CN222557052U - Vacuum coating machine with better internal water vapor removal effect - Google Patents
Vacuum coating machine with better internal water vapor removal effect Download PDFInfo
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- CN222557052U CN222557052U CN202421366375.5U CN202421366375U CN222557052U CN 222557052 U CN222557052 U CN 222557052U CN 202421366375 U CN202421366375 U CN 202421366375U CN 222557052 U CN222557052 U CN 222557052U
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Abstract
本实用新型涉及一种内部水汽去除效果更好的真空镀膜机，属于真空镀膜设备技术领域，解决了现有真空镀膜机内水汽难去除而导致设备较长时间才能获得真空镀膜所需真空度的技术问题。该真空镀膜机包括外壳，内部配置有蒸发源坩埚、基材收放辊组以及镀膜辊，蒸发源坩埚置于镀膜辊的正下方，外壳连接有抽真空系统，抽真空系统用于抽离外壳内的空气，以在外壳内形成真空镀膜所需的真空环境；加热件，安装于外壳的内壁，加热件用于加热外壳的内部空间；深冷除水汽组件，安装在外壳内，深冷除水汽组件用于吸附并排走外壳中的水汽。通过上述结构，该真空镀膜机能够更高效地去除外壳内部的水汽，也能够更快获得真空镀膜所需的真空度。
The utility model relates to a vacuum coating machine with better internal water vapor removal effect, which belongs to the technical field of vacuum coating equipment, and solves the technical problem that it is difficult to remove water vapor in the existing vacuum coating machine, which causes the equipment to take a long time to obtain the vacuum degree required for vacuum coating. The vacuum coating machine includes a shell, which is internally configured with an evaporation source crucible, a substrate retracting roller group and a coating roller. The evaporation source crucible is placed directly below the coating roller. The shell is connected to a vacuum pumping system, which is used to extract the air in the shell to form a vacuum environment required for vacuum coating in the shell; a heating element is installed on the inner wall of the shell, and the heating element is used to heat the internal space of the shell; a deep cold water vapor removal component is installed in the shell, and the deep cold water vapor removal component is used to absorb and discharge water vapor in the shell. Through the above structure, the vacuum coating machine can remove water vapor inside the shell more efficiently, and can also obtain the vacuum degree required for vacuum coating more quickly.
Description
Technical Field
The utility model belongs to the technical field of vacuum coating equipment, and particularly relates to a vacuum coating machine with a better internal water vapor removal effect.
Background
The vacuum coating technology is commonly used in the preparation fields of semiconductor materials, chip metal electrodes, core components of new energy batteries and the like, and the process is mainly characterized in that a substrate is wound on a coating roller by utilizing a winding and unwinding assembly, the substrate is subjected to roller reversing, the substrate is wound on the coating roller, an evaporation source crucible is arranged below the coating roller, the coating material is heated by the evaporation source crucible, so that the coating material is evaporated to form steam, and the steam can be attached to the surface of the substrate when the steam goes up to the substrate on the surface of the coating roller, so that the coating material is coated on the surface of the substrate.
One of the elements realized by the vacuum coating technology is the vacuum degree of equipment, at present, the vacuum coating machine is used for pumping air in the machine by means of a vacuum pumping system so as to enable the interior of the machine to reach the required process conditions, and before vacuum pumping, a heating technology is also utilized so that all parts in the machine, water molecules attached to an evaporation source crucible and water molecules in a coating material are evaporated to form water vapor, and the water vapor is pumped away by means of the vacuum pumping system.
However, in the specific use process, we find that the vacuum-pumping system has poor effect on the water vapor extraction, and needs to work for a long time to meet the vacuum degree requirement and the water vapor content requirement required by the process, which delays the vacuum coating process and also causes time waste.
Based on this, a vacuum coating machine capable of removing internal water vapor more efficiently is in urgent need.
Disclosure of utility model
The utility model provides a vacuum coating machine with better internal water vapor removal effect, which is used for solving the technical problem that equipment can obtain the vacuum degree required by vacuum coating only for a long time due to the fact that water vapor in the existing vacuum coating machine is difficult to remove.
