CN85202460U - Liquid metal focusing ion-gun with multi-operating modes - Google Patents
Liquid metal focusing ion-gun with multi-operating modes Download PDFInfo
- Publication number
- CN85202460U CN85202460U CN 85202460 CN85202460U CN85202460U CN 85202460 U CN85202460 U CN 85202460U CN 85202460 CN85202460 CN 85202460 CN 85202460 U CN85202460 U CN 85202460U CN 85202460 U CN85202460 U CN 85202460U
- Authority
- CN
- China
- Prior art keywords
- gun
- electrode
- liquid metal
- operating modes
- focusing ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
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- 229910001338 liquidmetal Inorganic materials 0.000 title claims abstract description 13
- 238000000605 extraction Methods 0.000 claims description 14
- 230000001105 regulatory effect Effects 0.000 abstract description 3
- 229910052715 tantalum Inorganic materials 0.000 abstract description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 abstract description 3
- 150000002500 ions Chemical class 0.000 description 17
- 238000009413 insulation Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Abstract
The utility model relates to a liquid metal focusing ion-gun with multi-operating modes, which is a tool suitable for the fine processing and analyzing of the scientific research purpose. The liquid metal focusing ion-gun with multi-operating modes is characterized in that the liquid metal focusing ion-gun with multi-operating modes adopts fixed electrodes; the anode needle can greatly slip; the liquid metal focusing ion-gun with multi-operating modes is matched with different electrode wiring positions, and consequently multi-operating modes are formed, wherein, the anode needle is extended the first electrode, the first electrode is used as the grid electrode, the second electrode is used as the leading-out electrode, and the grid-controlled operating mode is formed. In addition, the liquid metal focusing ion-gun with multi-operating modes can also form the ion source mode, the simple focusing ion-gun mode, the energy regulating mode, etc. the liquid metal focusing ion-gun with multi-operating modes adopts the tantalum made coaxial needle overcoat, and can arbitrarily exchange the coaxial needle type anode or the capillary type anode.
Description
The utility model is the liquid metal ion source focused ion rifle that is used for microfabrication and fine partition.(IPC classify HOIJ-037/08)
Prior art is the described a kind of ion gun of document (1) (Fig. 4).Its mode of operation is single energy adjustment formula.Be characterized in regulating between coaxial needles anode (1) and the extraction pole (first electrode (3)) apart from the time adopted the housing side to have the adjustment screw (12) of 4 tilted directions to remove top extraction pole (first electrode (3)), promptly the position of mobile extraction pole changes the relative position between extraction electrode and the anode pin.Owing to go to push up a plane with 4 screws, usually be difficult to guarantee that the normal on extraction electrode plane overlaps with the anode pin, thereby influence the distribution of electric field.This device must be dismantled whole electrode systems when changing the anode pin simultaneously.The anode pin must not arbitrarily slide after assembling.Therefore it can only be a kind of mode of operation.
The purpose of this utility model is: make coaxial needles anode (1) guarantee vertical with extraction electrode; With make the coaxial needles anode can be after whole liquid metal focused ion rifle is assembled into integral body, still can do to regulate significantly along axis (Z direction) more easily.Thereby change the anode needle point and first distance between electrodes, make ion gun have multiple mode of operation.
The utility model is by coaxial needles anode (1), heater (2), and first electrode (3) second electrodes (5), lens (6), part such as light hurdle (7) and deflection scanning electrode (8) is formed (Fig. 1).Wherein first electrode (3) is that employing is fixed, and guarantees that by machining accuracy it is vertical with the Z axle.Anode pin (1) is connected on the slide bar (10), and slide bar (10) can slide along the Z axle in bearing (9), and bearing (9) is fixed on the shell (13).Realize the vertical of anode pin and extraction pole.For needle point with draw the concentricity of hole (4), available three screws (12) remove to promote bearing (9) and can slide on the x-y plane, can tightly be pressed at the bottom of the shell again on to guarantee precision.Therefore can dismantle electrode system, as long as and unclamp jackscrew (14), just can mobile slide bar (10), promptly the position of moving anode pin (1) changes and the relative position of extraction pole (fixed).Because the sliding scale of slide bar (10) is quite big, can constitute the anode pin (1) inequality and the relative position of extraction pole, be equipped with different electrode connection modes (wiring position), thereby constitute multiple mode of operation.
Pattern 1: (Fig. 3 a) for the ion source mode
Only adorning first electrode (3) as extraction electrode on shell (13), and do not adorn lens combination, is exactly a complete liquid metal ion source, can be used as various ion source tests.
Pattern 2: simple focused ion rifle mode (Fig. 3 b)
Load onto lens combination and deflection scanning electrode (8), first electrode (3) and second electrode (5) are all received earth potential, just can obtain focused ion beam, its energy is determined by threshold voltage.
