CN221478805U

CN221478805U - Carrier plate conveying module and equipment cavity with heating function

Info

Publication number: CN221478805U
Application number: CN202323033517.4U
Authority: CN
Inventors: 常昱
Original assignee: Ideal Wanlihui Semiconductor Equipment Shanghai Co ltd
Current assignee: Ideal Wanlihui Semiconductor Equipment Shanghai Co ltd
Priority date: 2023-11-10
Filing date: 2023-11-10
Publication date: 2024-08-06
Anticipated expiration: 2033-11-10

Abstract

The utility model provides a carrier plate conveying module and an equipment cavity with a heating function. The carrier plate conveying module is arranged on the base of the equipment cavity and is used for conveying carrier plates from two sides of the bottom end of the heating plate, and comprises a mounting bracket arranged on the base, a driving module arranged on one side of the mounting bracket, a plurality of driving shafts driven to rotate by the driving module, a plurality of driving chain wheels, a spacer bush and an elastic piece; the transmission chain wheel is in clearance fit with the driving shaft and comprises a boss arranged in the middle and two sub chain wheels arranged on two sides; the spacer bush is arranged on the driving shaft in a penetrating way, is in clearance fit with the driving shaft and is arranged at intervals with the driving sprocket; the elastic piece is arranged on the driving shaft in a penetrating way and is close to one side of the mounting bracket, and the elastic piece accommodates the movement of the plurality of driving chain wheels and the spacer bush on the driving shaft when the equipment cavity runs through elastic deformation of the elastic piece. The utility model can relieve the position deviation of the photovoltaic equipment cavity at high temperature due to thermal expansion deviation, thereby avoiding the occurrence of excessive abrasion and even jamming in the conveying process of the carrier plate.

Description

Carrier plate conveying module and equipment cavity with heating function

Technical Field

The utility model relates to the field of solar cell manufacturing, in particular to a carrier plate conveying module and an equipment cavity with a heating function.

Background

In recent years, with the continuous enhancement of the cost reduction requirement of solar cells, the unit productivity of core equipment for preparing solar cell films is required to be continuously improved, namely, more silicon wafers can be simultaneously contained in an equipment cavity for film forming, so that the cost reduction requirement of an integral production line is met. The core equipment at least comprises plasma enhanced chemical vapor deposition PECVD equipment for forming an amorphous silicon film, a matched preheating cavity, a loading cavity, an unloading cavity and the like.

In order to enable more silicon wafers to be contained in the equipment cavity at the same time, the first method is to increase the size of a silicon wafer carrier plate (or tray) so that the silicon wafer carrier plate can bear more silicon wafers of solar cells; the second method is to increase the number of carrier plates that can be carried by the equipment chamber. The increase of the size of the carrier plate in the first method is limited by the influence of thickness and rigidity or strength in the implementation process, specifically, the carrier plate cannot be too thick in the use process, and after the outline design size is increased, the rigidity and the bearing capacity of the carrier plate are limited, so that the amount of silicon wafers borne by the carrier plate is limited.

In the second method, some problems are encountered in the implementation process, and at present, the carrier plate bearing the solar cells is conveyed in a horizontal state in the film forming equipment, so that the lifting and conveying of the carrier plate are realized by using an additional mechanical arm or a conveying device, the occupied space of a single carrier plate is obviously increased, and the space utilization rate of the film forming equipment is greatly reduced. If the horizontal conveying mode of the carrier plate is not changed, the space occupied by the single carrier plate is only compressed, and the implementation difficulty and the implementation effect of the second method are not good. If the carrier plate in the horizontal state in the film forming equipment can be changed into the vertical state, the occupied space of a single carrier plate can be greatly reduced.

The photovoltaic equipment cavity for vertically conveying the carrier plates is generally provided with a plurality of heating plates which are vertically arranged in parallel, and the carrier plates in the vertical state are conveyed through the equipment cavity by a conveying system assembled on the aluminum alloy base, so that the heating efficiency is improved, and the carrier plates are as close to the heating plates as possible in the equipment cavity. The transmission system comprises a plurality of driving shafts and a plurality of conveying chain wheels fixedly arranged on each driving shaft, when the equipment cavity runs, the temperature in the cavity is raised to 200-300 ℃ by the heating plate, the driving shafts made of stainless steel are inconsistent in thermal expansion and generate relative displacement with the aluminum alloy heating plate arranged on the aluminum alloy base, for example, the relative displacement between the conveying chain wheels and the heating plate is up to 2-3mm, so that excessive abrasion and even clamping stagnation of the carrier plate in the equipment cavity can be caused, and the running reliability and stability of the equipment are affected.

Therefore, how to provide a carrier plate conveying module and a device cavity with a heating function, so as to alleviate the deviation of the position of the photovoltaic device cavity due to thermal expansion deviation at high temperature, thereby avoiding excessive wear and even jamming in the carrier plate conveying process, and becoming a technical problem to be solved in the industry.

Disclosure of utility model

In view of the above problems in the prior art, the present utility model provides a carrier plate transfer module, which is disposed on a base of an equipment cavity and is used for transferring a carrier plate from two sides of a bottom end of a heating plate, wherein the carrier plate transfer module includes a mounting bracket disposed on the base, a driving module disposed on one side of the mounting bracket, and a plurality of driving shafts disposed on the mounting bracket and driven to rotate by the driving module; the carrier plate transfer module further includes:

The plurality of transmission chain wheels are in clearance fit with the driving shaft and comprise a boss arranged in the middle and two sub chain wheels which are arranged on two sides of the boss and are directly used for conveying the carrier plate;

the spacer bush is arranged on the driving shaft in a penetrating way, is in clearance fit with the driving shaft and is arranged with the driving chain wheel at intervals; and

The elastic piece is arranged on the driving shaft in a penetrating way and is close to one side of the mounting bracket, and the elastic piece accommodates the movement of the plurality of driving sprockets and the spacer bush on the driving shaft when the equipment cavity runs through elastic deformation of the elastic piece.

In one embodiment, the mounting bracket comprises an active side bearing seat and a passive side bearing seat arranged on the base, and the driving module is mounted close to the outer side of the active side bearing seat; the driven side bearing seat is provided with a sliding sleeve, and the driving shaft realizes axial movement within a preset range through the sliding sleeve.

In one embodiment, a middle inner hole is formed in the inner side of the middle of the driving sprocket, the diameter of the middle inner hole is 0.2-0.5mm larger than that of the driving shaft, and the length of the middle inner hole accounts for 50% -70% of the total length of the driving sprocket.

In one embodiment, the two sides of the middle inner hole of the driving sprocket are provided with outer inner holes, the driving shaft penetrates through the driving sprocket to be in contact with the outer inner hole wall of the driving sprocket, and the diameter of the outer inner hole is 0.04mm-0.1mm larger than that of the driving shaft.

In one embodiment, the drive sprocket further includes a keyway formed in the intermediate bore and the outer bore, a mating flat key being inserted into the keyway and in clearance fit with the drive shaft.

In one embodiment, the length of the driving sprocket ranges from 45 mm to 55mm, the diameters of the sub sprocket and the boss ranges from 48 mm to 52mm, and the length of the gap between the sub sprocket and the boss ranges from 6 mm to 7mm.

In an embodiment, the bottom end of the heating plate is provided with a through groove corresponding to the driving shaft and the driving sprocket for accommodating the driving shaft and the driving sprocket, the thickness range of the heating plate is 12-20mm, and the thickness of the boss of the driving sprocket is 1-2mm smaller than that of the heating plate.

In one embodiment, the spacer has an inner diameter 0.04mm to 0.1mm greater than the diameter of the drive shaft, and the elastic member includes a plurality of disc springs.

In an embodiment, the base is an aluminum alloy base, the drive shaft is a stainless steel shaft, the drive sprocket is a stainless steel sprocket or an aluminum alloy sprocket, the spacer is an aluminum alloy sleeve, and the elastic member is deformed by itself to accommodate movement of the drive sprocket and the spacer along the drive shaft due to thermal expansion.

The utility model also provides a device cavity with a heating function, which comprises a base, a plurality of heating plates vertically arranged on the base and a carrier plate conveying module arranged at the bottom end of the heating plates and used for conveying carrier plates at two sides of the bottom end of the heating plates, wherein the carrier plate conveying module is any one of the carrier plate conveying modules.

