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CN88211603U - Dynamic Humidity Calibration Device - Google Patents

Dynamic Humidity Calibration Device Download PDF

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CN88211603U
CN88211603U CN 88211603 CN88211603U CN88211603U CN 88211603 U CN88211603 U CN 88211603U CN 88211603 CN88211603 CN 88211603 CN 88211603 U CN88211603 U CN 88211603U CN 88211603 U CN88211603 U CN 88211603U
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humidity
dew point
gas
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黎修琪
毛平天
骆如枋
何焕南
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Shanghai Institute of Microsystem and Information Technology of CAS
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Shanghai Institute of Metallurgy
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Abstract

The utility model relates to a calibration device for dynamic humidity, belonging to the field of the testing or calibrating meteorological apparatus, aiming to build a calibration device for low humidity to calibrate the apparatus and the sensor for humidity measurement, comprising an air drying system, an air humidifying system, and a dew point apparatus. The air drying system adopts the arrangement mode of 5A molecular sieve-3A molecular sieve-liquid nitrogen freezing spiral pipe; the air humidifying system uses an activated carbon +HT-1 type catalyst pipe; the thermocouple of the dew point apparatus is welded in a hole under the center of a condensate mirror surface. The calibration device for dynamic humidity is simple and practical, and the calibration range for dynamic humidity is-110 DEG C-20 DEG C bloom point.

Description

本实用新型“动态湿度校准装置”属于气象学仪表的测试或校准领域。The utility model "dynamic humidity calibration device" belongs to the field of testing or calibration of meteorological instruments.

凡相对测量湿度的仪器和传感器,都要用其他标准湿度方法进行校准。许多文章已对湿度标准作了评述(例如:(1)K.G.Parker3,Mea3 ure-ment and Control,12(2),p·73(1979);(2)稻松照子,计测技术, 5(3),p.27(1977);(3)王维通,分析仪器,(3),p.20(1978);(4)郝光完译,半导体敏感器件,(1),p.54,(1986)。美国国家标准局的Hasegawa把湿度标准分为基准、标准、二级标准和工作标准四大类,概述了重量法、双压法、双温法、双流法和湿度固定点法等湿度标准方法的原理及该局开发的可作为二级标准用的有关仪器(S.Hasegawa,ISA Trans., 25(3),15(1986))。这些方法中,双流法(混合法或分流法)惯性小,适合于动态研究,因而得到广泛应用。露点法是绝对测湿方法,精密露点仪和露点仪可分别作为二级标准和工作标准。All instruments and sensors that measure relative humidity must be calibrated with other standard humidity methods. Many articles have reviewed humidity standards (for example: (1) KGParker3, Mea3 ure-ment and Control, 12 (2), p.73 (1979); (2) Inamatsu Teruko, Measuring Technology, 5 (3 ), p.27 (1977); (3) Wang Weitong, Analytical Instruments, (3), p.20 (1978); (4) Translated by Hao Guang, Semiconductor Sensitive Devices, (1), p.54, (1986 ). Hasegawa of the American National Bureau of Standards divided the humidity standards into four categories: benchmark, standard, secondary standard and working standard, and outlined the humidity standards such as gravimetric method, double pressure method, double temperature method, double flow method and humidity fixed point method The principle of the method and related instruments developed by the Bureau as secondary standards (S.Hasegawa, ISA Trans., 25 (3), 15 (1986)). Among these methods, the double-flow method (mixed method or split method) The inertia is small and it is suitable for dynamic research, so it is widely used. The dew point method is an absolute humidity measurement method, and the precision dew point meter and the dew point meter can be used as the secondary standard and the working standard respectively.

杨国栋和曾一钉(传感器技术,(3),p.27(1986))介绍了国外几种分流法湿度发生器。这种湿度发生器将干、湿两股气流混合(又称稀释)以得到连续流动的、水蒸汽含量已知的且可调节的恒湿气流。因此,这种装置包含干燥气体发生装置和干气增湿装置。例如,我国引进的M136型湿度校准装置,它采用二次稀释流程,所发生的恒湿气流中水蒸汽含量能在1~3600000ppm中按需加以调节,并用精密露点仪给出准确值。该装置有能获得霜点为-87℃的气体干燥系统和低限霜点为-73.3C的恒湿气流。该装置准确度高,可变湿度范围广。但该装置结构复杂,价格昂贵,且低限霜点仍太高,不适于更低湿度仪器的校准和检验。Yang Guodong and Zeng Yiding (Sensor Technology, (3), p.27 (1986)) introduced several foreign humidity generators with shunt method. This humidity generator mixes (also known as dilution) the dry and wet air streams to obtain a continuous flow of air with a known and adjustable moisture vapor content. Therefore, such devices include dry gas generators and dry gas humidifiers. For example, the M136 humidity calibration device introduced in my country adopts a secondary dilution process, and the water vapor content in the generated constant humidity airflow can be adjusted as needed within 1-3,600,000ppm, and an accurate value is given by a precision dew point meter. The device has a gas drying system capable of obtaining a frost point of -87°C and a constant humidity airflow with a minimum frost point of -73.3°C. The device is highly accurate and has a wide range of variable humidity. However, the structure of the device is complicated, the price is expensive, and the lower limit frost point is still too high, so it is not suitable for the calibration and inspection of lower humidity instruments.

