CN221894636U - Special tracheal filling device - Google Patents

Abstract

The application relates to a special air pipe filling device. Comprises a base, a lifting mechanism and a transmission mechanism. The lifting mechanism is arranged on the base; the transmission mechanism comprises a plurality of transmission mechanisms, each transmission mechanism is connected to the lifting mechanism, the lifting mechanism is used for driving each transmission mechanism to lift along the first direction, the transmission mechanism is used for placing the special air pipe and transmitting the special air pipe along the second direction, and the first direction is intersected with the second direction. The lifting mechanism can drive each conveying mechanism to perform lifting motion along the first direction so as to achieve filling pipe positions with different heights. When each conveying mechanism rises to the height of the quartz tube positions, each conveying mechanism can convey the special gas tubes along the second direction, namely the direction towards the filling tube positions, so that the plurality of special gas tubes are conveyed into the quartz tubes. The filling height of a plurality of special air pipes can be flexibly adjusted, so that the plurality of special air pipes can be conveniently and simultaneously butted with the quartz tube positions, and collision damage caused by inaccurate butting of the special air pipes and the quartz tube positions is reduced.

Description

Special tracheal filling device

Technical Field

The present application relates to the technical field of special gas tube transportation, and in particular to a special gas tube filling device.

Background Art

At present, in the production technology of crystalline silicon solar cells, a low-pressure chemical vapor deposition process is usually carried out. In the process, special gases need to be introduced through special gas pipes in a specific high-temperature and low-pressure environment. In the equipment for daily silicon wafer production, it is necessary to replace the special gas pipes in the quartz tube position within a fixed period. Since the special gas pipes are long and the filling position of the special gas pipes is high, it is difficult to connect the special gas pipes and the quartz tube positions, and it is difficult to load multiple special gas pipes at the same time. It is easy to cause the special gas pipes to collide during replacement, affecting the air tightness of the special gas pipes, and easily damaging the structure of the quartz tube.

Utility Model Content

Based on this, it is necessary to provide a special gas tube filling device to address the problems that the special gas tube is long and the loading position of the special gas tube is high, it is difficult to connect the special gas tube and the quartz tube, it is difficult to load multiple special gas tubes at the same time, it is easy to cause the special gas tube to collide during replacement, affecting the air tightness and easily damaging the quartz tube structure.

A special air tube filling device, comprising:

Base;

A lifting mechanism is disposed on the base; and

The transmission mechanism includes multiple transmission mechanisms, each of which is connected to the lifting mechanism, and the lifting mechanism is used to drive the transmission mechanism to rise and fall along a first direction. The transmission mechanism is used to place special gas tubes and transmit the special gas tubes along a second direction, wherein the first direction intersects with the second direction.

In one embodiment, the transmission mechanism includes a carrier frame, a power component and a transmission assembly driven to rotate by the power component, the carrier frame is connected to the lifting mechanism, the transmission assembly is rotatably connected to the carrier frame, and the transmission assembly is used to transmit the special air tube along the second direction.

In one embodiment, the transmission assembly includes a first transmission shaft, a second transmission shaft and a belt. The first transmission shaft and the second transmission shaft are connected to the carrier frame in a manner that they rotate at intervals along the second direction. The belt is wound around the first transmission shaft and the second transmission shaft. The power component drives the first transmission shaft or the second transmission shaft to rotate around its own axis.

In one embodiment, the supporting frame includes two connected side walls and a bottom wall, the bottom wall is connected between the two side walls to form a groove, the first transmission shaft, the second transmission shaft and the belt are all located in the groove, and the first transmission shaft and the second transmission shaft are both rotatably connected to the two side walls.

In one embodiment, the lifting mechanism includes a supporting component and a driving assembly, the supporting component is connected to the base, the driving assembly is connected to the supporting component, the driving assembly is connected to a plurality of the transmission mechanisms, and the driving assembly is used to drive the transmission mechanisms to perform lifting and lowering movements along the first direction.

In one embodiment, the driving assembly includes a lifting motor, a screw rod and a first slide, the screw rod is connected to the supporting component, the screw rod is connected to the output shaft of the lifting motor, the first slide is transmission-connected to the screw rod, and the slide is connected to a plurality of the transmission mechanisms.

In one embodiment, the first slide comprises a plurality of first slides, and each of the transmission mechanisms is connected to at least one of the first slides.

