CN222499366U - Heat insulation device for reaction chamber transmission valve - Google Patents
Heat insulation device for reaction chamber transmission valve Download PDFInfo
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- CN222499366U CN222499366U CN202421239821.6U CN202421239821U CN222499366U CN 222499366 U CN222499366 U CN 222499366U CN 202421239821 U CN202421239821 U CN 202421239821U CN 222499366 U CN222499366 U CN 222499366U
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- reaction chamber
- heat insulation
- mounting plate
- transfer valve
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Abstract
本实用新型涉及一种用于反应腔室传输阀的隔热装置，属于原子层沉积镀膜设备的技术领域。它包括反应腔室本体和传输阀，在反应腔室本体的送料口处沿竖直方向上下对称安装有隔热组件；隔热组件的结构包括：气缸安装板，在气缸安装板上安装气缸，沿气缸的伸缩方向配合设置有伸缩架，在伸缩架上装配导轨，在导轨内滑动配合有驱动块；所述驱动块与气缸驱动板的一端相接，气缸驱动板的另一端与气缸的输出端相接；所述驱动块的侧壁与伸缩轴固定连接，伸缩轴伸入反应腔室本体内，在伸缩轴的底部安装有拦板，在拦板上装配隔热挡板。本实用新型能隔绝反应腔室对传输阀的高温辐射，降低传输阀损伤并延长其使用寿命。
The utility model relates to a heat insulation device for a reaction chamber transfer valve, and belongs to the technical field of atomic layer deposition coating equipment. It includes a reaction chamber body and a transfer valve, and a heat insulation component is symmetrically installed up and down along the vertical direction at the feed port of the reaction chamber body; the structure of the heat insulation component includes: a cylinder mounting plate, a cylinder is installed on the cylinder mounting plate, a telescopic frame is arranged along the telescopic direction of the cylinder, a guide rail is assembled on the telescopic frame, and a driving block is slidably matched in the guide rail; the driving block is connected to one end of the cylinder driving plate, and the other end of the cylinder driving plate is connected to the output end of the cylinder; the side wall of the driving block is fixedly connected to the telescopic shaft, the telescopic shaft extends into the reaction chamber body, a baffle is installed at the bottom of the telescopic shaft, and a heat insulation baffle is assembled on the baffle. The utility model can isolate the high-temperature radiation of the reaction chamber to the transfer valve, reduce the damage to the transfer valve and extend its service life.
Description
Technical Field
The utility model relates to the technical field of atomic layer deposition coating equipment, in particular to a heat insulation device for a reaction chamber transmission valve.
Background
In advanced ALD (atomic layer deposition) coating equipment, the transfer valve is a critical component. The device is firmly arranged at a feeding port of the reaction chamber through a bolt and a sealing ring.
However, the reaction chamber is typically operated in a high temperature environment, which is often accompanied by intense heat radiation. Such high temperature radiation inevitably impinges on the valve plate of the transfer valve, causing it to be subjected to a continuous thermal shock. Under such working conditions for a long time, the material of the transmission valve is easily ablated by high-temperature radiation, so that the surface of the valve plate is damaged by deformation, cracks and the like. Such damage not only reduces the service life of the transfer valve, but may also cause seal failure of the transfer valve.
Therefore, to solve this problem, it is necessary to design an insulating device for the transfer valve of the reaction chamber.
Disclosure of utility model
The present inventors have aimed at the above-mentioned drawbacks of the prior art, and have provided a heat insulation device for a transfer valve of a reaction chamber, so as to insulate the high temperature radiation of the transfer valve from the reaction chamber, thereby reducing the damage of the transfer valve and prolonging the service life thereof.
The heat insulation device for the reaction chamber transmission valve comprises a reaction chamber body and the transmission valve, wherein heat insulation components are symmetrically arranged at a feeding port of the reaction chamber body in the vertical direction up and down, the heat insulation components structurally comprise a cylinder mounting plate, a cylinder is arranged on the cylinder mounting plate, a telescopic frame is arranged along the telescopic direction of the cylinder in a matched mode, a guide rail is arranged on the telescopic frame, a driving block is slidably matched in the guide rail, the driving block is connected with one end of a cylinder driving plate, the other end of the cylinder driving plate is connected with the output end of the cylinder, the side wall of the driving block is fixedly connected with a telescopic shaft, the telescopic shaft stretches into the reaction chamber body, a baffle plate is arranged at the bottom of the telescopic shaft, and a heat insulation baffle plate is arranged on the baffle plate.
As a further improvement of the above technical scheme:
Preferably, a bellows is further sleeved on the periphery of the telescopic shaft, and the bellows is mounted on the cylinder mounting plate.
