CN221667956U - Vertical probe card and test equipment - Google Patents
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Abstract
Description
技术领域Technical Field
本实用新型涉及芯片测试技术领域,尤其涉及一种垂直探针卡及测试设备。The utility model relates to the technical field of chip testing, in particular to a vertical probe card and testing equipment.
背景技术Background Art
芯片是指内含集成电路的硅片,体积很小,常常是计算机或其他电子设备的一部分。随着科技的发展,芯片成为了目前电子设备中不可或缺的一个重要组成部分。在芯片生产完毕后,一般采用垂直探针卡检测芯片的功能是否完整。A chip is a small silicon wafer containing an integrated circuit. It is often part of a computer or other electronic device. With the development of technology, chips have become an indispensable part of current electronic devices. After the chip is produced, a vertical probe card is generally used to test whether the chip is fully functional.
现有技术中,通常利用垂直探针卡的探针接触芯片来进行芯片的测试。然而,探针在接触芯片时会对芯片产生压力以保证测试的准确,根据芯片的不同,探针对芯片的压力需求也不同,故需要针对不同种类的芯片来设计垂直探针卡,导致垂直探针卡通用性不足,备货成本高。In the prior art, the chip is usually tested by contacting the chip with the probe of a vertical probe card. However, when the probe contacts the chip, it will generate pressure on the chip to ensure the accuracy of the test. The pressure requirements of the probe on the chip vary depending on the chip, so vertical probe cards need to be designed for different types of chips, resulting in insufficient universality of vertical probe cards and high stocking costs.
实用新型内容Utility Model Content
本实用新型的目的在于提出一种垂直探针卡及测试设备,能够改变探针抵接芯片时的压力,从而提高该垂直探针卡的通用性,降低备货成本。The utility model aims to provide a vertical probe card and a testing device, which can change the pressure when the probe abuts against the chip, thereby improving the versatility of the vertical probe card and reducing the stocking cost.
为达此目的,本实用新型采用以下技术方案:To achieve this purpose, the utility model adopts the following technical solutions:
一种垂直探针卡,包括:A vertical probe card comprising:
探头,包括探针组件以及间隔设置的第一固定件和第二固定件,所述探针组件包括相连接的探针和连接线,所述第一固定件开设有第一通孔,所述第二固定件开设有与所述第一通孔对应设置的第二通孔,所述探针穿设于所述第一通孔并凸出所述第一固定件,所述探针能够在所述第一通孔内滑动,所述连接线穿设于所述第二通孔并与所述第二通孔过盈配合,所述第一固定件能够相对于所述第二固定件横向移动以调节对应的所述第一通孔和所述第二通孔的偏移量。A probe comprises a probe assembly and a first fixing member and a second fixing member arranged at intervals, wherein the probe assembly comprises a connected probe and a connecting wire, the first fixing member is provided with a first through hole, the second fixing member is provided with a second through hole arranged corresponding to the first through hole, the probe is passed through the first through hole and protrudes from the first fixing member, the probe can slide in the first through hole, the connecting wire is passed through the second through hole and has an interference fit with the second through hole, and the first fixing member can move laterally relative to the second fixing member to adjust the corresponding offset of the first through hole and the second through hole.
作为上述垂直探针卡的可选方案,所述探头还包括连接座,所述连接座开设有连通孔,所述第一固定件和所述第二固定件分别设置于所述连接座的相对两侧,所述探针组件穿过所述连通孔。As an optional solution of the vertical probe card, the probe head further includes a connection seat, the connection seat is provided with a connecting hole, the first fixing member and the second fixing member are respectively arranged on opposite sides of the connection seat, and the probe assembly passes through the connecting hole.
作为上述垂直探针卡的可选方案,所述第一固定件与所述连接座滑动连接。As an optional solution of the vertical probe card, the first fixing member is slidably connected to the connecting seat.
作为上述垂直探针卡的可选方案,所述连接座与所述第一固定件中的一个开设有滑槽,所述连接座与所述第一固定件中的另一个凸设有滑块,所述滑块滑动设置于所述滑槽内。As an optional solution of the vertical probe card, one of the connecting seat and the first fixing member is provided with a slide groove, and the other of the connecting seat and the first fixing member is provided with a slider protruding therefrom, and the slider is slidably disposed in the slide groove.
