CN85107033A - Contacting signal probe - Google Patents
Contacting signal probe Download PDFInfo
- Publication number
- CN85107033A CN85107033A CN85107033.7A CN85107033A CN85107033A CN 85107033 A CN85107033 A CN 85107033A CN 85107033 A CN85107033 A CN 85107033A CN 85107033 A CN85107033 A CN 85107033A
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- China
- Prior art keywords
- contact probe
- pedestal
- probe
- contact
- gauge head
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- 239000000523 sample Substances 0.000 title claims abstract description 102
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 35
- 238000005259 measurement Methods 0.000 claims description 9
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 230000003993 interaction Effects 0.000 claims 1
- 230000007246 mechanism Effects 0.000 abstract description 5
- 238000001514 detection method Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 4
- 230000004913 activation Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
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- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
A contacting signal probe, contact probe pedestal are by the bearing movable supporting that is fixed in the gauge head shell, and Z axle movable supporting mechanism is installed in contact probe on the contact probe pedestal.Z axle supporting mechanism comprise the diaphragm that is fixed on the probe base upper and lower side, with a fastening back shaft of diaphragm middle part, probe stationary is in the back shaft lower end.When the outside surface of contact probe contact workpiece, probe base and Z axle supporting mechanism can support contact probe and do the 3 D auto motion with respect to gauge head.This suit is equipped with an electrical contact signal detector, and it comprises manyly can produce magnetic core and the magnetic test coil that electrically contacts signal.
Description
The present invention relates to an improved contacting signal probe, this gauge head can a plurality of axially on the impartial motion of detector probe contact workpiece exactly.
Three coordinate detection systems are widely used in the precision measurement field, because this type systematic can carry out the three-dimensional measurement of complex-shaped workpieces exactly, workpiece is placed on the pedestal and with gauge head and contacts.
In this class measuring machine, movably gauge head manually or automatically moves at three-dimensional, at given check point contact workpiece, reads the coordinate of gauge head each autokinesis on three.Recently be suitable for detecting automatically and represent the contacting signal probe that electrically contacts signal that contacts with workpiece to obtain being extensive use of, this gauge head can automatically move and measure the workpiece of complex contour.
Usually, contacting signal probe comprises a contact probe that is suitable for contact workpiece, contact probe by gauge head shell movable supporting contacting signal probe also comprise the displacement that can cushion the contact probe contact workpiece device and contact probe and workpiece or and the supporting mechanism of contact probe between contact device.
In the but former contacting signal probe technology, contact device is installed on 3 of contact probe support section, so measure the direction that depends on axle.Therefore, can not be in the measurement of all enterprising line stabilizations of direction, can not revise in the former technology of this class directional error.
Different with above-mentioned contact measuring head, there has been a kind of gauge head to utilize the position, angle or the displacement of differential mutual inductor energy electrical measurement contact probe.Certainly, this differential mutual-inductor type gauge head does not have good detection sensitivity, and particularly its detection sensitivity has directivity to the motion of contact probe.
The purpose of this invention is to provide a kind of improved contacting signal probe, this gauge head can detect direction-free activation signal more accurately according to differential mutual inductor principle.
In order to achieve the above object, contacting signal probe provided by the present invention comprises the removable contact probe pedestal that is contained on the gauge head shell, gauge head has single stall position, gauge head is installed in the upper diaphragm of contact probe pedestal upper and lower and following diaphragm in addition respectively, and contact probe and the upper diaphragm that can both be moved by all directions respectively and the contact probe cover of following diaphragm support are housed.
Therefore, when contact probe contacted workpiece with cover, contact probe and cover can move with being equal on all directions.
According to the present invention, contacting signal probe also comprises many to pick-up unit between probe set and the contact probe pedestal, according to differential mutual inductor principle, the displacement of electrical measurement contact probe or covering device.Each measurement mechanism comprises that a pair of magnetic core that is positioned on the probe body is contained in magnetic test coil relative with corresponding magnetic core on the probe base with a pair of.
Therefore, according to the present invention, the motion of contact probe on all directions can lean on compound electric signal energy respectively to detecting activation signal by magnetic test coil to being detected by electric signal with being equal to.
Brief description of drawings:
Fig. 1 is the longitudinal sectional view of the preferred embodiment of the contacting signal probe of formation according to the present invention.
