CN2911757Y - Intelligent optical membrane full automatic monitoring system - Google Patents
Intelligent optical membrane full automatic monitoring system Download PDFInfo
- Publication number
- CN2911757Y CN2911757Y CN 200620113727 CN200620113727U CN2911757Y CN 2911757 Y CN2911757 Y CN 2911757Y CN 200620113727 CN200620113727 CN 200620113727 CN 200620113727 U CN200620113727 U CN 200620113727U CN 2911757 Y CN2911757 Y CN 2911757Y
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- monochromator
- spectrometer
- film
- optical
- vacuum chamber
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Abstract
The utility model discloses an intelligent optical film system with full-automatic monitor, comprising a light source launch system, a collecting mirror, a small aperture, a monitor plate, a reflector, a spectrometer and a crystal-controlled instrument. The monitor plate is arranged in a vacuum chamber. Two optical signals are led from light source launch system, one is led to a monochromator, the other one in turn is through the collecting mirror, the small aperture, the reflector to the vacuum chamber to form a facular on the monitor plate, after accepted by a accepting systems, the optical signals are separately led into the monochromator and a broad spectrometer. The utility model integrates the monitoring device of the single wave optical monitoring method, the crystal-controlled method and the broad spectrum optical monitoring method, so as to provide real-time multi-information of film in the process of film plating and amend further film parameters and preparation for amending the effect of film error real-timely and automatically.
Description
Technical field
The utility model relates to a kind of optical thin film and is coated with watch-dog in the process.
Background technology
Up to the present, the method for monitoring any thickness mainly contains three kinds of quartz crystal monitoring, single wavelength monitor and wide optical spectrum monitors.
Quartz crystal monitoring is to measure owing to film deposition causes quartz crystal frequency decline to obtain the method for thicknesses of layers.Its major advantage is: along with the increase of thickness, and the decline of frequency linearity, whether transparent irrelevant with film, simultaneously, brilliant control instrument can also be controlled rate of sedimentation.Shortcoming is: what the conversion of crystal measurement process provided is the geometric thickness rather than the optical thickness of rete, more or less capital has certain difference at aspects such as the refractive index of rete, absorption coefficients in the preparation process of rete, and the repeatability that therefore will expect good optical thickness is difficulty relatively.
The characteristics of single wavelength monitor method of optics are directly to monitor the absolute transmissivity or the reflectance value of rete, parameter according to known assembly of thin films, transmittance values/reflectance value when precomputing stopping that each rete theoretic throat can be corresponding, control each tunic by calculated value then, belong to the optical thickness monitoring.Advantage is: the theoretical foundation of optical thin film is the interference of light theory, so special concern is optical thickness, and these sharpest edges of this monitoring method exactly.Shortcoming is the assembly of thin films that big chromatic dispersion material is arranged for use, is difficult to the wide-band spectrum characteristic that accurate controlling diaphragm is.
The characteristics of wide optical spectrum monitor method are the optical characteristics of monitoring optical thin film in very wide wavelength coverage, belong to the optical thickness monitoring.Advantage is: control is directly perceived, accurate, and the quantity of information that obtains is higher than single wavelength monitor method far away; In certain spectral range, can realize thicknesses of layers error compensation.Shortcoming is that the requirement supervisory system will have enough wavelength resolutions, wavelength accuracy, length scanning speed and photometric measurement precision and stable for a long time, is difficult for realizing the full-automatic process of optical thin film simultaneously.
In recent years, along with constantly widening of domestic optical thin film application, demand rapid growth with optical component of special optical characteristic, re-use single method for supervising and obviously can not meet the demands, it is extremely urgent to develop the intelligent full automatic optical thin film supervisory system that a new generation has international competitiveness.
The utility model content
Problem at above-mentioned existence, the purpose of this utility model is to provide a kind of intelligent optical thin film automatic monitor system, the multi-faceted information of film can be provided in process of plating in real time, revise subsequent film parameter and preparation condition in real time, be used in real time, automatically revising the influence of rete error.