Preferably, a sealing ring is additionally arranged between the corrugated pipe and the cylinder mounting plate and is fixed through bolts.
Preferably, a sealing ring is additionally arranged at the contact end of the corrugated pipe and the telescopic shaft and is fixed through a bolt.
The telescopic frame is characterized in that a first limiting assembly for upper limiting is arranged at the top of the telescopic frame, the first limiting assembly is structurally characterized by comprising a first buffer mounting plate fixed on the telescopic frame, a hydraulic buffer is assembled on the first buffer mounting plate, and the hydraulic buffer moves along the length direction of a guide rail.
Preferably, the side face of the driving block is provided with a second limiting component for lower limiting, and the second limiting component is structurally characterized by comprising a second buffer mounting plate fixed on the driving block, and a limiting block is arranged below the second buffer mounting plate.
Preferably, the reaction chamber body is reserved with a through hole for assembly, and the heat insulation assembly is installed at the through hole.
Preferably, a sealing ring for sealing is arranged at the contact end between the heat insulation assembly and the reaction chamber body.
The beneficial effects of the utility model are as follows:
The utility model has compact structure and convenient operation, and can drive the heat insulation baffle plate to move by utilizing the air cylinder according to the running state of the reaction chamber so as to shield or open the feeding port between the transmission valve and the reaction chamber, thereby reducing the temperature rise of the transmission valve and effectively avoiding the loss of the service life of the valve plate of the transmission valve due to high temperature.
Drawings
Fig. 1 is a schematic diagram of the overall layout structure of the present utility model.
FIG. 2 is a schematic view of the heat insulation assembly of the present utility model.
Fig. 3 is an exploded view of fig. 2.
The device comprises a reaction chamber body, a heat insulation assembly, a transmission valve and a heat insulation assembly, wherein the reaction chamber body is provided with a heat insulation cavity;
201. The device comprises a cylinder mounting plate 202, a cylinder 203, a telescopic frame 204, a guide rail 205, a driving block 206, a cylinder driving plate 207, a telescopic shaft 208, a corrugated pipe 209, a baffle 210, a heat insulation baffle 211, a first limiting component 212 and a second limiting component;
2111. A first buffer mounting plate; 2112, hydraulic buffers;
2121. 2122, a limiting block.
Detailed Description
The following describes specific embodiments of the present utility model with reference to the drawings.
As shown in fig. 1-3, the heat insulation device for the reaction chamber transmission valve in the embodiment comprises a reaction chamber body 1 and a transmission valve 3, wherein heat insulation assemblies 2 are symmetrically installed at a feeding port of the reaction chamber body 1 in the vertical direction up and down, the heat insulation assemblies 2 comprise cylinder installation plates 201, cylinders 202 are installed on the cylinder installation plates 201, telescopic frames 203 are matched in the telescopic directions of the cylinders 202, guide rails 204 are assembled on the telescopic frames 203, driving blocks 205 are slidably matched in the guide rails 204, one ends of the driving blocks 205 are connected with one ends of cylinder driving plates 206, the other ends of the cylinder driving plates 206 are connected with output ends of the cylinders 202, side walls of the driving blocks 205 are fixedly connected with telescopic shafts 207, the telescopic shafts 207 extend into the reaction chamber body 1, baffle plates 209 are installed at the bottoms of the telescopic shafts 207, and heat insulation baffles 210 are assembled on the baffle plates 209.
In this embodiment, a bellows 208 is further sleeved on the outer periphery of the telescopic shaft 207, and the bellows 208 is mounted on the cylinder mounting plate 201.
In this embodiment, a seal ring is added between the bellows 208 and the cylinder mounting plate 201 and is fixed by bolts.
In this embodiment, a seal ring is added to the contact end between the bellows 208 and the telescopic shaft 207 and is fixed by a bolt.
In the embodiment, a first limiting assembly 211 for upper limiting is arranged on the top of the expansion bracket 203, and the first limiting assembly 211 is structured to comprise a first buffer mounting plate 2111 fixed on the expansion bracket 203, a hydraulic buffer 2112 is assembled on the first buffer mounting plate 2111, and the hydraulic buffer 2112 moves along the length direction of the guide rail 204.
In the embodiment, a second limiting component 212 for limiting the lower limit is arranged on the side face of the driving block 205, and the second limiting component 212 is composed of a second buffer mounting plate 2121 fixed on the driving block 205, and a limiting block 2122 is arranged below the second buffer mounting plate 2121.
In this embodiment, the reaction chamber body 1 is reserved with a through hole for assembly, and the heat insulation assembly 2 is installed at the through hole.
