CN221877247U - Silicon crystal preparation system - Google Patents
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- CN221877247U CN221877247U CN202323359626.5U CN202323359626U CN221877247U CN 221877247 U CN221877247 U CN 221877247U CN 202323359626 U CN202323359626 U CN 202323359626U CN 221877247 U CN221877247 U CN 221877247U
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- 239000013078 crystal Substances 0.000 title claims 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims 13
- 238000002360 preparation method Methods 0.000 title claims 13
- 229910052710 silicon Inorganic materials 0.000 title claims 13
- 239000010703 silicon Substances 0.000 title claims 13
- 238000010438 heat treatment Methods 0.000 claims 12
- 238000007789 sealing Methods 0.000 claims 5
- 239000002826 coolant Substances 0.000 claims 4
- 230000000712 assembly Effects 0.000 claims 3
- 238000000429 assembly Methods 0.000 claims 3
- 230000001681 protective effect Effects 0.000 claims 3
- 238000001816 cooling Methods 0.000 claims 2
- 238000002309 gasification Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 239000011819 refractory material Substances 0.000 claims 2
- 238000000926 separation method Methods 0.000 claims 2
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Abstract
Description
技术领域Technical Field
本实用新型涉及硅晶体制备技术领域,尤其涉及一种硅晶体制备系统。The utility model relates to the technical field of silicon crystal preparation, in particular to a silicon crystal preparation system.
背景技术Background Art
现有硅晶体冶炼技术是通过将硅晶体加热到熔融状态,然后将熔融状态液体表面上的杂质去除后进行冷却加工,从而得到所需浓度的硅晶体材料。The existing silicon crystal smelting technology is to heat the silicon crystal to a molten state, remove impurities on the surface of the molten liquid, and then cool it to obtain silicon crystal material of the desired concentration.
但是,常规情况下的硅晶体制备方式是采用化石燃料燃烧来提供热源,而化石燃料燃烧过程中因需要空气和氧气的补给,必然产生大量的烟尘和氮氧化物NOX,燃料本身也因为成分不同会产生SO2、CO2等多种废气,而且采用化石燃料提供热源,热效率不高,仅35%-40%左右,消耗的资源较大。因此,现有硅晶体冶炼技术不仅容易造成资源的极大浪费,还会产生大量的燃料废渣。However, the conventional method of preparing silicon crystals is to use fossil fuel combustion to provide heat source. During the combustion of fossil fuels, air and oxygen are required, which will inevitably produce a large amount of smoke and nitrogen oxides NOx . The fuel itself will also produce various waste gases such as SO2 and CO2 due to different components. In addition, the use of fossil fuels to provide heat source has a low thermal efficiency of only about 35%-40%, and consumes a large amount of resources. Therefore, the existing silicon crystal smelting technology is not only prone to cause a great waste of resources, but also produces a large amount of fuel waste residue.
实用新型内容Utility Model Content
本实用新型的目的是至少解决现有的硅晶体制备存在的资源利用效果差,且容易造成大量燃料废渣的问题。该目的是通过以下技术方案实现的:The purpose of the utility model is to at least solve the problem that the existing silicon crystal preparation has poor resource utilization effect and easily produces a large amount of fuel waste residue. This purpose is achieved through the following technical solutions:
本实用新型提出了一种硅晶体制备系统,包括气化炉、冷凝装置、管路和进气装置;所述气化炉包括:The utility model proposes a silicon crystal preparation system, including a gasification furnace, a condensing device, a pipeline and an air intake device; the gasification furnace includes:
炉体,所述炉体具有进料口以及沿第一直线设置的加热通道,所述进料口与所述加热通道连通,且所述进料口设置在所述加热通道的上方;A furnace body, the furnace body having a feed inlet and a heating channel arranged along a first straight line, the feed inlet being communicated with the heating channel, and the feed inlet being arranged above the heating channel;
等离子体发生组件,所述等离子体发生组件包括第一电极棒和第二电极棒,所述第一电极棒具有第一工作端,所述第二电极棒具有第二工作端,所述第一工作端和所述第二工作端设置在所述加热通道的内部,且位于所述加热通道的输入端和所述进料口之间,所述第一工作端和所述第二工作端之间能够保持放电距离;A plasma generating assembly, the plasma generating assembly comprising a first electrode rod and a second electrode rod, the first electrode rod having a first working end, the second electrode rod having a second working end, the first working end and the second working end being arranged inside the heating channel and between the input end of the heating channel and the feed port, and a discharge distance being able to be maintained between the first working end and the second working end;
所述冷凝装置连通设置在所述加热通道的输出端,所述冷凝装置用于冷却所述气化炉输出的混合气体并输出柱状晶体;The condensing device is connected to the output end of the heating channel, and the condensing device is used to cool the mixed gas output from the gasification furnace and output columnar crystals;
所述进气装置的输入端通过所述管路与所述冷凝装置连通,所述进气装置的输出端与所述加热通道的输入端连通,所述进气装置用于向所述加热通道输送工作气体。The input end of the air intake device is connected to the condensing device through the pipeline, and the output end of the air intake device is connected to the input end of the heating channel. The air intake device is used to transport working gas to the heating channel.
本实用新型提出的硅晶体制备系统,包括管路、冷凝装置、进气装置和气化炉。通过在气化炉的炉体上设置包括第一电极棒和第二电极棒的等离子体发生组件,并通过向第一电极棒和第二电极棒输入直流电,可使得第一电极棒和第二电极棒之间的气体转变成等离子态,且此时,成为等离子态的气体能够与从进气装置通入的工作气体混合并形成高温气体,该高温气体能够对进料口输入的物料进行气化分解,并最终输入至冷凝装置中生成得高纯度的晶体材料。其中,等离子体发生组件和进气装置配合产生的高温气体,能够代替化石燃料燃烧产生的热源,有助于实现气化过程中二氧化碳及其他废气的零排放,减少对环境的污染,还使得该硅晶体制备系统具有良好的热转化效率,有助于提高资源的利用效果。The silicon crystal preparation system proposed in the utility model includes a pipeline, a condensing device, an air intake device and a gasification furnace. By arranging a plasma generating assembly including a first electrode rod and a second electrode rod on the furnace body of the gasification furnace, and by inputting direct current into the first electrode rod and the second electrode rod, the gas between the first electrode rod and the second electrode rod can be transformed into a plasma state, and at this time, the gas in the plasma state can be mixed with the working gas introduced from the air intake device to form a high-temperature gas, and the high-temperature gas can gasify and decompose the material input from the feed port, and finally input into the condensing device to generate a high-purity crystal material. Among them, the high-temperature gas generated by the cooperation of the plasma generating assembly and the air intake device can replace the heat source generated by the combustion of fossil fuels, which helps to achieve zero emission of carbon dioxide and other waste gases in the gasification process, reduce pollution to the environment, and also make the silicon crystal preparation system have good thermal conversion efficiency, which helps to improve the utilization effect of resources.
同时,通过采用高温气体对进料口输入的物料进行气化分解,并利用冷凝装置生成柱状晶体,有助于提高硅晶体的生产效率,并提升产品的质量。此外,通过设置管路将冷凝器输出的气体配送回气化炉,有助于实现工作气体的循环利用,降低能源消耗和碳排放,对工业生产过程中达到碳中和目标具有显著意义。At the same time, by using high-temperature gas to gasify and decompose the materials input from the feed port, and using the condensation device to generate columnar crystals, it helps to improve the production efficiency of silicon crystals and improve the quality of products. In addition, by setting up a pipeline to distribute the gas output from the condenser back to the gasifier, it helps to achieve the recycling of working gas, reduce energy consumption and carbon emissions, and has significant significance for achieving carbon neutrality goals in industrial production processes.
