CN222164817U

CN222164817U - Combustion Pest Control Equipment

Info

Publication number: CN222164817U
Application number: CN202420231058.6U
Authority: CN
Inventors: 杨奕晟; 袁海岭
Original assignee: Shanghai Huali Microelectronics Corp
Current assignee: Shanghai Huali Microelectronics Corp
Priority date: 2024-01-30
Filing date: 2024-01-30
Publication date: 2024-12-13
Anticipated expiration: 2034-01-30

Abstract

The utility model provides a combustion type harm removal device, including: an intake system, the intake system includes a first intake pipe, a second intake pipe and a connecting seat, the connecting seat is provided with a first through hole and a second through hole, the first intake pipe is connected to the first through hole, the second intake pipe is connected to the second through hole, and the diameter of the first through hole is greater than the diameter of the second through hole; a combustion system, the combustion system includes a combustion chamber, the first through hole and the second through hole are both connected to the combustion chamber; a water washing system, the water washing system is connected to the combustion system, and is used to receive the gas after combustion in the combustion chamber and perform water washing treatment; an exhaust system, the gas after treatment by the water washing system is discharged to the outside of the combustion type harm removal device through the exhaust system. The utility model can not only improve the stability and reliability of the waste gas treatment system, ensure that the waste gas treatment can be carried out continuously, but also avoid gas blockage and condensation of the gas inside or at the mouth of the first through hole.

Description

Combustion type pest eliminating equipment

Technical Field

The utility model relates to the technical field of semiconductors, in particular to combustion type pest removal equipment.

Background

Semiconductor processes are widely used in various industries, ranging from ULSI, TFT-LCD to the current micro-electromechanical (MEMS) industry, and are used as the manufacturing processes of products, such as dry etching, oxidation, ion implantation, thin film deposition, etc. The use of gases has always played an important role in semiconductor processing because gases can produce chemical reactions that are required to shape the electrical characteristics of semiconductors. In addition, in the production process of the semiconductor industry, a large amount of chemicals and special gases are required, so that a large amount of toxic and harmful process waste gas can be continuously generated in the production loop, meanwhile, only part of gases can be used in the production loop, and the rest of gases are discharged as waste gas. For example, CF ₄ uses approximately only 5% of the total amount of gas in the process and SF ₆ uses approximately only 20% of the total amount of gas in the process. The process waste gas is required to be collected, treated and discharged synchronously with the production process, and the waste gas treatment system and equipment are integral parts of the customer production process, and the safety and stability of the waste gas are directly related to the productivity utilization rate, the product yield, the professional health of staff and the ecological environment of the customer. Electronic exhaust gas treatment equipment (local scrubber) has been used in semiconductor manufacturing lines (particularly 8 inch and 12 inch wafers) to treat exhaust gas from various processes in the line. Currently, the common exhaust gas treatment methods include an electrothermal decomposition type, a combustion type, a high temperature plasma type, an adsorption type (a catalyst type containing heat), and the like.

In the existing combustion type pest elimination equipment, for example, when treating the waste gas of the ALD TiN deposition process, the gas enters the combustion chamber through the gas passage, however, the diameter of the gas passage is limited, usually the diameter of the gas passage is 16mm, when the waste gas generated in the previous process is increased to increase the gas flow, the gas is easy to be blocked and condensed in the gas passage or the gas passage opening end, a large amount of gas is blocked in the gas passage and the inlet of the combustion chamber to cause the gas pressure to rise and alarm, and the gas cannot smoothly enter the combustion chamber and the subsequent processes, finally the pest elimination equipment is down, and the waste gas generated in the previous process cannot be treated in time. Moreover, gas condenses the caking in the air flue or air flue mouth end, causes the dust to pile up, still needs periodic cleaning, shut down and maintain, needs to throw in a large amount of manpower and materials, influences production efficiency and manufacturing cost, if not clear up for a long time, serious even can lead to the air flue to block up.

Disclosure of utility model

The utility model aims to provide combustion type pest removal equipment which can not only improve the stability and reliability of an exhaust gas treatment system and ensure that the exhaust gas treatment can be continuously carried out, but also avoid gas blocking and condensation agglomeration of gas in the first through hole or at the mouth end.

In order to achieve the above object, the present utility model provides a combustion type pest control device comprising:

The air inlet system comprises a first air inlet pipe, a second air inlet pipe and a connecting seat, wherein a first through hole and a second through hole are formed in the connecting seat, the first air inlet pipe is communicated with the first through hole, the second air inlet pipe is communicated with the second through hole, and the diameter of the first through hole is larger than that of the second through hole;

the combustion system comprises a combustion chamber, and the first through hole and the second through hole are communicated with the combustion chamber;

The water washing system is connected with the combustion system and is used for receiving the gas combusted in the combustion chamber and carrying out water washing treatment;

and the gas after being treated by the water washing system is discharged out of the combustion type pest elimination equipment through the gas discharging system.

