CN218795056U - Photoresist resin production tail gas processing apparatus - Google Patents
Photoresist resin production tail gas processing apparatus Download PDFInfo
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- CN218795056U CN218795056U CN202223316009.2U CN202223316009U CN218795056U CN 218795056 U CN218795056 U CN 218795056U CN 202223316009 U CN202223316009 U CN 202223316009U CN 218795056 U CN218795056 U CN 218795056U
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Abstract
The utility model discloses a photoresist resin production tail gas processing apparatus relates to production exhaust-gas treatment equipment field, and it includes dust removal filter, treatment tower, exhaust apparatus and waste water recovery device. The dust removal filter comprises a shell, a filter main body and a dust collection barrel which are arranged in the shell, and a pneumatic back-blowing device which is arranged on the shell, wherein the shell comprises an air inlet, an air outlet and a dust collection port, the filter main body is positioned between the air inlet and the air outlet, the dust collection port is positioned at one end, close to the air outlet, of the shell and is arranged towards the dust collection barrel, and the pneumatic back-blowing device is positioned at one end, away from the dust collection port, of the shell; the treatment tower comprises a tower body communicated with the air outlet, an active carbon block arranged in the tower body, a nozzle arranged in the tower body and positioned below the active carbon block, and a diversion assembly arranged below the nozzle. The utility model discloses a photoresist resin production tail gas processing apparatus can handle dust, acid-base material and organic waste in the tail gas simultaneously, effectively reduces tail gas to atmospheric pollution degree.
Description
Technical Field
The utility model relates to a production waste gas treatment facility field, concretely relates to photoresist resin production tail gas processing apparatus.
Background
The photoresist resin synthesis tail gas contains organic waste gas, acid-base waste gas, dust-containing waste gas and the like, and corresponding tail gas treatment equipment needs to be configured for tail gas purification treatment in the production process.
Tail gas treatment devices in the related art can only treat organic waste gas, acid-base waste gas, dust-containing waste gas and the like singly, that is, purification equipment for industrial acid-base gas, organic gas and dust-containing gas is usually independent and separated treatment equipment, for example, most of organic gas adopts activated carbon adsorption treatment equipment, acid-base gas adopts a washing tower, and dust-containing waste gas adopts a dust remover. However, each processing device is independent and separated, and the requirement that one reaction kettle or a dry filter can not discharge waste gas with various properties simultaneously in the synthetic process of the photoresist resin is met, and meanwhile, a plurality of independent devices connected in sequence occupy relatively large space.
In summary, the inventor is realizing the technical scheme of the utility model, finds that the following technical problems exist in the existing tail gas treatment device:
the existing tail gas treatment device is difficult to treat waste gas with various properties in the tail gas, and the independently separated treatment equipment occupies larger space when treating the tail gas generated by photoresist resin synthesis.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
The utility model provides a photoresist resin production tail gas processing apparatus solves the difficult technical problem that current tail gas treatment facility can not handle the tail gas of a gas vent discharge multiple nature simultaneously at least, can improve the treatment effeciency of photoresist resin production tail gas.
(II) technical scheme
In order to solve the technical problem, the utility model provides a following technical scheme:
a photoresist resin production tail gas processing apparatus includes:
the dust removal filter comprises a shell, a filter main body and a dust collection barrel which are arranged in the shell, and a pneumatic back-blowing device which is arranged on the shell, wherein the shell comprises an air inlet, an air outlet and a dust collection port, the filter main body is positioned between the air inlet and the air outlet, the dust collection port is positioned at one end, close to the air outlet, of the shell and is arranged towards the dust collection barrel, and the pneumatic back-blowing device is positioned at one end, away from the dust collection port, of the shell;
the treatment tower comprises a tower body communicated with the air outlet, an active carbon block arranged in the tower body, a nozzle arranged in the tower body and positioned below the active carbon block, and a diversion assembly arranged below the nozzle, wherein the diversion assembly comprises a support plate and a diversion part arranged on the support plate, and the diversion part comprises a diversion channel; the tower body comprises an exhaust port;
the exhaust device is connected with the exhaust port;
and the wastewater recovery device is arranged at the bottom of the tower body and is connected with the nozzle.
In the further scheme that sets up, the filter main part includes the support and crosses the filter bag, be equipped with the trepanning in the support, cross the filter bag cover and locate the trepanning in to including towards the opening that the dust collection mouth set up and towards the return air inlet of pneumatic blowback device, opening and air inlet intercommunication.