Compared with the prior art that the carrier plate conveying module cannot effectively inhibit displacement difference generated by thermal expansion deformation difference and is easy to cause carrier plate conveying abrasion or clamping, the carrier plate conveying module has the advantages that the plurality of driving chain wheels and the elastic piece are in clearance fit with the driving shaft, so that the driving chain wheels can move along the driving shaft under the limitation of the elastic piece. The carrier plate conveying module comprises a mounting bracket, a driving module, a plurality of driving shafts, a plurality of driving sprockets, a spacer bush and an elastic piece, wherein the driving sprockets are in clearance fit with the driving shafts, the carrier plate conveying module comprises a boss arranged in the middle and two sub sprockets which are arranged on two sides of the boss and are directly used for conveying the carrier plate, the spacer bush is arranged on the driving shafts in a penetrating mode and in clearance fit with the driving sprockets in a spaced mode, the elastic piece is arranged on one side of the driving shafts in a penetrating mode and is close to the mounting bracket, and the elastic piece accommodates the driving sprockets and the spacer bush to move on the driving shafts when the equipment cavity runs through elastic deformation of the elastic piece.

The utility model can relieve the position deviation of the photovoltaic equipment cavity at high temperature due to thermal expansion deviation, thereby avoiding the occurrence of excessive abrasion and even jamming in the conveying process of the carrier plate.

Drawings

The above features and advantages of the present utility model will be better understood after reading the detailed description of embodiments of the present disclosure in conjunction with the following drawings. In the drawings, the components are not necessarily to scale and components having similar related features or characteristics may have the same or similar reference numerals.

Fig. 1 is a schematic diagram of the composition structure of an embodiment of the apparatus chamber with heating function of the present utility model.

Fig. 2 is a schematic diagram of the composition structure of the carrier plate transferring module 2 in fig. 1.

Fig. 3 is a schematic perspective view of the driving sprocket 23 in fig. 1.

Fig. 4 is a schematic front view of the drive sprocket 23 in fig. 1.

Fig. 5 is a schematic cross-sectional view taken along line A-A in fig. 4.

Fig. 6 is a schematic cross-sectional structure view taken along the sub sprocket 231 in fig. 4.

Fig. 7 is a schematic perspective view of the spacer 24 shown in fig. 1.

Detailed Description

The utility model will be described in detail below with reference to the drawings and the specific embodiments so that the objects, features and advantages of the utility model will be more clearly understood. It should be understood that the aspects described below in conjunction with the drawings and detailed embodiments are merely exemplary and should not be construed as limiting the scope of the utility model in any way. The singular forms "a," "an," and "the" include plural referents unless the context clearly dictates otherwise. The terms "first," "second," and the like in the description and in the claims, are not used for any order, quantity, or importance, but are used for distinguishing between different elements.

Referring to fig. 1 and fig. 2, fig. 1 is a schematic structural diagram of an embodiment of a device chamber with a heating function according to the present utility model, and fig. 2 is a schematic structural diagram of a carrier plate transferring module 2 in fig. 1. As shown in fig. 1 and 2, the apparatus chamber with heating function of the present utility model includes a base 1, a carrier plate transfer module 2, and a heating plate 3. The carrier plate conveying module 2 is arranged at the bottom end of the heating plate 3 and is used for conveying carrier plates (not shown) at two sides of the bottom end of the heating plate 3. In an embodiment, the equipment cavity with the heating function can be a PECVD reaction cavity, a preheating cavity matched with the PECVD reaction cavity, a loading cavity or an unloading cavity, and the like.

As shown in fig. 1 and 2, the carrier plate conveying module 2 is disposed on the base 1 of the equipment cavity and is used for conveying the carrier plates from two sides of the bottom end of the heating plate 3, and the carrier plate conveying module 2 includes a mounting bracket, a driving module, a plurality of driving shafts 22, a plurality of driving sprockets 23, spacers 24 and elastic members 25, the mounting bracket is disposed on the base 1, and the driving module (not shown) is disposed near one side of the mounting bracket. The mounting bracket comprises a driving side bearing seat 20 and a driven side bearing seat 21 which are arranged on the base 2, the driving module is arranged close to the outer side of the driving side bearing seat 20, and the driving module can comprise a motor arranged outside a cavity, a belt pulley arranged on the outer side of the driving side bearing seat 20 and other members. A plurality of drive shafts 22 are provided on the mounting bracket and are driven in rotation by the drive module, only one drive shaft 22 being shown in fig. 1 for simplicity of illustration. A plurality of driving sprockets 23 are in clearance fit with the driving shaft 22, and spacers 24 are arranged on the driving shaft 22 in a penetrating manner and in clearance fit with the driving shaft 22, and are arranged at intervals with the driving sprockets 23. An elastic member 25 is provided to pass through the driving shaft 22 and is close to the side of the mounting bracket, for example, close to the side of the driven side bearing seat 21, and the elastic member 25 accommodates the movement of the plurality of driving sprockets 23 and spacers 24 on the driving shaft 22 by elastic deformation thereof when the apparatus chamber is operated.

