CN221707887U - A glass substrate online exposure adsorption platform - Google Patents

Abstract

The utility model discloses an online exposure adsorption platform for glass substrates, which belongs to the field of glass substrate exposure technology, and includes a suction cup assembly, an exposure unit, a Z-axis assembly, and a fixed roller conveyor assembly, wherein the suction cup assembly includes a suction cup connected to a negative pressure device and used to adsorb a glass substrate; the exposure unit is arranged above the suction cup assembly; the Z-axis assembly is used to drive the suction cup assembly to rise and fall; the roller conveyor assembly includes a plurality of conveying rollers used to convey the glass substrate; when the Z-axis assembly drives the suction cup to rise to a high position, the height of the top of the conveying roller is lower than the height of the upper surface of the suction cup, and when the Z-axis assembly drives the suction cup to drop to a low position, the height of the top of the conveying roller is higher than the height of the upper surface of the suction cup. The utility model reduces the actual exposure cost on the one hand, and saves the space occupied by the exposure equipment on the other hand, and can also be well integrated into the production line of the glass substrate.

Description

A glass substrate online exposure adsorption platform

Technical Field

The utility model belongs to the technical field of glass substrate exposure, and in particular relates to an online exposure adsorption platform for a glass substrate.

Background Art

Flat panel display (FPD) substrates have been widely used in computers, televisions, mobile phones and other fields. This liquid crystal display substrate is manufactured by preparing transparent thin film electrodes on a photosensitive substrate through photolithography. At present, with the development of technology and market demand, the size of glass substrates in the flat panel display industry continues to expand and the thickness continues to thin, so the production line has higher requirements for production technology. This large-size glass substrate is usually transferred between different process lines in the production line through conveyor rollers.

In the existing exposure process, a robot is usually used to pick up a glass substrate from a conveyor line, and the glass substrate is placed on the lifting platform of the exposure platform to position the glass substrate on the exposure platform. Subsequently, the exposure platform starts the vacuum, adsorbs the glass substrate, and begins exposure. After the exposure is completed, the glass is lifted up by the lifting platform, and the robot picks up the glass and puts it back on the conveyor line.

For example, the Chinese invention patent application with publication number CN110426921A discloses an exposure machine, which is used to draw circuits on a glass substrate. The exposure machine includes: a housing, a manipulator, a protective cover and a guide assembly. The housing is used to provide a closed working environment for the glass substrate. The manipulator is fixed in the housing and is used to transfer the glass substrate to the exposure area in the housing. This patent application requires the cooperation of the manipulator to realize the transportation of the glass substrate.

The above scheme has the following shortcomings:

First, to ensure the strength and rigidity of long robotic arms, the material of the robotic arms is usually carbon fiber, which is very expensive. At the same time, the cost of the large robotic arm itself is also very high.

Secondly, given that the glass substrate itself is very large, the size of the robot will increase in order to adapt to the glass substrate, resulting in the exposure station occupying a large clean room space.

Utility Model Content

The utility model aims to solve the problems of high cost and large occupied space of the mechanical arm in the existing exposure process, and proposes an online exposure adsorption platform for glass substrates.

In order to achieve the above purpose, the utility model adopts the following technical solutions:

A glass substrate online exposure adsorption platform, comprising:

A suction cup assembly, the suction cup assembly comprising a suction cup connected to the negative pressure device and used for adsorbing the glass substrate;

An exposure unit, arranged above the suction cup assembly;

A Z-axis assembly is used to drive the suction cup assembly to rise and fall; and

A fixed roller conveying assembly, wherein the roller conveying assembly includes a plurality of conveying rollers for conveying the glass substrate;

When the Z-axis assembly drives the suction cup to rise to a high position, the height of the top end of the conveying roller is lower than the height of the upper surface of the suction cup. When the Z-axis assembly drives the suction cup to drop to a low position, the height of the top end of the conveying roller is higher than the height of the upper surface of the suction cup.

Preferably, the suction cup is provided with a plurality of avoidance holes which penetrate vertically, and the conveying rollers correspond to the avoidance holes one by one.

Preferably, the roller conveyor assembly further comprises a plurality of transverse shafts, and the conveying rollers are concentrically fixed on the transverse shafts.

Preferably, the Z-axis assembly includes a Z-axis and a lifting plate fixed to the top end of the Z-axis, and the conveying roller is arranged between the suction cup and the lifting plate.

Preferably, the suction cup assembly further comprises a plurality of mounting posts, and the lifting plate is fixedly connected to the bottom of the suction cup via the mounting posts.

Preferably, the suction cup comprises a plurality of strip-shaped suction cup portions arranged horizontally side by side.

Preferably, an alignment component is further included, and the alignment component includes an alignment camera and an illumination light source, and the alignment camera and the illumination light source are respectively arranged on the upper and lower sides of the glass substrate.

Preferably, it also includes a regularization component, which includes a fixed lifting cylinder, a transverse cylinder arranged on the lifting cylinder piston rod, and a regularization guide wheel connected to the transverse cylinder piston rod.

Preferably, the tidying assembly also includes a cross frame fixedly connected to the transverse cylinder piston rod and a vertical shaft fixed at both ends of the cross frame, and the tidying guide wheel is rotatably connected to the top of the vertical shaft.

In summary, due to the adoption of the above technical solution, the beneficial effects of the utility model are:

In the utility model, the relative position between the suction cup and the conveying roller is adjusted by using the Z-axis assembly. When the glass substrate needs to be conveyed, the suction cup can be lowered to a low position by using the Z-axis assembly, so that the top end of the conveying roller protrudes from the upper surface of the suction cup, so that the glass substrate can be conveyed by using the conveying roller; and when the glass substrate needs to be adsorbed and fixed, the suction cup can be raised to a high position by using the Z-axis assembly, so that the conveying roller is stored between the suction cup and the lifting plate. At this time, the glass substrate contacts the upper surface of the suction cup, and the negative pressure device is started to adsorb and fix the glass substrate. During the whole process, there is no need to use a mechanical arm to move the glass substrate. On the one hand, the actual exposure cost is reduced, and on the other hand, the space occupied by the exposure equipment can be saved, and it can also be well integrated into the production line of the glass substrate.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG1 is a schematic diagram of the overall front view structure of an online exposure adsorption platform for a glass substrate proposed by the present invention;

FIG2 is a schematic diagram of a side cross-sectional structure of a suction cup assembly of an online exposure adsorption platform for a glass substrate proposed by the present invention;

FIG3 is a schematic structural diagram of a glass substrate online exposure adsorption platform suction cup assembly proposed by the present invention;

FIG4 is a schematic structural diagram of a glass substrate online exposure adsorption platform suction cup proposed by the present invention;

FIG5 is a schematic structural diagram of a glass substrate online exposure adsorption platform regularization component proposed by the present invention;

FIG6 is a schematic diagram of the relative positions of a regular guide wheel and a glass substrate of an online exposure adsorption platform for a glass substrate proposed by the present invention.

Legend: 1. Suction cup assembly; 11. Suction cup; 111. Strip suction cup part; 12. Avoidance hole; 13. Mounting column; 2. Exposure unit; 3. Z-axis assembly; 31. Z-axis; 32. Lifting plate; 4. Roller conveying assembly; 41. Conveying roller; 42. Horizontal axis; 5. Alignment assembly; 51. Alignment camera; 52. Illumination light source; 6. Regularization assembly; 61. Lifting cylinder; 62. Transverse cylinder; 63. Horizontal frame; 64. Vertical axis; 65. Regularization guide wheel.

DETAILED DESCRIPTION

The utility model is described below in conjunction with specific embodiments.

As shown in Figures 1 to 6, the glass substrate online exposure adsorption platform of this embodiment includes a suction cup assembly 1, an exposure unit 2, a Z-axis assembly 3 and a fixed roller conveyor assembly 4. Among them, the suction cup assembly 1 includes a suction cup 11 connected to the negative pressure device and used to adsorb the glass substrate. The suction cup 11 is used to adsorb the glass substrate so that the glass substrate remains stable during the exposure process. The exposure unit 2 is arranged above the suction cup assembly 1 and is used to expose the glass substrate. The exposure unit 2 is a prior art and is not further described here. The Z-axis assembly 3 is used to drive the suction cup assembly 1 to rise and fall. The roller conveyor assembly 4 is used to convey the glass substrate. The position of the roller conveyor assembly 4 in this embodiment does not change during actual use, that is, the position of the roller conveyor assembly 4 in the front and back, left and right, and up and down positions does not change. The roller conveyor assembly 4 includes a plurality of conveying rollers 41 for conveying the glass substrate. When the Z-axis assembly 3 drives the suction cup 11 to rise to a high position, the height of the top of the conveying roller 41 is lower than the height of the upper surface of the suction cup 11. When the Z-axis assembly 3 drives the suction cup 11 to drop to a low position, the height of the top of the conveying roller 41 is higher than the height of the upper surface of the suction cup 11.

The above four parts cooperate as follows during actual use: before the glass substrate is transported to the exposure adsorption platform through the upstream conveyor line, it is necessary to keep the height of the top of the conveying roller 41 on the roller conveyor assembly 4 higher than the height of the upper surface of the suction cup 11. At this time, the top of the conveying roller 41 is at the same height as the upper surface of the upstream conveyor line, so that when the glass substrate is transported by the upstream conveyor line, the glass substrate can be smoothly received by the conveying roller 41. After the conveying roller 41 successfully receives the glass substrate, the Z-axis assembly 3 is started to drive the suction cup assembly 1 to move upward, so that the height of the top of the conveying roller 41 is lower than the height of the upper surface of the suction cup 11. The glass substrate will contact the suction cup 11 at this time, and then the negative pressure device connected to the suction cup 11 is started, and the negative pressure generated by the negative pressure device can be used to absorb and fix the glass substrate, and then the exposure unit 2 can be used to expose the glass substrate. After the exposure is completed, the Z-axis component 3 is used to drive the suction cup 11 to move downward, so that the height of the top of the conveying roller 41 is higher than the height of the upper surface of the suction cup 11. At this time, the glass substrate after the exposure is completed is lifted up by the conveying roller 41 again, and then the conveying roller 41 is used to convey the glass substrate after the exposure to the downstream conveying line, and finally it is conveyed to the next station through the downstream conveying line.

As shown in Fig. 3 and Fig. 4, the suction cup 11 is provided with a plurality of escape holes 12 which penetrate from top to bottom, and the conveying rollers 41 correspond to the escape holes 12 one by one. When the Z-axis assembly 3 drives the suction cup 11 to descend to a low position, the top of the conveying roller 41 passes through the escape hole 12 from bottom to top until the top of the conveying roller 41 protrudes from the upper surface of the suction cup 11. The purpose of providing a plurality of escape holes 12 is to enable a plurality of conveying rollers 41 to be evenly arranged on the suction cup 11, so as to achieve comprehensive and stable support for the glass substrate.

In the present embodiment, since a large number of avoidance holes 12 are provided on the suction cup 11, it is difficult to set up a vacuum channel inside the suction cup 11. The suction cup 11 can adopt an "aluminum honeycomb structure" or an "aluminum base + microporous ceramic structure". By adopting these two structures, a large number of tiny holes can be arranged on the upper surface of the suction cup 11, so as to facilitate the adsorption of the glass substrate. Of course, the structure of the suction cup 11 can also adopt a structure in which a vacuum channel is arranged inside and an adsorption hole connected to the vacuum channel is opened on the top surface.

As shown in Fig. 2, the roller conveyor assembly 4 further includes a plurality of transverse shafts 42, and the conveying rollers 41 are concentrically fixed on the transverse shafts 42. In this embodiment, the length direction of the transverse shaft 42 is perpendicular to the conveying direction of the glass substrate, and the plurality of transverse shafts 42 are arranged side by side, and eight conveying rollers 41 are arranged on one transverse shaft 42. The plurality of transverse shafts 42 can be synchronously rotated by cooperating with the motor through a sprocket chain structure.

As shown in FIG. 2 , the Z-axis assembly 3 includes a Z-axis 31 and a lifting plate 32 fixed to the top of the Z-axis 31 , wherein the Z-axis 31 can be a servo electric cylinder, so that the height of the suction cup 11 can be finely adjusted, on the one hand, to achieve contact and separation between the glass substrate and the conveying roller 41 and the suction cup 11; on the other hand, to adjust the height of the exposure surface to adapt to glass substrates of different thicknesses. The conveying roller 41 is arranged between the suction cup 11 and the lifting plate 32, that is, when the Z-axis assembly 3 drives the suction cup 11 to rise to a high position, the conveying roller 41 is stored between the suction cup 11 and the lifting plate 32.

As shown in FIG. 4 , the suction cup assembly 1 further includes a plurality of mounting posts 13 , and the lifting plate 32 is fixedly connected to the bottom of the suction cup 11 via the mounting posts 13 .

In this embodiment, the suction cup 11 may be an integral plate-shaped structure, or may be composed of a plurality of strip-shaped suction cup portions 111 arranged horizontally side by side as shown in FIG. 3 .

As shown in Fig. 1 and Fig. 4, the online exposure adsorption platform of this embodiment further includes an alignment component 5, which includes an alignment camera 51 and an illumination light source 52. The alignment camera 51 and the illumination light source 52 are respectively arranged on the upper and lower sides of the glass substrate. In actual use, the illumination light source 52 is used for illumination when the alignment camera 51 is grasping the edge alignment.

As shown in Figures 2, 5 and 6, the online exposure adsorption platform of this embodiment also includes a regularization component 6, which includes a fixed lifting cylinder 61, a transverse cylinder 62 arranged on the piston rod of the lifting cylinder 61, and a regularization guide wheel 65 connected to the piston rod of the transverse cylinder 62.

Furthermore, the tidying component 6 also includes a horizontal frame 63 fixedly connected to the piston rod of the transverse cylinder 62 and a vertical shaft 64 fixed at both ends of the horizontal frame 63, and the tidying guide wheel 65 is rotatably connected to the top of the vertical shaft 64.

The aligning components 6 are arranged in front, behind, left and right of the suction cup 11, with a total of four groups. Initially, the aligning guide wheel 65 is lower than the surface of the suction cup 11. When the glass substrate is transported to the top of the suction cup 11, the lifting cylinder 61 is activated to drive the aligning guide wheel 65 to rise. At this time, the position of the aligning guide wheel 65 is shown by the dotted line in Figure 6, and there is a certain distance from the edge of the glass substrate; then, the lateral cylinder 62 is activated, and the aligning guide wheel 65 clamps the four sides of the glass substrate to achieve mechanical aligning, as shown by the solid line in Figure 6.

In actual use, this embodiment can also be provided with an electrostatic eliminator, which is arranged at the feeding end and the discharging end of the suction cup 11 to remove static electricity from the glass substrate. Specifically, the electrostatic eliminator can blow ion wind, which can break the vacuum of the suction cup 11 and eliminate static electricity on the surface of the glass substrate.

In the above scheme, the Z-axis assembly 3 is used to adjust the relative position between the suction cup 11 and the conveying roller 41. When the glass substrate needs to be conveyed, the suction cup 11 can be lowered to a low position by the Z-axis assembly 3, so that the top of the conveying roller 41 protrudes from the upper surface of the suction cup 11, so that the glass substrate can be conveyed by the conveying roller 41; and when the glass substrate needs to be adsorbed and fixed, the suction cup 11 can be raised to a high position by the Z-axis assembly 3, so that the conveying roller 41 is stored between the suction cup 11 and the lifting plate 32. At this time, the glass substrate contacts the upper surface of the suction cup 11, and the negative pressure device is started to adsorb and fix the glass substrate. During the whole process, there is no need to use a robot arm to move the glass substrate. On the one hand, the actual exposure cost is reduced, and on the other hand, the space occupied by the exposure equipment can be saved, and it can also be well integrated into the production line of the glass substrate.

Claims (9)

1. The utility model provides a glass substrate on-line exposure adsorption platform which characterized in that includes:

The sucker assembly (1), the sucker assembly (1) comprises a sucker (11) which is communicated with negative pressure equipment and used for sucking a glass substrate;

An exposure unit (2) arranged above the sucker assembly (1);

The Z-axis assembly (3) is used for driving the sucker assembly (1) to lift; and

The device comprises a roller conveying assembly (4) which is fixedly arranged, wherein the roller conveying assembly (4) comprises a plurality of conveying rollers (41) for conveying glass substrates;

When the Z-axis assembly (3) drives the sucker (11) to rise to a high position, the top end of the conveying roller (41) is lower than the upper surface of the sucker (11), and when the Z-axis assembly (3) drives the sucker (11) to descend to a low position, the top end of the conveying roller (41) is higher than the upper surface of the sucker (11).

2. The online exposure adsorption platform of the glass substrate according to claim 1, wherein a plurality of avoidance holes (12) which are vertically communicated are formed in the sucker (11), and the conveying rollers (41) are in one-to-one correspondence with the avoidance holes (12).

3. The on-line exposure and adsorption platform for glass substrates according to claim 1, wherein the roller conveying assembly (4) further comprises a plurality of transverse shafts (42), and the conveying rollers (41) are concentrically fixed on the transverse shafts (42).

4. The online exposure and adsorption platform for glass substrates according to claim 1, wherein the Z-axis assembly (3) comprises a Z-axis (31) and a lifting plate (32) fixed at the top end of the Z-axis (31), and the conveying roller (41) is arranged between the sucker (11) and the lifting plate (32).

5. The on-line exposure and adsorption platform for glass substrates according to claim 4, wherein the sucker assembly (1) further comprises a plurality of mounting posts (13), and the lifting plate (32) is fixedly connected to the bottom of the sucker (11) through the mounting posts (13).

6. An on-line exposure suction table for glass substrates according to claim 1, characterized in that the suction cup (11) comprises a plurality of strip-shaped suction cup portions (111) arranged horizontally side by side.

7. The on-line exposure adsorption platform for glass substrates according to claim 1, further comprising an alignment assembly (5), wherein the alignment assembly (5) comprises an alignment camera (51) and an illumination light source (52), and the alignment camera (51) and the illumination light source (52) are respectively arranged on the upper side and the lower side of the glass substrate.

8. The online exposure and adsorption platform for glass substrates according to claim 1, further comprising a regulating assembly (6), wherein the regulating assembly (6) comprises a lifting cylinder (61) fixedly arranged, a traversing cylinder (62) arranged on a piston rod of the lifting cylinder (61) and a regulating guide wheel (65) connected with the piston rod of the traversing cylinder (62).

9. The online exposure and adsorption platform for glass substrates according to claim 8, wherein the regulating assembly (6) further comprises a transverse frame (63) fixedly connected with a piston rod of the transverse moving cylinder (62) and vertical shafts (64) fixed at two ends of the transverse frame (63), and the regulating guide wheels (65) are rotatably connected to the tops of the vertical shafts (64).