The cross-sectional view strength of Fig. 2 and Fig. 3 is represented the structure of contact probe base supports device shown in Figure 1.
Fig. 4 is the planimetric map of diaphragm among Fig. 1.
Fig. 5 is the front elevation that is used for the magnetic core support of Fig. 1 embodiment.
Fig. 6 is the planimetric map of magnetic core support shown in Figure 5.
Fig. 7 is the cross-sectional view of critical piece shown in Figure 6.
With reference to Fig. 1, show the preferred embodiment of a contacting signal probe that constitutes according to the present invention, gauge head shell 10 wherein comprises an installation suspension that invests its upper surface.Like this, utilize suspension is installed, gauge head can be removably mounted on the movable part of well-known three-coordinate measuring machine.
A fenestra 10a is arranged at the bottom of gauge head shell 10, and by suitable screw installation chassis 14 securely in fenestra, having put into and fixed one between chassis 14 and gauge head shell 10 is the mounting disc 16 of ring-type substantially.
Supporting a contact probe pedestal 18 movably in the inside of gauge head shell 10, probe base can maintain single stall position.Contact probe pedestal 18 is clamped contact probe 20 by upper diaphragm 38 and following diaphragm 40 and back shaft 48, hereinafter will describe this point.
In illustrated embodiment, contact probe pedestal 18 comprises upper disc 24 and lower disc 26, and they firmly are installed in respectively on the end face and bottom surface of pedestal minor axis pipe 22.Contact probe pedestal 18 is placed on the single stall position of described mounting disc 16.
In other words, mounting disc 16 comprises three bearing 28a, 28b and 28c, and the angle between bearing is about 120 degree, and the chassis 26 of contact probe pedestal 18 comprises the ball grooves 30 of respective number, and they are relative identical with bearing 28 respectively.Installation ball 32 in fastening each ball grooves 30 will be installed ball 32 then and put into corresponding bearing 28, and contact probe pedestal 18 can be positioned on the appropriate location of mounting disc 16.
Three bearings 28 have profile different abutment surface mutually.In Fig. 1, seating plane 28a has the abutment surface of taper, and other bearings 28b and 28c have v-depression face and plane surface respectively, as shown in Figures 2 and 3.These bearings 28 are used for determining the stall position of pedestal 18.
In order to make contact probe pedestal 18 press above-mentioned bearing group 28, between spring suppport 33a on the chassis 26 of probe base 18 and the spring suppport 34 in the mounting disc 16, bias spring 36 has been installed.The bias spring that three spaces are about 120 degree angles is installed, can be made contact probe pedestal 18 determine to be pressed against in the mounting disc 16, to keep stall position.
The invention is characterized in contact probe body 12 with respect to contact probe pedestal 18, supported by means of two diaphragms 38 and 40 by back shaft 48, contact probe 20 is at X-, y-, and three directions of Z-axle can move, and sensitivity is improved.
In other words, upper diaphragm 38 securely is clipped between minor axis pipe 22 and the upper disc 24, and diaphragm 40 securely is clipped between minor axis pipe 22 and the lower disc 26 down, and upper and lower diaphragm as shown in Figure 4.
Top contact probe cover 43 closely is connected with the core of dog screw 46 with upper diaphragm 38 by packing ring 44.
When contact probe 20 did not touch workpiece, cover 42 and trap 54 and body 12 on the former process was critically remained on certain position by upper diaphragm 38 and following diaphragm 40.When contact probe 20 contact workpieces, magnetic core support 62 can move, and detects contacting of contact probe 20 and workpiece with very high sensitivity.
The top cover 42 of contact probe is an open annular, the back shaft 48 of it and contact probe body 12 connects together, so, tighten the screw 50 that passes ring 52, the upper end of back shaft 48 can be overlapped 42 with the top of contact probe securely links together, on the other hand, the lower end of back shaft 48 is fixed on the top of leaning on of bottom cover 54, and contact probe 20 is dismountable on cover 54.By this way, above-mentioned part has been determined the structure that hangs contact probes 20 by pedestal 18.
The present invention is will be when contact sonde 20 contacts with workpiece, with same directivity, the contact movement of electrical measurement contact probe 20 and contact probe body 12, for this purpose, the invention provides manyly to the pick-up unit between contact probe body 12 and contact probe pedestal 18, these devices are according to the work of differential mutual inductor principle.
