CN221551840U - Adjustable wafer box flower basket - Google Patents

Abstract

The utility model discloses an adjustable wafer box flower basket which comprises an outer frame, a chute mechanism, a clamping mechanism and a limiting mechanism, wherein the outer frame is of a cuboid frame structure with an open top, and an opening for a wafer box to enter and exit is formed in the front side wall of the outer frame; the sliding groove mechanism can be installed at the bottom of the outer frame in a left-right moving way and is used for limiting and supporting a supporting plate at the bottom of the wafer box; the clamping mechanism can be arranged on the left side wall and the right side wall of the outer frame in a vertically movable manner and is used for clamping and limiting the extension part at the top of the wafer box; the limiting mechanism can be rotatably arranged on the front side of the outer frame and used for shielding or exposing the opening so as to limit or release the wafer box. According to the adjustable wafer box flower basket, the size of the internal accommodating space can be adjusted according to the requirement, so that the adjustable wafer box flower basket is suitable for multiple sizes of boxes.

Description

Adjustable wafer box flower basket

Technical Field

The utility model relates to the technical field of silicon carbide crystals, in particular to an adjustable wafer box flower basket.

Background

Currently, more bath cleaning is used for cleaning silicon carbide wafers than single-wafer cleaning. The trough type cleaning is usually carried out by putting the box into a basket and then putting the basket into a cleaning trough. In addition to the conventional 6-inch and 8-inch wafers, the existing wafers have wafers with non-conventional sizes of 153mm, 155mm, 157mm, 159mm and the like, and correspondingly, cassettes with different sizes are also provided.

Considering that the existing flower basket generally corresponds to a size of the flower basket, if the slightly smaller size of the flower basket is put into the larger size of the flower basket, the flower basket can shake due to the clearance and is not firmly fixed; if a cassette of a slightly larger size is placed in a smaller sized basket, the wafer is easily bumped, thereby causing debris. Therefore, there is an urgent need for a flower basket that can accommodate different sized boxes.

Disclosure of Invention

The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, the utility model provides an adjustable wafer box flower basket which can adjust the size of an internal accommodating space so as to be suitable for multi-size boxes.

According to an embodiment of the utility model, an adjustable wafer box flower basket comprises:

The outer frame is of a cuboid frame structure with an open top, and an opening for the cassette to enter and exit is formed in the front side wall of the outer frame;

The sliding groove mechanism can be installed at the bottom of the outer frame in a left-right moving way and is used for limiting and supporting a supporting plate at the bottom of the wafer box;

The clamping mechanism can be arranged on the left side wall and the right side wall of the outer frame in a vertically movable manner and is used for clamping and limiting the extension part at the top of the wafer box;

And the limiting mechanism can be rotatably arranged on the front side of the outer frame and is used for shielding or exposing the opening so as to limit or release the wafer box.

According to the adjustable wafer box flower basket, the structure of the existing flower basket is improved, and the adjustment of the size of the internal accommodating space is changed by means of the adjustment and the matching of the positions of the sliding groove mechanism and the clamping mechanism, so that the limit of the bottoms and the tops of the wafer boxes with different sizes is realized; meanwhile, the device is prevented from shaking or sliding out in the outer frame under the action of the limiting mechanism.

In some embodiments, the sliding groove mechanism comprises two supporting plates which are arranged in parallel, wherein sliding grooves matched with the supporting plates are arranged on the supporting plates along the axial direction of the supporting plates, and the front ends of the sliding grooves penetrate through the front ends of the supporting plates; the support plate is mounted on the bottom plate of the outer frame so as to be movable left and right.

In some embodiments, the front end and the rear end of the bottom surface of the supporting plate are respectively provided with a first threaded hole, the bottom plate of the outer frame is provided with first long strip-shaped holes which are symmetrically arranged, and the outer frame is connected with the supporting plate through a first bolt component.

In some embodiments, the bottom of the chute at the front end is arc-shaped.

In some embodiments, the width of the front end of the chute gradually decreases from front to back.