另外,根据本实用新型的硅晶体制备系统,还可具有如下附加的技术特征:In addition, the silicon crystal preparation system according to the utility model may also have the following additional technical features:
在本实用新型的一些实施例中,所述第一电极棒和所述第二电极棒均沿第二直线穿设在所述炉体上,所述第一直线与所述第二直线垂直;In some embodiments of the present utility model, the first electrode rod and the second electrode rod are both arranged on the furnace body along a second straight line, and the first straight line is perpendicular to the second straight line;
所述等离子体发生组件还包括递送机构,所述递送机构包括:The plasma generating assembly further comprises a delivery mechanism, the delivery mechanism comprising:
夹持组件,所述夹持组件用于夹持所述第一电极棒和/或所述第二电极棒位于所述炉体外的部分;A clamping assembly, the clamping assembly being used to clamp the first electrode rod and/or the second electrode rod at a portion outside the furnace body;
驱动件,所述驱动件用于驱使所述夹持组件沿所述第二直线移动。A driving member, wherein the driving member is used to drive the clamping assembly to move along the second straight line.
在本实用新型的一些实施例中,所述夹持组件包括:In some embodiments of the present invention, the clamping assembly comprises:
连接板,所述连接板固定设置在所述驱动件的动力输出端;A connecting plate, the connecting plate being fixedly arranged at the power output end of the driving member;
第一夹持件,所述第一夹持件设置在所述连接板上;a first clamping member, the first clamping member being arranged on the connecting plate;
第二夹持件,所述第二夹持件活动地设置在所述连接板上。A second clamping member is movably disposed on the connecting plate.
本实用新型的一些实施例中,所述炉体上设置有两个密封组件,所述第一电极棒穿经所述两个密封组件的其中一个,所述第二电极棒穿经所述两个密封组件的另外一个,所述密封组件包括:In some embodiments of the utility model, two sealing assemblies are arranged on the furnace body, the first electrode rod passes through one of the two sealing assemblies, and the second electrode rod passes through the other of the two sealing assemblies, and the sealing assemblies include:
第一连接座,所述第一连接座设置在所述炉体上,且所述第一电极棒或所述第二电极棒穿设在所述第一连接座上;a first connecting seat, wherein the first connecting seat is arranged on the furnace body, and the first electrode rod or the second electrode rod is passed through the first connecting seat;
保护件,所述保护件设置在所述第一连接座的内壁与所述第一电极棒或所述第二电极棒之间;A protective member, the protective member being arranged between an inner wall of the first connecting seat and the first electrode rod or the second electrode rod;
第二连接座,所述第二连接座与所述第一连接座固定连接,且套设在所述第一电极棒或所述第二电极棒上,所述第二连接座用于固定所述保护件;a second connection seat, the second connection seat is fixedly connected to the first connection seat and sleeved on the first electrode rod or the second electrode rod, and the second connection seat is used to fix the protective member;
密封件,所述密封件设置在所述第二连接座的内部,且位于所述第二连接座与所述第一电极棒或所述第二电极棒之间。A sealing member is arranged inside the second connecting seat and located between the second connecting seat and the first electrode rod or the second electrode rod.
在本实用新型的一些实施例中,所述炉体的内壁设置有耐火材料。In some embodiments of the present invention, the inner wall of the furnace body is provided with refractory material.
在本实用新型的一些实施例中,所述炉体上开设有冷却剂入口和冷却剂出口,所述冷却剂入口和所述冷却剂出口之间设置有冷却通道,所述冷却通道设置在所述耐火材料内部。In some embodiments of the utility model, a coolant inlet and a coolant outlet are provided on the furnace body, a cooling channel is provided between the coolant inlet and the coolant outlet, and the cooling channel is provided inside the refractory material.
在本实用新型的一些实施例中,所述气化炉还包括约束机构,所述约束机构包括:In some embodiments of the present invention, the gasifier further comprises a constraint mechanism, and the constraint mechanism comprises:
送风组件,所述送风组件包括沿所述加热通道的周向设置的送风件,所述送风件具有沿所述加热通道的延伸方向设置的送风口,所述送风组件的数量为两个,两个所述送风组件的所述送风件分别设置在所述加热通道的两端,且两个所述送风件的所述送风口相对设置。An air supply component, the air supply component includes an air supply piece arranged along the circumference of the heating channel, the air supply piece has an air supply port arranged along the extension direction of the heating channel, the number of the air supply components is two, the air supply pieces of the two air supply components are respectively arranged at the two ends of the heating channel, and the air supply ports of the two air supply pieces are arranged opposite to each other.
供风组件,所述供风组件设置在所述炉体的外部,且用于向所述送风组件供风。An air supply component is arranged outside the furnace body and is used to supply air to the air supply component.
在本实用新型的一些实施例中,所述冷凝装置包括:In some embodiments of the present invention, the condensing device comprises:
冷凝器,所述冷凝器的数量为多个,且依次连通设置在所述加热通道的输出端。Condenser, the number of the condensers is multiple, and they are sequentially connected and arranged at the output end of the heating channel.
在本实用新型的一些实施例中,所述第一热解装置还具有吹风口,所述硅晶体制备系统还包括:In some embodiments of the present invention, the first pyrolysis device further has an air blowing port, and the silicon crystal preparation system further includes:
预热装置,所述预热装置具有进料腔和预热腔,所述进料腔与所述进料口连通,所述进料腔用于向所述进料口输出物料;所述预热腔套设在所述进料腔的外侧,,所述预热腔连通设置在所述冷凝装置和所述进气装置之间。A preheating device, wherein the preheating device comprises a feed chamber and a preheating chamber, wherein the feed chamber is connected to the feed port, and the feed chamber is used to output materials to the feed port; the preheating chamber is sleeved on the outside of the feed chamber, and the preheating chamber is connected and arranged between the condensing device and the air intake device.
在本实用新型的一些实施例中,所述硅晶体制备系统还包括:In some embodiments of the present invention, the silicon crystal preparation system further includes:
分离装置,所述分离装置具有第一进口、第一出口和第二出口,所述第一进口与所述冷凝装置的输出端连通,所述第一出口通过所述管路与所述预热腔连通,用于输出所述混合气体中的物料。A separation device having a first inlet, a first outlet and a second outlet, wherein the first inlet is connected to the output end of the condensing device, and the first outlet is connected to the preheating chamber through the pipeline for outputting the material in the mixed gas.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
通过阅读下文优选实施方式的详细描述,各种其他的优点和益处对于本领域普通技术人员将变得清楚明了。附图仅用于示出优选实施方式的目的,而并不认为是对本实用新型的限制。而且在整个附图中,用相同的附图标记表示相同的部件。在附图中:By reading the detailed description of the preferred embodiment below, various other advantages and benefits will become clear to those of ordinary skill in the art. The accompanying drawings are only used for the purpose of illustrating the preferred embodiment and are not to be considered as limiting the present invention. Moreover, the same reference numerals are used throughout the accompanying drawings to represent the same components. In the accompanying drawings:
图1为本实用新型实施方式所示的硅晶体制备系统的结构示意图;FIG1 is a schematic structural diagram of a silicon crystal preparation system shown in an embodiment of the present utility model;
图2为本实用新型实施方式所示的气化炉的结构示意图;FIG2 is a schematic structural diagram of a gasifier shown in an embodiment of the present invention;
图3为本实用新型实施方式所示的气化炉在另一视角下的结构示意图;FIG3 is a schematic structural diagram of the gasifier shown in an embodiment of the present utility model from another perspective;
图4为图3的C-C方向的剖面示意图;Fig. 4 is a schematic cross-sectional view taken along the C-C direction of Fig. 3;
图5为本实用新型实施方式所示的气化炉的第二种结构示意图;FIG5 is a schematic diagram of a second structure of a gasifier shown in an embodiment of the present utility model;
图6为本实用新型实施方式所示的第二种气化炉的在图2的A-A方向上的剖面示意图;FIG6 is a schematic cross-sectional view of a second gasifier in the direction A-A of FIG2 shown in an embodiment of the present invention;
图7为图2的B-B方向的剖面示意图;Fig. 7 is a cross-sectional schematic diagram along the B-B direction of Fig. 2;
图8为图4的D处的局部结构示意图;FIG8 is a schematic diagram of the local structure of D in FIG4;
图9为本实用新型实施方式所示的预热装置的结构示意图。FIG. 9 is a schematic structural diagram of a preheating device shown in an embodiment of the present utility model.
