CN220234485U - Power supply circuit - Google Patents

Abstract

This application provides a power supply circuit for a device detection circuit, including a power supply, a first switch circuit, and a control circuit. The power supply, the first switch circuit, and the device under test form a closed loop; the control circuit detects the working status of the device under test, Based on the detection results, a corresponding drive signal is output to control the first switch circuit to be turned on or off; when the device under test is normal, the control circuit outputs the first drive signal to control the first switch circuit to be turned on, thereby causing the power supply to provide an on power signal as The target electrical signal is used to supply power to the device under test for detection; when the device under test is abnormal, the control circuit outputs a second drive signal to control the first switch circuit to turn off, thereby causing the power supply to provide a closed power line signal as the target electrical signal for testing. Device is tested. In this way, the power circuit is prevented from being affected by the device under test from causing continuous explosions, thereby improving safety.

Description

a power circuit

Technical field

The embodiments disclosed in this application relate to the technical field of semiconductor production equipment protection circuits, and more specifically, to a power supply circuit.

Background technique

In the production process of semiconductor equipment, frequency scanning platforms can be used to detect products and screen out defective products to reduce the defective rate.

However, the existing detection circuit may cause the product under test to work abnormally during use. When the product under test does not work normally, the power supply does not take corresponding actions to protect the circuit. In serious cases, various components in the main circuit may explode continuously. Not only It causes damage to the detection circuit itself and poses a huge safety hazard.

Therefore, how to improve the safety of the power circuit when the product under test is not working normally has become an urgent problem to be solved.

Utility model content

According to an embodiment of the present application, the present application proposes a power supply circuit to improve the safety of the power supply circuit when the product under test is not working normally.

According to one aspect of the present application, an exemplary power supply circuit is disclosed for use in a device detection circuit. The power supply circuit is connected to the device under test and is used to provide the device under test with a target electrical signal for detection. The power supply circuit includes a power supply, A first switching circuit and a control circuit, wherein the power supply, the first switching circuit and the device under test form a closed loop for turning on or off the power signal to form the target electrical signal; control A circuit is connected between the first switch circuit and the device under test, used to detect the working status of the device under test, and output a corresponding drive signal based on the detection result to control the first switch circuit to turn on or off. ; Wherein, when the device under test is normal, the control circuit outputs a first drive signal to control the first switch circuit to turn on, thereby causing the power supply to provide the turned-on power signal as the target electrical signal for the The device under test is detected; when the device under test is abnormal, the control circuit outputs a second drive signal to control the first switch circuit to turn off, thereby causing the power supply to provide the turned-off power line signal as a target The electrical signal is used for detection by the device under test.

In the above scheme, the first switch circuit is turned off when the device under test is abnormal, so that the power supply stops supplying power to the device under test, thereby cutting off the electrical connection between the power supply and the device under test, and preventing the main circuit from being affected by the device under test and causing continuous explosions. , thereby improving safety.

Wherein, the control circuit includes a detection module connected to the device under test to detect whether the working status of the device under test is normal; a driving module connected between the detection module and the first switch circuit, If the detection result of the detection module is normal, the first driving signal is output; if the detection result of the detection module is abnormal, the second driving signal is output.

In the above scheme, the detection module detects the working status of the device under test and outputs the detection result, so that the driving module outputs a driving signal based on the detection result to turn on or off the first switch circuit, further improving safety.

Wherein, the control circuit further includes a processing module connected between the detection module and the driving module; wherein the detection module is also configured to generate a first feedback signal based on the detection result being normal and output it to the processing module. ; Generate a second feedback signal based on the abnormality of the detection result and output it to the processing module; The processing module is used to generate a first control signal based on the first feedback signal and output it to the driving module, so that the driving module The module outputs a first driving signal; a second control signal is generated based on the second feedback signal and output to the driving module, so that the driving module outputs the second driving signal.

In the above solution, the processing module generates a control signal based on the detection results, and controls the driving module to generate a driving signal, thereby further improving safety.

It also includes a second switch circuit, the power supply, the first switch circuit, the second switch circuit, the device under test, and the second switch circuit respectively form a closed loop, and the drive module is also connected to the third switch circuit. Two switch circuits; wherein, when the device under test is abnormal, the drive module outputs a first drive signal to control the conduction of the second switch circuit, so that the current released by the device under test flows through the third switch circuit. The second switch circuit absorbs the energy released by the device under test.

With the above solution, when the device under test is not working normally and the first switch circuit is turned off through the second switch circuit, the device under test can release energy through the second switch circuit, further improving safety.