In some embodiments, the clamping mechanism comprises two symmetrically arranged clamping assemblies, the clamping assemblies comprise an upper clamping plate and a lower clamping plate which are arranged in parallel up and down, the upper clamping plate and the lower clamping plate are all mounted on the side wall of the outer frame in an up-and-down movable mode, and the upper clamping plate and the lower clamping plate jointly define a space for clamping and limiting the extension part of the wafer box.

In some embodiments, the front end and the rear end of the side walls of the upper clamping plate and the lower clamping plate are respectively provided with a second threaded hole, the left side wall and the right side wall of the outer frame are respectively provided with a second long strip-shaped hole which is symmetrically arranged, and the outer frame is connected with the upper clamping plate/the lower clamping plate through a second bolt assembly.

In some embodiments, the front end of the upper clamping plate is concave arc-shaped.

In some embodiments, the limiting mechanism comprises a U-shaped limiting rod, guide grooves are symmetrically formed in the left end and the right end of the front side wall of the outer frame, sliding blocks capable of moving up and down along the guide grooves are arranged in the guide grooves, and two ends of the limiting rod are respectively connected with the two sliding blocks; the limiting rod is provided with a first working state and a second working state, and in the first working state, the limiting rod is positioned at the lowest end of the guide groove so as to limit the wafer box in the outer frame; in the second working state, the limiting mechanism moves to the upper part of the guide groove, so that the wafer box can enter and exit from the opening.

In some embodiments, an inverted L-shaped hook is disposed at a position of the top of the outer frame near the front end, and when the limit rod is located at the uppermost end of the guide groove, the limit rod can rotate upwards to be hung on the L-shaped hook.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

FIG. 1 is a schematic diagram of a conventional cassette;

FIG. 2 is a schematic view of a cassette loaded with an adjustable wafer cassette flower basket of the present utility model;

FIG. 3 is a schematic view of another view of the present utility model;

FIG. 4 is a schematic perspective view of the present utility model;

FIG. 5 is a schematic view of the front portion of the support plate of the present utility model;

FIG. 6 is a top view of FIG. 5;

FIG. 7 is a schematic view of another mounting of the support plate of the present utility model;

Fig. 8 is a schematic view of the use state of the utility model when the L-shaped hook is added.

Reference numerals:

An adjustable wafer cassette basket 100;

An outer frame 10; a first elongated hole 11; a second elongated hole 12; a guide groove 13; a slider 14; an L-shaped hook 15;

a chute mechanism 20; a support plate 21; a chute 211;

A clamping mechanism 30; an upper clamping plate 31; a lower clamping plate 32;

A limiting mechanism 40; a stopper rod 41;

A first bolt assembly 50;

a positioning mechanism 60; a bidirectional screw 61; a guide block 62; a positioning block 63; a knob 64;

A second bolt assembly 70;

cassette 200;

a cassette body 201; an extension 202; against the plate 203.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present utility model and should not be construed as limiting the utility model.

The following disclosure provides many different embodiments, or examples, for implementing different structures of the utility model. In order to simplify the present disclosure, components and arrangements of specific examples are described below. They are, of course, merely examples and are not intended to limit the utility model. Furthermore, the present utility model may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present utility model provides examples of various specific processes and materials, but one of ordinary skill in the art will recognize the applicability of other processes and/or the use of other materials.

For ease of understanding, the following description will be given for a brief description of an existing wafer cassette with reference to the accompanying drawings.

Fig. 1 is a schematic diagram of a conventional wafer cassette. As shown in fig. 1, the whole wafer box 200 may include a box body 201, extension portions 202 extending outwards are symmetrically disposed on left and right sides of a top end of the box body 201, supporting plates 203 extending vertically downwards are symmetrically disposed on left and right sides of a bottom end of the box body 201, a plurality of placing grooves (not shown in the drawing) for placing wafers are disposed in parallel in the box body 201, and the placing grooves and the supporting plates 203 are disposed vertically to each other. Wherein, two parallel support boards 203 mainly play a supporting role, and two extension parts 202 mainly play a role of holding and convenient carrying. When in use, a plurality of wafers are generally inserted into the wafer box body 201 in sequence, then the whole wafer box body 201 and the wafers are put into a flower basket together, and finally the flower basket is put into a cleaning tank of a cleaning machine for cleaning.

