CN220492880U - Linear piezoelectric vibrator and driving device for optical imaging system - Google Patents
Linear piezoelectric vibrator and driving device for optical imaging system Download PDFInfo
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Abstract
The application provides a linear piezoelectric vibrator and a driving device for an optical imaging system, and relates to the technical field of optical element driving. Wherein a linear piezoelectric vibrator for an optical imaging system includes: two piezoelectric elements, an elastic body and a friction head; the two piezoelectric elements are respectively stuck on two surfaces of the elastic body to form a sandwich structure, one end of the sandwich structure is fixed with the friction head, and the friction head is in pressure contact with the driven part under the action of pre-pressure force; the piezoelectric elements are respectively provided with four polarized areas, and the piezoelectric vibrator generates a corresponding vibration mode by applying alternating current with specific frequency to the piezoelectric elements, so that the driven part is driven to generate longitudinal linear motion. The technical scheme can solve the problems that in the prior art, the frequency bandwidth of the piezoelectric motor is generally smaller, the capability of tracking control signals is weak, the control is not easy to control, the requirement on control precision is higher, the influence of external environment is easy to influence in the working process, and the like.
Description
Technical Field
The present disclosure relates to the field of optical element driving technologies, and in particular, to a linear piezoelectric vibrator and a driving device for an optical imaging system.
Background
The piezoelectric motor generates regular, directional and high-frequency micro vibration by using the inverse piezoelectric effect of the piezoelectric element, and converts the high-frequency micro vibration generated by the piezoelectric driving element into macroscopic linear motion of a rotor in frictional contact with the piezoelectric driving element by the friction coupling action of the driving head, so that mechanical power output is generated. The piezoelectric motor has small volume and large driving force, thus having obvious advantages in the field of micro motors. But the frequency bandwidth of the piezoelectric motor is generally smaller at present, the capability of tracking control signals is weak, the control is not easy to control, the requirement on control precision is higher, and the piezoelectric motor is easily influenced by external environment in the working process.
In addition, the pre-pressing structure of the piezoelectric vibrator of the existing piezoelectric AF motor is complex, reservation constraint in the horizontal direction and the vertical direction is generally applied to the piezoelectric vibrator by adopting different parts around the piezoelectric vibrator, the structure is complex, the process is complex, the production efficiency is low, and the material cost and the process cost are high.
Disclosure of Invention
The embodiment of the application aims to provide a linear piezoelectric vibrator and a driving device for an optical imaging system, so as to solve the problems that in the prior art, the frequency bandwidth of a piezoelectric motor is generally smaller, the capability of tracking control signals is weak, the control is not easy to control, the control precision requirement is higher, the influence of external environment is easy to influence in the working process and the like; the problems of complex pre-pressing structure of the piezoelectric vibrator in the piezoelectric motor in the prior art and the like are solved.
In order to solve the technical problems, the embodiment of the application provides the following technical scheme:
a first aspect of the present application provides a linear piezoelectric vibrator for an optical imaging system, comprising: two piezoelectric elements, an elastic body and a friction head; the two piezoelectric elements are respectively stuck on two surfaces of the elastic body to form a sandwich structure, one end of the sandwich structure is fixed with the friction head, and the friction head is in pressure contact with the driven part under the action of pre-pressure force;
the piezoelectric elements are respectively provided with four polarized areas, and the piezoelectric vibrator generates a corresponding vibration mode by applying alternating current with specific frequency to the piezoelectric elements, so that the driven part is driven to generate longitudinal linear motion.
In some variations of the first aspect of the present application, the piezoelectric element is a non-laminated piezoelectric ceramic element or a laminated piezoelectric ceramic element, and the non-laminated piezoelectric ceramic element or the laminated piezoelectric ceramic element is in communication with the elastomer to form a circuit.
In some modified embodiments of the first aspect of the present application, the laminated piezoelectric ceramic element includes a piezoelectric ceramic stack, where the piezoelectric ceramic stack is formed by stacking a plurality of piezoelectric ceramic plates with four polarization areas, and a first conductive metal layer is disposed on a side surface of the piezoelectric ceramic stack, so that each piezoelectric ceramic plate is conducted in a homopolar manner; the bottom of the piezoelectric ceramic stack is provided with a second conductive metal layer which is used for conducting the four polarized areas and is connected with the elastic body to form a loop, and the periphery of the conductive layer on the bottom of the piezoelectric ceramic stack is provided with an insulating layer;
wherein, the polarization directions of two adjacent layers of piezoelectric ceramic plates are opposite.
In some modified embodiments of the first aspect of the present application, four polarization regions are disposed on one surface of the non-laminated piezoelectric ceramic element, and a third conductive metal layer is disposed on a bottom surface of the non-laminated piezoelectric ceramic element, so that the four polarization regions are conductive and are grounded to the elastomer to form a loop.
In some modification embodiments of the first aspect of the present application, four of the polarization regions are a first polarization region and a third polarization region disposed at a pair angle, respectively, and a second polarization region disposed at a pair angleA domain and a fourth polarization region; the alternating voltages applied to the first polarized region and the third polarized region are the same, and the alternating voltages applied to the second polarized region and the fourth polarized region are the same, when the driving frequency of the alternating voltages applied to the piezoelectric element is equal to [f 1 , f 4 ]In the interval, two piezoelectric elements simultaneously shrink or expand to drive the piezoelectric vibrator to correspondingly generate protrusions or depressions along the width direction of the elastic body, so that the piezoelectric vibrator is excited to generate in-plane bending vibration along the width direction of the elastic body to be in a first mode; when the drive frequency of the alternating voltage applied to the piezoelectric element is within [f 2 , f 3 ]In the interval, the two piezoelectric elements respectively and sequentially generate shortening or lengthening to drive the piezoelectric vibrator to correspondingly generate shortening or lengthening along the length direction of the elastic body, so that the piezoelectric vibrator is excited to generate in-plane longitudinal vibration along the length direction of the elastic body to be in a second mode; there is an overlap between the two frequency intervalsf 2 , f 3 ]When the electric signals with phase difference are respectively applied to the first polarized region and the third polarized region, the second polarized region and the fourth polarized region of the piezoelectric element, and the frequency isfSatisfies the conditionf 2 < f< f 3 At this time, the piezoelectric vibrator simultaneously generates a first mode and a second mode, which are superimposed on each other, so that the piezoelectric vibrator generates an elliptical motion;
wherein,f 1 in order to excite the lowest frequency of the first mode,f 4 to excite the highest frequency of the first mode;f 2 in order to excite the lowest frequency of the second mode,f 3 to excite the highest frequency of the second mode.
The second aspect of the present application provides a driving device, including lens carrier, base and protective housing, the lens carrier inlays to be located in the base, the protective housing with the integrative space that bears that forms of base lock still includes: the linear piezoelectric vibrator and the pre-pressing assembly for the optical imaging system, wherein the outer side surface of the retaining wall on one side of the base is provided with positioning grooves corresponding to the piezoelectric vibrator and the pre-pressing assembly, and the pre-pressing assembly is arranged around the piezoelectric vibrator; the outer side face of the lens carrier is provided with a protruding portion, a friction block is fixedly arranged on the protruding portion, and the friction block is in contact with a friction head of the piezoelectric vibrator and generates friction movement.
In some variations of the second aspect of the present application, the contact position of the friction block with the friction head is remote from the imaging position of the lens carrier.
In some variation embodiments of the second aspect of the present application, it further comprises: the sensing assembly comprises a sensing piece and a positioning piece, wherein a sensing piece fixing groove corresponding to the sensing piece is formed in the outer peripheral surface of the lens carrier, so that the sensing piece is fixedly connected with the lens carrier; the inner side of the retaining wall of the base is provided with a positioning piece fixing groove corresponding to the positioning piece, the positioning piece is positioned in the positioning piece fixing groove and is electrically connected with the circuit board, and the positioning piece fixing groove and the sensing piece fixing groove are mutually corresponding; the guide assembly is arranged between the lens carrier and the base and consists of an inner guide groove arranged on the outer peripheral surface of the lens carrier, an outer guide groove arranged on the base towards the inner peripheral surface of the lens carrier and balls arranged in the outer guide groove and the inner guide groove, and the outer guide groove and the inner guide groove form a ball groove;
the ball grooves are at least two groups, the outer guide grooves and the inner guide grooves are V-shaped grooves or U-shaped grooves, the number of the balls arranged between each outer guide groove and each inner guide groove is not less than one, and at least one group of outer guide grooves and at least one group of inner guide grooves are V-shaped grooves.
In some variant embodiments of the second aspect of the present application, wherein the pre-compression assembly comprises: the piezoelectric vibrator comprises an upper frame, a lower frame, a side frame, a first protrusion and a second protrusion, wherein the side frame surrounds the upper frame and the lower frame of the piezoelectric vibrator; the side frame is provided with at least two outward third bulges and at least one inward fourth bulge, the third bulges are in close contact with one side surface of the positioning groove on the base, and the fourth bulges are in close contact with one side wall of the piezoelectric vibrator, which is far away from the friction block.
In some variations of the second aspect of the present application, the circuit board includes an external pad electrically connected to the control system outside the driving device, a sensing component connection pad in solder communication with the sensing component, and a piezoelectric vibrator connection pad in solder communication with the piezoelectric vibrator, the piezoelectric vibrator connection pad including an electrode connection pad in conductive communication with the four polarized regions on the piezoelectric element, and a ground pad in conductive communication with the elastomer of the piezoelectric vibrator.
Compared with the prior art, the linear type piezoelectric vibrator for the optical imaging system provided by the first aspect of the application is characterized in that the two piezoelectric elements are adhered to the upper surface and the lower surface of the elastic body to form a sandwich structure, the friction head is fixed on the side face of the sandwich structure, the problem that the frequency bandwidth of the traditional piezoelectric motor is small can be effectively solved, the capability of tracking control signals is high, the control is easy, the control precision requirement is low, and the influence of external environment is not easy in the working process.
The driving device provided by the second aspect of the application adopts a pre-pressing assembly to implement pre-pressing on the piezoelectric vibrator, and the pre-pressing assembly can simultaneously realize reservation constraint of applying the horizontal direction and the vertical direction on the piezoelectric vibrator, and has the advantages of simple structure, simple process, higher production efficiency, lower material cost and lower process cost.
Drawings
The above, as well as additional purposes, features, and advantages of exemplary embodiments of the present application will become readily apparent from the following detailed description when read in conjunction with the accompanying drawings. Several embodiments of the present application are illustrated by way of example and not by way of limitation in the figures of the accompanying drawings, in which like reference numerals refer to similar or corresponding parts and in which:
fig. 1 schematically shows a side view of a piezoelectric vibrator according to an embodiment;
fig. 2 schematically shows a schematic front view of the structure of a piezoelectric vibrator in the first embodiment;
FIG. 3 is a schematic view schematically showing the structure of the bottom of a laminated piezoelectric ceramic element in the first embodiment;
fig. 4 schematically shows a schematic structural view of a laminated piezoelectric ceramic element in the first embodiment;
fig. 5 schematically shows a structural diagram of a first mode of operation of the piezoelectric vibrator in the first embodiment;
fig. 6 schematically shows an operation frequency band diagram of the piezoelectric vibrator in the first embodiment;
fig. 7 schematically shows an operating frequency band diagram of a conventional piezoelectric vibrator;
FIG. 8 schematically shows a graph of two sinusoidal electrical signals applied to a piezoelectric vibrator in accordance with a first embodiment;
fig. 9 is a schematic diagram showing the construction of the application mode of two electrical signals in the first embodiment;
FIG. 10 schematically illustrates an elliptical motion mode view of a piezoelectric vibrator in the first embodiment;
fig. 11 schematically shows a structural diagram of a second mode of operation of the piezoelectric vibrator in the first embodiment;
fig. 12 schematically shows a movement pattern structure diagram of a piezoelectric vibrator in the first embodiment;
fig. 13 schematically shows a schematic structural view of a driving device without a protective case in the second embodiment;
fig. 14 schematically shows a structural diagram of the connection of the piezoelectric vibrator to the pre-pressing assembly and the circuit board in the second embodiment;
fig. 15 schematically shows a structural diagram of the connection of the friction block with the lens carrier, the piezoelectric vibrator in the second embodiment;
fig. 16 schematically shows a top view of the driving device of the second embodiment without the housing fastened;
fig. 17 schematically shows a schematic structure of the connection of the circuit board, the piezoelectric vibrator, and the sensor module in the second embodiment.
Reference numerals illustrate:
1. a piezoelectric vibrator; 11. a piezoelectric element; 111. a first polarized region; 112. a second polarized region; 113. a third polarization region; 114. a fourth polarization region; 12. an elastomer; 13. a friction head; 14. a second conductive metal layer; 15. an insulating layer; 2. a lens carrier; 3. a base; 31. a positioning groove; 4. a pre-pressing assembly; 41. an upper frame; 411. a first protrusion; 412. a second protrusion; 42. a lower frame; 43. a side frame; 431. a third protrusion; 432. a fourth protrusion; 5. a friction block; 6. a sensing assembly; 61. an induction member; 62. a positioning piece; 7. a circuit board; 71. an external bonding pad; 72. a piezoelectric vibrator connection pad; 721. an electrode connection pad; 722. a ground pad; 8. a guide assembly; 81. a ball groove; 811. an inner guide groove; 812. an outer guide groove; 82. and (3) rolling balls.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
It is noted that unless otherwise indicated, technical or scientific terms used herein should be given the ordinary meaning as understood by one of ordinary skill in the art to which this application belongs.
Examples
As shown in fig. 1 and 2, a first embodiment provides a linear piezoelectric vibrator for an optical imaging system, including: two piezoelectric elements 11, an elastic body 12 and a friction head 13; two piezoelectric elements 11 are respectively stuck on two surfaces of an elastic body 12 to form a sandwich structure, one end of the sandwich structure is fixed with a friction head 13, and the friction head 13 is in pressure contact with a driven part under the action of pre-pressure force;
the piezoelectric elements 11 are provided with four polarization regions, respectively, and the piezoelectric vibrator 1 is caused to generate a corresponding vibration mode by applying an alternating current of a specific frequency to the piezoelectric elements 11, thereby driving the driven portion to generate a longitudinal linear motion.
Specifically, the piezoelectric element 11 is a rectangular piezoelectric ceramic plate, the length and the width of the two rectangular piezoelectric ceramic plates are not greater than those of the metal plate, and the two rectangular piezoelectric ceramic plates are identical in size and thickness and are symmetrically placed; the elastic body 12 is a metal plate, the metal plate is rectangular, and the thickness of the metal plate is inconsistent with that of the two rectangular piezoelectric ceramic plates; the friction head 13 is fixedly arranged at the center of the side surface of the piezoelectric vibrator 1, which is not provided with the polarized region, and can be in an integrated structure with the metal plate; or can be adhered and fixed on the metal plate or the metal plate and the piezoelectric ceramic plate at the same time.
As shown in fig. 1, 3 and 4, in a specific implementation, the piezoelectric element 11 may be a non-laminated piezoelectric ceramic element or a laminated piezoelectric ceramic element, preferably a laminated piezoelectric ceramic element, and the non-laminated piezoelectric ceramic element or the laminated piezoelectric ceramic element is connected to an elastomer to form a loop.
Specifically, taking one side as an example, the laminated piezoelectric ceramic element comprises a piezoelectric ceramic stack, wherein the piezoelectric ceramic stack is formed by stacking a plurality of piezoelectric ceramic plates with four polarization areas, the polarization directions of two adjacent piezoelectric ceramic plates are opposite, and a first conducting metal layer is arranged on the side surface of the piezoelectric ceramic stack to conduct homopolar of each piezoelectric ceramic plate; the bottom surface of the piezoelectric ceramic stack is provided with a second conductive metal layer 14 which is used for conducting the four polarized areas and is connected with the elastic body 12 to form a loop, and the periphery of the conductive layer on the bottom surface of the piezoelectric ceramic stack is provided with an insulating layer 15 so that the side conductive metal layer is not directly connected with the metal plate to prevent conduction and short circuit.
Four polarization areas are arranged on one surface of the non-laminated piezoelectric ceramic element, a third conducting metal layer is arranged on the bottom surface of the non-laminated piezoelectric ceramic element, the four polarization areas are conducted and are connected with the elastic body 12 to form a loop, the side conducting metal layer and the insulating layer are not arranged, and when the laminated piezoelectric ceramic element achieves the same movement effect as the non-laminated piezoelectric ceramic element, the required driving voltage is lower.
As shown in fig. 5 to 12, in a specific implementation, four of the polarization regions are a first polarization region 111 and a third polarization region 113 disposed in a pair angle, and a second polarization region 112 and a fourth polarization region 114 disposed in a pair angle, respectively; the ac voltages applied to the first polarized region 111 and the third polarized region 113 are the same, the ac voltages applied to the second polarized region 112 and the fourth polarized region 114 are the same, and the driving frequency of the ac voltage applied to the piezoelectric element 11 is set to [f 1 , f 4 ]In the interval, as shown in fig. 6, the two piezoelectric elements 11 simultaneously shrink or expand to drive the piezoelectric vibrator 1 to generate protrusions or depressions correspondingly along the width direction of the elastic body 12, so that the piezoelectric vibrator 1 is excited to generate in-plane bending vibration along the width direction of the elastic body 12, which is the first mode as shown in fig. 5; when the drive frequency of the alternating voltage applied to the piezoelectric element 11 is within [f 2 , f 3 ]In the interval, as shown in fig. 6, the two piezoelectric elements 11 respectively sequentially shorten or lengthen to drive the piezoelectric vibrator 1 to correspondingly shorten or lengthen along the length direction of the elastic body 12, so that the piezoelectric vibrator 1 is excited to perform in-plane longitudinal vibration along the length direction of the elastic body 12, and the piezoelectric vibrator is in the second mode as shown in fig. 11; there is an overlap between the two frequency intervalsf 2 , f 3 ]When the electric signals with phase difference are applied to the first polarized region 111 and the third polarized region 113, the second polarized region 112 and the fourth polarized region 114 of the piezoelectric element 11, respectively, and the frequency isfSatisfies the conditionf 2 < f< f 3 The application mode is shown in fig. 9, and the alternating current is not limited to a sinusoidal electric signal, a triangular electric signal or a square wave electric signal, wherein the sinusoidal electric signal is shown in fig. 8; at this time, the piezoelectric vibrator 1 simultaneously generates a first mode and a second mode, which are superimposed on each other, so that the piezoelectric vibratorThe actuator 1 generates elliptical motion;
wherein,f 1 in order to excite the lowest frequency of the first mode,f 4 to excite the highest frequency of the first mode;f 2 in order to excite the lowest frequency of the second mode,f 3 to excite the highest frequency of the second mode.
Specifically, the arrangement and the energizing mode of the four polarized areas can generate bending vibration of the first mode, and the bending vibration mode can enable the vibration sense to be stronger and the vibration amplitude to be better.
Examples
As shown in fig. 13 and 15, the second embodiment provides a driving device, which includes a lens carrier 2, a base 3, a protective housing, a linear piezoelectric vibrator 1 (which is identical to the piezoelectric vibrator in the first embodiment and will not be described here in detail) for an optical imaging system and a pre-pressing component 4 as described in the first embodiment, wherein the lens carrier 2 is embedded in the base 3, the protective housing and the base 3 are buckled together to form a bearing space, a positioning groove 31 corresponding to the piezoelectric vibrator 1 and the pre-pressing component 4 is provided on an outer side of a retaining wall on one side of the base 3, and the pre-pressing component 4 is disposed around the piezoelectric vibrator 1; the outer side surface of the lens carrier 2 is provided with a protruding part, a friction block 5 is fixedly arranged on the protruding part, and the friction block 5 is contacted with a friction head 13 of the piezoelectric vibrator 1 to generate friction motion.
Specifically, the contact position of the friction block 5 and the friction head 13 is far away from the imaging position of the lens carrier 2, and after the motor moves for a long time, the fragments generated by the friction block 5 cannot fall on the imaging position of the lens carrier 2, so that the piezoelectric motor can still image clearly after long-time use.
As shown in fig. 13, 16, and 17, in a specific implementation, the method further includes: the sensor assembly 6, the circuit board 7 and the guide assembly 8, wherein the circuit board 7 is arranged between the base 3 and the protective shell, the sensor assembly 6 comprises a sensor 61 and a positioning piece 62, and a sensor fixing groove corresponding to the sensor 61 is formed in the peripheral surface of the lens carrier 2, so that the sensor 61 is fixedly connected with the lens carrier 2; the inner side of the retaining wall of the base 3 is provided with a positioning piece fixing groove corresponding to the positioning piece 62, the positioning piece 62 is positioned in the positioning piece fixing groove and is electrically connected with the circuit board 7, and the positioning piece fixing groove and the sensing piece fixing groove correspond to each other; the guide assembly 8 is arranged between the lens carrier 2 and the base 3, the guide assembly 8 consists of an inner guide groove 811 arranged on the outer peripheral surface of the lens carrier 2, an outer guide groove 812 arranged on the base 3 and facing the inner peripheral surface of the lens carrier 2, and balls 82 arranged in the outer guide groove 812 and the inner guide groove 811, and the outer guide groove 812 and the inner guide groove 811 form a ball groove 81;
wherein, the ball grooves 81 are provided with at least two groups, the outer guide grooves 812 and the inner guide grooves 811 are V-shaped grooves or U-shaped grooves, the number of the balls 82 arranged between each outer guide groove 812 and each inner guide groove 811 is not less than one, and at least one group of the outer guide grooves 812 and the inner guide grooves 811 are V-shaped grooves.
Specifically, as shown in fig. 14, the pre-pressing assembly 4 is of an integrally formed structure, is semi-enclosed in the piezoelectric vibrator 1, is located in the positioning groove 31 of the side wall of the base 2, and the pre-pressing assembly 4 includes: the piezoelectric vibrator 1 comprises an upper frame 41, a lower frame 42, a side frame 43 connected between the upper frame 41 and the lower frame 42, wherein the upper frame 41 and the lower frame 42 are provided with at least two outward first protrusions 411 and at least two inward second protrusions 412, the first protrusions 411 are tightly contacted with the upper surface and the lower surface of the positioning groove 31, the second protrusions 412 are tightly contacted with the upper surface and the lower surface of the circuit board 7, the circuit board 7 surrounds the piezoelectric vibrator 1, the piezoelectric element 11 can be prevented from being directly contacted with the pre-pressing assembly 4, the abrasion of the piezoelectric element 11 is reduced, and the service life of the piezoelectric vibrator 1 is prolonged; at least two outward third protrusions 431 and at least one inward fourth protrusion 432 are provided on the side frame 43, the third protrusions 431 are in close contact with the right side surface of the positioning groove 31 on the base 3, and the fourth protrusions 432 are in close contact with the right side surface of the piezoelectric vibrator 1; the pre-pressing assembly 4 can simultaneously realize reservation constraint of the piezoelectric vibrator in the horizontal direction and the vertical direction by using one component, and has the advantages of simple structure, simple process, higher production efficiency and lower material cost and process cost.
As shown in fig. 17, a circuit board 7 is provided between the base 3 and the protective case for signal transmission inside and outside the driving device, and is electrically connected to the piezoelectric vibrator 1 and the sensor module 6; the circuit board 7 includes an external pad 71, a sensor package connection pad and a piezoelectric vibrator connection pad 72, the external pad 71 is electrically connected to a control system outside the driving apparatus, the sensor package connection pad is in solder conduction with the sensor package 6, the piezoelectric vibrator connection pad 72 is in solder conduction with the piezoelectric vibrator 1, the piezoelectric vibrator connection pad 72 includes an electrode connection pad 721 and a ground pad 722, the electrode connection pad 721 is in conduction with four polarized regions on the piezoelectric element 11, and the ground pad 722 is in conduction with the elastic body 12 of the piezoelectric vibrator 1.
Working principle: by generating an elliptical motion track by the piezoelectric vibrator 1 as above, since the friction head 13 of the piezoelectric vibrator 1 is closely attached to the friction block 5, a high-frequency friction motion occurs, and the friction head 13 drives the friction block 5 to move, thereby driving the lens carrier 2 to perform a high-frequency accumulated linear motion. After the lens carrier 2 is displaced, the sensing component 6 transmits the acquired signals to the control system, the control system controls the piezoelectric vibrator 1, and the position accuracy of the lens carrier 2 relative to the base 3 is adjusted by controlling the deformation movement period and the movement amount of the piezoelectric vibrator 1 so as to realize closed-loop control and control the camera lens to perform accurate focusing.
The foregoing is merely specific embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily think about changes or substitutions within the technical scope of the present application, and the changes and substitutions are intended to be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (10)
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| Application Number | Priority Date | Filing Date | Title |
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| CN202322031922.6U CN220492880U (en) | 2023-07-31 | 2023-07-31 | Linear piezoelectric vibrator and driving device for optical imaging system |
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| CN202322031922.6U CN220492880U (en) | 2023-07-31 | 2023-07-31 | Linear piezoelectric vibrator and driving device for optical imaging system |
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Denomination of utility model: Linear piezoelectric vibrator and driving device for optical imaging systems Granted publication date: 20240213 Pledgee: China Construction Bank Corporation Panjin branch Pledgor: Liaoning Zhonglan Photoelectric Technology Co.,Ltd. Registration number: Y2024980057333 |
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