CN221120919U

CN221120919U - Vacuum push-pull valve

Info

Publication number: CN221120919U
Application number: CN202323159399.1U
Authority: CN
Inventors: 孟大伟; 刘纯; 郭小虎
Original assignee: Beijing Gerchin Technology Co ltd
Current assignee: Beijing Gerchin Technology Co ltd
Priority date: 2023-11-22
Filing date: 2023-11-22
Publication date: 2024-06-11
Anticipated expiration: 2033-11-22

Abstract

The utility model relates to the field of vacuum valves, in particular to a vacuum push-pull valve, which comprises a push-pull rod, a valve body sleeved on the push-pull rod and an air pipe vertically arranged at the bottom end of the push-pull rod, wherein the push-pull rod and the valve body are vertically arranged, and a gap is arranged between the valve body and the push-pull rod, and the vacuum push-pull valve is characterized in that: the valve body bottom edge sets up towards central echelonment, in addition, still includes: the limiting plate is horizontally arranged at the bottom end of the valve body, and threaded holes for installing the limiting plate are formed in the limiting plate in a penetrating mode; the relief groove is matched with the bottom end of the valve body and is arranged on the limiting plate and used for limiting the valve body; the limiting block is fixedly connected to the side wall of the push-pull rod, a gap is formed between the side wall of the limiting block and the inner wall of the valve body, and the limiting block is in a notch ring shape and is used for ventilation. The utility model has the effects of keeping the vacuum sealing state of the vacuum pulling valve and reducing the risk of the pull-out failure of the push-pull rod.

Description

Vacuum push-pull valve

Technical Field

The application relates to the field of vacuum valves, in particular to a vacuum push-pull valve.

Background

The vacuum pulling valve is generally composed of a valve body, a valve seat, a push-pull rod and a connecting disc, and is generally connected with a control component in a vacuum pipe system through the connecting disc and used for controlling the flow of gas in the vacuum system and keeping the vacuum degree and the stability of the system.

The vacuum pull valve needs to have the following features and advantages:

1. High vacuum sealing performance: the lifting valve is stably connected with the valve seat, so that gas leakage can be effectively prevented, and the stability and high vacuum degree of the vacuum system are ensured;

2. High pressure resistance: the vacuum lifting valve needs to bear higher pressure in a high-vacuum system, so that the safety and reliability of the system are ensured;

3. long life and low maintenance cost: the vacuum pulling valve needs to adopt wear-resistant materials and structural design, and has longer service life and lower maintenance cost;

4. And (3) fast switching: the pulling mechanism of the vacuum pulling valve needs to realize quick switching action, so that the control of the gas flow is more accurate and rapid.

Vacuum pull valves are widely used in vacuum equipment and systems in the fields of vacuum metallurgy, semiconductor manufacturing, aerospace.

However, the bottom of the existing vacuum pulling valve is easy to shake when the existing vacuum pulling valve is stressed, a plurality of micro leakage points exist, air leakage is easy to occur, and the risk that the push-pull rod is pulled out to lose efficacy exists when the existing vacuum pulling valve is excessively stressed.

With respect to the above related art, the inventor considers that the existing vacuum pulling valve cannot maintain a high vacuum state during the use and operation, and structural improvement is made to improve the stability of maintaining the vacuum state of the vacuum pulling valve.

Disclosure of utility model

In order to maintain the vacuum sealing state of the vacuum pulling valve and reduce the risk of pull-out failure of the push-pull rod, the utility model provides a vacuum push-pull valve.

The utility model provides a vacuum push-pull valve which adopts the following technical scheme:

The utility model provides a vacuum push-and-pull valve, includes push-and-pull rod, cover are established valve body on the push-and-pull rod and the trachea of vertical installation in the push-and-pull rod bottom, the push-and-pull rod with the equal vertical setting of valve body is provided with clearance, its characterized in that between valve body and the push-and-pull rod:

the edge of the bottom end of the valve body is arranged in a step shape towards the center, and in addition, the valve body also comprises a valve body;

The limiting plate is horizontally arranged at the bottom end of the valve body, a threaded hole for installing the limiting plate is formed in the limiting plate in a penetrating mode, and the bottom end of the push-pull rod penetrates through the limiting plate and extends to the lower portion of the limiting plate;

the relief groove is matched with the bottom end of the valve body and is arranged on the limiting plate and used for limiting the valve body;

The limiting block is fixedly connected to the side wall of the push-pull rod, a gap is formed between the side wall of the limiting block and the inner wall of the valve body, and the limiting block is in a notch ring shape and is used for ventilation.

