CN220827460U - Air source cabinet - Google Patents

Abstract

The utility model discloses an air source cabinet which comprises an air cabinet module and an electric cabinet module, wherein the air cabinet module comprises an air cabinet body and a special air unit arranged in the air cabinet body, the air cabinet body comprises an air cabinet frame structure and an air cabinet sealing plate connected to the air cabinet frame structure, and sealing structures are arranged at the connecting gaps of the air cabinet sealing plate and the air cabinet frame structure. The electric cabinet module comprises an electric cabinet body and an electric appliance unit arranged in the electric cabinet body, and the electric cabinet body is detachably connected with the gas cabinet body. The gas source cabinet can well avoid leakage of special gas to other modules, reduce occurrence probability of safety accidents and improve use safety of the gas source cabinet.

Description

Air source cabinet

Technical Field

The utility model relates to the technical field of semiconductor processing, in particular to an air source cabinet.

Background

In the cavity type film coating and pipe combining machine, because of the special structural reason of the equipment, the air source cabinet part of the equipment needs to be designed by an independent component, and a special air unit, a radio frequency power supply module, a waterway module, a vacuumizing pipeline module and an electric module can be accommodated, so that the reasonable design of the structure has a non-negligible effect on factory production assembly, midway packing and transportation and on-site after-sale maintenance.

The existing special gas unit is completely exposed in the gas source cabinet, if special gas leakage easily affects the normal operation of other modules, and safety accidents are easily caused.

Disclosure of utility model

The utility model aims to provide an air source cabinet which can better avoid leakage of special air to other modules, reduce the occurrence probability of safety accidents and improve the use safety of the air source cabinet.

In order to achieve the technical effects, the technical scheme of the utility model is as follows:

The utility model discloses an air source cabinet, which comprises: the gas holder module, the gas holder module includes the gas holder body and establishes the inside special gas unit of gas holder body, the gas holder body includes gas holder frame construction and connects the gas holder shrouding on the gas holder frame construction, the gas holder shrouding with gas holder frame construction's joint gap department all is equipped with seal structure electric cabinet module, the electric cabinet module includes the electric cabinet body and establishes the internal electrical apparatus unit of electric cabinet, the electric cabinet body with the detachable connection of gas holder body.

In some embodiments, the gas cabinet module further comprises a gas monitor disposed inside the gas cabinet body for detecting a concentration of a specialty gas within the gas cabinet module.

In some embodiments, the gas holder module further comprises a gas holder fume monitor disposed inside the gas holder body, the gas holder fume monitor configured to monitor a fume concentration within the gas holder module.

In some embodiments, the gas holder module further comprises a gas holder fire extinguisher and a gas holder fire extinguishing pipeline, wherein the gas holder fire extinguisher is installed on the gas holder body, and the gas holder fire extinguishing pipeline is connected with the gas holder fire extinguisher and is used for spraying fire extinguishing agent towards the inside of the gas holder body.

In some embodiments, a gas holder extraction port is provided on the gas holder seal plate, and the gas holder extraction port can be connected to an external pump.

In some embodiments, a power indicator is provided on the outer side wall of the electric cabinet body, and the power indicator is used for indicating whether the air source cabinet is electrified.

In some embodiments, the electric cabinet module further comprises an electric cabinet smoke monitor disposed inside the electric cabinet body, the electric cabinet smoke monitor for monitoring a smoke concentration within the electric cabinet module.

In some embodiments, the electric cabinet module further comprises an electric cabinet fire extinguisher and an electric cabinet fire extinguishing pipeline, wherein the electric cabinet fire extinguisher is installed on the electric cabinet body, and the electric cabinet fire extinguishing pipeline is connected with the electric cabinet fire extinguisher and is used for spraying fire extinguishing agent towards the inside of the electric cabinet body.

In some embodiments, the electrical appliance unit includes strong current unit and weak current unit that independently set up, still be equipped with the main line groove in the electrical cabinet body, the main line groove is used for holding strong current unit with the lead wire of weak current unit, the electrical cabinet body have respectively with strong current unit and weak current unit correspond the first heat radiation structure and the second heat radiation structure that set up.

In some embodiments, the gas holder body and/or the electric cabinet body are internally provided with a maintenance platform and a climbing ladder, and the upper end of the climbing ladder is in butt joint with the maintenance platform.