In one embodiment, the lifting mechanism further includes a guide assembly, which is connected to the supporting component and the plurality of transmission mechanisms at the same time, and the driving assembly is used to drive the plurality of transmission mechanisms to perform lifting and lowering movements along the guide assembly.

In one embodiment, the guide assembly includes a sliding rail and a second sliding platform that are slidably connected, the sliding rail is connected to the supporting component, and the second sliding platform is connected to the plurality of transmission mechanisms.

In one of the embodiments, the special gas tube loading device also includes a moving mechanism, and the moving mechanism is arranged at the bottom of the base.

The above-mentioned special gas tube loading device includes a base, a lifting mechanism and a plurality of transmission mechanisms. The lifting mechanism can drive each transmission mechanism to perform lifting movement along a first direction to reach loading positions at different heights. When each transmission mechanism rises to the height where a plurality of quartz tube positions are located, each transmission mechanism can transport the special gas tube along a second direction, i.e., in the direction toward the loading position, thereby transferring a plurality of special gas tubes into the quartz tube. Thus, through the lifting mechanism and a plurality of transmission mechanisms, the loading height of a plurality of special gas tubes can be flexibly adjusted, so that a plurality of special gas tubes can be docked with the quartz tube positions at the same time, and a plurality of special gas tubes can be loaded at the same time, thereby reducing collision damage caused by inaccurate docking of the special gas tubes and the quartz tube positions.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG1 is a schematic diagram of a usage scenario of a special airway filling device provided in an embodiment of the present application.

FIG2 is a schematic structural diagram of a special air tube filling device provided in an embodiment of the present application.

Explanation of the reference numerals: 100, special gas tube filling device; 1, base; 2, lifting mechanism; 21, supporting component; 22, driving assembly; 221, lifting motor; 222, screw rod; 223, first slide; 23, guide assembly; 231, slide rail; 232, second slide; 3, transmission mechanism; 31, carrier frame; 311, side wall; 312, bottom wall; 313, groove; 32, transmission motor; 331, belt; 4, moving mechanism; 5, control cabinet.

DETAILED DESCRIPTION

In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

At present, in the production technology of crystalline silicon solar cells, a low-pressure chemical vapor deposition process is usually carried out. In the process, special gases need to be introduced through special gas pipes in a specific high-temperature and low-pressure environment. In the equipment for daily silicon wafer production, it is necessary to replace the special gas pipes in the quartz tube position within a fixed period. Since the special gas pipes are long and the filling position of the special gas pipes is high, it is difficult to connect the special gas pipes and the quartz tube positions, and it is difficult to load multiple special gas pipes at the same time. It is easy to cause the special gas pipes to collide during replacement, affecting the air tightness of the special gas pipes, and easily damaging the structure of the quartz tube.

Please refer to Figure 1, which is a schematic diagram of a use scenario of a special gas tube filling device provided in an embodiment of the present application. A special gas tube filling device 100 provided in an embodiment of the present application can be used in pairs, that is, two special gas tube filling devices 100 can simultaneously fill special gas tubes into quartz tubes on both sides, which can improve the filling efficiency.

Please refer to Figure 2, which is a schematic diagram of the structure of a special gas tube loading device provided in an embodiment of the present application. The special gas tube loading device 100 includes a base 1, a lifting mechanism 2 and a transmission mechanism 3. The lifting mechanism 2 is arranged on the base 1, and the transmission mechanism 3 includes multiple transmission mechanisms, each of which is connected to the lifting mechanism 2. The lifting mechanism 2 is used to drive each transmission mechanism 3 to lift and lower along a first direction (the A-A direction as shown in Figure 2). The transmission mechanism 3 is used to place the special gas tube and transmit the special gas tube along a second direction (the B-B direction as shown in Figure 2), wherein the first direction intersects with the second direction. By setting up the lifting mechanism 2, multiple transmission mechanisms 3 can be respectively raised to quartz tube positions at different heights, so that each transmission mechanism 3 is aligned with the quartz tube position at the corresponding height, and then each transmission mechanism 3 transmits the special gas tube in the direction of the quartz tube position, so that the special gas tube can be transmitted to the quartz tube position, thereby achieving precise docking of multiple special gas tubes with the quartz tube position, and multiple special gas tubes can be loaded at the same time, reducing collisions during the loading process of multiple special gas tubes, and protecting the structure of the special gas tube and the quartz tube position.

