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DE10055002A1 - Device for measuring voltage potentials and analogue electrical signals of an integrated circuit has a multiplexer connected to a large number of measurement points and connected to an analog-digital converter and memory - Google Patents

Device for measuring voltage potentials and analogue electrical signals of an integrated circuit has a multiplexer connected to a large number of measurement points and connected to an analog-digital converter and memory

Info

Publication number
DE10055002A1
DE10055002A1 DE2000155002 DE10055002A DE10055002A1 DE 10055002 A1 DE10055002 A1 DE 10055002A1 DE 2000155002 DE2000155002 DE 2000155002 DE 10055002 A DE10055002 A DE 10055002A DE 10055002 A1 DE10055002 A1 DE 10055002A1
Authority
DE
Germany
Prior art keywords
analog
integrated circuit
digital converter
electrical signals
multiplexer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE2000155002
Other languages
German (de)
Inventor
Alexander Benedix
Bernd Klehn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies AG
Original Assignee
Infineon Technologies AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies AG filed Critical Infineon Technologies AG
Priority to DE2000155002 priority Critical patent/DE10055002A1/en
Publication of DE10055002A1 publication Critical patent/DE10055002A1/en
Ceased legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2836Fault-finding or characterising
    • G01R31/2844Fault-finding or characterising using test interfaces, e.g. adapters, test boxes, switches, PIN drivers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/25Arrangements for measuring currents or voltages or for indicating presence or sign thereof using digital measurement techniques
    • G01R19/2503Arrangements for measuring currents or voltages or for indicating presence or sign thereof using digital measurement techniques for measuring voltage only, e.g. digital volt meters (DVM's)
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/30Marginal testing, e.g. by varying supply voltage
    • G01R31/3004Current or voltage test
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/319Tester hardware, i.e. output processing circuits
    • G01R31/31903Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31905Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Measurement Of Current Or Voltage (AREA)

Abstract

Device for measuring voltage potentials and instantaneous values from analogue electrical signals at measurement points (1,2,3...n) of an integrated circuit (13) relative to a reference potential, particularly earth. Device comprises an analogue multiplexer (10), the inputs of which are from connectors to the measurement points and the output of which is connected to a circuit (11) for formation of a difference value between the input and the reference potential. The difference is digitized using an ADC (11) and stored in memory (12).

Description

Die Erfindung betrifft eine Vorrichtung zum Erfassen von Spannungspotentialen und Momentanwerten von analogen elektrischen Signalen an Messpunkten einer integrierten Schaltung relativ zu einem Bezugspotential, vor allem Masse.The invention relates to a device for detecting Voltage potentials and instantaneous values of analog electrical signals at measuring points of an integrated Circuit relative to a reference potential, especially ground.

Eine derartige Vorrichtung wird beispielsweise zur Designanalyse von Baugruppen einer integrierten Schaltung eingesetzt. Wenn die integrierte Schaltung unverpackt vorliegt, werden bislang sogenannte Probes bzw. Sonden, d. h. sehr dünne Spitzen aus leitfähigem Material mittels mechanischer Manipulatoren auf einem Wafer aufgesetzt, auf welchem die integrierte Schaltung implementiert ist, und mit externen Messgeräten verbunden. Im Falle verpackter integrierte Schaltungen werden u. a. in ähnlicher Weise die Anschlüsse des jeweiligen Chips kontaktiert. Der Aufbau derartiger herkömmlicher Vorrichtungen ist relativ kompliziert und ihr Einsatz gestaltet sich aufwendig. Ferner sind diese Vorrichtungen weniger geeignet, die Spannungspotentiale und analogen elektrischen Signale während anderer Untersuchungen an der integrierten Schaltung problemlose aufzuzeichnen.Such a device is used, for example Design analysis of components of an integrated circuit used. If the integrated circuit is unpacked So-called probes or probes, d. H. very thin tips made of conductive material mechanical manipulators placed on a wafer which the integrated circuit is implemented, and with connected to external measuring devices. In the case of packaged integrated circuits are u. a. similarly the Connections of the respective chip contacted. The structure such conventional devices are relative complicated and their use is complex. Further these devices are less suitable, the Voltage potentials and analog electrical signals during other investigations on the integrated circuit easy to record.

