CN221472899U - Liquid silicon source distribution valve box for semiconductor - Google Patents
Liquid silicon source distribution valve box for semiconductor Download PDFInfo
- Publication number
- CN221472899U CN221472899U CN202323479610.8U CN202323479610U CN221472899U CN 221472899 U CN221472899 U CN 221472899U CN 202323479610 U CN202323479610 U CN 202323479610U CN 221472899 U CN221472899 U CN 221472899U
- Authority
- CN
- China
- Prior art keywords
- pipeline
- liquid
- valve
- valve box
- emergency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 131
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 67
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 67
- 239000010703 silicon Substances 0.000 title claims abstract description 67
- 238000009826 distribution Methods 0.000 title claims abstract description 27
- 239000004065 semiconductor Substances 0.000 title claims abstract description 23
- 238000010926 purge Methods 0.000 claims abstract description 107
- 239000007789 gas Substances 0.000 claims description 63
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 22
- 229910052757 nitrogen Inorganic materials 0.000 claims description 11
- 239000001257 hydrogen Substances 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 4
- 230000002159 abnormal effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 description 12
- 238000004140 cleaning Methods 0.000 description 8
- 239000000126 substance Substances 0.000 description 7
- 238000012423 maintenance Methods 0.000 description 5
- 230000004044 response Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 4
- 239000005052 trichlorosilane Substances 0.000 description 4
- 230000005856 abnormality Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
Landscapes
- Pipeline Systems (AREA)
Abstract
The utility model provides a liquid silicon source distribution valve box for a semiconductor, wherein a normal outlet pipeline is arranged in the valve box, the input end of the liquid source pipeline is connected with the liquid inlet of the valve box, the output end of the liquid source pipeline is connected to the input end of the normal outlet pipeline and is used for conveying a liquid silicon source, and the liquid source pipeline is provided with a first valve for controlling the liquid silicon source to be conveyed in the liquid source pipeline; the first air inlet pipeline is used for conveying a first purge gas; the second air inlet pipeline is used for conveying a second purge gas; the input end of the purging pipeline is respectively communicated with the first air inlet pipeline and the second air inlet pipeline, the output end of the purging pipeline is connected to the input end of the constant outlet pipeline, a second valve for controlling the purging gas to be conveyed in the purging pipeline is arranged on the purging pipeline, and the purging gas comprises a first purging gas and a second purging gas; the output end of the normal outlet pipeline is connected to a normal liquid outlet of the valve box, and a third valve is arranged on the normal outlet pipeline.
Description
Technical Field
The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to a liquid silicon source distribution valve box for semiconductors.
Background
Liquid silicon sources refer to liquid compounds used to produce silicon-based materials, common liquid silicon sources include Trichlorosilane (TCS) and silane (SiH 4). Liquid silicon sources are widely used in semiconductor manufacturing and other related processes. These applications require precise, reliable and safe handling and dispensing of highly reactive chemicals. Conventional liquid silicon source dispensing systems have drawbacks in terms of cleaning efficiency, emergency response capability, and chemical discharge safety within the system.
Current liquid silicon source distribution systems typically rely on a single type of purge gas, such as nitrogen, to maintain the inside of the system clean. However, this single gas purge method cannot quickly achieve the desired cleanliness. In addition, existing systems lack efficient remote control capabilities, which limit the operator's response speed and flexibility in emergency situations. In the event of a system failure or leak, it is not possible to quickly and remotely close the valve or initiate a safety procedure, which has safety implications. Furthermore, in existing systems, the use of vacuum venting techniques does not allow complete evacuation of the chemicals (e.g., TCS) in the pipeline, which poses a threat to maintenance personnel safety. If TCS is not completely removed during maintenance down time, it may expose operators to hazardous chemicals, increasing operational risks.
Accordingly, there is a need for improvements in existing devices to improve the cleaning efficiency of liquid silicon source dispensing systems, enhance the response capability in emergency situations, and ensure safe discharge of chemicals to avoid potential safety hazards during maintenance.
