CN219512081U - Device for complex optical constant measurement - Google Patents
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Abstract
本实用新型涉及一种用于复光学常数测量的装置,包括激光光源、光电探测器、计算机以及测量平台,所述测量平台包括样品固定平台以及可分别相对样品固定平台旋转的光源固定平台和探测器固定平台,介质样品固定于样品固定平台上,所述激光光源固定于光源固定平台上且激光出射方向朝向样品固定平台上的介质样品,所述光电探测器固定于探测器固定平台上且探测方向朝向介质样品,所述光电探测器与计算机连接,以获取来自介质样品的反射光强并传输给计算机。该装置结构简单,可用于便捷地测量出介质的复光学常数。
The utility model relates to a device for measuring complex optical constants, which comprises a laser light source, a photoelectric detector, a computer and a measuring platform. The measuring platform includes a sample fixing platform and a light source fixing platform and a detection The medium sample is fixed on the sample fixed platform, the laser light source is fixed on the light source fixed platform and the laser emission direction faces the medium sample on the sample fixed platform, the photodetector is fixed on the detector fixed platform and detects The direction is towards the medium sample, and the photodetector is connected with the computer to obtain the reflected light intensity from the medium sample and transmit it to the computer. The device has a simple structure and can be used to conveniently measure the complex optical constant of a medium.
Description
技术领域technical field
本实用新型涉及复光学常数测量技术领域,具体涉及一种用于复光学常数测量的装置。The utility model relates to the technical field of complex optical constant measurement, in particular to a device for complex optical constant measurement.
背景技术Background technique
吸收介质(如金属、生物组织液等)的折射率,其值用复光学常数来表征。这种形式上的变化使波的性质也发生了变化,尤其是折射率虚部,不仅是介质吸收特性的根源,还影响反射光、透射光的偏振状态。对复光学常数的研究不仅具有理论意义,还具有较高的实际应用价值。The refractive index of the absorbing medium (such as metal, biological tissue fluid, etc.), its value is characterized by the complex optical constant. This change in form changes the properties of the wave, especially the imaginary part of the refractive index, which is not only the source of the absorption properties of the medium, but also affects the polarization state of reflected light and transmitted light. The study of complex optical constants not only has theoretical significance, but also has high practical application value.
现有的复光学常数测量方法及装置主要利用表面等离子体共振技术测量复光学常数,如中国专利CN201711310751.3公开了一种基于表面等离子体共振的金属膜测量装置及测量方法,该装置包括等腰直角三棱镜,在所述的等腰直角三棱镜的底面依次镀有亚微米量级厚度的介质膜和待测金属膜层,并浸入在溶液中;转动椭偏仪的发射臂角度,使等腰直角三棱镜与介质膜界面处的入射光角度大于该界面的全反射临界角度,满足激发表面等离子体共振的条件,在待测金属薄膜表面激发表面等离子体共振;测量不同入射波长对应的光的振幅比和相位差,拟合振幅比和相位差与入射波长的关系曲线,计算反演得到待测金属膜层的厚度和光学常数。但是,通过测量共振角、相位差等计算介质的复光学常数,仪器结构复杂。也有人通过测量光在经过吸收介质的实折射角和前后光斑位置的位移量,反演出介质的复光学常数,但这种方法对仪器精度要求高。Existing methods and devices for measuring complex optical constants mainly use surface plasmon resonance technology to measure complex optical constants. For example, Chinese patent CN201711310751.3 discloses a metal film measuring device and method based on surface plasmon resonance. The device includes, etc. A waist right-angled prism, the bottom surface of the isosceles right-angled prism is coated with a dielectric film with a thickness of submicron order and a metal film to be measured, and immersed in the solution; the angle of the launch arm of the ellipsometer is rotated to make the isosceles The angle of incident light at the interface between the rectangular prism and the dielectric film is greater than the critical angle of total reflection at the interface, which satisfies the conditions for exciting surface plasmon resonance, and excites surface plasmon resonance on the surface of the metal film to be tested; measures the amplitude of light corresponding to different incident wavelengths Ratio and phase difference, fitting the relationship curve between the amplitude ratio and phase difference and the incident wavelength, calculating and inversion to obtain the thickness and optical constant of the metal film to be measured. However, the complex optical constant of the medium is calculated by measuring the resonance angle, phase difference, etc., and the structure of the instrument is complicated. Some people also invert the complex optical constant of the medium by measuring the real refraction angle of the light passing through the absorbing medium and the displacement of the front and rear spot positions, but this method requires high precision of the instrument.
发明内容Contents of the invention
本实用新型的目的在于提供一种用于复光学常数测量的装置,该装置结构简单,可用于便捷地测量出介质的复光学常数。The purpose of the utility model is to provide a device for measuring complex optical constants. The device has a simple structure and can be used to conveniently measure complex optical constants of a medium.
为实现上述目的,本实用新型采用的技术方案是:一种用于复光学常数测量的装置,包括激光光源、光电探测器、计算机以及测量平台,所述测量平台包括样品固定平台以及可分别相对样品固定平台旋转的光源固定平台和探测器固定平台,介质样品固定于样品固定平台上,所述激光光源固定于光源固定平台上且激光出射方向朝向样品固定平台上的介质样品,所述光电探测器固定于探测器固定平台上且探测方向朝向介质样品,所述光电探测器与计算机连接,以获取来自介质样品的反射光强并传输给计算机。In order to achieve the above object, the technical solution adopted by the utility model is: a device for measuring complex optical constants, including a laser light source, a photodetector, a computer and a measurement platform, and the measurement platform includes a sample fixing platform and can be respectively relatively The sample fixed platform rotates the light source fixed platform and the detector fixed platform. The medium sample is fixed on the sample fixed platform. The laser light source is fixed on the light source fixed platform and the laser emission direction faces the medium sample on the sample fixed platform. The photoelectric detector The detector is fixed on the fixed platform of the detector and the detection direction faces the medium sample. The photodetector is connected with the computer to obtain the reflected light intensity from the medium sample and transmit it to the computer.
进一步地,所述样品固定平台包括样品固定台面、固定支架和旋转中心轴,所述样品固定台面固定于固定支架上,所述样品固定台面下部中心固定连接所述旋转中心轴;所述光源固定平台包括光源固定台面和第一旋转连接臂,所述第一旋转连接臂为L形结构,其上端与光源固定台面连接,其旁侧端与旋转中心轴转动连接,以使第一旋转连接臂及其上的光源固定台面可相对旋转中心轴转动;所述探测器固定平台包括探测器固定台面和第二旋转连接臂,所述第二旋转连接臂为L形结构,其上端与探测器固定台面连接,其旁侧端与旋转中心轴转动连接,以使第二旋转连接臂及其上的探测器固定台面可相对旋转中心轴转动。Further, the sample fixing platform includes a sample fixing table top, a fixing bracket and a rotating central shaft, the sample fixing table top is fixed on the fixing bracket, and the center of the lower part of the sample fixing table top is fixedly connected to the rotating central shaft; the light source is fixed The platform includes a light source fixed table and a first rotating connecting arm, the first rotating connecting arm is an L-shaped structure, its upper end is connected to the light source fixed table, and its side end is rotatably connected to the rotating central axis, so that the first rotating connecting arm The light source fixing table on it can rotate relative to the central axis of rotation; the detector fixing platform includes a detector fixing table and a second rotating connecting arm, and the second rotating connecting arm is an L-shaped structure, and its upper end is fixed to the detector The table is connected, and its side end is rotatably connected with the central axis of rotation, so that the second rotating connecting arm and the fixed table of the detector on it can rotate relative to the central axis of rotation.
进一步地,所述样品固定台面上设有刻度,以便于光源固定台面和探测器固定台面相对于样品固定台面中心准确旋转。Further, a scale is provided on the sample fixing table so that the light source fixing table and the detector fixing table can rotate accurately relative to the center of the sample fixing table.
进一步地,所述样品固定平台包括样品固定台面、固定支架、第一旋转驱动电机和第二旋转驱动电机,所述样品固定台面固定于固定支架上,所述第一旋转驱动电机安装于样品固定台面下部中心,所述第二旋转驱动电机安装于固定支架的底面中心上;所述光源固定平台包括光源固定台面和第三旋转连接臂,所述第三旋转连接臂为L形结构,其上端与光源固定台面连接,其旁侧端与第一旋转驱动电机的输出端固定连接,以通过第一旋转驱动电机驱动第三旋转连接臂及光源固定台面旋转;所述探测器固定平台包括探测器固定台面和第四旋转连接臂,所述第四旋转连接臂为L形结构,其上端与探测器固定台面连接,其旁侧端与第二旋转驱动电机的输出端固定连接,以通过第二旋转驱动电机驱动第四旋转连接臂及探测器固定台面旋转;所述计算机分别与第一旋转驱动电机、第二旋转驱动电机的控制端电性连接,以控制旋转驱动电机工作。Further, the sample fixing platform includes a sample fixing platform, a fixing bracket, a first rotating drive motor and a second rotating driving motor, the sample fixing platform is fixed on the fixing bracket, and the first rotating driving motor is installed on the sample fixing The center of the lower part of the table, the second rotating drive motor is installed on the center of the bottom surface of the fixed bracket; the light source fixing platform includes a light source fixing table and a third rotating connecting arm, the third rotating connecting arm is an L-shaped structure, and its upper end It is connected with the light source fixed table, and its side end is fixedly connected with the output end of the first rotary drive motor, so as to drive the third rotating connecting arm and the light source fixed table to rotate through the first rotary drive motor; the detector fixed platform includes a detector The fixed table and the fourth rotating connecting arm, the fourth rotating connecting arm is an L-shaped structure, its upper end is connected to the fixed table of the detector, and its side end is fixedly connected to the output end of the second rotating drive motor, so as to pass through the second The rotating drive motor drives the fourth rotating connecting arm and the fixed table of the detector to rotate; the computer is electrically connected to the control terminals of the first rotating driving motor and the second rotating driving motor respectively, so as to control the operation of the rotating driving motor.
与现有技术相比,本实用新型具有以下有益效果:提供了一种用于复光学常数测量的装置,该装置通过设计样品固定平台以及可相对样品固定平台旋转的光源固定平台、探测器固定平台来固定介质样品、激光光源和光电探测器,使激光光源可方便地改变入射光的入射角,并使光电探测器可对应旋转到反射光强接收位置,进而可通过入射光强和反射光强的多次测量来计算出介质的复光学常数,结构简单,易于实现,具有很强的实用性和广阔的应用前景。Compared with the prior art, the utility model has the following beneficial effects: a device for measuring complex optical constants is provided, which is fixed by designing a sample fixing platform, a light source fixing platform that can rotate relative to the sample fixing platform, and a detector. The platform is used to fix the medium sample, laser light source and photodetector, so that the laser light source can easily change the incident angle of the incident light, and the photodetector can be rotated to the receiving position of the reflected light intensity, and then the incident light intensity and the reflected light can be adjusted. The complex optical constant of the medium is calculated by strong multiple measurements, the structure is simple, easy to realize, and has strong practicability and broad application prospects.
附图说明Description of drawings
图1是本实用新型实施例一的装置结构俯视图。Fig. 1 is a top view of the device structure of Embodiment 1 of the present utility model.
图2是本实用新型实施例一的装置结构正视图。Fig. 2 is a front view of the device structure of Embodiment 1 of the present utility model.
图3是本实用新型实施例二的装置结构正视图。Fig. 3 is a front view of the device structure of the second embodiment of the utility model.
具体实施方式Detailed ways
下面结合附图及实施例对本实用新型做进一步说明。Below in conjunction with accompanying drawing and embodiment the utility model is described further.
应该指出,以下详细说明都是示例性的,旨在对本申请提供进一步的说明。除非另有指明,本文使用的所有技术和科学术语具有与本申请所属技术领域的普通技术人员通常理解的相同含义。It should be pointed out that the following detailed description is exemplary and is intended to provide further explanation to the present application. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.
需要注意的是,这里所使用的术语仅是为了描述具体实施方式,而非意图限制根据本申请的示例性实施方式。如在这里所使用的,除非上下文另外明确指出,否则单数形式也意图包括复数形式,此外,还应当理解的是,当在本说明书中使用术语“包含”和/或“包括”时,其指明存在特征、步骤、操作、器件、组件和/或它们的组合。It should be noted that the terminology used here is only for describing specific implementations, and is not intended to limit the exemplary implementations according to the present application. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural, and it should also be understood that when the terms "comprising" and/or "comprising" are used in this specification, they mean There are features, steps, operations, means, components and/or combinations thereof.
如图1所示,本实用新型实施例一提供了一种用于复光学常数测量的装置,包括激光光源1、光电探测器2、计算机4以及测量平台,所述测量平台包括样品固定平台4以及可分别相对样品固定平台旋转的光源固定平台5和探测器固定平台7,介质样品6固定于样品固定平台4上,所述激光光源1固定于光源固定平台5上且激光出射方向朝向样品固定平台上的介质样品6,所述光电探测器2固定于探测器固定平台7上且探测方向朝向介质样品6,所述光电探测器2与计算机3连接,以获取来自介质样品的反射光强并传输给计算机。As shown in Figure 1, Embodiment 1 of the present utility model provides a kind of device that is used for complex optical constant measurement, comprises laser light source 1, photodetector 2, computer 4 and measurement platform, and described measurement platform comprises sample fixing platform 4 And the light source fixed platform 5 and the detector fixed platform 7 that can rotate relative to the sample fixed platform respectively, the medium sample 6 is fixed on the sample fixed platform 4, the laser light source 1 is fixed on the light source fixed platform 5 and the laser emission direction is fixed toward the sample The medium sample 6 on the platform, the photodetector 2 is fixed on the detector fixed platform 7 and the detection direction faces the medium sample 6, and the photodetector 2 is connected with the computer 3 to obtain the reflected light intensity from the medium sample and transfer to the computer.
如图2所示,在本实施例一中,所述样品固定平台4包括样品固定台面41、固定支架42和旋转中心轴43,所述样品固定台面41固定于固定支架42上,所述样品固定台面41下部中心固定连接所述旋转中心轴43;所述光源固定平台5包括光源固定台面51和第一旋转连接臂52,所述第一旋转连接臂52为L形结构,其上端与光源固定台面51连接,其旁侧端与旋转中心轴43转动连接,以使第一旋转连接臂52及其上的光源固定台面51可相对旋转中心轴43转动;所述探测器固定平台7包括探测器固定台面71和第二旋转连接臂72,所述第二旋转连接臂72为L形结构,其上端与探测器固定台面71连接,其旁侧端与旋转中心轴43转动连接,以使第二旋转连接臂72及其上的探测器固定台面71可相对旋转中心轴转动。As shown in Figure 2, in the first embodiment, the sample fixing platform 4 includes a sample fixing platform 41, a fixing bracket 42 and a rotation center shaft 43, the sample fixing platform 41 is fixed on the fixing bracket 42, and the sample The center of the lower part of the fixed table top 41 is fixedly connected to the rotating central shaft 43; the light source fixed platform 5 includes a light source fixed table top 51 and a first rotating connecting arm 52, the first rotating connecting arm 52 is an L-shaped structure, and its upper end is connected to the light source. The fixed table top 51 is connected, and its side end is rotatably connected with the rotation center shaft 43, so that the first rotating connecting arm 52 and the light source fixed table top 51 on it can rotate relative to the rotation center shaft 43; the detector fixed platform 7 includes a detector The fixed table 71 of the detector and the second rotating connecting arm 72, the second rotating connecting arm 72 is an L-shaped structure, its upper end is connected with the fixed table 71 of the detector, and its side end is connected with the rotating central axis 43 so that the second The two rotating connecting arms 72 and the detector fixing platform 71 on them can rotate relative to the central axis of rotation.
较佳地,所述样品固定台面41上设有刻度,以便于光源固定台面51和探测器固定台面71相对于样品固定台面41中心准确旋转。Preferably, scales are provided on the sample fixing table 41 so as to facilitate accurate rotation of the light source fixing table 51 and the detector fixing table 71 relative to the center of the sample fixing table 41 .
如图3所示,所述样品固定平台和光源固定平台还可以有不同的实现结构。在本实用新型的实施例二中,所述样品固定平台包括样品固定台面41、固定支架42、第一旋转驱动电机44和第二旋转驱动电机45,所述样品固定台面41固定于固定支架42上,所述第一旋转驱动电机44安装于样品固定台面41下部中心,所述第二旋转驱动电机45安装于固定支架42的底面中心上;所述光源固定平台包括光源固定台面51和第三旋转连接臂53,所述第三旋转连接臂53为L形结构,其上端与光源固定台面51连接,其旁侧端与第一旋转驱动电机44的输出端固定连接,以通过第一旋转驱动电机驱动第三旋转连接臂及光源固定台面旋转;所述探测器固定平台包括探测器固定台面71和第四旋转连接臂73,所述第四旋转连接臂73为L形结构,其上端与探测器固定台面71连接,其旁侧端与第二旋转驱动电机45的输出端固定连接,以通过第二旋转驱动电机驱动第四旋转连接臂及探测器固定台面旋转。As shown in FIG. 3 , the sample fixing platform and the light source fixing platform may also have different implementation structures. In Embodiment 2 of the present utility model, the sample fixing platform includes a sample fixing table top 41, a fixing bracket 42, a first rotating drive motor 44 and a second rotating driving motor 45, and the sample fixing table top 41 is fixed on the fixing bracket 42 Above, the first rotary drive motor 44 is mounted on the lower center of the sample fixing table 41, and the second rotary drive motor 45 is mounted on the center of the bottom surface of the fixed bracket 42; the light source fixing platform includes a light source fixing table 51 and a third The rotating connecting arm 53, the third rotating connecting arm 53 is an L-shaped structure, its upper end is connected to the light source fixed table 51, and its side end is fixedly connected to the output end of the first rotating drive motor 44, so as to drive through the first rotating The motor drives the third rotating connecting arm and the light source fixed table to rotate; the detector fixing platform includes a detector fixing table 71 and a fourth rotating connecting arm 73, and the fourth rotating connecting arm 73 is an L-shaped structure, and its upper end is connected to the detection The detector fixed table 71 is connected, and its side end is fixedly connected with the output end of the second rotary drive motor 45, so as to drive the fourth rotary connecting arm and the detector fixed table to rotate through the second rotary drive motor.
为了控制旋转驱动电机工作,所述计算机3与第一旋转驱动电机44、第二旋转驱动电机45的控制端电性连接,从而可以在进行一次测量后,自动控制第一旋转驱动电机44驱动光源固定台面51旋转设定角度,同时控制第二旋转驱动电机45旋转对应角度,再进行二测测量。In order to control the operation of the rotary drive motor, the computer 3 is electrically connected to the control terminals of the first rotary drive motor 44 and the second rotary drive motor 45, so that after a measurement, the first rotary drive motor 44 can be automatically controlled to drive the light source The fixed table 51 is rotated to set an angle, and at the same time, the second rotary drive motor 45 is controlled to rotate the corresponding angle, and then the second measurement is performed.
本装置使用时,首先激光光源1将光强为I 0的激光以θ i1入射介质样品表面,利用光电探测器2测出反射光强I R1。再将光源固定台面旋转90°(此时光源固定台面旋转到了法平面的右侧,即原探测器固定台面所在一侧),从而使激光旋转90°,以入射角为θ i2=π/2-θ i1入射介质样品。同时,使探测器固定台面反向旋转90°(此时探测器固定台面反向旋转到了法平面的左侧,即原光源固定台面所在一侧),从而利用光电探测器2再次测出反射光强I R2。然后,计算机3根据两次反射光强和入射光强的比值与复光学常数的函数关系,即可计算出介质的复光学常数。When the device is in use, firstly, the laser light source 1 injects the laser light with the light intensity I 0 into the surface of the medium sample at θ i 1 , and uses the photodetector 2 to measure the reflected light intensity I R 1 . Then rotate the light source fixed table by 90° (at this time, the light source fixed table is rotated to the right side of the normal plane, that is, the side where the original detector fixed table is located), so that the laser is rotated by 90°, and the incident angle is θ i 2 =π/ 2- θi 1 incident medium sample. At the same time, make the fixed table of the detector reversely rotated by 90° (at this time, the fixed table of the detector is reversely rotated to the left side of the normal plane, that is, the side where the fixed table of the original light source is located), so that the reflected light is measured again by the photodetector 2 Strong I R 2 . Then, the computer 3 can calculate the complex optical constant of the medium according to the functional relationship between the ratio of the twice reflected light intensity to the incident light intensity and the complex optical constant.
以上所述,仅是本实用新型的较佳实施例而已,并非是对本实用新型作其它形式的限制,任何熟悉本专业的技术人员可能利用上述揭示的技术内容加以变更或改型为等同变化的等效实施例。但是凡是未脱离本实用新型技术方案内容,依据本实用新型的技术实质对以上实施例所作的任何简单修改、等同变化与改型,仍属于本实用新型技术方案的保护范围。The above is only a preferred embodiment of the utility model, and is not intended to limit the utility model in other forms. Any skilled person who is familiar with this profession may use the technical content disclosed above to change or remodel it into an equivalent change. Equivalent embodiment. However, any simple modifications, equivalent changes and modifications made to the above embodiments according to the technical essence of the present utility model without departing from the content of the technical solution of the utility model still belong to the protection scope of the technical solution of the utility model.
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