The utility model is realized by the following technical scheme that the vacuum coating machine with better internal water vapor removal effect comprises:
The vacuum coating device comprises a shell, wherein an evaporation source crucible, a substrate collecting and releasing roller set and a coating roller are arranged in the shell, the evaporation source crucible is arranged right below the coating roller, the shell is connected with a vacuum pumping system, and the vacuum pumping system is used for pumping air in the shell so as to form a vacuum environment required by vacuum coating in the shell;
the heating piece is arranged on the inner wall of the shell and is used for heating the inner space of the shell;
The cryogenic water vapor removing component is arranged in the shell and is used for adsorbing and discharging water vapor in the shell.
Further, in order to better implement the present utility model, the cryogenic water vapor removal assembly includes:
The water receiving disc is provided with a water leakage hole, and a drain pipe connected with the water pump is connected to the water leakage hole;
The cylinder is arranged on the water receiving disc through a bracket;
The refrigerant runner pipe is arranged on the outer wall of the cylinder body and is communicated with a refrigerant source;
The electric heating rod is arranged on the cylinder body and used for heating the cylinder body.
Further, in order to better realize the utility model, the mounting frame is arranged on the inner wall of the shell, and the water receiving disc is detachably and fixedly connected with the mounting frame.
Further, in order to better realize the utility model, the cylinder is cylindrical in shape, and the refrigerant flow tube is coiled on the outer wall of the cylinder.
Further, in order to better realize the utility model, the temperature of the refrigerant flowing in the refrigerant flowing pipe is between-100 ℃ and-150 ℃, and the heating temperature of the electric heating rod is between 20 ℃ and 30 ℃.
Further, in order to better realize the utility model, a baffle plate is arranged in the shell, the inner space of the shell is divided into an upper cavity and a lower cavity by the baffle plate, the substrate collecting and releasing roller group and the film coating roller are positioned in the upper cavity, the evaporation source crucible is positioned in the lower cavity, and a notch positioned between the film coating roller and the evaporation source crucible is formed in the baffle plate;
The heating element is arranged on the side wall of the upper chamber, and the vacuumizing system is communicated with the upper chamber;
The top wall of the upper chamber, the top wall of the lower chamber and the side wall are all provided with the cryogenic water vapor removal component.
Further, in order to better realize the utility model, the heating element is an armored heating wire.
Further, in order to better implement the present utility model, the vacuum pumping system includes:
The first vacuum pump is communicated with the side wall of the upper chamber and is used for pumping the vacuum degree in the shell to a preset value;
And the second vacuum pump is communicated with the top wall of the upper chamber and is used for pumping the vacuum degree in the shell from the preset value to a required value.
Further, in order to better realize the utility model, a detecting part is further installed on the shell, the detecting part is used for detecting the vacuum degree in the shell, and the first vacuum pump and the second vacuum pump are electrically connected with the detecting part so as to open and close the first vacuum pump and the second vacuum pump according to the vacuum degree in the shell.
Further, in order to better realize the utility model, an electromagnetic valve is also arranged at the connection position of the second vacuum pump and the shell, and the electromagnetic valve is electrically connected with the detection part so as to open and close the electromagnetic valve according to the vacuum degree in the shell.
Compared with the prior art, the utility model has the following beneficial effects:
The vacuum coating machine with better internal vapor removal effect comprises a shell, a heating part and a cryogenic vapor removal assembly, wherein an evaporation source crucible, a substrate collecting and releasing roller set and a coating roller are arranged in the shell, the evaporation source crucible is used for evaporating a coating material, the substrate collecting and releasing roller set is used for collecting and releasing the substrate, the substrate passes through the coating roller in the collecting and releasing process, and the evaporation source crucible is positioned right below the coating roller, so that the coating material vapor evaporated by the evaporation source crucible can directly reach the substrate at the coating roller, the surface of the substrate is coated with the coating, the shell is connected with a vacuum pumping system for pumping air in the shell to form a vacuum environment required by vacuum coating in the shell, the heating part is arranged on the inner wall of the shell, and the heating part is used for heating the inner space of the shell, so that water molecules attached to the inner wall of the shell are evaporated to form vapor, and naturally, the cryogenic vapor removal assembly is arranged in the shell, so that the vapor collection assembly can generate low-temperature water vapor and then absorb the water vapor in the shell, and the condensed vapor can be removed.
