a distance which is smaller than the displacement of the lens 4 , The position with centered lens is understood to mean a position in which, as in FIG 4 shown the optical axis 40 the lens 4 colinear to the center axis 73 of the laser beam 7 is.

8th shows a glass element 2 , in which three filaments, or filamentous damage 6 were inserted. The mean filamentous damage 6 was with centered lens 4 , the two outer filamentous damage 6 inserted with magnitude different lens deflections. This photograph clearly shows that the length of filamentous damage 6 of about 2600 microns by the deflection is substantially unaffected. The measured distances are 243.01 μm between the left and middle filaments and 324.08 μm between the right and middle filaments.

9 shows in supervision a dividing line 12 on a glass or glass ceramic element 2 as seen from the laser beam 7 by juxtaposing filamentous damage 6 is produced. The dividing line 12 has an abrupt change in direction. More generally, the course of the dividing line can be characterized as non-continuously differentiable. In order to ensure the later separability along such a non-continuously differentiable path, acceleration paths of the movement can also be provided, which lead to an increase in the local filament density in the vicinity of the non-differentiable points. In general, without limitation to the exemplary embodiment illustrated, it is thus possible for the density of the filament-shaped damage, or the number of these damages per unit length along the dividing line 12 be varied. This variation can in particular, as in the present embodiment, be carried out in such a way that the density in the region of a change of direction is increased.

In particular, after the later separation at the dividing line, an edge with a right angle is to be generated. In a device without inventive lens movement 4, in which the dividing line 12 solely by relative movement of optics and glass or glass ceramic element 2 with a movement device 17 is traversed, it can come in such abrupt changes of direction to vibrations, so that the dividing line 12 as shown by the intended course 13 differs. In particular, there is a damped oscillation of the dividing line 12 around the intended course 13 , As already explained, can with the movement device 17 now the glass or glass ceramic element 2 relative to the ultrashort pulse laser 10 during the irradiation of the laser beam 7 be moved so that the impact point 71 of the laser beam 7 along a the dividing line 12 forming predetermined path is performed by the superposition of the means of the adjusting device 9 and the movement device 17 set positions is formed. This can be done here so that by means of the lens movement device 9 a beam deflection is imposed, which has an opposite oscillation, so that the actual separation line 12 with the planned course 13 coincides. In general, without limitation to the specific example illustrated, it is therefore provided according to an embodiment of the invention that with the movement of the lens 4 deviations of the point of impact 71 from the given dividing line 12 by unwanted movement of the glass or glass ceramic element 2 opposite the ultrashort pulse laser 10 , Be compensated in particular by vibrations or overshoot in a change of direction of the movement.

In the example shown, the dividing line ends 12 at the edge of the glass or glass ceramic element 2 , However, it is also generally possible that a closed dividing line 12 with the point of impact 71 of the laser beam 7 is traversed. Then, in the glass or glass ceramic element 2 one according to the shape of the dividing line 12 shaped opening can be made by ripping.

10 schematically shows an example of a typical application of the invention. Provided is a disc-shaped glass or glass ceramic element 2 in which a lot of dividing lines 12 are inserted in the form of closed curves. If a movement mechanism is used, as in 3 is shown, circular dividing lines are suitable 12 especially. At three of the dividing lines 12 already the inner part was separated, so that openings 20 to be obtained. In general, without limitation to the illustrated embodiment, a separation at the parting line 12 the etching along the inserted filamentous damage 6 include. Wet or dry chemical etching processes come into consideration. As a result of the damage, the etching process proceeds faster along the filaments than at the surface of the glass, so that widening channels are created in the course of the etching. Finally, they connect along the damage 6 generated channels, making one along the dividing line 12 extending gap is created. For a closed dividing line 12 this gap is correspondingly annular and allows the detachment of the inner part.

With the invention smallest radii can be processed at very high speeds. In this case, only the lens is moved relative to the beam and substrate in order to image smallest radii or entire geometries, for example, holes of 0.7 mm diameter. Larger movements can then proceed again with movement of the substrate. Since the invention enables a very rapid jet movement with very small moving masses, so can such glass or glass ceramic elements 2 with many small openings 20 be economically produced in a short time. According to a preferred embodiment of the invention, the writing of the separating lines runs 12 generally off by the glass or glass ceramic element 2 and the focusing optics 3 relative to each other by means of the movement device 17 moved to a processing position, the movement stopped and then by means of the lens movement means by deflection of the otherwise opposite the glass or glass ceramic element 2 stationary laser beam 7 the dividing line 12 is traversed. Subsequently, by means of the movement device 17 approached the next processing position and there again a dividing line 12 left. The steps are repeated until all the dividing lines provided 12 were traversed and inserted. In this way, for example, a plurality of self-contained dividing lines 12 for the production of openings 20 be generated, as is the example of 10 shows.