By adopting the technical scheme, the bottom end of the valve body which is vertically arranged is clamped by the yielding groove on the limiting plate, the bottom end of the valve body is provided with the stepped groove which is matched with the yielding groove, the stability of the valve body when the valve body is vertically arranged is enhanced, the situation that the valve body is mounted unstably and continuously in micro-shaking to cause the continuous generation of micro-leakage points is avoided, and the matching of the yielding groove and the bottom end of the valve body is a foundation for preventing the micro-leakage of the valve body; the limiting block is arranged on the push-pull rod, the notch on the limiting block enables gas to pass through, the sliding of the push-pull rod and the inner wall of the valve body is not affected, normal use of the lifting valve is not affected, but the limiting block reduces the section distance between the push-pull rod and the inner wall of the valve body through the annular structure of the notch, so that the air resistance is increased when the push-pull rod slides, when the push-pull rod is stressed greatly, the air resistance enables the instant required force of the sliding of the push-pull rod to be increased, and the push-pull rod is not pulled out easily, so that the push-pull rod is prevented from being pulled out of the valve body when the stress is high.

Optionally, further comprising;

the gasket is sleeved at the top end of the side wall of the push-pull rod, and two gaskets are arranged at different heights;

The backing ring is sleeved on the push-pull rod, is arranged between the two gaskets and is simultaneously abutted against the two gaskets;

And the gasket groove is formed in the part, corresponding to the gasket, of the inner wall of the valve body and is used for clamping the gasket.

Through adopting above-mentioned technical scheme, setting up of two washers sets up two barriers in the valve body inner space, the gas tightness of reinforcing valve body inner chamber sets up the interval between two washers of backing ring support in addition, avoids two backing ring intervals too little, and the mutual interference sets up the pad groove of adaptation packing ring in addition and holds and joint packing ring, than utilizing the cross-section radius relation of pad inslot wall and packing ring, makes the packing ring outstanding in the backing ring realize the packing ring in the inseparable line contact of push-and-pull rod, has reduced the friction loss of backing ring and has prolonged the effective airtight life of valve body.

Optionally, further comprising;

The sleeve is sleeved at the top end of the push-pull rod, the top end of the sleeve extends out of the valve body, and a sealing part which is abutted against the valve body is arranged at the part of the sleeve, which is close to the valve body, and is used for sealing the interior of the valve body.

By adopting the technical scheme, the sleeve is used as a top structural member of the push-pull rod and used for sealing the inner cavity of the valve body at the top, the sealing part arranged on the sleeve is abutted against the inner wall of the valve body, the abutting surface of the sealing part abutted against the inner wall of the valve body is staggered with the abutting surface of the gasket groove and the gasket ring, so that the air tightness is further enhanced, in addition, the sleeve is also used as a spacing stabilizing member of the push-pull rod in the inner cavity of the valve body, the contact area between the sealing part and the inner cavity of the valve body is increased, and the relative stability between the push-pull rod and the valve body is further improved; the connection between the sleeve and the push-pull rod is generally in threaded connection, namely, a worker screws the top end of the push-pull rod and vertically slides relative to the sleeve, so that the stability of the push-pull rod is further enhanced.

Optionally, further comprising;

The middle ring is sleeved between the sleeve corresponding to the push-pull rod and the gasket, and is simultaneously abutted against the sleeve and the gasket for separating the sleeve and the gasket.

By adopting the technical scheme, the problem of connection of the inner wall member of the valve body is considered, the part of the inner wall of the valve body, which is close to the backing ring, the gasket and the middle ring, is generally provided with a through groove communicated with the backing groove, or the backing groove is enlarged to enable the backing groove to simultaneously contain the backing ring, the gasket, the middle ring and one end of the sleeve, so that the gasket, the gasket and the middle ring are conveniently installed while the air tightness is not affected, and the design cost is reduced; in addition, the lubricating property of the backing ring can reduce friction loss and prolong the service life of the top gasket.

Optionally, the backing ring is made of oxygen-free copper.

Through adopting above-mentioned technical scheme, oxygen-free copper material is as the sealing washer material that is commonly used in the present superhigh vacuum seal connection, and hardness is higher, and the deformability is strong, and weight is lighter, the cost is less than the metal that other hardness are high, is the first choice of this scheme backing ring material, under the occasion that certain high temperature and sealing performance require highly. The surface of the oxygen-free copper backing ring can be plated with a layer of gold to avoid oxidation of the oxygen-free copper.