More special is that magnetic core support 62 is fixed on the bolster 48, has been symmetrically formed a hexahedron in vertical direction, as shown in Figure 5.Find out easily that by Fig. 6 magnetic core support 62 comprises three couples of surperficial 62a and 62b; 62c and 62d; 62e and 62f, every pair of surface in vertical direction all non-perpendicularly vis-a-vis.The every couple of surperficial 62a and 62b; 62c and 62d; 62e and 62f are equipped with ferrite or other suchlike magnetic core 64a and 64b respectively; 65a and 65b; 66a and 66b.In the illustrated embodiment, the form of magnetic core (64,65 and 66) is the thin discs that embeds in the magnetic core support 62.
In the illustrated embodiment, the three pairs of magnetic cores 64,65 and 66 are arranged on three orthogonal lines, each magnetic core is with respect to the axle 20 of contact probe, just the angle of Z axle be 55 ° 44 ', by this way, contact probe 20 can be realized the function that all directions detect with being equal to.
With every pair of magnetic core 64,65 and 66 correspondences, it is right on contact probe pedestal 18 magnetic test coil to be installed.In Fig. 1, a pair ofly 64a magnetic test coil 68a and the 68b relative with 64b are contained in respectively in cup core 70a and the 70b with magnetic core.Each cup core 70a and 70b comprise axle 72a and the 72b on the minor axis pipe 22 that is fixed on pedestal 18.Like this, by fixed coil 68a and 68b and removable magnetic core have been determined pick-up unit according to the work of differential mutual inductor principle to 64a and 64b.
With respect to the clamping hole of minor axis pipe, by sliding axle 72a and 72b, can regulate the fixed test coil to 68a and 68b and removable magnetic core to the gap between 64a and the 64b.
Though details does not have graphic extension, corresponding magnetic core is to 65a, 65b and 66a, and 66b, it is right to have laid similar magnetic test coil on pedestal 18 respectively.In this way, on three orthogonal lines, constitute three pairs of pick-up units.
According to above-mentioned arrangement mode, because 18 of pedestals all are movably on all directions, when contact probe 20 contact workpieces, probe can be cushioned.Contact probe 20 is being hung by pedestal 18.In addition, utilize diaphragm 38,40 and back shaft 48 to support contact probes 20, probe can both free movement on all directions, and therefore, when contact probe 20 contact workpieces, it can move on all directions with being equal to.
Contact probe 20 mobile makes magnetic core on the body 12 to producing displacement.The same with differential mutual inductor, because variation inductance, this displacement can be by the magnetic test coil on the pedestal 18 to detecting.Variation inductance also can be respectively to detecting with being equal to.Like this, according to the present invention, can very accurately detect activation signal.
Magnetic test coil is to the formation bridge diagram of preferably lining up, and sort circuit can obtain the detection signal of balance.
Although the present invention is described to three pairs of pick-up units always, the right number of pick-up unit can change according to the present invention.Though three pairs of pick-up units in the illustrated embodiment of the present invention are arranged on three orthogonal lines, each device with respect to the angle of Z axle be 55 ° 44 ', this arrangement and orientation also can change within the scope of the invention.
In addition, though a hexahedron magnetic core support is arranged in the illustrated embodiment, the shape of magnetic core support is not limited to six shapes.For example, the magnetic core support can be octahedra, and four pairs of pick-up units are contained on four pairs of surfaces, with the detection to displacement on all directions of further improvement contact probe.
Claims (4)
1, contacting signal probe that the electrical measurement contact probe contacts with workpiece comprises a gauge head shell and a contact probe pedestal, and pedestal is positioned in this gauge head shell, and can move up in many ways.Single stall position is arranged, this this contact probe of pedestal clamping, this gauge head is characterised in that gauge head comprises upper diaphragm and the following diaphragm that is installed in this contact probe pedestal upper and lower respectively, diaphragm is supporting the contact probe body, the body that contact probe is housed is transportable with respect to the contact probe pedestal, in gauge head, have many to being installed in magnetic core on this contact probe body with relative with these magnetic cores other many respectively to being installed in the magnetic test coil on the contact probe pedestal, therefore, by magnetic core to the interaction right with magnetic test coil, can the displacement of this contact probe of electrical measurement on a plurality of directions.