作为上述垂直探针卡的可选方案,所述垂直探针卡还包括固定座,所述固定座开设有过孔,所述探头与所述固定座固定连接,所述连接线穿过所述过孔。As an optional solution of the vertical probe card, the vertical probe card further includes a fixing seat, the fixing seat is provided with a via hole, the probe is fixedly connected to the fixing seat, and the connecting line passes through the via hole.
作为上述垂直探针卡的可选方案,所述探头还包括调节杆,所述调节杆穿过所述固定座并与所述固定座转动连接,所述调节杆与所述探头螺纹连接。As an optional solution of the vertical probe card, the probe further includes an adjusting rod, the adjusting rod passes through the fixing seat and is rotatably connected to the fixing seat, and the adjusting rod is threadedly connected to the probe.
作为上述垂直探针卡的可选方案,所述固定座设置有容纳槽,所述过孔开设于所述容纳槽的槽底,所述固定座与所述第二固定件固定连接,所述调节杆穿过所述容纳槽的侧壁。As an optional solution of the vertical probe card, the fixing seat is provided with a receiving groove, the via hole is opened at the bottom of the receiving groove, the fixing seat is fixedly connected to the second fixing member, and the adjusting rod passes through the side wall of the receiving groove.
作为上述垂直探针卡的可选方案,所述垂直探针卡还包括PCB板,所述PCB板套设于所述探头的外周并与所述固定座固定连接,所述连接线绕过所述固定座并连接于所述PCB板。As an optional solution of the vertical probe card, the vertical probe card further includes a PCB board, which is sleeved on the outer periphery of the probe and fixedly connected to the fixing seat, and the connecting wire bypasses the fixing seat and is connected to the PCB board.
作为上述垂直探针卡的可选方案,所述探头包括多组所述探针组件,所述第一固定件开设有多个第一通孔,所述第二固定件开设有与所述第一通孔一一对应设置的多个所述第二通孔。As an optional solution of the vertical probe card, the probe head includes a plurality of probe assemblies, the first fixing member is provided with a plurality of first through holes, and the second fixing member is provided with a plurality of second through holes arranged in one-to-one correspondence with the first through holes.
一种测试设备,包括所述的垂直探针卡。A testing device comprises the vertical probe card.
本实用新型的有益效果:Beneficial effects of the utility model:
本实用新型提供了一种垂直探针卡及测试设备。该垂直探针卡中,探针与连接线直接相连,由于探针能够在第一通孔内滑动,而连接线与第二通孔过盈配合,故连接线能够为探针提供一定的支撑,而且随着第一通孔与第二通孔之间偏移量的增大,连接线对探针的支撑力会逐渐减小,从而使探针在抵接芯片时对芯片的压力可调。The utility model provides a vertical probe card and a test device. In the vertical probe card, the probe is directly connected to the connecting wire. Since the probe can slide in the first through hole and the connecting wire is interference fit with the second through hole, the connecting wire can provide a certain support for the probe. Moreover, as the offset between the first through hole and the second through hole increases, the supporting force of the connecting wire on the probe will gradually decrease, so that the pressure of the probe on the chip when it abuts the chip can be adjusted.
该垂直探针卡能够通过调节第一通孔与第二通孔之间的偏移量来改变探针抵接芯片时的压力,从而提高该垂直探针卡的通用性,降低备货成本。The vertical probe card can change the pressure when the probe abuts against the chip by adjusting the offset between the first through hole and the second through hole, thereby improving the versatility of the vertical probe card and reducing the stocking cost.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1是本实用新型提供的垂直探针卡的结构示意图一;FIG1 is a schematic diagram of the structure of a vertical probe card provided by the present invention;
图2是本实用新型提供的垂直探针卡的结构示意图二;FIG2 is a second structural schematic diagram of a vertical probe card provided by the present invention;
图3是本实用新型提供的探头的结构示意图;FIG3 is a schematic diagram of the structure of the probe provided by the utility model;
图4是本实用新型提供的探针组件的结构示意图;FIG4 is a schematic diagram of the structure of the probe assembly provided by the utility model;
图5是本实用新型提供的第一固定件和第二固定件的结构示意图;FIG5 is a schematic structural diagram of a first fixing member and a second fixing member provided by the present invention;
图6是本实用新型提供的固定座的结构示意图。FIG. 6 is a schematic structural diagram of a fixing seat provided by the present invention.