A glass or glass ceramic element 2 , like it 10 can also be made with an embodiment of the method according to the invention, in which with a movement mechanism 17 while writing the closed dividing line 12 by deflecting the laser beam 7 with a movement of the lens 4 the glass or glass ceramic element 2 relative to the ultrashort pulse laser 10 is moved. For this purpose, a motion component is superimposed on the lens movement, which is the movement of the movement device 17 exerted relative movement between ultrashort pulse laser 10 and glass or glass ceramic element 2 compensated, which is thus opposite to the relative movement. In this way, so the insertion of the filaments during movement of the glass or glass ceramic element 2 opposite the ultrashort pulse laser 10 respectively. For explanation shows 11 an example in the form of speed-time diagrams. The upper diagram represents the movement in the x-direction, the lower in the y-direction perpendicular to the x-direction.

Shown is only the movement of the point of impact caused by the lens movement device 9 is effected. The movement device 17 moves the glass or glass ceramic element 2 additionally relative to the ultrashort pulse laser 10 with a constant velocity v ₀ in the x-direction. At time t ₁ , the writing of filamentous damage begins 6 along a closed path and ends at time t5. The predetermined dividing line 12 in this example is different than in 10 shown, not circular, but angular. In the time interval t ₁ -t ₂ , the laser beam performs a movement counter to the direction of movement of the glass or glass ceramic element 2 out. The impact point thus moves counter to the direction that this by the movement device 17 gets imprinted. In the interval this movement is compensated. The impact point 71 therefore remains stationary in the x direction. Simultaneously, the lens movement device moves 9 the laser beam perpendicular to the direction of movement of the movement device 17 , Subsequently In the interval 1 ₃ -t _4, a slower movement occurs colinearly to the direction of movement of the movement device 17 , At the conclusion of the writing, the point of impact is returned to the y-direction again, whereby in the x-direction again the movement of the movement device 17 is being compensated. At the end of this interval the enrolled path closes.

By compensating for the continuous movement of the glass or glass ceramic element 2 The lens movement device 9 has also been increasingly adjusted in the x-direction. The lens movement device 9 is therefore finally moved again in the interval t ₅ - t ₆ to its original position. Now another dividing line can be inscribed. From this example it has become clear that for a compensation of the movement of the movement device 17 and simultaneous writing of a dividing line is generally advantageous when the lens moving means 9 is set up, the point of impact 71 of the laser beam 7 on the glass or glass ceramic element 2 To be able to move faster than the relative speed of the glass or glass ceramic element 2 opposite the ultrashort pulse laser 10 so that the impact point 71 opposite to that of the movement device 17 exercised the movement of the glass or glass ceramic element 2 can be moved.

Both embodiments described above, so on the one hand, the alternating approaching of movement positions and departure of dividing lines and on the other hand one of the movement of the movement mechanism 17 superimposed movement of the laser beam on the lens movement device has one thing in common: In the periods between the departure of the dividing lines 12 It is useful for the production of separate openings, no pulses or Bursts einzustrahlen. The operation of the ultrashort pulse laser can thus generally be carried out in a position-dependent manner, without limitation to the two aforementioned examples. Alternatively or additionally, the laser emission may be based on the speed of the movement. According to one embodiment of the invention it is therefore provided that the laser emission synchronized with the position of the impact point 71 or its speed. The synchronization can be done by the appropriately configured computing device 15 to be controlled. Also in direction changes, such as curved tracks or corners, as in the example of 9 is a variable density of filaments along the contour advantageous, as well as approaching the start and end points of a contour.

If the laser is switched off, strictly speaking there is no point of impact 71 of the laser light. In this case, the imaginary impingement that would result when the laser is turned on, to understand. The synchronization of the laser emission with the movement or position of the impact point further includes not only turning on or off the laser emission. Rather, other laser parameters, such as the repetition rate of the bursts, their energy or the number of pulses of a burst can be synchronized. Another example is the insertion of short auxiliary cuts, in which the impact point is moved back to a point after the departure of the dividing line, from which the path is continued. Here the laser emission can be switched off when driving back.

The invention makes it possible to quickly and economically very many small openings in disc-shaped glass or glass ceramic elements 2 manufacture. A correspondingly machined glass or glass ceramic element is suitable, inter alia, for applications in microfluidics or in microelectronics. Thus, with the invention, a so-called interposer made of glass can be produced. This is an insulating substrate, through which vias are passed. The conductors passed through can then be connected on the opposite side with contact surfaces. The interposer thus serves, for example, as a support and for the redistribution of contacts of a chip.

It will be apparent to those skilled in the art that the invention is not limited to the specific embodiments, but may be modified in many ways within the scope of the subject matter of the following claims. Also, the embodiments may be combined. So can a lens movement device 9 be provided, which both an arrangement according to 2 , as well as according to 3 includes. This may offer itself to an embodiment similar to 11 to realize. Thus, a first, linear lens movement device 9 be provided, which the movement of the glass or glass ceramic element 2 compensated. With the eccentric rotation according to the in 3 In the embodiment shown, a circular dividing line is then traveled.