Eine Aufgabe der Erfindung besteht darin, eine Vorrichtung der eingangs genannten Art zu schaffen, die ohne großen Aufwand in zuverlässiger Weise die Spannungspotential- und Signalerfassung gewährleistet.An object of the invention is a device of the type mentioned at the beginning, which create without great Effort in a reliable manner the voltage potential and Guaranteed signal acquisition.

Gelöst wird diese Aufgabe durch die Merkmale des Anspruchs 1. Vorteilhafte Weiterbildungen der Erfindung sind in den Unteransprüchen angegeben. This object is achieved by the features of claim 1. Advantageous developments of the invention are in the Subclaims specified.  

Anstelle der bisher üblichen manuellen punktweisen Potential- und Signalerfassung sieht die Erfindung eine gleichzeitige Messung an sämtlichen relevanten Messpunkten mittels eines Analog-Multiplexers vor. Am Ausgang dieses Multiplexers liegen die Eingangssignale seriell an und werden dann einzeln mit dem gewünschten Bezugspotential verglichen. Das entsprechende Differenz- bzw. Vergleichsergebnis wird erfindungsgemäß einer Analog-/Digitalwandlung unterworfen und in einen Zwischenspeicher geschrieben und aus diesem nach jedem vollständigem Messzyklus ausgegeben.Instead of the previously used manual point-by-point potential and signal detection, the invention sees a simultaneous Measurement at all relevant measuring points using a Analog multiplexers before. At the output of this multiplexer the input signals are serial and are then individual compared with the desired reference potential. The corresponding difference or comparison result subject to an analog / digital conversion according to the invention and written to a buffer and from there every complete measuring cycle.

Die Bestimmung der Potentialdifferenz zwischen den gemultiplexten Messleitungen und dem Bezugspotential kann in beliebiger definierter Reihenfolge erfolgen.Determining the potential difference between the multiplexed test leads and the reference potential can be in in any defined order.

Die erfindungsgemäße Vorrichtung erlaubt durch Verwendung des analogen Multiplexers die relevanten Spannungen und Momentanwerte der analogen elektrischen Signale auch während anderer Untersuchungen an der integrierten Schaltung zu erfassen, insbesondere aufzuzeichnen.The device according to the invention allows by using the analog multiplexer the relevant voltages and Instantaneous values of the analog electrical signals also during other investigations on the integrated circuit capture, especially record.

Bekannte Analog-/Digitalwandler erlauben in der Eingangsstufe einen Vergleich zwischen dem anliegenden Analogsignal und einer externen Spannungsreferenz, weshalb bevorzugt die Differenzbildungsschaltung, die dem Multiplexer nachgeschaltet ist, in den Analog-/Digitalwandler integriert ist.Known analog / digital converters allow in the input stage a comparison between the applied analog signal and an external voltage reference, which is why the Differential formation circuit, the multiplexer downstream is integrated in the analog / digital converter is.

Um den in der Praxis auftretenden Gegebenheiten Rechnung zu tragen, erfolgt vorteilhafterweise die Messung mittels der erfindungsgemäßen Vorrichtung bei veränderbarer Taktrate.In order to take account of the conditions that occur in practice wear, the measurement is advantageously carried out by means of Device according to the invention with variable clock rate.

Die Ausgabe der digitalen Signale aus dem Zwischenspeicher erfolgt entweder seriell über einen einzigen Ausgangsanschluss oder parallel über mehrere derartige Anschlüsse. The output of the digital signals from the buffer is done either serially over a single one Output connection or in parallel over several such Connections.  

