CN220665422U - Evaporation equipment - Google Patents

Abstract

The utility model discloses an evaporation equipment, which belongs to the technical field of evaporation equipment. The evaporation equipment includes an evaporation chamber, an evaporation source, a baffle and a driving mechanism. The evaporation source is provided with an opening. The opening is located in the evaporation chamber. The baffle is connected to the output end of the driving mechanism. The driving mechanism can drive the baffle to move in the first direction. , so that the baffle is located at the first height position and the second height position, and the driving mechanism can drive the baffle to rotate in a plane perpendicular to the first direction, so that the baffle is located at the first angular position and the second angular position; the baffle is located at the first When the baffle is at the height position and the first angular position, the baffle cover is provided on the opening; when the baffle is at the second height position, there is a gap between the baffle and the opening in the first direction so that the opening is open; when the baffle is at the second angular position , the baffle and the opening are misaligned on the plane, so that the opening is open, so as to solve the problem of interference between the baffle and the opening when opening and closing the baffle, and ensure smooth opening and closing of the baffle.

Description

A kind of evaporation equipment

Technical field

The utility model relates to the technical field of evaporation equipment, in particular to evaporation equipment.

Background technique

The evaporation device includes an evaporation chamber, an evaporation source and a baffle. The opening of the evaporation source faces the inside of the evaporation chamber. The baffle is located in the evaporation chamber and can cover the opening or leave it open. However, in a long-term high temperature or ultra-high temperature environment, the evaporation source is easily deformed, causing the height of the opening relative to the inner wall of the evaporation chamber to change, that is, when the baffle is opened or closed, the opening and the baffle will interfere with each other, and the baffle cannot be opened or closed normally.

Therefore, there is an urgent need for an evaporation equipment to solve the above existing problems.

Utility model content

The purpose of this utility model is to provide an evaporation equipment to solve the problem of interference between the baffle and the opening when opening and closing the baffle, and to ensure smooth opening and closing of the baffle.

To achieve this purpose, the utility model adopts the following technical solutions:

An evaporation equipment is provided, including an evaporation chamber, an evaporation source, a baffle and a driving mechanism. The evaporation source is provided with an opening, the opening is located in the evaporation cavity, and the baffle is connected to the driving mechanism. At the output end, the driving mechanism can drive the baffle to move in the first direction so that the baffle is located at the first height position and the second height position, and the driving mechanism can drive the baffle to move vertically to the Planar rotation in the first direction places the baffle in a first angular position and a second angular position;

When the baffle is located at the first height position and the first angle position, the baffle cover is provided on the opening; when the baffle is located at the second height position, the baffle and the opening There is a gap in the first direction so that the opening is open; when the baffle is located at the second angular position, the baffle and the opening are offset on the plane so that the opening is open. .

In some possible implementations, at least part of the evaporation source is provided in the evaporation cavity.

In some possible implementations, the drive mechanism includes a lifting drive assembly and a rotation drive assembly, the rotation drive assembly is connected to the output end of the lift drive assembly, and the baffle is connected to the output end of the rotation drive assembly. end.

In some possible implementations, the lifting drive assembly is a lifting cylinder.

In some possible implementations, the rotary drive component is a rotary cylinder.

In some possible implementations, a sealing assembly is further included, and the connection between the baffle and the driving mechanism is sealingly connected to the evaporation chamber through the sealing assembly.

In some possible implementations, the sealing component is a magnetic fluid seal.

In some possible implementations, the baffle includes a plate body and a connecting portion. The plate body is used to cover the opening. One end of the connecting portion is connected to the plate body, and the other end is connected to the driving mechanism. connect.

In some possible implementations, the connecting portion is L-shaped, and the connecting portion penetrates the evaporation cavity and/or the output end of the driving mechanism penetrates the evaporation cavity.

In some possible implementations, the difference angle between the first angular position and the second angular position ranges from 45° to 90°.

Beneficial effects of this utility model:

The utility model provides an evaporation equipment that drives the baffle to move and rotate through a driving mechanism, thereby realizing automatic opening and closing of the cover. When the height of the opening relative to the inner wall of the cavity changes due to deformation of the evaporation source, the drive mechanism drives the cover up and down to ensure that the cover is at the first height position before rotation, that is, at the high position, to prevent the cover from interfering with the opening during rotation. , so that the cover can be opened and closed smoothly.