In this embodiment, the contact end between the heat insulation assembly 2 and the reaction chamber body 1 is provided with a sealing ring for sealing.
In actual operation, the working method of the utility model is as follows:
When the high temperature radiation in the reaction chamber body 1 is transmitted to the transmission valve 3 according to the operation state of the reaction chamber, the air cylinder 202 starts to work, the heat insulation baffles 210 in the heat insulation assembly 2 which are vertically symmetrical move towards each other, and finally a heat insulation layer is formed to block the high temperature radiation at the feeding port towards the transmission valve 3.
The utility model has reasonable structure and simple operation, and the air cylinder 202 drives the heat insulation baffle 210 to move so as to shade or open the feeding port between the transmission valve 3 and the reaction chamber body 1, thereby reducing the temperature rise of the transmission valve 3 and effectively avoiding the loss of the service life of the valve plate of the transmission valve 3 due to high temperature.
The above description is intended to illustrate the utility model and not to limit it, the scope of which is defined by the claims, and any modifications can be made within the scope of the utility model.
Claims (8)
1. The heat insulation device for the reaction chamber transmission valve is characterized by comprising a reaction chamber body (1) and a transmission valve (3), wherein heat insulation components (2) are symmetrically arranged at a feeding port of the reaction chamber body (1) along the vertical direction;
The heat insulation assembly (2) comprises an air cylinder mounting plate (201), an air cylinder (202) is mounted on the air cylinder mounting plate (201), a telescopic frame (203) is matched and arranged along the telescopic direction of the air cylinder (202), a guide rail (204) is assembled on the telescopic frame (203), a driving block (205) is slidably matched in the guide rail (204), the driving block (205) is connected with one end of an air cylinder driving plate (206), the other end of the air cylinder driving plate (206) is connected with the output end of the air cylinder (202), the side wall of the driving block (205) is fixedly connected with a telescopic shaft (207), the telescopic shaft (207) stretches into a reaction chamber body (1), a baffle plate (209) is mounted at the bottom of the telescopic shaft (207), and a heat insulation baffle plate (210) is assembled on the baffle plate (209).
2. The heat insulation apparatus for a reaction chamber transfer valve according to claim 1, wherein the outer periphery of the telescopic shaft (207) is further sleeved with a bellows (208), and the bellows (208) is mounted on the cylinder mounting plate (201).
3. The heat insulation apparatus for a reaction chamber transfer valve according to claim 2, wherein a seal ring is additionally provided between the bellows (208) and the cylinder mounting plate (201) and is fixed by bolts.
4. The heat insulation apparatus for a reaction chamber transfer valve according to claim 2, wherein a seal ring is additionally provided at a contact end of the bellows (208) with the telescopic shaft (207) and is fixed by a bolt.
5. The heat insulation device for a reaction chamber transfer valve according to claim 1, wherein a first limiting component (211) for upper limiting is arranged at the top of the expansion bracket (203);
The first limiting assembly (211) is structurally characterized by comprising a first buffer mounting plate (2111) fixed on the telescopic frame (203), wherein a hydraulic buffer (2112) is assembled on the first buffer mounting plate (2111), and the hydraulic buffer (2112) moves along the length direction of the guide rail (204).
6. The heat insulation apparatus for a reaction chamber transfer valve according to claim 1, wherein a second limiting assembly (212) for lower limit is provided at a side of the driving block (205);
The second limiting assembly (212) is structurally characterized by comprising a second buffer mounting plate (2121) fixed on the driving block (205), and a limiting block (2122) is arranged below the second buffer mounting plate (2121).
7. A thermal insulation device for a reaction chamber transfer valve according to claim 1, characterized in that the reaction chamber body (1) is reserved with a through hole for assembly, at which a thermal insulation assembly (2) is mounted.
8. A thermal insulation device for a reaction chamber transfer valve according to claim 7, characterized in that the contact end between the thermal insulation assembly (2) and the reaction chamber body (1) is provided with a sealing ring for sealing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202421239821.6U CN222499366U (en) | 2024-05-31 | 2024-05-31 | Heat insulation device for reaction chamber transmission valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202421239821.6U CN222499366U (en) | 2024-05-31 | 2024-05-31 | Heat insulation device for reaction chamber transmission valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN222499366U true CN222499366U (en) | 2025-02-18 |
Family
ID=94547325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202421239821.6U Active CN222499366U (en) | 2024-05-31 | 2024-05-31 | Heat insulation device for reaction chamber transmission valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN222499366U (en) |
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2024
- 2024-05-31 CN CN202421239821.6U patent/CN222499366U/en active Active
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