CN219657520U - Single crystal silicon rod crack detection equipment - Google Patents
Single crystal silicon rod crack detection equipment Download PDFInfo
- Publication number
- CN219657520U CN219657520U CN202320600224.0U CN202320600224U CN219657520U CN 219657520 U CN219657520 U CN 219657520U CN 202320600224 U CN202320600224 U CN 202320600224U CN 219657520 U CN219657520 U CN 219657520U
- Authority
- CN
- China
- Prior art keywords
- module
- moving
- assembly
- support
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The utility model provides single crystal silicon rod crack detection equipment, which relates to the technical field of silicon rod detection and comprises a support main body, an imaging module, a light source module, a ranging module, a moving mechanism and a lifting assembly, wherein the imaging module, the light source module, the ranging module, the moving mechanism and the lifting assembly are arranged on the support main body; the imaging module and the light source module are respectively arranged at two ends of the detection area, and the ranging module is arranged at one side of the detection area; the moving mechanism at least comprises a first moving assembly and a second moving assembly, and the lifting assembly at least comprises a first lifting assembly and a second lifting assembly; the imaging module is connected to the first moving assembly through the first lifting assembly, and the light source module is connected to the second moving assembly through the second lifting assembly. The utility model overcomes objective influence factors generated in the processes of drawing, cooling and processing of the monocrystalline silicon rod, and effectively improves the processing efficiency.
Description
Technical Field
The utility model relates to the technical field of silicon rod detection, in particular to single crystal silicon rod crack detection equipment.
Background
Single crystal silicon defects are breaks in the periodic symmetry of the crystal, such that the actual crystal deviates from the crystal structure of the ideal crystal.
During the processes of drawing, cooling and processing, the single crystal silicon rod can generate crack defects with different forms and different severity degrees, and the crack defects need to be removed through repeated back cutting. And after the single crystal silicon rod is pulled out, the arc surface light cleanliness of the single crystal silicon rod is close to that of a common lens, and strong light is difficult to directly penetrate due to reflection. In addition, the silicon rod is usually cut by adopting a steel wire and becomes a round rod after being cut, and the end face of the round rod has tool marks with different degrees. Meanwhile, in order to avoid the over-high temperature fusing of the steel wire in the steel wire cutting process, the steel wire needs to be continuously scoured and cooled by water.
The inventor finds that the detection mode of detecting cracks of the monocrystalline silicon rod by naked eyes and photographing by a high-definition camera in the prior art generally has at least the following technical problems:
1. the partial cracks are too fine, the cracks are difficult to identify in a visual detection mode, the silicon rod is reworked after being cut, the cutting quantity is completely based on personal experience each time, the phenomenon of over-cutting is difficult to avoid, and the machining efficiency is low and cost waste is caused by over-cutting. In addition, products with microcrack defects are shipped to customers after dicing, causing additional processing costs and claims to the enterprise.
2. The steel wire is scoured and cooled by water, so that watermarks with different degrees are generated on the end face of the round bar, and the crack form of the end face of the round bar can be shot by adopting a detection mode of directly photographing by a high-definition camera, but the knife mark, the watermark and the crack are difficult to distinguish.