本实用新型的目的在于建立低湿校准装置,用以校准湿度测量的仪器和传感器。这一装置的湿度动态校准范围为-110℃~-20℃霜点(相当于0.001~1000ppmH2O)。The purpose of the utility model is to establish a low-humidity calibration device for calibrating instruments and sensors for humidity measurement. The humidity dynamic calibration range of this device is -110°C to -20°C frost point (equivalent to 0.001 to 1000ppmH 2 O).

本实用新型由气体干燥系统、气体增湿系统和露点仪三部分构成。The utility model is composed of three parts: a gas drying system, a gas humidifying system and a dew point meter.

1.气体干燥系统:由5A分子筛管、3A分子筛管和液氮冷冻螺旋管组成。用99.99%的钢瓶纯氢作气源。该干燥系统的特征在于其排列方式。与通常使用的3A分子筛-5A分子筛-液氮冷冻螺旋管的排列不同,采用5A分子筛-3A分子筛-液氮冷冻螺旋管的排列方式。这是因为注意到干燥效能是5A分子筛<3A分子筛<液氮冷冻螺旋管,用本实用新型的排列方式使气体中水分的干燥采取逐级收紧,这样获得的干燥氢气的霜点低于-122℃。这种干燥气体我们称为“零点”气体。1. Gas drying system: composed of 5A molecular sieve tube, 3A molecular sieve tube and liquid nitrogen freezing spiral tube. Use 99.99% pure hydrogen in cylinders as the gas source. The drying system is characterized by its arrangement. Different from the commonly used arrangement of 3A molecular sieve-5A molecular sieve-liquid nitrogen freezing spiral tube, the arrangement of 5A molecular sieve-3A molecular sieve-liquid nitrogen freezing spiral tube is adopted. This is because it is noted that the drying efficiency is 5A molecular sieve<3A molecular sieve<liquid nitrogen freezing spiral tube, and the arrangement of the utility model makes the drying of the moisture in the gas gradually tightened, so that the frost point of the dried hydrogen obtained in this way is lower than - 122°C. This dry gas is called "zero point" gas.

2.气体增湿系统:由活性碳+催化剂管、外渗式渗透管及放置渗透管的恒温槽组成。用钢瓶普氢作气源。本实用新型采用HT-1型催化剂(大连催化剂厂产),可把普氢中的氧催化为水加以利用。活性碳可除去普氢中的低级碳氢化合物或油蒸汽。调节恒温槽水温来改变渗透管渗水率。通过针阀向“零点”气流(干气流)中加入适量增湿后的普氢可调节混合气流中的湿度。2. Gas humidification system: It is composed of activated carbon + catalyst tube, external permeation tube and constant temperature tank for placing the permeation tube. Use cylinders of ordinary hydrogen as the gas source. The utility model adopts HT-1 type catalyst (produced by Dalian Catalyst Factory), which can catalyze the oxygen in ordinary hydrogen into water for utilization. Activated carbon can remove low-level hydrocarbons or oil vapor in ordinary hydrogen. Adjust the water temperature of the constant temperature tank to change the water seepage rate of the permeation tube. The humidity in the mixed airflow can be adjusted by adding an appropriate amount of humidified hydrogen peroxide to the "zero point" airflow (dry airflow) through the needle valve.