Optionally, the diameter of the first air inlet pipe is the same as the diameter of the second air inlet pipe.

Optionally, the diameter of the second air inlet pipe is the same as the diameter of the second through hole.

Optionally, the combustion system further comprises a pressure detector, the pressure detector being located within the combustion chamber.

Optionally, the diameter of the first through hole is one to two times the diameter of the second through hole.

Optionally, the washing system includes the washing subassembly of once, secondary washing subassembly and cubic washing subassembly that connects gradually, just the washing subassembly of once, the washing subassembly of secondary and cubic washing subassembly is located between combustion system and the exhaust system.

Optionally, the tertiary water washing assembly comprises a filtering device.

Optionally, the number of the first air inlet pipes and the number of the second air inlet pipes are at least two, the first air inlet pipes and the first through holes are in one-to-one correspondence, and the second air inlet pipes and the second through holes are in one-to-one correspondence.

Optionally, all the first through holes and the second through holes are uniformly distributed on the connecting seat in a ring shape.

Optionally, the first air inlet pipe is connected with the first through hole through a first pipeline connecting piece, and the second air inlet pipe is connected with the second through hole through a second pipeline connecting piece.

In the above configuration, the first through hole and the second through hole are arranged as the air passage for the gas to enter the combustion chamber, so that the stability and the reliability of the waste gas treatment system are improved, the waste gas treatment can be continuously carried out, the equipment of each previous process is connected with two combustion type pest removing equipment, so that when one of the pest removing equipment is down, the waste gas can enter the other pest removing equipment for continuous treatment, and the second through hole is used for receiving the waste gas which cannot be treated when the other pest removing equipment is down, therefore, the second through hole is not continuously provided with the waste gas, only when the other pest removing equipment is down, the gas enters, the gas flow is smaller, the situation that the gas blockage and condensation agglomeration are not easy to occur is avoided, the first through hole is continuously provided with the waste gas, the gas flow is larger, and therefore, the diameter of the first through hole is designed to be larger than the diameter of the second through hole, the gas is prevented from being blocked and condensed and agglomerated in the inside or at the mouth end of the first through hole, the gas is prevented from being excessively high in the air pressure of the combustion chamber, the gas can continuously and smoothly enter the combustion chamber and the combustion process efficiency is maintained. According to the utility model, the second through hole is used for receiving the waste gas which cannot be treated when other pest-removing equipment is down, so that the stability and the reliability of a waste gas treatment system are improved, the waste gas treatment can be continuously carried out, the gas is prevented from being blocked and condensed in the first through hole or at the mouth end by increasing the diameter of the first through hole, the frequency and the workload of shutdown maintenance equipment are greatly reduced, the production efficiency is ensured, and the failure rate and the production cost are reduced.

Drawings

It will be appreciated by those skilled in the art that the drawings are provided for a better understanding of the invention and do not constitute any limitation on the scope of the invention. Wherein:

FIG. 1 is a schematic diagram of a combustion type pest control device according to an embodiment of the present utility model;

Fig. 2 is a schematic view of a connection base of a combustion type pest elimination device according to an embodiment of the utility model.

Wherein, the reference numerals are as follows:

11-first air inlet pipe, 12-second air inlet pipe, 2-connecting seat, 21-first through hole, 22-second through hole, 3-combustion chamber, 31-first pipeline connecting piece and 32-second pipeline connecting piece.

Detailed Description

In this document, unless otherwise indicated, the terms "upper," "lower," "left," "right," "inner," "outer," "front," "rear," "top," "bottom," and the like are used for indicating orientation or positional relationship based on the drawings, merely to facilitate description of the utility model and to simplify the description, and do not indicate or imply that the devices or elements referred to must have the orientation and operation of their features, and thus should not be construed as limiting the utility model.

Specific embodiments of the present utility model will be described in more detail below with reference to the drawings. The advantages and features of the present utility model will become more apparent from the following description. It should be noted that the drawings are in a very simplified form and are all to a non-precise scale, merely for convenience and clarity in aiding in the description of embodiments of the utility model.

Preferred embodiments of the present utility model will be described in detail with reference to the accompanying drawings.