Nachfolgend wird die Erfindung anhand der Zeichnungen beispielhaft näher erläutert; die einzige Figur der Zeichnung zeigt schematisch in Gestalt eines Blockschaltbildes eine bevorzugte Ausführungsform der erfindungsgemäßen Vorrichtung.The invention is described below with reference to the drawings exemplified in more detail; the only figure in the drawing shows schematically in the form of a block diagram preferred embodiment of the device according to the invention.

Von der zu testenden integrierten Schaltung 13 sind in der Figur lediglich schematisch die Messpunkte 1, 2, 3, . . . n-1, n (n ist eine ganze Zahl) dargestellt. Diese Messpunkte sind über Messleitungen mit n Anschlüssen eines Analog- Multiplexers 10 verbunden. Ausgangsseitig ist der Multiplexer 10 mit einem Analog-/Digitalwandler 11 verbunden, dessen Ausgang mit einem Zwischenspeicher 12 verbunden ist, der Speicherzellen U1 bis Un umfasst. An der Eingangsstufe des Analog-/Digitalwandlers 11 ist ein Bezugspotential in Gestalt einer externen Spannungsreferenz VREF angelegt. Diese Spannungsreferenz VREF dient dazu, zwischen dem jeweils am Ausgang des Multiplexers 10 anliegenden Spannungspotential bzw. Momentanwert des analogen elektrischen Signals eine Differenz zu bilden, die daraufhin in der nachfolgenden Wandlerstufe in ein Digitalsignal umgesetzt wird, welches im Zwischenspeicher 12 abgelegt wird. Sobald die Differenz zwischen sämtlichen Spannungspotentialen bzw. Momentanwerten von analogen elektrischen Signalen an den Messpunkten 1, 2, 3, . . . n-1, n erfasst und in digitaler Form im digitalen Zwischenspeicher 12 abgelegt sind, werden diese Werte entweder seriell oder parallel aus dem Zwischenspeicher 12 ausgegeben und angezeigt oder aufgezeichnet auf einer nicht dargestellten hierfür geeigneten Einrichtung.Of the integrated circuit 13 to be tested, the measuring points 1, 2, 3,. , , n-1, n (n is an integer). These measuring points are connected to n connections of an analog multiplexer 10 via measuring lines. On the output side, the multiplexer 10 is connected to an analog / digital converter 11 , the output of which is connected to a buffer store 12 which comprises memory cells U 1 to U n . A reference potential in the form of an external voltage reference V REF is applied to the input stage of the analog / digital converter 11 . This voltage reference V REF serves to form a difference between the voltage potential or instantaneous value of the analog electrical signal present at the output of the multiplexer 10 , which is then converted in the subsequent converter stage into a digital signal, which is stored in the buffer store 12 . As soon as the difference between all voltage potentials or instantaneous values of analog electrical signals at measuring points 1, 2, 3,. , , n-1, n are recorded and stored in digital form in the digital buffer store 12 , these values are either output serially or in parallel from the buffer store 12 and displayed or recorded on a device (not shown) suitable for this purpose.

Die Steuerung des Analog-/Digitalwandlers 11 erfolgt in bekannter Weise über einen Takteingang (Clock) und einen Freigabeeingang (Enable). Diese Taktrate wird auch zur Ansteuerung des analogen Multiplexers 10 und des Speichers 12 verwendet und ist ggf. bevorzugt veränderbar.The control of the analog / digital converter 11 takes place in a known manner via a clock input (clock) and an enable input (enable). This clock rate is also used to control the analog multiplexer 10 and the memory 12 and can preferably be changed if necessary.

