CN220787305U - Reclaimer and material transport equipment - Google Patents

Abstract

The utility model discloses a reclaimer and material transportation equipment, and relates to the technical field of reclaiming equipment, wherein the reclaimer comprises: the material taking assembly is used for picking up the workpiece; the air knife structure is arranged on one side of the material taking assembly and is provided with an air storage cavity, an air inlet and an air supply outlet, wherein the air inlet and the air supply outlet are communicated with the air storage cavity, a slope structure is arranged between the air supply outlet and the air storage cavity, the air storage cavity points to the direction of the air supply outlet, and the cross section area of a channel formed at the slope structure is gradually reduced. The air knife structure arranged on one side of the material taking assembly can blow the workpiece when the material taking assembly picks up the workpiece, and the workpiece which is not directly adsorbed by the material taking assembly is separated, so that the condition that the material taking assembly picks up a plurality of workpieces simultaneously is reduced, and the material taking assembly is facilitated to pick up only one workpiece each time.

Description

Reclaimer and material transport equipment

Technical Field

The utility model relates to the technical field of material reclaiming equipment, in particular to a material reclaimer and material transportation equipment.

Background technique

In the prior art, when the vacuum suction cup of the reclaimer sucks up silicon wafers, it is easy to suck up multiple silicon wafers at the same time. In response to this situation, an air knife can be used to blow air to the silicon wafers to separate the silicon wafers, so that the silicon wafers that are not directly sucked by the vacuum suction cup are separated from the silicon wafers that are directly sucked. However, most air knives have direct air outlets, and the direct air outlets will be blocked by the air nozzle clamp and partially rebound when the air is discharged. When the wind rebounds, there are more conflicts with the outgoing wind, resulting in a reduction in wind force.

Utility Model Content

The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model proposes a material reclaimer and material transportation equipment, which can effectively increase the wind force and ensure the silicon wafer separation effect by setting a slope structure between the air supply port and the air storage cavity to reduce the situation where the air flow is blocked.

In one aspect, an embodiment of the present application discloses a reclaimer, comprising:

A picking component, used for picking up workpieces;

The wind knife structure is arranged on one side of the material taking component. The wind knife structure has an air storage cavity and an air inlet and an air supply port both connected to the air storage cavity. A slope structure is arranged between the air supply port and the air storage cavity. The cross-sectional area of the channel formed by the slope structure gradually decreases from the air storage cavity to the air supply port. The slope structure can guide the airflow in the air storage cavity. The cross-sectional area of the channel formed by the slope structure gradually decreases, which can gradually increase the pressure of the airflow flowing from the air storage cavity to the air supply port. In this way, it is beneficial to increase the air supply pressure and air supply intensity of the air supply port, and it is beneficial to improve the ability of the wind knife structure to separate workpieces.

Furthermore, the wind knife structure includes a first component and a second component which are stacked, the first component having an air storage tank and an air supply tank, a slope structure being arranged between the air storage tank and the air supply tank, the slope structure and the air supply tank being in a stepped shape, the end face of the second component close to the air storage tank and the air storage tank defining the air storage cavity, and the end face of the second component close to the air supply tank and the air supply tank defining the air supply port. The air storage cavity and the air supply port of the wind knife structure are defined by the first component and the second component, and the air storage tank, the air supply tank and the slope structure are machined on one of the end faces of the first component, which helps to simplify the machining process of the wind knife structure and reduce the machining difficulty; at the same time, the air storage tank, the air supply tank and the slope structure are machined on one of the end faces of the first component, which helps to ensure the machining accuracy of the air storage tank, the slope structure and the air supply tank, and helps to ensure the actual air supply effect of the wind knife structure.

Furthermore, the depth of the air supply groove is 0.1 mm. This helps to ensure the air supply pressure and air supply strength of the air supply port, thereby helping to ensure the ability of the air knife structure to separate the workpieces that are not directly picked up by the material picking component and the workpieces that are directly in contact with the material picking component.