图中:In the figure:
1、探头;2、固定座;3、PCB板;1. Probe; 2. Fixing seat; 3. PCB board;
11、第一固定件;12、第二固定件;13、探针组件;14、连接座;15、调节杆;21、容纳槽;22、过孔;11. first fixing member; 12. second fixing member; 13. probe assembly; 14. connecting seat; 15. adjusting rod; 21. receiving groove; 22. through hole;
111、第一通孔;112、滑块;121、第二通孔;141、滑槽;131、探针;132、连接线。111, first through hole; 112, slider; 121, second through hole; 141, slide groove; 131, probe; 132, connecting wire.
具体实施方式DETAILED DESCRIPTION
下面详细描述本实用新型的实施例,实施例的示例在附图中示出,其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的,旨在用于解释本实用新型,而不能理解为对本实用新型的限制。The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.
在本实用新型的描述中,需要说明的是,术语“中心”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本实用新型和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本实用新型的限制。此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性。其中,术语“第一位置”和“第二位置”为两个不同的位置。In the description of the present utility model, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.
除非另有明确的规定和限定,术语“安装”、“相连”、“连接”、“固定”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本实用新型中的具体含义。Unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.
除非另有明确的规定和限定,第一特征在第二特征之“上”或之“下”可以包括第一特征和第二特征直接接触,也可以包括第一特征和第二特征不是直接接触而是通过它们之间的另外的特征接触。而且,第一特征在第二特征“之上”、“上方”和“上面”包括第一特征在第二特征正上方和斜上方,或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”包括第一特征在第二特征正下方和斜下方,或仅仅表示第一特征水平高度小于第二特征。Unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may include the first feature being in direct contact with the second feature, or may include the first feature being in contact with the second feature through another feature between them instead of being in direct contact. Moreover, a first feature being “above”, “above”, and “above” a second feature may include the first feature being directly above and obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may include the first feature being directly below and obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.
下面结合附图并通过具体实施方式来进一步说明本实用新型的技术方案。The technical solution of the utility model is further explained below with reference to the accompanying drawings and through specific implementation methods.
本实施例提供了一种测试设备,该测试设备包括垂直探针卡和测试台,将待测芯片置于测试台上,移动垂直探针卡至待测芯片的上方后向下移动垂直探针卡,直至垂直探针卡的探针抵接待测芯片,即可开始进行测试。The present embodiment provides a testing device, which includes a vertical probe card and a testing table. The chip to be tested is placed on the testing table, the vertical probe card is moved above the chip to be tested, and then the vertical probe card is moved downward until the probes of the vertical probe card contact the chip to be tested, and then the test can begin.
如图1~图5所示,本实施例提供的垂直探针卡包括探头1,探头1包括探针组件13以及间隔设置的第一固定件11和第二固定件12,探针组件13包括相连接的探针131和连接线132,第一固定件11开设有第一通孔111,第二固定件12开设有与第一通孔111对应设置的第二通孔121,探针131穿设于第一通孔111并凸出第一固定件11,探针131能够在第一通孔111内滑动,连接线132穿设于第二通孔121并与第二通孔121过盈配合,第一固定件11能够相对于第二固定件12横向移动以调节对应的第一通孔111和第二通孔121的偏移量。As shown in Figures 1 to 5, the vertical probe card provided in this embodiment includes a probe 1, which includes a probe assembly 13 and a first fixing member 11 and a second fixing member 12 arranged at intervals. The probe assembly 13 includes a probe 131 and a connecting line 132 connected to each other. The first fixing member 11 is provided with a first through hole 111, and the second fixing member 12 is provided with a second through hole 121 corresponding to the first through hole 111. The probe 131 is penetrated through the first through hole 111 and protrudes out of the first fixing member 11. The probe 131 can slide in the first through hole 111, the connecting line 132 is penetrated through the second through hole 121 and has an interference fit with the second through hole 121, and the first fixing member 11 can move laterally relative to the second fixing member 12 to adjust the offset of the corresponding first through hole 111 and second through hole 121.
该垂直探针卡中,探针131与连接线132直接相连,由于探针131能够在第一通孔111内滑动,而连接线132与第二通孔121过盈配合,连接线132能够为探针131提供一定的支撑。而且,当第一通孔111与第二通孔121正对时,支撑力的方向与连接线132的轴向相同,此时支撑力最大;随着第一通孔111与第二通孔121之间偏移量的增大,连接线132弯折,对探针131的支撑力会逐渐减小,从而使探针131在抵接芯片时对芯片的压力可调。In the vertical probe card, the probe 131 is directly connected to the connecting wire 132. Since the probe 131 can slide in the first through hole 111, and the connecting wire 132 is interference fit with the second through hole 121, the connecting wire 132 can provide a certain support for the probe 131. Moreover, when the first through hole 111 and the second through hole 121 are facing each other, the direction of the supporting force is the same as the axial direction of the connecting wire 132, and the supporting force is the largest at this time; as the offset between the first through hole 111 and the second through hole 121 increases, the connecting wire 132 bends, and the supporting force on the probe 131 will gradually decrease, so that the pressure of the probe 131 on the chip when it abuts against the chip can be adjusted.