In a further set scheme, the pneumatic back-blowing device comprises a pneumatic back-blowing valve and a pressure difference switch connected with the pneumatic back-blowing valve, and the pneumatic back-blowing valve faces the air return opening.
In the further scheme, the number of the flow guide assemblies is at least two, the flow guide assemblies are arranged in a vertically layered mode, the treatment tower further comprises a redistribution device located between the flow guide assemblies, and the redistribution device is connected with the spray nozzle.
In the further arrangement scheme, the flow guide element comprises an outer ring body and an inner ring body connected to the inner side of the outer ring body, the outer ring body and the inner ring body are concentrically arranged, and the end face of the inner ring body is positioned in the outer ring body; the flow guide channels are formed between the outer ring body and the inner ring body and on the inner side of the inner ring body; the flow guide pieces are stacked.
In the scheme that further sets up, the water conservancy diversion spare is globular, and is hollow structure, the water conservancy diversion spare is equipped with the fretwork hole, form between the fretwork hole water conservancy diversion passageway.
In the further scheme, the tower further comprises a water mist eliminating plate positioned between the activated carbon block and the flow guide assembly, and the water mist eliminating plate is connected inside the tower body.
In the scheme of further setting, exhaust apparatus includes that two connect in parallel and be connected with the gas vent acid and alkali-resistance fan.
In the further scheme that sets up, waste water recovery unit sprays the pump including the acid and alkali-resistance that connects in the collecting box of tower body bottom, is connected and parallelly connected the setting with the collecting box, acid and alkali-resistance sprays the pump and is connected with the nozzle.
(III) advantageous effects
Compared with the prior art, the utility model provides a photoresist resin production tail gas processing apparatus possesses following beneficial effect:
when the device for treating tail gas generated in the production of photoresist resin works, tail gas with various properties generated in the production process of photoresist resin enters the dust removal filter from the gas inlet, the filter body is used for filtering and removing dust from the tail gas, the filtered tail gas enters the treatment tower from the gas outlet, the nozzle is used for spraying treatment liquid to carry out acid-base treatment on the tail gas, the flow guide assembly is used for guiding the treatment liquid in the process, the tail gas after the acid-base treatment enters the active carbon block to be adsorbed by organic wastes, and finally the tail gas is discharged from the gas outlet through the exhaust device; after the dust removal filter is used for a period of time, the pneumatic back-blowing device can introduce back-blowing airflow to back-blow the filter body for ash removal, and dust is discharged into the dust collection barrel from the dust collection port; meanwhile, the waste water recovery device can collect waste water in the tower body and convey the waste water to the nozzle for spraying again. Can find out, the utility model discloses a photoresist resin production tail gas processing apparatus can handle dust, acid-base material and organic waste in the tail gas simultaneously, effectively reduces tail gas to atmospheric pollution degree, reduces equipment occupation space.
Drawings
FIG. 1 is a schematic view of an apparatus for treating an exhaust gas from production of a photoresist resin in an embodiment;
FIG. 2 is a schematic view of a dust removing filter in the embodiment;
FIG. 3 is a schematic view of a treating tower in the example;
fig. 4 is a schematic view of a flow guide member in the embodiment.
Reference numerals:
the dust removal filter comprises a dust removal filter 1, a shell 11, a filter main body 12, a dust collection barrel 13, a pneumatic back-blowing device 14, an opening 101, a back-blowing opening 102, an air inlet 111, an air outlet 112, a dust collection opening 113, a support 121, a filter bag 122, a pneumatic back-blowing valve 141 and a pressure difference switch 142;
the device comprises a treatment tower 2, a tower body 21, an activated carbon block 22, a nozzle 23, a flow guide assembly 24, a water mist elimination plate 25, an outer ring body 201, an inner ring body 202, an exhaust port 210, a support plate 241 and a flow guide piece 242;
the exhaust device 3, the acid and alkali resistant fan 31 and the pressure control indicator 32;
a wastewater recovery device 4, a collection box 41 and an acid and alkali resistant spray pump 42.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention.
The existing tail gas treatment device is difficult to treat waste gas with various properties in the tail gas, and the independently separated treatment equipment occupies larger space when treating the tail gas generated by photoresist resin synthesis.