In order to avoid the shake of the box 200 in the flower basket, in the practical use process, the flower basket with one specification can only adapt to the box 200 with one size, so that the flower baskets with different specifications need to be stored, and the cost is high; moreover, when the cassette 200 of different sizes is handled, the basket needs to be replaced, and the operation is troublesome.

In view of the above, the embodiment of the utility model provides an adjustable wafer cassette basket 100, which can adapt to cassettes 200 with different sizes by changing the structure of the existing basket so that the internal accommodating space is adjustable.

An adjustable wafer cassette basket 100 according to an embodiment of the present utility model is described below with reference to fig. 2-8, and includes an outer frame 10, a chute mechanism 20, a clamping mechanism 30, and a spacing mechanism 40.

Referring to fig. 1 to 8, an outer frame 10 is a rectangular parallelepiped frame structure with an open top, and a front side wall of the outer frame 10 is formed with an opening for a cassette 200 to enter and exit; the sliding chute mechanism 20 is movably installed at the bottom of the outer frame 10 left and right, and is used for limiting and supporting the supporting plate 203 at the bottom of the box 20, and limiting and supporting the bottom of the box 200 with different widths are realized by adjusting the left and right positions of the sliding chute mechanism 20, so that the box is prevented from shaking left and right in the flower basket 100; clamping mechanisms 30 are movably installed on the left and right side walls of the outer frame 10 up and down and are used for clamping and limiting the extending parts 202 at the top of the card box 200, and the up and down positions of the clamping mechanisms 30 are adjusted to realize the clamping and limiting of the extending parts 202 at the top of the card box 200 with different heights so as to prevent the extending parts 202 from shaking up and down in the flower basket 100; the limiting mechanism 40 can be rotatably installed at the front side of the outer frame 10 and is used for shielding or exposing the opening so as to limit or release the wafer box 200, namely, the position of the limiting mechanism 40 can be adjusted according to the working requirement, and under normal conditions, the position of the limiting mechanism 40 can expose the opening, so that the wafer box 200 can enter and exit through the opening normally; after the card case 200 enters the flower basket 100 through the opening, the position of the limiting mechanism 40 can be adjusted to the opening to limit the card case 200 from the direction of the opening, so as to prevent the card case 200 from sliding out of the opening. Here, for clarity of description of the structure of the flower basket, the open end of the outer frame 10 is taken as the front end.

Specifically, the whole outer frame 10 is a rectangular frame structure, for clarity of description, the outer frame 10 may be divided into a bottom frame, a top frame, and front and rear brackets vertically disposed at the front and rear ends between the bottom frame and the top frame, where each bracket may be surrounded by a plurality of horizontal and/or vertical connecting rods, for example, the top frame and the bottom frame are all rectangular frame structures, and are composed of four connecting rods connected end to end, the front bracket is composed of two connecting rods vertically disposed, and the rear bracket is composed of two connecting rods vertically disposed and at least one connecting rod horizontally disposed; the front end of the outer frame 10 is the front end of the front bracket, and the opening is the space surrounded by the bottom frame, the top frame and the two connecting rods, so that the cassette 200 can conveniently enter and exit the outer frame 10 through the opening. Correspondingly, the end where the rear support is located is the rear end of the outer frame 10, the top frame is the top end of the outer frame 10, the bottom frame is the bottom end of the outer frame 10, and the front-back direction is the axial direction of the outer frame 10. The chute mechanism 20 is mounted on the chassis so as to be movable left and right in the axial direction of the outer frame 10. The clip mechanism 30 is mounted between the front bracket and the rear bracket so as to be movable up and down in the axial direction of the outer frame 10. Limiting mechanism 40 is rotatably mounted on the front frame to block or expose the opening, so as to limit cassette 200 in outer frame 10 or to facilitate the in-out of cassette 200.