2, according to contacting signal probe that claim 1 proposed, it is characterized in that the contact probe pedestal is supported on the chassis of probing shell movably by the ball bearing seat, remain on its single stop position, between contact probe pedestal and chassis, bias spring is housed, makes the contact probe pedestal be pressed against on the chassis.
3, according to contacting signal probe that claim 2 proposed, it is characterized in that the ball bearing seat comprises three ball grooves that are fixed on the contact probe pedestal, three bearing and three rotating bearing balls of putting between corresponding ball grooves and the bearing that are installed on the chassis, every pair of bearing can be the taper seating plane respectively, v-depression seating plane peace seating plane is to obtain single stall position.
4, according to contacting signal probe that claim 1 proposed, it is characterized in that the contact probe body comprises one at the vertically symmetrical hexahedron magnetic core support of contact probe body, each of three pairs of surfaces of magnetic core support to the surface on, a pair of magnetic core is housed, corresponding with every pair of magnetic test coil on being installed in the contact probe pedestal, the predetermined gap that is consistent respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN85107033.7A CN1005168B (en) | 1985-09-21 | 1985-09-21 | contact signal probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN85107033.7A CN1005168B (en) | 1985-09-21 | 1985-09-21 | contact signal probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN85107033A true CN85107033A (en) | 1987-04-01 |
| CN1005168B CN1005168B (en) | 1989-09-13 |
Family
ID=4795412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN85107033.7A Expired CN1005168B (en) | 1985-09-21 | 1985-09-21 | contact signal probe |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1005168B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1327188C (en) * | 2002-09-13 | 2007-07-18 | 瑞尼斯豪公司 | Touch probe |
| CN100348942C (en) * | 2002-10-07 | 2007-11-14 | 马波斯S.P.A.公司 | Touch probe with guide transmission device |
| CN102645192A (en) * | 2012-04-13 | 2012-08-22 | 苏州怡信光电科技有限公司 | Vertical calibration device for coordinate measuring machine |
| CN103090782A (en) * | 2013-02-01 | 2013-05-08 | 三门峡锐鑫测控量仪有限公司 | Wide-range inductance measuring head |
| CN104457538A (en) * | 2014-12-07 | 2015-03-25 | 重庆市明皓光学仪器有限公司 | Pneumatic-electric head mechanism for detecting workpieces |
| CN106926058A (en) * | 2017-03-24 | 2017-07-07 | 苏州麦凯斯威传感技术有限公司 | Three-component touch sensor |
| CN108015627A (en) * | 2017-12-25 | 2018-05-11 | 东莞捷荣技术股份有限公司 | A kind of detection control apparatus and its control method for CNC boards probe |
-
1985
- 1985-09-21 CN CN85107033.7A patent/CN1005168B/en not_active Expired
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1327188C (en) * | 2002-09-13 | 2007-07-18 | 瑞尼斯豪公司 | Touch probe |
| CN100348942C (en) * | 2002-10-07 | 2007-11-14 | 马波斯S.P.A.公司 | Touch probe with guide transmission device |
| CN102645192A (en) * | 2012-04-13 | 2012-08-22 | 苏州怡信光电科技有限公司 | Vertical calibration device for coordinate measuring machine |
| CN103090782A (en) * | 2013-02-01 | 2013-05-08 | 三门峡锐鑫测控量仪有限公司 | Wide-range inductance measuring head |
| CN104457538A (en) * | 2014-12-07 | 2015-03-25 | 重庆市明皓光学仪器有限公司 | Pneumatic-electric head mechanism for detecting workpieces |
| CN106926058A (en) * | 2017-03-24 | 2017-07-07 | 苏州麦凯斯威传感技术有限公司 | Three-component touch sensor |
| CN108015627A (en) * | 2017-12-25 | 2018-05-11 | 东莞捷荣技术股份有限公司 | A kind of detection control apparatus and its control method for CNC boards probe |
| CN108015627B (en) * | 2017-12-25 | 2023-11-10 | 东莞捷荣技术股份有限公司 | Detection control device for CNC machine probe and control method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1005168B (en) | 1989-09-13 |
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| CF01 | Termination of patent right due to non-payment of annual fee |