Furthermore, the wind knife structure also includes a first bracket, and the first component and the second component are installed on the first bracket.

Furthermore, the second component is provided with an adjustment slot extending along the first direction, and the first bracket is provided with a fastening hole at a position corresponding to the adjustment slot, and a fastener is simultaneously passed through the adjustment slot and the fastening hole to fix the second component to the first bracket. In this way, the position of the air supply port in the first direction can be easily changed, thereby changing the relative distance between the air supply port and the workpiece.

Furthermore, the wind knife structure further comprises a slide plate, the slide plate is provided with a first slide groove extending along the second direction, and the first bracket has a first slider connected to the first slide groove. In this way, the first bracket can be easily moved along the second direction to change the relative position of the air outlet in the second direction.

Furthermore, the wind knife structure further comprises a second bracket, the second bracket is provided with a second slide groove extending along a third direction, and the slide plate has a second slider slidably connected to the second slide groove. In this way, the relative position of the second bracket in the third direction can be easily changed, thereby changing the position of the air outlet in the third direction.

Furthermore, the air knife structure also includes a beam sensor, which is used to detect the position of the workpiece to control the air knife structure to blow air. In this way, the air knife structure can be controlled to blow air when the material picking component is picking up materials, and stop blowing air during the non-material picking period, which helps to increase the pressure of the gas in the gas storage chamber and also helps to save the gas in the gas storage chamber.

Furthermore, the material picking assembly includes a suction cup, and the suction cup is used to suck the workpiece.

The material transport equipment of another embodiment of the present application includes the above-mentioned material reclaimer, and also includes a transport module and a material box, and the material reclaimer transfers the workpiece between the transport module and the material box.

The aforementioned material reclaimer and material transport equipment have at least the following beneficial effects: the wind knife structure provided on one side of the material reclaiming component can blow air on the workpiece picked up by the material reclaiming component, and separate the workpieces other than those directly adsorbed by the material reclaiming component. The slope structure can provide guidance for the gas in the air storage chamber to flow to the air supply port, which is conducive to reducing the situation where the airflow is blocked or rebounded, thereby effectively increasing the wind force. As a result, it is conducive to reducing the situation where the material reclaiming component picks up multiple workpieces at the same time, thereby ensuring that the material reclaiming component can only pick up one workpiece at a time.

Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

FIG1 is a schematic structural diagram of a material transport device according to an embodiment of the present invention;

FIG2 is a schematic structural diagram of a reclaimer according to another embodiment of the utility model;

FIG3 is a schematic diagram of the explosion structure of FIG2 ;

FIG. 4 is a schematic structural diagram of a first component in a reclaimer according to another embodiment of the utility model.

Reference numerals:

100. Retrieving assembly;

200, wind knife structure; 210, first component; 211, air storage tank; 212, air inlet; 213, air supply slot; 214, slope structure; 220, second component; 221, first slider; 222, adjustment slot; 230, first bracket; 240, slide plate; 241, first slide slot; 250, second bracket; 251, second slide slot; 260, air inlet port; 270, third bracket;

300, material box;

400. Transport module.

Detailed ways

The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

In the description of the present utility model, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used to distinguish the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

In the description of the utility model, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

In one aspect, the present application discloses a material transport device, including a material reclaimer, a transport module 400 and a material box 300, wherein the material reclaimer transfers workpieces between the transport module 400 and the material box 300. The material box 300 contains a plurality of stacked silicon wafers, the transport module 400 is used to transport the silicon wafers, and the material reclaimer is used to transfer the silicon wafers between the transport module 400 and the material box 300.

It should be understood that the material transport equipment can be used for loading silicon wafers, that is, transferring silicon wafers from the material box 300 to the transport module 400; it can also be used for unloading silicon wafers, that is, transferring silicon wafers from the transport module 400 to the material box 300.

Another aspect of the present application discloses a material reclaimer. Referring to FIGS. 1 to 4 , the material reclaimer includes a material reclaimer assembly 100 and an air knife structure 200 .