It can be appreciated that, when in use, the specific positions of the chute mechanism 20 and the clamping mechanism 30 can be adjusted according to the size of the cassette 200, so that the space formed by the chute mechanism 20 and the clamping mechanism can effectively limit the supporting plate 203 and the extension portion 202 of the cassette 200, thereby avoiding the shaking of the cassette 200 in the outer frame 10. After the adjustment is completed, the position of the limiting mechanism 40 can be adjusted to expose the opening, so that the horizontal pushing of the cassette 200 into the outer frame 10 through the opening is not affected at least; after the cassette is installed in the outer frame 10, the position of the limiting mechanism 40 is adjusted to limit the cassette 200, so as to prevent the cassette from sliding out of the outer frame 10.

In view of this, according to the adjustable wafer box flower basket of the present utility model, by improving the structure of the existing flower basket, the adjustment and the matching of the positions of the chute mechanism 20 and the clamping mechanism 30 are used to change the adjustment of the size of the internal accommodating space, so as to realize the limitation of the bottom and the top of the wafer box 200 with different sizes; at the same time, together with the limit mechanism 40, it is prevented from shaking or sliding out of the outer frame 10.

In some embodiments, referring to fig. 2 to 5, chute mechanism 20 includes two support plates 21 arranged in parallel, each support plate 21 being provided with a chute 211 in its axial direction, which cooperates with abutment plate 203, and the front end of chute 211 penetrating the front end of support plate 21 so that abutment plate 203 of cassette 200 can be pushed into chute 211 from the front end; the support plate 21 is mounted on the bottom plate of the outer frame 10 so as to be movable left and right. Specifically, the two support plates 21 may be symmetrically installed on the chassis along the axial direction of the outer frame 10, the slot width of the sliding slot 211 is adapted to the thickness of the supporting plate 203, and the positions of the two support plates 21 may be adjusted left and right, so that the two sliding slots 211 on the two support plates 21 may be matched with the two supporting plates 203 at the bottom of the cassette 200, so that the two supporting plates 203 slide into the sliding slots 211 through the front ends of the corresponding sliding slots 211, thereby realizing the limiting and supporting of the supporting plates 203.

It will be appreciated that the position of the support plate 21 on the chassis can be adjusted according to the distance between the two supporting plates 203 at the bottom of the cassette 200, so as to ensure that the two supporting plates 203 can be pushed into the two sliding grooves 211 normally. The position of the supporting plate 21 is adjustable, and the limit and the support of the different-size wafer boxes 200 are realized. Meanwhile, considering that the entire cassette 200 is of a symmetrical structure, in order to ensure the normal positioning of the top of the cassette 200, the two support plates 21 are symmetrically arranged in the axial direction of the outer frame 10 during the entire adjustment process. In addition, in order to improve the accuracy and efficiency of adjustment, graduations can also be arranged on the underframe.

In some embodiments, referring to fig. 2 to 5, the front and rear ends of the bottom surface of the support plate 21 are respectively provided with a first threaded hole, the bottom plate of the outer frame 10 is provided with first elongated holes 11 symmetrically arranged, and the outer frame 10 and the support plate 21 are connected by a first bolt assembly 50. For example, the front and rear ends of the chassis of the outer frame 10 are respectively provided with two first screw holes symmetrical with respect to the axial direction of the outer frame 10, and both ends of one support plate 21 are respectively connected to the front and rear ends of the chassis. The first bolt assembly 50 may include a first screw, a first washer, and a first nut, wherein the width of the first elongated hole 11 is greater than the diameter of the first screw.