Wherein, the driving module includes a first driving unit connected to the first switching circuit; a second driving unit connected to the second switching circuit; wherein when the device under test is abnormal, the The first driving unit outputs a second driving signal to control the first switch circuit to turn off, and the second driving unit outputs a first driving signal to control the second switch circuit to turn on.

Wherein, the second switch circuit includes a second switch module connected to the control circuit; an absorption module connected in series with the second switch module; wherein when the device under test is abnormal, the second switch The module is turned on based on the first driving signal output by the driving module, and the absorption module absorbs the energy released by the device under test.

In the above solution, the absorption module absorbs the energy flowing through the second switch circuit to protect the second switch module and further improve safety.

Wherein, the first switch circuit includes a first controllable switch tube, the control terminal of the first controllable switch tube is connected to the drive signal of the drive module, and the first controllable switch is controlled based on the drive signal. The working state of the tube, thereby controlling the on or off of the first switch circuit; the second switch module includes a second controllable switch tube, and the control end of the second controllable switch tube is connected to the drive The driving signal of the module controls the working state of the second controllable switch tube based on the driving signal, and then controls the turn-on or turn-off of the second switch circuit.

It also includes an anti-reverse circuit, the power supply, the first switch circuit, the anti-reverse circuit, and the second switch circuit are connected in sequence and form a closed loop to prevent the current from flowing back when the device under test is abnormal; wherein, When the device under test releases current and flows to the first switch circuit and the positive electrode of the power supply, the anti-reverse circuit is turned off.

Wherein, the anti-reverse circuit includes a one-way conducting element, a forward conducting end is connected to the first switching circuit and the positive electrode of the power supply, and a reverse blocking end is connected to the second switching circuit and the device under test the positive pole.

It also includes a support circuit connected in parallel with the power supply to absorb voltage fluctuations when the power supply voltage fluctuates and stabilize the voltage of the device under test.

The above solution further improves safety through support circuits and anti-reverse circuits.

Description of the drawings

The present application will be further described below in conjunction with the accompanying drawings and embodiments. In the accompanying drawings:

Figure 1 is a schematic circuit structure diagram of a power supply circuit of the present application.

Detailed ways

In order to enable those skilled in the art to better understand the technical solutions of the present application, the technical solutions of the present application will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.

Before further elaborating on the embodiments of the present application, the application background of the present application is first explained so that readers can better understand the technical solutions of the present application; during the semiconductor testing process, the circuit parameters of the semiconductor can be obtained by testing the semiconductor. The influence of device characteristics, such as package and circuit parasitic parameters, operating voltage, current, gate drive, temperature, etc., and then obtain data that can fully reflect the device characteristics, and test specifications can be formulated to screen out defective products based on device characteristics; however, in the During the testing process of semiconductors, the DUT of the device under test may not work normally. For example, the device current increases abnormally during the testing process, causing the device to be broken down. At this time, if the power circuit still supplies power to it for testing, it may cause The entire test circuit fails, and there is even a risk of continuous explosion of the main circuit. Therefore, the power circuit needs to stop testing in time when the device under test DUT is not working normally to prevent the danger from occurring.

To this end, this application proposes a power supply circuit. The power supply circuit proposed in this application can be applied to a semiconductor device detection circuit, such as a semiconductor test frequency sweep station. Please refer to Figure 1, which is a circuit diagram of a power supply circuit of this application. Structural diagram; specifically, the power supply circuit is connected to the device under test DUT, and is used to provide the target electrical signal for detection to the device under test DUT. The power supply circuit includes a power supply VDD, a first switch circuit 100, and a control circuit 200, wherein the power supply VDD The first switch circuit 100 and the device under test DUT form a closed loop for turning on or off the power signal to form a target electrical signal; the control circuit 200 detects the working status of the device under test DUT and outputs the corresponding signal based on the detection result. The drive signal controls the first switch circuit 100 to be turned on or off; when the device under test DUT is normal, the control circuit 200 outputs the first drive signal to control the first switch circuit 100 to be turned on, thereby causing the power supply VDD to supply the device under test DUT. Power is supplied for detection; when the device under test DUT is abnormal, the control circuit 200 outputs a second driving signal to control the first switch circuit 100 to turn off, thereby causing the power supply VDD to stop supplying power to the device under test DUT; that is, when the device under test DUT When normal, the control circuit outputs a first drive signal to control the first switch circuit to conduct, thereby causing the power supply to provide the turned-on power signal as a target electrical signal for the device under test to detect; when the When the device under test is abnormal, the control circuit outputs a second drive signal to control the first switch circuit to turn off, thereby causing the power supply to provide the turned-off power line signal as a target electrical signal for the device under test to operate. detection.