The air source cabinet has the beneficial effects that: because whole air supply cabinet split becomes gas holder module and electric cabinet module, and the two can dismantle the connection, can divide into two with the air supply cabinet in actual handling and transport, made things convenient for the transportation of air supply cabinet. The special gas unit is independently packaged in the space defined by the gas holder sealing plate and the frame structure, and the sealing structures are arranged at the joint gaps of the gas holder sealing plate and the gas holder frame structure, so that the special gas unit of the gas source cabinet of the embodiment is always in a relatively airtight space, even if special gas leaks, the special gas cannot enter the inside of the electric cabinet module or is emitted to the outside of the gas source cabinet, the stable operation of the electric cabinet module is ensured, and the use safety of the whole gas source cabinet is improved.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

FIG. 1 is a schematic diagram of the structure of an air source cabinet according to an embodiment of the utility model;

FIG. 2 is a schematic view of a partial structure of an air source cabinet according to an embodiment of the utility model;

FIG. 3 is an enlarged schematic view of FIG. 2 at circle A;

FIG. 4 is an enlarged schematic view of the ring B of FIG. 2;

FIG. 5 is another partial schematic view of the air supply cabinet of the embodiment of the utility model;

FIG. 6 is an enlarged schematic view of FIG. 5 at circle C;

FIG. 7 is an enlarged schematic view of FIG. 5 at circle D;

FIG. 8 is an enlarged schematic view of FIG. 5 at circle E;

FIG. 9 is a schematic view of yet another partial construction of an air supply cabinet according to an embodiment of the utility model.

Reference numerals:

100. A gas holder module; 110. a gas holder body; 111. a gas holder frame structure; 112. a gas holder sealing plate; 1121. an extraction opening of the gas holder; 113. a sealing structure; 121. a process total gas unit; 122. a process gas storage unit; 123. a total intake control valve; 124. a pneumatic shut-off valve; 125. an output pipe; 130. a gas monitor; 140. a gas holder fire extinguisher; 150. a gas holder alarm;

200. An electric cabinet module; 210. an electric cabinet body; 211. a first heat dissipation structure; 212. a second heat dissipation structure; 213. a main wire slot; 220. an electric appliance unit; 221. a strong current unit; 222. a weak current unit; 223. a radio frequency power supply; 230. an electric cabinet smoke monitor; 240. an electric cabinet fire extinguisher; 250. an electric cabinet alarm; 260. an air switch; 270. a power indicator light;

300. Maintaining a platform; 400. a climbing ladder; 500. and the waterway module.

Detailed Description

In order to make the technical problems solved, the technical scheme adopted and the technical effects achieved by the utility model more clear, the technical scheme of the utility model is further described below by a specific embodiment in combination with the attached drawings.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, features defining "first", "second" may include one or more such features, either explicitly or implicitly, for distinguishing between the descriptive features, and not sequentially, and not lightly. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

The specific structure of the air source cabinet according to the embodiment of the present utility model is described below with reference to fig. 1 to 9.

The utility model discloses an air source cabinet, as shown in fig. 1 and 7, the air source cabinet comprises an air cabinet module 100 and an electric cabinet module 200, the air cabinet module 100 comprises an air cabinet body 110 and a special air unit arranged inside the air cabinet body 110, the air cabinet body 110 comprises an air cabinet frame structure 111 and an air cabinet sealing plate 112 connected to the air cabinet frame structure 111, sealing structures 113 are arranged at the connecting gaps of the air cabinet sealing plate 112 and the air cabinet frame structure 111, the electric cabinet module 200 comprises an electric cabinet body 210 and an electric unit 220 arranged in the electric cabinet body 210, and the electric cabinet body 210 is detachably connected with the air cabinet body 110.

It can be appreciated that, because the whole air source cabinet is split into the air source cabinet module 100 and the electric cabinet module 200, and the air source cabinet and the electric cabinet module are detachably connected, the air source cabinet can be split into two air source cabinets for transportation in the actual transportation process, and the transportation of the air source cabinet is facilitated. The special gas unit is independently packaged in the space defined by the gas holder sealing plate 112 and the gas holder frame structure 111, and the sealing structures 113 are arranged at the connecting gaps of the gas holder sealing plate 112 and the gas holder frame structure 111, so that the special gas unit of the gas holder of the embodiment is always in a relatively closed space, and even if special gas leaks, the special gas cannot enter the inside of the electric holder module 200 or is emitted to the outside of the gas holder, the stable operation of the electric holder module 200 is ensured, and the use safety of the whole gas holder is improved.

It should be noted that, in the embodiment of the present utility model, the sealing structure 113 may be a sealing strip, a sealing ring, or sealing cotton filled in the connection gap. The specific type of the sealing structure 113 may be selected according to actual needs, and the specific type of the sealing structure 113 is not limited herein.

Alternatively, as shown in fig. 5 and 8, the special gas unit includes a process total gas unit 121 and a plurality of process gas storage units 122, where the process total gas unit 121 is connected to the plurality of process gas storage units 122, and the process total gas unit 121 has an output pipe 125 penetrating the gas cabinet body 110, and a total gas inlet control valve 123 and a pneumatic stop valve 124 for controlling on-off of the output pipe 125. It can be appreciated that in practical design, the number of the process air storage units 122 can be designed according to the user requirements, so as to meet different user requirements, and the user can conveniently control the on-off of the output pipeline 125 through the set total air inlet control valve 123 and the pneumatic stop valve 124.

In some embodiments, as shown in fig. 6, the gas cabinet module 100 further includes a gas monitor 130 disposed inside the gas cabinet body 110, the gas monitor 130 being configured to detect a concentration of the extra gas within the gas cabinet module 100. It can be appreciated that the gas monitor 130 can detect the concentration of the extra gas in the gas holder module 100, and determine whether the extra gas leaks in the gas holder module 100, so as to close the output pipeline 125 of the extra gas unit and prompt the user in time.

It should be noted here that the output pipe 125 of the gas cabinet module 100 is provided with a control valve, and the control valve and the gas monitor 130 can be electrically connected to the electrical unit 220 in the electrical cabinet module 200. In the actual working process, when the gas monitor 130 transmits the detected concentration of the extra gas to the electrical unit 220, the control module in the electrical unit 220 can determine whether the concentration of the extra gas exceeds the threshold value, and when the concentration of the extra gas exceeds the threshold value, the phenomenon of extra gas leakage in the gas holder module 100 is indicated, and the control module can control the control valve to be closed, so that the extra gas output is blocked.

In some embodiments, the gas cabinet module 100 further includes a gas cabinet smoke monitor disposed inside the gas cabinet body 110 for monitoring the smoke concentration within the gas cabinet module 100. It can be appreciated that in the actual working process, if the extra gas leakage is too large, the gas holder module 100 is very easy to fire, and the gas holder smoke monitor arranged inside the gas holder module 100 can prompt the user in time when the inside of the gas holder module 100 fires, so as to avoid larger accidents.

It should be noted that the fume chamber fume monitor may be a structure integrating detection and alarm functions, or may have only detection functions, and the inside of the fume chamber module 100 may be provided with an alarm device such as a buzzer or an alarm lamp used in cooperation with the fume chamber module.

In some embodiments, as shown in fig. 1 and 2, the gas cabinet module 100 further includes a gas cabinet fire extinguisher 140 and a gas cabinet fire extinguishing pipeline, wherein the gas cabinet fire extinguisher 140 is mounted on the gas cabinet body 110, and the gas cabinet fire extinguishing pipeline is connected to the gas cabinet fire extinguisher 140 and is used for spraying fire extinguishing agent toward the inside of the gas cabinet body 110. It can be appreciated that, in the actual working process, when the fume content in the fume chamber fume monitor detects that the fume chamber body 110 is too high, it indicates that the fire phenomenon occurs in the fume chamber module 100, and at this time, the fume chamber fire extinguisher 140 can spray the fire extinguishing agent toward the inside of the fume chamber body 110 through the fume chamber fire extinguishing pipeline, so that the air source cabinet of the embodiment can have the function of automatic fire extinguishing.

In some embodiments, as shown in fig. 6, a gas holder suction port 1121 is provided on the gas holder sealing plate 112, and the gas holder suction port 1121 can be connected to an external pump. It can be appreciated that, when the phenomenon of leakage of the extra gas occurs inside the gas holder module 100, the external pump can timely pump out the leaked extra gas through the gas holder pumping port 1121, thereby ensuring the safety of the gas holder.

It should be noted that, in the actual working process, when the gas monitor 130 transmits the detected concentration of the extra gas to the electrical unit 220, the control module in the electrical unit 220 can determine whether the concentration of the extra gas exceeds the threshold, and when the concentration of the extra gas exceeds the threshold, the extra gas leakage phenomenon occurs in the gas holder module 100, and the control module can control the external pump to start, so that the leaked extra gas is timely pumped out.

In some embodiments, as shown in fig. 1, the outer side wall of the electric cabinet body 210 is provided with a power indicator 270, and the power indicator 270 is used to indicate whether the air source cabinet is powered on. It will be appreciated that the additional power indicator 270 can facilitate the operator to observe the power on condition of the air source cabinet from the outside.

In some embodiments, as shown in fig. 3, the electric cabinet module 200 further includes an electric cabinet smoke monitor 230 disposed inside the electric cabinet body 210, the electric cabinet smoke monitor 230 for monitoring the smoke concentration within the electric cabinet module 200. It can be appreciated that, in the actual working process, if the temperature inside the electric cabinet module 200 is too high, the electric cabinet module 200 is very easy to fire, and the electric cabinet smoke monitor 230 arranged inside the electric cabinet module 200 can prompt the user in time when the electric cabinet module 100 fires, so as to avoid larger accidents.

It should be noted that, the electric cabinet smoke monitor 230 may be a structure integrating detection and alarm functions, or may have only detection functions, and the electric cabinet module 200 may be provided with an alarm device such as a buzzer or an alarm lamp.

In some embodiments, as shown in fig. 1 and 2, the electric cabinet module 200 further includes an electric cabinet fire extinguisher 240 and an electric cabinet fire extinguishing pipeline, wherein the electric cabinet fire extinguisher 240 is mounted on the electric cabinet body 210, and the electric cabinet fire extinguishing pipeline is connected with the electric cabinet fire extinguisher 240 and is used for spraying fire extinguishing agent towards the inside of the electric cabinet body 210. It will be appreciated that, in the actual working process, when the electric cabinet smoke monitor 230 detects that the smoke content in the electric cabinet body 210 is too high, it indicates that the fire phenomenon occurs in the electric cabinet module 200, and at this time, the electric cabinet fire extinguisher 240 can spray the fire extinguishing agent toward the inside of the electric cabinet body 210 through the electric cabinet fire extinguishing pipeline, so that the air source cabinet of the embodiment can have the function of automatic fire extinguishing.

In some embodiments, as shown in fig. 2 and 9, the electrical unit 220 includes a strong current unit 221 and a weak current unit 222 that are independently disposed, a main wire slot 213 is further disposed in the electrical cabinet body 210, the main wire slot 213 is used for accommodating the leads of the strong current unit 221 and the weak current unit 222, and the electrical cabinet body 210 has a first heat dissipation structure 211 and a second heat dissipation structure 212 that are respectively disposed corresponding to the strong current unit 221 and the weak current unit 222. It can be understood that the strong current unit 221 and the weak current unit 222 are independently disposed, so that the two modules can be prevented from interfering with each other, and the main line slot 213 disposed between the strong current unit 221 and the weak current unit 222 is used for accommodating the leads of the strong current unit 221 and the weak current unit 222, so that the leads of the strong current unit 221 and the weak current unit 222 can be conveniently led out. Meanwhile, the first heat dissipation structure 211 and the second heat dissipation structure 212 can facilitate the heat dissipation of the strong current unit 221 and the weak current unit 222 in the actual working process of the air source cabinet, so as to avoid the overheating phenomenon of the electrical unit 220.

Optionally, the electrical unit 220 further includes a radio frequency power supply 223 independently disposed with the strong current unit 221 and the weak current unit 222, and a plurality of placing positions are disposed in the electrical cabinet body 210, where the radio frequency power supply 223 can be installed according to actual needs. Thus, the satisfaction of the user can be improved.

Optionally, as shown in fig. 4, the appliance unit 220 further includes an air switch 260. Thereby, the air switch 260 can realize the disconnection protecting function of the electric unit 220.

In some embodiments, as shown in fig. 9, the gas holder body 110 and/or the electric holder body 210 are internally provided with a maintenance platform 300 and a climbing ladder 400, and an upper end of the climbing ladder 400 is docked with the maintenance platform 300. It can be appreciated that the added maintenance platform 300 provides standing space for the operator to maintain inside the gas holder body 110 and the electric cabinet body 210, and adds a detachable ascending ladder 400, which is convenient for the operator to maintain up and down.

In some embodiments, as shown in fig. 9, the gas cabinet body 110 and the electric cabinet body 210 are respectively provided with a waterway module 500, and the waterway module 500 is provided with a water outlet, so that the stored water in the waterway module 500 can be rapidly discharged when the pipeline is damaged for maintenance.

Examples:

An air supply cabinet according to a specific embodiment of the present utility model is described below with reference to fig. 1 to 9.

As shown in fig. 1-9, the air source cabinet comprises a cabinet module 100 and an electric cabinet module 200, the cabinet module 100 comprises a cabinet body 110 and a special air unit arranged inside the cabinet body 110, the cabinet body 110 comprises a cabinet frame structure 111 and a cabinet sealing plate 112 connected to the cabinet frame structure 111, sealing structures 113 are arranged at the joint gaps between the cabinet sealing plate 112 and the cabinet frame structure 111, and the sealing structures 113 are sealing strips. The special gas unit comprises a process total gas unit 121 and a plurality of process gas storage units 122, the process total gas unit 121 is connected with the plurality of process gas storage units 122, the process total gas unit 121 is provided with an output pipeline 125 penetrating through the gas cabinet body 110, a total gas inlet control valve 123 and a pneumatic stop valve 124 for controlling the on-off of the output pipeline 125, and a sealing block is arranged at the position where the output pipeline 125 penetrates through the gas cabinet body 110. The gas cabinet frame structure 111 is provided with a gas monitor 130 and a gas cabinet smoke monitor, wherein the gas monitor 130 is used for detecting the concentration of the specific gas in the gas cabinet module 100, and the gas cabinet smoke monitor is used for monitoring the concentration of the smoke in the gas cabinet module 100. The gas cabinet fire extinguisher 140 and the gas cabinet alarm 150 are installed on the sealing plate at the front side of the gas cabinet frame structure 111, and the gas cabinet fire extinguishing pipeline is arranged on the gas cabinet frame structure 111, is connected with the gas cabinet fire extinguisher 140 and is used for spraying fire extinguishing agent towards the inside of the gas cabinet body 110. A seal plate on the top of the gas holder frame structure 111 is provided with a gas holder air extraction port 1121, and the gas holder air extraction port 1121 can be connected to an external pump.

The electric cabinet module 200 includes an electric cabinet body 210 and an electric unit 220 provided in the electric cabinet body 210, and the electric cabinet body 210 is detachably connected with the gas cabinet body 110. The outer side wall of the electric cabinet body 210 is provided with a power indicator 270, and the power indicator 270 is used for indicating whether the air source cabinet is electrified. The electric cabinet body 210 is internally provided with an electric cabinet smoke monitor 230, and the electric cabinet smoke monitor 230 is used for monitoring the smoke concentration in the electric cabinet module 200. An electric cabinet fire extinguisher 240 and an electric cabinet alarm 250 are installed at the front side of the electric cabinet body 210, and an electric cabinet fire extinguishing pipeline is arranged inside the electric cabinet body 210. The electric cabinet fire extinguisher 240 is installed at the electric cabinet body 210, and the electric cabinet fire extinguishing pipeline is connected with the electric cabinet fire extinguisher 240 and is used for spraying fire extinguishing agent toward the inside of the electric cabinet body 210. The electric appliance unit 220 includes a strong current unit 221 and a weak current unit 222 which are independently arranged, a main line slot 213 is arranged in the electric cabinet body 210, the main line slot 213 is used for accommodating leads of the strong current unit 221 and the weak current unit 222, and the electric cabinet body 210 is provided with a first heat dissipation structure 211 (heat dissipation tube) and a second heat dissipation structure 212 (heat dissipation tube) which are respectively arranged corresponding to the strong current unit 221 and the weak current unit 222. The electric appliance unit 220 further comprises a radio frequency power supply 223 which is independently arranged with the strong current unit 221 and the weak current unit 222, a plurality of placing positions are arranged in the electric cabinet body 210, and the radio frequency power supply 223 can be installed according to actual needs by the plurality of placing positions. Thus, the satisfaction of the user can be improved. The gas holder body 110 and the electric cabinet body 210 are internally provided with a maintenance platform 300, an ascending ladder 400 and a waterway module 500, and the upper end of the ascending ladder 400 is in butt joint with the maintenance platform 300.

The air source cabinet of this embodiment's advantage lies in:

First: through the independent and reasonable arrangement design of the gas cabinet module 100 and the electric cabinet module 200, the total length of the gas source cabinet is reduced from about 3600mm to about 2100mm at present, the space utilization rate of the gas source cabinet is improved, and the frame cost is reduced;

Second,: the gas cabinet module 100 and the electric cabinet module 200 have the automatic fire extinguishing function, so that the use safety of the gas source cabinet is improved;

third,: providing a standing space for operators to maintain inside the gas holder body 110 and the electric cabinet body 210, and facilitating the operators to maintain up and down;

fourth,: the strong current unit 221 and the weak current unit 222 are independently arranged, so that interference is avoided and wiring is convenient;

Fifth,: the quantity of the radio frequency power supplies 223 is adjusted according to actual needs, so that the application range is wide;

Sixth: the electric components are modularized, an air switch 260 and an electric power breaker are additionally arranged on the main power supply, and wires are led out from the main power supply and connected to a power indicator 270, so that a person can see whether the equipment is electrified or not at a position far away from the equipment;

Seventh: the phenomenon that the extra gas leaks and diffuses is avoided well, the pneumatic stop valve 124 can stop the output of the extra gas in time when the extra gas leaks and pump the leaked extra gas away from the gas source cabinet in time, and the safety performance of the gas source cabinet is improved.

In the description of the present specification, reference to the term "some embodiments," "other embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing is merely exemplary of the present utility model, and those skilled in the art should not be considered as limiting the utility model, since modifications may be made in the specific embodiments and application scope of the utility model in light of the teachings of the present utility model.

Claims (10)

1. Air supply cabinet, its characterized in that includes:

The gas holder module comprises a gas holder body and a special gas unit arranged in the gas holder body, wherein the gas holder body comprises a gas holder frame structure and a gas holder sealing plate connected to the gas holder frame structure, and sealing structures are arranged at the connecting gaps of the gas holder sealing plate and the gas holder frame structure;

The electric cabinet module comprises an electric cabinet body and an electric appliance unit arranged in the electric cabinet body, and the electric cabinet body is detachably connected with the gas cabinet body.

2. The gas source cabinet of claim 1, wherein the cabinet module further comprises a gas monitor disposed within the cabinet body for detecting a concentration of a specialty gas within the cabinet module.

3. The gas source cabinet of claim 1, wherein the cabinet module further comprises a cabinet smoke monitor disposed within the cabinet body, the cabinet smoke monitor configured to monitor a smoke concentration within the cabinet module.

4. The gas source cabinet according to claim 1, wherein the cabinet module further comprises a cabinet fire extinguisher and a cabinet fire extinguishing pipeline, the cabinet fire extinguisher is mounted on the cabinet body, and the cabinet fire extinguishing pipeline is connected with the cabinet fire extinguisher and is used for spraying fire extinguishing agent towards the interior of the cabinet body.

5. The air source cabinet according to claim 1, wherein the cabinet sealing plate is provided with a cabinet air extraction opening, and the cabinet air extraction opening can be connected with an external pump.

6. The air source cabinet according to claim 1, wherein a power indicator is arranged on the outer side wall of the electric cabinet body, and the power indicator is used for indicating whether the air source cabinet is electrified.

7. The air supply cabinet of claim 1, wherein the electric cabinet module further comprises an electric cabinet smoke monitor disposed inside the electric cabinet body, the electric cabinet smoke monitor configured to monitor a smoke concentration within the electric cabinet module.

8. The air source cabinet of claim 1, wherein the electric cabinet module further comprises an electric cabinet fire extinguisher and an electric cabinet fire extinguishing pipeline, the electric cabinet fire extinguisher is mounted on the electric cabinet body, and the electric cabinet fire extinguishing pipeline is connected with the electric cabinet fire extinguisher and is used for spraying fire extinguishing agent towards the inside of the electric cabinet body.

9. The air source cabinet according to claim 1, wherein the electrical appliance unit comprises a strong current unit and a weak current unit which are independently arranged, a main wire slot is further formed in the electrical cabinet body and is used for accommodating leads of the strong current unit and the weak current unit, and the electrical cabinet body is provided with a first heat dissipation structure and a second heat dissipation structure which are respectively arranged corresponding to the strong current unit and the weak current unit.

10. The gas source cabinet according to claim 1, wherein a maintenance platform and a climbing ladder are arranged in the gas cabinet body and/or the electric cabinet body, and the upper end of the climbing ladder is in butt joint with the maintenance platform.