CN220444315U - Electrostatic thin film ultrasonic transducer with electric polarization layer - Google Patents

Abstract

The utility model discloses an electrostatic film ultrasonic transducer with an electric polarization layer, which belongs to the field of ultrasonic transducers, and comprises: a top electrode and a bottom electrode disposed opposite to each other; and the electric polarization layer is arranged between the top electrode and the bottom electrode and is used for generating an electric field for precharging the top electrode and the bottom electrode. Under the arrangement of the electrically polarized layer, the generated electric field can replace the electric field generated by the direct current bias voltage to directly precharge the top electrode and the bottom electrode, so that the high-voltage electric safety problem possibly caused by the introduction of the direct current bias voltage is effectively avoided.

Description

Electrostatic thin film ultrasonic transducer with electric polarization layer

Technical Field

The utility model relates to the field of ultrasonic transducers, in particular to an electrostatic film ultrasonic transducer with an electric polarization layer.

Background

An electrostatic membrane ultrasonic transducer, which may also be referred to as a capacitive membrane ultrasonic transducer, is a device that drives a membrane into vibration, thereby radiating ultrasonic waves.

Fig. 1 shows a structure of an electrostatic thin film ultrasonic transducer provided in the related art, and the structure may include, from top to bottom: film, top electrode, support column, air gap, insulating layer, bottom electrode, fixed bottom plate. Wherein, the electrostatic force generated by the upper and lower electrodes formed by the top electrode and the bottom electrode can be used for driving the film to vibrate. A dc bias voltage is applied between the upper and lower electrodes to precharge the top and bottom electrodes, and the magnitude of the precharged charge determines the magnitude of the electrostatic force driving the membrane to vibrate.

Based on the structure, the direct current bias voltage required to be introduced is large, and the high-voltage electric safety problem is easy to generate.

Disclosure of Invention

The utility model aims to provide an electrostatic film ultrasonic transducer with an electric polarization layer, which can effectively avoid the problem of high-voltage electrical safety.

In order to achieve the above purpose, the present utility model proposes the following technical scheme:

an electrostatic thin film ultrasound transducer having an electrically polarized layer, the electrostatic thin film ultrasound transducer comprising:

a top electrode and a bottom electrode disposed opposite to each other;

and an electrically polarized layer disposed between the top electrode and the bottom electrode, the electrically polarized layer for generating an electric field for precharging the top electrode and the bottom electrode.

In one possible implementation, the electrically polarized layer includes at least one of: the first electrode polarization layer is arranged above the bottom electrode, and the second electrode polarization layer is arranged below the top electrode.

In one possible implementation, the electrostatic thin film ultrasound transducer further comprises a support;

the support piece is arranged between the top electrode and the first polarized layer, and an air gap is formed between the top electrode and the first polarized layer through the support of the support piece;

or alternatively, the first and second heat exchangers may be,

the support piece is arranged between the second electric polarization layer and the bottom electrode, and an air gap is formed between the second electric polarization layer and the bottom electrode through the support of the support piece;

or alternatively, the first and second heat exchangers may be,

the support piece is arranged between the second electric polarization layer and the first electric polarization layer, and an air gap is formed between the second electric polarization layer and the first electric polarization layer through the support of the support piece.

In one possible implementation, the material of the electrically polarized layer includes:

a polarized electrically polarized material having a permanent electric field;

or alternatively, the first and second heat exchangers may be,

an electrically polarized material that is unpolarized and has an electric field that is attenuated after polarization.

In one possible implementation, the electrostatic thin film ultrasonic transducer further includes a power amplifier circuit:

one end of the power amplification circuit is connected with the top electrode, the other end of the power amplification circuit is connected with the bottom electrode, and under the condition that the material of the electric polarization layer is the electric polarization material of the unpolarized electric field with attenuation property after polarization, the power amplification circuit is used for generating direct current bias voltage to polarize and charge regularly the electric polarization material of the electric field with attenuation property after polarization.

In one possible implementation, the material types of the electrically polarized material include:

an inorganic electrically polarized material;

or alternatively, the first and second heat exchangers may be,

an organic polarizing material.