该垂直探针卡能够通过相对滑动第二固定件12与第一固定件11来调节第一通孔111与第二通孔121之间的偏移量,以改变探针131抵接芯片时的压力,从而提高该垂直探针卡的通用性,降低备货成本。The vertical probe card can adjust the offset between the first through hole 111 and the second through hole 121 by relatively sliding the second fixing member 12 and the first fixing member 11 to change the pressure when the probe 131 abuts the chip, thereby improving the versatility of the vertical probe card and reducing the stocking cost.
如图3所示,探头1还包括连接座14,连接座14开设有连通孔,第一固定件11和第二固定件12分别设置于连接座14的相对两侧,探针组件13穿过连通孔。连接座14能够对第一固定件11和第二固定件12起到支撑和固定的作用,且能够将第一固定件11和第二固定件12隔开一定的距离。当第一通孔111与第二通孔121的偏移量一定时,第一固定件11和第二固定件12之间的距离越大,第一通孔111与第二通孔121之间的连接线132的倾斜角度也越小,通过选用不同厚度的连接座14即可改变该探头1的探针131的抵接压力的调整灵敏度。As shown in FIG3 , the probe 1 further includes a connection seat 14, the connection seat 14 is provided with a connecting hole, the first fixing member 11 and the second fixing member 12 are respectively arranged on opposite sides of the connection seat 14, and the probe assembly 13 passes through the connecting hole. The connection seat 14 can support and fix the first fixing member 11 and the second fixing member 12, and can separate the first fixing member 11 and the second fixing member 12 by a certain distance. When the offset of the first through hole 111 and the second through hole 121 is constant, the greater the distance between the first fixing member 11 and the second through hole 121, the smaller the inclination angle of the connecting line 132 between the first through hole 111 and the second through hole 121. By selecting connection seats 14 of different thicknesses, the adjustment sensitivity of the abutment pressure of the probe 131 of the probe 1 can be changed.
具体地,第一通孔111与第二通孔121之间的距离为6~10mm。其中,第一通孔111与第二通孔121之间的距离可以为6mm、7mm、8mm、9mm或10mm。Specifically, the distance between the first through hole 111 and the second through hole 121 is 6-10 mm. The distance between the first through hole 111 and the second through hole 121 may be 6 mm, 7 mm, 8 mm, 9 mm or 10 mm.
在本实施例中,第一固定件11与连接座14滑动连接。也就是说,第二固定件12与连接座14固定连接,通过移动固定座2即可调节第一通孔111与第二通孔121之间的偏移量。In this embodiment, the first fixing member 11 is slidably connected to the connecting seat 14. That is, the second fixing member 12 is fixedly connected to the connecting seat 14, and the offset between the first through hole 111 and the second through hole 121 can be adjusted by moving the fixing seat 2.
在其他实施例中,也可以是第二固定件12与连接座14滑动连接,此时第一固定件11与连接座14固定连接,同样可以通过移动固定座2来调节第一通孔111与第二通孔121之间的偏移量。In other embodiments, the second fixing member 12 may be slidably connected to the connecting seat 14 , and the first fixing member 11 may be fixedly connected to the connecting seat 14 . The offset between the first through hole 111 and the second through hole 121 may also be adjusted by moving the fixing seat 2 .
优选地,连接座14与第一固定件11之间的一个开设有滑槽141,连接座14与第一固定件11中的另一个凸设有滑块112,滑块112滑动设置于滑槽141内。滑槽141与滑块112之间的滑动连接能够提高第一固定件11相对于连接座14移动时的稳定性与位置的准确性,从而能够根据第一通孔111与第二通孔121的偏移量来准确调节探针131抵接待测芯片时的压力,从而避免压力过大压坏芯片或压力过小导致测试数据不准确。Preferably, a slide groove 141 is provided between one of the connection base 14 and the first fixing member 11, and a slider 112 is convexly provided between the other of the connection base 14 and the first fixing member 11, and the slider 112 is slidably disposed in the slide groove 141. The sliding connection between the slide groove 141 and the slider 112 can improve the stability and position accuracy of the first fixing member 11 when it moves relative to the connection base 14, so that the pressure of the probe 131 when it abuts against the chip to be tested can be accurately adjusted according to the offset between the first through hole 111 and the second through hole 121, so as to avoid excessive pressure that damages the chip or too little pressure that causes inaccurate test data.