Fig. 1 is a schematic view of a combustion type pest control device according to an embodiment of the present utility model. Referring to fig. 1, an embodiment of the present utility model provides a combustion type pest elimination device, which includes an air intake system, a combustion system, a water washing system and an exhaust system. The combustion system comprises a combustion chamber 3 for combusting the exhaust gases. The air inlet system comprises a first air inlet pipe 11, a second air inlet pipe 12 and a connecting seat 2, wherein a first through hole 21 and a second through hole 22 are formed in the connecting seat 2, the first through hole 21 and the second through hole 22 are communicated with the combustion chamber 3, the first air inlet pipe 11 is communicated with the first through hole 21, the second air inlet pipe 12 is communicated with the second through hole 22, further, the number of the first air inlet pipes 11 and the number of the second air inlet pipes 12 are at least two, the first air inlet pipes 11 and the first through holes 21 are in one-to-one correspondence, and the second air inlet pipes 12 and the second through holes 22 are in one-to-one correspondence. So arranged, the exhaust gas can firstly enter the connecting seat 2 through the first air inlet pipe 11 and the second air inlet pipe 12, and then enter the combustion chamber 3 through the first through hole 21 and the second through hole 22 in the connecting seat 2. The diameter of the first through hole 21 is larger than the diameter of the second through hole 22, and preferably, the combination of the bearable amount of the combustion chamber 3, the structure of the harmful device and the characteristics of the exhaust gas is considered, the diameter of the first through hole 21 is one to twice the diameter of the second through hole 22, and in this embodiment, the diameter of the first through hole 21 is 1.5 times the diameter of the second through hole 22, and in this embodiment, the diameter of the second through hole 22 is 16mm, and then the diameter of the first through hole 21 is 24mm. In this embodiment, the diameter of the first air inlet pipe 11 and the diameter of the second air inlet pipe 12 may be the same, and in other embodiments, the diameter of the first air inlet pipe 11 and the diameter of the second air inlet pipe 12 may be different according to the specific situation, and the diameter of the second air inlet pipe 12 may be the same as or different from the diameter of the second through hole 22.

Further, the first air intake pipe 11 is connected to the first through hole 21 through the first pipe connection 31, and the second air intake pipe 12 is connected to the second through hole 22 through the second pipe connection 32. The first pipe connection 31 and the second pipe connection 32 may each be a quick coupling.

Fig. 2 is a schematic view of a connection seat of a combustion type pest elimination device according to an embodiment of the utility model, referring to fig. 2, all the first through holes 21 and the second through holes 22 are uniformly distributed on the connection seat 2 in a ring shape. The present utility model is not limited to how the first through holes 21 and the second through holes 22 are specifically distributed on the connection base 2, and fig. 2 is only an example.

For example, each device in the previous process is connected to two combustion type pest-killing devices, that is, the device in the previous process is connected to one pest-killing device through the first air inlet pipe 11, and meanwhile, is connected to the other pest-killing device (as a standby machine) through the second air inlet pipe 12, an on-off valve can be arranged on the second air inlet pipe 12, the on-off valve is kept normally closed in normal operation, when the pest-killing device connected to the first air inlet pipe 11 is down, the on-off valve on the second air inlet pipe 12 is opened, and the waste gas enters the other pest-killing device from the second air inlet pipe 12. It will be appreciated that two pest control devices may be standby machines with respect to each other.

In the above configuration, the first through hole 21 and the second through hole 22 are provided as the air passage for the gas to enter the combustion chamber 3, in order to improve the stability and reliability of the exhaust gas treatment system, the exhaust gas treatment can be continuously performed, and the equipment of each previous process is connected with two combustion type pest removing equipment, so that when one of the pest removing equipment is down, the exhaust gas can enter the other pest removing equipment for continuous treatment, while the second through hole 22 is used for receiving the exhaust gas which cannot be treated when the other pest removing equipment is down, therefore, the second through hole 22 is not continuously provided with the exhaust gas, only when the other pest removing equipment is down, the gas enters, the gas flow is smaller, the condition that the gas blockage condensation agglomeration is difficult to occur is caused, the first through hole 21 is continuously provided with the exhaust gas, the gas flow is larger, therefore, the diameter of the first through hole 21 is designed to be larger than the diameter of the second through hole 22, the gas is prevented from being blocked and condensed agglomeration at the inner part or the mouth end of the first through hole 21, the gas is prevented from being excessively high to the combustion chamber 3, the gas can enter the combustion chamber 3 smoothly, and the subsequent combustion process is performed continuously, and the combustion process is performed smoothly, and the combustion process is continued. According to the utility model, the second through holes 22 are used for receiving the waste gas which cannot be treated when other pest-removing equipment is down, so that the stability and the reliability of a waste gas treatment system are improved, the waste gas treatment can be continuously carried out, and the gas blocking, condensing and caking of the gas in the first through holes 21 or at the mouth end are avoided by increasing the diameter of the first through holes 21, so that the frequency and the workload of shutdown maintenance equipment are greatly reduced, the production efficiency is ensured, and the failure rate and the production cost are reduced.