Disclosure of Invention
The utility model aims to solve the technical problem of providing a liquid silicon source distribution valve box for semiconductors, which improves the cleaning efficiency of a liquid silicon source distribution system by adding purge gas, increases the response capability of an automatic valve under the emergency condition, ensures the safe discharge of chemical substances and avoids potential safety hazards during maintenance.
In order to solve the problems, the utility model provides a liquid silicon source distribution valve box for semiconductors, wherein a normal outlet pipeline is arranged in the valve box; the valve box is internally provided with: the input end of the liquid source pipeline is connected to the liquid inlet of the valve box, the output end of the liquid source pipeline is connected to the input end of the constant outlet pipeline and is used for conveying a liquid silicon source, and the liquid source pipeline is provided with a first valve for controlling the liquid silicon source to be conveyed in the liquid source pipeline; a first inlet line for delivering a first purge gas; a second inlet line for delivering a second purge gas; the input end of the purging pipeline is respectively communicated with the first air inlet pipeline and the second air inlet pipeline to receive purging gas, the output end of the purging pipeline is connected to the input end of the normal outlet pipeline, a second valve for controlling the purging gas to be conveyed in the purging pipeline is arranged on the purging pipeline, and the purging gas comprises the first purging gas and the second purging gas; the output end of the constant outlet pipeline is connected to a common liquid outlet of the valve box, and a third valve for controlling the liquid silicon source or the purge gas to be conveyed in the constant outlet pipeline is arranged on the constant outlet pipeline.
In some embodiments, the valve box further comprises: a third inlet line for delivering a third purge gas; and the first input end of the emergency outlet pipeline is communicated with the third air inlet pipeline, the second input end of the emergency outlet pipeline is connected to the normal outlet pipeline through an emergency valve, and the output end of the emergency outlet pipeline is coupled to an emergency liquid outlet of the valve box and is used for exhausting the liquid silicon source through the emergency liquid outlet when the output or input of the valve box is abnormal.
In some embodiments, the first intake line, the second intake line, and the third intake line are all provided with check valves.
In some embodiments, the first purge gas is hydrogen, the second purge gas is nitrogen of a first purity, and the third purge gas is nitrogen of a second purity, the second purity being less than the first purity.
In some embodiments, a vacuum generator is provided on the emergency exit line for providing a vacuum environment for the emergency exit line.
In some embodiments, a plurality of normal outlet pipelines are arranged in the valve box, the output end of each normal outlet pipeline is connected to a normal liquid outlet of the valve box, and each normal outlet pipeline is provided with a third valve; the liquid source pipeline comprises a plurality of first branches connected in parallel, and each first branch is provided with a first sub-valve for controlling the liquid silicon source to be conveyed in the corresponding first branch; the purging pipeline comprises a plurality of second branches connected in parallel, and each second branch is provided with a second sub-valve for controlling the purging gas to be conveyed in the corresponding second branch; each first branch is connected with one second branch in parallel and then communicated with one constant outlet pipeline.
In some embodiments, the emergency exit line comprises a plurality of emergency exit branches connected in parallel, each of the emergency exit branches being connected to one of the constant exit lines by one of the emergency valves; the emergency valve adopts an automatic valve.
In some embodiments, the valve box is provided with a plurality of emergency liquid outlets, a fourth branch is arranged between the output end of the emergency outlet pipeline and each emergency liquid outlet, a plurality of fourth branches are connected in parallel, a fifth valve is arranged on each fourth branch, and the fifth valve is an automatic valve.
In some embodiments, all of the automatic valves are communicatively connected to a controller for controlling all of the automatic valves to open and close.
In some embodiments, a high negative pressure vacuum pump is disposed on each of the fourth branches.