In this embodiment, the base 1 may be an aluminum alloy base, and the driving shaft 22 may be a stainless steel shaft, and more specifically, may be a 304 stainless steel shaft. The driving sprocket 23 may be a stainless steel sprocket or an aluminum alloy sprocket, and the spacer 24 may be an aluminum alloy sleeve.

Referring to fig. 3 to 6, fig. 3 and 4 are respectively a perspective view and a front view of the driving sprocket 23 of fig. 1, and fig. 5 and 6 are respectively a cross-sectional view taken along the line A-A of fig. 6 and the sub sprocket 231. The plurality of driving sprockets 23 include a boss 230, sub sprockets 231, and a slit 232 therebetween, the boss 230 being disposed in the middle, and the two sub sprockets 231 being disposed on both sides of the boss 230 and directly used for transferring the carrier. The length of the driving sprocket 23 ranges from 45 mm to 55mm, the diameters of the sub sprocket 231 and the boss 230 range from 48 mm to 52mm, and the length of the gap 232 between the sub sprocket 231 and the boss 230 ranges from 6 mm to 7mm.

The bottom end of the heating plate 3 is provided with a through groove (not shown) corresponding to the driving shaft 22 and the driving sprocket 23 for accommodating the driving shaft 22 and the driving sprocket 23, the thickness range of the heating plate 3 is 12-20mm, the thickness of the boss 230 of the driving sprocket 23 is 1-2mm smaller than the thickness of the heating plate 3, i.e. the thickness of the boss 230 can be 10-18mm.

As shown in fig. 3, 5 and 6, the driving sprocket 23 is provided with a middle inner hole 233, an outer inner hole 234 and a first key slot 235, the middle inner hole 233 is provided at the middle inside of the driving sprocket 23, the diameter of the middle inner hole 233 is 0.2-0.5mm larger than the diameter of the driving shaft 23, and the length of the middle inner hole 233 is 50% -70% of the total length of the driving sprocket 23. The outer inner holes 264 are formed on both sides of the middle inner hole 233, and the diameter of the outer inner hole 234 is 0.04mm-0.1mm larger than that of the driving shaft 22, that is, the outer inner hole 234 is smaller than the middle inner hole 233, and the driving shaft 22 contacts with the wall of the outer inner hole 234 when passing through the driving sprocket 23, so that the contact between the middle inner hole 233 and the driving shaft 22 is reduced, and friction force is reduced.

A first keyway 235 is formed in the middle bore 233 and the outer bore 234, and a mating flat key (not shown) is inserted into the first keyway 235 and is in clearance fit with the drive shaft 22. The drive shaft 22 may also correspondingly begin with a second keyway (not shown) that mates with the flat key, which is disposed in the first keyway 235 and the second keyway.

As shown in FIG. 7, the inner diameter 240 of the spacer 24 may be 20.+ -. 2mm, the outer diameter 25.+ -. 2mm, and the diameter of the drive shaft 20.+ -. 2mm, the inner diameter 240 of the spacer 24 being 0.04mm-0.1mm larger than the diameter of the drive shaft 22. The elastic member 25 may include a plurality of disc springs, for example, 10 disc springs, and the compression amount of a single disc spring may be 0.2mm, and the compression amount of 10 disc springs may be up to 2mm, and the disc springs may be preloaded by 0.4mm. The plurality of disc springs may be deformed by themselves to accommodate movement of the drive sprocket 23 and spacer 24 along the drive shaft due to thermal expansion.

In the heating operation of the device cavity with heating function of the utility model shown in fig. 1, the temperature in the cavity is raised to 200-300 ℃ by the heating plate 3, in the heating process, the driving shaft 24 is made of stainless steel, and the thermal expansion deformation between the heating plate 3 which is arranged on the stainless steel base 1 and made of stainless steel is different, but the driving sprocket 23 and the spacer 24 are moved along the driving shaft 22 under the action of the elastic piece 25, so that the displacement difference generated by the thermal expansion deformation is eliminated as much as possible, and the driving sprocket 23 can smoothly convey the carrier plate from two sides of the bottom end of the heating plate, thereby avoiding the occurrence of abrasion or clamping phenomenon.

The carrier plate conveying module comprises a mounting bracket, a driving module, a plurality of driving shafts, a plurality of driving chain wheels, a spacer bush and an elastic piece, wherein the driving chain wheels are in clearance fit with the driving shafts, the carrier plate conveying module comprises a boss arranged in the middle and two sub chain wheels which are arranged on two sides of the boss and are directly used for conveying the carrier plate, the spacer bush is arranged on the driving shafts in a penetrating mode, in clearance fit with the driving chain wheels and is distributed at intervals, the elastic piece is arranged on one side, close to the mounting bracket, of the driving shafts in a penetrating mode, and the elastic piece accommodates movement of the driving chain wheels and the spacer bush on the driving shafts when the equipment cavity runs through elastic deformation of the elastic piece.

The embodiments described above are intended to provide those skilled in the art with a full range of modifications and variations to the embodiments described above without departing from the inventive concept thereof, and therefore the scope of the utility model is not limited by the embodiments described above, but is to be accorded the broadest scope consistent with the innovative features recited in the claims.

Claims

1. The carrier plate conveying module is arranged on a base of the equipment cavity and used for conveying a carrier plate from two sides of the bottom end of the heating plate, and comprises a mounting bracket arranged on the base, a driving module arranged on one side of the mounting bracket and a plurality of driving shafts which are arranged on the mounting bracket and are driven to rotate by the driving module; the carrier plate conveying module is characterized by further comprising:

2. The carrier transport module of claim 1, wherein the mounting bracket includes an active side bearing seat and a passive side bearing seat disposed on the base, the drive module being mounted adjacent an outer side of the active side bearing seat; the driven side bearing seat is provided with a sliding sleeve, and the driving shaft realizes axial movement within a preset range through the sliding sleeve.

3. The carrier plate transfer module of claim 1, wherein a central inner bore is provided in the central inner side of the drive sprocket, the diameter of the central inner bore is 0.2-0.5mm greater than the diameter of the drive shaft, and the length of the central inner bore is 50% -70% of the total length of the drive sprocket.

4. The carrier transport module of claim 2, wherein outer bores are provided on both sides of the central bore of the drive sprocket, the drive shaft passing through the drive sprocket to contact the outer bore wall thereof, the outer bore having a diameter that is 0.04mm-0.1mm greater than the diameter of the drive shaft.

5. The carrier transport module of claim 4, wherein the drive sprocket further comprises a keyway formed in the middle bore and the outer bore, a mating flat key being inserted in the keyway and in clearance fit with the drive shaft.

6. The carrier transport module of claim 1, wherein the drive sprocket has a length in the range of 45-55mm, the sub-sprocket and the boss have diameters in the range of 48-52mm, and the gap between the sub-sprocket and the boss has a length in the range of 6-7mm.

7. The carrier plate transfer module of claim 1, wherein the bottom end of the heating plate is provided with a through groove corresponding to the driving shaft and the driving sprocket for accommodating the driving shaft and the driving sprocket, the thickness of the heating plate ranges from 12mm to 20mm, and the thickness of the boss of the driving sprocket is 1 mm to 2mm smaller than the thickness of the heating plate.

8. The carrier transport module of claim 1, wherein the spacer has an inner diameter that is 0.04mm-0.1mm greater than a diameter of the drive shaft, and the resilient member comprises a plurality of disc springs.

9. The carrier transport module of claim 2, wherein the base is an aluminum alloy base, the drive shaft is a stainless steel shaft, the drive sprocket is a stainless steel sprocket or an aluminum alloy sprocket, the spacer is an aluminum alloy sleeve, and the elastic member is deformed by itself to accommodate movement of the drive sprocket and spacer along the drive shaft due to thermal expansion.

10. An equipment chamber with a heating function, comprising a base, a plurality of heating plates vertically installed on the base, and a carrier plate conveying module arranged at the bottom end of the heating plates and used for conveying carrier plates at two sides of the bottom end of the heating plates, wherein the carrier plate conveying module is the carrier plate conveying module according to any one of claims 1 to 9.