Optionally, further comprising;

The sealing ring is arranged at the bottom end of the limiting plate, a ring-shaped groove adapting to the sealing ring is formed at the bottom end of the limiting plate, and the sealing ring is made of rubber.

Through adopting above-mentioned technical scheme, owing to push-and-pull rod and limiting plate's contact relation, there is the gap of air infiltration on the face that runs through between the two, and the sealing washer sets up in the limiting plate bottom side, corresponds the part of push-and-pull rod and wraps up in and hold the push-and-pull rod, when the limiting plate bottom is installed on the subassembly of ventilating, the sealing washer extrusion deformation, the tight limit plate bottom of closing and outside ventilation gap, reinforcing airtight effect.

Optionally, further comprising;

The bottom gasket is sleeved at the bottom of the push-pull rod, and a groove for clamping the bottom gasket is formed in the valve body corresponding to the bottom gasket.

Through adopting above-mentioned technical scheme, the packing ring is close to the partial setting of push-and-pull rod bottom, cooperates with the double-packing ring at push-and-pull rod top, additionally sets up sealed checkpoint in the valve body bottom, further strengthens the gas tightness, and the joint relation of bottom packing ring and push-and-pull rod lateral wall can play the fixed action simultaneously, makes up the defect that the fixed point of bottom push-and-pull rod is not enough.

Optionally, further comprising;

the hexagonal screwdriver head is fixedly connected to the top end of the push-pull rod and used for screwing operation.

By adopting the technical scheme, the hexagonal screwdriver head matched sleeve is practical and convenient for workers to screw the sleeve.

Drawings

Fig. 1 is a schematic overall structure of an embodiment of the present application.

Fig. 2 is a schematic view of the structure for highlighting the interior of the valve body.

Fig. 3 is a cross-sectional view of an embodiment of the present application.

Reference numerals illustrate: 1. a valve body; 11. a communicating pipe; 12. a mounting plate; 13. a limiting plate; 131. a threaded hole; 132. a relief groove; 133. a seal ring; 2. a push-pull rod; 21. an air pipe; 22. a bottom gasket; 23. a limiting block; 24. a sleeve; 241. a seal ring; 25. a gasket; 26. a backing ring; 27. an intermediate ring; 28. hexagonal screwdriver head; 29. and a pad groove.

Detailed Description

The application is described in further detail below with reference to fig. 1-3.

The embodiment of the application discloses a vacuum push-pull valve. Referring to fig. 1 and 2, a vacuum push-pull valve comprises a valve body 1 vertically arranged and a communicating pipe 11 horizontally arranged, wherein the valve body 1 is in a tubular shape, the communicating pipe 11 is arranged at the central part of the valve body 1 and is communicated with the interior of the valve body 1, the valve body 1 is in a three-way tubular shape, one end, far away from the valve body 1, of the communicating pipe 11 is fixedly connected with a mounting disc 12, the mounting disc 12 is used for mounting the valve body 1 on a vacuum device, a push-pull rod 2 is slidingly connected in the interior of the valve body 1, and the length of the push-pull rod 2 is longer than that of the valve body 1; the bottom end of the push-pull rod 2 is fixedly connected with a vertically arranged air pipe 21, and a micro pipeline communicated with the air pipe 21 is arranged inside the push-pull rod 2. The push-pull rod 2 slides upwards along the valve body 1, when the bottom end of the push-pull rod 2 slides upwards to the upper part of the communicating pipe 11, the vacuum device is not sealed any more, the bottom end of the push-pull rod 2 slides downwards to the lower part of the communicating pipe 11, the communicating pipe 11 is blocked, and the air pipe 21 is closed after the air pipe 21 is used for pumping out the internal air, so that a vacuum environment is provided.

Referring to fig. 1 and 2, a limiting plate 13 is horizontally arranged at the bottom end of the valve body 1, a yielding groove 132 is formed in the limiting plate 13 corresponding to the push-pull rod 2, the yielding groove 132 is used for clamping the push-pull rod 2, and correspondingly, the bottom end of the push-pull rod 2 is arranged in a stepped manner so as to be matched with the yielding groove 132; the limiting plate 13 is provided with a threaded hole 131 for installing the push-pull rod 2, and the threaded hole is used for installing and fixing the limiting plate 13 on the surface of a vacuum pumping piece, so that the push-pull rod 2 and the valve body 1 are fixed.

In this embodiment, the relief groove 132 is provided, the bottom end of the valve body 1 is clamped, the stability of the clamping surface of the valve body 1 and the limiting plate 13 is improved, and the unstable condition caused by continuous shaking of the push-pull rod 2 relative to the valve body 1 is avoided, and air leakage is easy.

Referring to fig. 3, a sealing ring 133 is disposed at the bottom end of the limiting plate 13, and the radius of the sealing ring 133 is larger than that of the push-pull rod 2, but smaller than that of the section of the valve body 1. The sealing rings 133 are arranged close to the push-pull rods 2 but keep a distance between the push-pull rods 2, when the limiting plates 13 are abutted against the surfaces of the vacuum pumping pieces, the sealing rings 133 are extruded and deformed to seal gaps of the limiting plates 13 on the surfaces of the vacuum pumping pieces, and meanwhile the extruded sealing rings 133 are prevented from obstructing sliding of the push-pull rods 2.

Referring to fig. 2 and 3, a bottom gasket 22 is sleeved at the bottom end of the push-pull rod 2, a bottom gasket groove 29 is formed in the inner wall of the valve body 1 corresponding to the bottom gasket 22, and the bottom gasket 22 is clamped in the bottom gasket groove 29; the push-pull rod 2 is fixedly connected with a limiting block 23, and the limiting block 23 is sleeved on the push-pull rod 2 in a notch ring shape. The push-pull rod 2 is arranged in a notch ring shape to enable gas to pass through, normal use of the vacuum pulling valve is not affected, meanwhile, the notch is utilized to narrow a gas circulation channel, air resistance is increased, and the push-pull rod 2 is not easy to pull out of the valve body 1 when the stress of the push-pull rod 2 is large. The embodiment of the application is additionally provided with the bottom gasket 22, which is used as a sealing element arranged at the bottom end inside the valve body 1, so that the clamping effect on the push-pull rod 2 is enhanced by the clamping connection of the bottom gasket 22 and the bottom gasket groove 29 while the air tightness is enhanced.

Referring to fig. 2 and 3, the top end of the push-pull rod 2 is in threaded connection with a sleeve 24, the bottom end of the sleeve 24 is arranged inside the valve body 1, the top end of the sleeve 24 extends out of the top end of the valve body 1, a sealing ring 241 is arranged at the part of the sleeve 24 corresponding to the top end opening of the valve body 1, and the outer wall of the sealing ring 241 abuts against the inner wall of the valve body 1. In the embodiment of the application, the sleeve 24 is used as a top end sealing piece to protect the internal structure of the valve body 1, the contact area between the outer side wall of the sealing ring 241 and the inner wall of the valve body 1 is increased, meanwhile, the stability of the push-pull rod 2 is ensured through threaded connection, the push-pull rod 2 is prevented from continuously shaking, and when the push-pull rod 2 is pulled outwards, a worker is required to twist the sleeve 24, so that the push-pull rod 2 is prevented from independently sliding relatively in a free state.

For ease of illustration, the threads are not shown.

Referring to fig. 2 and 3, a gasket 25 is sleeved on a part of the push-pull rod 2, which is close to the sleeve 24, two gaskets 25 are arranged, a backing ring 26 is sleeved between the two gaskets 25 of the push-pull rod 2, and two ends of the backing ring 26 are simultaneously abutted against the two gaskets 25 and used for supporting the distance between the two gaskets 25; an intermediate ring 27 is sleeved between the gasket 25 and the sleeve 24, and the intermediate ring 27 is simultaneously abutted against the gasket 25 and the sleeve 24 and is used for protecting the gasket 25 and preventing the sleeve 24 from being pressed by the sleeve 24, and the sleeve 24 and the gasket 25 from collision when the push-pull rod 2 is pulled up to cancel the threaded connection; in addition, according to the embodiment of the application, through the lubrication effect of the backing ring 26, the friction loss of the gasket 25 is reduced, and the service life of the gasket 25 is prolonged.

Referring to fig. 3, a gasket groove 29 is formed in a portion of the inner wall of the valve body 1 corresponding to the gasket 25, the gasket ring 26 and the intermediate ring 27, one end of the gasket groove 29 extends upward to the top end of the valve body 1, and the cross-sectional diameter of the portion of the gasket groove 29 corresponding to the sealing ring 241 is larger than the cross-sectional diameter of the portion of the gasket groove 29 corresponding to the gasket 25. The contact surface between the inner wall of the valve body 1 and the gasket 25 is staggered with the contact surface between the inner wall of the valve body 1 and the sealing ring 241, so that possible leakage points of gas are arranged in different cylindrical surfaces, and the sealing effect is further enhanced structurally.

In the embodiment of the application, the backing ring 26 is made of oxygen-free copper, and the surface layer is plated with gold to enhance the physical structural strength of the backing ring 26.

Referring back to fig. 1, the push-pull rod 2 is provided at its top with a hexagonal nipple 28. The hex head 28 cooperates with the sleeve 24 to facilitate the screwing by a worker.

The implementation principle of the vacuum push-pull valve provided by the embodiment of the application is as follows: the vacuum push-pull valve in the embodiment is provided with the top double-gasket 25 and the bottom gasket 25, wherein the three gaskets 25 are arranged, the air tightness is enhanced, the fixing effect is achieved, the limiting block 23 is arranged on the push-pull rod 2, the push-pull rod 2 is prevented from being pulled out of the valve body 1 when being stressed greatly, the oxygen-free copper backing ring 26 is arranged, the sealing performance is enhanced, the lubricating performance is utilized, and the service life of the top gasket 25 is prolonged.

The above embodiments are not intended to limit the scope of the present application, so: all equivalent changes in structure, shape and principle of the application should be covered in the scope of protection of the application.

Claims

1. The utility model provides a vacuum push-and-pull valve, includes push-and-pull rod (2), cover establish valve body (1) on push-and-pull rod (2) and the trachea (21) of vertical installation in push-and-pull rod (2) bottom, push-and-pull rod (2) with valve body (1) all vertically set up, be provided with the clearance between valve body (1) and push-and-pull rod (2), its characterized in that:

The bottom edge of the valve body (1) is arranged in a step shape towards the center, and in addition, the valve body also comprises;

The limiting plate (13), the limiting plate (13) is horizontally arranged at the bottom end of the valve body (1), a threaded hole (131) for installing the limiting plate (13) is formed in the limiting plate in a penetrating mode, and the bottom end of the push-pull rod (2) penetrates through the limiting plate (13) and extends to the lower portion of the limiting plate (13);

The yielding groove (132) is matched with the bottom end of the valve body (1) and is arranged on the limiting plate (13) and used for limiting the valve body (1);

The limiting block (23), limiting block (23) is fixedly connected on the side wall of push-pull rod (2), a gap is arranged between the side wall of limiting block (23) and the inner wall of valve body (1), and limiting block (23) is in a notch ring shape and is used for ventilation.

2. A vacuum push-pull valve according to claim 1, wherein: also comprises;

The gasket (25) is sleeved at the top end of the side wall of the push-pull rod (2), and two gaskets (25) are arranged at different heights;

The backing ring (26) is sleeved on the push-pull rod (2), and the backing ring (26) is arranged between the two gaskets (25) and is simultaneously abutted against the two gaskets (25);

And the gasket groove (29) is formed in the inner wall of the valve body (1) at a part corresponding to the gasket (25) and is used for clamping the gasket (25).

3. A vacuum push-pull valve according to claim 2, characterized in that: also comprises;

The sleeve (24), sleeve (24) cover is established push-and-pull rod (2) top, sleeve (24) top extends valve body (1), and the part that sleeve (24) is close to valve body (1) is provided with the sealing portion of butt valve body (1) for seal valve body (1) inside.

4. A vacuum push-pull valve according to claim 3, wherein: also comprises;

The middle ring (27) is sleeved between the sleeve (24) and the gasket (25) corresponding to the push-pull rod (2), and is abutted against the sleeve (24) and the gasket (25) at the same time, so as to separate the sleeve (24) and the gasket (25).

5. A vacuum push-pull valve according to claim 2, characterized in that: the backing ring (26) is made of oxygen-free copper.

6. A vacuum push-pull valve according to claim 1, wherein: also comprises;

the sealing ring (133), sealing ring (133) set up limiting plate (13) bottom, limiting plate (13) bottom is provided with the annular groove of adaptation sealing ring (133), and sealing ring (133) adopts the rubber material.

7. A vacuum push-pull valve according to claim 1, wherein: also comprises;

The bottom gasket (22), bottom gasket (22) cover is established push-and-pull rod (2) bottom, valve body (1) corresponds bottom gasket (22) set up the groove that is used for joint bottom gasket (22).

8. A vacuum push-pull valve according to claim 1, wherein: also comprises;

The hexagonal screwdriver head (28) is fixedly connected to the top end of the push-pull rod (2) and used for screwing operation.