附图中各标记表示如下:The symbols in the accompanying drawings represent the following:
100、气化炉;200、冷凝装置;300、分离装置;400、预热装置;500、管路;600、进气装置;100, gasification furnace; 200, condensation device; 300, separation device; 400, preheating device; 500, pipeline; 600, air intake device;
1、炉体;101、进气口;102、出气口;103、加热通道;104、进料口;105、安装平台;1. Furnace body; 101. Air inlet; 102. Air outlet; 103. Heating channel; 104. Feed inlet; 105. Installation platform;
21、第一电极棒;22、第二电极棒;21. a first electrode rod; 22. a second electrode rod;
31、第一驱动件;32、第一夹持组件;321、连接板;322、第一夹持件;323、第二夹持件;324、第一气缸;325、固定架;326、连接架;327、复位弹簧;33、第二驱动件;34、第二夹持组件;31. first driving member; 32. first clamping assembly; 321. connecting plate; 322. first clamping member; 323. second clamping member; 324. first cylinder; 325. fixing frame; 326. connecting frame; 327. return spring; 33. second driving member; 34. second clamping assembly;
4、密封组件;41、第一连接座;411、挡板;42、保护件;43、第二连接座;431、座体;432、支撑板;433、密封盖;44、密封件;441、向套;442、耐高温骨架油封;45、连接件;4. Sealing assembly; 41. First connecting seat; 411. Baffle; 42. Protective member; 43. Second connecting seat; 431. Sealing body; 432. Support plate; 433. Sealing cover; 44. Sealing member; 441. Sleeve; 442. High temperature resistant skeleton oil seal; 45. Connecting member;
51、送风件;52、连接管;53、进风管;51. Air supply part; 52. Connecting pipe; 53. Air inlet pipe;
6、耐火材料;6. Refractory materials;
71、冷却剂入口; 72、冷却通道; 73、冷却剂出口;71. Coolant inlet; 72. Cooling channel; 73. Coolant outlet;
81、冷凝器; 82、收容器; 83、储藏室;81. Condenser; 82. Container; 83. Storage room;
91、进料腔;92、预热腔;93、进口;94、出口。91. Feed chamber; 92. Preheating chamber; 93. Inlet; 94. Outlet.
具体实施方式DETAILED DESCRIPTION
下面将参照附图更详细地描述本公开的示例性实施方式。虽然附图中显示了本公开的示例性实施方式,然而应当理解,可以以各种形式实现本公开而不应被这里阐述的实施方式所限制。相反,提供这些实施方式是为了能够更透彻地理解本公开,并且能够将本公开的范围完整的传达给本领域的技术人员。The exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided in order to enable a more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.
应理解的是,文中使用的术语仅出于描述特定示例实施方式的目的,而无意于进行限制。除非上下文另外明确地指出,否则如文中使用的单数形式“一”、“一个”以及“所述”也可以表示包括复数形式。术语“包括”、“包含”、“含有”以及“具有”是包含性的,并且因此指明所陈述的特征、步骤、操作、元件和/或部件的存在,但并不排除存在或者添加一个或多个其它特征、步骤、操作、元件、部件、和/或它们的组合。文中描述的方法步骤、过程、以及操作不解释为必须要求它们以所描述或说明的特定顺序执行,除非明确指出执行顺序。还应当理解,可以使用另外或者替代的步骤。It should be understood that the terms used herein are only for the purpose of describing specific example embodiments and are not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms "one", "an" and "said" as used herein may also be meant to include plural forms. The terms "include", "comprise", "contain", and "have" are inclusive, and therefore specify the existence of stated features, steps, operations, elements and/or parts, but do not exclude the existence or addition of one or more other features, steps, operations, elements, parts, and/or combinations thereof. The method steps, processes, and operations described herein are not interpreted as necessarily requiring them to be performed in the specific order described or illustrated, unless the execution order is clearly indicated. It should also be understood that additional or alternative steps may be used.
尽管可以在文中使用术语第一、第二、第三等来描述多个元件、部件、区域、层和/或部段,但是,这些元件、部件、区域、层和/或部段不应被这些术语所限制。这些术语可以仅用来将一个元件、部件、区域、层或部段与另一区域、层或部段区分开。除非上下文明确地指出,否则诸如“第一”、“第二”之类的术语以及其它数字术语在文中使用时并不暗示顺序或者次序。因此,以下讨论的第一元件、部件、区域、层或部段在不脱离示例实施方式的教导的情况下可以被称作第二元件、部件、区域、层或部段。Although the terms first, second, third, etc. can be used in the text to describe multiple elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms can only be used to distinguish an element, component, region, layer or section from another region, layer or section. Unless the context clearly indicates, terms such as "first", "second" and other numerical terms do not imply order or sequence when used in the text. Therefore, the first element, component, region, layer or section discussed below can be referred to as the second element, component, region, layer or section without departing from the teaching of the example embodiments.
为了便于描述,可以在文中使用空间相对关系术语来描述如图中示出的一个元件或者特征相对于另一元件或者特征的关系,这些相对关系术语例如为“内部”、“外部”、“内侧”、“外侧”、“下面”、“下方”、“上面”、“上方”等。这种空间相对关系术语意于包括除图中描绘的方位之外的在使用或者操作中装置的不同方位。例如,如果在图中的装置翻转,那么描述为“在其它元件或者特征下面”或者“在其它元件或者特征下方”的元件将随后定向为“在其它元件或者特征上面”或者“在其它元件或者特征上方”。因此,示例术语“在……下方”可以包括在上和在下的方位。装置可以另外定向(旋转90度或者在其它方向)并且文中使用的空间相对关系描述符合相应的解释。For ease of description, spatial relative terms may be used herein to describe the relationship of one element or feature relative to another element or feature as shown in the figure, such as "inside", "outside", "inner side", "outer side", "below", "below", "above", "above", etc. Such spatial relative terms are intended to include different orientations of the device in use or operation in addition to the orientation depicted in the figure. For example, if the device in the figure is turned over, then the elements described as "below other elements or features" or "below other elements or features" will subsequently be oriented as "above other elements or features" or "above other elements or features". Therefore, the example term "below..." can include both upper and lower orientations. The device can be oriented otherwise (rotated 90 degrees or in other directions) and the spatial relative descriptions used in the text conform to the corresponding interpretation.
如图1-图9所示,根据本实用新型的实施方式,提出了一种硅晶体制备系统,该硅晶体制备系统利用等离子技术生成的高温气体,并使其代替化石燃料燃烧作为热源来对物料进行气化分解,再利用冷凝技术生成高纯度的晶体材料,有助于解决现有的硅晶体制备存在的资源利用效果差,且容易造成大量燃料废渣的问题。As shown in Figures 1 to 9, according to the implementation mode of the utility model, a silicon crystal preparation system is proposed. The silicon crystal preparation system utilizes high-temperature gas generated by plasma technology and uses it as a heat source instead of fossil fuel combustion to gasify and decompose the material, and then utilizes condensation technology to generate high-purity crystal materials. This helps to solve the problems of poor resource utilization and easy generation of a large amount of fuel waste residue in the existing silicon crystal preparation.
