CN219266154U - Electron beam self-heating sample stage - Google Patents

Abstract

The utility model discloses an electron beam self-heating sample table, which comprises a base and a sample supporting table; the base comprises a hollow base main body and a hollow bracket which is connected with the inner wall of the base main body and extends along a direction which is vertical to the base main body at one side; the sample supporting platform is of a hollow structure and comprises a hollow sample platform and a hollow connecting upright post, and the connecting upright post is arranged at the bottom of the sample platform; the bracket is sleeved on the outer side of the connecting upright post; the base body, the connecting upright post and the hollow part of the sample table form a channel for the electron beam to pass through. The sample stage provided by the utility model can ensure that the electron beam passing through the sample can not be reflected to the test sample and the measurement thermal bridge, and the test accuracy is improved.

Description

Electron beam self-heating sample stage

Technical Field

The utility model relates to the technical field of scanning electron microscope, in particular to an electron beam self-heating sample stage.

Background

The electron beam self-heating test is widely focused as a micro-nano scale heat conduction measurement mode because of the thermal resistance distribution of the nano scale space resolution. Electron beam self-heating tests were first proposed by the JohnT.L.Thong professor and the Li Baowen professor group of the national university of Singapore. The method improves the thermal bridge method, adopts electron beams to locally heat the sample, and measures the temperature change at two ends of the thermal bridge, thereby obtaining the thermal resistance information of the sample with the spatial resolution of nanometer level [ non-patent document 1]. According to the method, through a non-contact electron beam heating mode, the influence of thermal contact resistance caused by contact between the probe and the sample in the thermal scanning microscope technology is avoided, and meanwhile, experimental errors caused by thermal contact resistance between the sample and the suspended platform in the thermal bridge method are avoided. The key to this test method is to heat the suspended sample with a focused electron beam in a scanning electron microscope. Therefore, it is desirable to avoid scattering of the electron beam onto the test sample and measurement thermal bridge by the underlying substrate after penetrating the suspended sample. In this regard, the test requires that the sample be suspended and that the test device sample stage provide as long an electron beam transmission path as possible to avoid scattering causing test errors.

Most of the current scanning electron microscope sample tables are plane sample tables aiming at common morphology observation, and the requirements of electron beam transmission channels required by electron beam self-heating tests and sample tables connected with test device circuits cannot be met.

Non-patent document 1: D.Liu, R.Xie, N.Yang, B.Li, andJ.T.L.Thong, "Profiling NanowireThermalResistancewithaSpatialResolutionofNanometers," nanolett, vol.14, no.2, p.806,2014.

Disclosure of Invention

The utility model provides an electron beam self-heating sample stage for a scanning electron microscope. The electron beam provided by the sample stage penetrates through the channel, so that the electron beam penetrating through the sample can be prevented from being reflected to the test sample and the measurement heat bridge, and the test accuracy is improved.

In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows:

the utility model provides an electron beam self-heating sample stage, which comprises a base and a sample supporting stage; the base comprises a hollow base main body and a hollow bracket which is connected with the inner wall of the base main body and extends along a direction which is vertical to the base main body at one side; the sample supporting table is of a hollow structure and comprises a hollow sample table and a hollow connecting upright post, and the connecting upright post is arranged at the bottom of the sample table; the bracket is sleeved on the outer side of the connecting upright post; the base main body, the connecting upright post and the hollow part of the sample table form a channel for passing electron beams.

As a preferred embodiment, the cross section of the channel is circular;

preferably, the diameter of the circular section is more than or equal to 2mm and less than or equal to 5mm;

preferably, the length of the channel is more than or equal to 20mm and less than or equal to 30mm;

as a preferred embodiment, the bracket is nested outside the connecting upright;

preferably, the height of the bracket is identical to the height of the connecting upright.

As a preferred embodiment, further comprising a fastening assembly for fastening the connecting stud and bracket;

preferably, the fastening assembly comprises a fastening screw; the side wall of the bracket is provided with at least two through holes, the fastening screw is arranged in the through holes, and the cylindrical end of the fastening screw is abutted with the side surface of the connecting upright post;

preferably, the at least two through holes are symmetrically distributed relative to the axis of the bracket;

preferably, the height of the at least two through holes is between one third and two thirds of the height of the bracket;

preferably, the fastening screw is a hexagon socket end fastening screw.

As a preferable implementation manner, the side surface of the base main body is provided with at least two U-shaped grooves;

preferably, the at least two U-shaped grooves are symmetrically distributed;

preferably, a fixing screw is arranged in the U-shaped groove.

As a preferred embodiment, the sample clamping device further comprises a sample clamping component arranged on the upper surface of the sample stage;

preferably, the sample holding assembly is an elastic assembly; the elastic component comprises a fixed end and a clamping end; the fixed end is fixed on the upper surface of the sample table through a nut, and the clamping end abuts against the sample to be tested carried on the sample table along the direction perpendicular to the upper surface of the sample table;

preferably, the sample holding assembly comprises at least two sets of resilient assemblies;

preferably, the at least two groups of elastic components are symmetrically distributed;

preferably, the elastic component is a spring piece.

The technical scheme has the following advantages or beneficial effects:

the electron beam self-heating sample table provided by the utility model provides a transmission channel for electron beams through the base main body and the hollow part of the connecting upright post and the sample table, so that the electron beams passing through the sample are prevented from being reflected to the test sample and the measurement heat bridge to cause test errors;

the electron beam self-heating sample table provided by the utility model is connected with the sample supporting table in a nested way through the base, so that the plane direction of the sample table can be flexibly adjusted, and a circuit for connecting a test device by a tester is convenient;

the electron beam self-heating sample stage provided by the utility model can be provided with the U-shaped groove with a certain length, and after the U-shaped groove is matched with the fixing screw, the scanning electron microscope with different base sizes can be flexibly adapted by adjusting the position of the fixing screw in the U-shaped groove.

Drawings

The utility model and its features, aspects and advantages will become more apparent from the detailed description of non-limiting embodiments with reference to the following drawings. Like numbers refer to like parts throughout. The drawings are not intended to be drawn to scale, emphasis instead being placed upon illustrating the principles of the utility model.

FIG. 1 is a schematic view of the electron beam self-heating sample stage according to embodiment 1 of the present utility model;

fig. 2 is a schematic structural view of a base of the electron beam self-heating sample stage according to embodiment 1 of the present utility model;

FIG. 3 is a front view and a top view of a base of the electron beam self-heating sample stage according to embodiment 1 of the present utility model;

fig. 4 is a schematic view of the structure of a sample support of the electron beam self-heating sample stage according to embodiment 1 of the present utility model;

FIG. 5 is a three view of a sample support for an electron beam self-heating sample stage provided in example 1 of the present utility model;

the figure shows: 1-base, 2-sample supporting bench, 3-base main part, 4-bracket, 5-sample platform, 6-connecting column, (7-1, 7-2) -through-hole, (8-1, 8-2, 8-3) -U type groove, 9-sample clamping component, (9-1, 9-2) -spring leaf, 10-stiff end, 11-clamping end, (12-1, 12-2) -nut, 13-sample to be measured.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is evident that the described embodiments are only some, but not all embodiments of the present utility model. Accordingly, the following detailed description of the embodiments of the utility model, as presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be made by a person skilled in the art without making any inventive effort, are intended to fall within the scope of the present utility model.

In the description of the present utility model, it should be noted that, if terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like are used, the indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, only for convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the indicated apparatus or element must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

In the description of the present utility model, it should be noted that unless explicitly stated and limited otherwise, the terms "mounted," "connected," and "connected" should be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; the two components can be mechanically connected, can be directly connected or can be indirectly connected through an intermediate medium, and can be communicated with each other. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

Example 1:

fig. 1 is a schematic structural diagram of an electron beam self-heating sample stage provided in this embodiment, including a base 1 and a sample support 2, in which some structures are not shown.

Fig. 2 is a schematic structural view of a base 1 of the electron beam self-heating sample stage according to the present embodiment, and fig. 3 is a front view and a top view thereof, in which some structures are not shown. The base 1 comprises a hollow base body 3 and a hollow bracket 4 which is connected with the inner wall of the base body 3 and extends along a direction single side perpendicular to the base body 1.

Fig. 4 is a schematic structural view of a sample support 2 of the electron beam self-heating sample stage according to the present embodiment, and fig. 5 is a three-dimensional view thereof, in which some structures are not shown. The sample supporting table 2 is of a hollow structure and comprises a hollow sample table 5 and a hollow connecting upright post 6, wherein the connecting upright post 6 is arranged at the bottom of the sample table 5; the bracket 4 is sleeved outside the connecting upright post 6; the base body 3, the connecting column 6 and the hollow portion of the sample stage 5 form a passage through which the electron beam passes.

In the technical solution of the present utility model, the cross section of the channel formed by the base body 3, the connecting upright post 6 and the hollow portion of the sample stage 5 for passing the electron beam may be circular, that is, the base body 3 is provided with an annular structure, and correspondingly, the cross sections of the bracket 4, the sample stage 5 and the connecting upright post are all annular. In some embodiments, the optimal working distance between the probe for receiving backscattered electrons and secondary electrons of the scanning electron microscope and the sample 13 to be measured is 10mm and 15mm. In order to avoid electrons reflected by the base from striking the sample suspended measurement thermal bridge, the suspended thermal bridge is not provided with an electric field, so that the path of the electrons reflected is not longer. Therefore, the distance between the base and the sample suspension heat bridge is more than or equal to 20mm and less than or equal to 30mm, namely the length of a channel for the electron beam to pass through is more than or equal to 15mm and less than or equal to 30mm; the cross-sectional size of the channel depends on the suspended area of the sample to be measured. In the embodiment, the suspended area of the sample 13 to be tested is a rectangle of 0.2mm×1mm, and in order to facilitate the convenience of aligning holes in the test and assembly process, the diameter of the cross-section circle of the passage through which the electron beam passes should be greater than or equal to 2mm, and in the embodiment, set to 5mm; and the length of the channel is set to 30mm. The above arrangement ensures that the electron beam is not blocked from scattering as it passes through the channel.

In the technical scheme of the utility model, the bracket 4 is nested outside the connecting upright post 6. For ease of assembly, in this embodiment the outer diameter of the connecting post 6 is slightly smaller than the inner diameter of the bracket 4, and for nesting, the difference between the outer diameter of the connecting post 6 and the inner diameter of the bracket 4 is typically between 0.04 and 0.1 mm.

In the technical scheme of the utility model, the height of the bracket 4 is consistent with the height of the connecting upright post 6, so that when the bracket 4 and the connecting upright post 6 are nested together, the lower surface of the sample table 5 can be contacted with the bracket 4, the contact area is increased, and the stability of the sample table 5 in the test process is maintained.

In the technical scheme of the utility model, the electron beam self-heating sample stage further comprises a fastening component for fastening and connecting the upright post 6 and the bracket 4; in this embodiment, the fastening assembly comprises a fastening screw (not shown in the figures); two through holes 7-1 and 7-2 are arranged on the side wall of the bracket 4, the fastening screw is arranged in the two through holes, and the cylindrical end of the fastening screw is abutted with the side face of the connecting upright post 6. In the present utility model, the connecting upright 6 and the bracket 4 can be reinforced by providing the fastening assembly, thereby improving the stability of the test process. In the present embodiment, the through holes 7-1 and 7-2 are symmetrically distributed with respect to the axis of the bracket 4, and the height is at half the height of the bracket 4. In other embodiments, the through holes may be provided in a plurality, and the height thereof may be one third to two thirds of the height of the bracket 4.

In the technical scheme of the utility model, three U-shaped grooves 8-1, 8-2 and 8-3 are formed in the side face of the base main body 3, and in this embodiment, the U-shaped grooves 8-1, 8-2 and 8-3 are symmetrically distributed relative to the circle center of the base main body 4, and fixing screws (not shown in the figure) can be embedded in each U-shaped groove. In the test process, the electron beam self-heating platform provided by the utility model is assembled and fixed with the base of the scanning electron microscope through the fixing screw in the U-shaped groove, and the position of the fixing screw in the U-shaped groove is adjusted, so that the electron beam self-heating platform can be flexibly suitable for the scanning electron microscope without a size base. In other embodiments, the U-shaped slot may be provided in 2 or more.

In the technical scheme of the utility model, as shown in fig. 4, a sample clamping component 9 can be arranged on the upper surface of the sample stage 5 on the electron beam self-heating platform; in this embodiment, the sample clamping assembly 9 is an elastic assembly, and includes a spring piece 9-1 and a spring piece 9-2; each leaf spring has a fixed end 10 and a clamping end 11; the fixed end is fixed on the upper surface of the sample stage 5 through nuts 12-1 and 12-2, and the clamping end 11 abuts against the sample 13 to be tested carried on the sample stage 5 along the direction perpendicular to the upper surface of the sample stage 5. The spring pieces 9-1 and 9-2 are symmetrically distributed with respect to the center of the upper surface of the sample stage 5. In the utility model, the upper surface of the sample stage 5 is used for carrying the sample 13 to be measured, and in order to fix the sample 13 to be measured, an elastic component such as a spring piece can be adopted, so that one end of the elastic component is fixed on the upper surface of the sample stage 5, and the other end can apply pressure to the sample 13 to be measured towards the sample stage 5, thereby fixing the sample to be measured. In other embodiments, the spring plate may be provided in 3 or more groups.

The assembly and testing process of the electron beam self-heating sample stage in this embodiment is as follows:

(1) Aligning three U-shaped grooves formed in the base main body 3 with three screw holes formed in a sample stage base of the Siemens flight Apreo2S scanning electron microscope, and fixing by using three M2.5 socket head cap screws;

(2) The connecting upright post 6 is inserted into the hollow bracket 4 on the base 1, and after the proper position is adjusted by rotating the supporting table 2, the sample supporting table 2 and the base 1 are fixed by using a hexagon socket end set screw; thus, the base body 3, the connecting column 6 and the hollow portion of the sample stage 5 form a passage through which the electron beam passes;

(3) Placing a sample 13 to be tested, namely an integrated circuit tube seat testing device with a hole in the middle, on the upper surface of the sample table 5, aligning the middle hole of the integrated circuit tube seat testing device with the hollow part of the sample table, adjusting a nut on the upper surface of the sample table, and fixing the sample 13 to be tested by using a spring clamp;

(4) The sample 13 to be tested is connected to a testing instrument through the electric wire conversion in the scanning electron microscope;

(5) After the scanning electron microscope is vacuumized, opening an electron beam, adjusting the position of a sample to be tested, and focusing the scanning electron microscope sample;

(6) Opening an external test instrument: two sets of current source tables Keithley6221 and two sets of lock-in amplifiers SRS830 are used for measuring resistance change of a temperature detector of the suspended heat bridge device;

(7) And linearly scanning the sample to be measured, and simultaneously measuring the resistance change of the temperature detector of the suspended thermal bridge device.

And after the test is finished, carrying out data analysis on the information acquired in the process.

The foregoing is only a preferred embodiment of the utility model, it being noted that: it will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the principles of the present utility model, and such modifications and adaptations are intended to be comprehended within the scope of the utility model.

Claims (10)

1. An electron beam self-heating sample stage is characterized by comprising a base and a sample supporting stage; the base comprises a hollow base main body and a hollow bracket which is connected with the inner wall of the base main body and extends along a direction which is vertical to the base main body at one side; the sample supporting table is of a hollow structure and comprises a hollow sample table and a hollow connecting upright post, and the connecting upright post is arranged at the bottom of the sample table; the bracket is sleeved on the outer side of the connecting upright post; the base main body, the connecting upright post and the hollow part of the sample table form a channel for passing electron beams.

2. The electron beam self-heating sample stage according to claim 1, wherein the cross section of the channel is circular;

preferably, the diameter of the circular section is more than or equal to 2mm and less than or equal to 5mm;

preferably, the length of the channel is equal to or greater than 20mm and equal to or less than 30mm.

3. The electron beam self-heating sample stage according to claim 1, wherein the brackets are nested outside the connecting posts;

preferably, the height of the bracket is identical to the height of the connecting upright.

4. The electron beam self-heating sample stage of claim 1, further comprising a fastening assembly for fastening the connecting stud and bracket.

5. The electron beam self-heating sample stage according to claim 4, wherein the fastening assembly comprises a fastening screw; the side wall of the bracket is provided with at least two through holes, the fastening screw is arranged in the through holes, and the cylindrical end of the fastening screw is abutted with the side face of the connecting upright post.

6. The electron beam self-heating sample stage according to claim 5, wherein the at least two through holes are symmetrically distributed with respect to an axis of the bracket;

preferably, the height of the at least two through holes is between one third and two thirds of the height of the bracket;

preferably, the fastening screw is a hexagon socket end fastening screw.

7. The electron beam self-heating sample stage according to claim 1, wherein at least two U-shaped grooves are formed in the side surface of the base body;

preferably, the at least two U-shaped grooves are symmetrically distributed;

preferably, a fixing screw is arranged in the U-shaped groove.

8. The electron beam self-heating sample stage according to claim 1, further comprising a sample clamping assembly disposed on an upper surface of the sample stage.

9. The electron beam self-heating sample stage according to claim 8, wherein the sample clamping assembly is an elastic assembly; the elastic component comprises a fixed end and a clamping end; the fixed end is fixed on the upper surface of the sample table through a nut, and the clamping end abuts against the sample to be tested carried on the sample table along the direction perpendicular to the upper surface of the sample table.

10. The electron beam self-heating sample stage according to claim 9, wherein the sample clamping assembly comprises at least two sets of elastic assemblies;

preferably, the at least two groups of elastic components are symmetrically distributed;

preferably, the elastic component is a spring piece.

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