CN221918225U - Supporting device and hot furnace - Google Patents

Abstract

The utility model discloses a support device and a hot furnace. The support device is arranged in a furnace body, and the support device includes at least two support members, the support members are extended along the length direction of the furnace body, and the two ends of the support members are respectively connected to the furnace mouth end and the furnace tail end of the furnace body, and an air intake structure is provided on the support member, and the air intake structure is used to transport process gas toward multiple positions inside the furnace body, and the support member is used to support the boat structure. The support device can realize uniform air intake in the hot furnace, avoid the phenomenon of inconsistent thickness of deposits on sheets at different positions of the hot furnace, reduce equipment control costs, and improve process efficiency.

Description

Support device and hot furnace

Technical Field

The utility model relates to the technical field of semiconductor manufacturing, in particular to a supporting device and a heating furnace.

Background Art

In the diffusion equipment and coating equipment of the semiconductor industry, various gases need to be introduced into the reactor to participate in chemical reactions to generate the required substances or films. In traditional plasma chemical vapor deposition equipment, the gas in the reactor is mainly introduced from the inlet pipe at the furnace mouth end, and then diffuses and flows to the silicon wafers in the boat in the furnace to enter the chemical reaction, and the tail gas is extracted at the tail end of the furnace. During the process, a certain thickness of material needs to be deposited on the silicon wafer to make the reaction qualified. The structural method of introducing gas from the furnace mouth end has the highest gas concentration at the entry point. After the gas enters the silicon wafer area, the gas concentration will continue to decrease due to the continuous reaction, so that the thickness of the deposit on the silicon wafer near the furnace mouth end is different from that on the silicon wafer near the furnace tail end. If the thickness of the deposit needs to be consistent, the control of the gas concentration and the time of introduction need to be very accurately adjusted, which increases the equipment cost and reduces the process efficiency.

Utility Model Content

The first purpose of the utility model is to provide a supporting device, which can achieve uniform air intake in the hot furnace, avoid the phenomenon of inconsistent thickness of deposits on sheets located at different positions in the furnace body, reduce equipment control costs, and improve process efficiency.

The second purpose of the utility model is to provide a hot furnace, the air intake of which is relatively uniform, so as to avoid the phenomenon of inconsistent thickness of deposits on sheets located at different positions in the furnace body, reduce equipment control costs and improve process efficiency.

In order to achieve the above technical effects, the technical solution of the utility model is as follows:

The utility model discloses a supporting device, which is arranged in a furnace body and comprises at least two supporting members, wherein the supporting members are extended along the length direction of the furnace body, and the two ends of the supporting members are respectively connected to the furnace mouth end and the furnace tail end of the furnace body, an air intake structure is provided on the supporting member, and the air intake structure is used for conveying process gas toward multiple positions inside the furnace body, and the supporting member is used for supporting a boat structure.

The beneficial effects of the support device of the utility model are as follows: in the actual working process, when the boat structure is placed on the support, since the air intake structure is used to transport process gas toward multiple positions inside the furnace body, the air flow can enter the furnace body from multiple positions in the length direction of the furnace body, thereby improving the air intake efficiency, which is beneficial to improving the process efficiency, and the air intake is more uniform, avoiding the phenomenon of inconsistent thickness of deposits on sheets located at different positions of the furnace body. There is no need to control the gas concentration and the time of introduction very accurately, thereby reducing the equipment control cost.

In some embodiments, an air flow channel is formed in the support member, and the air intake structure includes a plurality of air injection holes communicating with the air flow channel.

In some specific embodiments, the support member includes: a support rod, which is extended along the length direction of the furnace body, the air flow channel is formed in the support rod, and the air jet hole is arranged on the support rod and connected to the air flow channel; a support seat, wherein there are two support seats, the two support seats are respectively connected to the two ends of the support rod, and the two support seats are respectively installed at the furnace mouth end and the furnace tail end.

In some more specific embodiments, both ends of the air flow channel are closed, and both ends of the support rod are respectively provided with an air inlet connector and/or an air outlet connector connected to the air flow channel.

In some more specific embodiments, the support seat includes an arc-shaped connecting portion and a sleeve portion connected to each other, the arc-shaped connecting portion is connected to the inner side wall of the furnace mouth end or the furnace tail end, and the sleeve portion is sleeved on the support rod.

In some more specific embodiments, a locking hole is provided on the sleeve portion, and a locking member passes through the locking hole and abuts against the support rod to lock the support rod to the sleeve portion.