整体设计上,该硅晶体制备系统包括气化炉100、冷凝装置200、管路500和进气装置600。其中,气化炉100包括炉体1和等离子体发生组件。炉体1具有进料口104以及沿第一直线设置的加热通道103,进料口104与加热通道103连通,且进料口104设置在加热通道103的上方。等离子体发生组件包括第一电极棒21和第二电极棒22,第一电极棒21具有第一工作端,第二电极棒22具有第二工作端,第一工作端和第二工作端设置在加热通道103的内部,且位于加热通道103的输入端和进料口104之间,第一工作端和第二工作端之间能够保持放电距离;In terms of overall design, the silicon crystal preparation system includes a gasifier 100, a condensing device 200, a pipeline 500 and an air intake device 600. Among them, the gasifier 100 includes a furnace body 1 and a plasma generating assembly. The furnace body 1 has a feed port 104 and a heating channel 103 arranged along a first straight line. The feed port 104 is connected to the heating channel 103, and the feed port 104 is arranged above the heating channel 103. The plasma generating assembly includes a first electrode rod 21 and a second electrode rod 22. The first electrode rod 21 has a first working end, and the second electrode rod 22 has a second working end. The first working end and the second working end are arranged inside the heating channel 103 and are located between the input end of the heating channel 103 and the feed port 104. The first working end and the second working end can maintain a discharge distance between them;
同时,冷凝装置200连通设置在加热通道103的输出端,冷凝装置200用于冷却气化炉100输出的混合气体并输出柱状晶体。进气装置600的输入端通过管路500与冷凝装置200连通,进气装置600的输出端与加热通道103的输入端连通,进气装置600用于向加热通道103输送工作气体。At the same time, the condensing device 200 is connected to the output end of the heating channel 103, and the condensing device 200 is used to cool the mixed gas output by the gasifier 100 and output columnar crystals. The input end of the air intake device 600 is connected to the condensing device 200 through the pipeline 500, and the output end of the air intake device 600 is connected to the input end of the heating channel 103, and the air intake device 600 is used to transport the working gas to the heating channel 103.
本实用新型提出的硅晶体制备系统,在气化炉100的炉体1上设置包括第一电极棒21和第二电极棒22的等离子体发生组件,通过向第一电极棒21和第二电极棒22输入直流电,使得第一电极棒21和第二电极棒22之间的气体转变成等离子态,且此时,成为等离子态的气体能够与从进气装置600通入的工作气体混合并形成高温气体,该高温气体能够对进料口104输入的物料进行气化分解,并最终输入至冷凝装置200中生成高纯度的晶体材料。其中,等离子体发生组件和进气装置600的配合,代替了化石燃料燃烧产生的热源,实现气化过程中二氧化碳及其他废气的零排放,减少对环境的污染,还使得该硅晶体制备系统具有良好的热转化效率,提高资源的利用效果。The silicon crystal preparation system proposed in the utility model is provided with a plasma generating assembly including a first electrode rod 21 and a second electrode rod 22 on the furnace body 1 of the gasification furnace 100. By inputting direct current into the first electrode rod 21 and the second electrode rod 22, the gas between the first electrode rod 21 and the second electrode rod 22 is transformed into a plasma state. At this time, the gas in the plasma state can be mixed with the working gas introduced from the air inlet device 600 to form a high-temperature gas. The high-temperature gas can gasify and decompose the material input from the feed port 104, and finally be input into the condensation device 200 to generate a high-purity crystal material. Among them, the cooperation of the plasma generating assembly and the air inlet device 600 replaces the heat source generated by the combustion of fossil fuels, realizes zero emission of carbon dioxide and other waste gases in the gasification process, reduces pollution to the environment, and also enables the silicon crystal preparation system to have a good thermal conversion efficiency and improve the utilization effect of resources.
同时,通过采用高温气体对进料口104输入的物料进行气化分解,并利用冷凝装置200生成柱状晶体,有助于提高硅晶体的生产效率,并提升产品的质量。此外,通过设置管路500将冷凝器81输出的气体配送回气化炉100,有助于实现工作气体的循环利用,降低能源消耗和碳排放,对工业生产过程中达到碳中和目标具有显著意义。At the same time, by using high-temperature gas to gasify and decompose the material input from the feed port 104, and using the condensing device 200 to generate columnar crystals, it is helpful to improve the production efficiency of silicon crystals and improve the quality of products. In addition, by setting up a pipeline 500 to distribute the gas output from the condenser 81 back to the gasification furnace 100, it is helpful to realize the recycling of working gas, reduce energy consumption and carbon emissions, and have significant significance for achieving the goal of carbon neutrality in the industrial production process.
具体来说,如图2-图6所示,上述炉体1具有进气口101、出气口102、进料口104和加热通道103,其中,加热通道103连通设置进气口101和出气口102之间,下述进气装置600输出的工作气体能够依次流经炉体1的进气口101、加热通道103和出气口102。在本实施方式中,加热通道103沿第一直线设置,优选地,第一直线为水平设置。Specifically, as shown in Fig. 2 to Fig. 6, the furnace body 1 has an air inlet 101, an air outlet 102, a feed port 104 and a heating channel 103, wherein the heating channel 103 is connected between the air inlet 101 and the air outlet 102, and the working gas output by the air inlet device 600 described below can flow sequentially through the air inlet 101, the heating channel 103 and the air outlet 102 of the furnace body 1. In this embodiment, the heating channel 103 is arranged along a first straight line, and preferably, the first straight line is arranged horizontally.
此时,进料口104与加热通道103连通,且设置在加热通道103的上方。进料口104用于与预热装置400连通,预热装置400能够向加热通道103内输入物料。在本实施方式中,上述进料口104的朝向为竖直方向,且与第一直线垂直,即进料口104与加热通道103的延伸方向垂直设置。需要说明的是,上述物料为用于制备硅晶体的原料。优选地,该原料为调配好的粉状混合物。At this time, the feed port 104 is connected to the heating channel 103 and is arranged above the heating channel 103. The feed port 104 is used to communicate with the preheating device 400, and the preheating device 400 can input materials into the heating channel 103. In this embodiment, the feed port 104 is oriented in a vertical direction and is perpendicular to the first straight line, that is, the feed port 104 is arranged perpendicular to the extension direction of the heating channel 103. It should be noted that the above-mentioned material is a raw material for preparing silicon crystals. Preferably, the raw material is a prepared powdery mixture.
需要理解的是,上述炉体1的材质可选用碳钢或者低合金钢或者高合金钢中的一种材质制成,且炉体1的具体选材可通过气化炉100所需要达到的加热温度而定,在此不再多加详述。It should be understood that the furnace body 1 can be made of carbon steel, low alloy steel or high alloy steel, and the specific material of the furnace body 1 can be determined by the heating temperature required to be achieved by the gasifier 100, which will not be described in detail here.
如图4和图5所示,在炉体1上穿设有第一电极棒21和第二电极棒22,第一电极棒21和第二电极棒22相对设置。具体地,第一电极棒21和第二电极棒22均穿设在炉体1的主体上,且第一电极棒21和第二电极棒22均位于第二直线上。在本实施方式中,第二直线为竖直线,且此时,第一直线与第一直线垂直。结合图所示,第一电极棒21设置在主体的顶部,第二电极棒22设置在主体的底部。第一电极棒21的部分和第二电极棒22的部分均探入至加热通道103中,且在加热通道103的内部间隔设置。具体地,第一电极棒21具有第一工作端,第二电极棒22具有第二工作端,第一工作端和第二工作端设置在加热通道103的内部,且第一工作端和第二工作端之间能够保持放电距离。As shown in FIGS. 4 and 5 , the furnace body 1 is provided with a first electrode rod 21 and a second electrode rod 22, and the first electrode rod 21 and the second electrode rod 22 are arranged opposite to each other. Specifically, the first electrode rod 21 and the second electrode rod 22 are both provided on the main body of the furnace body 1, and the first electrode rod 21 and the second electrode rod 22 are both located on the second straight line. In this embodiment, the second straight line is a vertical line, and at this time, the first straight line is perpendicular to the first straight line. As shown in the combined figure, the first electrode rod 21 is arranged at the top of the main body, and the second electrode rod 22 is arranged at the bottom of the main body. Parts of the first electrode rod 21 and parts of the second electrode rod 22 are both inserted into the heating channel 103, and are arranged at intervals inside the heating channel 103. Specifically, the first electrode rod 21 has a first working end, and the second electrode rod 22 has a second working end, and the first working end and the second working end are arranged inside the heating channel 103, and the first working end and the second working end can maintain a discharge distance between them.