In the above solution, when the device under test DUT is abnormal, the first switch circuit 100 is turned off so that the power supply VDD stops supplying power to the device under test DUT, thereby cutting off the electrical connection between the power supply VDD and the device under test DUT, and preventing the power circuit from being damaged. The test device DUT is affected by continuous explosions, thereby improving the safety of the power circuit.

It should be noted that the control circuit 200 detects the working status of the device under test DUT, which may include one or more of the voltage, current, temperature and other parameters of the device under test DUT; correspondingly, if the device under test DUT is abnormal, it may be that the device under test DUT is abnormal. One or more of the voltage, current, temperature and other parameters of the device under test DUT exceed the normal range; the specific parameters to be detected can adopt different parameters according to the type of the device under test DUT, and this application is not limited here. In addition, in this article, the first driving signal output by the control circuit 200 may be a high-level signal, and the second driving signal may be a low-level signal, or the first driving signal may be a low-level signal, and the second driving signal may be a low-level signal. high level signal.

In some possible implementations, the control circuit 200 includes a detection module 210 connected to the device under test DUT to detect the working state of the device under test DUT; a driving module 220 connected to the first switch circuit 100; wherein the driving module 220 is based on The detection result of the detection module 210 outputs a first driving signal to control the first switch circuit 100 to turn on, and outputs a second driving signal to control the first switch circuit 100 to turn off.

Specifically, in some implementation scenarios, the detection module 210 may include a current detection unit, a voltage detection unit, a temperature detection unit (none of which are shown in the figure), etc., in which a temperature sensor may be used to detect the temperature, a sampling resistor, etc. may be used to detect the temperature. Current and voltage parameters; other means can also be used to detect the working status of the device under test DUT, which is not limited by this application; in some implementation scenarios, the detection module 210 can also include a level conversion unit (not shown in the figure), The level conversion unit can output a high-level or low-level signal based on the obtained working state parameters of the device under test DUT, so that a corresponding driving signal is subsequently output based on the high-level or low-level signal to control the conduction of the first switch circuit 100. On or off; specifically, the level conversion unit may include a Schmitt trigger, a voltage comparator, etc., which is not limited in this application.

Specifically, the driving module 220 is used to output a driving signal based on the detection result of the detection module 210 to control the first switch circuit 100 to turn on or off. The driving module 220 may include a pulse width modulation (Pulse width modulation, PWM) unit, based on the detection result. Modulation is performed to output the first driving signal and the second driving signal respectively to control the first switch circuit 100 to be turned on.

In the above scheme, the detection module 210 detects the working status of the device under test DUT and outputs the detection result, so that the driving module 220 outputs a driving signal based on the detection result to turn the first switch circuit 100 on or off, further improving the safety of the power circuit. .

In some possible implementations, the control circuit 200 also includes a processing module 230 connected to the detection module 210 and the driving module 220; wherein the detection module 210 generates a first feedback signal based on the detection result being normal and outputs it to the processing module 230, based on When the detection result is abnormal, a second feedback signal is generated and output to the processing module 230; the processing module 230 generates a first control signal based on the first feedback signal, so that the driving module 220 outputs the first driving signal; and generates a second feedback signal based on the second feedback signal. The control signal is output to the driving module 220 to output a second driving signal.

In some implementation scenarios, the processing module 230 may include a main control chip (not shown in the figure), and the main control chip may control the driving module 220 based on the high level or low level signal output by the level conversion unit of the detection module 210 . The pulse width modulation unit outputs a first driving signal and a second driving signal.

In the above scheme, the processing module 230 generates a control signal based on the detection result, and controls the driving module 220 to generate a driving signal, thereby further improving the safety of the power circuit.

In some possible implementations, a second switch circuit 300 is also included. The power supply VDD, the first switch circuit 100, the second switch circuit 300, the device under test DUT, and the second switch circuit 300 respectively form a closed loop. The driver module 220 It is also connected to the second switch circuit 300; when the device under test DUT is abnormal, the drive module 220 outputs a first drive signal to control the second switch circuit 300 to turn on, so that the current released by the device under test DUT flows through the second switch circuit 300. The switching circuit 300 further absorbs the energy released by the device under test DUT. The first switch circuit 100 and the second switch circuit 300 will not be turned on or off at the same time. When the first switch circuit 100 is turned on, the power supply VDD supplies power to the device under test DUT through the first switch circuit 100 and performs detection; When the second switch circuit 300 is turned on, the device under test DUT and the second switch circuit 300 form a closed loop, so that the device under test DUT can release the energy stored in the device connected to the power supply VDD through the second switch circuit 300 to avoid leakage or leakage. Breakdown other components in the circuit, further improving the safety of the circuit.

In some implementation scenarios, a capacitor C2 is connected in parallel to both ends of the device under test DUT. The capacitor C2 will also absorb energy during the conduction period of the first switch circuit 100 and pass through the second switch circuit 300 after the first switch circuit 100 is turned off. emit energy.

With the above solution, when the device under test DUT is not operating normally and the first switch circuit 100 is turned off through the second switch circuit 300, the device under test DUT can release energy through the second switch circuit 300, further improving the safety of the power circuit.

In some possible implementations, the driving module 220 includes a first driving unit 221 connected to the first switching circuit 100; a second driving unit 222 connected to the second switching circuit 300; wherein, when the device under test DUT is abnormal , the first driving unit 221 outputs a second driving signal to control the first switch circuit 100 to turn off, and the second driving unit 222 outputs a first driving signal to control the second switch circuit 300 to turn on.

In some possible implementations, the second switch circuit 300 includes a second switch module 310 connected to the control circuit 200; an absorption module 320 connected in series with the second switch module 310; wherein, when the device under test DUT is abnormal , the second switch module 310 is turned on based on the first driving signal output by the driving module 220, and the absorption module 320 absorbs the energy released by the device under test DUT.

In some implementation scenarios, the absorption module 320 may include a resistor R1. Specifically, in the embodiment shown in FIG. 1, the resistor R1 should meet the requirements of high power tolerance and low resistance, so as to quickly absorb the power in the circuit. voltage; in other implementation scenarios, the absorption module 320 may also include multiple resistors connected in parallel, which is not limited in this application.

In the above solution, the absorption module 320 absorbs the energy flowing through the second switch circuit 300 to protect the second switch module 310 and further improve the safety of the power circuit.

In some possible implementations, the first switch circuit 100 includes a first controllable switch Q1. The control terminal of the first controllable switch Q1 is connected to the drive signal of the drive module 220, and the first controllable switch is controlled based on the drive signal. The working state of the tube Q1 controls the on or off of the first switch circuit 100; the second switch module 310 includes a second controllable switch tube, and the control end of the second controllable switch tube is connected to the drive signal of the drive module 220 , based on the driving signal, the working state of the second controllable switch tube is controlled, and then the second switch circuit 300 is controlled to be turned on or off.

In some implementation scenarios, the first controllable switch transistor may include a controllable semiconductor such as a metal-oxide semiconductor FET (MOS-FET), an insulated gate bipolar transistor (IGBT), etc. switching devices, or controllable switching devices such as photocouplers and relays; the second controllable switching tube Q2 can be a metal-oxide semiconductor field effect transistor (MOS-FET), an insulated gate bipolar transistor (Insulated Gate Bipolar Transistor) Gate Bipolar Transistor (IGBT) and other controllable semiconductor switching devices, or photoelectric couplers, relays and other controllable switching devices; for example, in the implementation shown in Figure 1, the first controllable switch Q1 and the second controllable switch Tube Q2 uses IGBT. Compared with other controllable semiconductor switching devices, it can switch on and off higher voltages and larger currents with fast response speed, and can act in time when the device under test DUT is abnormal. This application is not limited here.

In some possible implementations, an anti-reverse circuit 400 is also included. The power supply VDD, the first switch circuit 100, the anti-reverse circuit 400, and the second switch circuit 300 are connected in sequence to form a closed loop to prevent the device under test DUT from being abnormal. When the current flows back; wherein, when the device under test DUT releases current and flows to the first switch circuit 100 and the positive electrode of the power supply VDD, the anti-reverse circuit 400 is turned off.

In some possible implementations, the anti-reverse circuit 400 includes a unidirectional conducting element D1, the forward conducting end is connected to the first switching circuit 100 and the positive electrode of the power supply VDD, and the reverse blocking end is connected to the second switching circuit 300 and the to-be-tested The positive terminal of the device DUT.

In some implementation scenarios, please continue to refer to Figure 1. The unidirectional conduction component can be a power diode. The cathode of the power diode is connected to the second switch circuit 300 and the anode is connected to the first switch circuit 100. When the first switch circuit 100 is disconnected When , the power diode can prevent the energy released by the device under test DUT and the capacitor C2 from being applied to the first switch circuit 100 or the power supply VDD from causing damage to the circuit.

In some possible implementations, a support circuit 500 is also included, connected in parallel with the power supply VDD, to absorb voltage fluctuations when the power supply VDD voltage fluctuates and stabilize the device under test DUT voltage. Specifically, the support circuit 500 may include a capacitor C1.

Those skilled in the art will readily appreciate that many modifications and variations can be made to the apparatus and methods while maintaining the teachings of this application. Accordingly, the above disclosure should be considered to be limited only by the scope of the appended claims.

Claims (10)

1. A power supply circuit used in a device detection circuit, characterized in that the power supply circuit is connected to the device under test and is used to provide a target electrical signal for detection for the device under test, and the power supply circuit includes: Power supply, used to provide power signals; A first switching circuit, the power supply, the first switching circuit and the device under test form a closed loop for turning on or off the power signal to form the target electrical signal; A control circuit, connected between the first switch circuit and the device under test, for detecting the working status of the device under test, and outputting a corresponding drive signal based on the detection result to control the first switch circuit to turn on or off. shut down; Wherein, when the device under test is normal, the control circuit outputs a first drive signal to control the first switch circuit to turn on, thereby causing the power supply to provide the turned-on power signal as a target electrical signal for the device to be tested. The device under test is detected; or, when the device under test is abnormal, the control circuit outputs a second drive signal to control the first switch circuit to turn off, thereby causing the power supply to provide the power line signal that is turned off as The target electrical signal is used for detection by the device under test. 2. A power supply circuit according to claim 1, characterized in that the control circuit includes: A detection module, connected to the device under test, detects whether the working status of the device under test is normal; A driving module, connected between the detection module and the first switch circuit, is used to output the first driving signal based on the detection result of the detection module being normal; the detection result based on the detection module is If it is abnormal, the second driving signal is output. 3. A power supply circuit according to claim 2, characterized in that the control circuit further includes: A processing module, connected between the detection module and the driving module; Wherein, the detection module is also configured to generate a first feedback signal and output it to the processing module based on the detection result being normal; generate a second feedback signal and output it to the processing module based on the detection result being abnormal; the processing module for generating a first control signal based on the first feedback signal and outputting it to the driving module, so that the driving module outputs the first driving signal; and generating a second control signal based on the second feedback signal and outputting it to the driving module. module, so that the driving module outputs a second driving signal. 4. A power supply circuit according to claim 2, further comprising: A second switching circuit, the power supply, the first switching circuit, the second switching circuit, the device under test, and the second switching circuit respectively form a closed loop, and the driving module is also connected to the second switching circuit; Wherein, when the device under test is abnormal, the driving module outputs a first driving signal to control the conduction of the second switch circuit, so that the current released by the device under test flows through the second switch circuit, Then absorb the energy released by the device under test. 5. A power supply circuit according to claim 4, characterized in that the driving module includes: a first driving unit connected to the first switching circuit; a second driving unit connected to the second switching circuit; Wherein, when the device under test is abnormal, the first driving unit outputs a second driving signal to control the first switch circuit to open, and the second driving unit outputs a first driving signal to control the second switch. The circuit is conducting. 6. A power supply circuit according to claim 4, characterized in that the second switch circuit includes: a second switch module connected to the control circuit; An absorption module is connected in series with the second switch module; Wherein, when the device under test is abnormal, the second switch module is turned on based on the first driving signal output by the driving module, and the absorption module absorbs the energy released by the device under test. 7. A power supply circuit according to claim 6, characterized in that: The first switch circuit includes a first controllable switch tube, the control end of the first controllable switch tube is connected to the drive signal of the drive module, and the first controllable switch tube is controlled based on the drive signal. Working state, thereby controlling the on or off of the first switch circuit; The second switch module includes a second controllable switch tube, the control terminal of the second controllable switch tube is connected to the drive signal of the drive module, and the control end of the second controllable switch tube is controlled based on the drive signal. working state, thereby controlling the on or off of the second switch circuit. 8. A power supply circuit according to claim 4, further comprising: Anti-reverse circuit, the power supply, the first switch circuit, the anti-reverse circuit, and the second switch circuit are connected in sequence and form a closed loop to prevent the current from flowing back when the device under test is abnormal; Wherein, when the device under test releases current and flows to the first switch circuit and the positive electrode of the power supply, the anti-reverse circuit is turned off. 9. A power supply circuit according to claim 8, characterized in that the anti-reverse circuit includes: A unidirectional conduction element has a forward conduction end connected to the first switch circuit and the positive electrode of the power supply, and a reverse blocking end connected to the second switch circuit and the positive electrode of the device under test. 10. A power supply circuit according to claim 1, further comprising: A support circuit, connected in parallel with the power supply, absorbs voltage fluctuations when the power supply voltage fluctuates and stabilizes the voltage of the device under test.