Disclosure of Invention
The utility model aims to provide single crystal silicon rod crack detection equipment, which is used for solving the problems that cracks are too fine in a detection mode of naked eye detection and high-definition camera photographing in the prior art, the cracks are difficult to identify in a naked eye detection mode, the silicon rod is reworked after being opened, the re-cutting quantity is completely based on personal experience each time, the phenomenon of over-cutting is difficult to avoid, and the processing efficiency is low and cost waste is caused by over-cutting. In addition, products with microcrack defects are shipped to customers after dicing, causing additional processing costs and claims to the enterprise. And the steel wire is scoured and cooled by water, so that watermarks with different degrees are generated on the end face of the round bar, and the crack form of the end face of the round bar can be shot by adopting a detection mode of directly photographing by a high-definition camera, but the technical problems of cutter marks, watermarks and cracks are difficult to distinguish 。 The preferred technical solutions of the technical solutions provided by the present utility model can produce a plurality of technical effects described below.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
the utility model provides single crystal silicon rod crack detection equipment, which comprises a support main body, and an imaging module, a light source module, a distance measuring module, a moving mechanism and a lifting assembly which are arranged on the support main body, wherein:
the support main body comprises a support and a plurality of support legs connected to the bottom of the support and used for supporting the support, and a detection area used for detecting the monocrystalline silicon rod is arranged below the support;
the imaging module and the light source module are respectively arranged at two ends of the detection area, and the ranging module is arranged at one side of the detection area;
the moving mechanism at least comprises a first moving assembly and a second moving assembly, and the lifting assembly at least comprises a first lifting assembly and a second lifting assembly; the imaging module is connected to the first moving assembly through the first lifting assembly, the light source module is connected to the second moving assembly through the second lifting assembly, and the first moving assembly and the second moving assembly are respectively used for driving the imaging module and the light source module to move towards or away from the detection area.
Preferably, the first moving assembly comprises a first moving module, a second moving module and a first rod piece with two ends respectively connected to the first moving module and the second moving module, wherein:
the first moving module and the second moving module are respectively connected to two support rods which are parallel to each other on the support;
the first lifting assembly is connected to the first rod piece by adopting a sliding lifting module, and the imaging module is connected to the first lifting assembly.
Preferably, the second moving assembly includes a third moving module, a fourth moving module and a second rod with two ends respectively connected to the third moving module and the fourth moving module, wherein:
the third moving module and the fourth moving module are respectively connected to two support rods which are parallel to each other on the support, and the second rod piece and the first rod piece are arranged in parallel;
the second lifting assembly is connected to the second rod piece by adopting a sliding lifting module, and the light source module is connected to the second lifting assembly.
Preferably, the moving mechanism further comprises a fifth moving module and a third lever, wherein:
the third rod piece is arranged below the bracket, two ends of the third rod piece are respectively connected to two support legs arranged in parallel, and the third rod piece is arranged parallel to the support rod;
the distance measuring module is connected to the third rod piece through the fifth moving module.
Preferably, the light source module adopts an infrared light source.
Preferably, the imaging module employs an infrared camera.
Preferably, the ranging module adopts laser ranging.
The utility model provides single crystal silicon rod crack detection equipment ， Including supporting the main part and setting up imaging module, light source module, range finding module, mobile mechanism and the lifting unit in supporting the main part, including the support and connect in the bottom of support a plurality of stabilizer blades that are used for supporting the support through setting up the main part, the below of support sets up the detection zone who is used for detecting monocrystalline silicon stick, and the cooperation sets up imaging module and light source module and sets up respectively in the both ends of detection zone, and range finding module sets up in one side of detection zone. During detection, the carrier conveys the monocrystalline silicon rod to a detection area, the actual length and the position of the monocrystalline silicon rod are measured through the ranging module, when the imaging module and the light source module are moved to the designated position for detection through the moving mechanism and the lifting assembly according to the actual length and the position of the monocrystalline silicon rod, the light source module is started to enable light to be emitted into the monocrystalline silicon rod from one end face of the monocrystalline silicon rod, the light is emitted from the other end face of the monocrystalline silicon rod after penetrating through the whole monocrystalline silicon rod length, the imaging module shoots at the light emitting end face due to refraction of the crack defect area, the crack length of the end face of the monocrystalline silicon rod is output through protruding processing, the depth value of the crack in the axial direction of the round rod is measured according to the crack length of the end face and the crack position, and finally the return cutting is guided by the depth value, objective influence factors generated in the processes of drawing, cooling and machining of the monocrystalline silicon rod are overcome, and the machining efficiency is effectively improved, and the repairing and claim cost is greatly reduced.
Drawings
In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view showing the structure of an embodiment of a single crystal silicon rod crack detection apparatus of the present utility model;
FIG. 2 is a schematic structural view of a first moving assembly in the single crystal silicon rod crack detection apparatus of the present utility model;
FIG. 3 is a schematic structural view of a second moving assembly in the single crystal silicon rod crack detection apparatus of the present utility model.
In the figure: 1. a support body; 10. a detection region; 11. a bracket; 110. a support rod; 12. a support leg; 2. an imaging module; 3. a light source module; 4. a ranging module; 51. a first moving assembly; 510. a first rod member; 511. a first mobile module; 512. a second mobile module; 52. a second moving assembly; 520. a second rod member; 521. a third mobile module; 522. a fourth moving module; 530. a third lever; 531. a fifth moving module; 61. a first lifting assembly; 62. a second lifting assembly; 7. a single crystal silicon rod.
Detailed Description
In order to make the objects, technical solutions and advantages of the present utility model more apparent, the technical solutions of the present utility model will be described in detail below. It will be apparent that the described embodiments are only some, but not all, embodiments of the utility model. All other embodiments, based on the examples herein, which are within the scope of the utility model as defined by the claims, will be within the scope of the utility model as defined by the claims.
The utility model provides single crystal silicon rod crack detection equipment, and fig. 1 is a schematic structural diagram of the embodiment, and as shown in fig. 1, the single crystal silicon rod crack detection equipment comprises a support main body 1, and an imaging module 2, a light source module 3, a ranging module 4, a moving mechanism and a lifting assembly which are arranged on the support main body 1.
Wherein, the support body 1 comprises a bracket 11 and a plurality of feet 12 connected to the bottom of the bracket 11 for supporting the bracket 11, and a detection area 10 for detecting the monocrystalline silicon rod 7 is arranged below the bracket 11. In this embodiment, the support 11 adopts four parallel support rods 110, which are connected end to end in turn to form a rectangular structure, the four support legs 12 are respectively connected to the connection parts of two adjacent support rods 110, and are located at the bottom end of the support 11, the detection area 10 is located in the area formed by the bottom of the support 11 and the surrounding of the support legs 12, and the monocrystalline silicon rod enters the detection area 10 from the position between two support legs 12 and exits from the position between the other two support legs 12.
The imaging module 2 and the light source module 3 are respectively arranged at two ends of the detection area 10, the ranging module 4 is arranged at one side of the detection area 10, the actual length and the position of the monocrystalline silicon rod 7 are conveniently measured through the ranging module 4, and the imaging module 2 and the light source module 3 are moved to the designated position through the moving mechanism and the lifting assembly according to the actual length and the position of the monocrystalline silicon rod 7.
Specifically, the moving mechanism includes at least a first moving assembly 51 and a second moving assembly 52, and the lifting assembly includes at least a first lifting assembly 61 and a second lifting assembly 62; the imaging module 2 is connected to the first moving assembly 51 through the first lifting assembly 61, the light source module 3 is connected to the second moving assembly 52 through the second lifting assembly 62, the first moving assembly 51 and the second moving assembly 52 are respectively used for driving the imaging module 2 and the light source module 3 to move towards or away from the detection area 10, and the first lifting assembly 61 and the second lifting assembly 62 are respectively used for driving the imaging module 2 and the light source module 3 to move up and down.
This single crystal silicon stick crack detection equipment, including supporting main part 1 and setting up imaging module 2, light source module 3, range finding module 4, mobile mechanism and lifting unit on supporting main part 1, including support 11 and a plurality of stabilizer blades 12 that are used for supporting support 11 in the bottom of support 11 through setting up supporting main part 1, the below of support 11 sets up the detection zone 10 that is used for detecting single crystal silicon stick 7, cooperation setting imaging module 2 and light source module 3 set up respectively in the both ends of detection zone 10, range finding module 4 sets up in one side of detection zone 10. During detection, the carrier conveys the monocrystalline silicon rod 7 to the detection area 10, the actual length and position of the monocrystalline silicon rod 7 are measured through the ranging module 4, when the imaging module 2 and the light source module 3 are moved to the designated position for detection through the moving mechanism and the lifting assembly according to the actual length and position of the monocrystalline silicon rod 7, the light source module 3 is started to enable light to be injected into the monocrystalline silicon rod 7 from one end face of the monocrystalline silicon rod 7, the light is injected from the other end face of the monocrystalline silicon rod 7 after penetrating through the whole monocrystalline silicon rod 7, the imaging module 2 shoots at the light injection end face due to refraction of the light in the crack defect area, the crack length of the end face of the monocrystalline silicon rod 7 is output through protruding processing, the depth value of the crack in the axial direction of the round rod is measured according to the crack length of the end face and the crack position, finally, the back cutting is guided by the depth value, objective influence factors generated in the processes of drawing, cooling and machining of the monocrystalline silicon rod are overcome, machining efficiency is effectively improved, and cost of repairing and claim is greatly reduced.
As an alternative embodiment, fig. 2 is a schematic structural diagram of the first moving assembly in this embodiment, and as shown in fig. 2, the first moving assembly 51 includes a first moving module 511, a second moving module 512, and a first rod 510 with two ends connected to the first moving module 511 and the second moving module 512, respectively.
The first moving module 511 and the second moving module 512 are respectively connected to two parallel support rods 110 on the support 11, the first lifting assembly 61 is connected to the first rod 510 by a sliding lifting module, and the imaging module 2 is connected to the first lifting assembly 61.
The first moving module 511 and the second moving module 512 drive the first rod 510 to move in the horizontal direction, so as to drive the first lifting assembly 61 connected to the first rod 510 and the imaging module 2 connected to the first lifting assembly 61 to move in the horizontal direction toward or away from the detection area 10. And then the imaging module 2 is driven to lift by the first lifting assembly 61, so that the imaging module 2 is moved to a designated position.
Specifically, in the embodiment, the imaging module 2 adopts an infrared camera, and the length of the single crystal silicon rod 7 is set to be 150-900 mm, and the diameter is set to be 290-330 mm; the travel of the first moving module 511 and the second moving module 512 is 500mm, and the moving speed is 0.1m/s. The lifting stroke of the first lifting assembly 61 is 350mm and the moving speed is 0.1m/s so as to meet the use requirement.
As an alternative embodiment, fig. 3 is a schematic structural diagram of the second moving assembly in this embodiment, and as shown in fig. 3, the second moving assembly 52 includes a third moving module 521, a fourth moving module 522, and a second rod 520 with two ends connected to the third moving module 521 and the fourth moving module 522, respectively.
The third moving module 521 and the fourth moving module 522 are respectively connected to two parallel supporting rods 110 on the frame 11, and the second rod 520 is parallel to the first rod 510; the second lifting assembly 62 is connected to the second rod 520 by a sliding lifting module, and the light source module 3 is connected to the second lifting assembly 62.
The second rod 520 is driven to move in the horizontal direction by the third moving module 521 and the fourth moving module 522, so as to drive the second lifting assembly 62 connected to the second rod 520 and the light source module 3 connected to the second lifting assembly 62 to move in the horizontal direction toward or away from the detection area 10. And then the second lifting assembly 62 drives the light source module 3 to lift and move the light source module 3 to a designated position.
Specifically, in the present embodiment, the light source module 3 employs an infrared light source with a power of 50W. The stroke of the third moving module 521 and the fourth moving module 522 is set to 500mm and the moving speed is set to 0.1m/s. The lifting stroke of the second lifting assembly 62 is 450mm and the moving speed is 0.05m/s so as to meet the use requirement.
As an alternative embodiment, the moving mechanism further includes a fifth moving module 531 and a third lever 530.
The third rod 530 is disposed below the support 11, two ends of the third rod 530 are respectively connected to two parallel legs 12, the third rod 530 is disposed parallel to the support rod 110, and the ranging module 4 is connected to the third rod 530 through a fifth moving module 531.
The distance measuring module 4 is driven to move along the length direction of the single crystal silicon rod 7 by the fifth moving module 531 moving on the third rod 530 parallel to the supporting rod 110, so as to measure the actual length and position of the single crystal silicon rod 7.
In this embodiment, the distance measuring module 4 adopts laser distance measurement, the stroke of the fifth moving module 531 is 1500mm, and the moving speed is 0.2m/s, so as to meet the use requirement.
The method for detecting the cracks of the monocrystalline silicon rod adopts the equipment for detecting the cracks of the monocrystalline silicon rod, and comprises the following steps:
s1, conveying a monocrystalline silicon rod 7 to a detection area 10 by a carrier;
s2, a fifth moving module 531 moves on the third rod member 530, specifically, from one end of the third rod member 530 to the other end, and synchronously, the distance measuring module 4 scans, measures and outputs the measured value and the relative position of the length of the single crystal silicon rod 7;
s3, the first moving module 511, the second moving module 512, the third moving module 521 and the fourth moving module 522 move to the specified detection positions;
s4, the second lifting assembly 62 moves to convey the light source module 3 to a designated position;
s5, the first lifting assembly 61 moves to convey the imaging module 2 to a designated position;
s6, the light source module 3 emits infrared light, and the imaging module 2 images;
and S7, outputting the end surface crack length of the monocrystalline silicon rod 7 through image processing, calculating the axial depth value of the crack in the monocrystalline silicon rod according to the end surface crack length and the crack position, and guiding back cutting by the depth value.
The foregoing is merely illustrative of the present utility model, and the present utility model is not limited thereto, and any person skilled in the art will readily recognize that variations or substitutions are within the scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims.
Claims (7)
1. The utility model provides a single crystal silicon stick crack detection equipment, its characterized in that, including support main part with set up in imaging module, light source module, range finding module, moving mechanism and lifting unit on the support main part, wherein:
the support main body comprises a support and a plurality of support legs connected to the bottom of the support and used for supporting the support, and a detection area used for detecting the monocrystalline silicon rod is arranged below the support;
the imaging module and the light source module are respectively arranged at two ends of the detection area, and the ranging module is arranged at one side of the detection area;
the moving mechanism at least comprises a first moving assembly and a second moving assembly, and the lifting assembly at least comprises a first lifting assembly and a second lifting assembly; the imaging module is connected to the first moving assembly through the first lifting assembly, the light source module is connected to the second moving assembly through the second lifting assembly, and the first moving assembly and the second moving assembly are respectively used for driving the imaging module and the light source module to move towards or away from the detection area.
2. The single crystal silicon rod crack detection apparatus as set forth in claim 1, wherein: the first moving assembly comprises a first moving module, a second moving module and a first rod piece, wherein the two ends of the first rod piece are respectively connected to the first moving module and the second moving module, and the first rod piece comprises:
the first moving module and the second moving module are respectively connected to two support rods which are parallel to each other on the support;
the first lifting assembly is connected to the first rod piece by adopting a sliding lifting module, and the imaging module is connected to the first lifting assembly.
3. The single crystal silicon rod crack detection apparatus as set forth in claim 2, wherein: the second moving assembly comprises a third moving module, a fourth moving module and a second rod piece, wherein two ends of the second rod piece are respectively connected to the third moving module and the fourth moving module, and the second rod piece comprises:
the third moving module and the fourth moving module are respectively connected to two support rods which are parallel to each other on the support, and the second rod piece and the first rod piece are arranged in parallel;
the second lifting assembly is connected to the second rod piece by adopting a sliding lifting module, and the light source module is connected to the second lifting assembly.
4. A single crystal silicon rod crack detection apparatus as set forth in claim 2 or 3, wherein: the moving mechanism further comprises a fifth moving module and a third rod piece, wherein:
the third rod piece is arranged below the bracket, two ends of the third rod piece are respectively connected to two support legs arranged in parallel, and the third rod piece is arranged parallel to the support rod;
the distance measuring module is connected to the third rod piece through the fifth moving module.
5. A single crystal silicon rod crack detection apparatus as set forth in any one of claims 1 to 3, wherein: the light source module adopts an infrared light source.
6. A single crystal silicon rod crack detection apparatus as set forth in any one of claims 1 to 3, wherein: the imaging module adopts an infrared camera.
7. A single crystal silicon rod crack detection apparatus as set forth in any one of claims 1 to 3, wherein: the distance measuring module adopts laser distance measurement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320600224.0U CN219657520U (en) | 2023-03-24 | 2023-03-24 | Single crystal silicon rod crack detection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320600224.0U CN219657520U (en) | 2023-03-24 | 2023-03-24 | Single crystal silicon rod crack detection equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219657520U true CN219657520U (en) | 2023-09-08 |
Family
ID=87879243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320600224.0U Active CN219657520U (en) | 2023-03-24 | 2023-03-24 | Single crystal silicon rod crack detection equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219657520U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024198641A1 (en) * | 2023-03-24 | 2024-10-03 | Tcl中环新能源科技股份有限公司 | Monocrystalline silicon rod crack detection method |
-
2023
- 2023-03-24 CN CN202320600224.0U patent/CN219657520U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024198641A1 (en) * | 2023-03-24 | 2024-10-03 | Tcl中环新能源科技股份有限公司 | Monocrystalline silicon rod crack detection method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN116429791A (en) | Crack detection method for monocrystalline silicon rod | |
| CN219657520U (en) | Single crystal silicon rod crack detection equipment | |
| JP5468269B2 (en) | Aluminum alloy billet production system | |
| CN100506500C (en) | Brittle material substrate scribing device and scribing method, and automatic analysis line | |
| CN101718714B (en) | System and method for detecting surface defects of flat glass | |
| US20170355635A1 (en) | Feedback-controlled laser cutting of flexible glass substrates | |
| KR101622444B1 (en) | Shape inspection apparatus and method of bar steel | |
| CN104880841B (en) | Substrate prosthetic device and restorative procedure | |
| US9423240B2 (en) | Laser processing system and method of same | |
| KR20170015973A (en) | Ultrasonic flaw detection device and ultrasonic flaw detection method | |
| EP3396706A1 (en) | Substrate cutting control and inspection | |
| TWI406727B (en) | Laser cutting device | |
| JP2010185763A (en) | Planarity inspection apparatus and planarity inspection method of film | |
| TWI555599B (en) | Method for performing beam characterization in a laser scribe device, and laser scribe device capable of performing the same | |
| CN110480748B (en) | Chipless cutting equipment and method for resin material | |
| CN103972121B (en) | Method for detecting uninterrupted gray scale of wafer | |
| CN207798026U (en) | A kind of one camera cut deal flatness detection system based on line laser | |
| JP2009000928A (en) | Laser cutting apparatus and method for manufacturing substrate | |
| KR102625796B1 (en) | A method of inspecting a glass sheet, a method of manufacturing a glass sheet and a glass manufacturing apparatus | |
| CN106112282A (en) | A kind of for CO2the decision method of the crackle of cut and system | |
| JP2009103662A (en) | Laser welding evaluation method | |
| KR20170073805A (en) | An apparatus for monitoring the side trimmer knife and a side trimmer apparatus | |
| CN222166901U (en) | Detection device for silicon rod cracks | |
| EP0029070A1 (en) | Apparatus for surface inspection and treatment of steel members | |
| JP6412761B2 (en) | Weld bead inspection device, weld bead inspection method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |