CN220279573U

CN220279573U - Precise positioning platform

Info

Publication number: CN220279573U
Application number: CN202320579854.4U
Authority: CN
Inventors: 韩旭
Original assignee: Shenzhen Hannuo Precision Technology Co ltd
Current assignee: Shenzhen Hannuo Precision Technology Co ltd
Priority date: 2023-03-15
Filing date: 2023-03-15
Publication date: 2024-01-02
Anticipated expiration: 2033-03-15

Abstract

The embodiment of the utility model relates to the technical field of positioning platforms, and discloses a precise positioning platform. It comprises the following steps: a base; the base is provided with a linear guide rail; the linear guide rail extends along the length direction of the base; a sliding table; the bottom of the sliding table is provided with a sliding block; the sliding block is matched with the linear guide rail to form a linear guide mechanism so that the sliding table moves reciprocally along the length direction; a linear motor; the primary part of the linear motor is fixed on the base, and the secondary part of the linear motor is connected to the sliding table; a measuring device; the measuring device is connected with the base and the sliding table and is used for acquiring movement information of the sliding table; the linear guide rail is an embedded guide rail and is directly embedded into the base and the sliding table. Through a specific structural design, the precision of the precision positioning platform is effectively improved; by adding the linear motor, the rotary encoder, the photoelectric switch and the measuring device, the stability and precision requirements of the precision positioning platform can be met.

Description

Precise positioning platform

Technical Field

The utility model relates to the technical field of positioning platforms, in particular to a precise positioning platform.

Background

The precision positioning platform is required to be applied in the fields of large-scale integrated circuit manufacturing, optical detection and the like. With the advancement of technology, the requirements for precision, speed and acceleration required by a positioning platform in a special environment are also increasing. Conventional rotating electrical machines plus ball screw arrangements have been difficult to meet.

The traditional linear motor is complicated, so that the traditional positioning platform needs to be formed by a complicated multi-component structure; the traditional positioning platform can produce manufacturing errors in the process of processing a plurality of workpieces such as a base, a guide rail, a sliding block, a sliding table and a reading head bracket, and can produce larger precision errors after assembling and superposing the plurality of components, so that the precision of the traditional linear motor is lower.

The traditional positioning platform has the advantages that the assembly process of straightness adjustment, motor-driven stator gap adjustment, read head bracket adjustment and sliding block oil way component assembly is complicated in the processing and assembly process, the skill requirement on installers is higher, the assembly speed is slower, and the consistency of mass production is poorer.

The oil storage pipeline of the sliding block guide rail of the traditional positioning platform is shorter, and the running length of oil injection once is shorter; moreover, the traditional positioning platform has smaller bearing capacity, and is difficult to meet more high-requirement equipment.

And the traditional positioning platform has heavy weight and is difficult to bear heavy load.

Disclosure of Invention

The precision positioning platform provided by the application can overcome at least part of defects of the traditional positioning platform.

The utility model provides a precise positioning platform. The precision positioning platform comprises:

a base; the base is provided with a linear guide rail; the linear guide rail extends along the length direction of the base;

a sliding table; the bottom of the sliding table is provided with a plurality of sliding blocks; the sliding block is matched with the linear guide rail to form a linear guide mechanism so that the sliding table moves reciprocally along the length direction;

a linear motor; the primary part of the linear motor is fixed on the base; the secondary part of the linear motor is rigidly connected to the sliding table;

a measuring device; the measuring device is connected with the base and/or the sliding table and used for acquiring movement information of the sliding table;

the linear guide rail is an embedded guide rail and is formed by one-step machining in a mode of being directly embedded into the base and the sliding table.

In some embodiments, the linear guides are arranged in pairs extending from one end of the base to the other end;

the sliding block is arranged in a matched mode with the linear guide rail and sleeved on the linear guide rail.