It will be appreciated that, in use, the position of support plate 21 on the chassis may be adjusted according to the dimensions of cassette 200, specifically, taking the adjustment of one of support plates 21 as an example: firstly, taking two first screw rods to be screwed into two first threaded holes of the supporting plate 21; then the supporting rod 21 and the first screw rod are lifted up, so that the first screw rod respectively passes through the two corresponding first strip-shaped holes 11 at the front end and the rear end of the underframe; then, the position of the support plate 21 is adjusted according to the distance between the two abutting plates 203; finally, the first washer and the first nut are sequentially mounted on the first screw, and the first nut is tightened until the support bar 21 is fastened to the chassis. Accordingly, the other support plate 21 is fixed again according to the above-described steps. When the cassette 200 with different sizes is suitable, the first screw cap can be screwed to enable the supporting plate 21 to be movable, and after the supporting plate 21 is adjusted to a required position, the first screw cap can be screwed again, so that the operation is simple and the adjustability is good.

It should be noted that the depth to which the first screw is screwed into the support plate 21 may also be set as desired. For example, the depth of the first screws at the two ends of the supporting plate 21 can be different, so that the whole supporting plate 21 is in a front high and rear low inclined state when being fastened on the underframe, and wafers in the wafer box 200 have different inclined angles, so that when the wafers are soaked and cleaned, the ultrasonic generating device positioned below the cleaning tank oscillates the cleaning liquid in the cleaning tank to form tens of thousands of tiny bubbles, and the bubbles can wash the surfaces of the wafers; the wafer is obliquely arranged at a certain angle, so that bubbles can directly impact and wash the surface of the wafer, the contact area between the bubbles and the wafer is increased, and a better cleaning effect can be achieved. In other words, the wafer cassette 200 is placed in the outer frame 10, so that the wafer cassette 200 is inclined at a certain angle, and the wafer in the wafer cassette 200 can achieve better cleaning effect. Meanwhile, the inclination angle of the wafer box 200 is adjusted by adjusting the depth of the first screw to which the first screw is screwed, so that the inclination angle can meet the cleaning requirement under any working condition and achieve better cleaning effect. In order to ensure the stability after the fastening, a corresponding first gasket can be additionally arranged for fastening.

In view of convenience of operation, referring to fig. 2 and 7, the two support plates 21 may be connected by a positioning mechanism 60 to achieve synchronous adjustment of the positions of the two support plates 21. Specifically, the positioning mechanism 60 may include a bidirectional screw 61, a guide block 62 and a knob 64, where the bidirectional screw 61 is rotatably installed in the chassis of the outer frame 10, for example, an installation cavity is provided in the chassis of the outer frame 10, one end of the bidirectional screw 61 penetrates through a side wall of the chassis to extend into the installation cavity and is installed on a side wall of the installation cavity through a bearing seat, the other end of the bidirectional screw 62 is located outside the chassis, the knob 64 is installed at an end of the external bidirectional screw 62 of the outer frame 10, and the bidirectional screw 62 can be driven to rotate by rotating the knob 64. The guide blocks 62 are provided with positioning holes for mounting the first screw above, and the two guide blocks 62 are symmetrically mounted on the bidirectional screw 61, and the guide blocks 62 can reciprocate along the axial direction of the bidirectional screw 61 along with the rotation of the bidirectional screw 61, i.e. when the bidirectional screw 61 rotates, the two guide blocks 62 synchronously move in opposite directions or opposite directions along the axial direction of the bidirectional screw 61. The support plates 21 are mounted on the guide blocks 62 through the first bolt assemblies 50, and synchronous adjustment of the positions of the two support plates 21 is achieved by rotating the knob 64, so that the adjustment efficiency and the operation convenience are improved. In addition, locating blocks 63 are arranged on two sides of the guide block 62 on the bidirectional screw 61, internal threads matched with the threads on the bidirectional screw 61 are arranged in the locating blocks 63, and the positions of the locating blocks on the bidirectional screw 61 can be adjusted in a rotating mode according to requirements, so that the distance of left and right movement of the guide block 62 is limited, and the safety of movement is improved.

In some embodiments, referring to fig. 2 and 3, the bottom of the front end of the chute 211 is arc-shaped. For example, the depth of the sliding groove 211 is gradually increased from front to back to a predetermined depth and then is maintained. Wherein, the part of the whole chute 211 with gradually increased depth can guide the supporting plate 203, so as to introduce the supporting plate 203 into the chute in an inclined manner, thereby facilitating the pushing of the cassette 200.

In some embodiments, referring to fig. 1, 5 and 6, the width of the front end of the chute 211 gradually decreases from front to back. For example, the front end of chute 211 is tapered in the front-to-back direction, and may have a horn shape, which guides cassette 200 and facilitates the insertion of cassette 200.

In some embodiments, referring to fig. 2 to 5, the clamping mechanism 30 includes two symmetrically arranged clamping assemblies, the clamping assemblies including an upper clamping plate 31 and a lower clamping plate 32 disposed in parallel up and down, the upper clamping plate 31 and the lower clamping plate 32 are each mounted on a side wall of the outer frame 10 so as to be capable of moving up and down, and the upper clamping plate 31 and the lower clamping plate 32 together define a space for clamping and limiting the extension 202 of the cassette 200. Specifically, two clamping assemblies are symmetrically installed between the front bracket and the rear bracket, two ends of each clamping assembly are respectively connected with the front bracket and the rear bracket of the outer frame 10, for example, two ends of the upper clamping plate 31 and the lower clamping plate 32 can be installed on the front bracket and the rear bracket in a vertically movable manner, and the clamping and limiting of the extending parts 202 are realized by adjusting the positions of the upper clamping plate 31 and the lower clamping plate 32 so as to be applicable to the extending parts 202 of the wafer boxes 200 with different sizes.

It will be appreciated that the positions of upper clamping plate 31 and lower clamping plate 32 on the front bracket and the rear bracket can be adjusted according to the height of cassette 200, specifically according to the heights of the extending parts 202 on the two sides of the top of cassette 200, so as to ensure that the extending parts 202 on the two sides can normally enter the space formed by upper clamping plate 31 and lower clamping plate 32. The position of the clamping component is adjustable, so that the top of the wafer boxes 200 with different heights can be clamped and limited. Meanwhile, considering that the whole wafer box 200 is of a symmetrical structure, in order to ensure the normal positioning of the top of the wafer box 200, the heights of the two clamping assemblies are consistent in the whole adjusting process. In addition, in order to improve the accuracy and efficiency of adjustment, graduations may be provided on the front and rear frames of the outer frame 10.

In some embodiments, referring to fig. 2 to 8, the front and rear ends of the side walls of the upper and lower clamping plates 31 and 32 are respectively provided with a second screw hole, the left and right side walls of the outer frame 10 are provided with second elongated holes 12 symmetrically arranged, and the outer frame 10 is connected with the upper and lower clamping plates 31 and 32 by a second bolt assembly 70.

For example, the front and rear ends of the outer side walls of the upper clamping plate 31 and the lower clamping plate 32 are respectively provided with a second threaded hole, the front bracket and the rear bracket of the outer frame 10 are respectively provided with two symmetrical second elongated holes 12, the upper clamping plate 31 and the lower clamping plate 32 on the same side are respectively arranged in the two identical second elongated holes 12, namely, the front ends of the upper clamping plate 31 and the lower clamping plate 32 on the same side are respectively arranged in the second elongated holes 12 on the front bracket, and the rear ends of the upper clamping plate 31 and the lower clamping plate 32 on the same side are respectively arranged in the second elongated holes 12 on the rear bracket. The second bolt assembly 70 may have the same structure as the first bolt assembly 50, including a second screw rod, a second washer, and a second nut, and the second elongated hole 12 has a width greater than the diameter of the second screw rod so that the second screw rod can pass through the second elongated hole 12 and move up and down along the second elongated hole 12.