In some embodiments, the air intake structure includes an air intake pipe, which is extended along the length direction of the furnace body and connected to the support member, and the air intake pipe is provided with a plurality of air holes at intervals along the length direction thereof.

In some embodiments, there are two support members, and the air intake structure is disposed on one side of the two support members opposite to each other.

The utility model also discloses a hot furnace, comprising the supporting device, furnace body, furnace mouth flange and furnace tail flange mentioned above, wherein the furnace mouth flange and the furnace tail flange are connected to the furnace body, and the two ends of the supporting member of the supporting device are respectively connected to the furnace mouth flange and the furnace tail flange.

The beneficial effects of the hot furnace of the utility model are as follows: due to the supporting device described above, in the actual working process, when the boat structure is placed on the supporting member, since the air intake structure is used to transport the process gas toward multiple positions inside the furnace body, the air flow can enter the furnace body from multiple positions in the length direction of the furnace body, thereby improving the air intake efficiency, which is beneficial to improving the process efficiency, and the air intake is relatively uniform, avoiding the phenomenon of inconsistent thickness of deposits on sheets located at different positions of the furnace body, and there is no need to control the gas concentration and the time of introduction very accurately, thereby reducing the equipment control cost.

In some embodiments, the furnace mouth end and the furnace tail end of the furnace body are respectively provided with a furnace mouth flange and a furnace tail flange, and the support member includes a support rod and a support seat connected to both ends of the support rod, and the support seat and the furnace mouth flange or the furnace tail flange are an integrally formed part.

Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG1 is a schematic structural diagram of a heat furnace according to an embodiment of the present utility model;

FIG2 is a schematic diagram of the partial structure of the hot furnace at the furnace mouth end of the embodiment of the utility model;

3 is a schematic diagram of the structure of the hot furnace at the furnace mouth end of an embodiment of the utility model;

Fig. 4 is a cross-sectional view taken along the line A-A of Fig. 3 .

Reference numerals:

100, support member; 110, support rod; 111, air jet hole; 120, support seat; 121, arc-shaped connecting portion; 122, sleeve portion;

200, furnace body; 300, furnace mouth flange; 400, furnace tail flange;

500, air inlet connector; 600, air outlet connector; 700, boat structure.

DETAILED DESCRIPTION

In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved more clearly, the technical solutions of the present invention are further explained below with reference to the accompanying drawings and through specific implementation methods.

In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

In addition, features defined as "first" or "second" may explicitly or implicitly include one or more of the features, and are used to distinguish and describe features, without distinction of order or importance. In the description of the present utility model, unless otherwise specified, "plurality" means two or more.

In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

The specific structures of the supporting device and the heating furnace of the embodiment of the utility model are described below with reference to FIGS. 1 to 4 .

The utility model discloses a supporting device, as shown in Figures 1 and 4, the supporting device is arranged in a furnace body 200, and includes at least two supporting members 100, the supporting members 100 are extended along the length direction of the furnace body 200, and the two ends of the supporting members 100 are respectively connected to the furnace mouth end and the furnace tail end of the furnace body 200, and an air intake structure is provided on the supporting member 100, and the air intake structure is used to transport process gas toward multiple positions inside the furnace body 200, and the supporting member 100 is used to support the boat structure 700.

It can be understood that when the boat structure 700 is placed on the support 100, since the air intake structure is used to transport process gases toward multiple positions inside the furnace body 200, during the process, the air flow can enter the furnace body 200 from multiple positions in the length direction of the furnace body 200, thereby improving the air intake efficiency, which is beneficial to improving the process efficiency, and the air intake is more uniform, avoiding the phenomenon of inconsistent thickness of deposits on sheets located at different positions in the furnace body 200. There is no need to control the gas concentration and the time of introduction very accurately, thereby reducing the equipment control cost.

Specifically, an airflow channel is formed in the support member 100, and the air intake structure includes a plurality of air injection holes 111 connected to the airflow channel. It is understandable that during the process, the process gas enters the airflow channel and is sprayed from the plurality of air injection holes 111 to the inside of the furnace body 200, ensuring that the process gas in the furnace body 200 is distributed more evenly, which is conducive to improving the process yield. In addition, the air intake structure is directly formed on the support member 100, which simplifies the structure of the entire support device and reduces the manufacturing cost.