如图3所示,在本实施例中,连接座14开设有滑槽141,第一固定件11凸设有滑块112。As shown in FIG. 3 , in this embodiment, the connecting seat 14 is provided with a sliding groove 141 , and the first fixing member 11 is provided with a sliding block 112 .
如图1和图2所示,垂直探针卡还包括固定座2,固定座2开设有过孔22,探头1与固定座2固定连接,连接线132穿过过孔22。固定座2为该垂直探针卡与测试设备相连接的结构,连接线132穿过过孔22后与测试设备相连接,能够将探针131的信号传递给测试设备。As shown in Fig. 1 and Fig. 2, the vertical probe card also includes a fixing seat 2, the fixing seat 2 is provided with a via 22, the probe 1 is fixedly connected to the fixing seat 2, and the connecting wire 132 passes through the via 22. The fixing seat 2 is a structure for connecting the vertical probe card to the test equipment, and the connecting wire 132 passes through the via 22 and is connected to the test equipment, so that the signal of the probe 131 can be transmitted to the test equipment.
进一步地,固定座2通过连接座14与探头1固定连接,以便于保证探针131在水平方向上不会与固定座2产生相对移动,保证探针131与固定座2在水平方向上位置的一致性,便于测试设备通过固定座2的定位来实现探针131的精准定位,保证探针131能够准确抵接到待测芯片的正确的检测位置。Furthermore, the fixing seat 2 is fixedly connected to the probe 1 via the connecting seat 14, so as to ensure that the probe 131 will not move relative to the fixing seat 2 in the horizontal direction, and to ensure the consistency of the positions of the probe 131 and the fixing seat 2 in the horizontal direction, so as to facilitate the testing equipment to realize the precise positioning of the probe 131 through the positioning of the fixing seat 2, and to ensure that the probe 131 can accurately abut the correct detection position of the chip to be tested.
在其他实施例中,固定座2也可以通过第一固定件11与探头1固定连接,该种结构下,在调节第一通孔111与第二通孔121之间的偏移量时,探针131与固定座2之间在水平方向上的相对位置会发生改变,但只需要保证第一固定件11与第二固定件12之间相对位置调节时的精度,同样能够保证探针131能够准确抵接到待测芯片的正确的检测位置。In other embodiments, the fixing base 2 may also be fixedly connected to the probe 1 via the first fixing member 11. Under this structure, when adjusting the offset between the first through hole 111 and the second through hole 121, the relative position between the probe 131 and the fixing base 2 in the horizontal direction will change. However, it is only necessary to ensure the accuracy of the relative position adjustment between the first fixing member 11 and the second fixing member 12. This can also ensure that the probe 131 can accurately abut against the correct detection position of the chip to be tested.
如图1和图2所示,垂直探针卡还包括PCB板3,PCB板3套设于探头1的外周并与固定座2固定连接,连接线132绕过固定座2并连接于PCB板3。PCB板3与固定座2固定连接,能够作为探针131的信号的转接板连接测试设备,而连接线132与PCB连接后,连接线132几乎不会因探头1位置的移动而改变弯折程度,也就提高了连接线132和探针131的使用寿命,还能够避免连接线132的弯折程度改变而影响探针131对待测芯片的抵接压力。As shown in Fig. 1 and Fig. 2, the vertical probe card further includes a PCB board 3, which is sleeved on the outer periphery of the probe 1 and fixedly connected to the fixing seat 2, and the connecting wire 132 bypasses the fixing seat 2 and is connected to the PCB board 3. The PCB board 3 is fixedly connected to the fixing seat 2, and can be used as an adapter board for the signal of the probe 131 to connect the test equipment. After the connecting wire 132 is connected to the PCB, the bending degree of the connecting wire 132 will hardly change due to the movement of the position of the probe 1, which improves the service life of the connecting wire 132 and the probe 131, and can also prevent the bending degree of the connecting wire 132 from changing and affecting the contact pressure of the probe 131 on the chip to be tested.