Referring to Fig. 2, in some embodiments, the special gas tube loading device 100 further includes a moving mechanism 4, which is disposed at the bottom of the base 1 and can be located at the four corners of the base 1. The moving mechanism 4 can be a universal wheel assembly or a fixed wheel assembly, etc. The moving mechanism 4 can facilitate the movement of the base 1.

Please refer to Figure 1. Furthermore, the special gas tube loading device 100 of the embodiment of the present application also includes a control cabinet 5, which is electrically connected to the lifting mechanism 2, the transmission mechanism 3 and the moving mechanism 4. It can control the movement of the lifting mechanism 2 along the first direction (the A-A direction as shown in Figure 2), and control the movement of the transmission mechanism 3 along the second direction (the B-B direction as shown in Figure 2), and control the movement of the moving mechanism 4, so that the lifting and transportation of the special gas tube is more accurate, reducing the damage to the special gas tube caused by collision.

Please refer to FIG. 2 . In some embodiments, the lifting mechanism 2 includes a support component 21 and a drive assembly 22. The support component 21 is connected to the base 1, and the drive assembly 22 is connected to the support component 21. The support component 21 is used to support the drive assembly 22. The support component 21 extends along a first direction (the A-A direction as shown in FIG. 2 ) to form a plate shape to improve the support stability of the drive assembly 22 and the transmission mechanism 3. The drive assembly 22 is connected to a plurality of transmission mechanisms 3, and the drive assembly 22 is used to drive the transmission mechanism 3 to perform lifting motion along the first direction (the A-A direction as shown in FIG. 2 ). The drive assembly 22 can be driven by a motor screw assembly, or can be driven by a motor synchronous belt synchronous pulley assembly, etc.

Please refer to FIG. 2. When a motor screw assembly is used for driving, in some embodiments, the driving assembly 22 includes a lifting motor 221, a screw 222 and a first slide 223. The lifting motor 221 is connected to the support component 21, the screw 222 is connected to the output shaft of the lifting motor 221, the first slide 223 is connected to the screw 222 in a transmission connection, and the first slide 223 is connected to a plurality of transmission mechanisms 3. The output shaft of the lifting motor 221 drives the screw 222 to rotate, and the screw 222 is connected to the first slide 223 in a transmission connection, so that the rotational motion of the screw 222 is converted into the linear motion of the first slide 223, so that the first slide 223 can perform lifting motion along the first direction (the A-A direction as shown in FIG. 2). The screw 222 and the first slide 223 are used to drive the lifting of the transmission mechanism 3, and the transmission efficiency is high, and it has high rigidity and stability, can withstand large radial and axial loads, and maintain the stability of lifting.

Specifically, along the first direction (the A-A direction as shown in FIG. 2 ), the bottom end of the screw rod 222 is rotatably connected to the support component 21, and the top end of the screw rod 222 is connected to the lifting motor 221, and the output shaft of the lifting motor 221 can be connected to the top end of the screw rod 222 through a first coupling. There can be one or more first slides 223. When there is one first slide 223, the transmission mechanism 3 is arranged on the first slide 223 at intervals along the first direction (the A-A direction as shown in FIG. 2 ). When there are multiple first slides 223, each transmission mechanism 3 is connected to at least one first slide 223. In other words, multiple first slides 223 can be connected to each transmission mechanism 3 one by one, or one transmission mechanism 3 can be connected to two or three or more first slides 223 at the same time. The latter is preferred, which can improve the flexibility and support stability of each transmission mechanism 3 in performing lifting and lowering movements.

Further, the screw rod 222 is a screw rod, and there are spiral grooves matching each other and balls rolling between the spiral grooves between the outer surface of the screw rod 222 and the inner surface of the first slide 223, and the balls provide contact between the screw rod 222 and the first slide 223. When the screw rod 222 rotates relative to the first slide 223, the balls roll along the spiral grooves, pushing the first slide 223 to rise and fall along the axial direction of the screw rod, that is, along the first direction (A-A direction as shown in Figure 2). Further, the screw rod 222 and the first slide 223 can also form a sliding screw rod.

Please refer to Fig. 2. Further, in some embodiments, the lifting mechanism 2 further includes a guide assembly 23, which is connected to the support component 21 and the plurality of transmission mechanisms 3 at the same time, and the driving assembly 22 is used to drive the plurality of transmission mechanisms 3 to perform lifting motion along the guide assembly 23. The addition of the guide assembly 23 can reduce the shaking of the driving assembly 22 and maintain the smooth operation of the driving assembly 22.

