CN218755530U - Antistatic cutting protection sticky tape - Google Patents
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- CN218755530U CN218755530U CN202222869620.1U CN202222869620U CN218755530U CN 218755530 U CN218755530 U CN 218755530U CN 202222869620 U CN202222869620 U CN 202222869620U CN 218755530 U CN218755530 U CN 218755530U
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Abstract
Description
技术领域technical field
本实用新型涉及保护胶带技术领域,具体涉及一种抗静电的切割保护胶带。The utility model relates to the technical field of protective tapes, in particular to an antistatic cutting protective tape.
背景技术Background technique
随着科学技术的发展,胶带在各领域的应用都非常广泛,如芯片产业、电子类产品、家电、建材、装饰材料等。特别是芯片产业,在芯片制造过程中有晶圆扩晶、切割等工序,在此工序中需要一种醒目有效识别,且柔韧性好,无硅转移,能保护晶圆不受物理损伤的保护胶带。但是由于胶带本身的特性,会带有一定的静电,使得基材表面吸附有灰尘或其它粒子,影响其后续的加工使用,甚至可能在加工过程中击穿晶圆,对晶圆造成损坏,进而影响相关器件的使用寿命。With the development of science and technology, tapes are widely used in various fields, such as chip industry, electronic products, home appliances, building materials, decorative materials, etc. Especially in the chip industry, there are processes such as wafer expansion and cutting in the chip manufacturing process. In this process, a kind of eye-catching and effective identification is required, and it has good flexibility, no silicon transfer, and can protect the wafer from physical damage. adhesive tape. However, due to the characteristics of the tape itself, there will be a certain amount of static electricity, which will cause dust or other particles to be adsorbed on the surface of the substrate, which will affect its subsequent processing and use, and may even break down the wafer during processing, causing damage to the wafer. affect the service life of related devices.
现有的抗静电胶带通常采用单层抗静电结构,并且抗静电值只能满足一般电子工业领域的要求。专利CN210765104U公开了一种半导体晶圆封装膜,其通过将TPU胶层和抗静电UV粘合层结合,可避免切割时芯片易崩角和飞片的问题。其虽然含有抗静电UV粘合层,但是其胶层的粘结力有限。Existing antistatic tapes usually adopt a single-layer antistatic structure, and the antistatic value can only meet the requirements of the general electronics industry. Patent CN210765104U discloses a semiconductor wafer packaging film, which can avoid the problems of easy chipping and flying chips during cutting by combining a TPU adhesive layer and an antistatic UV adhesive layer. Although it contains an antistatic UV adhesive layer, the adhesive force of the adhesive layer is limited.
因此,研发出一种具有极佳的抗静电性、扩张性、抗拉伸、耐老化且安全环保的保护胶带是当前的市场需求。Therefore, it is a current market demand to develop a protective tape with excellent antistatic properties, expansibility, stretch resistance, aging resistance, safety and environmental protection.
实用新型内容Utility model content
为了解决上述问题,本实用新型第一个方面提供了一种抗静电的切割保护胶带,其特征在于,所述保护胶带由上至下包括基材膜层、胶黏剂层、底材膜层;所述胶黏剂层位于基材膜层和底材膜层之间;所述基材膜层和底材膜层通过胶黏剂层粘接。In order to solve the above problems, the first aspect of the utility model provides an antistatic cutting protective tape, which is characterized in that the protective tape includes a base film layer, an adhesive layer, and a base film layer from top to bottom. The adhesive layer is located between the substrate film layer and the substrate film layer; the substrate film layer and the substrate film layer are bonded by the adhesive layer.
作为本实用新型一种优选的技术方案,所述基材膜层的厚度为25-200微米。As a preferred technical solution of the present invention, the thickness of the substrate film layer is 25-200 microns.
进一步优选的,所述基材膜层的厚度为50-100微米。Further preferably, the thickness of the substrate film layer is 50-100 microns.
进一步优选的,所述基材膜层的厚度为70-80微米Further preferably, the thickness of the substrate film layer is 70-80 microns
进一步优选的,所述基材膜层的厚度为75微米。Further preferably, the thickness of the substrate film layer is 75 microns.
为提高胶带的稳定性、机械强度等性能,限定所使用的基材膜层的厚度与材料,从而使胶带保持优异的稳定性和机械性能,便于后续的加工使用。若基材膜层太厚,不易于后续加工使用,但若基材膜层太薄,则容易出现破损等问题。In order to improve the stability, mechanical strength and other properties of the tape, the thickness and material of the substrate film layer used are limited, so that the tape maintains excellent stability and mechanical properties, which is convenient for subsequent processing and use. If the substrate film layer is too thick, it is not easy for subsequent processing and use, but if the substrate film layer is too thin, problems such as damage are prone to occur.
作为本实用新型一种优选的技术方案,所述基材膜层上表面涂覆有功能涂层,所述功能涂层为第一抗静电涂层。As a preferred technical solution of the present invention, the upper surface of the substrate film layer is coated with a functional coating, and the functional coating is a first antistatic coating.
