CN219221448U - Vacuum structure and equipment for testing high vacuum gate valve - Google Patents
Vacuum structure and equipment for testing high vacuum gate valve Download PDFInfo
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- CN219221448U CN219221448U CN202320737571.8U CN202320737571U CN219221448U CN 219221448 U CN219221448 U CN 219221448U CN 202320737571 U CN202320737571 U CN 202320737571U CN 219221448 U CN219221448 U CN 219221448U
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Abstract
The application discloses a vacuum structure and equipment for testing a high vacuum gate valve, wherein the vacuum structure comprises a top, a bottom, a first side, a second side, a third side and a fourth side which are respectively and hermetically connected with a frame to form a cavity and a valve plate, and the top is provided with at least one through hole for a piston rod of the high vacuum gate valve to be tested to pass through; the first side surface is provided with a test notch, the third side surface is provided with a vacuumizing connecting hole, and the valve plate is used for sealing the test notch; the valve plate is provided with a connecting hole connected with the piston rod. Before the high vacuum valve is installed after maintenance, the vacuum cavity is used for providing a simulated installation environment, so that the tightness of the high vacuum valve can be simulated and tested, and the sealing performance of the high vacuum valve to the air outlet of the process cavity can be simulated and tested.
Description
Technical Field
The application relates to the technical field of semiconductors, in particular to a vacuum structure and equipment for testing a high-vacuum door valve.
Background
The high vacuum gate valve is used for realizing high vacuum isolation and small-range pressure control of a process cavity in the physical vapor deposition equipment.
The gate valve structure typically includes a valve plate for mating with the gas outlet of the process chamber and a valve plate control mechanism that causes the valve plate to Open the gas outlet (i.e., open Position), close the gas outlet (i.e., closed Position), or partially close the gas outlet (i.e., intermediate Position) by controlling the Position of the valve plate.
When the high vacuum door valve (such as SMC high vacuum XGT200-30-1A-X5S parallel sealing type door valve) is disassembled, and the parts are replaced, even if the same maintenance position is used, the same torque locking screw is used, but because parts of different batches are different, when the opening and closing angle of the door valve is confirmed to reach the standard by using a vernier caliper in the prior art, the measurement result is different each time, and the yield of maintenance products cannot be ensured.
Failure to ensure the yield of the maintained high vacuum gate valve often results in the sealing performance of the maintained high vacuum gate valve and unstable sealing performance of the high vacuum gate valve on the air outlet of the process chamber after the high vacuum gate valve is installed.
Disclosure of Invention
In view of the above, the application provides a vacuum structure for testing a high vacuum valve, wherein after the high vacuum valve is maintained and before the high vacuum valve is put on the machine, a simulated on-machine environment is provided by using the vacuum cavity, so that the tightness of the high vacuum valve can be simulated and tested, and the sealing performance of the high vacuum valve to an air outlet of a process cavity can be simulated and tested; the technical scheme adopted is as follows:
the vacuum structure for testing the high vacuum gate valve comprises a top, a bottom, a first side, a second side, a third side and a fourth side which are respectively and hermetically connected with a frame to form a cavity and a valve plate, wherein the top is provided with a through hole for a piston rod of the high vacuum gate valve to be tested to pass through, the bottom is provided with a first visual window, and the first visual window is sealed by a transparent plate; the first side face is provided with a test notch, the third side face is provided with a vacuumizing connecting hole, the first side face is close to one side of the through hole, the first side face is opposite to the third side face in position, and the valve plate is used for sealing the test notch; the valve plate is provided with a connecting hole connected with the piston rod; the valve plate is consistent with the valve plate in the physical vapor deposition equipment, which is used for closing and opening the air outlet of the process cavity.
Preferably, the size of the valve plate is larger than the size of the test notch; further preferably, the test notch corresponds to an air outlet of the process chamber, and the size of the test notch is consistent with the size of the air outlet of the process chamber of the physical vapor deposition device.
The valve plate is used for sealing the test notch from the inside of the cavity, and can also seal the test notch from the outside of the cavity.
Preferably, the third side is provided with a second visual window, the second visual window is L-shaped and is a space for vacuumizing connection Kong Liuchu, and the second visual window is sealed by a transparent plate.
Preferably, at least one of the second side surface and the fourth side surface is provided with a third visual window, and the third visual window is sealed by a transparent plate.
Preferably, the transparent plate is an acrylic plate, and the thickness of the acrylic plate is 3-4 cm. The acrylic plate seals the cavity through the fastening screw and the sealing ring.