Through the structure, the vacuum coating machine provided by the utility model utilizes the cryogenic vapor removal component to generate low temperature so that vapor in the shell is collected and adsorbed on the surface of the shell and is discharged later, so that the vapor removed by the vacuum system is less (almost zero) when the vacuum system is vacuumized, the vacuum system can be protected, the process of removing the vapor by the cryogenic vapor removal component is synchronous with the process of vacuumizing by the vacuum system, the time for forming a needed vacuum environment in the shell is saved, the needed process vacuum condition is obtained in the shell quickly, and the efficiency is further improved.
Drawings
In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a vacuum coating machine with better internal vapor removal effect according to an embodiment of the present utility model;
FIG. 2 is a schematic diagram of a cryogenic vapor removal module in accordance with an embodiment of the present utility model.
In the figure, the device comprises a 1-shell, a 2-evaporation source crucible, a 3-winding roller, a 4-unreeling roller, a 5-passing roller, a 6-coating roller, a 7-first vacuum pump, an 8-second vacuum pump, a 9-heating piece, a 10-deep cooling water vapor removal component, a 101-water receiving disc, a 102-drain pipe, a 103-barrel, a 104-refrigerant flow pipe, a 105-electric rod, a 11-mounting frame, a 12-partition board, a 13-detection part, a 14-electromagnetic valve and a 100-substrate.
Detailed Description
In order to make the objects, technical solutions and advantages of the present utility model more apparent, the technical solutions of the present utility model will be described in detail below. It will be apparent that the described embodiments are only some, but not all, embodiments of the utility model. All other embodiments, based on the examples herein, which are within the scope of the utility model as defined by the claims, will be within the scope of the utility model as defined by the claims.
The vacuum coating machine with better internal water vapor removal effect comprises a shell 1, a heating piece 9 and a cryogenic water vapor removal assembly 10, wherein:
The shell 1 is a container, an evaporation source crucible 2, a substrate collecting and releasing roller set and a coating roller 6 are configured in the shell 1, the evaporation source crucible 2 is used for evaporating coating materials, the substrate collecting and releasing roller set is used for collecting and releasing a substrate 100 (namely a strip to be coated), the substrate collecting and releasing roller set mainly comprises a winding roller 3 and an unwinding roller 4, and of course, the substrate 100 is wound on the winding roller 3, the winding roller 5 and the unwinding roller 4, the unwinding roller 4 releases the substrate 100, the substrate 100 reaches the winding roller 3 through the reversing of the winding roller 5 and is wound up, the substrate 100 passes through the coating roller 6 in the collecting and releasing process, the evaporation source crucible 2 is positioned under the coating roller 6, and thus, the coating materials evaporated from the evaporation source crucible 2 can reach the substrate 100 at the coating roller 6 directly upwards, and thus a coating layer is coated on the surface of the substrate 100. The housing 1 is connected with a vacuum pumping system for pumping air in the housing 1 to form a vacuum environment required for vacuum coating in the housing 1.
The heating element 9 can generate heat, and the heating element 9 is mounted on the inner wall of the housing 1 and is used for heating the inner space of the housing 1, so that water molecules attached to the inner wall of the housing 1 are evaporated to form water vapor, and of course, the evaporation source crucible 2 can also evaporate water molecules on the evaporation source crucible and water molecules in the coating material to form water vapor when being heated, and all the water vapor is converged to form water vapor. The water vapor is diffused in the air in the housing 1. Alternatively, the heating element 9 may be an armoured heating wire, and of course, the heating element 9 may also be an electric heating plate mounted on the inner wall of the casing 1.
The cryogenic vapor removal component 10 is installed in the shell 1, and the cryogenic vapor removal component 10 can generate low temperature, so that when vapor in the shell 1 reaches the position of the cryogenic vapor removal component 10, the vapor is adsorbed and condensed into ice by the cryogenic vapor removal component 10, and then the adsorbed water is discharged by the cryogenic vapor removal component 10.