在本实施例中,为了便于移动第一固定件11,探头1还包括调节件,通过调节件能够驱动第一固定件11与第二固定件12相对移动,以改变连接线132在第一通孔111与第二通孔121之间的倾斜程度,从而调整探针131在抵接待测芯片时对待测芯片的压力。In this embodiment, in order to facilitate the movement of the first fixing member 11, the probe 1 also includes an adjusting member, which can drive the first fixing member 11 and the second fixing member 12 to move relative to each other, so as to change the inclination of the connecting line 132 between the first through hole 111 and the second through hole 121, thereby adjusting the pressure of the probe 131 on the chip to be tested when it contacts the chip to be tested.
如图1所示,调节件为调节杆15,调节杆15穿过固定座2并与固定座2转动连接,调节杆15与探头1螺纹连接。通过转动调节杆15,即可使第一固定件11相对于第二固定件12移动。As shown in Fig. 1, the adjusting member is an adjusting rod 15, which passes through the fixing seat 2 and is rotatably connected to the fixing seat 2, and the adjusting rod 15 is threadedly connected to the probe 1. By rotating the adjusting rod 15, the first fixing member 11 can be moved relative to the second fixing member 12.
在其他实施例中,调节件还可以是滑杆,通过推拉调节杆15同样可以是第一固定件11相对于第二固定件12移动。In other embodiments, the adjusting member may also be a sliding rod, and the first fixing member 11 may also be moved relative to the second fixing member 12 by pushing and pulling the adjusting rod 15 .
在本实施例中,若探头1是通过第一固定件11与固定座2相连接,则调节件连接于连接座14,若探头1是通过连接座14与固定座2相连接,则调节件连接于第一固定件11。In this embodiment, if the probe 1 is connected to the fixing base 2 via the first fixing member 11 , the adjusting member is connected to the connecting base 14 ; if the probe 1 is connected to the fixing base 2 via the connecting base 14 , the adjusting member is connected to the first fixing member 11 .
如图6所示,固定座2设置有容纳槽21,过孔22开设于容纳槽21的槽底,固定座2与第二固定件12固定连接,调节杆15穿过容纳槽21的侧壁。将探头1设置于容纳槽21内,能够通过固定座2对探头1起到保护作用,而调节杆15穿过容纳槽21的侧壁,便于调节第一通孔111与第二通孔121之间的偏移量,提高调节效率。As shown in Fig. 6, the fixing seat 2 is provided with a receiving groove 21, the through hole 22 is opened at the bottom of the receiving groove 21, the fixing seat 2 is fixedly connected to the second fixing member 12, and the adjusting rod 15 passes through the side wall of the receiving groove 21. The probe 1 is arranged in the receiving groove 21, and the fixing seat 2 can protect the probe 1, and the adjusting rod 15 passes through the side wall of the receiving groove 21, which is convenient for adjusting the offset between the first through hole 111 and the second through hole 121, thereby improving the adjustment efficiency.
可以理解的是,待测芯片的测试点位通常来说会有很多个,为了能够提高测试效率,探头1包括多组探针组件13,第一固定件11开设有多个第一通孔111,第二固定件12开设有与第一通孔111一一对应设置的多个第二通孔121。多组探针131分别对应待测芯片的多个测试点位,而且通过驱动第一固定件11与第二固定件12相对移动,能够同时调节全部探针131抵接待测芯片时的压力,方便快捷。It is understandable that there are usually many test points of the chip to be tested. In order to improve the test efficiency, the probe 1 includes multiple groups of probe assemblies 13. The first fixing member 11 is provided with multiple first through holes 111, and the second fixing member 12 is provided with multiple second through holes 121 arranged one-to-one corresponding to the first through holes 111. The multiple groups of probes 131 correspond to multiple test points of the chip to be tested, and by driving the first fixing member 11 and the second fixing member 12 to move relative to each other, the pressure of all the probes 131 against the chip to be tested can be adjusted simultaneously, which is convenient and quick.
以上内容仅为本实用新型的较佳实施例,对于本领域的普通技术人员,依据本实用新型的思想,在具体实施方式及应用范围上均会有改变之处,本说明书内容不应理解为对本实用新型的限制。The above contents are only preferred embodiments of the present invention. For ordinary technicians in this field, according to the concept of the present invention, there will be changes in the specific implementation methods and application scopes. The contents of this specification should not be understood as limiting the present invention.
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