Specifically, the material picking component 100 is used to pick up one workpiece at a time so that the workpiece can be transferred between the material box 300 and the conveying module. The air knife structure 200 is arranged on one side of the material picking component 100. The air knife structure 200 can blow air on the workpiece picked up by the material picking component 100, which helps to reduce the situation where the material picking component 100 picks up two or more workpieces at the same time. Among them, the air knife structure 200 has an air storage cavity and an air inlet 212 and an air supply port connected to the air storage cavity. The cross-sectional area of the channel formed at the slope structure 214 gradually decreases from the air storage cavity to the air supply port. The slope structure 214 can guide the air flow in the air storage cavity; the cross-sectional area of the channel formed at the slope structure 214 gradually decreases, which can gradually increase the pressure of the air flow from the air storage cavity to the air supply port, so as to improve the air supply pressure and air supply intensity of the air supply port, and improve the ability of the air knife structure to separate workpieces.

In this embodiment, the air inlet 212 is connected to the air inlet port 260 , and the external device delivers gas into the air storage chamber through the air inlet port 260 , then flows through the slope structure 214 , and finally blows from the air supply port to the workpiece picked up by the material picking assembly 100 .

It should be noted that the air supply port is arranged toward one side of the picking assembly 100, so that the gas blown out from the air supply port can be blown onto the workpiece picked up by the picking assembly 100 to separate the workpiece that is not in direct contact with the picking assembly 100 from the workpiece that is directly picked up by the picking assembly 100.

The aforementioned material reclaimer and material transportation equipment have at least the following beneficial effects: the wind knife structure 200 provided on one side of the material reclaiming component 100 can blow air on the workpiece picked up by the material reclaiming component 100, and separate the workpieces other than those directly adsorbed by the material reclaiming component 100. The slope structure 214 can provide guidance when the gas in the air storage chamber flows to the air supply port; the cross-sectional area of the channel formed at the slope structure 214 gradually decreases, rather than vertically discharging air from the cavity wall of the air storage chamber, which helps to reduce the situation where the airflow is blocked or the airflow rebounds, thereby effectively increasing the wind force. As a result, it helps to reduce the situation where the material reclaiming component 100 picks up multiple workpieces at the same time, thereby ensuring that the material reclaiming component only picks up one workpiece at a time.

In some embodiments of the present application, referring to FIG1 , the material taking component 100 includes a suction cup, which is used to suck up a workpiece. Specifically, the workpiece may be a silicon wafer, and the suction cup is a vacuum suction cup. In this embodiment, the workpiece is a silicon wafer.

As one of the embodiments, referring to FIG. 1 , a plurality of silicon wafers are stacked in the material box 300, and the suction cup can absorb the silicon wafers in the material box 300 to transfer the silicon wafers from the material box 300 to the transport module 400. In the process of the suction cup picking up the silicon wafers from the material box 300, the suction cup contacts the silicon wafer at the top of the material box 300 and picks up the silicon wafer. In this process, the air knife structure 200 located on one side of the material picking component 100 can blow air on the silicon wafers in the suction cup, so that the silicon wafers in contact with the suction cup are separated from the silicon wafers picked up by the suction cup, which can effectively prevent the suction cup from adsorbing more than one silicon wafer at a time.

When the air outlet is directly connected to the air storage cavity, the airflow in the air storage cavity flows directly to the air outlet, and the airflow is straight out. However, the passage from the air storage cavity to the air outlet is rapidly narrowed. At this time, most of the straight outflow will be blocked by the cavity wall of the air storage cavity. After hitting the cavity wall of the air storage cavity, the straight outflow will rebound. The rebounded airflow will conflict with the airflow flowing to the air outlet, resulting in a reduction in the wind force of the outflow.