In one possible implementation, the inorganic electrically polarized material comprises at least one of:

barium titanate, lead zirconate titanate, zinc oxide, tantalum oxide, aluminum oxide, titanium oxide, and silicon nitride. In one possible implementation, the electromechanically polarized material includes at least one of:

polytetrafluoroethylene, fluorinated ethylene propylene copolymer, poly perfluoroethylene propylene, soluble polyethylene, polyvinylidene fluoride.

In one possible implementation, the electrostatic thin film ultrasound transducer further comprises a thin film;

the thin film is arranged above the top electrode and is used for vibrating under the drive of electrostatic force generated by the top electrode and the bottom electrode.

In one possible implementation, the electrostatic thin film ultrasonic transducer further comprises a fixed base plate;

the fixed bottom plate is arranged below the bottom electrode and is used as a fixed substrate for preparing the electrostatic thin film ultrasonic transducer.

Compared with the prior art, the utility model has the following beneficial effects:

the electrostatic film ultrasonic transducer provided by the utility model comprises: a top electrode and a bottom electrode disposed opposite to each other; and the electric polarization layer is arranged between the top electrode and the bottom electrode and is used for generating an electric field for precharging the top electrode and the bottom electrode. Under the arrangement of the electrically polarized layer, the generated electric field can replace the electric field generated by direct current bias voltage to directly precharge the top electrode and the bottom electrode, so that the high-voltage electric safety problem possibly caused by the introduction of the direct current bias voltage is effectively avoided;

further, the electric polarization layer can be specifically designed to be a first electric polarization layer arranged above the bottom electrode and/or a second electric polarization layer arranged below the top electrode, and an effective electric field for pre-charging is provided for the top electrode and the bottom electrode through the position structure design of at least one electric polarization layer;

furthermore, the electric polarization layer can be made of an electric polarization material with permanent electric field and polarized, the material can permanently generate an electric field, and the electric field can precharge the top electrode and the bottom electrode, so that the design requirement of direct-current bias voltage is completely eliminated in the electrostatic film ultrasonic transducer, and the electric safety risk of high voltage is further reduced;

furthermore, the electric polarization layer can be made of an electric polarization material which is unpolarized and has an electric field with attenuation property after polarization, and the material can generate an electric field for precharging the top electrode and the bottom electrode after polarization, so that a direct-current bias voltage is not needed to be used for providing an electric field, the electric safety risk of high voltage is reduced, the material is easy to obtain, and the implementation difficulty of the electrostatic thin film ultrasonic transducer is simplified.

It should be noted that, the present utility model only needs to achieve at least one of the above technical effects.

Drawings

Fig. 1 is a schematic structural view of an electrostatic thin film ultrasonic transducer provided in the related art;

FIG. 2 is a schematic structural view of an electrostatic thin film ultrasonic transducer provided in an embodiment of the present application;

FIG. 3 is a schematic structural view of another electrostatic thin-film ultrasound transducer provided in an embodiment of the present application;

FIG. 4 is a schematic structural view of another electrostatic thin-film ultrasound transducer provided in an embodiment of the present application;

FIG. 5 is a schematic structural view of another electrostatic thin-film ultrasound transducer provided in an embodiment of the present application;

FIG. 6 is a schematic structural view of another electrostatic thin-film ultrasound transducer provided in an embodiment of the present application;

fig. 7 is a schematic structural diagram of another electrostatic thin-film ultrasonic transducer provided in an embodiment of the present application.

The marks in the figure: 100-electrostatic film ultrasonic transducer, 10-top electrode, 20-bottom electrode, 30-electric polarization layer, 31-first electric polarization layer, 32-second electric polarization layer, 40-film, 50-fixed bottom plate, 60-support piece and 70-power amplifier circuit.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the present utility model more apparent, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments of the present utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the description of the present utility model, it should be understood that the terms "vertical," "upper," "lower," "top," "side," "inner," "outer," and the like indicate or are based on the orientation or positional relationship shown in the drawings, merely to facilitate description of the utility model and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the structure of the electrostatic film ultrasonic transducer provided in the related technology, direct current bias voltage is required to be introduced between the top electrode and the bottom electrode, the direct current bias voltage is mainly used for precharging the top electrode and the bottom electrode, the electric charge quantity determines the electrostatic force for pushing the film in the electrostatic film ultrasonic transducer to vibrate, and theoretically, the electrostatic force is proportional to the direct current bias voltage multiplied by the alternating current bias voltage.