When the vacuum coating system is specifically used, firstly, the heating piece 9 is started and the evaporation source crucible 2 is heated to a certain temperature, so that water molecules attached to the inner wall of the shell 1 and the surfaces of all parts are evaporated to form water vapor, the temperature of the evaporation source crucible 2 enables water molecules on the evaporation source crucible and water molecules in a coating material to be evaporated to form water vapor, all water vapor is converged in the shell 1 to form water vapor, in the process, the cryogenic water vapor assembly 10 is started, the cryogenic water vapor assembly 10 is utilized to generate low temperature at the position of the cryogenic water vapor assembly 10, when the water vapor is close to the position of the cryogenic water vapor assembly 10, the water vapor is adsorbed and condensed by the cryogenic water vapor assembly 10 and attached to the surface of the cryogenic water vapor assembly, then the water vapor adsorbed by the cryogenic water vapor assembly 10 is discharged, and then the vacuum pumping system is utilized to pump away the air in the shell 1.
Through the structure, the vacuum coating machine provided by the utility model utilizes the cryogenic vapor removal component 10 to generate low temperature so that vapor in the shell 1 is collected and adsorbed on the surface of the shell and then discharged, so that the vapor pumped by the vacuumizing system is less (almost zero) when the vacuumizing system is vacuumized, the vacuumizing system can be protected, the time for forming a needed vacuum environment in the shell 1 can be saved, the needed process vacuum condition in the shell 1 can be obtained quickly, and the efficiency is further improved.
As an alternative implementation of this embodiment, the above-mentioned cryogenic water vapor removal assembly 10 in this embodiment includes a water pan 101, a cylinder 103, a refrigerant runner 104, and an electric heating rod 105, where:
The refrigerant runner pipe 104 is installed on the outer wall of the cylinder 103 and is communicated with a refrigerant source, and when the water vapor component at the deep cooling position is started, the refrigerant in the refrigerant source enters the refrigerant runner pipe 104, so that low temperature is generated at the refrigerant runner pipe 104 and the cylinder 103. Alternatively, the refrigerant source may be a high pressure gas cylinder containing hydraulic nitrogen, or a combination of a refrigerant cylinder and a compressor, in which case the refrigerant in the refrigerant cylinder is sent to the refrigerant flow tube 104 by the compressor. Optionally, in this embodiment, the temperature of the refrigerant flowing through the refrigerant flowing pipe 104 is between-100 ℃ and-150 ℃, such as-100 ℃, -110 ℃, -120 ℃, -130 ℃, -140 ℃, or-150 ℃, so as to generate a cryogenic environment at the cryogenic vapor assembly 10.
When the refrigerant flows through the refrigerant flow pipe 104, the cold energy in the refrigerant is transferred to the periphery of the refrigerant flow pipe 104 and the cylinder 103 through the refrigerant flow pipe 104, so that low temperature is formed near the position of the cryogenic water vapor component 10, and the surrounding water vapor is condensed into ice cubes on the ice cubes when encountering cold and is attached to the outer walls of the refrigerant flow pipe 104 and the cylinder 103, so that a group of cryogenic water vapor components 10 can efficiently remove part of the water vapor in the shell 1, and a plurality of groups of cryogenic water vapor components 10 are arranged in the shell 1, so that most of the water vapor in the shell 1 can be removed more rapidly and more efficiently.
The cylinder 103 is mounted on the water receiving disc 101 through a bracket, the water receiving disc 101 is a disc body, a water leakage hole is formed in the middle of the water receiving disc 101, and a drain pipe 102 which is communicated with the water leakage hole and the water pump is connected to the outside of the water receiving disc 101. The support is arranged so that the bottom end of the cylinder 103 can not block the water leakage hole. Of course, the bottom end of the cylinder 103 may be directly connected to the water receiving tray 101, and in this case, only a water hole needs to be formed at the bottom end of the cylinder 103, so that water in the water receiving tray 101 can smoothly flow to the water leakage hole.