It will be appreciated that the position of the clamping assemblies on the front and rear brackets may be adjusted according to the height of extension 202 in cassette 200, specifically, by way of example, the adjustment of one of the clamping assemblies: firstly, four second screws are sequentially screwed into four second threaded holes of the upper clamping plate 31 and the lower clamping plate 32; then the lower clamping plate 32 is lifted up, so that second screws screwed on the lower clamping plate 32 respectively penetrate through two second strip-shaped holes 12 on the front bracket and the rear bracket, and the position of the lower clamping plate 32 is adjusted according to the height of the bottom surface of the extension part 202; next, a second washer and a second nut are sequentially attached to the second screw, and the second nut is tightened until the lower clamping plate 32 is fastened to the front and rear brackets. Accordingly, the position of the upper clamping plate 31 is adjusted according to the height of the top surface of the extension 202, and the upper clamping plate 31 is fixed according to the above steps. Similarly, a clamping assembly may be symmetrically mounted on the other side of the outer frame 10. When the cassette 200 with different heights is suitable, the second nut can be screwed to enable the upper clamping plate 31 and the lower clamping plate 32 to move, and after the upper clamping plate 31 and the lower clamping plate 32 are adjusted to the required positions, the second nut is screwed again, so that the operation is simple and the adjustability is good.

In some embodiments, referring to fig. 2 to 8, the front end of the upper clamping plate 31 has a concave circular arc shape. In other words, the distance between the upper and lower clamping plates 31 and 32 is maintained uniform from the rear to the front and gradually increases. This configuration may provide a guiding function for extension 202 to facilitate insertion of cassette 200.

In some embodiments, referring to fig. 2 to 8, the limiting mechanism 40 includes a U-shaped limiting rod 41, guide slots 13 are symmetrically arranged at the left and right ends of the front side wall of the outer frame 10, sliding blocks 14 capable of moving up and down along the guide slots 13 are arranged in the guide slots 13, and two ends of the limiting rod 41 are respectively hinged with the two sliding blocks 14; the limit lever 41 has a first operation state in which the limit lever 41 is positioned at the lowermost end of the guide groove 13 to limit the cartridge 200 within the outer frame 10; in the second operating state, the stopper mechanism 41 is moved to the upper portion of the guide groove 13 so that the cartridge 200 can be moved in and out from the opening.

Specifically, guide grooves 13 are symmetrically arranged on two connecting rods of a front bracket in the outer frame 10, a sliding block 14 is arranged in each guide groove 13, a limiting rod 41 is arranged on the front side of the front bracket, and two ends of the limiting rod 41 are respectively hinged with the two sliding blocks 41; the limiting rod 41 can be manually held, upward or downward pulling force is applied to the limiting rod, and the position of the limiting rod 41 can be changed under the action of the guide groove 13 and the sliding block 14, so that the limiting rod 41 can be switched back and forth between the first working state and the second working state.

It will be appreciated that under the action of gravity, the limiting block 41 and the sliding block 14 are positioned at the lowest end of the guiding groove 13, and the limiting rod 41 blocks the opening of the outer frame 10. When the cassette 200 needs to be installed in the outer frame 10, the limit lever 41 can be switched from the first working state to the second working state, specifically: stop bar 41 is manually pulled to the upper portion of guide groove 13 so as not to interfere with the entry and exit of cassette 200, and cassette 200 is pushed into outer frame 10. After the cassette 200 is pushed in, the limiting rod 41 is pulled down to move to the lowest end of the guiding slot 13, i.e. the second working state is switched to the first working state, so as to prevent the cassette 200 from sliding out from the opening in the cleaning process.

In some embodiments, referring to fig. 2 to 8, an inverted L-shaped hook 15 is provided at a position near the front end of the top of the outer frame 10, and when the stopper rod 41 is positioned at the uppermost end of the guide groove 13, the stopper rod 41 can be rotated upward to hang on the L-shaped hook 15.