In an optional embodiment, the guide assembly 23 includes a slide bar, which extends along a first direction (A-A direction as shown in FIG2) and is connected to the support member 21 at both ends, and the first slide 223 is provided with a slide groove, and the first slide 223 is slidably connected to the slide bar through the slide groove. Thus, the first slide 223 can simultaneously perform lifting motion relative to the screw rod 222 and the slide bar. In another optional embodiment, the guide assembly 23 includes a sliding rail 231 and a second slide 232 that are slidably connected, the slide rail 231 is connected to the support member 21, and the second slide 232 is connected to a plurality of transmission mechanisms 3. Thus, the transmission mechanism 3, driven by the first slide 223, can perform lifting motion relative to the slide rail 231 through the second slide 232.

Further, the second slide 232 may be one or more. When there is one second slide 232, the transmission mechanism 3 is arranged on the second slide 232 at intervals along the first direction (the A-A direction as shown in FIG2 ). When there are multiple second slides 232, each transmission mechanism 3 is connected to at least one second slide 232. In other words, multiple second slides 232 can be connected to multiple transmission mechanisms 3 one by one, or one transmission mechanism 3 is connected to two or three equal numbers of second slides 232. The latter is preferred, which can improve the flexibility and support stability of each transmission mechanism 3 in lifting and lowering along the first direction (the A-A direction as shown in FIG2 ).

Please refer to Figure 2. In some embodiments, the transmission mechanism 3 includes a carrier 31, a power component, and a transmission assembly driven to rotate by the power component. The carrier 31 is connected to the lifting mechanism 2, and the transmission assembly is rotatably connected to the carrier 31. The transmission assembly is used to transmit the special gas tube along the second direction (B-B direction as shown in Figure 2). The transmission assembly can be transmitted by a belt assembly or by a roller assembly. Specifically, in some embodiments, the carrier 31 is connected to the first slide 223 and the second slide 232 of the lifting mechanism 2.

In some embodiments, the transmission assembly includes a first transmission shaft, a second transmission shaft and a belt 331. The first transmission shaft and the second transmission shaft are connected to the carrier 31 in a rotational manner along a second direction (B-B direction as shown in FIG. 2). The belt 331 is wound around the first transmission shaft and the second transmission shaft. The power component drives the first transmission shaft or the second transmission shaft to rotate around its own axis. The transmission is performed through the belt 331. The belt 331 can absorb and alleviate the impact and vibration in the transmission assembly, reduce the noise and vibration during the transmission process, and reduce the damage to the special air pipe during the transmission process.

Specifically, the power component is a transmission motor 32, and the housing of the transmission motor 32 is fixed to the outside of the carrier 31 by fasteners such as screws. The carrier 31 is provided with a first mounting hole and a second mounting hole. The output shaft of the transmission motor 32 is fixedly connected to one side of the second coupling after passing through the first mounting hole, and the other side of the second coupling is fixedly connected to one end of the first transmission shaft or the second transmission shaft. Taking the fixed connection of the second coupling with one end of the first transmission shaft as an example, the other end of the first transmission shaft is rotatably connected to the second mounting hole through a bearing. The other end of the carrier 31 along the second direction (B-B direction as shown in Figure 2) is also provided with a third mounting hole and a fourth mounting hole, and the two ends of the second transmission shaft are rotatably connected to the third mounting hole and the fourth mounting hole respectively through bearings. Optionally, the first transmission shaft can also be a power shaft, one end of which can be directly connected to the output shaft of the transmission motor 32.

In some optional embodiments, the transmission assembly may be located above the carrier 31 or inside the carrier 31, preferably the latter, which can play a certain limiting role on the special gas tube. In some embodiments, the carrier 31 includes two connected side walls 311 and a bottom wall 312, the bottom wall 312 is connected between the two side walls 311 to form a groove 313, the first transmission shaft, the second transmission shaft and the belt 331 are all located in the groove 313, and the first transmission shaft and the second transmission shaft are both rotatably connected to the two side walls 311. As a result, the special gas tube can also be located in the groove 313, which can protect the special gas tube from falling during transportation or preventing it from shifting to cause misalignment.

Furthermore, the support frame 31 may be made of a smooth and high temperature resistant material, for example, PEEK (Polyetheretherketone) or PAI (Polyamide-imide).