Claims (5)

1. Vorrichtung zum Erfassen von Spannungspotentialen und Momentanwerten von analogen elektrischen Signalen an Messpunkten (1, 2, 3, . . ., n-1, n) einer integrierten Schaltung 13 relativ zu einem Bezugspotential, vor allem Masse, gekennzeichnet durch einen analogen Multiplexer (10), dessen Eingänge über Messleitungen mit den Messpunkten (1, 2, 3, . . ., n-1, n) verbindbar sind, und dessen Ausgang mit einer Schaltung zur Bildung einer Differenz zwischen dem Multiplexer- Ausgangssignal und dem Bezugspotential verbunden ist, einen Analog-/Digitalwandler (11) zum Gewinnen eines Digitalsignals aus dem analogen Differenzsignal der Differenzbildungsschaltung, und einen Speicher (12) zum Zwischenspeichern der Digitalsignale.1. Device for detecting voltage potentials and instantaneous values of analog electrical signals at measuring points (1, 2, 3,..., N-1, n) of an integrated circuit 13 relative to a reference potential, especially ground, characterized by an analog multiplexer ( 10 ), the inputs of which can be connected to the measuring points (1, 2, 3,..., N-1, n) via measuring lines, and the output of which is connected to a circuit for forming a difference between the multiplexer output signal and the reference potential , an analog / digital converter ( 11 ) for extracting a digital signal from the analog difference signal of the difference-forming circuit, and a memory ( 12 ) for temporarily storing the digital signals. 2. Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, dass die Differenzbildungsschaltung in den Analog-/Digital­ wandler (11) integriert ist, an welchen das Bezugspotential als externe Spannungsreferenz (VREF) ist.2. Device according to claim 1, characterized in that the difference formation circuit in the analog / digital converter ( 11 ) is integrated, at which the reference potential is as an external voltage reference (V REF ). 3. Vorrichtung nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass sie mit einer variablen Taktrate betreibbar ist.3. Device according to claim 1 or 2, characterized characterized that they have a variable clock rate is operable. 4. Vorrichtung nach Anspruch 1, 2 oder 3, gekennzeichnet durch eine parallele Ausgabe der Digitalsignale aus dem Zwischenspeicher (12). 4. The device according to claim 1, 2 or 3, characterized by a parallel output of the digital signals from the buffer ( 12 ). 5. Vorrichtung nach Anspruch 1, 2 oder 3, gekennzeichnet durch eine serielle Ausgabe der Digitalsignale aus dem Zwischenspeicher (12).5. The device according to claim 1, 2 or 3, characterized by a serial output of the digital signals from the buffer ( 12 ).
DE2000155002 2000-11-07 2000-11-07 Device for measuring voltage potentials and analogue electrical signals of an integrated circuit has a multiplexer connected to a large number of measurement points and connected to an analog-digital converter and memory Ceased DE10055002A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE2000155002 DE10055002A1 (en) 2000-11-07 2000-11-07 Device for measuring voltage potentials and analogue electrical signals of an integrated circuit has a multiplexer connected to a large number of measurement points and connected to an analog-digital converter and memory

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DE2000155002 DE10055002A1 (en) 2000-11-07 2000-11-07 Device for measuring voltage potentials and analogue electrical signals of an integrated circuit has a multiplexer connected to a large number of measurement points and connected to an analog-digital converter and memory

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DE10055002A1 true DE10055002A1 (en) 2002-05-16

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116481599A (en) * 2023-06-25 2023-07-25 珠海矽敏科技有限公司 Multichannel signal acquisition device and sensor system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5610826A (en) * 1991-04-30 1997-03-11 Texas Instruments Incorporated Analog signal monitor circuit and method
DE19825560A1 (en) * 1998-06-08 1999-12-09 Kt Elektronik Klaucke Und Part Analog-digital converter for heating control

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5610826A (en) * 1991-04-30 1997-03-11 Texas Instruments Incorporated Analog signal monitor circuit and method
DE19825560A1 (en) * 1998-06-08 1999-12-09 Kt Elektronik Klaucke Und Part Analog-digital converter for heating control

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116481599A (en) * 2023-06-25 2023-07-25 珠海矽敏科技有限公司 Multichannel signal acquisition device and sensor system

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