Description of the drawings

Figure 1 is a schematic structural diagram of the evaporation equipment provided by a specific embodiment of the present invention;

Figure 2 is an internal schematic diagram of the evaporation equipment provided by the specific embodiment of the present invention in an open state;

FIG. 3 is an internal schematic diagram of the baffle cover of the evaporation equipment provided in an open state according to the specific embodiment of the present invention.

In the picture:

1. Evaporation chamber; 2. Evaporation source; 21. Opening; 3. Baffle; 31. Plate body; 32. Connection part; 4. Driving mechanism; 41. Lift drive assembly; 42. Rotary drive assembly; 5. Sealing components.

Detailed ways

In order to make the technical problems solved by the present utility model, the technical solutions adopted and the technical effects achieved more clear, the technical solutions of the embodiments of the present utility model will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only Some embodiments of the present invention are not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative efforts fall within the scope of protection of the present utility model.

In the description of the present utility model, unless otherwise explicitly stipulated and limited, the terms "connected", "connected" and "fixed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or a detachable connection. Integration; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be an internal connection between two elements or an interaction between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood in specific situations.

In the present invention, unless otherwise expressly stipulated and limited, the first feature being "above" or "below" the second feature may include direct contact between the first and second features, or may include the first and second features being in direct contact with each other. Features are not in direct contact but through other features between them. Furthermore, the terms "above", "above" and "above" a first feature on a second feature include the first feature being directly above and diagonally above the second feature, or simply mean that the first feature is higher in level than the second feature. “Below”, “under” and “under” the first feature is the second feature includes the first feature being directly below and diagonally below the second feature, or simply means that the first feature is less horizontally than the second feature.

This embodiment provides an evaporation equipment, as shown in Figures 1 to 3, including an evaporation chamber 1, an evaporation source 2, a baffle 3 and a driving mechanism 4. The evaporation source 2 is provided with an opening 21, and the opening 21 is located at the evaporation In the cavity 1, the baffle 3 is connected to the output end of the driving mechanism 4. The driving mechanism 4 can drive the baffle 3 to move in the first direction so that the baffle 3 is located at the first height position and the second height position. The driving mechanism 4 can The baffle 3 is driven to rotate in a plane perpendicular to the first direction, so that the baffle 3 is located at the first angular position and the second angular position. When the baffle 3 is located at the first height position and the first angle position, the baffle 3 covers the opening 21 . When the baffle 3 is at the second height position, there is a gap between the baffle 3 and the opening 21 in the first direction, so that the opening 21 is open. When the baffle 3 is located at the second angular position, the baffle 3 and the opening 21 are offset on the plane, so that the opening 21 is open.

In this embodiment, the driving mechanism 4 drives the baffle 3 to move in the vertical direction, that is, the first direction is the vertical direction, and the second height position is higher than the first height position. The driving mechanism 4 drives the baffle 3 to rotate in the horizontal plane. Take an example to illustrate. In other embodiments, the driving mechanism 4 can also drive the baffle 3 to move in the horizontal direction or in a direction at an angle to the horizontal direction. The driving mechanism 4 can drive the baffle 3 to rotate in a plane perpendicular to the moving direction, which is not limited.

The evaporation equipment includes the following steps: when the baffle 3 is opened to open the opening 21, the driving mechanism 4 drives the baffle 3 to rise, so that the baffle 3 is separated from the opening 21 in the vertical direction, and the baffle 3 is located above the opening 21; The driving mechanism 4 drives the baffle 3 to rotate, so that the baffle 3 and the opening 21 are displaced on the plane, and the opening 21 is completely open. When the driving mechanism 4 drives the cover to rotate and open the opening 21, it first drives the baffle 3 to rise, thereby preventing the baffle 3 from interfering with the opening 21 during rotation and preventing smooth opening. When the baffle 3 is closed and the baffle 3 covers the opening 21, the driving mechanism 4 drives the baffle 3 to rotate so that the baffle 3 is located above the opening 21. Then the driving mechanism 4 drives the flap to lower and the baffle 3 covers the opening 21. . When the driving mechanism 4 drives the cover to rotate and cover the opening 21, it first drives the baffle 3 to rotate and then lowers it from a high position to a low position to cover the opening 21, thereby preventing the baffle 3 from interfering with the opening 21 during the rotation and preventing the baffle 3 from interfering with the opening 21 during rotation. Closed smoothly.

The driving mechanism 4 drives the baffle 3 to move and rotate, thereby realizing automatic opening and closing of the cover. When the height of the opening 21 relative to the inner wall of the cavity changes due to the deformation of the evaporation source 2, the driving mechanism 4 drives the cover up and down to ensure that the cover is at the first height position before rotation, that is, at a high position, to prevent the cover from being in contact with the inner wall during rotation. The opening 21 interferes so that the cover can be opened and closed smoothly.

Furthermore, at least part of the evaporation source 2 is provided in the evaporation chamber 1. The evaporation source 2 is easily deformed in a long-term high temperature or ultra-high temperature environment, which further causes the position of the opening 21 to change. The baffle 3 is driven up and down through the above-mentioned driving mechanism 4. , it is possible to avoid interference between the baffle 3 and the structure of the evaporation source 2 .

In one embodiment, the driving mechanism 4 includes a lifting driving assembly 41 and a rotating driving assembly 42. The rotating driving assembly 42 is connected to the output end of the lifting driving assembly 41, and the baffle 3 is connected to the output end of the rotating driving assembly 42. When opening and closing the baffle 3, first the lifting drive assembly 41 drives the rotation drive assembly 42 and the baffle 3 to rise and fall, so that the baffle 3 rises to the first height position or lowers to the second height position, and then the rotation drive assembly 42 drives the baffle 3 to rotate. to the first angular position or the second angular position.

In another embodiment, the driving mechanism 4 includes a lifting driving assembly 41 and a rotating driving assembly 42. The lifting driving assembly 41 is connected to the output end of the rotating driving assembly 42, and the baffle 3 is connected to the output end of the lifting driving assembly 41. The lifting drive assembly 41 drives the baffle 3 to rise and fall, so that the baffle 3 rises to the first height position or lowers to the second height position, and then the rotation drive assembly 42 drives the baffle 3 and the lifting drive assembly 41 to rotate to the first angular position or the second height position. Two angle positions.

In one embodiment, the lifting drive assembly 41 is a lifting cylinder, and the baffle 3 is connected to the piston rod of the lifting cylinder directly or indirectly through the rotation drive assembly 42. The piston rod telescopically realizes the lifting and lowering of the baffle 3. The structure is simple and reliable, and the cost is low. Low. In another embodiment, the lifting drive assembly 41 may also include a motor and a screw nut assembly. The screw nut is connected to the screw rod, the screw rod is connected to the output end of the motor, and the baffle 3 is directly or indirectly connected to the screw nut. , the motor drives the screw to rotate, driving the baffle 3 and the screw nut to move on the screw, thereby realizing the lifting and lowering of the baffle 3 with high lifting distance accuracy. In other embodiments, the lifting drive assembly 41 may also be a lift in the prior art, without limitation.

In one embodiment, the rotary drive assembly 42 is a rotary cylinder, and the baffle 3 is connected to the output end of the rotary cylinder directly or indirectly through the lifting drive assembly 41 to realize the rotation of the baffle 3, with a simple and reliable structure and low cost. In another embodiment, the rotation drive assembly 42 can also connect the baffle 3 directly or indirectly to the output end of the motor to realize the rotation of the baffle 3 with high rotation angle accuracy. In other embodiments, the rotation drive assembly 42 can also be any other rotation mechanism in the prior art, without limitation. Further, the angle range of the difference between the first angular position and the second angular position is 45°-90°. Specifically, the difference between the two can be 45°, 60°, 75° or 90°, etc., which is not limited, as long as it ensures When the baffle 3 needs to be fully open to the opening 21, the driving mechanism 4 can completely stagger the baffle 3 and the opening 21 so that the opening 21 is fully open and not blocked.

The evaporation equipment also includes a sealing component 5. The connection between the baffle 3 and the driving mechanism 4 is sealingly connected to the evaporation chamber 1 through the sealing component 5, ensuring the sealing inside the evaporation chamber 1. Furthermore, the sealing component 5 is a magnetic fluid seal. On the one hand, the magnetic fluid seal has the advantage of high transmission efficiency. Since the driving mechanism 4 drives the baffle 3 to rotate, the magnetic fluid seal has extremely small friction in the rotating state. There is no mechanical wear, low heat generation, minimal power loss, and the transmission efficiency is almost 100%. The power loss only considers the loss of the bearing, reducing the energy loss during the rotation and switching process of the baffle 3. On the other hand, the magnetic fluid seal has the advantage of high transmission speed, and the magnetic fluid seal has the potential of high-speed operation, which facilitates the baffle 3 rotary switch. In addition, the magnetic fluid seal also has the advantages of good sealing performance, high reliability and no pollution. The specific structure and usage method can refer to the existing technology and will not be described again.