To solve the above problems, referring to fig. 1, 2 and 3, fig. 1 is a schematic diagram of an apparatus for treating an exhaust gas from photoresist resin production in an embodiment, fig. 2 is a schematic diagram of a dust removal filter in an embodiment, and fig. 3 is a schematic diagram of a treatment tower in an embodiment.
The embodiment provides a photoresist resin production tail gas processing apparatus, includes: a dust removal filter 1, a treatment tower 2, an exhaust device 3 and a waste water recovery device 4.
The dust removing filter 1 is used for filtering dust pollutants in the tail gas; the shell 11 is used as a mounting carrier of the filter body 12, the dust collecting barrel 13 and the pneumatic back-blowing device 14; the filter body 12 is for filtering exhaust gas, and may be a bag filter; the pneumatic back-blowing device 14 is used for introducing a back-blowing airflow, which flows from the output end to the input end of the filter body 12, i.e. flows in the reverse direction, so that the dust integrated in the filter body 12 can be blown out in the reverse direction and discharged to the dust collecting barrel 13 through the integrated port.
The treatment tower 2 comprises a tower body 21, an active carbon block 22, a nozzle 23 and a diversion assembly 24, wherein the tower body 21 is communicated with the air outlet 112, the active carbon block 22 is arranged in the tower body 21, the nozzle 23 is arranged in the tower body 21 and is positioned below the active carbon block 22, the diversion assembly 24 is arranged below the nozzle 23, the diversion assembly 24 comprises a support plate 241 and a diversion piece 242 arranged on the support plate 241, and the diversion piece 242 comprises a diversion channel; the tower body 21 includes an exhaust port 210.
The treatment tower 2 is used for treating acid-base substances and organic wastes in tail gas, the tower body 21 is used as an installation carrier of the activated carbon block 22, the nozzle 23 and the diversion assembly 24 and forms a treatment cavity, the tail gas is introduced into the tower body 21 through the gas outlet 112, and the tower body 21 can be provided with an observation window; the nozzle 23 is used for spraying treatment liquid, the treatment liquid can neutralize acid and alkali substances, and the nozzle 23 can be a spiral nozzle 23 and is arranged on a mounting rack inside the tower body 21; the diversion assembly 24 is used for diverting the treatment liquid and prolonging the flow path of the treatment liquid as much as possible through the diversion channel so that the treatment liquid can fully treat acid-base substances in the tail gas; the activated carbon block 22 may be received and fixed on the top of the tower 21 through a basket, etc. for adsorbing organic waste in the exhaust gas, and of course, the activated carbon block 22 may be equivalently replaced by activated carbon powder or activated carbon particles.
The exhaust unit 3 is connected to the exhaust port 210.
The exhaust device 3 is used for leading the tail gas treated by the treatment tower 2 out of the exhaust port 210, and may be a fan.
And the waste water recovery device 4 is arranged at the bottom of the tower body 21 and is connected with the nozzle 23.
The wastewater recovery device 4 is used for recovering the treatment liquid sprayed from the nozzle 23 and returning the treatment liquid to the nozzle 23 for recycling, and may include a booster pump, and the treatment liquid is supplied from the bottom of the tower 21 to the nozzle 23 by the power of the booster pump.
When the device for treating tail gas generated in the production of the photoresist resin in the technical scheme works, tail gas with various properties generated in the production process of the photoresist resin enters the dust removal filter 1 from the gas inlet 111, the filter main body 12 filters and removes dust of the tail gas, the filtered tail gas enters the treatment tower 2 from the gas outlet 112, the nozzle 23 sprays treatment liquid to carry out acid-base treatment on the tail gas, the flow guide assembly 24 guides the treatment liquid in the process, the tail gas after the acid-base treatment enters the active carbon block 22 to be adsorbed with organic wastes, and finally the tail gas is discharged from the gas outlet 210 through the exhaust device 3; after the dust removing filter 1 is used for a period of time, the pneumatic back-blowing device 14 can introduce back-blowing airflow to back-blow the filter main body 12 for ash removal, and dust is discharged into the dust collecting barrel 13 from the dust collecting port 113; meanwhile, the wastewater recovery device 4 can collect wastewater in the tower body 21 and convey the wastewater into the nozzle 23 to be sprayed again. It can be seen that the utility model discloses a photoresist resin production tail gas processing apparatus can handle dust, acid-base material and organic waste in the tail gas simultaneously, effectively reduces tail gas to atmospheric pollution degree, reduces equipment occupation space.
In one embodiment of the filter body 12, the filter body 12 includes a support frame 121 and a filter bag 122, a sleeve hole is provided in the support frame 121, the filter bag 122 is sleeved in the sleeve hole, the end portion of the filter bag is fixed relative to the support frame 121, and includes an opening 101 disposed toward the dust collecting port 113 and an air return port 102 disposed toward the pneumatic back-blowing device 14, the opening 101 is communicated with the air inlet 111, the sleeve hole and the filter bag 122 can be disposed in multiple groups, the filter bag 122 is a mesh bag with filter holes, and the air return port 102 can be a tapered hole; when the tail gas is subjected to dust removal and filtration, the tail gas firstly enters the filter bag 122 from the opening 101, is filtered by the filter bag 122 and then is discharged from the gas outlet 112; when the pneumatic back-blowing device 14 is in operation, the back-blowing air flows through the air return opening 102 and enters the filter bag 122. The filter main body 12 according to this embodiment has a simple structure, and can realize the exhaust gas dust removal processing and the self-cleaning function of the filter bag 122.
In an embodiment of the pneumatic back-blowing device 14, the pneumatic back-blowing device 14 includes a pneumatic back-blowing valve 141 and a pressure difference switch 142 connected to the pneumatic back-blowing valve 141, the pneumatic back-blowing valve 141 is connected to an air source such as an air pump and is disposed toward the air return opening 102, the pressure difference switch 142 is used for detecting an internal and external pressure difference of the filter bag 122, but when the pressure difference reaches a preset value, it indicates that a certain amount of dust has been accumulated in the filter bag 122, and at this time, the pneumatic back-blowing valve 141 is opened and a back-blowing airflow is introduced to back-blow and clean the filter bag 122.
In order to improve the treatment efficiency of the treatment liquid on the tail gas, the number of the guide assemblies 24 is at least two, the guide assemblies 24 are arranged in an up-down layered manner, the treatment tower 2 further comprises a redistribution device positioned between the guide assemblies 24, and the redistribution device is connected with the nozzle 23 and can be a pipeline for distributing the treatment liquid.
Referring to fig. 4, fig. 4 is a schematic view of an embodiment of the fluid guiding element, wherein the fluid guiding element 242 may be a ring structure, and includes an outer ring 201 and an inner ring 202 connected to the inner side of the outer ring 201, the outer ring 201 and the inner ring 202 are concentrically disposed, and an end surface of the inner ring 202 is located inside the outer ring 201; flow guide channels are formed between the outer ring body 201 and the inner ring body 202 and inside the inner ring body 202; the flow guides 242 are stacked one on another. So, the area of contact of treatment fluid increase and tail gas in the water conservancy diversion passageway of annular structure, and then promote the treatment effect to tail gas.
In another embodiment of the flow guiding element 242, the flow guiding element 242 is spherical and has a hollow structure, and the flow guiding element 242 has hollow holes, and a flow guiding channel is formed between the hollow holes. The sphere and the fretwork hole piece can increase the area of contact of treatment fluid and tail gas, and then promote the treatment effect to tail gas.
The above two diversion members 242 can be applied to the treatment tower 2 simultaneously, for example, the diversion member 24 at the upper end uses the hollow spherical diversion member 242, and the diversion member 24 at the lower end uses the annular diversion member 242.
In order to reduce the moisture content in the tail gas, the treatment device further comprises a water mist elimination plate 25 positioned between the activated carbon block 22 and the diversion assembly 24, wherein the water mist elimination plate 25 is connected inside the tower body 21 and used for eliminating water mist in the tail gas after acid and alkali treatment by the treatment liquid, and further the treatment efficiency of the activated carbon block 22 on the organic waste in the tail gas is improved.
In one embodiment of the exhaust means 3, the exhaust means 3 comprises two acid and alkali resistant fans 31 arranged in parallel and connected to the exhaust port 210. The acid-base blower may be connected to the exhaust port 210 through a pipe, and the pipe may further be provided with a pressure control indicator 32 for indicating a control pressure. Exhaust apparatus 3 under this embodiment can effectively guarantee carminative reliability through parallelly connected acid and alkali-resistance fan 31, and when one acid and alkali-resistance fan 31 shut down promptly, other acid and alkali-resistance fan 31 can continue to work, and acid and alkali-resistance fan 31 can effectively be suitable for tail gas.