Realize above-mentioned purpose, a kind of intelligent optical thin film automatic monitor system of the utility model comprises: light emitted system, condenser, aperture, catoptron, monitoring piece, spectrometer and brilliant control instrument, monitoring piece is arranged in the vacuum chamber, two ways of optical signals is drawn by described light emitted system, one the tunnel directly imports a monochromator, another road is successively by inciding behind described condenser, aperture and the catoptron in the described vacuum chamber, and on described monitoring piece, form hot spot, after optical receiver system reception, import described monochromator and wide spectrometer more respectively; The light that comes out by described monochromator through A/D modulus capture card conversion after, carry out rough handling by a single-chip microcomputer, and be transferred to one by an internet exchange system and be provided with on the PC of data processing software; Described brilliant control instrument is transferred to information such as geometric thickness, rate of sedimentation on the described PC by described internet exchange system; The signal that described wide spectrometer receives is passed to described PC.
Further, between described monochromator and A/D modulus capture card, also be provided with photomultiplier and quick filter amplifier successively.
Further, described monochromator is controlled by a control single chip computer.
The utility model is combined with each other the supervising device of single wavelength optical monitoring method, brilliant control method, wide spectroscopic optics monitoring method, co-ordination, the multi-faceted information of film is provided in process of plating in real time, revise subsequent film parameter and preparation condition in real time, be used for real-time, automatically revise the influence of rete error, therefore whole film is to be coated with process full automation and intellectuality, need not human intervention, guarantee to be coated with the repeatability and the homogeneity of product, alleviated plated film person's labour intensity.
Description of drawings
Fig. 1 is the utility model structural representation.
Embodiment
As shown in Figure 1, the utility model comprises: light emitted system 1, condenser 2, aperture 14, monitoring piece 4, catoptron 3, wide spectrometer 7 and brilliant control instrument 10, monitoring piece 4 is arranged in the vacuum chamber 5, two ways of optical signals is drawn by light emitted system 1, one the tunnel is reference optical signal, directly import a monochromator 12 by light guide optical fiber, another road is the measuring light signal, successively by condenser 2, incide in the vacuum chamber 5 behind aperture 14 and the catoptron 3, and on monitoring piece 4, form a hot spot that is not more than Φ 3mm, after an optical receiver system 6 receptions, import monochromator 12 and wide spectrometer 7 more respectively; After the light that is come out by monochromator 12 passes through photomultiplier 17 and quick filter amplifier 16 successively, carry out analog to digital conversion by an A/D modulus capture card 13 again, undertaken being transferred to one by an internet exchange system 9 and being provided with on the PC 8 of data processing software after phase-splitting and preliminary data handle by a single-chip microcomputer 11; Brilliant control instrument 10 is transferred to information such as geometric thickness, rate of sedimentation on the PC 8 by internet exchange system 9; The signal that wide spectrometer 7 receives is passed to PC 8; Monochromator 12 is controlled by a control single chip computer 15.
PC 8 online in real time receive the long light signal of monitoring of single-chip microcomputer 11, the broadband spectral data of wide spectrometer 7 and the data of brilliant control instrument 10 fast, after the active data processing, obtain transmittance/reflectance, broadband spectral transmittance/reflectance and the geometric thickness of supervisory wavelength, judge whether currency is extreme value or rest point.PC 8 on-line monitorings when anterior layer declare stop after, the rete parameter that obtains in the process of being coated with is carried out calculating in line inversion, revise material behavior automatically, Automatic Optimal subsequent film system, minimally reduces the influence of error to subsequent film.Whole film is to be coated with process full automation and intellectuality, need not human intervention, has guaranteed to be coated with the repeatability and the homogeneity of product, has alleviated plated film person's labour intensity.
Claims (3)
1, a kind of intelligent optical thin film automatic monitor system, it is characterized in that, comprise: light emitted system, condenser, aperture, catoptron, monitoring piece, spectrometer and brilliant control instrument, monitoring piece is arranged in the vacuum chamber, two ways of optical signals is drawn by described light emitted system, one the tunnel directly imports a monochromator, another road is successively by inciding behind described condenser, aperture and the catoptron in the described vacuum chamber, and on described monitoring piece, form hot spot, after optical receiver system reception, import described monochromator and wide spectrometer more respectively; The light that comes out by described monochromator through A/D modulus capture card conversion after, carry out rough handling by a single-chip microcomputer, and be transferred to one by an internet exchange system and be provided with on the PC of data processing software; Described brilliant control instrument is transferred to information such as geometric thickness, rate of sedimentation on the described PC by described internet exchange system; The signal that described wide spectrometer receives is passed to described PC.
2, a kind of intelligent optical thin film automatic monitor system according to claim 1 is characterized in that, also is provided with photomultiplier and quick filter amplifier successively between described monochromator and A/D modulus capture card.
3, a kind of intelligent optical thin film automatic monitor system according to claim 1 and 2 is characterized in that, described monochromator is controlled by a control single chip computer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620113727 CN2911757Y (en) | 2006-05-09 | 2006-05-09 | Intelligent optical membrane full automatic monitoring system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620113727 CN2911757Y (en) | 2006-05-09 | 2006-05-09 | Intelligent optical membrane full automatic monitoring system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2911757Y true CN2911757Y (en) | 2007-06-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620113727 Expired - Fee Related CN2911757Y (en) | 2006-05-09 | 2006-05-09 | Intelligent optical membrane full automatic monitoring system |
Country Status (1)
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| CN (1) | CN2911757Y (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105925951A (en) * | 2016-07-07 | 2016-09-07 | 成都国泰真空设备有限公司 | Crystal control device with six wafers |
| CN110058343A (en) * | 2019-04-16 | 2019-07-26 | 河南平原光电有限公司 | A kind of short-pass optical filtering membrane preparation method based on multi-angle spectral measurement |
| CN112126907A (en) * | 2020-08-28 | 2020-12-25 | 佛山市博顿光电科技有限公司 | Vacuum coating control system and control method thereof, and vacuum coating equipment |
| CN113774353A (en) * | 2021-09-15 | 2021-12-10 | 佛山市博顿光电科技有限公司 | Technological parameter optimization method and device in film coating process and film coating real-time monitoring system |
| CN117089817A (en) * | 2023-06-29 | 2023-11-21 | 同济大学 | Optical film hybrid monitoring method based on Kalman filtering data fusion |
-
2006
- 2006-05-09 CN CN 200620113727 patent/CN2911757Y/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105925951A (en) * | 2016-07-07 | 2016-09-07 | 成都国泰真空设备有限公司 | Crystal control device with six wafers |
| CN110058343A (en) * | 2019-04-16 | 2019-07-26 | 河南平原光电有限公司 | A kind of short-pass optical filtering membrane preparation method based on multi-angle spectral measurement |
| CN110058343B (en) * | 2019-04-16 | 2021-08-17 | 河南平原光电有限公司 | Preparation method of short wave pass filter film based on multi-angle spectral measurement |
| CN112126907A (en) * | 2020-08-28 | 2020-12-25 | 佛山市博顿光电科技有限公司 | Vacuum coating control system and control method thereof, and vacuum coating equipment |
| CN113774353A (en) * | 2021-09-15 | 2021-12-10 | 佛山市博顿光电科技有限公司 | Technological parameter optimization method and device in film coating process and film coating real-time monitoring system |
| CN117089817A (en) * | 2023-06-29 | 2023-11-21 | 同济大学 | Optical film hybrid monitoring method based on Kalman filtering data fusion |
| CN117089817B (en) * | 2023-06-29 | 2024-02-13 | 同济大学 | An optical thin film hybrid monitoring method based on Kalman filter data fusion |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Changzhou Yamadun Technology Co., Ltd. Assignor: Zhang Zhemin|Jia Qiuping|Beijing Aoptek Scientific & Technical Co., Ltd. Contract fulfillment period: 2007.7.1 to 2013.6.30 Contract record no.: 2008320000810 Denomination of utility model: Intelligent optical membrane full automatic monitoring system Granted publication date: 20070613 License type: Exclusive license Record date: 20081012 |
|
| LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2007.7.1 TO 2013.6.30; CHANGE OF CONTRACT Name of requester: AMA CHANGZHOU KINGSTON PV GLASS CO., LTD. Effective date: 20081012 |
|
| EC01 | Cancellation of recordation of patent licensing contract |
Assignee: Changzhou Yamadun Technology Co., Ltd. Assignor: Beijing Aoptek Scientific & Technical Co., Ltd.|Zhang Zhemin|Jia Qiuping Contract record no.: 2008320000810 Date of cancellation: 20101129 |
|
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070613 Termination date: 20140509 |