When the refrigerant is not circulated in the refrigerant circulation pipe 104, the temperature of the cryogenic water vapor assembly 10 is gradually restored to normal temperature, at this time, the ice condensed on the surfaces of the cylinder 103 and the refrigerant circulation pipe 104 will melt to form water drops and drop on the water receiving tray 101, and the water in the water receiving tray 101 flows into the water drain pipe 102 from the water leakage hole, so as to drain the water better, at this time, the water in the water drain pipe 102 is pumped by the water pump connected with the water drain pipe 102, so that the water received by the water receiving tray 101 is drained out of the casing 1 more quickly and smoothly. Since the process of stopping the supply of the refrigerant to the cryogenic water vapor assembly 10 in the refrigerant circulation pipe 104 still requires a lot of time for recovering the normal temperature, in order to accelerate the melting of the ice condensed thereon to form water drops, the electric heating rod 105 in this embodiment is mounted on the cylinder 103, so that the electric heating rod 105 is immediately powered when the supply of the refrigerant is stopped in the refrigerant circulation pipe 104, and the cylinder 103 is heated by the electric heating rod 105, so that the ice condensed thereon can be melted to form water drops in a shorter time. Alternatively, the heating rod in this embodiment may be a ceramic rod wound with an electric heating wire. Alternatively, the heating temperature of the electric heating rod 105 is 20 ℃ to 30 ℃, for example, 20 ℃, 25 ℃, 30 ℃, or the like, so long as the cylinder 103 and the refrigerant circulation pipe 104 can be restored to the normal temperature as soon as possible.
It should be noted that, the time point when the refrigerant flow tube 104 stops supplying the refrigerant is after the vacuum coating is completed.
Optionally, the cryogenic vapor removing component 10 in this embodiment may also be a semiconductor refrigeration piece mounted on the inner wall of the housing 1, the inner wall of the housing 1 is further connected with a water receiving box disposed below the semiconductor refrigeration piece, the water receiving box is communicated with a water pipe, the water pipe is connected with a water pump, the semiconductor refrigeration piece is electrified to generate cold energy, so that water vapor in the housing 1 condenses into ice thereon, after the semiconductor refrigeration piece is powered off, the ice on the semiconductor refrigeration piece melts to form water drops which drop in the water receiving box, and finally the water in the water receiving box is pumped away by the water pump through the water pipe.
Optionally, in this embodiment, a mounting frame 11 is provided on an inner wall of the housing 1, and the water tray 101 is bolted to the mounting frame 11 by bolts, so that the water tray 101 is located below the cylinder 103. Of course, the water pan 101 may be detachably connected to the mounting frame 11 by a clamping connection. Further, a hanger rod may be provided on the inner wall of the housing 1, and the cylinder 103 may be connected to the hanger rod by a bolt, so long as the water receiving tray 101 is positioned below the cylinder 103.
Alternatively, the cylinder 103 in this embodiment is cylindrical, so that the contact area between the cylinder 103 and the environment inside the housing 1 is larger to attach more moisture. Of course, the cylinder 103 may have any shape, and a prismatic shape may be used. The refrigerant flow tube 104 is spirally wound around the outer wall of the cylinder 103. Of course, the refrigerant flow tube 104 may be attached to the outer wall of the cylinder 103, and in this case, the outline shape of the refrigerant flow tube 104 may be any shape instead of a spiral shape.
As an alternative implementation manner of this embodiment, a partition plate 12 is installed in the housing 1, the inner space of the housing 1 is divided into an upper chamber and a lower chamber by the partition plate 12, the substrate collecting and releasing roller set and the coating roller 6 are located in the upper chamber, the evaporation source crucible 2 is located in the lower chamber, and a gap between the coating roller 6 and the evaporation source crucible 2 is formed in the partition plate 12. The partition plate 12 can have a certain separation effect, and the coating vapor formed by the evaporation of the evaporation source crucible 2 can directly upwards pass through the notch and reach the surface of the substrate 100 on the coating roller 6. The heating member 9 is installed on a side wall of the upper chamber so as to heat a space of the upper chamber, and a space of the lower chamber can be heated by heat generated from the evaporation source crucible 2 assembly. The vacuumizing system is communicated with the upper chamber.