For example, the L-shaped hanger 15 may be mounted at the front end of the top frame in the outer frame 10, and when the stopper rod 41 moves to the upper or uppermost end of the guide groove 13, an external moment rotating upward may be pushed to the stopper rod 41 to be rotated to the top of the outer frame 10 and hung on the L-shaped hanger 15. It will be appreciated that stop bar 41 may be suspended from L-shaped hanger 15 when it is desired to load or unload wafer cassette 200, freeing up hands and reducing collisions during operation.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; the device can be mechanically connected, electrically connected and communicated; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present utility model. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.

While embodiments of the present utility model have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the utility model, the scope of which is defined by the claims and their equivalents.

Claims (10)

1. An adjustable wafer cassette basket of flowers, comprising:

The outer frame is of a cuboid frame structure with an open top, and an opening for the cassette to enter and exit is formed in the front side wall of the outer frame;

The sliding groove mechanism can be installed at the bottom of the outer frame in a left-right moving way and is used for limiting and supporting a supporting plate at the bottom of the wafer box;

The clamping mechanism can be arranged on the left side wall and the right side wall of the outer frame in a vertically movable manner and is used for clamping and limiting the extension part at the top of the wafer box;

And the limiting mechanism can be rotatably arranged on the front side of the outer frame and is used for shielding or exposing the opening so as to limit or release the wafer box.

2. The adjustable wafer cassette basket according to claim 1, wherein the chute mechanism comprises two support plates arranged in parallel, wherein a chute matched with the supporting plate is arranged on the support plates along the axial direction of the support plates, and the front end of the chute penetrates through the front end of the support plates; the support plate is mounted on the bottom plate of the outer frame so as to be movable left and right.

3. The adjustable wafer box flower basket according to claim 2, wherein first threaded holes are formed in the front end and the rear end of the bottom surface of the supporting plate, first long strip-shaped holes which are symmetrically arranged are formed in the bottom plate of the outer frame, and the outer frame is connected with the supporting plate through first bolt assemblies.

4. The adjustable wafer cassette basket of claim 2, wherein the bottom of the front end of the chute is arcuate.

5. The adjustable wafer cassette basket of claim 2, wherein the width of the front end of the chute decreases from front to back.

6. The adjustable wafer cassette flower basket of claim 1, wherein the clamping mechanism comprises two symmetrically arranged clamping assemblies, the clamping assemblies comprise an upper clamping plate and a lower clamping plate which are arranged in parallel up and down, the upper clamping plate and the lower clamping plate are both mounted on the side wall of the outer frame in an up-and-down movable manner, and the upper clamping plate and the lower clamping plate jointly define a space for clamping and limiting the extension part of the wafer cassette.

7. The adjustable wafer box flower basket according to claim 6, wherein the front end and the rear end of the side walls of the upper clamping plate and the lower clamping plate are respectively provided with a second threaded hole, the left side wall and the right side wall of the outer frame are respectively provided with a second long strip-shaped hole which is symmetrically arranged, and the outer frame is connected with the upper clamping plate/the lower clamping plate through a second bolt assembly.

8. The adjustable wafer cassette basket of claim 6 wherein the front end of the upper clamp plate is concave in shape of a circular arc.

9. The adjustable wafer box flower basket according to claim 1, wherein the limiting mechanism comprises a U-shaped limiting rod, guide grooves are symmetrically formed in the left end and the right end of the front side wall of the outer frame, sliding blocks capable of moving up and down along the guide grooves are arranged in the guide grooves, and two ends of the limiting rod are respectively connected with the two sliding blocks; the limiting rod is provided with a first working state and a second working state, and in the first working state, the limiting rod is positioned at the lowest end of the guide groove so as to limit the wafer box in the outer frame; in the second working state, the limiting mechanism moves to the upper part of the guide groove, so that the wafer box can enter and exit from the opening.

10. The adjustable wafer box flower basket of claim 9, wherein an inverted L-shaped hook is provided at a position of the top of the outer frame near the front end, and the stop lever can be rotated upward to hang on the L-shaped hook when the stop lever is positioned at the uppermost end of the guide groove.