In some embodiments of the present application, referring to FIG. 2 to FIG. 4 , the wind knife structure 200 includes a first component 210 and a second component 220 which are stacked, the first component 210 having an air storage tank 211 and an air supply tank 213, a ramp structure 214 being arranged between the air storage tank 211 and the air supply tank 213, the ramp structure 214 and the air supply tank 213 being in a stepped shape, the end surface of the second component 220 close to the air storage tank 211 and the air storage tank 211 defining an air storage cavity, and the end surface of the second component 220 close to the air supply tank 213 and the air supply tank 213 defining an air supply port. It should be noted that the ramp structure 214 is an inclined surface which is arranged obliquely and connected between the air storage tank 211 and the air supply tank 213. The ramp structure 214 and the air supply tank 213 are in a stepped shape, that is, the inclined surface of the ramp structure 214 and the bottom surface of the air supply tank 213 are arranged in a stepped shape. In this way, the ramp structure 214 can guide the airflow in the air storage cavity. When the wind flows from the air storage chamber to the air supply port and out of the air supply port, the air flow is inclined on the slope structure 214, which helps to reduce the conflict between the air flow, so that more wind can flow out from the gap between the first component 210 and the second component 220, thereby helping to increase the wind force of the air supply port.

The air storage chamber and air supply outlet of the wind knife structure are defined by the first component and the second component, and the air storage tank 211, the air supply tank 213 and the slope structure 214 are processed on one of the end faces of the first component. This helps to simplify the processing technology of the wind knife structure and reduce the processing difficulty; at the same time, the air storage tank 211, the air supply tank 213 and the slope structure 214 are processed on one of the end faces of the first component, which helps to ensure the processing accuracy of the air storage tank 211, the slope structure 214 and the air supply tank 213, which is beneficial to ensure the actual air supply effect of the wind knife structure.

Specifically in this embodiment, the first component 210 is fixedly connected to the second component 220, and the wall surfaces of the gas storage tank 211 and the end surface of the second component 220 close to the gas storage tank 211 enclose the gas storage cavity; the air supply groove 213 and the end surface of the second component 220 close to the air supply groove 213 enclose the air supply port. The space between the inclined surface of the ramp structure 214 and the second component 220 forms the channel mentioned above, and the gas in the gas storage cavity flows to the air supply port through the channel. The ramp structure 214 has an inclined surface that is inclined relative to the bottom surface of the gas storage tank 211, which can provide guidance for the airflow when the gas in the gas storage cavity flows to the air supply port, and helps to reduce the situation where the airflow is blocked by the side wall of the gas storage tank 211. It should be understood that when the side wall of the gas storage tank 211 close to the air supply groove 213 is perpendicular to the bottom surface of the gas storage tank 211, the airflow will rebound after being blocked by the side wall, thereby conflicting with the airflow flowing to the air supply port, so that the wind force of the air supply port is reduced. Therefore, the provision of the slope structure 214 also helps to reduce the rebound of the airflow after hitting the side wall and the conflict with the outflowing airflow, which is beneficial to improving the air supply intensity of the air supply port.

It should be noted that the depth of the air storage tank 211 is greater than the depth of the air supply tank 213, and the slope structure 214 connects the air storage tank 211 and the air supply tank 213. The slope structure 214 can be connected to the bottom surface of the air storage tank 211, and can also be connected to the side of the air storage tank 211 close to the air supply tank 213.

In one embodiment, the air storage tank 211 , the air supply tank 213 and the slope structure 214 can all be obtained by milling the first component 210 , which is beneficial to reducing the manufacturing cost of the air knife structure 200 .

In the embodiment of the present application, the slope structure 214 has an inclined surface, which connects the gas storage tank 211 and the air supply tank 213. The inclined surface can be a plane, or an arc surface or a curved surface, which is not limited here. The setting of the slope structure 214 can guide the gas in the gas storage chamber. The gas in the gas storage chamber can gradually converge to the air supply port along the slope structure 214, which helps to ensure the air supply intensity, so that the wind knife structure 200 can ensure the intensity and size of the air flow blowing to the workpiece, and improve the separation effect of the wind knife structure 200 on the workpiece.

In this embodiment, the slope structure 214 has a straight plane, one end of which is connected to the air storage tank 211 , and the other end of which is connected to the air supply tank 213 .