The top wall of the upper chamber, the top wall and the side walls of the lower chamber are provided with the cryogenic water vapor removing component 10, the cryogenic water vapor removing component 10 arranged on the top wall of the upper chamber can absorb and remove the water vapor formed in the upper chamber better and faster, and the cryogenic water vapor removing component 10 arranged on the top wall and the side walls of the lower chamber can absorb and remove the water vapor formed in the lower chamber better and faster. In this way, the water vapor in the various areas inside the casing 1 can be removed more rapidly and more thoroughly.
As an alternative implementation of the present embodiment, the vacuum pumping system in the present embodiment includes a first vacuum pump 7 and a second vacuum pump 8, where:
The first vacuum pump 7 is a combination of a rotary vane pump and a Roots pump, and is capable of performing rough evacuation, specifically, the first vacuum pump 7 is arranged on the side wall of the upper chamber in a communication manner, and the first vacuum pump 7 is used for pumping the vacuum degree in the housing 1 to a preset value. The second vacuum pump 8 is a molecular pump, and is connected to the top wall of the upper chamber, the second vacuum pump 8 is turned on after the vacuum level in the housing 1 reaches a preset value, when the second vacuum pump 8 is turned on, the first vacuum pump 7 is turned off, and the turned-on second vacuum pump 8 pumps the vacuum level in the housing 1 from the preset value to a required value (i.e., the vacuum level requirement required by vacuum coating).
A detecting unit 13 (for example, a vacuum gauge, a resistance gauge, or an ionization gauge) is further mounted on the housing 1, the detecting unit 13 is used for detecting the vacuum degree in the housing 1, and the first vacuum pump 7 and the second vacuum pump 8 are electrically connected to the detecting unit 13 so as to open and close the first vacuum pump 7 and the second vacuum pump 8 according to the vacuum degree in the housing 1. It is easy to understand that the vacuum coating machine provided in this embodiment further includes a control unit, where the detection portion 13, the first vacuum pump 7, and the second vacuum pump 8 are all electrically connected to the control unit, so that the first vacuum pump 7 and the second vacuum pump 8 are all electrically connected to the detection portion 13. When the first vacuum pump 7 is started to perform rough vacuumizing on the internal environment of the shell 1, the control unit controls the second vacuum pump 8 to be closed, and when the vacuum gauge detects that the vacuum degree in the shell 1 reaches a preset value, the control unit controls the first vacuum pump 7 to be closed and controls the second vacuum pump 8 to be opened until the vacuum degree in the shell 1 reaches a required value.
In this way, the first vacuum pump 7 and the second vacuum pump 8 are used for carrying out the sectional vacuum pumping, so that the required vacuum environment can be obtained in the housing 1 more efficiently.
More preferably, a solenoid valve 14 is further installed at a position where the second vacuum pump 8 is connected to the housing 1, and the solenoid valve 14 is electrically connected to the detecting portion 13 to open and close the solenoid valve 14 according to the vacuum degree in the housing 1. Specifically, when the vacuum degree in the housing 1 does not reach the preset value, the electromagnetic valve 14 is powered off to disconnect the communication channel between the second vacuum pump 8 and the housing 1, and when the vacuum degree in the housing 1 reaches the preset value, the control unit controls the electromagnetic valve 14 to be powered on to open the communication channel between the second vacuum pump 8 and the housing 1. Alternatively, the solenoid valve 14 may be a gate valve.
The above description is merely an embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art can easily think about changes or substitutions within the technical scope of the present utility model, and it is intended to cover the scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims.
Claims (10)
1. The vacuum coating machine with better internal water vapor removal effect is characterized by comprising:
The vacuum coating equipment comprises a shell (1), wherein an evaporation source crucible (2), a substrate collecting and releasing roller set and a coating roller (6) are arranged in the shell, the evaporation source crucible (2) is arranged right below the coating roller (6), the shell (1) is connected with a vacuum pumping system, and the vacuum pumping system is used for pumping air in the shell (1) so as to form a vacuum environment required by vacuum coating in the shell (1);
A heating element (9) mounted on the inner wall of the housing (1), the heating element (9) being used for heating the inner space of the housing (1);
The cryogenic water vapor removing component (10) is arranged in the shell (1), and the cryogenic water vapor removing component (10) is used for adsorbing and discharging water vapor in the shell (1).