According to the technical scheme, the first air inlet pipeline for conveying the first purge gas and the second air inlet pipeline for conveying the second purge gas are arranged in the valve box, the input ends of the purge pipelines are respectively communicated with the first air inlet pipeline and the second air inlet pipeline, one path of purge gas is increased, and the cleaning efficiency of the liquid silicon source distribution system is improved.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the utility model as claimed. Techniques, methods, and apparatus known to one of ordinary skill in the relevant art may not be discussed in detail, but should be considered part of the specification where appropriate.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments of the present utility model will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic diagram of a pipeline structure of a liquid silicon source distribution valve box for a semiconductor according to an embodiment of the present utility model.
Fig. 2 is a schematic diagram of a piping structure of a liquid silicon source distribution valve box for a semiconductor according to a second embodiment of the present utility model.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Example 1
Fig. 1 is a schematic diagram of a pipeline structure of a liquid silicon source distribution valve box for a semiconductor according to an embodiment of the present utility model.
Referring to fig. 1, a normal outlet line 111, a liquid source line 112, a first air inlet line 113, a second air inlet line 114, and a purge line 115 are provided in the liquid silicon source distribution valve box 100 for semiconductor according to the present embodiment. The input end of the liquid source pipeline 112 is connected to the liquid inlet 101 of the valve box 100, the output end of the liquid source pipeline 112 is connected to the input end of the constant outlet pipeline 111, and is used for conveying a liquid silicon source, and the liquid source pipeline 112 is provided with a first valve 151 for controlling the liquid silicon source to be conveyed in the liquid source pipeline 112. The first gas inlet pipeline 113 is used for conveying a first purge gas; the second inlet line 114 is used for delivering a second purge gas; the input ends of the purge pipeline 115 are respectively connected to the first air inlet pipeline 113 and the second air inlet pipeline 114 to receive purge gas, the output ends of the purge pipeline 115 are connected to the input end of the constant outlet pipeline 111, a second valve for controlling the purge gas to be conveyed in the purge pipeline 115 is arranged on the purge pipeline 115, and the purge gas comprises the first purge gas and the second purge gas. The output end of the constant outlet pipeline 111 is connected to the common liquid outlet 102 of the valve box 100, and a third valve 153 for controlling the liquid silicon source or the purge gas to be conveyed in the constant outlet pipeline 111 is arranged on the constant outlet pipeline 111.
Specifically, when the valve box 100 is in the working state, the first valve 151 on the liquid source pipeline 112 and the third valve 153 on the normal outlet pipeline 111 are opened, and the second valve 152 on the purge pipeline 115 is closed, and the liquid silicon source flows from the liquid source pipeline 112 through the normal outlet pipeline 111 and then flows out from the normal liquid outlet 102; when the valve box 100 is in the purge state, the first valve 151 on the liquid source pipeline 112 is closed, the second valve 152 on the purge pipeline 115 is opened, and the third valve 153 on the normal outlet pipeline 111 is opened, and the first purge gas and the second purge gas enter the purge pipeline 115, so that the liquid silicon source in the pipeline (mainly the normal outlet pipeline 111) is discharged, and the cleaning efficiency of the liquid silicon source distribution system is improved.
In this embodiment, the first purge gas is hydrogen, the second purge gas is nitrogen (for example, pure nitrogen) with a first purity, and the two purge gases can sufficiently purge substances (liquid silicon source) in the pipeline, so as to improve the purge efficiency.
According to the technical scheme, the first air inlet pipeline 113 for conveying the first purge gas and the second air inlet pipeline 114 for conveying the second purge gas are arranged in the valve box 100, the input ends of the purge pipelines 115 are respectively communicated with the first air inlet pipeline 113 and the second air inlet pipeline 114, one path of purge gas is increased, and the cleaning efficiency of the liquid silicon source distribution system is improved.
In this embodiment, a third air inlet line 116 and an emergency outlet line 117 are also provided in the valve box 100. The third inlet line 116 is used to deliver a third purge gas. The first input end of the emergency outlet pipe 117 is connected to the third air inlet pipe 116, the second input end thereof is connected to the normal outlet pipe 111 through an emergency valve 154, and the output end thereof is coupled to the emergency outlet 103 of the valve box 100, so that the liquid silicon source can be emptied through the emergency outlet 103 when the output or input of the valve box 100 is abnormal. When an abnormality occurs in the output or input of the valve housing 100, the emergency valve 154 is opened, and the liquid silicon source inside the valve housing 100 is evacuated through the emergency liquid outlet 103 via the emergency outlet line 117.