As shown in FIG2 , the support member 100 includes a support rod 110 and a support seat 120. The support rod 110 is extended along the length direction of the furnace body 200. An airflow channel is formed in the support rod 110. The air injection hole 111 is provided on the support rod 110 and communicates with the airflow channel. There are two support seats 120. The two support seats 120 are respectively connected to the two ends of the support rod 110, and the two support seats 120 are respectively installed at the furnace mouth end and the furnace tail end. It can be understood that the support rod 110, as the main structure of the air intake, can ensure the stable support of the boat structure 700 while ensuring the uniformity of the air intake. The support seat 120, as a supporting device of the support rod 110, can ensure that the support rod 110 is stably installed in the hot furnace.

Optionally, both ends of the air flow channel are closed, and both ends of the support rod 110 are respectively provided with an air inlet connector 500 and/or an air outlet connector 600 connected to the air flow channel. It is understandable that the closed arrangement of both ends of the support rod 110 can avoid gas leakage during the air intake or exhaust process, the air inlet connector 500 facilitates the connection between the support rod 110 and the external gas source, simplifies the assembly, and the air outlet connector 600 facilitates the connection between the support rod 110 and the air pump, simplifies the assembly. In addition, since the length of the furnace body 200 is usually long, the length of the support rod 110 is also correspondingly long. During the air intake process, the gas enters the air flow channel and diffuses relatively slowly. It may happen that the gas near the furnace mouth end of the air flow channel has already been sprayed into the furnace body 200, while the gas still flows to the end of the air flow channel near the furnace tail end. The additional air outlet connector 600, when the air pump connected to the air outlet connector 600 is turned on during the air intake process, increases the flow rate of the gas in the air flow channel and makes the gas more evenly distributed in the air flow channel, which is beneficial to improving the air intake efficiency and air intake uniformity.

As shown in FIG2 , the support seat 120 includes an arc-shaped connecting portion 121 and a sleeve portion 122 connected to each other, the arc-shaped connecting portion 121 is connected to the inner side wall of the furnace mouth end or the furnace tail end, and the sleeve portion 122 is sleeved on the support rod 110. It can be understood that the connection between the support rod 110 and the support seat 120 is realized in the form of sleeve connection, which is convenient for installation. The furnace mouth end and the furnace tail end of the furnace body 200 are usually provided with a furnace mouth flange 300 and a furnace tail flange 400. The inner side walls of the furnace mouth flange 300 and the furnace tail flange 400 are usually circumferential surfaces, and the arc-shaped connecting portion 121 is convenient for connection with the furnace mouth flange 300 and the furnace tail flange 400.

Optionally, a locking hole is provided on the sleeve portion 122, and a locking member passes through the locking hole and abuts against the support rod 110 to lock the support rod 110 to the sleeve portion 122. It is understandable that in the actual working process, after the support rod 110 passes through the sleeve portion 122, the locking member passes through the locking hole and abuts against the support rod 110, so as to prevent the support rod 110 from rotating relative to the support seat 120, thereby ensuring the stability of the support rod 110, thereby ensuring that the process gas can be sprayed into the furnace body 200 along a determined direction during the process.

In some alternative embodiments, the air intake structure includes an air intake pipe (not shown), which is extended along the length direction of the furnace body 200 and connected to the support 100, and the air intake pipe is provided with a plurality of vents at intervals along the length direction thereof. It is understandable that, in the actual working process, when the boat structure 700 is placed on the support 100, during the process, the air flow can be sprayed into the furnace body 200 through the plurality of vents. Compared with the air intake structure being formed on the support 100, the air intake pipe is provided as the air intake structure, and the support 100 is a solid component, which can improve the strength of the support 100 and is conducive to improving the stability of the boat structure 700. In addition, the diameter of the air intake pipe can be selected according to the process requirements. Compared with the air intake structure being formed on the support 100 with a fixed diameter of the air flow channel, the use of the air intake pipe as the air intake structure has better compatibility.

As shown in FIG2 , there are two support members 100, and the air intake structure is disposed on the opposite side of the two support members 100. It can be understood that the two support members 100 can stably support the boat structure 700, and the air injection holes 111 are disposed opposite to each other, which is conducive to uniform diffusion of the air intake inside the furnace body 200, thereby avoiding the phenomenon of inconsistent thickness of the deposits on the sheets at different positions in the furnace body 200.

The utility model also discloses a heat furnace, as shown in FIG1 and FIG4, the heat furnace comprises the aforementioned support device, furnace body 200, furnace mouth flange 300 and furnace tail flange 400, the furnace mouth flange 300 and furnace tail flange 400 are connected to the furnace body 200, and the two ends of the support member 100 of the support device are respectively connected to the furnace mouth flange 300 and the furnace tail flange 400. Due to the aforementioned support device, in the actual working process, when the boat structure 700 is placed on the support member 100, since the air intake structure is used to transport process gas toward multiple positions inside the furnace body 200, the air flow can enter the furnace body 200 from multiple positions in the length direction of the furnace body 200, thereby improving the air intake efficiency, which is conducive to improving the process efficiency, and the air intake is relatively uniform, avoiding the phenomenon of inconsistent thickness of the deposits on the sheets at different positions in the furnace body 200, and there is no need to control the gas concentration and the time of introduction very accurately, thereby reducing the equipment control cost.

As shown in FIG2 , the furnace mouth end and the furnace tail end of the furnace body 200 are respectively provided with a furnace mouth flange 300 and a furnace tail flange 400, and the support member 100 includes a support rod 110 and a support seat 120 connected to both ends of the support rod 110, and the support seat 120 is an integrally formed member with the furnace mouth flange 300 or the furnace tail flange 400. It can be understood that the support seat 120 as a supporting structure of the support rod 110 can ensure that the support rod 110 is stably installed in the furnace body 200. The support seat 120 is an integrally formed member with the furnace mouth flange 300 or the furnace tail flange 400, and there is no need to use fasteners such as connecting bolts to connect the support member 100 to the furnace mouth flange 300 or the furnace tail flange 400, which can simplify the structure, reduce manufacturing costs, and facilitate assembly.

In the description of this specification, the description with reference to the terms "some embodiments", "other embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

The above contents are only preferred embodiments of the present invention. For ordinary technicians in this field, according to the concept of the present invention, there may be changes in the specific implementation method and application scope. The content of this specification should not be understood as limiting the present invention.

Claims (10)

1. A support device, which is arranged in a furnace body, characterized in that it includes at least two support members, the support members are extended along the length direction of the furnace body, and the two ends of the support members are respectively connected to the furnace mouth end and the furnace tail end of the furnace body, and an air intake structure is provided on the support member, and the air intake structure is used to transport process gas toward multiple positions inside the furnace body, and the support member is used to support a boat structure. 2 . The support device according to claim 1 , wherein an air flow channel is formed in the support member, and the air intake structure comprises a plurality of air injection holes connected to the air flow channel. 3. The supporting device according to claim 2, characterized in that the supporting member comprises: A support rod, the support rod is extended along the length direction of the furnace body, the air flow channel is formed in the support rod, and the air injection hole is arranged on the support rod and communicated with the air flow channel; Support seats, there are two support seats, the two support seats are respectively connected to the two ends of the support rod, and the two support seats are respectively installed at the furnace mouth end and the furnace tail end. 4. The support device according to claim 3 is characterized in that both ends of the air flow channel are closed, and both ends of the support rod are respectively provided with an air inlet connector and/or an air outlet connector connected to the air flow channel. 5. The supporting device according to claim 3 is characterized in that the supporting seat comprises an arc-shaped connecting portion and a sleeve portion connected to each other, the arc-shaped connecting portion is connected to the inner side wall of the furnace mouth end or the furnace tail end, and the sleeve portion is sleeved on the supporting rod. 6. The support device according to claim 5, characterized in that a locking hole is provided on the sleeve portion, and a locking member passes through the locking hole and abuts against the support rod to lock the support rod to the sleeve portion. 7. The supporting device according to claim 1 is characterized in that the air intake structure comprises an air intake pipe, the air intake pipe is extended along the length direction of the furnace body and is connected to the supporting member, and the air intake pipe has a plurality of air vents spaced apart along the length direction thereof. 8. The supporting device according to claim 1, characterized in that there are two supporting members, and the air intake structure is arranged on one side of the two supporting members opposite to each other. 9. A hot furnace, characterized in that it comprises a supporting device, a furnace body, a furnace mouth flange and a furnace tail flange as described in any one of claims 1 to 8, wherein the furnace mouth flange and the furnace tail flange are connected to the furnace body, and both ends of the supporting member of the supporting device are respectively connected to the furnace mouth flange and the furnace tail flange. 10. The hot furnace according to claim 9, characterized in that the support member comprises a support rod and a support seat connected to both ends of the support rod, and the support seat and the furnace mouth flange or the furnace tail flange are an integrally formed part.