Furthermore, along the second direction (the B-B direction as shown in FIG2 ), the length of the transmission mechanism 3 is greater than the length of the lifting mechanism 2, thereby reducing the overall volume of the special gas tube filling device 100, and also facilitating the transmission mechanism 3 to dock with the quartz tube position, thereby preventing the lifting mechanism 2 from interfering with the filling of the special gas tube.

In summary, the special gas tube loading device 100 provided in the embodiment of the present application has at least the following technical effects: First, the loading height of the special gas tube can be flexibly adjusted through the lifting mechanism 2, which is suitable for quartz tube positions with different loading heights. Second, the alignment and transmission between the special gas tube and the quartz tube position can be achieved through the transmission mechanism 3, and the special gas tube can be transmitted to the quartz tube position without obstacles, avoiding collision damage to the special gas tube. Third, since the transmission mechanism 3 includes multiple, it is possible to load multiple special gas tubes at the same time, thereby improving the loading efficiency.

In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims (10)

1. A special gas tube filling device (100), characterized by comprising:

A base (1);

the lifting mechanism (2) is arranged on the base (1); and

The conveying mechanisms (3) comprise a plurality of conveying mechanisms (3), each conveying mechanism (3) is connected to the lifting mechanism (2), the lifting mechanism (2) is used for driving each conveying mechanism (3) to lift along a first direction, the conveying mechanisms (3) are used for placing special air pipes and conveying the special air pipes along a second direction, and the first direction is intersected with the second direction.

2. The tertiary air duct filling device (100) according to claim 1, wherein the transmission mechanism (3) comprises a carrier (31), a power component and a transmission assembly driven to rotate by the power component, the carrier (31) being connected to the lifting mechanism (2), the transmission assembly being rotatably connected to the carrier (31), the transmission assembly being for transmitting the tertiary air duct in the second direction.

3. The tertiary air duct filling device (100) according to claim 2, wherein the transmission assembly comprises a first transmission shaft, a second transmission shaft and a belt (331), the first transmission shaft and the second transmission shaft are rotatably connected to the bearing frame (31) at intervals along the second direction, the belt (331) is wound around the first transmission shaft and the second transmission shaft, and the power component drives the first transmission shaft or the second transmission shaft to rotate around the own axis.

4. A tertiary air filling device (100) according to claim 3, characterized in that the carrier (31) comprises two side walls (311) and a bottom wall (312) connected, the bottom wall (312) is connected between the two side walls (311) to form a groove (313), the first drive shaft, the second drive shaft and the belt (331) are all located in the groove (313), and the first drive shaft and the second drive shaft are both rotatably connected to the two side walls (311).

5. The tertiary air pipe filling device (100) according to claim 1, wherein the lifting mechanism (2) comprises a supporting component (21) and a driving assembly (22), the supporting component (21) is connected with the base (1), the driving assembly (22) is connected with the supporting component (21), the driving assembly (22) is connected with a plurality of conveying mechanisms (3), and the driving assembly (22) is used for driving the conveying mechanisms (3) to perform lifting motion along the first direction.

6. The tertiary air pipe filling device (100) according to claim 5, wherein the driving assembly (22) comprises a lifting motor (221), a screw rod (222) and a first sliding table (223), the screw rod (222) is connected with the supporting component (21), the screw rod (222) is connected with an output shaft of the lifting motor (221), the first sliding table (223) is in transmission connection with the screw rod (222), and the sliding table is connected with a plurality of transmission mechanisms (3).

7. The tertiary air filling device (100) according to claim 6, wherein the first sliding table (223) comprises a plurality of, each of the conveying mechanisms (3) being connected to at least one of the first sliding tables (223).

8. The tertiary air filling device (100) according to claim 5, wherein the lifting mechanism (2) further comprises a guiding assembly (23), the guiding assembly (23) is simultaneously connected with the supporting component (21) and the plurality of conveying mechanisms (3), and the driving assembly (22) is used for driving the plurality of conveying mechanisms (3) to perform lifting motion along the guiding assembly (23).

9. The tertiary air duct filling device (100) according to claim 8, characterized in that the guide assembly (23) comprises a sliding rail (231) and a second sliding table (232) which are slidingly connected, the sliding rail (231) being connected with the support member (21), the second sliding table (232) being connected with a plurality of the conveying mechanisms (3).

10. The turbo charging device (100) according to any one of claims 1 to 9, wherein the turbo charging device (100) further comprises a moving mechanism (4), the moving mechanism (4) being provided at the bottom of the base (1).