Of course, not only self-contained dividing lines 12 getting produced. Auxiliary cuts for special geometries or outer contours are also possible, in which the simultaneous movement of the lens and the material makes it possible to produce filaments along a predetermined path. An example shows 12 , The glass or glass ceramic element 2 has an outer contour 24 which is substantially circular. The outer contour 24 additionally has a fine structure in the form of teeth 25 on. Such a contour can be produced by means of the movement device 17 the outer contour is traversed while using the lens moving means 9 a deflection of the laser beam is superimposed, which imprints the fine structure on the parting line. In general, without limitation to the specific example, therefore, a dividing line can be produced by a relative movement between the glass or glass ceramic element 2 and ultrashort pulse laser deflection of the laser beam generated by the lens movement 7 is superimposed.

For the processing according to the invention a plurality of glasses are in principle suitable. Preference is given to lithium aluminosilicate glasses, lithium aluminosilicate glass ceramics, soda lime glasses, borosilicate glasses, aluminosilicate glasses and alkali metal aluminosilicate glasses.

For example, the substrate may be a lithium aluminosilicate glass having the following composition (in weight%): composition (Wt .-%) SiO ₂ 55-69 Al ₂ O ₃ 18-25 Li ₂ O 3-5 Na ₂ O + K ₂ O 0-30 MgO + CaO + SrO + BaO 0-5 ZnO 0-4 TiO ₂ 0-5 ZrO2 0-5 TiO ₂ + ZrO ₂ + SnO ₂ 2-6 P ₂ O ₅ 0-8 F 0-1 B ₂ O ₃ 0-2

Optionally, coloring oxides may be added, such as Nd ₂ O ₃ , Fe ₂ O ₃ , CoO, NiO, V ₂ O ₅ , MnO ₂ , TiO ₂ , CuO, CeO ₂ , Cr ₂ O ₃ , 0-2 wt% As ₂ O ₃ , Sb ₂ O ₃ , SnO ₂ , SO ₃ , Cl, F and / or CeO ₂ can be added as refining agents, and 0-5 wt% rare earth oxides can also be added to form magnetic, photonic or optical To introduce functions in the glass sheet or plate, and the total amount of the total composition is 100 wt .-%.

In particular, a material of the aforementioned composition can have a thermal expansion coefficient of between 3 · 10 ^-6 K ^-1 and 6 · 10 ^-6 K ^-1 or between 3.3 · 10 ^-6 K ^-1 and 5.7 · 10 ^-6 K ^{- 1} have.

The lithium aluminosilicate glass preferably has the following composition (in% by weight): composition (Wt .-%) SiO ₂ 57-66 Al ₂ O ₃ 18-23 Li ₂ O 3-5 Na ₂ O + K ₂ O 3-25 MgO + CaO + SrO + BaO 1-4 ZnO 0-4 TiO ₂ 0-4 ZrO2 0-5 TiO ₂ + ZrO ₂ + SnO ₂ 2-6 P ₂ O ₅ 0-7 F 0-1 B ₂ O ₃ 0-2

Optionally, coloring oxides may be added, such as Nd ₂ O ₃ , Fe ₂ O ₃ , CoO, NiO, V ₂ O ₅ , MnO ₂ , TiO ₂ , CuO, CeO ₂ , Cr ₂ O ₃ , 0-2 wt%. As ₂ O ₃ , Sb ₂ O ₃ , SnO ₂ , SO ₃ , Cl, F and / or CeO ₂ can be added as refining agents, and 0-5 wt% rare earth oxides can also be added to form magnetic, photonic or to introduce optical functions into the glass sheet or plate, and the total amount of the total composition is 100% by weight.

In particular, a material of the aforesaid composition can have a coefficient of thermal expansion between 4.5 × 10 ^-6 K ^-1 and 6 × 10 ^-6 K ^-1 or between 4.76 × 10 ^-6 K ^-1 and 5.7 × 10 ^-6 K ^-1 have.

The lithium aluminosilicate glass more preferably has the following composition (in weight%): composition (Wt .-%) SiO ₂ 57-63 Al ₂ O ₃ 18-22 Li ₂ O 3.5-5 Na ₂ O + K ₂ O 5-20 MgO + CaO + SrO + BaO 0-5 ZnO 0-3 TiO ₂ 0-3 ZrO2 0-5 TiO ₂ + ZrO ₂ + SnO ₂ 2-5 P ₂ O ₅ 0-5 F 0-1 B ₂ O ₃ 0-2

Optionally, coloring oxides may be added, such as Nd ₂ O ₃ , Fe ₂ O ₃ , CoO, NiO, V ₂ O ₅ , MnO ₂ , TiO ₂ , CuO, CeO ₂ , Cr ₂ O ₃ , 0-2 wt%. As ₂ O ₃ , Sb ₂ O ₃ , SnO ₂ , SO ₃ , Cl, F and / or CeO ₂ may be added as refining agents and may be added as refining agents and 0-5 wt% of rare earth oxides may also be added to introduce magnetic, photonic or optical functions into the glass sheet or plate, and the total amount of the total composition is 100% by weight.

In particular, a material of the aforementioned composition may have a thermal expansion coefficient between 4 · 10 ^-6 K ^-1 and 8 · 10 ^-6 K ^-1 or between 5 · 10 ^-6 K ^-1 and 7 · 10 ^-6 K ^-1 . It can also be provided a corresponding glass ceramic which has a coefficient of thermal expansion between -0.068 · 10 ^-6 K ^-1 and 1.16 · 10 ^-6 K ^-1 .

In another example, the substrate may be a soda lime glass having the following composition (in weight percent): composition (Wt .-%) SiO ₂ 40-81 Al ₂ O ₃ 0-6 B ₂ O ₃ 0-5 Li ₂ O + Na ₂ O + K ₂ O 5-30 MgO + CaO + SrO + BaO + ZnO 5-30 TiO ₂ + ZrO ₂ 0-7 P ₂ O ₅ 0-2

Optionally, coloring oxides may be added, such as Nd ₂ O ₃ , Fe ₂ O ₃ , CoO, NiO, V ₂ O ₅ , MnO ₂ , TiO ₂ , CuO, CeO ₂ , Cr ₂ O ₃ , 0-2 wt%. As ₂ O ₃ , Sb ₂ O ₃ , SnO ₂ , SO ₃ , Cl, F and / or CeO ₂ can be added as refining agents, and 0-5 wt% rare earth oxides can also be added to form magnetic, photonic or to introduce optical functions into the glass sheet or plate, and the total amount of the total composition is 100% by weight.

Specifically, a material of the aforementioned composition has a thermal expansion coefficient between 5.25 × 10 ^-6 K ^-1 and 10 · 10 ^-6 K ^-1, or between 5.53 · 10 ^-6 K ^-1 and 9.77 x 10 ^-6 K ^-1 have.

The soda-lime glass preferably has the following composition (in% by weight): composition (Wt .-%) SiO ₂ 50-81 Al ₂ O ₃ 0-5 B ₂ O ₃ 0-5 Li ₂ O + Na ₂ O + K ₂ O 5-28 MgO + CaO + SrO + BaO + ZnO 5-25 TiO ₂ + ZrO ₂ 0-6 P ₂ O ₅ 0-2

Optionally, coloring oxides may be added, such as Nd ₂ O ₃ , Fe ₂ O ₃ , CoO, NiO, V ₂ O ₅ , MnO ₂ , TiO ₂ , CuO, CeO ₂ , Cr ₂ O ₃ , 0-2 wt%. As ₂ O ₃ , Sb ₂ O ₃ , SnO ₂ , SO ₃ , Cl, F and / or CeO ₂ can be added as refining agents, and 0-5 wt% rare earth oxides can also be added to form magnetic, photonic or to introduce optical functions into the glass sheet or plate, and the total amount of the total composition is 100% by weight.

In particular, a material of the aforementioned composition can have a coefficient of thermal expansion between 4.5 × 10 ^-6 K ^-1 and 11 × 10 ^-6 K ^-1 or between 4.94 × 10 ^-6 K ^-1 and 10.25 × 10 ^-6 K ^-1 have.

The soda lime glass more preferably has the following composition (in weight percent): composition (Wt .-%) SiO ₂ 55-76 Al ₂ O ₃ 0-5 B ₂ O ₃ 0-5 Li ₂ O + Na ₂ O + K ₂ O 5-25 MgO + CaO + SrO + BaO + ZnO 5-20 TiO ₂ + ZrO ₂ 0-5 P ₂ O ₅ 0-2

Optionally, coloring oxides may be added, such as Nd ₂ O ₃ , Fe ₂ O ₃ , CoO, NiO, V ₂ O ₅ , MnO ₂ , TiO ₂ , CuO, CeO ₂ , Cr ₂ O ₃ , 0-2 wt%. As ₂ O ₃ , Sb ₂ O ₃ , SnO ₂ , SO ₃ , Cl, F and / or CeO ₂ can be added as refining agents, and 0-5 wt% rare earth oxides can also be added to form magnetic, photonic or to introduce optical functions into the glass sheet or plate, and the total amount of the total composition is 100% by weight.

In particular, a material of the aforementioned composition can have a thermal expansion coefficient between 4.5 × 10 ^-6 K ^-1 and 11 × 10 ^-6 K ^-1 or between 4.93 × 10 ^-6 K ^-1 and 10.25 × 10 ^-6 K ^-1 have.

In another example, the substrate is a borosilicate glass having the following composition (in weight percent): composition (Wt .-%) SiO ₂ 60-85 Al ₂ O ₃ 0-10 B ₂ O ₃ 5-20 Li ₂ O + Na ₂ O + K ₂ O 2-16 MgO + CaO + SrO + BaO + ZnO 0-15 TiO ₂ + ZrO ₂ 0-5 P ₂ O ₅ 0-2

Optionally, coloring oxides may be added, such as Nd ₂ O ₃ , Fe ₂ O ₃ , CoO, NiO, V ₂ O ₅ , MnO ₂ , TiO ₂ , CuO, CeO ₂ , Cr ₂ O ₃ , 0-2 wt%. As ₂ O ₃ , Sb ₂ O ₃ , SnO ₂ , SO ₃ , Cl, F and / or CeO ₂ can be added as refining agents, and 0-5 wt% rare earth oxides can also be added to form magnetic, photonic or to introduce optical functions into the glass sheet or plate, and the total amount of the total composition is 100% by weight.

In particular, a material of the aforementioned composition can have a coefficient of thermal expansion between 2.75 × 10 ^-6 K ^-1 and 10 × 10 ^-6 K ^-1 or between 3.0 × 10 ^-6 K ^-1 and 9.01 × 10 ^-6 K ^-1 have.

The borosilicate glass more preferably has the following composition (in weight percent): composition (Wt .-%) SiO ₂ 63-84 Al ₂ O ₃ 0-8 B ₂ O ₃ 5-18 Li ₂ O + Na ₂ O + K ₂ O 3-14 MgO + CaO + SrO + BaO + ZnO 0-12 TiO ₂ + ZrO ₂ 0-4 P ₂ O ₅ 0-2

Optionally, coloring oxides may be added, such as Nd ₂ O ₃ , Fe ₂ O ₃ , CoO, NiO, V ₂ O ₅ , MnO ₂ , TiO ₂ , CuO, CeO ₂ , Cr ₂ O ₃ , 0-2 wt%. As ₂ O ₃ , Sb ₂ O ₃ , SnO ₂ , SO ₃ , Cl, F and / or CeO ₂ can be added as refining agents, and 0-5 wt% rare earth oxides can also be added to form magnetic, photonic or to introduce optical functions into the glass sheet or plate, and the total amount of the total composition is 100% by weight.

In particular, a material of the aforementioned composition can have a thermal expansion coefficient between 2.5 × 10 ^-6 K ^-1 and 8 × 10 ^-6 K ^-1 or between 2.8 × 10 ^-6 K ^-1 and 7.5 × 10 ^-6 K ^-1 have.

The borosilicate glass more preferably has the following composition (in weight percent): composition (Wt .-%) SiO ₂ 63-83 Al ₂ O ₃ 0-7 B ₂ O ₃ 5-18 Li ₂ O + Na ₂ O + K ₂ O 4-14 MgO + CaO + SrO + BaO + ZnO 0-10 TiO ₂ + ZrO ₂ 0-3 P ₂ O ₅ 0-2

Optionally, coloring oxides may be added, such as Nd ₂ O ₃ , Fe ₂ O ₃ , CoO, NiO, V ₂ O ₅ , MnO ₂ , TiO ₂ , CuO, CeO ₂ , Cr ₂ O ₃ , 0-2 wt%. As ₂ O ₃ , Sb ₂ O ₃ , SnO ₂ , SO ₃ , Cl, F and / or CeO ₂ can be added as refining agents, and 0-5 wt% rare earth oxides can also be added to form magnetic, photonic or to introduce optical functions into the glass sheet or plate, and the total amount of the total composition is 100% by weight.

In particular, a material of the aforementioned composition can have a coefficient of thermal expansion of between 3.0 × 10 ^-6 K ^-1 and 8 × 10 ^-6 K ^-1 or between 3.18 × 10 ^-6 K ^-1 and 7.5 × 10 ^-6 K ^-1 have.

In another example, the substrate is an alkali metal aluminosilicate glass having the following composition (in weight percent): composition (Wt .-%) SiO ₂ 40-75 Al ₂ O ₃ 10-30 B ₂ O ₃ 0-20 Li ₂ O + Na ₂ O + K ₂ O 4-30 MgO + CaO + SrO + BaO + ZnO 0-15 TiO ₂ + ZrO ₂ 0-15 P ₂ O ₅ 0-10

Optionally, coloring oxides may be added, such as Nd ₂ O ₃ , Fe ₂ O ₃ , CoO, NiO, V ₂ O ₅ , MnO ₂ , TiO ₂ , CuO, CeO ₂ , Cr ₂ O ₃ , 0-2 wt%. As ₂ O ₃ , Sb ₂ O ₃ , SnO ₂ , SO ₃ , Cl, F and / or CeO ₂ can be added as refining agents, and 0-5 wt% rare earth oxides can also be added to form magnetic, photonic or to introduce optical functions into the glass sheet or plate, and the total amount of the total composition is 100% by weight.

Specifically, a material of the aforementioned composition has a coefficient of thermal expansion between 3.0 x 10 ^-6 K ^-1 and 11 · 10 ^-6 K ^-1 or between 3.3 · 10 ^-6 K ^-1 and 10 · 10 ^-6 K ^{- 1} have.

The alkali metal aluminosilicate glass more preferably has the following composition (in weight percent): composition (Wt .-%) SiO ₂ 50-70 Al ₂ O ₃ 10-27 B ₂ O ₃ 0-18 Li ₂ O + Na ₂ O + K ₂ O 5-28 MgO + CaO + SrO + BaO + ZnO 0-13 TiO ₂ + ZrO ₂ 0-13 P ₂ O ₅ 0-9

Optionally, coloring oxides may be added, such as Nd ₂ O ₃ , Fe ₂ O ₃ , CoO, NiO, V ₂ O ₅ , MnO ₂ , TiO ₂ , CuO, CeO ₂ , Cr ₂ O ₃ , 0-2 wt%. As ₂ O ₃ , Sb ₂ O ₃ , SnO ₂ , SO ₃ , Cl, F, and / or CeO ₂ can be added as refining agents, and 0-5% by weight of rare earth oxides can also be added introduce magnetic, photonic or optical functions into the glass sheet or plate, and the total amount of the total composition is 100% by weight.

In particular, a material of the aforementioned composition can have a coefficient of thermal expansion between 3.75 × 10 ^-6 K ^-1 and 11 × 10 ^-6 K ^-1 or between 3.99 × 10 ^-6 K ^-1 and 10.22 × 10 ^-6 K ^-1 have.

The alkali aluminosilicate glass more preferably has the following composition (in weight percent): composition (Wt .-%) SiO ₂ 55-68 Al ₂ O ₃ 10-27 B ₂ O ₃ 0-15 Li ₂ O + Na ₂ O + K ₂ O 4-27 MgO + CaO + SrO + BaO + ZnO 0-12 TiO ₂ + ZrO ₂ 0-10 P ₂ O ₅ 0-8

Optionally, coloring oxides may be added, such as Nd ₂ O ₃ , Fe ₂ O ₃ , CoO, NiO, V ₂ O ₅ , MnO ₂ , TiO ₂ , CuO, CeO ₂ , Cr ₂ O ₃ , 0-2 wt%. As ₂ O ₃ , Sb ₂ O ₃ , SnO ₂ , SO ₃ , Cl, F and / or CeO ₂ can be added as refining agents, and 0-5 wt% rare earth oxides can also be added to form magnetic, photonic or to introduce optical functions into the glass sheet or plate, and the total amount of the total composition is 100% by weight.

In particular, a material of the aforesaid composition can have a coefficient of thermal expansion of between 4.0 × 10 ^-6 K ^-1 and 10 × 10 ^-6 K ^-1 or between 4.5 × 10 ^-6 K ^-1 and 9.08 × 10 ^-6 K ^-1 have.

In another example, the substrate is a low alkali aluminosilicate glass having the following composition (in weight percent): composition (Wt .-%) SiO ₂ 50-75 Al ₂ O ₃ 7-25 B ₂ O ₃ 0-20 Li ₂ O + Na ₂ O + K ₂ O 0-4 MgO + CaO + SrO + BaO + ZnO 5-25 TiO2 + ZrO2 0-10 P ₂ O ₅ 0-5

Optionally, coloring oxides may be added, such as Nd ₂ O ₃ , Fe ₂ O ₃ , CoO, NiO, V ₂ O ₅ , MnO ₂ , TiO ₂ , CuO, CeO ₂ , Cr ₂ O ₃ , 0-2 wt%. As ₂ O ₃ , Sb ₂ O ₃ , SnO ₂ , SO ₃ , Cl, F and / or CeO ₂ can be added as refining agents, and 0-5 wt% rare earth oxides can also be added to form magnetic, photonic or to introduce optical functions into the glass sheet or plate, and the total amount of the total composition is 100% by weight.

In particular, a material of the aforementioned composition can have a thermal expansion coefficient between 2.5 × 10 ^-6 K ^-1 and 7 × 10 ^-6 K ^-1 or between 2.8 × 10 ^-6 K ^-1 and 6.5 × 10 ^-6 K ^-1 have.

The low alkali aluminosilicate glass more preferably has the following composition (in weight percent): composition (Wt .-%) SiO ₂ 52-73 Al ₂ O ₃ 7-23 B ₂ O ₃ 0-18 Li ₂ O + Na ₂ O + K ₂ O 0-4 MgO + CaO + SrO + BaO + ZnO 5-23 TiO ₂ + ZrO ₂ 0-10 P ₂ O ₅ 0-5

Optionally, coloring oxides may be added, such as Nd ₂ O ₃ , Fe ₂ O ₃ , CoO, NiO, V ₂ O ₅ , MnO ₂ , TiO ₂ , CuO, CeO ₂ , Cr ₂ O ₃ , 0-2 wt%. As ₂ O ₃ , Sb ₂ O ₃ , SnO ₂ , SO ₃ , Cl, F and / or CeO ₂ can be added as refining agents, and 0-5 wt% rare earth oxides can also be added to form magnetic, photonic or to introduce optical functions into the glass sheet or plate, and the total amount of the total composition is 100% by weight.

In particular, a material of the aforementioned composition can have a thermal expansion coefficient between 2.5 × 10 ^-6 K ^-1 and 7 × 10 ^-6 K ^-1 or between 2.8 × 10 ^-6 K ^-1 and 6.5 × 10 ^-6 K ^-1 have.

The low alkali aluminosilicate glass more preferably has the following composition (in weight percent): composition (Wt .-%) SiO ₂ 53-71 Al ₂ O ₃ 7-22 B ₂ O ₃ 0-18 Li ₂ O + Na ₂ O + K ₂ O 0-4 MgO + CaO + SrO + BaO + ZnO 5-22 TiO ₂ + ZrO ₂ 0-8 P ₂ O ₅ 0-5

Optionally, coloring oxides may be added, such as Nd ₂ O ₃ , Fe ₂ O ₃ , CoO, NiO, V ₂ O ₅ , MnO ₂ , TiO ₂ , CuO, CeO ₂ , Cr ₂ O ₃ , 0-2 wt%. As ₂ O ₃ , Sb ₂ O ₃ , SnO ₂ , SO ₃ , Cl, F and / or CeO ₂ can be added as refining agents, and 0-5 wt% rare earth oxides can also be added to form magnetic, photonic or to introduce optical functions into the glass sheet or plate, and the total amount of the total composition is 100% by weight.

In particular, a material of the aforementioned composition can have a thermal expansion coefficient between 2.5 × 10 ^-6 K ^-1 and 7 × 10 ^-6 K ^-1 or between 2.8 × 10 ^-6 K ^-1 and 6.5 × 10 ^-6 K ^-1 have.

Especially in connection with the small and smallest structures which can be produced by the invention, thin glass or glass ceramic elements are furthermore particularly suitable. Generally, it is provided according to an embodiment of the invention that the glass or glass ceramic element 2 a thickness of less than 3000 .mu.m, preferably of less than 2500 .mu.m, preferably of less than 1500 .mu.m, more preferably of less than 500 microns and preferably of at least 3 microns, preferably of at least 50 microns, more preferably of at least 150 microns. Preferred thicknesses are 5, 10, 15, 25, 30, 35, 50, 55, 70, 80, 100, 130, 145, 160, 190, 210 or 280 μm. In particular, the glass or glass ceramic element 2 be designed as thin glass ribbon or as a glass sheet.

LIST OF REFERENCE NUMBERS

Device for laser processing 1 Glass or glass ceramic element 2 focusing optics 3 lens 4 filamentous damage 6 laser beam 7 laser pulse 8th Lens moving means 9 Ultrafast Lasers 10 parting line 12 Intended course of 12 13 computing device 15 mover 17 Opening in 2 20 Surface of 2 22 External contour of 2 24 tooth 25 optical element 30 lens holder 33 Optical axis of 4 40 Rotation axis of 33 43 Focus of 4 41 beam direction 70 Impact point of the laser beam on 2 71 beam center 73 actuator 90, 91 engine 92

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• WO 2012/006736 A2 [0004]
• DE 102012110971 A1 [0004]
• EP 2781296 A1 [0005]
• JP 2016105178 [0008]

Claims (23)

