CN221081910U - Multilayer piezoelectric ceramic driver - Google Patents
Multilayer piezoelectric ceramic driver Download PDFInfo
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- CN221081910U CN221081910U CN202322407137.6U CN202322407137U CN221081910U CN 221081910 U CN221081910 U CN 221081910U CN 202322407137 U CN202322407137 U CN 202322407137U CN 221081910 U CN221081910 U CN 221081910U
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Abstract
The utility model discloses a multilayer piezoelectric ceramic driver, which comprises a plurality of square piezoelectric ceramic plates, wherein electrode layers are respectively arranged on the front surface and the back surface of each piezoelectric ceramic plate, and oppositely arranged electrodes are respectively arranged on the side surfaces of one opposite side of each piezoelectric ceramic plate; the electrode layer on one side, close to the left electrode, of the front surface of the piezoelectric ceramic plate is contacted with the left edge of the piezoelectric ceramic plate to form a full-electrode arrangement without leaving white; electrode layers on the other three sides of the front face of the piezoelectric ceramic plate are 0.5-1.5mm away from the outer side edge of the piezoelectric ceramic plate so as to form an electrode white-keeping area, and a glass glaze layer is printed on the electrode white-keeping area. According to the multilayer piezoelectric ceramic driver, the molecular silver paste layer and the glass glaze layer are arranged between the piezoelectric ceramic plates, and then the integration of a plurality of single-layer piezoelectric ceramic sheets is realized through brazing connection, so that the use of an organic matter adhesive is avoided, the application of the multilayer piezoelectric ceramic driver at a higher temperature can be met, meanwhile, the multilayer piezoelectric ceramic driver has the characteristics of large displacement and large moment, and the mechanical strength is improved to a greater extent than that of a traditional bonding preparation method.
Description
Technical field:
The utility model relates to the technical field of piezoelectric devices, in particular to a multilayer piezoelectric ceramic driver.
The background technology is as follows:
The piezoelectric ceramic material has piezoelectric effect and inverse piezoelectric effect, and can realize the mutual conversion of mechanical energy and electric energy. The piezoelectric actuator can be prepared by using the inverse piezoelectric effect of piezoelectric ceramics, so as to realize accurate displacement control or output strong thrust. In the fields of electronics, driving, medical treatment and the like, the piezoelectric driver has the advantages of extremely high response speed, large output torque, high linearity and the like, so that the piezoelectric driver is widely applied. The output displacement of the piezoelectric actuator is proportional to the magnitude of the pushing force (in the case of 500V/mm or less) to the applied voltage, and the larger the applied voltage is, the larger the output displacement is. However, there is a limit to the applied voltage of the single-layer piezoelectric driver, that is, less than 2000V per mm; when exceeding 2000V, the output displacement is nonlinear with the voltage, and there is a risk of breakdown. The single-layer piezoelectric ceramic is in a stacked structure, and a structure of mechanical series connection and circuit parallel connection is realized through circuit design, so that the single-layer piezoelectric ceramic has the characteristics of more accurate linear displacement repeatability, larger displacement and the like under lower working voltage, and a multi-layer piezoelectric ceramic driver is formed. The aim of low-voltage and large-displacement driving of the multilayer piezoelectric ceramic driver can be realized by increasing the lamination quantity of the piezoelectric ceramics and reducing the thickness of a single layer.
The existing multilayer piezoelectric ceramic driver is mainly manufactured by the following method: 1) The single-layer piezoelectric ceramic element is integrated into a multi-layer piezoelectric ceramic driver, and is specifically manufactured by processing the thin sheets through an adhesive and laminating and bonding the thin sheets; 2) The piezoelectric ceramic green ceramic sheet is prepared by adopting a tape casting technology, using silver/palladium electrodes to print as inner electrodes, and adopting a lamination method to Co-fire the piezoelectric ceramic green ceramic sheet and the silver/palladium electrodes at a Low Temperature, namely LTCC (Low-Temperature Co-FIRED CERAMICS) technology.
The prior art solutions described above have the following drawbacks: when the working temperature of the multilayer piezoelectric ceramic driver manufactured by the first method is more than or equal to 100 ℃, the adopted adhesive is generally hot melt adhesive, so that the sheet and the adhesive are easily separated by heating, the device performance is greatly reduced and even fails, the multilayer piezoelectric ceramic driver is not suitable for a high-temperature working environment, silver layers among ceramic sheets are required to be electrically conducted, and the thickness of a cementing layer is difficult to meet the requirement of uniform thickness on micron scale; the multilayer piezoelectric ceramic driver prepared by the second method has low strength of the piezoelectric ceramic sheet due to low sintering temperature, and has low comprehensive performance, high preparation requirement and complex process although the situation of high Wen Cengjian separation does not exist.
Therefore, further improvements are needed.
The utility model comprises the following steps:
The technical problem to be solved by the utility model is to provide the multilayer piezoelectric ceramic driver, which realizes the integration of a plurality of single-layer piezoelectric ceramic sheets by arranging the molecular silver paste layer and the glass glaze layer between the piezoelectric ceramic sheets and then connecting the ceramic sheets by brazing, avoids the use of an organic matter adhesive, can meet the application of the organic matter adhesive at a higher temperature (200 ℃), has the characteristics of large displacement and large moment, and has the mechanical strength which is greatly improved compared with the traditional adhesive preparation method.
The technical scheme of the utility model is that the multilayer piezoelectric ceramic driver comprises a plurality of square piezoelectric ceramic plates, wherein electrode layers are respectively arranged on the front surface and the back surface of each piezoelectric ceramic plate, and oppositely arranged electrodes are respectively arranged on the side surfaces of one opposite side of each piezoelectric ceramic plate; wherein,
The electrode layer on one side of the front surface of the piezoelectric ceramic plate, which is close to the left electrode, is contacted with the left edge of the piezoelectric ceramic plate to form a full-electrode arrangement without leaving white; electrode layers on the other three sides of the front surface of the piezoelectric ceramic sheet are 0.5-1.5mm away from the outer side edge of the piezoelectric ceramic sheet so as to form an electrode white-keeping area, and a glass glaze layer is printed on the electrode white-keeping area;
The electrode layer on one side, close to the right electrode, of the back surface of the piezoelectric ceramic plate is contacted with the right edge of the piezoelectric ceramic plate, and the full electrode arrangement is formed without leaving white; electrode layers on the other three sides of the back surface of the piezoelectric ceramic sheet are 0.5-1.5mm away from the outer side edge of the piezoelectric ceramic sheet so as to form an electrode white-keeping area, and a glass glaze layer is printed on the electrode white-keeping area;
The front and back electrode layers of the piezoelectric ceramic piece are also printed with brazing layers, and a plurality of brazing layers are distributed on the electrode layers at intervals;
The piezoelectric ceramic plates are sequentially stacked and welded through the brazing layer, and electrodes on adjacent surfaces of the piezoelectric ceramic plates are oppositely arranged to be interdigital.
The piezoelectric ceramic plate selected by the utility model is a mature commercial P-5H type piezoelectric ceramic material, and has the electrical properties of epsilon T 33＝3400、d33 being more than or equal to 600pC/N and dielectric loss tan delta being less than or equal to 2.5 percent. The piezoelectric ceramic sheet is a square sheet with a plane of 15mm multiplied by 15mm and a thickness of 0.15-1.0 mm.
Preferably, the electrode layer is coated with silver paste, and the thickness of the electrode layer is 3-6 μm. Screen printing molecular silver paste on the piezoelectric ceramic plate, selecting 200-500 mesh screen printing electrode patterns, and designing corresponding electrode layer patterns in order to ensure that the prepared multilayer piezoelectric driver has a structure of mechanical series connection and circuit parallel connection, wherein one side of the front electrode of the piezoelectric ceramic plate is provided with a full electrode, and the full electrode is contacted with the edge of the piezoelectric ceramic plate; the pattern of the electrode layer on the other three sides and the left edge of the piezoelectric ceramic sheet are 0.5-1.5mm, the thickness of the printing silver paste is 3-6 mu m by adopting a screen printing preparation method, and the printing silver paste is dried at 100-250 ℃ after the printing is finished; after drying, the back electrode layer of the piezoelectric ceramic plate is printed, and the back electrode layer pattern and the front electrode layer pattern are positioned on different sides in the same direction, so that the electrode layers on the front and the back are ensured to be interdigital when being stacked into a multilayer piezoelectric driver.
Preferably, the glass-glazing layer has a thickness of 6 to 12. Mu.m. And (3) printing glass glaze, selecting screen printing patterns with 200-500 meshes, and designing corresponding screen patterns in order to ensure that the prepared multilayer piezoelectric driver has a structure of mechanical series connection and circuit parallel connection. Thus, both sides of the piezoelectric ceramic sheet are covered with glass enamel outside the area covered with the silver electrode layer. Printing glass with thickness of 6-12 μm, and drying the piezoelectric ceramic sheet at 150-350 deg.c.
Preferably, the electrode is a copper electrode sheet, and the electrode is adhered to the side surface of the piezoelectric ceramic sheet through epoxy resin or A/B glue and is abutted against the corresponding side electrode layer on the front surface or the back surface. And (3) brushing epoxy resin or A/B glue on the side surface of the piezoelectric ceramic sheet, attaching a copper electrode sheet, and then curing for 10-30 minutes at 80-120 ℃ to obtain the effect that the side electrode has a circuit parallel connection. The upper and lower ends of the copper electrode plate are respectively flush with the front and back surfaces of the piezoelectric ceramic plate.
Preferably, the plurality of solder layers are distributed on the electrode layer at regular intervals in a dot shape. The polarized piezoelectric ceramic sheet is designed into corresponding silk screen patterns according to the internal structure of the multilayer piezoelectric driver, after the brazing layer is printed, the piezoelectric ceramic sheet elements dried at 80-120 ℃ are stacked according to the internal structure of the piezoelectric driver, are in an interdigital shape as a whole, and are applied with a certain clamping force by a special clamp, and are dried and softened at 100-150 ℃ to prealloy the silver layer and the solder; and finally, placing the piezoelectric ceramic plates in a vacuum sintering furnace for sintering to enable the adjacent piezoelectric ceramic plates to be composited together.
Preferably, the spacing between the brazing layer and the outer edge of the piezoelectric ceramic plate is not less than 1mm.
Further, the number of the piezoelectric ceramic plates is 15-50.
Compared with the prior art, the utility model has the beneficial effects that: through setting up molecular silver thick liquid layer and glass glaze layer between piezoceramics piece, then realize the integration of a plurality of individual layer piezoceramics thin slices through brazing connection, avoided the use of organic matter adhesive, can satisfy its application under higher temperature (200 ℃) simultaneously, have the characteristics of big displacement, big moment, mechanical strength also obtains great degree improvement than traditional bonding preparation method.
Description of the drawings:
Fig. 1 is a schematic structural view of the present utility model.
Fig. 2 is a schematic diagram showing a connection relationship between a piezoelectric ceramic sheet and an electrode layer according to the present utility model.
FIG. 3 is a schematic diagram of the connection between a piezoelectric ceramic sheet and a glass glaze layer according to the present utility model.
Fig. 4 is a schematic diagram showing the connection relationship between the piezoelectric ceramic element and the brazing layer according to the present utility model.
FIG. 5 is a schematic diagram showing the connection relationship between the side electrodes of the multilayer piezoelectric ceramic driver according to the present utility model.
The specific embodiment is as follows:
the utility model is further described in terms of specific embodiments in conjunction with the following drawings:
As shown in fig. 1-5, the present utility model provides a multi-layer piezoelectric ceramic driver, which comprises a plurality of square piezoelectric ceramic plates 1, wherein electrode layers 2 are respectively arranged on the front and back surfaces of the piezoelectric ceramic plates 1, and oppositely arranged electrodes 3 are respectively arranged on one opposite side surface of the piezoelectric ceramic plates 1; wherein,
The electrode layer 2 on one side, close to the left electrode, of the front surface of the piezoelectric ceramic plate 1 is contacted with the left edge of the piezoelectric ceramic plate 1 to form a full-electrode arrangement without leaving white; electrode layers on the other three sides of the front surface of the piezoelectric ceramic piece 1 are 0.5-1.5mm away from the outer side edge of the piezoelectric ceramic piece so as to form an electrode white-keeping area 21, and a glass glaze layer 4 is printed on the electrode white-keeping area 21;
the electrode layer 2 on the side, close to the right electrode, of the back surface of the piezoelectric ceramic piece 1 is contacted with the right edge of the piezoelectric ceramic piece, and the full electrode arrangement is formed without leaving white; electrode layers on the other three sides of the back surface of the piezoelectric ceramic sheet are 0.5-1.5mm away from the outer side edge of the piezoelectric ceramic sheet so as to form an electrode white-keeping area 21, and a glass glaze layer is printed on the electrode white-keeping area 21;
The front and back electrode layers 2 of the piezoelectric ceramic piece 1 are also printed with brazing layers 5, and a plurality of brazing layers 5 are distributed on the electrode layers 2 at intervals;
The electrode layers 2 on the adjacent surfaces of the piezoelectric ceramic sheets 1, which are stacked in this order and welded by the brazing layer 5, are interdigitated when stacked into a multilayer piezoelectric actuator.
Specifically, the piezoelectric ceramic plate selected by the utility model is a mature commercial P-5H type piezoelectric ceramic material, and has the electrical properties that epsilon T 33＝3400、d33 is more than or equal to 600pC/N and dielectric loss tan delta is less than or equal to 2.5 percent. The piezoelectric ceramic sheet is a square sheet with a plane of 15mm multiplied by 15mm and a thickness of 0.15-1.0 mm.
Preferably, the electrode layer 2 is coated with silver paste, and the thickness of the electrode layer 2 is 3 to 6 μm. The piezoelectric ceramic plate 1 is subjected to screen printing molecular silver paste, screen printing electrode layer patterns with the mesh number of 200-500 meshes are selected, and corresponding electrode layer patterns are designed for ensuring that the prepared multilayer piezoelectric driver has a structure of mechanical series connection and circuit parallel connection, and as shown in fig. 2, one side of the front electrode of the piezoelectric ceramic plate is provided with all electrodes which are in contact with the edge of the piezoelectric ceramic plate; the pattern of the electrode layer on the other three sides and the left edge of the piezoelectric ceramic sheet are 0.5-1.5mm, the thickness of the printing silver paste is 3-6 mu m by adopting a screen printing preparation method, and the printing silver paste is dried at 100-250 ℃ after the printing is finished; after drying, the back electrode layer of the piezoelectric ceramic plate is printed, and the back electrode layer pattern and the front electrode layer pattern are positioned on different sides in the same direction, so that the electrode layers on the front and the back are ensured to be interdigital when being stacked into a multilayer piezoelectric driver.
In this embodiment, the glass glazing layer 4 has a thickness of 6-12 μm, the glass glazing is printed, and a screen printing pattern with a mesh number of 200-500 mesh is selected, and in order to ensure that the prepared multilayer piezoelectric actuator has a structure of mechanically connected in series and electrically connected in parallel, a corresponding screen pattern is designed, as shown in fig. 3. Thus, both sides of the piezoelectric ceramic sheet 1 are covered with glass frit outside the region covered with the silver electrode layer. The thickness of the glass glaze layer is 6-12 mu m, and the piezoelectric ceramic sheet is dried at 150-350 ℃ after printing.
The piezoelectric ceramic sheet after printing the glass glaze layer is polarized and cleaned, and then the brazing layer 5 is printed according to the internal structure of the multi-layer piezoelectric driver, and the brazing layer 5 is printed by adopting a low-temperature brazing material, so that the brazing layer 5 is uniformly distributed on the electrode layer at intervals in a dot shape. Preferably, the distance between the brazing layer 5 and the outer edge of the piezoelectric ceramic sheet 1 is not less than 1mm.
The piezoelectric ceramic plates printed with the brazing layer are stacked according to the internal structure of the piezoelectric driver, are in an interdigital shape as a whole, and are then applied with a certain clamping force by a special clamp, and are dried and softened at 100-150 ℃ to prealloy the electrode layer and the welding flux; finally, the ceramic material is placed in a vacuum sintering furnace for sintering, the vacuum degree is 10 -2～10-5 Pa, the temperature is 300-500 ℃, and the heat preservation time is 1-10 minutes, so that the integration of the multilayer piezoelectric driver is realized.
Finally, an electrode 3 is arranged, preferably, the electrode 3 is a copper electrode plate, and the electrode 3 is adhered to the side face of the piezoelectric ceramic plate through epoxy resin or A/B glue and is abutted against the corresponding side electrode layer on the front face or the back face. The side face of the piezoelectric ceramic sheet 1 is coated with epoxy resin or A/B glue, then a copper electrode sheet is attached, and the side electrode is cured for 10-30 minutes at 80-120 ℃ to obtain the effect of parallel connection of the side electrode.
According to the utility model, the molecular silver paste layer (electrode layer) and the glass glaze layer are arranged between the piezoelectric ceramic sheets, and then the integration of a plurality of single-layer piezoelectric ceramic sheets is realized through brazing connection, so that the use of an organic matter adhesive is avoided, the application of the organic matter adhesive at a higher temperature (200 ℃) can be satisfied, meanwhile, the piezoelectric ceramic sheet has the characteristics of large displacement and large moment, and the mechanical strength is improved to a greater extent than that of the traditional bonding preparation method.
The foregoing is illustrative of the preferred embodiments of the present utility model, and is not to be construed as limiting the claims. All equivalent structures or equivalent flow path changes made by the specification of the utility model are included in the protection scope of the utility model.
Claims (8)
1. The utility model provides a multilayer piezoceramics driver, includes a plurality of square piezoceramics piece, and piezoceramics piece positive and negative surface is equipped with electrode layer, its characterized in that respectively: the side surface of any opposite side of the piezoelectric ceramic piece is respectively provided with an electrode which is oppositely arranged;
the electrode layer on the side, close to one electrode, of the front surface of the piezoelectric ceramic plate is contacted with the edge of the piezoelectric ceramic plate; electrode layers on the other three sides of the front surface of the piezoelectric ceramic sheet are 0.5-1.5mm away from the outer side edge of the piezoelectric ceramic sheet so as to form an electrode white-keeping area, and a glass glaze layer is arranged on the electrode white-keeping area;
The electrode layer on the side, close to the other electrode, of the back surface of the piezoelectric ceramic plate is contacted with the edge of the piezoelectric ceramic plate; electrode layers on the other three sides of the back surface of the piezoelectric ceramic sheet are 0.5-1.5mm away from the outer side edge of the piezoelectric ceramic sheet so as to form an electrode white-keeping area, and a glass glaze layer is arranged on the electrode white-keeping area;
the electrode layer is also printed with a brazing layer, and a plurality of brazing layers are distributed on the electrode layer at intervals;
The piezoelectric ceramic plates are sequentially stacked and welded through the brazing layer, and electrode layers on adjacent surfaces of the adjacent piezoelectric ceramic plates are in interdigital shapes.
2. The multilayer piezoelectric ceramic actuator according to claim 1, wherein: the electrode layer is formed by coating silver paste, and the thickness of the electrode layer is 3-6 mu m.
3. The multilayer piezoelectric ceramic actuator according to claim 2, wherein: the thickness of the glass glaze layer is 6-12 mu m.
4. The multilayer piezoelectric ceramic actuator according to claim 1, wherein: the electrode is a copper electrode plate, is adhered to the side surface of the piezoelectric ceramic plate through epoxy resin or A/B glue and is abutted against the corresponding side electrode layer on the front surface or the back surface.
5. The multilayer piezoelectric ceramic actuator according to claim 1, wherein: the piezoelectric ceramic sheet is a square sheet with a plane of 15mm multiplied by 15mm and a thickness of 0.15-1.0 mm.
6. The multilayer piezoelectric ceramic actuator according to claim 1, wherein: the plurality of solder layers are distributed on the electrode layer at regular intervals in a dot shape.
7. The multilayer piezoelectric ceramic actuator according to claim 6, wherein: the spacing between the brazing layer and the outer side edge of the piezoelectric ceramic piece is not smaller than 1mm.
8. The multilayer piezoelectric ceramic actuator according to claim 7, wherein: the number of the piezoelectric ceramic plates is 15-50.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322407137.6U CN221081910U (en) | 2023-09-06 | 2023-09-06 | Multilayer piezoelectric ceramic driver |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322407137.6U CN221081910U (en) | 2023-09-06 | 2023-09-06 | Multilayer piezoelectric ceramic driver |
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| CN221081910U true CN221081910U (en) | 2024-06-04 |
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| CN202322407137.6U Active CN221081910U (en) | 2023-09-06 | 2023-09-06 | Multilayer piezoelectric ceramic driver |
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