The combustion system of the present utility model further comprises a pressure detector located in the combustion chamber 3, typically located close to the inlet of the combustion chamber 3, i.e. close to the mouth end of the first through hole 21, in this embodiment the combustion chamber 3 is located below the connection seat 2, and the pressure detector is located in the upper half of the combustion chamber 3 for detecting the gas pressure and for alerting if the pressure exceeds a preset value.

The water washing system is connected with the combustion system and is used for receiving the gas combusted in the combustion chamber 3 and carrying out water washing treatment, and the water washing system comprises a primary water washing component, a secondary water washing component and a tertiary water washing component which are sequentially connected, wherein the primary water washing component, the secondary water washing component and the tertiary water washing component are positioned between the combustion system and the exhaust system. Specifically, the primary water washing component is responsible for washing and cooling gas, the secondary water washing component also plays a role in precipitating impurities when washing and cooling, the tertiary water washing component comprises a filtering device, and the tertiary water washing component also plays a role in filtering when washing. Then, the gas treated by the water washing system is discharged out of the combustion type pest elimination equipment through an exhaust system. It is understood that the exhaust system comprises an exhaust pipe, and the gas treated by the water washing system is exhausted to the equipment of the next working procedure or directly exhausted into the atmosphere through the exhaust pipe.

It should be appreciated that references in the specification to "one embodiment," "an embodiment," "a particular embodiment," "some embodiments," etc., indicate that the embodiment described may include a particular feature, structure, or characteristic. Moreover, such phrases are not necessarily referring to the same embodiment. Furthermore, when a particular feature, structure, or characteristic is described in connection with an embodiment, it is submitted that it is within the knowledge of one skilled in the relevant art to effect such feature, structure, or characteristic in connection with other embodiments whether or not explicitly described.

It should be noted that, in the present description, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different manner from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other. For the system disclosed in the embodiment, the description is relatively simple because of corresponding to the method disclosed in the embodiment, and the relevant points refer to the description of the method section.

It should be further noted that although the present utility model has been disclosed in the preferred embodiments, the above embodiments are not intended to limit the present utility model. Many possible variations and modifications of the disclosed technology can be made by anyone skilled in the art without departing from the scope of the technology, or the technology can be modified to be equivalent. Therefore, any simple modification, equivalent variation and modification of the above embodiments according to the technical substance of the present utility model still fall within the scope of the technical solution of the present utility model.

It should be further understood that the terms "first," "second," "third," and the like in this specification are used merely for distinguishing between various components, elements, steps, etc. in the specification and not for indicating a logical or sequential relationship between the various components, elements, steps, etc., unless otherwise indicated.

It should also be understood that the terminology described herein is for the purpose of describing particular embodiments only, and is not intended to limit the scope of the present utility model. It must be noted that, as used herein and in the appended claims, the singular forms "a," "an," and "the" include plural referents unless the context clearly dictates otherwise. For example, reference to "a step" or "an apparatus" means a reference to one or more steps or apparatuses, and may include sub-steps as well as sub-apparatuses. All conjunctions used should be understood in the broadest sense. And, the word "or" should be understood as having the definition of a logical "or" rather than a logical "exclusive or" unless the context clearly indicates the contrary. Furthermore, implementation of the methods and/or apparatus in embodiments of the utility model may include performing selected tasks manually, automatically, or in combination.

Claims

1. A combustion type pest control device, comprising:

2. The combustion type pest control device as claimed in claim 1, wherein a diameter of the first intake pipe and a diameter of the second intake pipe are the same.

3. The combustion type pest control device as claimed in claim 1, wherein a diameter of the second intake pipe is the same as a diameter of the second through hole.

4. The combustion pest elimination device of claim 1, wherein said combustion system further comprises a pressure detector, said pressure detector being located within said combustion chamber.

5. The combustion type pest control device of claim 1, wherein a diameter of the first through hole is one to two times a diameter of the second through hole.

6. The combustion type pest elimination apparatus of claim 1, wherein said water wash system includes a primary water wash assembly, a secondary water wash assembly, and a tertiary water wash assembly connected in sequence, and said primary water wash assembly, said secondary water wash assembly, and said tertiary water wash assembly are located between said combustion system and said exhaust system.

7. The combustion pest elimination apparatus of claim 6, wherein said tertiary water wash assembly includes a filter device.

8. The combustion type pest elimination device according to claim 1, wherein the number of the first air inlet pipes and the number of the second air inlet pipes are at least two, the first air inlet pipes and the first through holes are in one-to-one correspondence, and the second air inlet pipes and the second through holes are in one-to-one correspondence.

9. The combustion type pest elimination device of claim 8, wherein all of said first through holes and said second through holes are uniformly distributed in a ring shape on said connection base.

10. The combustion type pest elimination apparatus of claim 1, wherein said first air intake pipe is connected to said first through hole by a first pipe connection, and said second air intake pipe is connected to said second through hole by a second pipe connection.