Mode 3: energy adjustment mode (Fig. 3 c)
Load onto the identical whole systems of common mode 2.With first electrode (3) as extraction electrode, second electrode (5) is as energy adjustment, single charge ion beam energy of focusing is regulated (for double-charge ion, its energy can also exceed one times) between 0.1-20kev
Pattern 4: grid-control mode (Fig. 3 d)
Load onto the identical whole systems of common mode 2.Coaxial needles anode (1) is stretched out the fairlead (4) of first electrode (3), and this moment, as grid, second electrode (5) was as extraction electrode with first electrode (3).Grid starts to control making usefulness, constitutes the prevention and control pattern.
Except that adopting above-mentioned measure, also adopted coaxial needles (Fig. 2) to constitute by tantalum system overcoat and tungsten pin.Its tantalum system overcoat volume is big, and the more raw material of can packing into is as fusible metal or alloy, so that produce required different kinds of ions.
The utility model has the advantages that:
1. need not disintegrate, just can adjust distance between coaxial needles anode (1) and extraction electrode, and guarantee the perpendicularity between them as long as unclamp jackscrew (14).
2. as long as the bolt between shell and the ring flange is unclamped, just can take out coaxial needles anode (1), so it is very convenient to change the anode pin from afterbody.Also the capillary type anode can be replaced the coaxial needles anode with this.
3. the utlity model has multiple mode of operation, be applicable to the purposes of the scientific research of microfabrication and fine analytical equipment.
4. the utility model adopts bigger coaxial needles, and therefore charging is many, thereby working life reaches up to a hundred hours.
(1) coaxial needles anode (anode pin) in the accompanying drawing; (2) heater, (3) first electrodes; (4) fairlead; (5) second electrodes; (6) lens; (7) light hurdle; (8) deflection scanning electrode; (9) bearing; (10) slide bar; (11) taper insulation cushion; (12) adjust screw; (13) shell; (14) jackscrew; (15) cone sheets; (16) insulation cushion.
Each technical performance of multi-operation mode liquid metal focused ion rifle is:
Ion energy 0.1-20kev
Ion gun total ion current 5-120 μ A
Angular intensity 60 μ A/ solid angles
Brightness 106A/cm
2Solid angle
Energy spread＜25ev
Focused beam spot＜50 μ m
Target line 10-100 nanoampere
Life-span～100 hour
Utilize this ion gun can be on the glass plate of gold evaporation or platinum or silicon chip carve～40 microns wide lines.
List of references
①INSTBUCTION?OF?ION?SOURCE?TYPE DS8009，Dubilier?Scientific?Ltd，Uk.(1983)
Claims (2)
1, a kind of to change anode pin (1) determines mode of operation with the relative position of extraction electrode (3) and (5) liquid metal focused ion rifle, it is characterized in that, electrode (3) and (5) are fixed, anode pin (1) is connected on the slide bar (10), and slide bar (10) can slide significantly along the Z axle in bearing (9).
2,, it is characterized in that said concentricity along anode needle point of doing on the Z axle to slide significantly and Z axle removes to push bearing (9) by three screws (12) and guarantee according to the said ion gun of claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 85202460 CN85202460U (en) | 1985-06-26 | 1985-06-26 | Liquid metal focusing ion-gun with multi-operating modes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 85202460 CN85202460U (en) | 1985-06-26 | 1985-06-26 | Liquid metal focusing ion-gun with multi-operating modes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN85202460U true CN85202460U (en) | 1986-04-16 |
Family
ID=4798260
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 85202460 Ceased CN85202460U (en) | 1985-06-26 | 1985-06-26 | Liquid metal focusing ion-gun with multi-operating modes |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN85202460U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104091741A (en) * | 2014-07-14 | 2014-10-08 | 兰州大学 | Multifunctional ion gun |
| CN104882351A (en) * | 2015-05-23 | 2015-09-02 | 浙江大学 | Multi-mode ion source working device based on atmospheric pressure plasma and application |
-
1985
- 1985-06-26 CN CN 85202460 patent/CN85202460U/en not_active Ceased
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104091741A (en) * | 2014-07-14 | 2014-10-08 | 兰州大学 | Multifunctional ion gun |
| CN104091741B (en) * | 2014-07-14 | 2016-06-08 | 兰州大学 | Multifunction ion rifle |
| CN104882351A (en) * | 2015-05-23 | 2015-09-02 | 浙江大学 | Multi-mode ion source working device based on atmospheric pressure plasma and application |
| CN104882351B (en) * | 2015-05-23 | 2017-01-11 | 浙江大学 | Multi-mode ion source working device based on atmospheric pressure plasma and application |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CE01 | Termination of patent right |
Termination date: 19861029 |
|
| CE01 | Termination of patent right |