CN220806749U - Quartz boat trimming device with rectangular inserting grooves - Google Patents

Abstract

The utility model discloses a trimming device for a quartz boat with a rectangular insert slot, and relates to the technical field of quartz boat processing. This rectangle inserted sheet groove quartz boat trimming means, including fixed station, fixed subassembly and dismantlement subassembly, the front side fixed mounting of fixed station has the roof, and the top fixed mounting of fixed station has the operation case, and fixed subassembly sets up on the operation case, dismantles the subassembly setting on the roof, dismantles the subassembly including mounting disc, fixture block and mount table, and the cavity has been seted up to the outer wall of mounting disc, and slidable mounting has the fixture block in the cavity, and the draw-in groove corresponding with the fixture block has been seted up to the inner wall of mount table. Through the setting of dismantling the subassembly, can dismantle fast and install and repair the head, can carry out the adjustment of different demands of polishing in a flexible way, can reduce the change time of polishing the head to improve work efficiency, can make simultaneously maintenance work simpler, when need clean, change or maintenance repair the head, can light dismantlement get off it, carries out corresponding processing, then reinstallation.

Description

Quartz boat trimming device with rectangular inserting grooves

Technical Field

The utility model relates to the technical field of quartz boat processing, in particular to a trimming device for a quartz boat with a rectangular insert slot.

Background

The quartz boat is a quartz container for bearing silicon wafers, is commonly used in Chemical Vapor Deposition (CVD), physical Vapor Deposition (PVD) and other processes in the manufacturing process of semiconductor wafers, and has the main functions of trimming the bottom of the quartz boat to ensure the flatness and parallelism of the quartz boat and the accuracy of the size and the position of the insert slot, and the trimmed quartz boat can provide better support and size consistency, thereby improving the stability and the product quality in the manufacturing process of semiconductors.

Through exploration and analysis, the device has the following defects in actual use:

When the quartz boat is trimmed, different tools are required to be used for trimming, the tools for trimming the quartz boat are usually fixedly arranged on the device through bolts, and the different trimming heads are inconvenient to disassemble and assemble, so that a great amount of time is delayed, and the working efficiency is reduced.

In summary, the present application provides a trimming device for quartz boat with rectangular insert slots to solve the above-mentioned problems.

Disclosure of utility model

The utility model aims to provide a rectangular insert groove quartz boat trimming device, which can solve the problems that different tools are required to be used for trimming when a quartz boat is trimmed, and the tools for trimming the quartz boat are usually fixedly arranged on the device through bolts and are inconvenient to disassemble and assemble different trimming heads.

In order to achieve the above purpose, the present utility model provides the following technical solutions: a rectangular insert slot quartz boat finishing device, comprising:

the fixed table is fixedly provided with a top plate at the front side, and an operation box is fixedly arranged at the top of the fixed table;

the fixing component is arranged on the operation box and comprises a U-shaped plate, a threaded column and a clamping plate, the threaded column is arranged on two sides of the U-shaped plate in a threaded manner, and the clamping plate is rotatably arranged at the other end of the threaded column;

The disassembly assembly is arranged on the top plate and comprises a mounting disc, a clamping block and a mounting table, wherein the outer wall of the mounting disc is provided with a cavity, the clamping block is slidably arranged in the cavity, and the inner wall of the mounting table is provided with a clamping groove corresponding to the clamping block.

Preferably, the inside of operation case sets up in the disc, and the bottom fixed mounting of disc has the spliced pole, and the bottom of spliced pole rotates the installation with the inboard bottom of operation case, and the outer wall fixed mounting of spliced pole has first gear, and the inboard bottom fixed mounting of operation case has first motor, and the output shaft fixed mounting of first motor has the second gear, and second gear and first gear meshing installation are convenient for wait to repair the quartz boat and carry out the angle modulation.

Preferably, the bottom of U template and the top fixed mounting of disc can be fixed in middle with the quartz boat of different specifications through the grip block, and is more stable in the use to can prevent that it from appearing the phenomenon that removes, guarantee accuracy and repeatability when processing, improve work efficiency.

Preferably, the bottom of roof is provided with mobile device, and fixed mounting has the diaphragm on the mobile device, can carry out the random removal according to the required requirement of quartz boat.

Preferably, the bottom of the transverse plate is fixedly provided with a hydraulic rod, the free end of the hydraulic rod is fixedly provided with a protective shell, and the inside of the protective shell is fixedly provided with a second motor.

Preferably, the disassembly assembly comprises springs and movable rods, the output shaft of the second motor is fixedly arranged at the bottom of the installation disc, the cavities are symmetrically distributed, the springs are fixedly arranged on the inner walls of the cavities, the other ends of the springs are fixedly arranged at one sides of the clamping blocks, the movable rods are slidably arranged in the clamping grooves, one ends of the movable rods extend to the outside of the installation table, different polishing requirements can be flexibly adjusted by quickly disassembling and installing the finishing heads, the replacement time of the polishing heads can be reduced, the working efficiency is improved, meanwhile, maintenance work is simpler, and when the finishing heads are required to be cleaned, replaced or maintained, the finishing heads can be easily disassembled for corresponding treatment, and then the finishing heads are reinstalled.

Preferably, the bottom of the mounting table is fixedly provided with a trimming head.

Compared with the prior art, the utility model has the beneficial effects that:

(1) This rectangle inserted sheet groove quartz boat trimming means uses through the cooperation of U template, screw thread post and grip block, can fix the quartz boat of different specifications placed in the middle, and is more stable in the use to can prevent that it from appearing the phenomenon that removes, guarantee accuracy and repeatability during processing, improve work efficiency.

(2) This rectangle inserted sheet groove quartz boat trimming means, through the cooperation of mounting disc, fixture block, spring, mount table, movable rod and trimmer head use, through dismantling fast and installing the trimmer head, can carry out the adjustment of different demands of polishing in a flexible way, can reduce the change time of polishing the head, and improve work efficiency, can make the maintenance work simpler simultaneously, when the trimmer head is cleaned, change or maintenance needs, can easily dismantle it, carries out corresponding processing, then install again.

Drawings

The utility model is further illustrated by the following examples in conjunction with the accompanying drawings:

FIG. 1 is a perspective cross-sectional view of the present utility model;

FIG. 2 is an enlarged view of the portion A of the present utility model;

FIG. 3 is a schematic view of a mounting table according to the present utility model;

Fig. 4 is a perspective view of the present utility model.

Reference numerals: 1. a fixed table; 2. a top plate; 3. an operation box; 4. a disc; 5. rotating the column; 6. a first gear; 7. a first motor; 8. a second gear; 9. a U-shaped plate; 10. a threaded column; 11. a clamping plate; 12. a mobile device; 13. a cross plate; 14. a hydraulic rod; 15. a second motor; 16. a mounting plate; 17. a clamping block; 18. a spring; 19. a mounting table; 20. a movable rod; 21. and (5) finishing the head.

Detailed Description

Reference will now be made in detail to the present embodiments of the present utility model, examples of which are illustrated in the accompanying drawings, wherein the accompanying drawings are used to supplement the description of the written description so that one can intuitively and intuitively understand each technical feature and overall technical scheme of the present utility model, but not to limit the scope of the present utility model.

In the description of the present utility model, it should be understood that references to orientation descriptions such as upper, lower, front, rear, left, right, etc. are based on the orientation or positional relationship shown in the drawings, are merely for convenience of description of the present utility model and to simplify the description, and do not indicate or imply that the apparatus or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present utility model.

Referring to fig. 1-4, the present utility model provides a technical solution: the utility model provides a rectangle inserted sheet groove quartz boat trimming means, including fixed station 1, fixed subassembly and dismantlement subassembly, the front side fixed mounting of fixed station 1 has roof 2, the top fixed mounting of fixed station 1 has operation case 3, fixed subassembly sets up on operation case 3, fixed subassembly is including U template 9, screw thread post 10 and grip block 11, screw thread post 10 is all installed to the both sides of U template 9, grip block 11 is installed in the rotation of the other end of screw thread post 10, dismantlement subassembly sets up on roof 2, dismantlement subassembly is including mounting plate 16, fixture block 17 and mount table 19, the cavity has been seted up to the outer wall of mounting plate 16, slidable mounting has fixture block 17 in the cavity, the draw-in groove corresponding with fixture block 17 has been seted up to the inner wall of mount table 19.

Further, the inside of operation case 3 sets up in disc 4, the bottom fixed mounting of disc 4 has rotation post 5, the bottom of rotation post 5 rotates the installation with the inboard bottom of operation case 3, the outer wall fixed mounting of rotation post 5 has first gear 6, the inboard bottom fixed mounting of operation case 3 has first motor 7, the output shaft fixed mounting of first motor 7 has second gear 8, second gear 8 and first gear 6 meshing installation, according to the angle in the required inserted sheet groove of quartz boat, start first motor 7, drive second gear 8 through first motor 7 and rotate, make the rotation of second gear 8 drive first gear 6 rotate, thereby make rotation post 5 drive disc 4 rotate, the quartz boat of being convenient for to treat the repair carries out angle modulation.

Still further, the bottom of U template 9 and the top fixed mounting of disc 4 rotate two sets of screw thread post 10 for the rotation of screw thread post 10 drives grip block 11 and removes, thereby makes two sets of grip blocks 11 clamp the work placed in the middle to the quartz boat, can fix placed in the middle the quartz boat of different specifications through grip block 11, and is more stable in the use, thereby can prevent that it from appearing the phenomenon that removes, accuracy and repeatability when guaranteeing to process, improves work efficiency.

Further, a mobile device 12 is arranged at the bottom of the top plate 2, and a transverse plate 13 is fixedly arranged on the mobile device 12 and can be moved at will according to the requirements of the quartz boat.

Further, a hydraulic rod 14 is fixedly arranged at the bottom of the transverse plate 13, a protective shell is fixedly arranged at the free end of the hydraulic rod 14, and a second motor 15 is fixedly arranged in the protective shell.

Secondly, dismantle the subassembly including spring 18 and movable rod 20, the output shaft of second motor 15 and the bottom fixed mounting of mounting disc 16, the cavity has two sets of just be symmetrical distribution, the inner wall fixed mounting of cavity has spring 18, the other end of spring 18 and one side fixed mounting of fixture block 17, slidable mounting has movable rod 20 in the draw-in groove, the one end of movable rod 20 extends to the outside of mount table 19, press the movable rod 20 of mount table 19 both sides, make movable rod 20 promote fixture block 17 and remove, can take off mount table 19 from mounting disc 16, through quick dismantlement and installation repair head 21, can carry out the adjustment of different polishing demands in a flexible way, can reduce the change time of polishing head, and improve work efficiency, simultaneously can make maintenance work simpler, when needs cleaning, change or repair head 21, can easily dismantle it, carry out corresponding processing, then install back again.

Next, a finishing head 21 is fixedly mounted on the bottom of the mounting table 19.

Working principle: when the quartz boat is used, the quartz boat is placed above the disc 4, the two groups of threaded columns 10 are rotated, the clamping plates 11 are driven to move by the rotation of the threaded columns 10, so that the quartz boat is clamped in the middle by the two groups of clamping plates 11, then the first motor 7 is started according to the angle of a required inserting slot of the quartz boat, the second gear 8 is driven to rotate by the first motor 7, the first gear 6 is driven to rotate by the rotation of the second gear 8, the disc 4 is driven to rotate by the rotating column 5, the angle of the quartz boat is regulated, then the moving track of the moving equipment 12 is controlled by the controller, the hydraulic rod 14 and the second motor 15 are started, the second motor 15 is driven to move downwards by the hydraulic rod 14, meanwhile, the mounting table 19 on the mounting disc 16 is driven to rotate by the second motor 15, the trimming head 21 is driven to rotate, the trimming operation is carried out on the quartz boat, and when the trimming head 21 needs to be replaced, the movable rods 20 on two sides of the mounting table 19 are pushed to move the clamping blocks 17, and the mounting table 19 can be taken down from the mounting disc 16.

The embodiments of the present utility model have been described in detail with reference to the accompanying drawings, but the present utility model is not limited to the above embodiments, and various changes can be made within the knowledge of one of ordinary skill in the art without departing from the spirit of the present utility model.

Claims (7)

1. The utility model provides a rectangle inserted sheet groove quartz boat trimming means which characterized in that includes:

The device comprises a fixed table (1), wherein a top plate (2) is fixedly arranged on the front side of the fixed table (1), and an operation box (3) is fixedly arranged on the top of the fixed table (1);

The fixing assembly is arranged on the operation box (3) and comprises a U-shaped plate (9), a threaded column (10) and a clamping plate (11), the threaded column (10) is arranged on two sides of the U-shaped plate (9) in a threaded manner, and the clamping plate (11) is rotatably arranged at the other end of the threaded column (10);

The disassembly assembly is arranged on the top plate (2), and comprises a mounting disc (16), a clamping block (17) and a mounting table (19), wherein a cavity is formed in the outer wall of the mounting disc (16), the clamping block (17) is slidably mounted in the cavity, and a clamping groove corresponding to the clamping block (17) is formed in the inner wall of the mounting table (19).

2. The rectangular insert slot quartz boat finishing device of claim 1, wherein: the inside of operation case (3) sets up in disc (4), the bottom fixed mounting of disc (4) has rotation post (5), the bottom of rotation post (5) rotates the installation with the inboard bottom of operation case (3), the outer wall fixed mounting of rotation post (5) has first gear (6), the inboard bottom fixed mounting of operation case (3) has first motor (7), the output shaft fixed mounting of first motor (7) has second gear (8), second gear (8) and first gear (6) meshing installation.

3. The rectangular insert slot quartz boat finishing device of claim 2, wherein: the bottom of the U-shaped plate (9) is fixedly arranged with the top of the disc (4).

4. A rectangular insert slot quartz boat finishing device as defined in claim 3, wherein: the bottom of the top plate (2) is provided with a mobile device (12), and a transverse plate (13) is fixedly installed on the mobile device (12).

5. The trimming device for the quartz boat with the rectangular insert slot of claim 4, wherein: the bottom of the transverse plate (13) is fixedly provided with a hydraulic rod (14), the free end of the hydraulic rod (14) is fixedly provided with a protective shell, and the inside of the protective shell is fixedly provided with a second motor (15).

6. The trimming device for the quartz boat with the rectangular insert slot of claim 5, wherein: the disassembly assembly comprises springs (18) and movable rods (20), wherein the output shafts of the second motors (15) are fixedly arranged at the bottoms of the mounting plates (16), two groups of cavities are symmetrically distributed, the springs (18) are fixedly arranged on the inner walls of the cavities, the other ends of the springs (18) are fixedly arranged on one sides of the clamping blocks (17), the movable rods (20) are slidably arranged in the clamping grooves, and one ends of the movable rods (20) extend to the outside of the mounting table (19).

7. The trimming device for the rectangular insert slot quartz boat according to claim 6, wherein: the bottom of the mounting table (19) is fixedly provided with a trimming head (21).