2. The vacuum coating machine with improved internal vapor removal according to claim 1, wherein said cryogenic vapor removal assembly (10) comprises:
The water receiving disc (101) is provided with a water leakage hole, and a drain pipe (102) connected with the water pump is connected to the water leakage hole;
the cylinder body (103) is arranged on the water receiving disc (101) through a bracket;
a refrigerant flow pipe (104) which is arranged on the outer wall of the cylinder (103), wherein the refrigerant flow pipe (104) is communicated with a refrigerant source;
And the electric heating rod (105) is arranged on the cylinder body (103), and the electric heating rod (105) is used for heating the cylinder body (103).
3. The vacuum coating machine with better internal vapor removal effect according to claim 2, wherein:
the inner wall of the shell (1) is provided with a mounting frame (11), and the water receiving disc (101) is detachably and fixedly connected with the mounting frame (11).
4. The vacuum coating machine with better internal vapor removal effect according to claim 2, wherein:
the cylinder (103) is cylindrical in shape, and the refrigerant flow tube (104) is coiled on the outer wall of the cylinder (103).
5. The vacuum coating machine with better internal vapor removal effect according to claim 2, wherein:
The temperature of the refrigerant flowing in the refrigerant flowing pipe (104) is-100 ℃ to-150 ℃, and the heating temperature of the electric heating rod (105) is 20 ℃ to 30 ℃.
6. A vacuum coating machine with improved internal moisture removal as set forth in claim 3, wherein:
A partition plate (12) is arranged in the shell (1), the inner space of the shell (1) is divided into an upper cavity and a lower cavity by the partition plate (12), the substrate collecting and releasing roller set and the film coating roller (6) are positioned in the upper cavity, the evaporation source crucible (2) is positioned in the lower cavity, and the partition plate (12) is provided with a notch positioned between the film coating roller (6) and the evaporation source crucible (2);
The heating element (9) is arranged on the side wall of the upper chamber, and the vacuumizing system is communicated with the upper chamber;
The top wall of the upper chamber, the top wall of the lower chamber and the side walls are all provided with the cryogenic water vapor removal component (10).
7. The vacuum coating machine with better internal vapor removal effect according to claim 6, wherein:
the heating piece (9) is an armored heating wire.
8. The vacuum coating machine with better internal moisture removal effect according to claim 6, wherein the vacuum pumping system comprises:
The first vacuum pump (7) is communicated with the side wall of the upper chamber, and the first vacuum pump (7) is used for pumping the vacuum degree in the shell (1) to a preset value;
And the second vacuum pump (8) is communicated with the top wall of the upper chamber, and the second vacuum pump (8) is used for pumping the vacuum degree in the shell (1) from the preset value to a required value.
9. The vacuum coating machine with better internal vapor removal effect according to claim 8, wherein:
The shell (1) is further provided with a detection part (13), the detection part (13) is used for detecting the vacuum degree in the shell (1), and the first vacuum pump (7) and the second vacuum pump (8) are electrically connected with the detection part (13) so as to open and close the first vacuum pump (7) and the second vacuum pump (8) according to the vacuum degree in the shell (1).
10. The vacuum coating machine with better internal moisture removal effect according to claim 9, wherein:
And an electromagnetic valve (14) is further arranged at the position where the second vacuum pump (8) is connected with the shell (1), and the electromagnetic valve (14) is electrically connected with the detection part (13) so as to open and close the electromagnetic valve (14) according to the vacuum degree in the shell (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202421366375.5U CN222557052U (en) | 2024-06-14 | 2024-06-14 | Vacuum coating machine with better internal water vapor removal effect |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202421366375.5U CN222557052U (en) | 2024-06-14 | 2024-06-14 | Vacuum coating machine with better internal water vapor removal effect |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN222557052U true CN222557052U (en) | 2025-03-04 |
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ID=94750261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202421366375.5U Active CN222557052U (en) | 2024-06-14 | 2024-06-14 | Vacuum coating machine with better internal water vapor removal effect |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN222557052U (en) |
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2024
- 2024-06-14 CN CN202421366375.5U patent/CN222557052U/en active Active
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