In order to avoid the high-voltage electrical safety problem caused by larger introduced direct-current bias voltage, in the embodiment of the application, the electrostatic thin film ultrasonic transducer with the electric polarization layer is provided, the electric polarization layer is used for replacing the direct-current bias voltage, and the high-voltage electrical safety risk is reduced.

Referring to fig. 2 in combination, an embodiment of the present application provides an electrostatic thin film ultrasonic transducer 100 (hereinafter referred to as electrostatic thin film ultrasonic transducer 100) having an electrically polarized layer, the electrostatic thin film ultrasonic transducer 100 includes: a top electrode 10 and a bottom electrode 20 disposed opposite to each other; an electrically polarized layer 30 disposed between the top electrode 10 and the bottom electrode 20, the electrically polarized layer 30 being configured to generate an electric field for pre-charging the top electrode 10 and the bottom electrode 20.

In the embodiment of the present application, the electrostatic thin film ultrasonic transducer 100 includes a pair of electrodes disposed opposite to each other in the vertical direction: top electrode 10 and bottom electrode 20, top electrode 10 being the one that is remote from the bottom of the device and bottom electrode 20 being the one that is near the bottom of the device. The top electrode 10 and the bottom electrode 20 are used to generate electrostatic forces to drive the electrostatic membrane ultrasonic transducer 100 to vibrate after the pre-charge.

In the embodiment of the present application, an electrically polarized layer 30 is added between the top electrode 10 and the bottom electrode 20. The electric polarization layer 30 is a structural layer for supporting generation of external electric field, and under the arrangement of the electric polarization layer 30, the generated electric field can directly precharge the top electrode 10 and the bottom electrode 20, so that direct-current bias voltage is not required to be introduced into the upper electrode and the lower electrode formed by the top electrode 10 and the bottom electrode 20 to precharge.

In one possible implementation, the electrostatic thin film ultrasound transducer 100 further comprises a thin film 40; the thin film 40 is disposed above the top electrode 10, and the thin film 40 is configured to vibrate under the driving of electrostatic force generated by the top electrode 10 and the bottom electrode 20.

In the present embodiment, the membrane 40 serves as a diaphragm, and vibrates vertically under the electrostatic force generated by the top electrode 10 and the bottom electrode 20. As illustrated in fig. 3 to 7, the electrostatic thin film ultrasonic transducer 100 includes a thin film 40 as a vibrating film, which is disposed above the top electrode 10.

In one possible implementation, the electrostatic thin-film ultrasound transducer 100 further comprises a stationary base plate 50; the fixing base plate 50 is disposed below the bottom electrode 20, and the fixing base plate 50 is used as a fixing substrate for preparing the electrostatic thin film ultrasonic transducer 100.

In the present embodiment, the fixed base plate serves as a fixed substrate in the entire electrostatic thin film ultrasonic transducer 100. As illustrated in fig. 3 to 7, the electrostatic thin film ultrasonic transducer 100 includes a fixed base plate 50 disposed under the bottom electrode 20.

In one possible implementation, the electrically polarized layer 30 includes at least one of: a first electrically polarized layer 31 disposed above bottom electrode 20, and a second electrically polarized layer 32 disposed below top electrode 10.

In this implementation, the effective electric field for pre-charging the top electrode 10 and the bottom electrode 20 is ensured by the positional structural design of the at least one electrically polarized layer.

Illustratively, as shown in fig. 3, the electrostatic thin-film ultrasonic transducer 100 includes an electrically polarized layer: a first electrically polarized layer 31 disposed over bottom electrode 20.

Illustratively, as shown in fig. 4, the electrostatic thin-film ultrasonic transducer 100 includes an electrically polarized layer: a second electrically polarized layer 32 disposed below the top electrode 10.

Illustratively, as shown in FIG. 5, the electrostatic thin-film ultrasonic transducer 100 includes two electrically polarized layers: a first electrically polarized layer 31, a second electrically polarized layer 32, the first electrically polarized layer 31 being disposed above the bottom electrode 20, the second electrically polarized layer 32 being disposed below the top electrode 10.

In one possible implementation, the electrostatic thin film ultrasound transducer 100 further comprises a support 60; the support 60 is disposed between the top electrode 10 and the first polarized layer 31, and an air gap is formed between the top electrode 10 and the first polarized layer 31 by the support of the support 60; or, the supporting member 60 is disposed between the second electrically polarized layer 32 and the bottom electrode 20, and an air gap is formed between the second electrically polarized layer 32 and the bottom electrode 20 by the support of the supporting member 60; alternatively, the supporting member 60 is disposed between the second electrically polarized layer 32 and the first electrically polarized layer 31, and an air gap is formed between the second electrically polarized layer 32 and the first electrically polarized layer 31 by the support of the supporting member 60.

In this embodiment, the support 60 is added to the electrostatic thin-film ultrasonic transducer 100 to form an air gap with other structures, so as to provide a vibrating space for the vibrating membrane (such as the membrane 40) of the electrostatic thin-film ultrasonic transducer 100 to vibrate up and down. The supporting member 60 may be, but not limited to, a plurality of supporting points arranged on the first polarized layer 31 or the bottom electrode 20, and the supporting points may be circular, triangular, etc., or bar-shaped supporting bars. As illustrated in fig. 3 to 7, the support 60 may include two support members disposed opposite to each other in a horizontal direction, for example.

Illustratively, as shown in fig. 3, when the first electrically polarized layer 31 disposed above the bottom electrode 20 is included in the electrostatic thin film ultrasonic transducer 100, the top electrode 10 and the first electrically polarized layer 31 form an air gap under the support of the support 60.

Illustratively, as shown in fig. 4, when the second electrically polarized layer 32 disposed under the top electrode 10 is included in the electrostatic thin film ultrasonic transducer 100, the second electrically polarized layer 32 forms an air gap with the bottom electrode 20 under the support of the support 60.

Illustratively, as shown in fig. 5, when the electrostatic thin-film ultrasonic transducer 100 includes a first electrically polarized layer 31 disposed above the bottom electrode 20 and a second electrically polarized layer 32 disposed below the top electrode 10, the second electrically polarized layer 32 and the first electrically polarized layer 31 form an air gap under the support of the support member 60.

In summary, according to the technical solution provided in the embodiments of the present application, the electrostatic thin-film ultrasonic transducer 100 includes: a top electrode 10 and a bottom electrode 20 disposed opposite to each other; an electrically polarized layer 30 disposed between the top electrode 10 and the bottom electrode 20, the electrically polarized layer 30 being configured to generate an electric field for pre-charging the top electrode 10 and the bottom electrode 20. Under the arrangement of the electrically polarized layer 30, the generated electric field can replace the electric field generated by the direct current bias voltage to directly precharge the top electrode 10 and the bottom electrode 20, so that the high-voltage electrical safety problem possibly caused by the direct current bias voltage is effectively avoided.

Further, the electrically polarized layer 30 may be specifically designed as a first electrically polarized layer 31 disposed above the bottom electrode 20, and/or a second electrically polarized layer 32 disposed below the top electrode 10, so as to ensure that an effective electric field for pre-charging is provided to the top electrode 10 and the bottom electrode 20 by the structural design of the position of at least one electrically polarized layer.

Based on the above embodiments, in one exemplary embodiment, the material of electrically polarized layer 30 is a polarized electrically polarized material having a permanent electric field.

When an electric field is applied to an electrically polarized material, an electric dipole is created due to the relative displacement of positive and negative charges within the electrically polarized material, a phenomenon known as electrical polarization. Wherein, the polarized electric polarization material with permanent electric field refers to an electric polarization material with permanent electric field, which has completed electric polarization and charges are never attenuated. If an electrically polarized material of this nature is used for electrically polarized layer 30, an electric field may be permanently generated that may pre-charge top electrode 10 and bottom electrode 20.

Illustratively, as shown in FIG. 6, the electrically polarized layer 30 employs a polarized electrically polarized material with a permanent electric field instead of the insulating layer and DC bias voltage of the prior art design shown in FIG. 1. The electrostatic thin film ultrasonic transducer 100 shown in fig. 6 can normally operate using only an ac voltage, and the voltage is greatly reduced. In addition, the power amplifier circuit is further simplified because the direct-current bias voltage is completely omitted.

In an alternative implementation, the material types of the electrically polarized material include: an inorganic electrically polarized material; or, an organic polarizing material.

In an alternative implementation, the inorganic electrically polarized material comprises at least one of: barium titanate (BaTiO 3), lead zirconate titanate (PZT), zinc oxide (ZnO), tantalum oxide (Ta 2O 5), aluminum oxide (Al 2O 3), titanium oxide (TiO 2), and silicon nitride (Si 3N 4).

In an alternative implementation, the electro-mechanically polarized material includes at least one of: polytetrafluoroethylene (PTFE), fluorinated ethylene propylene copolymer (PFA), poly perfluoroethylene propylene (Te flow-FEP), soluble Polyethylene (PFA), polyvinylidene fluoride (PVDF).

In summary, according to the technical solution provided in the embodiments of the present application, the electric polarization layer 30 may be made of an electric polarization material having a permanent electric field and polarized, and the material may permanently generate an electric field, and the electric field may precharge the top electrode 10 and the bottom electrode 20, so that the design requirement of dc bias voltage is completely omitted in the electrostatic thin film ultrasonic transducer 100, and the electrical safety risk of high voltage is further reduced.

Based on the above embodiments, in one exemplary embodiment, the material of the electrically polarized layer 30 is an electrically polarized material that is unpolarized and has an electric field with attenuation after polarization.

When an electric field is applied to an electrically polarized material, an electric dipole is created due to the relative displacement of positive and negative charges within the electrically polarized material, a phenomenon known as electrical polarization. The electric polarization material of the electric field which is unpolarized and has attenuation after polarization refers to an electric polarization material which is not electrically polarized yet and allows the electric charge to be attenuated with time or environmental changes such as high temperature, high humidity and the like. If an electrically polarized material of this nature is used for electrically polarized layer 30, an electric field may be generated upon charging, which may pre-charge top electrode 10 and bottom electrode 20, which has a decaying nature with environmental changes.

In an alternative embodiment, the electrostatic thin film ultrasound transducer further comprises a power amplifier circuit 70: one end of the power amplifier circuit 70 is connected to the top electrode 10, and the other end is connected to the bottom electrode 20, and in the case that the material of the electrically polarized layer 30 is an electrically polarized material of an electric field having attenuation property after being unpolarized, the power amplifier circuit 70 is configured to generate a dc bias voltage, and to polarize and periodically charge the electrically polarized material of the electric field having attenuation property after being unpolarized.

For example, as shown in fig. 7, the electrically polarized layer 30 is made of an electrically polarized material that is unpolarized and has an electric field with attenuation property after polarization, instead of the insulating layer in the conventional design shown in fig. 1, where the electrically polarized layer 30 needs to be precharged, for example, when it is first used, the power amplifier circuit 40 is used to generate a dc bias voltage for charging. The electrostatic thin film ultrasonic transducer 100 shown in fig. 7 can normally operate using only an ac voltage, and the voltage is greatly reduced. In addition, since the charge of such an electrically polarized material may be attenuated with time or environmental changes such as high temperature and high humidity, resulting in a decrease in performance of the electrostatic thin film ultrasonic transducer 100, the dc bias voltage may be generated using the power amplifier circuit 40 to periodically charge it, and the charging period is not limited to a specific value of the charging period according to the product characteristics, from 1 hour to 1 year.

In an alternative implementation, the material types of the electrically polarized material include: an inorganic electrically polarized material; or, an organic polarizing material.

In an alternative implementation, the inorganic electrically polarized material comprises at least one of: barium titanate (BaTiO 3), lead zirconate titanate (PZT), zinc oxide (ZnO), tantalum oxide (Ta 2O 5), aluminum oxide (Al 2O 3), titanium oxide (TiO 2), and silicon nitride (Si 3N 4).

In an alternative implementation, the electro-mechanically polarized material includes at least one of: polytetrafluoroethylene (PTFE), fluorinated ethylene propylene copolymer (PFA), poly perfluoroethylene propylene (Te flow-FEP), soluble Polyethylene (PFA), polyvinylidene fluoride (PVDF).

In summary, according to the technical solution provided in the embodiments of the present application, the electrically polarized layer 30 may be made of an electrically polarized material that has an unpolarized and polarized electric field with attenuation property, and the material may generate an electric field that charges the top electrode 10 and the bottom electrode 20 after polarization, so that a direct-current bias voltage is not needed to provide an electric field, and the electrical safety risk of high voltage is reduced.

All the above optional technical solutions may be combined to form an optional embodiment of the present utility model, and any multiple embodiments may be combined, so as to obtain requirements for coping with different application scenarios, which are all within the scope of protection of the present application, and are not described in detail herein.

It should be noted that the above-mentioned embodiments are only preferred embodiments of the present utility model, and are not intended to limit the present utility model, and any modifications, equivalent substitutions, improvements, etc. within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

Claims (8)

1. An electrostatic thin film ultrasound transducer having an electrically polarized layer, the electrostatic thin film ultrasound transducer comprising:

a top electrode and a bottom electrode disposed opposite to each other;

and an electrically polarized layer disposed between the top electrode and the bottom electrode, the electrically polarized layer for generating an electric field for precharging the top electrode and the bottom electrode.

2. The electrostatic thin-film ultrasound transducer of claim 1, wherein the electrically polarized layer comprises at least one of: the first electrode polarization layer is arranged above the bottom electrode, and the second electrode polarization layer is arranged below the top electrode.

3. The electrostatic thin-film ultrasound transducer of claim 2, further comprising a support;

the support piece is arranged between the top electrode and the first polarized layer, and an air gap is formed between the top electrode and the first polarized layer through the support of the support piece;

or alternatively, the first and second heat exchangers may be,

the support piece is arranged between the second electric polarization layer and the bottom electrode, and an air gap is formed between the second electric polarization layer and the bottom electrode through the support of the support piece;

or alternatively, the first and second heat exchangers may be,

the support piece is arranged between the second electric polarization layer and the first electric polarization layer, and an air gap is formed between the second electric polarization layer and the first electric polarization layer through the support of the support piece.

4. An electrostatic thin-film ultrasound transducer according to any of claims 1 to 3, wherein the material of the electrically polarized layer comprises:

a polarized electrically polarized material having a permanent electric field;

or alternatively, the first and second heat exchangers may be,

an electrically polarized material that is unpolarized and has an electric field that is attenuated after polarization.

5. The electrostatic thin-film ultrasound transducer of claim 4, further comprising a power amplifier circuit:

one end of the power amplification circuit is connected with the top electrode, the other end of the power amplification circuit is connected with the bottom electrode, and under the condition that the material of the electric polarization layer is the electric polarization material of the unpolarized electric field with attenuation property after polarization, the power amplification circuit is used for generating direct current bias voltage to polarize and charge regularly the electric polarization material of the electric field with attenuation property after polarization.

6. The electrostatic thin-film ultrasound transducer of claim 4, wherein the material type of the electrically polarized material comprises:

an inorganic electrically polarized material;

or alternatively, the first and second heat exchangers may be,

an organic polarizing material.

7. An electrostatic thin film ultrasound transducer according to any of claims 1 to 3, wherein the electrostatic thin film ultrasound transducer further comprises a thin film;

the thin film is arranged above the top electrode and is used for vibrating under the drive of electrostatic force generated by the top electrode and the bottom electrode.

8. An electrostatic thin-film ultrasound transducer according to any of claims 1 to 3, wherein the electrostatic thin-film ultrasound transducer further comprises a stationary base plate;

the fixed bottom plate is arranged below the bottom electrode and is used as a fixed substrate for preparing the electrostatic thin film ultrasonic transducer.