需要理解的是,第一电极棒21和/或第二电极棒22能够沿第一直线移动,从而实现第一电极棒21和第二电极棒22的靠近或远离,即第一电极棒21和第二电极棒22可移动地穿设在炉体上,如此设置,使得该热源供给装置能够通过调节第一工作端和第二工作端之间的放电距离,并在第一电极棒21和第二电极棒22通入直流电时,实现对气体的等离子态转化率的调控,进而实现对第一工作端和第二工作端之间的温度调整。It should be understood that the first electrode rod 21 and/or the second electrode rod 22 can move along the first straight line, so as to achieve the approach or distance between the first electrode rod 21 and the second electrode rod 22, that is, the first electrode rod 21 and the second electrode rod 22 are movably arranged on the furnace body. Such an arrangement enables the heat source supply device to adjust the discharge distance between the first working end and the second working end, and when direct current is passed through the first electrode rod 21 and the second electrode rod 22, to achieve regulation of the plasma state conversion rate of the gas, thereby achieving temperature adjustment between the first working end and the second working end.
此外,在本实施方式中,第一电极棒21和第二电极棒22均与设置在炉体外部的电流供给设备相连接,电流供给设备未在图中示出。具体地,第一电极棒21还具有第一连接端,第二电极棒22还具有第二连接端。其中,第一连接端与第一工作端相对设置,第二连接端与第二工作端相对设置。优选地,该电流供给设备的正极和负极分别与第一电极棒21的第一连接端和第二电极棒22的第二连接端相连接,并向第一电极棒21和第二电极棒22输出直流电。电流供给设备能够用于调整输入的直流电大小,并配合放电距离的不同来调控第一工作端和第二工作端之间的温度。In addition, in the present embodiment, the first electrode rod 21 and the second electrode rod 22 are both connected to a current supply device disposed outside the furnace body, and the current supply device is not shown in the figure. Specifically, the first electrode rod 21 also has a first connection end, and the second electrode rod 22 also has a second connection end. The first connection end is disposed opposite to the first working end, and the second connection end is disposed opposite to the second working end. Preferably, the positive pole and the negative pole of the current supply device are respectively connected to the first connection end of the first electrode rod 21 and the second connection end of the second electrode rod 22, and direct current is output to the first electrode rod 21 and the second electrode rod 22. The current supply device can be used to adjust the size of the input direct current, and to regulate the temperature between the first working end and the second working end in accordance with the different discharge distances.
需要进一步理解的是,等离子体发生组件还包括递送机构,该递送机构用于驱使第一电极棒21和第二电极棒22的移动,以实现上述第一电极棒21和第二电极棒22的靠近或远离。具体地,该递送机构包括夹持组件和驱动件,其中,夹持组件用于夹持第一电极棒21和/或第二电极棒22位于炉体1外的部分,而驱动件则用于驱使夹持组件沿第一直线移动。在本实施方式中,递送机构的数量为两个,且两个递送机构的结构相同。为便于描述,将两个递送机构分别称为第一递送机构和第二递送机构。其中,第一递送机构用于夹持并驱使第一电极棒21移动,第二递送机构用于夹持并驱使第二电极棒22移动,It should be further understood that the plasma generating assembly also includes a delivery mechanism, which is used to drive the movement of the first electrode rod 21 and the second electrode rod 22 to achieve the above-mentioned first electrode rod 21 and the second electrode rod 22 to move closer or farther away. Specifically, the delivery mechanism includes a clamping assembly and a driving member, wherein the clamping assembly is used to clamp the first electrode rod 21 and/or the second electrode rod 22 located outside the furnace body 1, and the driving member is used to drive the clamping assembly to move along the first straight line. In this embodiment, the number of delivery mechanisms is two, and the structures of the two delivery mechanisms are the same. For ease of description, the two delivery mechanisms are respectively referred to as the first delivery mechanism and the second delivery mechanism. Among them, the first delivery mechanism is used to clamp and drive the first electrode rod 21 to move, and the second delivery mechanism is used to clamp and drive the second electrode rod 22 to move.
具体来说,第一递送机构包括第一驱动件31和第一夹持组件32,相应地,第二递送机构包括第二驱动件33和第二夹持组件34。在本实施方式中,第一驱动件31连接设置在炉体1上,第一夹持组件32设置在第一驱动件31的输出端。第二驱动件33与上述炉体1设置在同一安装基面上,第二夹持组件34设置在第二驱动件33的输出端。作为一种优选地可实施方式,在炉体1的侧壁上设置有安装平台105,第一驱动件31安装在该安装平台105上,第二驱动件33固定设置在地面上。其中,第一驱动件31和第二驱动件33均设置为液压缸。作为一种优选地可实施方式,第一驱动件31和第二驱动件33设置为同步运动,从而可使得第一电极棒21和第二电极棒22相互靠近或相互远离,有助于进一步地提高递送机构对第一电极棒21和第二电极棒22之间的放电距离的控制精度。Specifically, the first delivery mechanism includes a first driving member 31 and a first clamping assembly 32, and correspondingly, the second delivery mechanism includes a second driving member 33 and a second clamping assembly 34. In this embodiment, the first driving member 31 is connected to the furnace body 1, and the first clamping assembly 32 is arranged at the output end of the first driving member 31. The second driving member 33 is arranged on the same mounting base as the furnace body 1, and the second clamping assembly 34 is arranged at the output end of the second driving member 33. As a preferred embodiment, a mounting platform 105 is arranged on the side wall of the furnace body 1, the first driving member 31 is mounted on the mounting platform 105, and the second driving member 33 is fixedly arranged on the ground. Among them, the first driving member 31 and the second driving member 33 are both arranged as hydraulic cylinders. As a preferred embodiment, the first driving member 31 and the second driving member 33 are arranged to move synchronously, so that the first electrode rod 21 and the second electrode rod 22 can be moved closer to each other or farther away from each other, which helps to further improve the control accuracy of the delivery mechanism on the discharge distance between the first electrode rod 21 and the second electrode rod 22.
在本实施方式中,由于第一夹持组件32和第二夹持组件34的结构相同,下面以第一夹持组件32为例进行描述。第一夹持组件32包括连接板321、第一夹持件322和第二夹持件323,其中,连接板321固定设置在第一驱动件31的动力输出端。第一夹持件322设置在连接板321上,第二夹持件323可移动地设置在连接板321上。将第二夹持件323设置为可移动,可使得第二夹持件323能够与第一夹持件322配合来实现对第一电极棒21的夹持和松开。In this embodiment, since the first clamping assembly 32 and the second clamping assembly 34 have the same structure, the first clamping assembly 32 is taken as an example for description. The first clamping assembly 32 includes a connecting plate 321, a first clamping member 322, and a second clamping member 323, wherein the connecting plate 321 is fixedly arranged at the power output end of the first driving member 31. The first clamping member 322 is arranged on the connecting plate 321, and the second clamping member 323 is movably arranged on the connecting plate 321. The second clamping member 323 is arranged to be movable, so that the second clamping member 323 can cooperate with the first clamping member 322 to achieve clamping and loosening of the first electrode rod 21.