In some embodiments of the present application, the depth of the air supply groove 213 is 0.1 mm. That is, the height of the air supply port defined by the air supply groove 213 and the second component 220 is 0.1 mm. In this way, it is helpful to ensure the air supply pressure and air supply intensity of the air supply port, thereby helping to ensure the ability of the air knife structure 200 to separate the workpieces that are not directly picked up by the material picking component 100 and the workpieces that are directly in contact with the material picking component 100.

It is worth understanding that the height of the air supply port will affect the air supply force. In this embodiment, by setting the height of the air supply slot 213 to 0.1 mm, the wind force can be effectively guaranteed, so that the airflow blown from the air supply port can separate the workpieces that are not in direct contact with the material picking assembly 100, so that the material picking assembly 100 can only pick up one workpiece at a time.

It should be understood that in some other embodiments, the height of the air supply slot 213 or the height of the air supply port can be set according to the actual air supply wind force requirement to meet the working requirement of separating the workpieces that are not in direct contact with the material removal component 100.

In some embodiments of the present application, referring to FIG. 2 and FIG. 3 , the wind knife structure 200 further includes a first bracket 230 , and the first component 210 and the second component 220 are mounted on the first bracket 230 .

As a specific implementation, referring to FIG. 2 and FIG. 3 , the first component 210 is fixedly connected to the second component 220 , the second component 220 is connected to the first bracket 230 , and the first component 210 is not connected to the first bracket 230 .

In some embodiments of the present application, referring to FIG. 2 and FIG. 3 , the second component 220 is provided with an adjustment slot 222 extending along the first direction, and the first bracket 230 is provided with a fastening hole at a position corresponding to the adjustment slot 222, and a fastener is used to penetrate the adjustment slot 222 and the fastening hole at the same time to fix the second component 220 on the first bracket 230. When the relative position of the second component 220 and the first bracket 230 needs to be adjusted, the fastener is loosened and the position of the second component 220 is adjusted, and then the fastener is tightened to complete the position adjustment. It should be noted that the first direction is the X direction in FIG. 2 .

As one implementation mode, referring to FIG. 3 , the first bracket 230 is provided with a plurality of fastening holes at intervals corresponding to the positions of the adjustment slots 222 , so as to fix the second component 220 at different positions of the first bracket 230 .

Further, referring to Fig. 2 and Fig. 3, the lower end of the second component 220 is a stepped structure, and the second component 220 is mounted on the first bracket 230 through the stepped structure. In this way, when the relative position of the second component 220 and the first bracket 230 is adjusted, the relative position of the second component 220 along the X direction can be changed, and the second component 220 does not need to be positioned in the Z direction, which helps to improve the convenience of adjusting the position of the second component 220 in the X direction.

In some embodiments of the present application, referring to FIG. 2 and FIG. 3 , the wind knife structure 200 further includes a slide plate 240, the slide plate 240 is provided with a first slide groove 241 extending along the second direction, and the first bracket 230 has a first slider 221 that is connected to the first slide groove 241. The first slider 221 can slide along the first slide groove 241 to change the position of the first component 210, thereby changing the position of the air outlet. Thus, the position of the air outlet can be easily adjusted. It should be noted that the second direction is the Y direction shown in FIG. 2 .

In some embodiments of the present application, referring to FIG. 2 and FIG. 3 , the wind knife structure 200 further includes a second bracket 250, the second bracket 250 is provided with a second slide groove 251 extending along a third direction, the slide plate 240 has a second slider slidably connected to the second slide groove 251, and the second slider can slide along the second slide groove 251. It should be understood that the air duct structure further includes a fixing component, and when the relative position of the slide plate 240 and the second bracket 250 is adjusted, the fixing component can be used to fix the slide plate 240 on the second bracket 250. It should be noted that the third direction is the Z direction shown in FIG. 2 .

Therefore, the wind knife structure 200 can move along the first direction, the second direction or the third direction, so that the wind knife structure 200 can be easily adjusted.

In some embodiments of the present application, referring to FIG. 2 and FIG. 3 , the air knife structure 200 further includes a through-beam sensor, which is used to detect the position of the workpiece to control the air blowing of the air knife structure. Specifically, the reclaimer further includes a control device for controlling the action of the air knife structure 200. When the through-beam sensor detects that a silicon wafer passes by, it means that the reclaiming assembly 100 is picking up a silicon wafer, and the control device controls the air knife structure 200 to blow air to reduce the number of silicon wafers that the reclaiming assembly 100 grabs at the same time.

2 and 3, the wind knife structure 200 further includes a third bracket 270, which is mounted on the slide plate 240, and the through-beam sensor is mounted on the third bracket 270. Furthermore, the third bracket 270 can slide along the first slide groove 241 to adjust the position of the through-beam sensor.

In this embodiment, referring to Figures 2 and 3, two first brackets 230 are arranged in the first slide groove 241 of the slide plate 240, and a blowing structure composed of a first component and a second component is installed on each first bracket 230. The air supply port of each blowing structure is arranged toward the material box 300. When the suction cup of the material picking component 100 picks up the silicon wafer from the material box 300, the air supply port of each blowing structure can separate the silicon wafer that is not directly adsorbed by the suction cup from the silicon wafer that is adsorbed by the suction cup, and make the silicon wafer fall back into the material box.

The embodiments of the utility model are described in detail above in conjunction with the accompanying drawings, but the utility model is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the utility model. In addition, the embodiments of the utility model and the features in the embodiments can be combined with each other without conflict.

Claims (10)

1. A reclaimer, characterized by comprising: A picking component, used for picking up workpieces; The wind knife structure is arranged on one side of the material picking component. The wind knife structure has an air storage cavity and an air inlet and an air supply port respectively connected to the air storage cavity. A slope structure is arranged between the air supply port and the air storage cavity. The cross-sectional area of the channel formed at the slope structure gradually decreases in the direction from the air storage cavity to the air supply port. 2. The material reclaimer according to claim 1 is characterized in that the wind knife structure includes a first component and a second component which are stacked, the first component having an air storage tank and an air supply tank, a slope structure is arranged between the air storage tank and the air supply tank, the slope structure and the air supply tank are stepped, the end face of the second component close to the air storage tank forms the air storage cavity with the air storage tank, and the end face of the second component close to the air supply tank forms the air supply port with the air supply tank. 3. The reclaimer according to claim 2 is characterized in that the depth of the air supply groove is 0.1-0.2 mm. 4. The reclaimer according to claim 2 or 3, characterized in that the wind knife structure further comprises a first bracket, and the first component and the second component are mounted on the first bracket. 5. The material reclaimer according to claim 4 is characterized in that the second component is provided with an adjustment groove extending along the first direction, and the first bracket is provided with a fastening hole at a position corresponding to the adjustment groove, and a fastener is simultaneously penetrated through the adjustment groove and the fastening hole to fix the second component to the first bracket. 6. The material reclaimer according to claim 4 is characterized in that the wind knife structure also includes a slide plate, the slide plate is provided with a first slide groove extending along the Y direction, and the first bracket has a first sliding block cooperated with the first slide groove. 7. The material reclaimer according to claim 6 is characterized in that the wind knife structure also includes a second bracket, the second bracket is provided with a second slide groove extending along the Z direction, and the slide plate has a second sliding block slidably connected to the second slide groove. 8. The material reclaimer according to claim 1 is characterized in that the air knife structure further comprises a through-beam sensor, and the through-beam sensor is used to detect the position of the workpiece to control the air blowing of the air knife structure. 9. The material reclaimer according to claim 1, characterized in that the material reclaiming assembly comprises a suction cup, and the suction cup is used to suck the workpiece. 10. A material transport device, characterized in that it comprises the material reclaimer according to any one of claims 1 to 9, and further comprises a transport module and a material box, wherein the material reclaimer transfers the workpiece between the transport module and the material box.