In some embodiments, the slide table and the slider are an integral component;

the sliding block extends from the bottom edge of the sliding table to a preset height along the thickness direction of the sliding table and is flush with the sliding table in the length direction;

wherein, a connecting and fixing plate is also arranged between the paired sliding blocks; the sliding table is rigidly connected to the secondary part of the linear motor through the connecting and fixing plate.

In some embodiments, the base is made of an aluminum profile, and the linear guide rail is made of stainless steel;

the linear guide rail is embedded into the base and is an integrated component with the base.

In some embodiments, the precision positioning stage further comprises:

a first photoelectric switch; the first photoelectric switch is fixed on the base and is spaced from the tail end of the base by a preset distance;

a second photoelectric switch; the second photoelectric switch is fixed on the base and is spaced from the other tail end of the base by a preset distance;

a photoelectric switch shielding plate; the photoelectric switch shielding plate is fixed on the sliding table and moves along with the sliding table;

the first photoelectric switch and the second photoelectric switch are far away from each other along the length direction of the base.

In some embodiments, the linear motor is further provided with a rotary encoder; an origin mark is arranged in the rotary encoder;

when the sliding table moves to the position where the second photoelectric switch is located, the linear motor drives the sliding table to reversely move until the original point mark of the rotary encoder is reached.

In some embodiments, the measurement device is a reflective grating measurement system comprising a scale grating and a grating reading head;

the scale grating is fixedly arranged on the base, and the grating reading head is fixedly arranged on the sliding table through a mounting bracket;

wherein the mounting bracket has a plurality of adjustable degrees of freedom.

In some embodiments, the second mounting bracket comprises:

the bracket connecting plate is provided with a pair of oblong holes;

a read head mounting plate; the first surface of the reading head mounting plate is rigidly connected to one end, far away from the oblong hole, of the bracket connecting plate;

the grating reading head is fixed on a second surface of the reading head mounting plate, which is opposite to the first surface.

In some embodiments, the precision positioning stage further comprises:

a pair of end plates; the pair of end plates are respectively fixed at two ends of the base, which are far away from each other;

wherein, the surface of end plate is provided with the bolster.

In some embodiments, the precision positioning stage further comprises:

a cover plate; the cover plate has a size corresponding to the base; two ends of the cover plate are respectively fixed on the end plates so as to cover the linear sliding rail and the sliding table;

wherein, the sliding table also comprises a connecting part; the connecting part is formed by extending a preset height from the top of the sliding table along the thickness direction of the sliding table, and protrudes towards the direction close to the cover plate.

At least one advantageous aspect of the precision positioning platform provided by the embodiment of the utility model is that: through a specific structural design, a simple and firm integrated embedded base guide rail can be effectively formed, so that precision errors caused by assembly and superposition of a plurality of workpieces are eliminated; by adding the servo linear motor, the rotary encoder photoelectric switch and the measuring device, the stability requirement and the precision requirement of the precision positioning platform can be effectively met.

Drawings

One or more embodiments are illustrated by way of example and not limitation in the figures of the accompanying drawings, in which like references indicate similar elements, and in which the figures of the drawings are not to scale, unless expressly stated otherwise.

FIG. 1 is an exploded perspective view of a precision positioning stage according to an embodiment of the present utility model;

fig. 2 is a schematic diagram of a process of returning to the origin of the linear motor according to an embodiment of the present utility model;

fig. 3 is a schematic diagram of an experimental device for positioning accuracy in the X-axis direction of the precision positioning platform according to the embodiment of the present utility model.

Detailed Description

The utility model will now be described in detail with reference to specific embodiments, it being emphasized that the following description is merely exemplary in nature and is in no way intended to limit the scope of the utility model or its applications.

It should be noted that unless explicitly specified and limited otherwise, the terms "longitudinal", "reciprocally movable", "distal", "away from", "reverse movement", "away from", "top", "thickness direction", etc. used in this specification indicate an orientation or a positional relationship based on the orientation or the positional relationship shown in the drawings, and are merely for convenience of description and simplification of description, and do not indicate or imply that the apparatus or element in question must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the utility model. The terms "mounted," "connected," "secured," and the like are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated; thus, a feature defining "a first", "a second" may include one or more such features, either explicitly or implicitly; the meaning of "plurality of" is two or more; "and/or" includes any and all combinations of one or more of the associated listed items. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In this embodiment, the specific implementation of the "precision positioning platform" is not limited, and any suitable implementation may be selectively used by those skilled in the art according to actual situation needs.

Example 1

Fig. 1 is an exploded perspective view of a precision positioning platform according to an embodiment of the present utility model. Referring to fig. 1, the precise positioning platform includes: the base 10 is provided with a linear guide 101; the linear guide 101 extends along a length direction 102 of the base 10; a plurality of sliding blocks 201 are arranged at the bottom of the sliding table 20; the sliding block 201 cooperates with the linear guide rail 101 to form a linear guide mechanism so as to enable the sliding table 20 to reciprocate along the length direction 102; the primary part 31 of the linear motor 30 is fixed to the base 10; the secondary portion 32 of the linear motor 30 is rigidly connected to the ramp 20; the measuring device 40 is connected with the base 10 and/or the sliding table 20 and is used for acquiring movement information of the sliding table 20;

the linear guide rail 101 is an embedded guide rail, and is formed by one-step machining in a manner of being directly embedded into the base 10 and the sliding table 20; the linear guide rails 101 are arranged in pairs, extending from one end of the base 10 to the other end; the sliding block 201 is arranged in a matched mode with the linear guide rail 101 and sleeved on the linear guide rail 101;

wherein the slide table 20 and the slider 201 are an integrated part; the sliding block 201 is formed from the bottom edge of the sliding table, extends along the thickness direction 202 of the sliding table 20 by a preset height, and is flush with the sliding table 20 in the length direction 102; wherein a connection fixing plate 203 is further provided between the pair of sliders 201; the slide table 20 is rigidly connected to the secondary portion 32 of the linear motor 30 by the connection fixing plate 203.

With continued reference to fig. 1, the base 10 is made of an aluminum profile, and the linear guide 101 is made of a stainless steel material; the linear guide 101 is embedded in the base 10, and is an integral component with the base 10.

With continued reference to fig. 1, the precision positioning platform further includes: the first photoelectric switch 50 is fixed on the base 10, and is spaced apart from the end of the base 10 by a predetermined distance; the second photoelectric switch 60 is fixed on the base 10 to be spaced apart from the other end of the base 10 by a predetermined distance; the photoelectric switch shielding plate 70 is fixed on the sliding table 20 and moves along with the sliding table 20;

wherein the first photoelectric switch 50 and the second photoelectric switch 60 are far away from each other along the length direction 102 of the base 10.

With continued reference to fig. 1, the linear motor 30 is further provided with a rotary encoder; an origin mark is arranged in the rotary encoder;

when the sliding table 20 moves to the position where the second photoelectric switch 60 is located, the linear motor 30 drives the sliding table 20 to reversely move until the origin mark of the rotary encoder is reached.

With continued reference to FIG. 1, the measuring device 40 is a reflective grating measuring system, including a scale grating 401 and a grating reading head 402;

wherein, the scale grating 401 is fixedly arranged on the base 10, and the grating reading head 402 is arranged on the sliding table 20 through the mounting bracket 403;

the mounting bracket 403 has a plurality of adjustable degrees of freedom;

wherein, this mounting bracket 403 includes: the bracket connecting plate 4031 is provided with a pair of oblong holes; the first surface 4033 of the reader mounting plate 4032 is rigidly attached to the end of the bracket attachment plate 4031 remote from the oblong hole;

wherein the grating read head 402 is secured to a second surface 4034 of the read head mounting plate 4032 facing away from the first surface 4033.

With continued reference to fig. 1, the precision positioning platform further includes: a pair of end plates 80 are respectively fixed to both ends of the base 10 which are away from each other;

wherein the surface of the end plate 80 is provided with a cushioning member 801.

With continued reference to fig. 1, the precision positioning platform further includes: the cover plate 90 has a size corresponding to the base 10; two ends of the cover plate 90 are respectively fixed on the end plate 80 to cover the linear slide rail 101 and the sliding table 20;

wherein the sliding table 20 further comprises a connecting portion 204; the connection portion 204 is formed to extend from the top of the slide table 20 by a predetermined height in the thickness direction 202 of the slide table, and protrudes in a direction approaching the cover plate 90.

Example 2

Fig. 2 is a schematic diagram of a process of returning to the origin of the linear motor according to an embodiment of the present utility model. Referring to fig. 1 and 2, the linear motor 30 is a servo linear motor, the motion control of the precision positioning platform adopts the servo linear motor and the rotary encoder, and the first photoelectric switch 50 and the second photoelectric switch 60 are arranged for correcting the original point position; the photoelectric encoder 11 is used for monitoring the origin position; when the photoelectric encoder detects the second photoelectric switch 60, the photoelectric encoder stops after reaching the origin mark along the reverse direction, and the photoelectric encoder 11 starts counting from 0 when moving again, so that the origin 12 is relatively accurate;

wherein the origin 12 is preceded by a first hard stop 13; the second opto-electronic switch 60 then has a second hard stop 14.

In this embodiment, the servo linear motor may be selected according to the following manner:

the structural form of the servo linear motor is preliminarily selected according to the mechanism form, and the holding force required by constant-speed operation is calculated according to the load mass, the planned stroke, the movement speed and the movement acceleration;

calculating the maximum accelerating force and the maximum decelerating force of the servo linear motor according to the technical manual of the servo linear motor, and obtaining average continuous output force so as to preliminarily select a certain type of servo linear motor;

the method comprises the steps of repeatedly calculating peak force and average continuous output force of a servo linear motor due to the quality influence of a moving coil part of the preliminarily selected servo linear motor, checking whether the selected servo linear motor meets the requirement, calculating the temperature of the servo linear motor, and checking whether the temperature rise of the motor meets the requirement;

in order to meet the special environmental requirements, the selected servo linear motor needs to fully consider the influence of high temperature and low temperature on the structure, the working environment temperature is between 196 ℃ below zero and 200 ℃, the coil temperature is 300 ℃, and the vacuum 10 is adapted ^-7 pa。

Referring to fig. 1, the measuring device 40 is a reflective grating measuring system, and is provided with a scale grating 401, in this embodiment, the selection of the measuring device 40 is important to improve the control accuracy of the measuring system; determining the positioning precision and the maximum movement speed required by the precise positioning platform, wherein the scale grating 401 is selected according to the distance of the measured displacement and the requirement of the measured speed; because the reflective grating measuring system has higher requirement on the installation precision, a special installation bracket is designed for installing the scale grating 401; the special mounting bracket has 4 coarse adjustment degrees of freedom and 6 fine adjustment degrees of freedom, and can conveniently and quickly adjust the scale grating 401 to an optimal space position so as to reduce measurement errors caused by a measuring instrument.

Example 3

After the precision positioning platform is assembled, a RENISHAW laser interferometer is used for carrying out a series of detection and correction on the precision of the platform so as to ensure that the positioning precision, repeated positioning precision, horizontal straightness and deflection angle of a motion axis of the precision positioning platform are all within preset precision, and a speed test is carried out, wherein the precision positioning platform is required to ensure the stability of motion at a required speed and meet the precision requirements of all aspects required by the motion axis;

a dual-frequency laser interferometry system is adopted to carry out precision test on the precision positioning platform;

the dual-frequency laser interferometry system comprises the following components:

a laser source; the laser source is used for generating light with two different frequencies;

an optical path guidance system, comprising: a beam splitter or a refractor; the optical path guiding system is used for guiding the light beam to each tested shaft of the system; the light path guiding system is a two-axis measuring system, so that a refractor is needed to be used as a spectroscope;

a measurement optical system comprising: interferometers and corresponding mirrors; the measurement optical system is used to separate and combine light of two frequencies, and the two-axis measurement system requires two interferometers;

a receiver; the receiver is used for detecting the frequency difference of the two paths of light and converting the Doppler frequency shift signal into an electric signal.

Fig. 3 is a schematic diagram of an experimental device for positioning accuracy in the X-axis direction of the precision positioning platform according to the embodiment of the present utility model. Referring to fig. 3, the dual-frequency laser interferometry system may be installed according to the following steps:

placing the laser mirror 21 on a tripod, and connecting the laser mirror 21 with a cable of the PC;

the movable reflector 22 is fixed on the movable workbench 23, the spectroscope 24 and the other fixed reflector 25 are fixed together by screws and are arranged on a moving part so as to keep the optical path fixed;

turning on the computer, turning on the laser mirror 21 to preheat it; when the preheating is finished, the adjustment of the dual-frequency laser interferometry system can be performed;

the mutual positions of the fixed reflecting mirror 25 and the laser mirror 21 are carefully adjusted to enable the two paths of reflected light to overlap and interfere, laser spots of the two paths of reflected light can be focused in a receiving hole of the laser mirror 21, and the light intensity displayed by test software is maximized; the moving table 23 is adjusted along the moving direction X1 to keep the light intensity received by the laser mirror 21 substantially unchanged in the whole working stroke, so that the laser direction is parallel to the motion axis of the dual-frequency laser interferometry system, and at this time, the dual-frequency laser interferometry system is qualified in debugging and can be tested.

In summary, the precision positioning platform provided by the embodiment of the utility model adopts integrated embedded base guide rail and sliding table for one-step molding, so that precision errors caused by assembly and superposition of a plurality of workpieces such as a base, guide rail, sliding block, sliding table, reading head bracket and the like can be reduced or eliminated, and the stability and precision of the precision positioning platform are improved. The combination mode of the servo linear motor, the rotary encoder, the photoelectric switch and the measuring device is adopted, so that the stability requirement and the precision requirement of the precision positioning platform can be better met. The integrated embedded base guide rail is a linear guide rail which is made of stainless steel materials, so that the linear guide rail is more corrosion-resistant and rust-free, and the durability and the precision of the precision positioning platform are improved. The base is made of aluminum profiles, so that the base is lighter in weight, beneficial to multi-shaft construction and smaller in power load of the lower layer. The sliding block and the sliding table are integrated into a whole, so that the oil storage pipeline is longer, and the running length of oil injection for one time can be effectively improved.

The foregoing is a further detailed description of the utility model in connection with specific/preferred embodiments, and it is not intended that the utility model be limited to such description. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit of the utility model, and these are all within the scope of the utility model.

Claims

1. A precision positioning stage comprising:

the linear guide rail is an embedded guide rail and is formed by one-step machining in a mode of being directly embedded into the base and the sliding table;

further comprises:

2. The precision positioning platform of claim 1 wherein the linear guides are arranged in pairs extending from one end of the base to the other;

3. The precision positioning platform according to claim 2, wherein the slide table and the slider are an integral component;

4. The precision positioning platform according to claim 1, wherein the base is formed of an aluminum profile and the linear guide is made of a stainless steel material;

5. The precision positioning platform according to claim 1, wherein the linear motor is further provided with a rotary encoder; an origin mark is arranged in the rotary encoder;

6. The precision positioning stage of claim 1, wherein the measurement device is a reflective grating measurement system comprising a scale grating and a grating reading head;

wherein the mounting bracket has a plurality of adjustable degrees of freedom.

7. The precision positioning platform according to claim 6, wherein the mounting bracket comprises:

the bracket connecting plate is provided with a pair of oblong holes;

8. The precision positioning platform according to claim 1, further comprising:

wherein, the surface of end plate is provided with the bolster.

9. The precision positioning platform according to claim 8, further comprising: a cover plate; the cover plate has a size corresponding to the base; two ends of the cover plate are respectively fixed on the end plates so as to cover the linear guide rail and the sliding table;