Device (1) for laser processing of a glass or glass ceramic element (2), comprising: an ultrashort pulse laser (10), - Focusing optics (3) to concentrate the laser beam (7) of the ultrashort pulse laser (10) to a long focus and filament-shaped damage (6) within the glass or the glass-ceramic to create by means of laser or glass-ceramic focused laser pulses within the glass or the glass ceramic the focusing optics (3) - A in the beam path of the ultrashort pulse laser (10) arranged lens (4), and wherein a lens movement means (9) is provided, by means of which the lens (4) transversely to the beam direction (70) is movable, so that the position of the optical Axis (40) of the lens (4) is variable relative to the position of the laser beam (7) to deflect by means of a change in position of the lens (4) relative to the laser beam (7) the laser beam (7) and thus the point of incidence (71) of the laser beam to move on the glass or glass ceramic element (2), so that by movement of the lens (4) of the elongated focus of the laser beam (7) along a parting line (12) forming predetermined path is feasible. Device (1) according to the preceding claim, wherein a computing device (15) is provided which is adapted to deliver successive control signals to the lens movement device (9), so that by the movement of the lens movement device (9) Lens (4) transversely to the beam direction of the impact point (71) of the laser beam (7) is guided along a predetermined path forming a parting line (12). Device according to the preceding claim, characterized in that the computing device (15) is arranged to control the laser emission synchronized with the position of the point of impact (71) of the laser beam (7) on the glass or glass ceramic element or the velocity of the impact point (71) , Device (1) according to one of the preceding claims, characterized by a movement device (17), with which the glass or glass ceramic element (2) is movable relative to the ultrashort pulse laser (10) during the irradiation of the laser beam (7), so that the impact point ( 71) of the laser beam (7) along a the separation line (12) forming predetermined path is feasible, which is formed by the superimposition of the means of the lens movement means (9) and the movement means (17) set positions. Device according to one of the preceding claims, characterized in that the lens movement device (9) has two adjusting devices (91, 92) for movement along two non-parallel directions transverse to the beam direction (70) of the laser beam (7) or a device (93) eccentric rotation of the lens (4). Device according to one of the preceding claims, characterized in that the ratio of beam diameter of the laser beam (7) to the diameter of the aperture of the lens (4) at least 0.25, preferably at least 0.5, more preferably at least 2/3 and preferably smaller than 2, preferably less than 1. Method (1) for laser processing of a glass or glass ceramic element (2), in which - With a focusing optics (3) of the laser beam (7) of an ultrashort pulse laser (10) is concentrated to a long focus in the glass or glass ceramic element (2), wherein - Setting a pulse power of the ultrashort pulse laser (10), which is sufficient to produce filament-shaped damage (6) within the glass or the glass ceramic by the focused in glass or glass ceramic laser pulses, wherein the focusing optics (3) in the beam path of the ultrashort pulse laser (10) arranged lens (4), and wherein - By means of a lens movement device (9) during operation of the ultrashort pulse laser (10) the lens (4) is moved transversely to the beam direction (70), so that the position of the optical axis (40) of the lens (4) relative to the position of Laser beam (7) is changed, and the movement of the lens (4) relative to the laser beam (7) deflects the laser beam (7) and thus the impact point (71) of the laser beam on the glass or glass ceramic element (2) shifts, and wherein the Impact point (71) is guided by movement of the lens (4) along a predetermined path forming a parting line (12). Method according to the preceding claim, wherein by means of a computing device (15) the lens movement device (9) is driven by skuzessive delivery of control signals, wherein in response to the successively delivered control signals, the lens (4) of the focusing optics (3) transversely to the beam direction ( 70) is moved, so that the position of the optical axis (40) of the lens (4) relative to the position of the laser beam (7), whereby the impact point (71) of the laser beam (7) on the glass or glass ceramic element (2) is moved. Method according to the preceding claim, wherein with a movement device (17) the glass or glass ceramic element (2) is moved relative to the ultrashort pulse laser (10) during the irradiation of the laser beam (7), so that the point of incidence (71) of the laser beam (7 ) is guided along a predetermined path forming the parting line (12), which is formed by the superposition of the positions set by means of the adjusting device (9) and the moving device (17). Method according to the preceding claim, characterized in that with the movement of the lens (4) deviations of the impact point (71) from the predetermined parting line (12) by unwanted movement of the glass or glass ceramic element (2) relative to the ultrashort pulse laser (10), in particular be compensated by vibrations or overshoot at a change of direction of the movement. Method according to one of the two preceding claims, characterized in that the lens movement device (9) moves the impact point (71) of the laser beam (7) against the motion of the glass or glass ceramic element (2) exerted by the movement device (17). Method according to one of the two preceding claims, characterized in that the lens movement device (9) moves the impact point (71) of the laser beam (7) on the glass or glass ceramic element (2) faster than the relative speed of the glass or glass ceramic element ( 2) with respect to the ultrashort pulse laser (10). Method according to one of the preceding claims, characterized in that the impact point (71) is moved over the glass or glass-ceramic element at a speed of more than 0.5 meters per second, preferably at a speed of up to 1 meter per second. Method according to the preceding claim, characterized in that a part of the glass or glass ceramic element (2) is separated by severing along the parting line (12). Method according to one of the preceding claims, characterized in that a closed separation line (12) with the point of impact (71) of the laser beam (7) traversed and then in the glass or glass ceramic part (2) corresponding to the shape of the parting line (12) shaped opening (20) is produced. Method according to the preceding claim, characterized in that openings (20) with a diameter smaller than 1 millimeter in the glass or glass ceramic element (2) are produced by the movement of the lens separating lines (12) and according to the shape of the separating line (12). Method according to one of the preceding claims, characterized in that by the movement of the lens (4) a dividing line (12) is traveled, which has a radius of curvature in the range of 0.05 mm to 1 mm. Method according to one of the preceding claims, characterized in that a separation on the parting line (12) comprises the etching along the inserted filamentary damage (6). Method according to one of the preceding claims, characterized in that the impact point (71) on the glass or glass ceramic element (2) is deflected relative to a position with centered lens (4) by a distance which is smaller than the displacement of the lens ( 4). Method according to one of the preceding claims, characterized in that a glass or glass ceramic element (2) made of lithium aluminosilicate glass, lithium aluminosilicate glass ceramic, soda lime glass, borosilicate glass, aluminosilicate glass or alkali metal aluminosilicate glass is processed. Method according to one of the preceding claims, characterized in that the number of filament-shaped damage (6) per unit length along the dividing line (12) is varied, in particular, wherein the number of filament-shaped damage (6) per unit length in the region of a change of direction of the dividing line ( 12) is increased. Method according to one of the preceding claims, characterized in that the urine short pulse laser is operated with one or more of the following parameters: (i) the power of the ultrashort pulse laser is preferably in a range of 20 to 300 watts; (ii) the pulse energy of a burst is more than 400 microjoules, (iii) the repetition rate of the bursts is in the range of 15 MHz to 90 MHz, preferably in the range of 20 MHz to 85 MHz, (iv) the number of pulses is in burst in the range of 1 to 10 pulses. Method according to one of the preceding claims, characterized by the following steps: (i) moving glass or glass ceramic element (2) and focusing optics (3) relative to one another by means of a movement device (17) to a processing position, (ii) stopping the movement, (iii ) by means of the lens movement device (9) by deflection of the laser beam (7) departing a parting line (12), (iv) approached by means of the moving means (17) approaching a next processing position and there again departing a parting line (12).

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