CN222052898U - A dielectric barrier discharge load power supply with energy feedback - Google Patents
A dielectric barrier discharge load power supply with energy feedback Download PDFInfo
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- CN222052898U CN222052898U CN202420537032.4U CN202420537032U CN222052898U CN 222052898 U CN222052898 U CN 222052898U CN 202420537032 U CN202420537032 U CN 202420537032U CN 222052898 U CN222052898 U CN 222052898U
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- 230000005284 excitation Effects 0.000 abstract description 7
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
- Y02B70/10—Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes
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Abstract
The utility model discloses a dielectric barrier discharge load power supply with energy feedback, the power supply disclosed by the utility model consists of two symmetrical multi-resonant circuits and an energy feedback circuit. The front stage of the multi-resonant circuit realizes the charging of the resonant capacitor by using a first resonant circuit consisting of a diode, a resonant inductor and a resonant capacitor. The rear stage of the multi-resonant circuit generates high-frequency pulse excitation on the dielectric barrier load by using a second resonant circuit consisting of a resonant capacitor, a transformer leakage reactance and a load. By controlling the switching tube in the energy feedback circuit, the residual energy stored on the dielectric barrier load can be fed back to the direct current power supply. In addition, the secondary side of the transformer in the power supply can be connected with a plurality of loads in different forms, such as an excimer lamp, an ozone generator and the like.
Description
Technical Field
The utility model relates to the field of special power supplies for power electronics, in particular to a power supply design of a dielectric barrier discharge load, and in particular relates to a dielectric barrier discharge load power supply with energy feedback.
Background
Dielectric barrier discharge (DBD: die1ectric BarrierDischarge) is a form of gas discharge, and is commonly used for generating low-temperature plasma containing a large amount of active particles at atmospheric pressure, so that the dielectric barrier discharge is widely applied to the fields of material modification, energy conversion, environmental management, biomedicine, aerospace and the like.
Along with the continuous expansion of the application field of the dielectric barrier discharge technology and the continuous development of the pulse power technology, the high-voltage pulse power supply is used as an excitation source of an important dielectric barrier load, and parameters such as amplitude, rising rate, frequency, shape, polarity and the like of the excitation pulse can influence the power consumption, efficiency, uniformity and stability of the dielectric barrier discharge. Theoretical studies have shown that if accumulated charge in a dielectric barrier discharge load can be eliminated, it will help to improve the discharge efficiency of the dielectric barrier discharge load. However, the current power supply cannot realize the function of the pulse power supply based on the multi-level circuit structure, the pulse power supply based on the Marx circuit structure or the pulse power supply based on the resonance circuit structure.
Therefore, how to provide a high-frequency resonant pulse bipolar dielectric barrier discharge power supply for solving the above technical problems is a problem that needs to be solved by those skilled in the art.
Disclosure of Invention
The utility model aims to provide a high-frequency resonance pulse power supply for a dielectric barrier discharge load so as to fully exert the performance of the dielectric barrier discharge load.
In view of the above, the present application provides a dielectric barrier discharge load power supply with energy feedback, which is characterized by comprising: a direct current power supply, a first diode (D1), a second diode (D2), a third diode (D3), a fourth diode (D4), a first resonant inductor (L1), a second resonant inductor (L2), a first power switching tube (S1), a second power switching tube (S2), a third power switching tube (S3), a fourth power switching tube (S4), a first resonant capacitor (C1), a second resonant capacitor (C2) and a boost transformer with a center tap;
The anode of the direct current power supply is respectively connected with the cathode of the first diode (D1), the cathode of the fourth diode (D4), the second end of the third power switch tube (S3) and the second end of the fourth power switch tube (S4);
The anode of the first diode (D1) is connected with the first end of the first resonant inductor (L1);
The second end of the first resonant inductor (L1) is respectively connected with the first end of the first resonant capacitor (C1) and the cathode of the second diode (D2);
The anode of the second diode (D2) is respectively connected with the cathode of the third diode (D3) and the first end of the first primary winding of the transformer;
The cathode of the third diode (D3) is connected with the first end of the third power switch tube (S3);
The first end of the first power switch tube (S1) is connected with the second end of the first primary winding of the transformer;
the anode of the fourth diode (D4) is connected with the first end of the second resonant inductor (L2);
The second end of the second resonant inductor (L2) is respectively connected with the first end of the second resonant capacitor (C2) and the cathode of the fifth diode (D5);
The anode of the fifth diode (D5) is respectively connected with the cathode of the sixth diode (D6) and the first end of the second primary winding of the transformer;
The cathode of the sixth diode (D6) is connected with the first end of the fourth power switch tube (S4);
the first end of the second power switch tube (S2) is connected with the second end of the second primary winding of the transformer;
The cathode of the direct current power supply is respectively connected with the second end of the first resonant capacitor (C1), the second end of the second resonant capacitor (C2), the second end of the first power switch tube (S1) and the second end of the second power switch tube (S2);
the first end and the second end of the secondary winding of the transformer are respectively connected with two ends of the dielectric barrier load.
Preferably, the capacitance value of the first resonance capacitor (C1) is equal to the capacitance value of the second resonance capacitor (C2).
Preferably, the inductance value of the first resonant inductor (L1) is equal to the inductance value of the second resonant inductor (L2).
Preferably, the working frequency and the duty ratio of the first power switch tube (S1) and the second power switch tube (S2) are equal, and the duty ratio is not higher than 0.5.
Preferably, the working frequency and the duty ratio of the third power switch tube (S3) and the fourth power switch tube (S4) are equal, and the duty ratio is not higher than 0.5.
Preferably, the turn-off signal of the first power switch tube (S1) is the same as the turn-on signal time of the third power switch tube (S3), the turn-off signal of the second power switch tube (S2) is the same as the turn-on signal time of the fourth power switch tube (S4), the working frequency and the duty ratio of the fourth power switch tube (S4) are the same, and the sum of the duty ratio of the first power switch tube (S1), the duty ratio of the second power switch tube (S2), the duty ratio of the third power switch tube (S3) and the duty ratio of the fourth power switch tube (S4) is less than 1.
Preferably, the first diode (D1), the second diode (D2), the third diode (D3), the fourth diode (D4), the fifth diode (D5), and the sixth diode (D6) are all fast recovery diodes.
Preferably, the first power switch tube (S1), the second power switch tube (S2), the third power switch tube (S3) and the fourth power switch tube (S4) are all NMOS, wherein the first ends of the first power switch tube (S1), the second power switch tube (S2), the third power switch tube (S3) and the fourth power switch tube (S4) are all drains of the NMOS; the second ends of the first power switch tube (S1), the second power switch tube (S2), the third power switch tube (S3) and the fourth power switch tube (S4) are all NMOS sources.
Preferably, the operating frequencies of the first power switch tube (S1), the second power switch tube (S2), the third power switch tube (S3) and the fourth power switch tube (S4) can be changed, and the output frequency of the power supply can be adjusted.
Preferably, the secondary side of the transformer can be connected to a variety of different forms of loads, such as excimer lamps, ozone generators, etc.
Performance advantages:
Compared with the prior art, the utility model has the advantages that:
(1) The power supply disclosed by the utility model can eliminate accumulated charges in the dielectric barrier discharge load, and is beneficial to improving the discharge efficiency of the dielectric barrier discharge load.
(2) The power supply disclosed by the utility model can provide high-frequency bipolar pulse excitation voltage with high rising rate for the dielectric barrier load, and the rising rate of the excitation voltage can be changed by adjusting the numerical value of the resonance capacitor, so that the power supply has wider applicability;
Drawings
Fig. 1 is a schematic diagram of a high-frequency dielectric barrier discharge load power supply structure based on a full-bridge inverter circuit in the prior art;
Fig. 2 is a schematic diagram of a dielectric barrier discharge load power supply structure based on a Marx circuit structure in the prior art;
FIG. 3 is a schematic diagram of a high-frequency resonant pulse bipolar dielectric barrier discharge power supply provided by the utility model;
FIG. 4 is a diagram of the waveform of the energy feedback high frequency resonant pulse bipolar dielectric barrier discharge power supply according to the present utility model;
Fig. 5 is a schematic diagram of a working process of the energy feedback high-frequency resonant pulse type bipolar dielectric barrier discharge power supply provided by the utility model, wherein the first diode (D1) is turned on, the second diode (D2), the third diode (D3), the fourth diode (D4), the fifth diode (D5), the sixth diode (D6), the first power switching tube (S1), the second power switching tube (S2), the third power switching tube (S3) and the fourth power switching tube (S4) are turned off;
fig. 6 is a schematic diagram of a working process of the energy feedback high-frequency resonant pulse type bipolar dielectric barrier discharge power supply provided by the utility model, wherein the second diode (D2) is turned on, the first diode (D1), the third diode (D3), the fourth diode (D4), the fifth diode (D5), the sixth diode (D6), the first power switching tube (S1), the second power switching tube (S2), the third power switching tube (S3) and the fourth power switching tube (S4) are turned off;
fig. 7 is a schematic diagram of a working process of the energy feedback high-frequency resonant pulse type bipolar dielectric barrier discharge power supply provided by the utility model, wherein the third diode (D3), the third power switch tube (S3) are turned on, and the first power switch tube (S1), the first diode (D1), the second diode (D2), the fourth diode (D4), the fifth diode (D5), the sixth diode (D6), the second power switch tube (S2) and the fourth power switch tube (S4) are turned off;
Fig. 8 is a schematic diagram of a working process of the energy feedback high-frequency resonant pulse type bipolar dielectric barrier discharge power supply provided by the utility model, wherein the fourth diode (D4) is turned on, and the first diode (D1), the second diode (D2), the third diode (D3), the fifth diode (D5), the sixth diode (D6), the first power switching tube (S1), the second power switching tube (S2), the third power switching tube (S3) and the fourth power switching tube (S4) are turned off;
Fig. 9 is a schematic diagram of a working process of the energy feedback high-frequency resonant pulse type bipolar dielectric barrier discharge power supply provided by the utility model, wherein the power supply is turned on in a fifth diode (D5), and the first diode (D1), the second diode (D2), the third diode (D3), the fourth diode (D4), the sixth diode (D6), the first power switching tube (S1), the second power switching tube (S2), the third power switching tube (S3) and the fourth power switching tube (S4) are turned off;
Fig. 10 is a schematic diagram of a working process of the energy feedback high-frequency resonant pulse bipolar dielectric barrier discharge power supply provided by the utility model, in which a sixth diode (D6), a fourth power switch tube (S4) and a second power switch tube (S2) are turned on, a first diode (D1), a second diode (D2), a third diode (D3), a fourth diode (D4), a fifth diode (D5), a first power switch tube (S1), a second power switch tube (S2) and a third power switch tube (S3) are turned off;
In fig. 6 to 10, E is a dc power supply, D 1 is a first diode, D 2 is a second diode, D 3 is a third diode, D 4 is a fourth diode, D 5 is a fifth diode, D 6 is a sixth diode, and L 1 is a first resonant inductor; l 2 is a second resonance inductor, C 1 is a first resonance capacitor, C 2 is a second resonance capacitor, S 1 is a first power switch tube, S 2 is a second power switch tube, S 3 is a third power switch tube, S 4 is a fourth power switch tube, and T is a transformer.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
For easy understanding, referring to fig. 3, fig. 3 shows an embodiment of a power supply with energy feedback and high-frequency resonant pulse type bipolar dielectric barrier discharge with energy feedback according to the present utility model, which includes: a direct current power supply, a first diode (D1), a second diode (D2), a third diode (D3), a fourth diode (D4), a fifth diode (D5), a sixth diode (D6), a first resonant inductor (L1), a second resonant inductor (L2), a first power switching tube (S1), a second power switching tube, a third power switching tube (S3), a fourth power switching tube (S4), a first resonant capacitor (C1), a second resonant capacitor (C2) and a boost transformer with a center tap;
The anode of the direct current power supply is respectively connected with the cathode of the first diode (D1), the cathode of the fourth diode (D4), the second end of the third power switch tube (S3) and the second end of the fourth power switch tube (S4);
The anode of the first diode (D1) is connected with the first end of the first resonant inductor (L1);
The second end of the first resonant inductor (L1) is respectively connected with the first end of the first resonant capacitor (C1) and the cathode of the second diode (D2);
The anode of the second diode (D2) is respectively connected with the cathode of the third diode (D3) and the first end of the first primary winding of the transformer;
The cathode of the third diode (D3) is connected with the first end of the third power switch tube (S3);
The first end of the first power switch tube (S1) is connected with the second end of the first primary winding of the transformer;
the anode of the fourth diode (D4) is connected with the first end of the second resonant inductor (L2);
The second end of the second resonant inductor (L2) is respectively connected with the first end of the second resonant capacitor (C2) and the cathode of the fifth diode (D5);
The anode of the fifth diode (D5) is respectively connected with the cathode of the sixth diode (D6) and the first end of the second primary winding of the transformer;
The cathode of the sixth diode (D6) is connected with the first end of the fourth power switch tube (S4);
the first end of the second power switch tube (S2) is connected with the second end of the second primary winding of the transformer;
The cathode of the direct current power supply is respectively connected with the second end of the first resonant capacitor (C1), the second end of the second resonant capacitor (C2), the second end of the first power switch tube (S1) and the second end of the second power switch tube (S2);
the first end and the second end of the secondary winding of the transformer are respectively connected with two ends of the dielectric barrier load.
Specifically, the bipolar dielectric barrier discharge power supply with the energy feedback high-frequency resonance pulse provided by the utility model has 4 working modes, and the working modes of the bipolar dielectric barrier discharge power supply with the energy feedback high-frequency resonance pulse provided by the utility model are described as follows:
Here, let E be the dc power supply, D 1 be the first diode, D 2 be the second diode, D 3 be the third diode, D 4 be the fourth diode, D 5 be the fifth diode, D 6 be the sixth diode, and L 1 be the first resonant inductor; l 2 is a second resonance inductance, C 1 is a first resonance inductance, C 2 is a second resonance inductance, S 1 is a first power switch tube, S 2 is a second power switch tube, R 1 is a first absorption resistor, R 2 is a second absorption resistor, and T is a transformer.
Working mode 1:
At this time, as shown in fig. 5, fig. 5 shows that the energy feedback high-frequency resonant pulse type bipolar dielectric barrier discharge power supply provided by the present utility model is conducted in the first diode D 1, the second diode D 2, the third diode D 3, the fourth diode D 4, Fifth diode D 5, sixth diode D 6, first power switch S 1, second power switch S 2, The working engineering schematic diagram of the third power switch tube S 3 and the fourth power switch tube S 4 are turned off. due to the conduction of the first diode D 1, the second diode D 2, the third diode D 3, the fourth diode D 4, Fifth diode D 5, sixth diode D 6, first power switch S 1, second power switch S 2, The third power switch tube S 3 and the fourth power switch tube S 4 are turned off to form a resonant circuit of D 1→L1→C1, and the voltage on the first resonant capacitor C 1 is gradually increased. when the first resonant capacitor C 1 reaches the maximum value, due to the reverse blocking effect of the on D 1 of the first diode, all power switching devices in the power supply are in an off state, and the voltage on the first resonant capacitor C 1 remains unchanged.
Working mode 2:
At this time, as shown in fig. 6, fig. 6 shows that the energy feedback high-frequency resonant pulse type bipolar dielectric barrier discharge power supply provided by the present utility model is conducted through the second diode D 2, the first diode D 1, the third diode D 3, the fourth diode D 4, Fifth diode D 5, sixth diode D 6, first power switch S 1, second power switch S 2, The working engineering schematic diagram of the third power switch tube S 3 and the fourth power switch tube S 4 are turned off. Due to the conduction of the second diode D 2, the first diode D 1, the third diode D 3, the fourth diode D 4, Fifth diode D 5, sixth diode D 6, first power switch S 1, second power switch S 2, the third power switch tube S 3 and the fourth power switch tube S 4 are turned off, a resonant circuit of C 1→N1→S1 is formed at the primary side of the transformer, the current flowing through the coil N 1 increases sharply, This causes the dielectric barrier load voltage connected to the secondary side of the transformer to increase sharply as well, resulting in a pulsed excitation voltage for the positive half cycle.
Working mode 3:
At this time, as shown in fig. 7, fig. 7 is a schematic diagram of an operation engineering of the energy feedback high-frequency resonant pulse type bipolar dielectric barrier discharge power supply provided by the present utility model, in which the third diode D 3, the third power switch S 3, the first power switch S 1, the first diode D 1, the second diode D 2, the fourth diode D 4, the fifth diode D 5, the sixth diode D 6, the first power switch S 1, the second power switch S 2 and the fourth power switch S 4 are turned on. Because the third power switch tube S 3 is turned on and the third diode D 3 is turned on, a resonant circuit of D 3→S3→E→S1 is formed, and the positive voltage stored on the dielectric barrier discharge load is extracted and fed back into the direct current voltage E.
Working mode 4:
At this time, as shown in fig. 8, fig. 8 shows that the energy feedback high-frequency resonant pulse type bipolar dielectric barrier discharge power supply provided by the present utility model is conducted in the fourth diode D 4, the first diode D 1, the second diode D 3, the third diode D 3, Fifth diode D 5, sixth diode D 6, first power switch S 1, second power switch S 4, The working engineering schematic diagram of the third power switch tube S 3 and the fourth power switch tube S 4 are turned off. Due to the conduction of the fourth diode D 4, the first diode D 1, the second diode D 3, the third diode D 3, Fifth diode D 5, sixth diode D 6, first power switch S 1, second power switch S 4, The third power switch tube S 3 and the fourth power switch tube S 4 are turned off to form a resonant circuit of D 4→L2→C2, and the voltage on the first resonant capacitor C 1 is gradually increased. When the first resonant capacitor C 1 reaches the maximum value, due to the reverse blocking effect of the on D 4 of the fourth diode, all power switching devices in the power supply are in an off state, and the voltage on the first resonant capacitor C 1 remains unchanged.
Working mode 5:
At this time, as shown in fig. 9, fig. 9 shows that the power supply with energy feedback high-frequency resonant pulse type bipolar dielectric barrier discharge provided by the present utility model is conducted to the fifth diode D 5, the first diode D 1, the second diode D 2, the third diode D 3, Fourth diode D 4, sixth diode D 6, first power switch S 1, second power switch S 2, The third power switch S 3 and the fourth power switch S 4 are turned off. Due to the fifth diode conduction D 5, the first diode D 1, the second diode D 2, the third diode D 3, Fourth diode D 4, sixth diode D 6, first power switch S 1, second power switch S 2, The third power switch tube S 3 and the fourth power switch tube S 4 are turned off, a resonant circuit of C 2→N2→S2 is formed at the primary side of the transformer, the current flowing through the coil N 2 increases sharply, This causes the dielectric barrier load voltage connected to the secondary side of the transformer to increase sharply as well, resulting in a pulsed excitation voltage for the positive half cycle.
Working mode 6:
At this time, as shown in fig. 10, fig. 10 is a schematic diagram of a working process of the energy feedback high-frequency resonant pulse type bipolar dielectric barrier discharge power supply provided by the present utility model in which the sixth diode D 6, the fourth power switch tube S 4 and the second power switch tube S 2 are turned on, the first diode D 1, the second diode D 2, the third diode D 3, the fourth diode D 4, the fifth diode D 5, the first power switch tube S 1, the second power switch tube S 2 and the third power switch tube S 3 are turned off;
since the sixth diode D 6, the fourth power switching tube S 4 and the second power switching tube S 2 are turned on and the second power switching tube S 2 is turned on, the first diode D 1, the second diode D 2, the third diode D 3, the fourth diode D 4, the fifth diode D 5, the first power switching tube S 1, the second power switching tube S 2 and the third power switching tube S 3 are turned off, a resonant circuit of D 6→S4→E→S2 is formed, and the negative voltage stored on the dielectric barrier discharge load is extracted and fed back to the dc voltage E.
In the power supply-resonant inductor-resonant capacitor series circuit, taking any positive half resonant circuit (power supply E, first resonant inductor L 1, first resonant capacitor C 1 circuit as an example), the mode 1 circuit constraint equation is:
The modal 2 circuit constraint equation is:
the modal 3 circuit constraint equation is:
wherein L s is leakage inductance of the transformer, u DBD is dielectric barrier discharge load voltage
It is clear that in case of dielectric barrier load parameters and transformer parameters determination, specific parameter values of the circuit can be found by equations (1) - (3).
As a preferred embodiment, the capacitance value of the first resonance capacitance (C1) is equal to the capacitance value of the second resonance capacitance (C2); the inductance value of the first resonant inductor (L1) is equal to the inductance value of the second resonant inductor (L2); the working frequency and the duty ratio of the first power switch tube (S1) and the second power switch tube (S2) are equal, and the duty ratio is not higher than 0.5; the working frequency and the duty ratio of the third power switch tube (S3) and the fourth power switch tube (S4) are equal, and the duty ratio is not higher than 0.5; the turn-off signal of the first power switch tube (S1) is identical to the turn-on signal time of the third power switch tube (S3), the turn-off signal of the second power switch tube (S2) is identical to the turn-on signal time of the fourth power switch tube (S4), the working frequency and the duty ratio of the fourth power switch tube (S4) are identical, and the sum of the duty ratio of the first power switch tube (S1), the duty ratio of the second power switch tube (S2), the duty ratio of the third power switch tube (S3) and the duty ratio of the fourth power switch tube (S4) is smaller than 1; the first diode (D1), the second diode (D2), the third diode (D3), the fourth diode (D4), the fifth diode (D5) and the sixth diode (D6) are all fast recovery diodes; the first power switch tube (S1), the second power switch tube (S2), the third power switch tube (S3) and the fourth power switch tube (S4) are NMOS, wherein the first ends of the first power switch tube (S1), the second power switch tube (S2), the third power switch tube (S3) and the fourth power switch tube (S4) are drains of the NMOS; the second ends of the first power switch tube (S1), the second power switch tube (S2), the third power switch tube (S3) and the fourth power switch tube (S4) are all NMOS sources; the working frequencies of the first power switch tube (S1), the second power switch tube (S2), the third power switch tube (S3) and the fourth power switch tube (S4) can be changed, and the output frequency of a power supply source is adjusted; the secondary side of the transformer can be connected with a plurality of different types of loads, such as an excimer lamp, an ozone generator and the like.
It should be noted that in this specification, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises an element.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present utility model. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the utility model. Thus, the present utility model is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (6)
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