In the present embodiment, check valves 155 are provided on the first air intake pipe 113, the second air intake pipe 114, and the third air intake pipe 116. The check valve 155 is provided to prevent the reverse flow of the corresponding purge gas.
In this embodiment, the first purge gas is hydrogen, the second purge gas is nitrogen of a first purity, the third purge gas is nitrogen of a second purity, and the second purity is less than the first purity. For example, the second purge gas is pure nitrogen and the third purge gas is low concentration nitrogen.
In this embodiment, a vacuum generator 161 is disposed on the emergency exit line 117 for providing a vacuum environment for the emergency exit line 117. The emergency exit line 117 is provided with a vacuum environment by the vacuum generator 161, causing the emergency exit 103 to evacuate the liquid silicon source.
As shown in fig. 1, in this embodiment, the liquid source line 112 has only one line, and accordingly, the purge line 115 has only one line.
In this embodiment, the emergency exit line 117 is connected to the constant exit line 111 through one of the emergency valves 154. The emergency valve 154 is an automatic valve which can be controlled to be automatically opened and closed. In particular, the automatic valve may be controlled to automatically open when an abnormality (e.g., leakage) occurs in the output or input of the valve housing 100, so that the liquid silicon source is directly discharged from the valve housing 100, thereby reducing contamination.
In this embodiment, the valve box 100 is provided with a plurality of emergency liquid outlets 103, a fourth branch 118 is disposed between the output end of the emergency outlet pipe 117 and each emergency liquid outlet 103, a plurality of fourth branches 118 are connected in parallel, and a fifth valve 158 is disposed on each fourth branch 118, and the fifth valve 158 is an automatic valve. The provision of a plurality of fourth branches 118 connected to the respective emergency outlets 103 can enhance the efficiency of the valve box 100 for evacuating the liquid silicon source in an emergency state, and can serve as redundancy to ensure the evacuation of the liquid silicon source.
In this embodiment, all of the automatic valves are communicatively connected to a controller 171 for controlling the opening and closing of the automatic valves. The controller 171 may remotely control the opening and closing of all the automatic valves, and when the valve housing 100 is leaked, the controller 171 may control all the automatic valves to be opened so that the liquid is directly discharged out of the valve housing 100, thereby reducing pollution.
In this embodiment, a high negative pressure vacuum pump 181 is disposed on each of the fourth branches 118 to provide a high negative pressure (negative pressure is greater than a preset threshold). The provision of the high negative pressure vacuum pump 181 assists in draining the liquid silicon source from the emergency liquid outlet 103.
In this embodiment, a pressure sensor PT is disposed on the liquid source pipeline 112, and is configured to measure the pressure of the liquid source pipeline 112 and convert pressure information into an electrical signal, and a pressure gauge PG is disposed on the purge pipeline 115, and is configured to manually detect the pressure on the purge pipeline.
Example two
Fig. 2 is a schematic diagram of a piping structure of a liquid silicon source distribution valve box for a semiconductor according to a second embodiment of the present utility model. As shown in fig. 2, the difference from the embodiment shown in fig. 1 is that in this embodiment, a plurality of normal outlet pipes 111 are disposed in the valve box 200, an output end of each normal outlet pipe 111 is connected to a normal liquid outlet 102 of the valve box 200, and each normal outlet pipe 111 is provided with a third valve 153; the liquid source line 112 includes a plurality of parallel first branches 2121, and each first branch 2121 is provided with a first sub-valve 256 for controlling the liquid silicon source to be delivered in the corresponding first branch 2121; the purge line 115 includes a plurality of parallel second legs 2151, each of the second legs 2151 having a second sub-valve 257 disposed thereon for controlling the delivery of the purge gas within the corresponding second leg 2151. Each of the first branches 2121 and one of the second branches 2151 are connected in parallel and then connected to one of the constant outlet pipes 111. The provision of multiple branches improves the efficiency of operation of the valve box 200.
When the valve box 200 is in the working state, the first sub-valve 256 on the corresponding first branch 2121 is opened, the second sub-valve 257 on the corresponding second branch 2121 is closed, the third valve 153 on the corresponding normal outlet pipe 111 is opened, and the liquid silicon source is discharged from the liquid source pipe 112 through the common liquid outlet 102 connected to the corresponding normal outlet pipe 111 after entering the first branch 2121. When the valve box 100 is in the purge state, the first sub-valve 256 on the corresponding first branch 2121 is closed, the second sub-valve 257 on the corresponding second branch 2121 is opened, the third valve 153 on the corresponding normal outlet line 111 is opened, and the purge gas enters the second branch 2151 and is discharged through the normal outlet 102 connected to the corresponding normal outlet line 111.
In this embodiment, the emergency exit line 117 comprises a plurality of emergency exit branches 2171 connected in parallel, each of the emergency exit branches 2171 being connected to one of the constant exit lines 111 by one of the emergency valves 154. The emergency valve 154 is an automatic valve. Each of the constant outlet pipes 111 corresponds to one of the emergency outlet legs 2171. The automatic valve can be controlled to be automatically opened and closed. In particular, the automatic valve may be controlled to automatically open when an abnormality (e.g., leakage) occurs in the output or input of the valve box 200, so that the liquid silicon source is directly discharged from the valve box 200, thereby reducing pollution.
In this embodiment, the valve box 200 is provided with a plurality of emergency liquid outlets 103, a fourth branch 118 is disposed between the output end of the emergency outlet pipe 117 and each emergency liquid outlet 103, a plurality of fourth branches 118 are connected in parallel, and a fifth valve 158 is disposed on each fourth branch 118, and the fifth valve 158 is an automatic valve. The provision of a plurality of fourth branches 118 connected to the respective emergency outlets 103 can enhance the efficiency of the valve box 200 for evacuating the liquid silicon source in an emergency state, and can serve as redundancy to ensure the evacuation of the liquid silicon source.
In this embodiment, all of the automatic valves are communicatively connected to a controller 171 for controlling the opening and closing of the automatic valves. The controller 171 may remotely control the opening and closing of all the automatic valves, and when the valve box 200 leaks, the controller 171 may control all the automatic valves to be opened so that the liquid is directly discharged out of the valve box 200, thereby reducing pollution.
In this embodiment, a high negative pressure vacuum pump 181 is disposed on each of the fourth branches 118 to provide a high negative pressure (negative pressure is greater than a preset threshold). The provision of the high negative pressure vacuum pump 181 assists in draining the liquid silicon source from the emergency liquid outlet 103.
In this embodiment, a pressure sensor PT is disposed on the liquid source pipeline 112, and is configured to measure the pressure of the liquid source pipeline 112 and convert pressure information into an electrical signal, and a pressure gauge PG is disposed on the purge pipeline 115, and is configured to manually detect the pressure on the purge pipeline.
According to the technical scheme, the first air inlet pipeline for conveying the first purge gas and the second air inlet pipeline for conveying the second purge gas are arranged in the valve box, the input ends of the purge pipelines are respectively communicated with the first air inlet pipeline and the second air inlet pipeline, one path of purge gas is increased, and the cleaning efficiency of the liquid silicon source distribution system is improved. When the valve box is in a working state, a first valve on the liquid source pipeline and a third valve on the normal outlet pipeline are opened, and a second valve on the purging pipeline is closed, wherein the liquid silicon source flows through the normal outlet pipeline from the liquid source pipeline, flows out of the normal outlet pipeline and flows out of the normal liquid outlet; when the valve box is in a purging state, a first valve on the liquid source pipeline is closed, a second valve on the purging pipeline is opened, and a third valve on the normal outlet pipeline is opened, and the first purging gas and the second purging gas enter the purging pipeline so as to discharge the liquid silicon source in the pipeline (mainly the normal outlet pipeline), so that the cleaning efficiency of the liquid silicon source distribution system is improved. In addition, through setting up third inlet line with urgent exit pipeline will urgent exit pipeline passes through urgent valve is connected to normal exit pipeline, when the valve box appears unusual, open urgent valve, the inside liquid silicon source of valve box flows through urgent exit pipeline passes through the urgent exit of valve box is emptied, strengthens the response ability under the emergency to it has the potential safety hazard to guarantee that chemical safety discharge avoids the maintenance time.
It is noted that relational terms such as second and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, the statement "comprises" and "comprises" does not exclude the presence of other elements than those listed in any process, method, article, or apparatus that comprises the element.
In this specification, each embodiment is described in a related manner, and identical and similar parts of each embodiment are all referred to each other, and each embodiment mainly describes differences from other embodiments.
The foregoing is merely a preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model. It should be noted that modifications and adaptations to the present utility model may occur to one skilled in the art without departing from the principles of the present utility model and are intended to be comprehended within the scope of the present utility model.
Claims (10)
1. A liquid silicon source distribution valve box for semiconductors, wherein a normal outlet pipeline is arranged in the valve box; the valve is characterized in that the valve box is also internally provided with:
The input end of the liquid source pipeline is connected to the liquid inlet of the valve box, the output end of the liquid source pipeline is connected to the input end of the constant outlet pipeline and is used for conveying a liquid silicon source, and the liquid source pipeline is provided with a first valve for controlling the liquid silicon source to be conveyed in the liquid source pipeline;
a first inlet line for delivering a first purge gas;
a second inlet line for delivering a second purge gas;
The input end of the purging pipeline is respectively communicated with the first air inlet pipeline and the second air inlet pipeline to receive purging gas, the output end of the purging pipeline is connected to the input end of the normal outlet pipeline, a second valve for controlling the purging gas to be conveyed in the purging pipeline is arranged on the purging pipeline, and the purging gas comprises the first purging gas and the second purging gas;
The output end of the constant outlet pipeline is connected to a common liquid outlet of the valve box, and a third valve for controlling the liquid silicon source or the purge gas to be conveyed in the constant outlet pipeline is arranged on the constant outlet pipeline.
2. The liquid silicon source distribution valve box for semiconductors according to claim 1, wherein the valve box is further provided with:
A third inlet line for delivering a third purge gas;
And the first input end of the emergency outlet pipeline is communicated with the third air inlet pipeline, the second input end of the emergency outlet pipeline is connected to the normal outlet pipeline through an emergency valve, and the output end of the emergency outlet pipeline is coupled to an emergency liquid outlet of the valve box and is used for exhausting the liquid silicon source through the emergency liquid outlet when the output or input of the valve box is abnormal.
3. The liquid silicon source distribution valve box for semiconductor according to claim 2, wherein check valves are provided in the first air intake pipe, the second air intake pipe, and the third air intake pipe.
4. The liquid silicon source distribution valve box for semiconductors according to claim 2, wherein the first purge gas is hydrogen, the second purge gas is nitrogen of a first purity, the third purge gas is nitrogen of a second purity, and the second purity is smaller than the first purity.
5. A liquid silicon source distribution valve box for semiconductors as set forth in claim 2 wherein a vacuum generator is provided on the emergency exit line for providing a vacuum environment for the emergency exit line.
6. The liquid silicon source distribution valve box for semiconductors according to claim 2, wherein a plurality of normal outlet pipelines are arranged in the valve box, the output end of each normal outlet pipeline is connected to a normal liquid outlet of the valve box, and each normal outlet pipeline is provided with a third valve;
The liquid source pipeline comprises a plurality of first branches connected in parallel, and each first branch is provided with a first sub-valve for controlling the liquid silicon source to be conveyed in the corresponding first branch;
The purging pipeline comprises a plurality of second branches connected in parallel, and each second branch is provided with a second sub-valve for controlling the purging gas to be conveyed in the corresponding second branch;
Each first branch is connected with one second branch in parallel and then communicated with one constant outlet pipeline.
7. The liquid silicon source distribution valve box for semiconductors according to claim 6, wherein the emergency outlet line comprises a plurality of emergency outlet branches connected in parallel, each of the emergency outlet branches being connected to one of the constant outlet lines through one of the emergency valves;
The emergency valve adopts an automatic valve.
8. The liquid silicon source distribution valve box for semiconductors according to claim 2, wherein the valve box is provided with a plurality of emergency liquid outlets, a fourth branch is arranged between the output end of the emergency outlet pipeline and each emergency liquid outlet, a plurality of fourth branches are connected in parallel, a fifth valve is arranged on each fourth branch, and the fifth valve is an automatic valve.
9. A liquid silicon source dispensing valve box for semiconductors as recited in claim 7 or 8, wherein all of said automatic valves are communicatively connected to a controller for controlling the opening and closing of all of said automatic valves.
10. The liquid silicon source distribution valve box for semiconductor according to claim 8, wherein each of said fourth branches is provided with a high negative pressure vacuum pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323479610.8U CN221472899U (en) | 2023-12-19 | 2023-12-19 | Liquid silicon source distribution valve box for semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323479610.8U CN221472899U (en) | 2023-12-19 | 2023-12-19 | Liquid silicon source distribution valve box for semiconductor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221472899U true CN221472899U (en) | 2024-08-06 |
Family
ID=92371821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202323479610.8U Active CN221472899U (en) | 2023-12-19 | 2023-12-19 | Liquid silicon source distribution valve box for semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221472899U (en) |
-
2023
- 2023-12-19 CN CN202323479610.8U patent/CN221472899U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5417236A (en) | Automated process gas supply system for evacuating a process line | |
| JP6047672B1 (en) | Vacuum processing equipment | |
| CN103372557A (en) | Blowing and purifying method and device thereof | |
| CN211450364U (en) | Gas distribution pipeline system and gas distribution valve box | |
| CN108405501A (en) | Blowing pipeline device and process gas convey cleaning systems | |
| CN221472899U (en) | Liquid silicon source distribution valve box for semiconductor | |
| CN210979351U (en) | Container grid supply system for conveying special gas | |
| CN102155621B (en) | Medium pressure regulating box in compressed natural gas supplying station and pressure regulating and gas supplying method thereof | |
| CN100494764C (en) | Gas piping device for connection to the process chamber of a high-density plasma machine | |
| CN208090318U (en) | A kind of full-automatic special liquid supply cabinet | |
| CN219944633U (en) | Delivery lines for devices manufactured according to the powder bed method | |
| CN110906003A (en) | Leak-free detection system and method for a sealing device with a collecting device | |
| CN211232413U (en) | Be used for large-traffic gaseous supply equipment | |
| KR102325324B1 (en) | Residual process gas exhaust apparatus and method for exhausting residual process gas using the same | |
| CN212298533U (en) | A mix gas conveying equipment for special gas mixture ratio | |
| CN211813415U (en) | Hydrogen fluoride liquid chemical loading and unloading pipeline system | |
| CN210979362U (en) | Long-tube trailer supply system for supplying special gas | |
| US20240353064A1 (en) | Method and an apparatus for preventing the emission of harmful gases into atmosphere | |
| CN207514590U (en) | A kind of gas leakage safety device and gas leakage security system | |
| CN216556501U (en) | Tail row structure and LPCVD (low pressure chemical vapor deposition) equipment with same | |
| CN222100146U (en) | Exhaust gas system for vacuum coating | |
| CN111707499A (en) | A high-precision sampling device for hazardous chemicals | |
| CN118309933A (en) | Pneumatic supply pipeline and CVD device | |
| US20240111313A1 (en) | Gas supply control device | |
| TW202417675A (en) | Flow control arrangements with enclosed flow switches and isolation valves, semiconductor processing systems, and flow control methods |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |