CN219532957U - Detection device - Google Patents

Abstract

The detection device comprises a transmission mechanism, a first detection mechanism and a second detection mechanism, wherein the transmission mechanism is used for bearing a detected piece and transmitting the detected piece along a first direction; the second detection mechanism comprises a plurality of first detection modules arranged on the same side or two opposite sides of the transmission mechanism in the second direction, and the second detection mechanism comprises a second detection module arranged on one side of the transmission mechanism in the third direction; when the transmission mechanism transmits the tested piece, the plurality of first detection modules are respectively used for detecting the side surface and the transition surface of the tested piece, and the second detection module is used for detecting the front surface or the back surface of the tested piece. The first detection module and the second detection module which are arranged along the transmission track of the detected piece can realize the omnibearing detection of the detected piece in the process of transmitting the detected piece; not only can find out the corresponding defects in time, but also create conditions for improving the yield by analyzing and controlling the defects; meanwhile, the detection efficiency can be effectively improved.

Description

Detection device

Technical Field

The utility model relates to the technical field of detection, in particular to a detection device.

Background

Taking the display panel widely applied to various electronic products at present as an example, in the production and manufacturing process of the display panel, the display panel is often affected by the production process, and defects with different degrees, such as black spots, dirt, scratches, short circuit or open circuit of a circuit, and the critical dimension does not meet the design requirement, etc., are often generated on the display panel; if the defects are not detected and controlled, more defects are easily generated when the display panel enters the next processing procedure, so that the reject ratio of the display panel is greatly increased.

Disclosure of Invention

The utility model mainly solves the technical problem of providing a detection device so as to achieve the purpose of detecting a workpiece in all directions.

In one embodiment, a detection apparatus is provided, comprising:

the transmission mechanism is used for bearing a tested piece and transmitting the tested piece along a first direction;

the first detection mechanism comprises a plurality of first detection modules, the plurality of first detection modules are arranged on the same side or opposite sides of the transmission mechanism in the second direction, at least one of the plurality of first detection modules is used for detecting the side surface of the tested piece, and at least one other of the plurality of first detection modules is used for detecting the transition surface of the tested piece; and

a second detection mechanism including a second detection module arranged on one side of the transmission mechanism in a third direction, the second detection module being for detecting a front surface or a back surface of the member to be detected;

wherein the first direction, the second direction and the third direction are perpendicular to each other.

In one embodiment, the first detection mechanism further includes a plurality of first adjustment modules, where the plurality of first adjustment modules are disposed in one-to-one correspondence with the plurality of first detection modules; the first adjusting module is used for adjusting and fixing the corresponding spatial position of the first detecting module.

In one embodiment, the first detection mechanism further includes a first adjustment module, where the first adjustment module is disposed in one-to-one correspondence with the first detection module for detecting a transition surface of the detected piece, or the first adjustment module is disposed in one-to-one correspondence with the first detection module for detecting a side surface of the detected piece; the first adjusting module is used for adjusting and fixing the corresponding spatial position of the first detecting module.

In one embodiment, the first adjustment module comprises a first drive assembly and/or a second drive assembly; wherein:

the power end of the first driving component is coupled to the corresponding first detection module and is used for driving the corresponding first detection module to rotate and stay around a preset axis within a preset angle range; the preset axis is arranged along the first direction in an extending way;

the power end of the second driving component is coupled to the corresponding first detection module and is used for driving the corresponding first detection module to move and stay along the second direction and/or the third direction.

In one embodiment, the first driving assembly comprises a supporting seat, a moving seat and a first driving piece, wherein the supporting seat and the moving seat are provided with arc-shaped guide structures taking the preset axis as a central axis, and the supporting seat and the moving seat are arranged in a sliding fit manner through the respective arc-shaped guide structures;

the first detection module is arranged on the movable seat, and the power end of the first driving piece is coupled to the movable seat; the first driving piece is used for driving the movable seat to drive the first detection module to move on the supporting seat along the arc-shaped guide structure, so that the first detection module can rotate and stay around the preset axis within a preset angle range.

In one embodiment, the second drive assembly includes a second drive member;

the number of the second driving parts is set to be one, and the power end of the second driving parts is coupled to the first detection module and is used for driving the first detection module to move and stay along the second direction or the third direction;

or the number of the second driving pieces is two, the two second driving pieces are mutually matched, and the power end of at least one of the two second driving pieces is coupled to the first detection module; one of the two second driving parts is used for driving the first detection module to move and stop along the second direction, and the other of the two second driving parts is used for driving the first detection module to move and stop along the third direction.

In one embodiment, the transmission mechanism is provided with at least two first detection modules on at least one side of the second direction, and at least two first detection modules arranged on the same side of the transmission mechanism comprise at least one transition surface detection module for detecting a transition surface of the tested piece and at least one side surface detection module for detecting a side surface of the tested piece; the optical axis of the transition surface detection module arranged on the same side of the transmission mechanism and the optical axis of the side surface detection module are arranged at an acute angle.

In one embodiment, the second detection mechanism further comprises a supporting truss, and the number of the second detection modules is set to be a plurality; wherein:

the support truss is arranged across the transmission mechanism along the second direction, and a plurality of second detection modules are arranged on the support truss side by side along the second direction;

the plurality of second detection modules comprise two edge detection modules, and the two edge detection modules are used for detecting the edges of the two ends of the front surface or the back surface of the detected piece in the second direction.

In one embodiment, the second detecting mechanism further includes a plurality of second adjusting modules, and at least two edge detecting modules in the plurality of second detecting modules are in one-to-one correspondence with one second adjusting module, where the second adjusting module is used for adjusting and fixing the spatial position of the second detecting module.

In one embodiment, the second detection module comprises a third driving component and/or a fourth driving component; wherein:

the power end of the third driving assembly is coupled to the corresponding second detection module and is used for driving the corresponding second detection module to move and stay along the second direction relative to the supporting truss;

the power end of the fourth driving assembly is coupled to the corresponding second detection module and used for driving the corresponding second detection module to move and stay relative to the supporting truss along the third direction.

In one embodiment, the first detection module and/or the second detection module include a telecentric lens and an imaging detection member that are cooperatively disposed, and the imaging detection member is configured to image the measured member through the telecentric lens, so as to obtain image information of the measured member.

The detection device according to the embodiment comprises a transmission mechanism, a first detection mechanism and a second detection mechanism, wherein the transmission mechanism is used for bearing a detected piece and transmitting the detected piece along a first direction; the second detection mechanism comprises a plurality of first detection modules arranged on the same side or two opposite sides of the transmission mechanism in the second direction, and the second detection mechanism comprises a second detection module arranged on one side of the transmission mechanism in the third direction; when the transmission mechanism transmits the tested piece, the plurality of first detection modules are respectively used for detecting the side surface and the transition surface of the tested piece, and the second detection module is used for detecting the front surface or the back surface of the tested piece. The first detection module and the second detection module which are arranged along the transmission track of the detected piece can realize the omnibearing detection of the detected piece in the process of transmitting the detected piece; not only can find out the corresponding defects in time, but also create conditions for improving the yield by analyzing and controlling the defects; meanwhile, the detection efficiency can be effectively improved.

Drawings

Fig. 1 is a schematic perspective view of a detection device according to an embodiment.

Fig. 2 is a schematic front plan view of a detection device according to an embodiment.

Fig. 3 is a schematic structural diagram of a first detection mechanism in the detection device according to an embodiment.

Fig. 4 is a schematic structural diagram of a second detection mechanism in the detection device according to an embodiment.

Fig. 5 is a schematic top plan view of a detection device according to an embodiment.

In the figure:

10. a transmission mechanism; 20. a first detection mechanism; 21. a side surface detection module; 22. a transition surface detection module; 23. a first adjusting module; 23a and a supporting seat; 23b, a movable seat; 23c, a first driving member; 23d and 23e, a second driver; 30. a second detection mechanism; 31. an edge detection module; 32. a support truss; 33. a second adjusting module; 33a, a third drive assembly; 33b, a fourth drive assembly; 40. a support mechanism; A. a panel; l1, a preset axis.

Detailed Description

The utility model will be described in further detail below with reference to the drawings by means of specific embodiments. Wherein like elements in different embodiments are numbered alike in association. In the following embodiments, numerous specific details are set forth in order to provide a better understanding of the present utility model. However, one skilled in the art will readily recognize that some of the features may be omitted, or replaced by other elements, materials, or methods in different situations. In some instances, related operations of the present utility model have not been shown or described in the specification in order to avoid obscuring the core portions of the present utility model, and may be unnecessary to persons skilled in the art from a detailed description of the related operations, which may be presented in the description and general knowledge of one skilled in the art.

Furthermore, the described features, operations, or characteristics of the description may be combined in any suitable manner in various embodiments. Also, various steps or acts in the method descriptions may be interchanged or modified in a manner apparent to those of ordinary skill in the art. Thus, the various orders in the description and drawings are for clarity of description of only certain embodiments, and are not meant to be required orders unless otherwise indicated.

The numbering of the components itself, e.g. "first", "second", etc., is used herein merely to distinguish between the described objects and does not have any sequential or technical meaning. The term "coupled" as used herein includes both direct and indirect coupling (coupling), unless otherwise indicated.

Referring to fig. 1 to 5, an embodiment of a detection device is provided, which can be used for performing an omnibearing detection on a product/workpiece, for example, detecting surface defects, critical dimensions, and the like of a plurality of surface areas, such as a front surface, a back surface, a side surface between the front surface and the back surface, a transition surface between the side surface and the front surface, and/or between the side surface and the back surface, and the like of a plate-like product/workpiece; the detection device includes a transmission mechanism 10, a first detection mechanism 20, a second detection mechanism 30, and other functional members (e.g., a support mechanism 40, etc.) that are present as needed.

The structure, the detection principle and the like of the detection device are mainly described below by taking a detected piece as a display panel (called panel A for short) as an example; it should be noted that the panel a is only one specific object to be inspected by the inspection device, and the inspection device may also be used for inspecting a plate-like product/work piece such as an optical lens, a battery plate, or the like.

Referring to fig. 1 and 2, the conveying mechanism 10 is disposed on the supporting mechanism 40, and is mainly used for carrying the panel a and conveying the panel a along a first direction (e.g. left-right direction); the first detecting mechanism 20 and the second detecting mechanism 30 are sequentially arranged along the first direction or the transmission direction of the transmission mechanism 10 and are arranged on the supporting mechanism 40; the first detecting mechanism 20 is mainly used for scanning and detecting (for example, imaging and scanning) the side surface of the panel a and the corresponding transition surface when the conveying mechanism 10 drives the panel a to move through the position corresponding to the first detecting mechanism 20; the second detecting mechanism 30 is mainly used for scanning and detecting (for example, imaging and scanning) the front surface or the back surface of the panel a when the conveying mechanism 10 drives the panel a to move through the position corresponding to the second detecting mechanism 30.

In one embodiment, referring to fig. 1 to 3, the first detecting mechanism 20 includes two first detecting modules, which are disposed side by side along a first direction and are disposed on the same side (e.g., rear side) of the conveying mechanism 10 along a second direction (e.g., front-rear direction); meanwhile, the optical axes of the two first detection modules are arranged at an acute angle; for example, the optical axis of one of the two first detection modules may be disposed in the second direction so as to be capable of facing the side surface of the panel a, so that the first detection module serves as the side surface detection module 21 for detecting the side surface of the panel a; the optical axis of the other of the two first detection modules is disposed so as to face the transition surface of the panel a, so that the first detection module serves as a transition surface detection module 22 for detecting the transition surface of the panel a.

Thus, when the conveying mechanism 10 drives the panel a to move along the first direction, the side surface detection module 21 and the transition surface detection module 22 can be used to detect the side surface of one side (for example, one long side) of the panel a and the transition surface between the side surface and the front surface or the back surface.

In other embodiments, referring to fig. 5, the number of the first detecting modules may be four, where the four first detecting modules include two side surface detecting modules 21 and two transition surface detecting modules 22, and the two side surface detecting modules 21 and the two transition surface detecting modules 22 are in one-to-one correspondence; one of the side surface detection modules 21 and its corresponding transition surface detection module 22 are arranged on the rear side of the conveying mechanism 10 in the second direction, and the other side surface detection module 21 and its corresponding transition surface detection module 22 are arranged on the front side of the conveying mechanism 10 in the second direction.

Therefore, when the conveying mechanism 10 drives the panel a to move along the first direction, four first detecting modules can be utilized to detect the side surfaces of two sides (for example, two long sides) of the panel a and the transition surface between the side surfaces and the front surface or the back surface, and although the configuration cost of the detecting device may be increased, the detecting time may be reduced and the detecting efficiency may be improved.

In one embodiment, referring to fig. 1, 2 and 4, the second detecting mechanism 30 includes two second detecting modules, which are arranged side by side in front of and behind each other along the second direction, and are arranged above the conveying mechanism 10 along the third direction (for example, up-down direction); the two second detecting modules are used as edge detecting modules 31, and when the conveying mechanism 10 drives the panel A to move along the first direction, the two edge detecting modules 31 can respectively detect the edge areas at the two ends of the front surface or the back surface of the panel A in the second direction.

Meanwhile, the panel a can be precisely positioned by means of the two edge detection modules 31, so that the panel a is ensured to have no angular deviation on the conveying mechanism 10, and the long side or the short side of the panel a is always distributed along the first direction in the moving process, so that smooth detection of the side surface and the transition surface is ensured, and the accuracy of the detection result is improved. Specifically, in general, since four corners of the panel a are provided with one cross mark, only two of the cross mark needs to be identified by the two edge detection modules 31, so that the position of the panel a on the conveying mechanism 10 can be determined; the angle deviation of the panel a can be obtained by identifying the two cross identification points, and the panel a can be adjusted to be within a required angle range by feeding back the angle deviation to the transmission mechanism 10 or a corresponding mechanism (such as a related functional component for adjusting the attitude and the azimuth of the panel a), so that the accurate positioning of the panel a is realized.

In other embodiments, the number of the second detecting modules may be set to one, and only a specific area on the front surface or the back surface of the panel a is detected; or the number of the second detecting modules may be three, four or other more, and the plurality of second detecting modules may be arranged in parallel along the second direction, so that the field of view of the plurality of second detecting modules may cover the whole area of the front surface or the back surface of the panel a as much as possible, and two second detecting modules located at two ends in the second direction may be used as the edge detecting modules 31.

In the implementation, the first detection module (specifically, for example, the transition surface detection module 22 and the side surface detection module 21) and the second detection module (specifically, for example, the edge detection module 31) each include a telecentric lens and an imaging detection member (for example, a CCD camera) which are mutually matched, and the imaging detection member images a surface area corresponding to the panel a through the telecentric lens, so as to obtain corresponding image information; by utilizing the coordination of the telecentric lens and the imaging detection piece, the detection precision of the corresponding detection module can be obviously improved, and guarantees are provided for improving the accuracy of detection results, avoiding false detection and the like.

In addition, according to specific detection projects, the first detection modules and the second detection modules can be in the same configuration, and can also be in different configurations so as to meet actual detection requirements.

Based on the detection, the first detection module and the second detection module which are arranged along the transmission track of the panel A can detect the front surface or the back surface, the side surface and the corresponding transition surface of the panel A in the process of transmitting the panel A, so that the omnibearing or comprehensive detection of the panel A is realized; the method is favorable for finding out corresponding defects in time, so that conditions are created for improving the yield of the panel A by analyzing and controlling the defects; moreover, through accomplish the omnidirectional detection to panel A on same device, both can avoid in prior art because of need with the help of the problem that the omnidirectional detection leads to the cost to be off-high that can realize with the help of different check out test set, also can effectively improve detection efficiency, reduce detection device and use the occupation of application space.

In one embodiment, referring to fig. 1 to 3, the first detecting mechanism 20 further includes a plurality of first adjusting modules 23, where the plurality of first adjusting modules 23 are disposed in one-to-one correspondence with the plurality of first adjusting modules (including the side surface detecting module 21 and the transition surface detecting module 22); the first adjusting module 23 is disposed on the supporting mechanism 40, and the power end of the first adjusting module 23 is coupled to the corresponding first detecting module; before and after the detection, the corresponding first detection module is adjusted and fixed by the first adjustment module 22, and the spatial position of the corresponding first detection module relative to the panel a (including the linear distance position between the panel a and the second direction, the rotation angle or the pitching angle of the corresponding first detection module relative to the panel a around the preset axis L1 extending and distributed along the first direction, etc.).

In particular, since panel a generally has two parallel long sides and two parallel short sides, and there are side surfaces and corresponding transition surfaces on each long side and each short side of panel a; therefore, after the orientation of the long side, the short side, the front surface or the back surface of the panel a is adjusted, the relative positions between the side surface detection module 21 and the transition surface detection module 22 and the side surface or the transition surface of the corresponding side of the panel a are necessarily changed; therefore, by adjusting and fixing the spatial positions of the corresponding first detecting modules (e.g., the side surface detecting module 21 and the transition surface detecting module 22) with the first adjusting module 23, the side surface detecting module 21 and the transition surface detecting module 22 can be always located at the positions of the focused corresponding side surfaces or transition surfaces, so as to ensure the detection effect and the accuracy of the detection result.

In particular, the first adjusting module 23 may be constructed by combining a first driving assembly and a second driving assembly; the power end of the first driving component is coupled to the corresponding first detection module and is used for driving the corresponding first detection module to rotate and stay around a preset axis L1 within a preset angle range, so that the adjustment and fixation of the pitching angle of the first detection module or the optical axis of the first detection module are realized; for example, the optical axis of the transition surface detection module 22 is made to be aligned with the transition surface of the panel a.

The power end of the second driving component is coupled to the first driving component, so that the first driving component can be driven to drive the corresponding first detection module to move and stay along the second direction and the third direction, and therefore adjustment and fixation of the distance between the first detection module and the panel A are achieved, the first detection module is guaranteed to have a good focusing position, and for example, the side surface detection module 21 can be close to and far away from the side surface of the panel A along the second direction.

In some embodiments, the side surface detection module 21, the transition surface detection module 22 and the corresponding first adjustment module 23 are configured in the same structure, so that the side surface detection module 21 and the transition surface detection module 22 can be made to have the feature of being standby for each other, so as to provide a guarantee for improving the application stability of the detection device.

In other embodiments, the number of the first adjusting modules 23 and their corresponding relation, or the first driving components and the second driving components may be selectively set according to actual needs.

For example, the transition surface detection module 22 is provided with only the first driving components correspondingly, so as to be able to adjust the pitch angle of the transition surface detection module; while the side surface detecting module 21 is provided with only the second driving assembly correspondingly, so that the relative distance between the side surface detecting module 21 and the side surface of the panel a can be adjusted along the second direction or the third direction.

For example, only a part of the first detecting modules are correspondingly provided with the first adjusting modules 23, while the other first detecting modules are fixedly arranged at corresponding positions; for example, only the transition surface detection module 22 or the side surface detection module 21 is correspondingly provided with the first adjustment module 23.

For example, the first detecting modules on the same side of the transmission mechanism 10 may share the second driving component, and the first driving component is selectively disposed only, so as to improve the compactness of the first detecting mechanism 20.

In one embodiment, referring to fig. 3, the first driving assembly includes a supporting seat 23a, a moving seat 23b, and a first driving member 23c; wherein, the supporting seat 23a and the moving seat 23b each have an arc-shaped guiding structure (such as an arc-shaped protrusion or an arc-shaped groove) with a preset axis L1 as a central axis, and the supporting seat 23a and the moving seat 23b are connected with each other in a sliding fit manner through the respective arc-shaped guiding structures; the first detection module (for example, the side surface detection module 21 and the transition surface detection module 22) is disposed on the moving seat 23 b; the first driving member 23c may adopt a cylinder driving structure, a screw driving structure, etc., and its power end is coupled to the supporting seat 23a; the first driving member 23c drives the moving seat 23b to drive the first detection module to move along the arc-shaped guiding structure on the supporting seat 23a, so that the first detection module can rotate and stay around the preset axis L1 within a preset angle range.

It should be noted that, in fig. 3, the bold solid line represents a line connecting both ends of the arc-shaped guiding structure and the arc center thereof, and the bold dashed line represents a preset axis L1 passing through an intersection point of the line.

In one embodiment, referring to fig. 3, the second drive assembly includes two second drive members, one of which is labeled 23d and the other is labeled 23e for ease of distinction and description; the second driving parts 23d and 23e can adopt a combination structure of a linear motor and a guide sliding rail, and can also adopt a cylinder driving structure, a screw driving structure and the like; wherein the second driving member 23d is disposed on the supporting mechanism 40, a power end of the second driving member 23d is coupled to the second driving member 23e, and a power end of the second driving member 23e is coupled to the first driving assembly (specifically, the supporting seat 23 a); therefore, the second driving piece 23e can drive the first driving component to drive the first detection module to move back and forth along the second direction, and the second driving piece 23d can drive the second driving piece 23e to drive the first driving component (together with the first detection module) to move up and down along the third direction, so that the adjustment and fixation of the spatial position of the first detection module are realized.

In other embodiments, the second driving member may be configured as one, and the second driving member can only drive the first driving assembly to drive the first detection module to move back and forth along the second direction or to move up and down along the third direction.

In one embodiment, referring to fig. 1, 2 and 4, the second detection mechanism 30 further includes a support truss 32 and a second adjustment module 33; wherein the support truss 32 is generally a gantry structure disposed across the transport mechanism 10 in the second direction, and is primarily used as a mounting carrier for the second adjustment module 33 and the second detection module; at least two edge detection modules 31 in the second detection modules are in one-to-one correspondence with one second adjustment module 33, the second adjustment module 33 is arranged on the beam part of the supporting truss 32, and the power end of the second adjustment module 33 is coupled to the corresponding edge detection module 31 so as to be capable of adjusting and fixing the spatial position of the edge detection module 31 relative to the panel A along the second direction and/or the third direction.

The second adjusting module 33 includes a third driving assembly 33a and a fourth driving assembly 33b; wherein the third driving component 33a is mounted on the supporting truss 32, the power end of the third driving component 33a is coupled to the fourth driving component 33b, and the power end of the fourth driving component 33b is coupled to the edge detection module 31; therefore, the third driving component 33a can drive the fourth driving component 33b to drive the edge detection modules 31 to move on the supporting truss 32 along the second direction, so as to adjust the distance between the two edge detection modules 31, so as to adapt to the long side or short side dimension of the panel A; the fourth driving component 33b drives the edge detection module 31 to move up and down along the third direction, so that the edge detection module 31 can automatically focus.

In specific implementation, the third driving assembly 33a may adopt a combined structure of components such as a linear motor, a linear guide rail, a grating ruler, and the like, so as to realize micron-sized accurate positioning of the edge detection module 31 in the second direction; the fourth driving unit 33b may be a cylinder driving structure, a screw driving structure, or the like, as necessary.

In other embodiments, the third driving assembly 33a and the fourth driving assembly 33b may be selectively arranged as required, for example, the detection device is only applicable to a panel a or a workpiece with square outline, and since the long side and the short side of the panel a are the same in size, the position and the distance of the edge detection module 31 in the second direction may not be adjusted, and the third driving assembly 33a may be omitted, thereby reducing the configuration cost of the detection device; in this case, the details are not described here.

The foregoing description of the utility model has been presented for purposes of illustration and description, and is not intended to be limiting. Several simple deductions, modifications or substitutions may also be made by a person skilled in the art to which the utility model pertains, based on the idea of the utility model.

Claims (11)

1. A detection apparatus, characterized by comprising:

the transmission mechanism is used for bearing a tested piece and transmitting the tested piece along a first direction;

the first detection mechanism comprises a plurality of first detection modules, and the plurality of first detection modules are arranged on the same side or two opposite sides of the transmission mechanism in the second direction; at least one of the first detection modules is used for detecting the side surface of the tested piece, and at least another one of the first detection modules is used for detecting the transition surface of the tested piece; and

a second detection mechanism including a second detection module arranged on one side of the transmission mechanism in a third direction, the second detection module being for detecting a front surface or a back surface of the member to be detected;

wherein the first direction, the second direction and the third direction are perpendicular to each other.

2. The detecting device according to claim 1, wherein the first detecting mechanism further comprises a plurality of first adjusting modules, and the plurality of first adjusting modules are arranged in one-to-one correspondence with the plurality of first detecting modules; the first adjusting module is used for adjusting and fixing the corresponding spatial position of the first detecting module.

3. The inspection device of claim 1, wherein the first inspection mechanism further comprises a first adjustment module, the first adjustment module being disposed in one-to-one correspondence with the first inspection module for inspecting the transition surface of the inspected piece, or the first adjustment module being disposed in one-to-one correspondence with the first inspection module for inspecting the side surface of the inspected piece; the first detection module is used for adjusting and fixing the corresponding spatial position of the first detection module.

4. A detection device according to claim 2 or 3, wherein the first adjustment module comprises a first drive assembly and/or a second drive assembly; wherein:

the power end of the first driving component is coupled to the corresponding first detection module and is used for driving the corresponding first detection module to rotate and stay around a preset axis within a preset angle range; the preset axis is arranged along the first direction in an extending way;

the power end of the second driving component is coupled to the corresponding first detection module and is used for driving the corresponding first detection module to move and stay along the second direction and/or the third direction.

5. The detecting device according to claim 4, wherein the first driving assembly comprises a supporting seat, a moving seat and a first driving member, wherein the supporting seat and the moving seat are provided with arc-shaped guide structures taking the preset axis as a central axis, and the supporting seat and the moving seat are arranged in a sliding fit manner through the respective arc-shaped guide structures;

the first detection module is arranged on the movable seat, and the power end of the first driving piece is coupled to the movable seat; the first driving piece is used for driving the movable seat to drive the first detection module to move on the supporting seat along the arc-shaped guide structure, so that the first detection module can rotate and stay around the preset axis within a preset angle range.

6. The detection apparatus as recited in claim 4, wherein said second drive assembly includes a second drive member;

the number of the second driving parts is set to be one, and the power end of the second driving parts is coupled to the first detection module and is used for driving the first detection module to move and stay along the second direction or the third direction;

or the number of the second driving pieces is two, the two second driving pieces are mutually matched, and the power end of at least one of the two second driving pieces is coupled to the first detection module; one of the two second driving parts is used for driving the first detection module to move and stop along the second direction, and the other of the two second driving parts is used for driving the first detection module to move and stop along the third direction.

7. The inspection apparatus according to claim 1, wherein the transmission mechanism is provided with at least two of the first inspection modules on at least one side in the second direction, and at least two of the first inspection modules arranged on the same side of the transmission mechanism include at least one transition surface inspection module for inspecting a transition surface of the inspected member and at least one side surface inspection module for inspecting a side surface of the inspected member; the optical axis of the transition surface detection module arranged on the same side of the transmission mechanism and the optical axis of the side surface detection module are arranged at an acute angle.

8. The inspection apparatus of claim 1, wherein the second inspection mechanism further comprises a support truss, the number of second inspection modules being configured as a plurality; wherein:

the support truss is arranged across the transmission mechanism along the second direction, and a plurality of second detection modules are arranged on the support truss side by side along the second direction;

the plurality of second detection modules comprise two edge detection modules, and the two edge detection modules are used for detecting the edges of the two ends of the front surface or the back surface of the detected piece in the second direction.

9. The inspection apparatus according to claim 8, wherein the second inspection mechanism further comprises a plurality of second adjustment modules, at least two of the plurality of second inspection modules having one of the second adjustment modules in a one-to-one correspondence, the second adjustment modules being configured to adjust and fix a spatial position of the second inspection module.

10. The detection device of claim 9, wherein the second detection module comprises a third drive assembly and/or a fourth drive assembly; wherein:

the power end of the third driving assembly is coupled to the corresponding second detection module and is used for driving the corresponding second detection module to move and stay along the second direction relative to the supporting truss;

the power end of the fourth driving assembly is coupled to the corresponding second detection module and used for driving the corresponding second detection module to move and stay relative to the supporting truss along the third direction.

11. The inspection device of claim 1, wherein the first inspection module and/or the second inspection module comprises a telecentric lens and an imaging probe that are cooperatively disposed, the imaging probe being configured to image the inspected part through the telecentric lens to obtain image information of the inspected part.