Preferably, avoidance notches are formed in the inner side of the first side face, and the number of the avoidance notches is consistent with that of the through holes.
Preferably, the valve plate is provided with a sealing ring sealed with the first side surface.
The application still provides high vacuum valve test equipment, including this application high vacuum valve test vacuum structure, still include helium mass spectrum leak detector, helium mass spectrum leak detector's vacuum system with evacuation connecting hole sealing connection.
The beneficial effects of this application: before the high vacuum valve is installed after maintenance, the vacuum cavity is used for providing a simulated installation environment, so that the tightness of the high vacuum valve can be simulated and tested, and the sealing performance of the high vacuum valve to the air outlet of the process cavity can be simulated and tested.
Drawings
FIG. 1 is a schematic diagram of a vacuum structure for testing a high vacuum gate valve according to the first embodiment;
FIG. 2 is a schematic diagram of a vacuum structure for testing a high vacuum gate valve according to the second embodiment;
FIG. 3 is a schematic diagram III of a vacuum structure for testing a high vacuum gate valve according to the present application;
FIG. 4 is a schematic diagram of a first assembly structure of the valve and the valve for testing a valve for a high vacuum (a sealing plate without a second visible window);
FIG. 5 is a schematic diagram II of an assembly structure of the high vacuum gate valve and the vacuum structure for testing the high vacuum gate valve according to the present application;
fig. 6 is a schematic diagram of an assembly structure of the high vacuum gate valve and the vacuum structure for testing the high vacuum gate valve according to the present application.
In the figure: 1. top, 2, through-hole, 3, fourth side, 4, evacuation connecting hole, 5, bottom, 6, second side, 7, third side, 8, first side, 9, test breach, 10, valve plate, 11, piston rod, 12, high vacuum gate valve, 13, cavity.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Example 1
Vacuum structure for testing high vacuum gate valve
The application is further described with reference to fig. 1 to 3, and the vacuum structure for testing the high vacuum door valve comprises a top 1, a bottom 5, a first side 8, a second side 6, a third side 7 and a fourth side 3, which are respectively and hermetically connected with a frame to form a cavity 13, and a valve plate 10, wherein the top 1 is provided with a through hole 2 for a piston rod 11 of the high vacuum door valve to be tested to pass through, the bottom 5 is provided with a first visual window, and the first visual window is sealed by a transparent plate; the first side surface 8 is provided with a test notch 9, the third side surface 7 is provided with a vacuumizing connecting hole 4, the first side surface 8 is close to one side of the through hole 2, the first side surface 8 is opposite to the third side surface 7 in position, and the valve plate 10 is used for sealing the test notch 9; the valve plate 10 is provided with a connection hole to which the piston rod 11 is connected.
The valve plate is used for closing and opening the air outlet of the process cavity in the physical vapor deposition equipment, the size of the valve plate is larger than that of the test notch, the test notch corresponds to the air outlet of the process cavity, and the size of the test notch is consistent with that of the air outlet of the process cavity.
Referring to fig. 1, the third side 7 is provided with a second visual window, which is L-shaped and leaves a space for the vacuum connection hole 4, and the second visual window is sealed by a transparent plate.
In order to facilitate the observation of the conditions inside the chamber, at least one of the second side 6 and the fourth side 3 is provided with a third visual window, and the third visual window is sealed by a transparent plate.
In this embodiment, the transparent plate is an acrylic plate, the thickness of the acrylic plate is 3-4 cm, and the thickness of the acrylic plate is related to the vacuum degree pumped in the chamber 13; when the thickness of the acrylic plate is less than or equal to 1cm, the acrylic plate is easy to deform when vacuumizing is carried out. The acrylic plate closes the chamber 13 by means of a fastening screw and a sealing ring.
In order to facilitate the operation of the piston rod 11 of the high-vacuum door valve 12, avoidance notches are formed in the inner side of the first side surface 8, the number of the avoidance notches is consistent with that of the through holes, and the size of the avoidance notches is matched with that of the through holes.
In this embodiment, the number of the piston rods 11 is 2, and the piston rods are symmetrically arranged.
The valve plate 10 is provided with a sealing ring for sealing with the first side surface 8, and the valve plate 10 has a symmetrical structure.
The through holes 2 are conical holes, so that the sealing ring is convenient to seal.
Example 2
Equipment for testing high vacuum gate valve
In addition to the high vacuum gate valve test vacuum structure of example 1, a helium mass spectrometer leak detector is also included, and the vacuum system of the helium mass spectrometer leak detector is in sealing connection with the vacuumizing connection hole 4.
The vacuum structure for testing the high vacuum gate valve is matched with a helium mass spectrometer leak detector, so that the working performance of the maintained high vacuum gate valve (such as SMC high vacuum XGT200-30-1A-X5S parallel sealing gate valve) in a high vacuum environment can be tested; the specific test method is as follows:
the top 1, the bottom 5, the first side 8, the second side 6, the third side 7 and the fourth side 3 are respectively and hermetically connected with a frame to form a cavity 13, the vacuumizing connecting hole 4 is hermetically connected with a helium mass spectrometer leak detector, a piston rod 11 of the high vacuum gate valve penetrates through a through hole 2 at the bottom and seals the through hole 2 through a sealing ring, a valve plate 10 is connected to the lower end of the piston rod 11, and the high vacuum gate valve is controlled to be in a closed position, namely, the piston rod extends out, so that the valve plate 10 is sealed from the inside of the cavity 13 to the test notch 9; by means of the helium mass spectrometer leak detector, adopting a vacuum injection method to detect leak, injecting helium gas outside a cavity to face the periphery of the test notch 9, and detecting whether the high vacuum gate valve can normally realize closing under a vacuum environment; the piston rod 11 of the high vacuum door valve can be retracted (opened) and then extended (closed), repeated detection is carried out for a plurality of times, and the reliability of the detection result is ensured; if helium gas leaks in the test notch 9, the high vacuum gate valve cannot be normally closed, the fit clearance of the maintenance position is reduced, and the test is performed again until no leakage is detected.
Claims (8)
1. Vacuum structure is used in high vacuum door valve test, its characterized in that: the high-vacuum door valve comprises a cavity formed by respectively and hermetically connecting a top, a bottom, a first side, a second side, a third side and a fourth side with a frame, and a valve plate, wherein the top is provided with at least one through hole for a piston rod of the high-vacuum door valve to be tested to pass through, the bottom is provided with a first visual window, and the first visual window is sealed by a transparent plate; the first side face is provided with a test notch, the third side face is provided with a vacuumizing connecting hole, the first side face is close to one side of the through hole, the first side face is opposite to the third side face in position, and the valve plate is used for sealing the test notch; the valve plate is provided with a connecting hole connected with the piston rod, and the valve plate is consistent with the valve plate used for closing and opening the air outlet of the process cavity in the physical vapor deposition equipment in size.
2. The vacuum structure for testing a high vacuum gate valve according to claim 1, wherein: the size of the valve plate is larger than the size of the test notch.
3. The vacuum structure for testing a high vacuum gate valve according to claim 2, wherein: the size of the test notch is consistent with the size of the air outlet of the process cavity of the physical vapor deposition equipment.
4. The vacuum structure for testing a high vacuum gate valve according to claim 1, wherein: the third side is provided with a second visual window, the second visual window is L-shaped, and the second visual window is sealed through a transparent plate.
5. The vacuum structure for testing a high vacuum gate valve according to claim 1, wherein: at least one of the second side surface and the fourth side surface is provided with a third visual window which is sealed by a transparent plate.
6. The vacuum structure for testing a high vacuum gate valve according to any one of claims 1 to 5, wherein: the transparent plate adopts an acrylic plate, and the thickness of the acrylic plate is 3-4 cm.
7. The vacuum structure for testing a high vacuum gate valve according to claim 1, wherein: the inner side of the first side is provided with avoidance notches, and the number of the avoidance notches is consistent with that of the through holes.
8. High vacuum door valve test equipment, its characterized in that: a vacuum structure for high vacuum gate valve testing comprising the high vacuum gate valve of claim 1, further comprising a helium mass spectrometer leak detector, a vacuum system of the helium mass spectrometer leak detector being sealingly connected to the evacuated connection aperture.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320737571.8U CN219221448U (en) | 2023-04-06 | 2023-04-06 | Vacuum structure and equipment for testing high vacuum gate valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320737571.8U CN219221448U (en) | 2023-04-06 | 2023-04-06 | Vacuum structure and equipment for testing high vacuum gate valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219221448U true CN219221448U (en) | 2023-06-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320737571.8U Active CN219221448U (en) | 2023-04-06 | 2023-04-06 | Vacuum structure and equipment for testing high vacuum gate valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219221448U (en) |
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2023
- 2023-04-06 CN CN202320737571.8U patent/CN219221448U/en active Active
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