CN220601250U - Chemical delivery cabinet capable of preventing supply pump from being blocked - Google Patents
Chemical delivery cabinet capable of preventing supply pump from being blocked Download PDFInfo
- Publication number
- CN220601250U CN220601250U CN202322330216.1U CN202322330216U CN220601250U CN 220601250 U CN220601250 U CN 220601250U CN 202322330216 U CN202322330216 U CN 202322330216U CN 220601250 U CN220601250 U CN 220601250U
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- Prior art keywords
- chemical delivery
- supply pump
- pump
- filter
- pressure
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- 239000000126 substance Substances 0.000 title claims abstract description 75
- 239000002994 raw material Substances 0.000 claims abstract description 29
- 239000007788 liquid Substances 0.000 claims description 27
- 238000010992 reflux Methods 0.000 claims description 13
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 239000013064 chemical raw material Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000002637 fluid replacement therapy Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
The utility model provides a prevent chemical delivery cabinet of supply pump holding back pressure, it includes former storage bucket, supply pump and filter, and chemical delivery cabinet still includes the backward flow path, the backward flow path includes return line and backflow valve. The raw material barrel, the supply pump and the filter are sequentially connected through a pipeline. The return pipe connects the raw material barrel with a downstream pipe of the filter. The return valve is provided in the return conduit, which can be opened or closed based on the actual supply pressure of the chemical delivery cabinet.
Description
Technical Field
The application relates to the technical field of regulating systems, and in particular relates to a chemical conveying cabinet for preventing a supply pump from holding pressure.
Background
The semiconductor process requires the use of wet chemicals, which are mainly used in cleaning, photoresist coating, photoresist stripping, developing, metallization, polishing, and grinding processes. The chemicals required for these processes are typically transported by pipeline at the plant site premises to the different areas of demand of the plant. A common chemical supply in the industry is by chemical delivery Cabinet (CDM) to a machine (TOOL) via a valve distribution box (VMB). In the practical application of the conveying mode, the chemical conveying cabinet is easy to generate the pressure-holding phenomenon of the pipeline and the supply pump due to the influence of factors such as the pipe diameter size, the viscosity strength of the fluid, the flow and the like of the conveying pipeline.
The supply pump of the chemical delivery cabinet is pressurized to reduce the supply flow, for example, when the actual working pressure of the pneumatic diaphragm pump is too high, the pneumatic diaphragm pump cannot work normally. The supply system is unstable, and the production quality and the production efficiency of the product are affected. The long-time pressure holding of the chemical delivery cabinet can cause pump damage or influence the service life of the pump. The pressure is suppressed in the pipeline, which may cause leakage of the pipeline joint, and may even cause the pipeline joint to fall off, thereby bringing about a risk of leakage of chemicals in a large area. The pump clamping phenomenon is further easily caused by the pressure of the supply pump, so that the chemical conveying cabinet is down, the normal production of the production line is affected, and the productivity loss is caused.
CN218413266U discloses a concentrated liquid supply timeout interruption device based on photovoltaic chemicals, which comprises a control circuit module arranged between a workshop equipment end and a concentrated liquid supply system. The control circuit module comprises a first intermediate relay, a second intermediate relay, a timer and an alarm device. The liquid medicine signal output end of the workshop equipment end is respectively connected with the first intermediate relay and the second intermediate relay, and the output end of the second intermediate relay is connected with the centralized liquid supply system. The output end of the first intermediate relay is connected with a timer, when the timer reaches a preset value, an output signal of the timer is transmitted to the second intermediate relay, and an output signal of the second intermediate relay is transmitted to the alarm device. When the liquid is required to be supplied to the equipment for an abnormal long time, the liquid-required signal can be interrupted in time, and the liquid supply requirement of the concentrated liquid supply system on the equipment is stopped.
The concentrated liquid supply timeout interruption device based on the photovoltaic chemicals disclosed by the patent of the utility model can prevent the diaphragm pump from generating pressure holding by recording the liquid demand signal time through a timer. The way of preventing the pressure from being blocked in the chemical supply process can not directly monitor the pressure at the pump, but deduce the pressure at the pump according to the liquid supply time. The pressure-blocking prevention mode may cause that the liquid supply is stopped without pressure blocking or the liquid supply is stopped in time after the pressure blocking.
Disclosure of Invention
The present application has been made in view of the state of the art described above. An object of the present application is to provide a chemical delivery cabinet for preventing a supply pump from being pressurized, which prevents the supply pump from generating a pressurized phenomenon by setting a backflow flow path.
The application provides a chemical delivery cabinet for preventing a supply pump from holding pressure, which comprises a raw material barrel, the supply pump and a filter, and further comprises a reflux flow path, wherein the reflux flow path comprises a reflux pipeline and a reflux valve,
the raw material barrel, the supply pump and the filter are sequentially connected through a pipeline,
the return pipe connects the raw material barrel and the downstream pipe of the filter,
the return valve is provided in the return conduit, which can be opened or closed based on the actual supply pressure of the chemical delivery cabinet.
In at least one possible embodiment, the chemical delivery cabinet further comprises one or more pressure detectors disposed upstream and/or downstream of the filter.
In at least one possible embodiment, the return conduit and the return valve have a pipe diameter of 3/8 to 1/2 inch.
In at least one possible embodiment, the chemical delivery cabinet further includes a gas-liquid separator disposed between the supply pump and the filter and connected to the supply pump and the filter, respectively, through pipes to discharge the gas in the chemical.
In at least one possible embodiment, the chemical delivery cabinet further comprises a sampler connected downstream of the filter to extract a chemical sample.
In at least one possible embodiment, the number of the raw material tank, the supply pump and the filter is two or more,
the return line includes: two or more branch pipes connected to two or more of the raw material barrels, respectively; and a common conduit connecting said two or more branch conduits to a downstream conduit of said filter, one said return valve being provided at each of said branch conduits.
In at least one possible embodiment, a plurality of said filters are connected in parallel, and said return conduit is connected to or downstream of the parallel connection of said filters.
In at least one possible embodiment, the return valve is a pneumatic diaphragm valve.
In at least one possible embodiment, the supply pump is a diaphragm pump or a bellows pump.
In at least one possible embodiment, the raw material barrel is a medium bulk container.
The application provides a prevent chemical delivery cabinet of supply pump holding back pressure, it is provided with the backward flow route, can avoid the supply pump to hold back pressure through setting up the backward flow route, promotes chemical delivery cabinet's supply flow stability and operational safety.
Drawings
Fig. 1 is a schematic diagram of a piping structure of a chemical delivery cabinet according to an embodiment of the present application.
Description of the reference numerals
10. Reflux flow path
11. Reflux pipeline
12. Reflux valve
20. Raw material barrel
30. Supply pump
40. Gas-liquid separator
50. Filter device
60. Sampling device
70. Raw material liquid outlet valve
80. Pressure detector
Detailed Description
Exemplary embodiments of the present application are described below with reference to the accompanying drawings. It should be understood that these specific descriptions are merely illustrative of how one skilled in the art may practice the present application and are not intended to be exhaustive of all of the possible ways of practicing the present application nor to limit the scope of the present application.
Embodiments of the present application provide a chemical delivery cabinet (i.e., CDM, hereinafter sometimes simply referred to as "chemical delivery cabinet") that prevents a supply pump from holding pressure. As shown in fig. 1, the chemical delivery cabinet may include a return flow path 10, a raw material tank 20, a supply pump 30, a gas-liquid separator 40, a filter 50, and a raw material outlet valve 70.
Specifically, as shown in fig. 1, the raw material tub 20 may be connected to the supply pump 30 through a pipe via the raw material outlet valve 70, and the supply pump 30 may be connected to the filter 50 through a pipe via the gas-liquid separator 40. The chemical raw material in the raw material tank 20 may be pumped by the supply pump 30, degassed by the gas-liquid separator 40, filtered by the filter 50, and the filtered chemical raw material may be sent to a next process, for example, a valve distribution box (VMB) to be sent to a machine (TOOL).
It will be appreciated that the feed tank 20 may also be connected with a nitrogen line and a nitrogen valve to replenish the feed tank with nitrogen. The gas-liquid separator 40 may be connected with an exhaust port (EXH).
Preferably, the number of the raw material tub 20, the supply pump 30 and the filter 50 may be two or more, and each of the devices may be connected in series and/or in parallel according to actual needs. For example, as shown in fig. 1, two raw material barrels 20 may be connected in parallel and then connected in series with two parallel supply pumps 30. Two supply pumps 30 in parallel may be connected in series with the gas-liquid separator 40, and the gas-liquid separator 40 may be further connected with two filters 50 in parallel.
It will be appreciated that a plurality of valves may also be provided in the conduit flow path of the chemical delivery cabinet, depending on the actual requirements.
Further, the return flow path 10 may include a return pipe 11 and a return valve 12. The return line 11 may connect the raw material bowl 20 to a downstream line flow path of the filter 50. For example, the return line 11 may be connected at or downstream of the junction of two parallel filters 50. A return valve 12 may be provided in the return line 11.
The chemical delivery cabinet may also be provided with one or more pressure detectors 80 for detecting the operating pressure (PT, also referred to as the actual supply pressure) of the piping of the chemical delivery cabinet. For example, the pressure detector 80 may be disposed upstream and/or downstream of the filter 50.
Preferably, when the number of the raw material tub 20, the supply pump 30, and the filter 50 is set to two or more. The return line 11 may comprise two or more branch lines connected to two or more raw material tanks 20, respectively. The return line 11 may also comprise a common line connecting two or more branch lines to the downstream line of the filter 50, in each of which a return valve 12 may be provided.
By setting the upper and lower limits of the actual supply pressure, the opening and closing of the return valve 12 are controlled, and the relief of the pressure in the return flow path 10 is controlled. The chemicals are refluxed to the raw material barrel 20 through the reflux flow path 10, so that the pressure is prevented from being blocked by the pipeline of the chemical conveying cabinet and the supply pump.
The operation of the return flow path 10 of an exemplary chemical delivery cabinet is set forth below.
The pressure parameter may be set by a control system of the chemical delivery cabinet (e.g., the pressure parameter may be set by a touch screen of the chemical delivery cabinet).
Setting the actual supply pressure as X; setting the upper limit of the pressure as Y; the lower pressure limit is set to Z.
a. When the chemical is supplied, the pressure of the chemical delivery cabinet may be suppressed when the actual supply pressure X is not less than Y. At this time, the reflux valve 12 is opened to reduce the supply pressure of the chemical delivery tank, thereby avoiding the occurrence of a pressure-holding phenomenon.
b. When the actual supply pressure X is less than or equal to Z, the supply pressure is insufficient, and at this time, the return valve 12 is closed, so that the supply pressure of the chemical delivery tank is increased.
c. When the chemical is supplied, the actual supply pressure X is between Y, Z (Y > X > Z), and the chemical delivery tank is in a normal operating state, the return valve 12 can be closed.
Preferably, the return conduit 11 and return valve 12 may have a pipe diameter of 3/8 to 1/2 inch.
Preferably, the return valve 12 may be a pneumatic diaphragm valve.
Preferably, the supply pump 30 may be a diaphragm pump, a bellows pump.
Preferably, the chemical delivery cabinet may also include a sampler 60. A sampler 60 may be provided downstream of the filter 50 for extracting a chemical sample.
Preferably, the raw materials drum 20 may be a medium bulk container (commonly referred to as an IBC ton drum).
Preferably, the raw barrel 20 may have a capacity of 200L (Dram barrel) or 1000L (IBC ton barrel).
The following presents a test result using the chemical delivery cabinet of an embodiment of the present application.
a. The outlet pressure of the chemical delivery cabinet is maintained at 44psi when the chemical delivery cabinet is not provided with the return flow path 10. At this time, the supply pump 30 cannot work normally due to the excessively high actual supply pressure, is in a stuck state, has less liquid supply amount, has 31 seconds for liquid replenishment and has longer liquid replenishment time.
b. When the chemical delivery tank is provided with the return flow path 10, the outlet pressure of the chemical delivery tank is maintained between 30-38psi, the supply pump 30 operates normally, the fluid replacement time is 13 seconds, and the fluid replacement time is shortened.
A comparison of the replenishment times for a chemical delivery cabinet with or without a return flow path 10 is provided in table 1 below.
Table 1: liquid supplementing time comparison of chemical conveying cabinet
As can be seen from table 1 above, the provision of the return flow path can prevent the pressure from being held back by the pipeline and the supply pump under other conditions, so that the supply pump is kept in a normal operating state, the chemical delivery process is smoother, and the required liquid replenishing time is shorter.
Some of the advantageous effects of the above-described embodiments of the present application are briefly described below.
According to the chemical conveying cabinet capable of preventing the supply pump from being pressed down, the backflow flow path comprising the backflow pipeline and the backflow valve is arranged, and when the working pressure of the chemical conveying cabinet exceeds a set value, the backflow valve is opened, so that chemicals flow back to the raw material barrel through the backflow pipeline. And further solves the pressure-holding problem of the supply pump of the chemical conveying cabinet. The solution can be widely applied to various chemical supply systems. Avoiding shutdown of the production line caused by downtime of the chemical supply system due to pressure holding of the supply pump. The safety accidents caused by the dangers of leakage or pipe explosion and the like caused by the pressure rise of the supply system due to the pressure holding are avoided. Further improving the delivery efficiency of the pump and the stability of the supply flow.
It is to be understood that in the present application, when the number of parts or members is not particularly limited, the number may be one or more, and the number herein refers to two or more. For the case where the number of parts or members is shown in the drawings and/or described in the specification as a specific number such as two, three, four, etc., the specific number is generally illustrative and not restrictive, it may be understood that a plurality, i.e., two or more, but this does not mean that the present application excludes one.
It should be understood that the above embodiments are merely exemplary and are not intended to limit the present application. Those skilled in the art can make various modifications and changes to the above-described embodiments without departing from the scope of the present application.
Claims (10)
1. The chemical delivery cabinet for preventing the pressure of the supply pump comprises a raw material barrel, the supply pump and a filter, and is characterized by also comprising a reflux flow path, wherein the reflux flow path comprises a reflux pipeline and a reflux valve,
the raw material barrel, the supply pump and the filter are sequentially connected through a pipeline,
the return pipe connects the raw material barrel and the downstream pipe of the filter,
the return valve is provided in the return conduit, which can be opened or closed based on the actual supply pressure of the chemical delivery cabinet.
2. A chemical delivery chest for preventing a pump from holding pressure according to claim 1, further comprising one or more pressure detectors disposed upstream and/or downstream of the filter.
3. The chemical delivery chest preventing a pump from holding pressure of claim 1, wherein the backflow pipe and the backflow valve have a pipe diameter of 3/8 to 1/2 inch.
4. The chemical delivery cabinet for preventing a pressure build-up of a supply pump according to claim 1, further comprising a gas-liquid separator disposed between the supply pump and the filter and connected to the supply pump and the filter, respectively, by pipes to discharge gas from the chemical.
5. A chemical delivery chest to prevent pump hold-down as recited in claim 1, further comprising a sampler connected downstream of the filter to extract a chemical sample.
6. The chemical delivery cabinet for preventing a supply pump from holding pressure according to claim 1, wherein the number of the raw material tank, the supply pump, and the filter is two or more,
the return line includes: two or more branch pipes connected to two or more of the raw material barrels, respectively; and a common conduit connecting said two or more branch conduits to a downstream conduit of said filter, one said return valve being provided at each of said branch conduits.
7. A chemical delivery chest for preventing pump hold-down according to claim 6, wherein a plurality of said filters are connected in parallel, and said return conduit is connected to or downstream of the parallel connection of said filters.
8. A chemical delivery chest for preventing a pump from holding pressure according to claim 1, wherein the return valve is a pneumatic diaphragm valve.
9. A chemical delivery cabinet for preventing a pressure build-up of a supply pump according to claim 1, wherein the supply pump is a diaphragm pump or a bellows pump.
10. The chemical delivery cabinet for preventing a pump from holding pressure according to claim 1, wherein the raw material tank is a medium bulk container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322330216.1U CN220601250U (en) | 2023-08-29 | 2023-08-29 | Chemical delivery cabinet capable of preventing supply pump from being blocked |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322330216.1U CN220601250U (en) | 2023-08-29 | 2023-08-29 | Chemical delivery cabinet capable of preventing supply pump from being blocked |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220601250U true CN220601250U (en) | 2024-03-15 |
Family
ID=90170675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322330216.1U Active CN220601250U (en) | 2023-08-29 | 2023-08-29 | Chemical delivery cabinet capable of preventing supply pump from being blocked |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220601250U (en) |
-
2023
- 2023-08-29 CN CN202322330216.1U patent/CN220601250U/en active Active
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