In one embodiment of the wastewater recovery device 4, the wastewater recovery device 4 comprises a collection box 41 connected to the bottom of the tower body 21, and an acid and alkali resistant spray pump 42 connected to the collection box 41 and connected in parallel, wherein the acid and alkali resistant spray pump 42 is connected to the nozzle 23. Wherein, the collection box 41 can be accessed to municipal tap water and is provided with a pH meter and a liquid level transmitter. The wastewater recovery device 4 in this embodiment can collect the wastewater of the treatment solution at the bottom of the tower body 21 through the collection box 41, and then the wastewater is driven by the acid and alkali resistant spray pump 42 to be sent into the nozzle 23 again for spraying, so that the cyclic utilization of the treatment solution is realized.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (9)
1. The utility model provides a photoresist resin production tail gas processing apparatus which characterized in that includes:
the dust removal filter comprises a shell, a filter main body and a dust collection barrel which are arranged in the shell, and a pneumatic back-blowing device which is arranged on the shell, wherein the shell comprises an air inlet, an air outlet and a dust collection port, the filter main body is positioned between the air inlet and the air outlet, the dust collection port is positioned at one end, close to the air outlet, of the shell and is arranged towards the dust collection barrel, and the pneumatic back-blowing device is positioned at one end, away from the dust collection port, of the shell;
the treatment tower comprises a tower body communicated with the air outlet, an active carbon block arranged in the tower body, a nozzle arranged in the tower body and positioned below the active carbon block, and a diversion assembly arranged below the nozzle, wherein the diversion assembly comprises a support plate and a diversion part arranged on the support plate, and the diversion part comprises a diversion channel; the tower body comprises an exhaust port;
the exhaust device is connected with the exhaust port;
and the waste water recovery device is arranged at the bottom of the tower body and is connected with the nozzle.
2. The apparatus of claim 1, wherein the filter body comprises a support and a filter bag, the support is provided with a hole, the filter bag is sleeved in the hole and comprises an opening facing the dust collection port and an air return port facing the pneumatic back-blowing device, and the opening is communicated with the air inlet.
3. The apparatus of claim 2, wherein the pneumatic back-flushing device comprises a pneumatic back-flushing valve and a pressure difference switch connected to the pneumatic back-flushing valve, and the pneumatic back-flushing valve is disposed toward the air return opening.
4. The apparatus of claim 1, wherein the number of the flow guiding assemblies is at least two, and the flow guiding assemblies are arranged in an up-down layer, and the treatment tower further comprises a redistribution device arranged between the flow guiding assemblies, and the redistribution device is connected with the nozzle.
5. The apparatus for treating the exhaust gas from the production of photoresist resin according to claim 1, wherein the flow guide member comprises an outer ring and an inner ring connected to the inner side of the outer ring, the outer ring and the inner ring are concentrically arranged, and the end surface of the inner ring is located inside the outer ring; the flow guide channels are formed between the outer ring body and the inner ring body and inside the inner ring body; the flow guide pieces are stacked.
6. The apparatus according to claim 1, wherein the flow guide member is spherical and has a hollow structure, and the flow guide member has hollow holes, and the flow guide channel is formed between the hollow holes.
7. The apparatus of claim 1, further comprising a water mist elimination plate positioned between the activated carbon block and the diversion assembly, the water mist elimination plate being connected to the interior of the tower body.
8. The apparatus of claim 1, wherein the exhaust apparatus comprises two acid and alkali resistant fans connected in parallel and connected to the exhaust port.
9. The apparatus of claim 1, wherein the wastewater recovery unit comprises a collection tank connected to the bottom of the tower body, and an acid and alkali resistant spray pump connected to the collection tank and connected in parallel, wherein the acid and alkali resistant spray pump is connected to the spray nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223316009.2U CN218795056U (en) | 2022-12-09 | 2022-12-09 | Photoresist resin production tail gas processing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223316009.2U CN218795056U (en) | 2022-12-09 | 2022-12-09 | Photoresist resin production tail gas processing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218795056U true CN218795056U (en) | 2023-04-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223316009.2U Active CN218795056U (en) | 2022-12-09 | 2022-12-09 | Photoresist resin production tail gas processing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218795056U (en) |
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2022
- 2022-12-09 CN CN202223316009.2U patent/CN218795056U/en active Active
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