具体地,连接板321与第一驱动件31的动力输出端通过螺栓连接,在第一连接板321上通过螺栓连接有固定架325,固定架325上固定安装有第一夹持件322和第一气缸324,其中,第一气缸324的输出端通过连接架326与第二夹持件323固定连接,且此时,在固定架325和连接架326之间设置有复位弹簧327,以配合第一气缸324保障第一夹持组件32对第二夹持件323夹持效果。通过设置第一气缸324来驱使第二夹持件323移动,可实现对第一夹持件322和第二夹持件323之间距离的调节,从而有助于实现第一夹持组件32对第一电极棒21的夹持固定,并确保在实际使用过程中,第一电极棒21不会出现移动的情况。Specifically, the connecting plate 321 is connected to the power output end of the first driving member 31 by bolts, a fixing frame 325 is connected to the first connecting plate 321 by bolts, and the fixing frame 325 is fixedly mounted with the first clamping member 322 and the first cylinder 324, wherein the output end of the first cylinder 324 is fixedly connected to the second clamping member 323 by the connecting frame 326, and at this time, a return spring 327 is arranged between the fixing frame 325 and the connecting frame 326 to cooperate with the first cylinder 324 to ensure the clamping effect of the first clamping assembly 32 on the second clamping member 323. By arranging the first cylinder 324 to drive the second clamping member 323 to move, the distance between the first clamping member 322 and the second clamping member 323 can be adjusted, thereby facilitating the clamping and fixing of the first electrode rod 21 by the first clamping assembly 32, and ensuring that the first electrode rod 21 will not move during actual use.
如图4、图5和图8所示,炉体1上设置有两个密封组件,第一电极棒21穿经两个密封组件的其中一个,第二电极棒22穿经两个密封组件的另外一个。在本实施方式中,进气通道向炉体1内部输出的工作气体,需要与第一工作端和第二工作端之间的等离子态气体混合,并在其形成目标气体后从出气口102输出,因此,在第一电极棒21和/或第二电极棒22与炉体1的连接处设置有密封组件4,可防止炉体1内气流逸散,减少高温气体的流失,保障该气化炉100的热转化率。优选地,两个密封组件分别设置在主体12的顶部和底部。此外,密封组件的设置还有助于防止外部的气体或物质进入到加热通道,从而提高炉体在使用时的安全性。As shown in Fig. 4, Fig. 5 and Fig. 8, two sealing components are arranged on the furnace body 1, and the first electrode rod 21 passes through one of the two sealing components, and the second electrode rod 22 passes through the other of the two sealing components. In this embodiment, the working gas output from the air inlet channel to the inside of the furnace body 1 needs to be mixed with the plasma gas between the first working end and the second working end, and output from the gas outlet 102 after forming the target gas. Therefore, a sealing component 4 is arranged at the connection between the first electrode rod 21 and/or the second electrode rod 22 and the furnace body 1, which can prevent the gas flow in the furnace body 1 from escaping, reduce the loss of high-temperature gas, and ensure the heat conversion rate of the gasifier 100. Preferably, the two sealing components are arranged at the top and bottom of the main body 12, respectively. In addition, the arrangement of the sealing component also helps to prevent external gas or substances from entering the heating channel, thereby improving the safety of the furnace body when in use.
此时,为便于描述,以位于炉体1顶部的密封组件为例进行描述。其中,密封组件4包括第一连接座41、保护件42、第二连接座43和密封件44。第一连接座41设置在主体上,且第一电极棒21穿设在第一连接座41上。具体来说,在炉体1上开设有安装口,第一连接座41焊接在安装口上,第一电极棒21穿经该第一连接座41。如图8所示,在第一连接座41上设置有挡板411,上述保护件42设置在第一连接座41的内部且一端与挡板411抵接,且此时,第二连接座43与第一连接座41固定连接,并与该保护件42的另一端抵接,以将保护件42固定在第一连接座41的内部。在本实施方式中,保护件42为电极绝缘套,有助于避免直流电会通过第一电极棒21流向炉体1,有助于提高该炉体1在使用的安全性。At this time, for the convenience of description, the sealing assembly located at the top of the furnace body 1 is described as an example. Among them, the sealing assembly 4 includes a first connection seat 41, a protective member 42, a second connection seat 43 and a sealing member 44. The first connection seat 41 is arranged on the main body, and the first electrode rod 21 is inserted into the first connection seat 41. Specifically, a mounting opening is opened on the furnace body 1, the first connection seat 41 is welded on the mounting opening, and the first electrode rod 21 passes through the first connection seat 41. As shown in FIG8, a baffle 411 is arranged on the first connection seat 41, and the above-mentioned protective member 42 is arranged inside the first connection seat 41 and one end abuts against the baffle 411, and at this time, the second connection seat 43 is fixedly connected to the first connection seat 41, and abuts against the other end of the protective member 42 to fix the protective member 42 inside the first connection seat 41. In this embodiment, the protective member 42 is an electrode insulating sleeve, which helps to prevent direct current from flowing to the furnace body 1 through the first electrode rod 21, and helps to improve the safety of the furnace body 1 in use.
在本实施方式中,第二连接座43与第一连接座41通过螺栓进行连接,且在第二连接座43与第一连接座41之间设置有连接件45,通过设置连接件45可有效保障第二连接座43与第一连接座41连接的密封性,有助于减少气体的流失。该连接件45可设置为橡胶件。In this embodiment, the second connection seat 43 is connected to the first connection seat 41 by bolts, and a connection member 45 is provided between the second connection seat 43 and the first connection seat 41. The connection member 45 can effectively ensure the sealing of the connection between the second connection seat 43 and the first connection seat 41, which helps to reduce the loss of gas. The connection member 45 can be set as a rubber member.
仍如图8所示,第二连接座43套设在第一电极棒21上。具体地,该第二连接座43包括座体431和密封盖433。其中,座体431用于与第一连接座41固定连接,且座体431的第一端与保护件42抵接,座体431的第二端设置有密封盖433。同时,在座体431的内部设置有支撑板432,且此时,支撑板432、座体431的内壁、密封盖433三者配合形成容置空间,上述密封件44固定设置在该容置空间内,并与第一电极棒21的周面相抵接。在本实施方式中,该密封件44包括多个长度不同的向套441和耐高温骨架油封442,其中,向套441与支撑板432和密封盖433抵接,且相邻两个向套441之间设置有耐高温骨架油封442,如此设置,有助于提高该密封组件4的密封效果,减少气体的流失,保障第一电极棒21的穿设及其移动具有可实施性。Still as shown in FIG8 , the second connection seat 43 is sleeved on the first electrode rod 21. Specifically, the second connection seat 43 includes a seat body 431 and a sealing cover 433. The seat body 431 is used to be fixedly connected with the first connection seat 41, and the first end of the seat body 431 abuts against the protective member 42, and the second end of the seat body 431 is provided with a sealing cover 433. At the same time, a support plate 432 is provided inside the seat body 431, and at this time, the support plate 432, the inner wall of the seat body 431, and the sealing cover 433 cooperate to form an accommodation space, and the above-mentioned sealing member 44 is fixedly provided in the accommodation space and abuts against the peripheral surface of the first electrode rod 21. In this embodiment, the sealing member 44 includes a plurality of sleeves 441 and high temperature resistant skeleton oil seals 442 of different lengths, wherein the sleeves 441 are in contact with the support plate 432 and the sealing cover 433, and a high temperature resistant skeleton oil seal 442 is arranged between two adjacent sleeves 441. Such an arrangement helps to improve the sealing effect of the sealing assembly 4, reduce gas loss, and ensure the feasibility of the insertion and movement of the first electrode rod 21.
仍如图1和图2所示,进气装置600的输入端与炉体1的出气口102连通,进气装置600的输出端连通设置在炉体1的进气口101,从而将出气口102输出并经过多次利用的供气体重新引入到炉体1中,实现工作气体的循环利用,有助于进一步地降低二氧化碳的排放。在本实施方式中,进气装置设置为风机。优选地,风机的输出功率可调,并能够根据需要调整工作气体的输入风速。Still as shown in FIG. 1 and FIG. 2 , the input end of the air intake device 600 is connected to the air outlet 102 of the furnace body 1 , and the output end of the air intake device 600 is connected to the air intake 101 arranged on the furnace body 1 , so that the supply gas output from the air outlet 102 and used multiple times is reintroduced into the furnace body 1 , realizing the recycling of the working gas, which helps to further reduce the emission of carbon dioxide. In this embodiment, the air intake device is configured as a fan. Preferably, the output power of the fan is adjustable, and the input wind speed of the working gas can be adjusted as needed.
在此,需要说明的是,上述工作气体可设置为氮气或惰性气体中的一种或者混合气体,以能够保障该工作气体无法在高温环境下与物料发生反应即可。Here, it should be noted that the working gas can be set to one or a mixed gas of nitrogen or an inert gas, so as to ensure that the working gas cannot react with the material in a high temperature environment.
在本实用新型的一些实施例中,该气化炉100还包括约束机构,以对加热通道103内的工作气体进行有效约束,从而能够避免气流或热量逸散的情况出现,有助于进一步地提高该气化炉100的利用效率。在本实施方式中,约束机构包括送风组件和供风组件,其中,供风组件用于向送风组件输出工作气体,送风组件用于将混有等离子态的工作气体约束在加热通道103的中心位置。In some embodiments of the utility model, the gasifier 100 further includes a restraining mechanism to effectively restrain the working gas in the heating channel 103, so as to avoid the occurrence of airflow or heat dissipation, which helps to further improve the utilization efficiency of the gasifier 100. In this embodiment, the restraining mechanism includes an air supply component and an air supply component, wherein the air supply component is used to output the working gas to the air supply component, and the air supply component is used to restrain the working gas mixed with plasma at the center of the heating channel 103.
具体地,如图5所示,送风组件包括进风管53、连接管52和送风件51。其中,进风管53的数量为多个且均设置在炉体1上,每个进风管53的输出端均连通设置有连接管52,连接管52延伸至炉体1的内部并与送风件51连通。此时,送风件51沿加热通道103的周向设置,且送风件51具有沿加热通道103的延伸方向设置的送风口。在本实施方式中,进风管53的数量为六个,相应地,连接管52的数量为六个,同时,送风件51为一体结构,且送风口沿加热通道103的周向设置。Specifically, as shown in FIG5 , the air supply assembly includes an air inlet pipe 53, a connecting pipe 52 and an air supply member 51. There are multiple air inlet pipes 53 and they are all arranged on the furnace body 1. The output end of each air inlet pipe 53 is connected with a connecting pipe 52, which extends to the interior of the furnace body 1 and is connected with the air supply member 51. At this time, the air supply member 51 is arranged along the circumference of the heating channel 103, and the air supply member 51 has an air supply port arranged along the extension direction of the heating channel 103. In this embodiment, the number of the air inlet pipes 53 is six, and accordingly, the number of the connecting pipes 52 is six. At the same time, the air supply member 51 is an integrated structure, and the air supply port is arranged along the circumference of the heating channel 103.
需要理解的是,该气化炉具有两个送风组件,同时两个送风组件的送风件51分别设置在加热通道103的两端,且两个送风件51的送风口相对设置。当供风组件向送风组件输入工作气体时,能够在加热通道103的周向上形成对冲的高压气流,有助于限制加热通道103内的气体的流向,并减少热量的散失。同时,还能够能避免炉体1的内壁受到高温气体冲刷,保证炉体1内壁不被烧坏,提高设备的使用寿命及安全性,而且,该约束机构还能够配合递送机构和进气装置,对进气组件输入的工作气体进行热传导,并快速中和并调控目标气体的温度,从而最短时间达到设定的目标气体所需的温度和流量。It should be understood that the gasifier has two air supply components, and the air supply parts 51 of the two air supply components are respectively arranged at the two ends of the heating channel 103, and the air supply ports of the two air supply parts 51 are arranged relatively. When the air supply component inputs working gas to the air supply component, it can form opposing high-pressure airflows in the circumferential direction of the heating channel 103, which helps to limit the flow direction of the gas in the heating channel 103 and reduce heat loss. At the same time, it can also prevent the inner wall of the furnace body 1 from being eroded by high-temperature gas, ensure that the inner wall of the furnace body 1 is not burned, and improve the service life and safety of the equipment. Moreover, the constraint mechanism can also cooperate with the delivery mechanism and the air intake device to conduct heat to the working gas input by the air intake component, and quickly neutralize and regulate the temperature of the target gas, so as to achieve the set target gas The required temperature and flow rate in the shortest time.
在此,需要说明的是,送风组件向炉体1内部所输入的工作气体与上述加热通道103中流动的工作气体为同一种类的气体。Here, it should be noted that the working gas inputted into the furnace body 1 by the air supply assembly and the working gas flowing in the heating channel 103 are the same type of gas.
如图4-图6所示,在炉体1的内壁设置有耐火材料6,有助于保护炉体1的内壁,防止高温高速的目标气体因温度过高而烧毁炉体1,同时也能保障炉内热量不散失,提高利用效率。其中,该耐火材料6为一种耐高温材料或者多种耐高温材料复合而成,具体地,该耐火材料6设置为石墨耐火材料或者刚玉砖、高铝砖耐火材料。As shown in Fig. 4 to Fig. 6, a refractory material 6 is provided on the inner wall of the furnace body 1, which helps to protect the inner wall of the furnace body 1 and prevent the high-temperature and high-speed target gas from burning the furnace body 1 due to excessive temperature. At the same time, it can also ensure that the heat in the furnace is not lost and improve the utilization efficiency. Among them, the refractory material 6 is a high-temperature resistant material or a composite of multiple high-temperature resistant materials. Specifically, the refractory material 6 is set as a graphite refractory material or a corundum brick or a high-alumina brick refractory material.
此时,该冷却组件包括开设在炉体上的冷却剂入口71和冷却剂出口73,冷却剂入口71和冷却剂出口73之间设置有冷却通道72,冷却通道72设置在耐火材料6的内部,优选地,冷却通道72盘旋成螺旋状结构并以加热通道103为中心环绕设置。有助于对耐火材料6内壁传导出来的热量进行降温处理,从而防止炉体1的外壳温度超标,起到冷却保护的作用。在本实施方式中,冷却通道72的材料可选用铜管或不锈钢管、S不锈钢管中一种,以增强冷却通道72的导热性和使用寿命,且不易产生铁锈。At this time, the cooling assembly includes a coolant inlet 71 and a coolant outlet 73 opened on the furnace body, and a cooling channel 72 is arranged between the coolant inlet 71 and the coolant outlet 73. The cooling channel 72 is arranged inside the refractory material 6. Preferably, the cooling channel 72 is spirally arranged in a spiral structure and is arranged around the heating channel 103 as the center. It is helpful to cool down the heat conducted from the inner wall of the refractory material 6, thereby preventing the shell temperature of the furnace body 1 from exceeding the standard, and playing a role of cooling protection. In this embodiment, the material of the cooling channel 72 can be selected from a copper tube or a stainless steel tube, S stainless steel tube, so as to enhance the thermal conductivity and service life of the cooling channel 72, and it is not easy to produce rust.
本申请的气化炉100,通过向第一电极棒21和第二电极棒22供应直流电,能够稳定且快速的将第一电极棒21和第二电极棒22之间的气体转化为等离子态,并与从进气口101输入的工作气体混合,混合后的工作气体能够作为热源来代替化石燃料燃烧产生的热源,将物料(硅晶体原料)进行气化分解。有助于消除因燃料问题出现的环境污染,实现了源头处的二氧化碳零排放。The gasifier 100 of the present application can stably and quickly convert the gas between the first electrode rod 21 and the second electrode rod 22 into a plasma state by supplying direct current to the first electrode rod 21 and the second electrode rod 22, and mix it with the working gas input from the air inlet 101. The mixed working gas can be used as a heat source to replace the heat source generated by the combustion of fossil fuels to gasify and decompose the material (silicon crystal raw material). It helps to eliminate environmental pollution caused by fuel problems and achieve zero carbon dioxide emissions at the source.
仍如图1所示,上述冷凝装置200包括冷凝器81、收容器82和储藏室83。其中,冷凝器81具有输入口、第一输出口和第二输出口,第一输入口用于输入混合气体,第一输出口用于输出未冷却的混合气体,而第二输出口则用于输出冷凝后的棒状硅晶体。在本实施方式中,冷凝器81的数量为多个,多个冷凝器81依次连通设置在加热通道103的输出端。优选地,多个冷凝器81的冷能效果不同,如此设置,能够同时根据需要生成多晶硅棒或单硅晶棒,以提高硅晶体制备系统的生产效率。Still as shown in FIG. 1 , the condensing device 200 includes a condenser 81, a container 82 and a storage chamber 83. The condenser 81 has an input port, a first output port and a second output port, the first input port is used to input a mixed gas, the first output port is used to output an uncooled mixed gas, and the second output port is used to output the condensed rod-shaped silicon crystals. In this embodiment, there are multiple condensers 81, and the multiple condensers 81 are sequentially connected and arranged at the output end of the heating channel 103. Preferably, the cooling energy effects of the multiple condensers 81 are different. With such an arrangement, polycrystalline silicon rods or single silicon crystal rods can be generated at the same time as needed to improve the production efficiency of the silicon crystal preparation system.
在此,需要说明的是,冷凝器81采用的常规的冷凝技术,并利用不同物质在不同温度下的状态不同,以使得硅按照预设要求堆积并形成柱状晶体,并最终从第二输出口输出进入收容器82。Here, it should be noted that the condenser 81 adopts conventional condensation technology and utilizes the different states of different substances at different temperatures to make the silicon accumulate and form columnar crystals according to preset requirements, and finally output from the second output port into the receiving container 82.
此时,上述收容器82为现有的收纳设备,以用于储存多晶硅棒或单硅晶棒。同时,还设有储藏室83,以将收容器82中的多晶硅棒或单硅晶棒进行分类储存,以防止因多晶硅棒或单硅晶棒的堆积而影响冷凝器81的使用。At this time, the container 82 is an existing storage device for storing polycrystalline silicon rods or monocrystalline silicon rods. At the same time, a storage room 83 is also provided to classify and store the polycrystalline silicon rods or monocrystalline silicon rods in the container 82 to prevent the use of the condenser 81 from being affected by the accumulation of the polycrystalline silicon rods or monocrystalline silicon rods.
仍如图1所示,硅晶体制备系统还包括分离装置300。其中,分离装置300具有第一进口、第一出口和第二出口,第一进口与冷凝装置200的输出端连通,第一出口通过管路500与预热腔92连通,第二出口用于将混合气体中的物料输出。在冷凝装置200的输出端设置分离装置300,能够将混合气体中未被冷凝的物料分离,避免残存的物料进入管道,并在管道、进气装置600或下述预热装置400中沉积,从而造成资源的浪费。Still as shown in FIG. 1 , the silicon crystal preparation system further includes a separation device 300. The separation device 300 has a first inlet, a first outlet, and a second outlet. The first inlet is connected to the output end of the condensing device 200, the first outlet is connected to the preheating chamber 92 through the pipeline 500, and the second outlet is used to output the material in the mixed gas. The separation device 300 is arranged at the output end of the condensing device 200, which can separate the uncondensed material in the mixed gas, prevent the remaining material from entering the pipeline, and depositing in the pipeline, the air intake device 600 or the preheating device 400 described below, thereby causing a waste of resources.
在此,需要说明的是,上述分离装置300输出的物料包括未被冷凝的硅,以及原料中的杂质。此时,分离装置300可采用的是常规的冷凝技术进行气固分离,亦或者利用化学反应,使气化状态的硅或杂质反应消耗。当然,无论采用何种分离方式,第二出口处均需要设置有单独的收容装置。Here, it should be noted that the material output by the above-mentioned separation device 300 includes uncondensed silicon and impurities in the raw material. At this time, the separation device 300 can use conventional condensation technology to separate gas and solid, or use chemical reactions to consume the gasified silicon or impurities. Of course, no matter which separation method is used, a separate receiving device needs to be set at the second outlet.
仍如图1所示,硅晶体制备系统还包括预热装置400,预热装置400具有进料腔91和预热腔92,其中,进料腔91与进料口104连通,进料腔91用于向进料口104输出物料。在本实施方式中,进料腔91的第一端与进料口104连通,第二端与外部的配料装置连通,配料装置未在图中示出,配料装置可通过预热装置400的进料腔91将调配好的物料以定量或定速的输送至进料口104中。当然,进料腔91的第二端可封闭设置,此时,需要提前将调配好的物料设置在进料腔91中,并设置控制件控制物料的输送情况。控制件可设置为封堵板,且封堵板活动设置在进料腔91内,封堵板能够间隙性保障进料腔91与进料口104的连通。Still as shown in FIG. 1 , the silicon crystal preparation system further includes a preheating device 400, which has a feed chamber 91 and a preheating chamber 92, wherein the feed chamber 91 is connected to the feed port 104, and the feed chamber 91 is used to output materials to the feed port 104. In this embodiment, the first end of the feed chamber 91 is connected to the feed port 104, and the second end is connected to an external batching device, which is not shown in the figure. The batching device can deliver the prepared materials to the feed port 104 in a quantitative or constant speed through the feed chamber 91 of the preheating device 400. Of course, the second end of the feed chamber 91 can be closed. At this time, it is necessary to set the prepared materials in the feed chamber 91 in advance, and set a control part to control the delivery of the materials. The control part can be set as a blocking plate, and the blocking plate is movably set in the feed chamber 91, and the blocking plate can intermittently ensure the connection between the feed chamber 91 and the feed port 104.
此时,预热腔92套设在进料腔91的外侧,预热腔92通过管路500与冷凝装置200和进气装置600连通。优选地,该预热装置400还包括进口93和出口94。其中,进口93通过管路500和分离装置300与冷凝装置200连通,出口94通过管路500与进气装置600连通。预热腔92的设置能够在物料进入进料口104前进行预热,且将预热腔92连通设置在冷凝装置200和进气装置600之间,能够充分利用混合气体的余热,提高该硅晶体制备系统的热转化效率,保障资源的利用效果。At this time, the preheating chamber 92 is sleeved on the outside of the feed chamber 91, and the preheating chamber 92 is connected to the condensing device 200 and the air intake device 600 through the pipeline 500. Preferably, the preheating device 400 also includes an inlet 93 and an outlet 94. Among them, the inlet 93 is connected to the condensing device 200 through the pipeline 500 and the separation device 300, and the outlet 94 is connected to the air intake device 600 through the pipeline 500. The setting of the preheating chamber 92 can preheat the material before entering the feed port 104, and the preheating chamber 92 is connected and arranged between the condensing device 200 and the air intake device 600, which can make full use of the waste heat of the mixed gas, improve the thermal conversion efficiency of the silicon crystal preparation system, and ensure the utilization effect of resources.
本实施方式的硅晶体制备方法,通过使用等离子体发生技术生成高温气体并使其作为热源,代替了传统的化石燃料,减少了化石燃料的需求,从而在源头上减少了碳排放。同时,循环封闭的连接方式进一步降低了能源消耗和碳排放,对工业生产过程中达到碳中和目标具有显著意义。The silicon crystal preparation method of this embodiment uses plasma generation technology to generate high-temperature gas and use it as a heat source, replacing traditional fossil fuels, reducing the demand for fossil fuels, and thus reducing carbon emissions at the source. At the same time, the closed-loop connection method further reduces energy consumption and carbon emissions, which is of great significance to achieving the goal of carbon neutrality in industrial production processes.
以上所述,仅为本实用新型较佳的具体实施方式,但本实用新型的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本实用新型揭露的技术范围内,可轻易想到的变化或替换,都应涵盖在本实用新型的保护范围之内。因此,本实用新型的保护范围应以权利要求的保护范围为准。The above is only a preferred specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed by the utility model should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.
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