3.露点仪:用作测量混合气体的绝对湿度。它由带磨口的玻璃罩壳、带镜面的紫铜感温棒、铜-康铜热电偶和数字电压表组成。由于露点仪的准确度与热电偶的安装位置关系极大,要求热电偶贴近冷凝表面。传统的方式是将热电偶安装在镜面下的平行通孔中或用铜塞把热电偶斜塞在镜面下面。这些方法加工不便,而且不易固定。本实用新型是在镜面下打一斜孔,孔底位于镜面中心,用焊钖将铜-康铜热电偶焊在斜孔中。这种结构既安装方便又保证了测量精度。3. Dew point meter: used to measure the absolute humidity of the mixed gas. It consists of a ground glass case, a copper temperature sensing rod with a mirror, a copper-constantan thermocouple and a digital voltmeter. Since the accuracy of the dew point meter has a great relationship with the installation position of the thermocouple, the thermocouple is required to be close to the condensation surface. The traditional way is to install the thermocouple in the parallel through hole under the mirror or use a copper plug to obliquely plug the thermocouple under the mirror. These methods are inconvenient to process and not easy to fix. The utility model is to punch a slanted hole under the mirror surface, the bottom of the hole is located at the center of the mirror surface, and the copper-constantan thermocouple is welded in the slanted hole with welding tin. This structure not only facilitates installation but also ensures measurement accuracy.

本实用新型包括干燥系统、增湿系统和露点仪之间的连接管线及零部件都由玻璃和不锈钢构成,所有连接部位都采用焊接或螺丝密封连接,以杜绝漏气。整个装置安装在恒温室内,保证工作条件相对稳定。The utility model includes the connecting pipelines and parts between the drying system, the humidifying system and the dew point meter, all of which are made of glass and stainless steel, and all the connecting parts are sealed and connected by welding or screws to prevent air leakage. The whole device is installed in a constant temperature room to ensure relatively stable working conditions.

附图1是本实用新型的气体流程图。其中虚线框内的部件都安装在仪器箱中。它和其余诸部件一起构成本实用新型的动态湿度校准装置。图中诸部件名称是:1.纯氢气瓶;2.减压阀;3.5A和3A分子筛管;4.稳压阀;5.液氮杜瓦瓶;6.不锈钢螺旋冷凝管;7.热交换管;8.自制露点仪;9.铜-康铜热电偶;10.冰杜瓦瓶;11.PZ8型数字电压表;12.WTK30-1型针阀;13.待校测湿仪表或传感器,本图中是氧化铝湿敏传感器;14.转子流量计;15.普氢瓶;16.活性碳+HT-1型催化剂管;17.渗透管;18.超级恒温槽。Accompanying drawing 1 is the gas flow chart of the utility model. The components inside the dotted line frame are all installed in the instrument case. Together with other components, it constitutes the dynamic humidity calibration device of the present utility model. The names of the components in the figure are: 1. Pure hydrogen cylinder; 2. Pressure reducing valve; 3.5A and 3A molecular sieve tubes; 4. Regulator valve; Exchange tube; 8. Self-made dew point meter; 9. Copper-constantan thermocouple; 10. Ice Dewar bottle; 11. PZ8 digital voltmeter; 12. WTK30-1 needle valve; Sensors, in this picture are alumina humidity sensors; 14. Rotameter; 15. Hydrogen bottle; 16. Activated carbon + HT-1 catalyst tube; 17. Permeation tube; 18. Super constant temperature tank.

附图2是本实用新型的一部份——图1中标号8-11部件的露点法测湿装置示意图。图中:21.是进气喷嘴;22.是玻璃罩壳;23.是橡皮塞;24.是带镜面的紫铜感温棒;25.为液氮杜瓦瓶;26.是铜-康铜热电偶;27.是数字电压表;28.是U型玻璃管;29.是冰水杜瓦瓶。Accompanying drawing 2 is a part of the present utility model -- the schematic diagram of the dew point method wet measuring device of label 8-11 part in Fig. 1. In the figure: 21. is the air inlet nozzle; 22. is the glass cover; 23. is the rubber stopper; 24. is the copper temperature-sensing rod with a mirror; 25. is the liquid nitrogen Dewar bottle; 26. is the copper-constantan Thermocouple; 27. is a digital voltmeter; 28. is a U-shaped glass tube; 29. is an ice water Dewar bottle.

本实用新型使用氢气作气源,易于检漏。由于连接部位密封,安全也不成问题。当然也可以用其它气体(如氮等)作气源,但由于不能使用液氮冷冻螺旋管,干气流霜点较高,校准的低限湿度要高些。The utility model uses hydrogen as a gas source and is easy to detect leaks. Safety is also not an issue due to the sealed connections. Of course, other gases (such as nitrogen, etc.) can also be used as the gas source, but because the liquid nitrogen freezing coil cannot be used, the frost point of the dry air flow is higher, and the lower limit humidity of the calibration is higher.

本实用新型采用干、湿气流一次稀释,就能得到不同湿度的恒湿气流,既可获得低霜点,又能连续增湿。在结构上比目前多采用二次稀释法装置简单。The utility model adopts one-time dilution of dry and wet air to obtain constant humidity air with different humidity, which can not only obtain low frost point, but also continuously humidify. Structurally, it is simpler than the second dilution method used at present.

使用本实用新型,可以在广泛的湿度范围内校准湿度测量仪器或湿敏传感器,其动态校准范围为-110℃~-20℃霜点,相当于0.001~1000ppm,的水含量。使用本实用新型中的露点仪,对通过高效变色干燥剂(含P2O3)(见中国专利CN86101504)干燥气体中的水含量进行测定,其结果与80年代国际上同类型干燥剂(美国Mallinckrodt公司生产的Aquasorb)干燥后气体霜点降至-96℃和苏联化学手册(第一卷,p.52,中文版)列出的数据(将P2O3上的平衡水蒸汽压2×10-5mmHg换算为霜点值为-96.6℃)一致;与其他测量方法(例如上海唐山仪表生产的电解式水分仪)进行对照测定,结果吻合。这些测定结果列于表1。表2是用本实用新型中的露点仪测定各种气体中水分的典型结果。Using the utility model, the humidity measuring instrument or the humidity sensor can be calibrated in a wide range of humidity, and its dynamic calibration range is -110°C to -20°C frost point, which is equivalent to a water content of 0.001-1000ppm. Use the dew point meter in the utility model to measure the water content in the drying gas through the high-efficiency color-changing desiccant (containing P 2 O 3 ) (see Chinese patent CN86101504), and the result is the same as that of the same type of desiccant (US Aquasorb produced by Mallinckrodt Company) after drying, the gas frost point drops to -96°C and the data listed in the Soviet Chemical Handbook ( vol . 10 -5 mmHg converted to frost point value -96.6°C) is consistent; it is consistent with other measurement methods (such as the electrolytic moisture meter produced by Shanghai Tangshan Instruments) and the results are consistent. The results of these measurements are listed in Table 1. Table 2 is the typical result of measuring moisture in various gases with the dew point meter in the utility model.

表1    露点仪准确度考察结果(露点,℃)Table 1 Dew point meter accuracy inspection results (dew point, ℃)

注1.与美国产的Aquasort干燥剂干燥后气体霜点降低-96℃一致;也和苏联化科手册数据一致,Note 1. It is consistent with the Aquasort desiccant produced in the United States, and the gas frost point is lowered to -96°C after drying; it is also consistent with the data in the Soviet Chemical Science Manual,

注2.系四次以上测定结果的平均值,电解式水分仪为上海唐山仪表厂生产,Note 2. It is the average value of more than four measurement results. The electrolytic moisture meter is produced by Shanghai Tangshan Instrument Factory.

*是表示其结果是由ppm值换算为霜点值。* means that the result is converted from the ppm value to the frost point value.

表2    露点仪测定各种气体中水分的典型结果Table 2 Typical results of dew point meter measuring moisture in various gases

Figure 88211603_IMG3
Figure 88211603_IMG3

表1和表2结果表明,本实用新型中露点仪所测得结果的准确度、灵敏度和重复性都是令人满意的。The results in Table 1 and Table 2 show that the accuracy, sensitivity and repeatability of the results measured by the dew point meter in the utility model are all satisfactory.

为了对湿度测量仪器或湿敏传感器进行校准(例如,要校准氧化铝湿敏传感器,可使用本实用新型装置(图1)。将通过干燥系统(图1中的3-7)和增湿系统(图1中的16-18)的混合气流分成两路,用露点仪(图1中的8)测定一路混合气体的露点(含水量),另一路混合气流通过氧化铝湿敏传感器(图1中的13),可串联或并联多个湿敏传感器同时校准。由于不同含水量的混合气流通过湿敏传感器,氧化铝湿敏传感器的电容值或导纳值会发生相应的变化。测得平衡时湿敏传感器的电讯号(电容值或导纳值,实际用导纳值)与露点仪测量值一一对应,从而达到校准的目的。In order to calibrate the humidity measuring instrument or humidity sensor (for example, to calibrate the aluminum oxide humidity sensor, the utility model device (Figure 1) can be used. It will pass through the drying system (3-7 in Figure 1) and the humidification system (16-18 in Figure 1) The mixed gas flow is divided into two paths, the dew point (moisture content) of the mixed gas in one path is measured with a dew point meter (8 in Figure 1), and the mixed gas flow in the other path passes through the aluminum oxide humidity sensor (Figure 1 In 13), multiple humidity sensors can be connected in series or in parallel to calibrate at the same time. Since the mixed airflow with different water content passes through the humidity sensor, the capacitance value or admittance value of the alumina humidity sensor will change accordingly. The measured balance The electric signal (capacitance value or admittance value, the actual admittance value) of the time-humidity sensor corresponds to the measured value of the dew point meter one by one, so as to achieve the purpose of calibration.

Claims (2)

1, the utility model is the dynamic psychrometric calibrating installation, belongs to the test or the verification field of meteorological apparatus, it by the gas-drying system that comprises molecular sieve and liquid nitrogen frozen spiral pipe, comprise osmos tube etc. and form with the humidification system and the dew point hygrometer of calibration cell.Of the present utility model being characterised in that
(1) the molecule screen casing of gas-drying system and liquid nitrogen frozen spiral pipe arrangement mode are: the spiral pipe of 5A molecule screen casing-3A molecule screen casing-liquid nitrogen frozen.
(2) in the humidification system acticarbon+catalyst tube is arranged, catalyzer adopts HT-1 type catalyzer.
(3) in the dew point hygrometer, copper-constantan thermocouple is welded in the inclined hole under the minute surface, and the inclined hole bottom is positioned at the minute surface center.
2,, it is characterized in that the connection between gas-drying system, humidification system and the dew point hygrometer all adopts welding or screw to be tightly connected by the described dynamic psychrometric calibrating installation of claim 1.
CN 88211603 1988-04-07 1988-04-07 Dynamic Humidity Calibration Device Withdrawn CN88211603U (en)

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101949747A (en) * 2010-09-03 2011-01-19 兰州交通大学 Calibration measuring system and measuring method of dynamic response characteristic of humidity sensing element
CN102128860A (en) * 2010-12-14 2011-07-20 中国人民解放军海军航空工程学院 Dynamic parameter measuring system for humidity sensor
CN104950078A (en) * 2015-06-04 2015-09-30 西安交通大学 Flow wet steam humidity probe calibration device and method
CN105424750A (en) * 2015-10-30 2016-03-23 长春气象仪器研究所 Dew point transducer based on surface acoustic wave sensing element
CN105758990A (en) * 2014-12-17 2016-07-13 国家电网公司 A Calibration System for SF6 Gas Moisture Content Detector in GIS
CN105974099A (en) * 2016-07-19 2016-09-28 山东博硕电子有限公司 Dynamic measuring calibration device for dinas moisture sensor
CN107991436A (en) * 2017-11-22 2018-05-04 国家海洋局第海洋研究所 Suitable for the one-touch humidity sensor field calibration system and method for deep ocean buoy
CN111220775A (en) * 2020-01-20 2020-06-02 中国特种设备检测研究院 Saturated or supersaturated flue gas moisture content measurement calibrating device

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101949747A (en) * 2010-09-03 2011-01-19 兰州交通大学 Calibration measuring system and measuring method of dynamic response characteristic of humidity sensing element
CN101949747B (en) * 2010-09-03 2011-11-16 兰州交通大学 Calibration measuring system and measuring method of dynamic response characteristic of humidity sensing element
CN102128860A (en) * 2010-12-14 2011-07-20 中国人民解放军海军航空工程学院 Dynamic parameter measuring system for humidity sensor
CN105758990A (en) * 2014-12-17 2016-07-13 国家电网公司 A Calibration System for SF6 Gas Moisture Content Detector in GIS
CN105758990B (en) * 2014-12-17 2018-01-19 国家电网公司 A kind of calibration system for being used for SF6 gas micro water content detectors in GIS
CN104950078A (en) * 2015-06-04 2015-09-30 西安交通大学 Flow wet steam humidity probe calibration device and method
CN105424750A (en) * 2015-10-30 2016-03-23 长春气象仪器研究所 Dew point transducer based on surface acoustic wave sensing element
CN105974099A (en) * 2016-07-19 2016-09-28 山东博硕电子有限公司 Dynamic measuring calibration device for dinas moisture sensor
CN107991436A (en) * 2017-11-22 2018-05-04 国家海洋局第海洋研究所 Suitable for the one-touch humidity sensor field calibration system and method for deep ocean buoy
CN111220775A (en) * 2020-01-20 2020-06-02 中国特种设备检测研究院 Saturated or supersaturated flue gas moisture content measurement calibrating device
CN111220775B (en) * 2020-01-20 2023-02-17 中国特种设备检测研究院 A calibration device for measuring the moisture content of saturated or supersaturated flue gas

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