The baffle 3 includes a plate body 31 and a connecting part 32. The plate body 31 is used to cover the opening 21. One end of the connecting part 32 is connected to the plate body 31 and the other end is connected to the driving mechanism 4. The connecting part can be adaptively simplified according to needs. The structure of 32 makes the baffle 3 lighter as a whole and is convenient to connect with the driving mechanism 4. Optionally, the board body 31 and the connecting portion 32 are of an integrated structure to ensure a reliable structure. Optionally, the board body 31 and the connecting portion 32 can also be of a separate structure, and the two are detachably connected to facilitate disassembly and assembly. For example, , the connecting part 32 is first connected to the driving mechanism 4, and then the connecting part 32 is connected to the board body 31. Furthermore, the connecting portion 32 is L-shaped, and the connecting portion 32 is passed through the evaporation chamber 1 and/or the output end of the driving mechanism 4 is passed through the evaporation chamber 1, which further facilitates the connection between the baffle 3 and the driving mechanism 4.

Obviously, the above-mentioned embodiments of the present invention are only examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. An exhaustive list of all implementations is neither necessary nor possible. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model shall be included in the protection scope of the claims of the present utility model.

Claims (10)

1. The evaporation equipment is characterized by comprising an evaporation cavity (1), an evaporation source (2), a baffle plate (3) and a driving mechanism (4), wherein the evaporation source (2) is provided with an opening (21), the opening (21) is positioned in the evaporation cavity (1), the baffle plate (3) is connected to the output end of the driving mechanism (4), the driving mechanism (4) can drive the baffle plate (3) to move along a first direction so that the baffle plate (3) is positioned at a first height position and a second height position, and the driving mechanism (4) can drive the baffle plate (3) to rotate on a plane perpendicular to the first direction so that the baffle plate (3) is positioned at a first angle position and a second angle position;

when the baffle plate (3) is positioned at the first height position and the first angle position, the baffle plate (3) is covered on the opening (21); -when the shutter (3) is in the second height position, the shutter (3) and the opening (21) have a spacing in the first direction such that the opening (21) is open; when the baffle plate (3) is positioned at the second angle position, the baffle plate (3) and the opening (21) are staggered on a plane so as to open the opening (21).

2. The evaporation apparatus according to claim 1, wherein at least part of the evaporation source (2) is arranged within the evaporation cavity (1).

3. The evaporation apparatus according to claim 1, wherein the driving mechanism (4) comprises a lift driving assembly (41) and a rotation driving assembly (42), the rotation driving assembly (42) is connected to an output end of the lift driving assembly (41), and the baffle plate (3) is connected to an output end of the rotation driving assembly (42).

4. A vapor deposition apparatus according to claim 3, characterized in that the lifting drive assembly (41) is a lifting cylinder.

5. A vapor deposition apparatus according to claim 3, characterized in that the rotary drive assembly (42) is a rotary cylinder.

6. The evaporation apparatus according to claim 1, further comprising a sealing assembly (5), wherein the junction of the baffle plate (3) and the driving mechanism (4) is in sealing connection with the evaporation cavity (1) through the sealing assembly (5).

7. The evaporation apparatus according to claim 6, wherein the sealing assembly (5) is a magnetic fluid seal.

8. The vapor deposition apparatus according to claim 1, wherein the baffle plate (3) comprises a plate body (31) and a connecting portion (32), the plate body (31) is used for covering the opening (21), one end of the connecting portion (32) is connected with the plate body (31), the other end is connected with the driving mechanism (4), and the plate body (31) and the connecting portion (32) are in an integral structure or a split structure.

9. The evaporation apparatus according to claim 8, wherein the connection portion (32) is L-shaped, and the connection portion (32) is disposed through the evaporation cavity (1) and/or the output end of the driving mechanism (4) is disposed through the evaporation cavity (1).

10. The vapor deposition apparatus according to any one of claims 1 to 9, characterized in that the difference angle of the first angular position and the second angular position is in the range of 45 ° to 90 °.