在基材膜层上涂覆有特定的抗静电涂层,该涂层能吸收掉产品和材料表面的水分,与静电产生中和,从而产生抗静电的效果。并且不会影响基材膜层本身的稳定性和抗拉伸等机械性能。The substrate film layer is coated with a specific antistatic coating, which can absorb moisture on the surface of products and materials, and neutralize static electricity, thereby producing an antistatic effect. And it will not affect the stability of the substrate film itself and mechanical properties such as tensile resistance.
作为本实用新型一种优选的技术方案,所述底材膜层的厚度为25-75微米。As a preferred technical solution of the present invention, the thickness of the substrate film layer is 25-75 microns.
进一步优选的,所述底材膜层的厚度为40-60微米。Further preferably, the thickness of the substrate film layer is 40-60 microns.
进一步优选的,所述底材膜层的厚度为50微米。Further preferably, the thickness of the substrate film layer is 50 microns.
本实用新型使用特定的底材膜层厚度和膜材料,使其能更好的保存,延长胶带的使用期限。The utility model uses a specific substrate film thickness and film material, so that it can be better preserved and prolongs the service life of the adhesive tape.
作为本实用新型一种优选的技术方案,所述底材膜层下表面涂覆有功能涂层,所述功能涂层为第二抗静电涂层。As a preferred technical solution of the present invention, the lower surface of the substrate film layer is coated with a functional coating, and the functional coating is a second antistatic coating.
作为本实用新型一种优选的技术方案,所述胶黏剂的厚度为5-150微米。As a preferred technical solution of the present invention, the thickness of the adhesive is 5-150 microns.
进一步优选的,所述胶黏剂层的厚度为20-100微米。Further preferably, the adhesive layer has a thickness of 20-100 microns.
进一步优选的,所述胶黏剂层的厚度为30-70微米。Further preferably, the adhesive layer has a thickness of 30-70 microns.
进一步优选的,所述胶黏剂层的厚度为40微米。Further preferably, the thickness of the adhesive layer is 40 microns.
通过限定胶黏剂层的厚度和材料,控制胶黏剂的用量,从而提高材料的粘结性能,并且避免在使用时胶黏剂溢出、减少残胶。并且所述胶黏剂为抗静电胶黏剂,使用时不仅有优异的粘结性能,同时与第一抗静电涂层、第二抗静电涂层综合作用,具有优异的抗静电效果。By limiting the thickness and material of the adhesive layer, the amount of adhesive is controlled, thereby improving the bonding performance of the material, and avoiding the overflow of the adhesive during use and reducing the residual glue. In addition, the adhesive is an antistatic adhesive, which not only has excellent bonding performance when used, but also has an excellent antistatic effect when combined with the first antistatic coating and the second antistatic coating.
作为本实用新型一种优选的技术方案,所述胶黏剂层为抗静电胶黏剂。As a preferred technical solution of the present invention, the adhesive layer is an antistatic adhesive.
作为本实用新型一种优选的技术方案,所述底材膜层为PET膜。As a preferred technical solution of the present invention, the substrate film layer is a PET film.
作为本实用新型一种优选的技术方案,所述基材膜层为PVC基材膜、PO基材膜、PET基材膜、PEN基材膜中的任一种。As a preferred technical solution of the present invention, the base film layer is any one of PVC base film, PO base film, PET base film and PEN base film.
本实用新型与现有技术相比,具有以下有益效果:本实用新型的胶带使用特定厚度的基材膜层和底材膜层,并涂覆有抗静电涂层,在具有优异的稳定性、耐用性和抗拉伸等机械性能的同时,具有优异的抗稳定性。并且,使用抗静电胶黏剂层,并限定其特定的厚度,不仅具有粘结力强、无残胶的效果,同时与第一抗静电涂层、第二抗静电涂层综合作用,抗静电效果进一步增强,具有可观的市场应用前景。Compared with the prior art, the utility model has the following beneficial effects: the adhesive tape of the utility model uses a substrate film layer and a substrate film layer of a specific thickness, and is coated with an antistatic coating, which has excellent stability, It has excellent anti-stability while having mechanical properties such as durability and tensile resistance. Moreover, using the antistatic adhesive layer and limiting its specific thickness not only has the effect of strong adhesion and no glue residue, but also works together with the first antistatic coating and the second antistatic coating to achieve antistatic The effect is further enhanced, and has considerable market application prospects.
附图说明Description of drawings
为了更清楚地说明本实用新型实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本实用新型的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description These are only some embodiments of the utility model, and those skilled in the art can also obtain other drawings based on these drawings without creative work.
图1一种抗静电的切割保护胶带的示意图Figure 1 is a schematic diagram of an antistatic cutting protection tape
附图标记:1-第一抗静电涂层、2-基材膜层、3-胶黏剂层、4-底材膜层、5-第二抗静电涂层Reference signs: 1-first antistatic coating, 2-substrate film layer, 3-adhesive layer, 4-substrate film layer, 5-second antistatic coating
具体实施方式Detailed ways
以下通过具体实施方式说明本实用新型,但不局限于以下给出的具体实施例。The utility model is illustrated below through specific embodiments, but not limited to the specific examples given below.
实施例Example
实施例1Example 1
本实施例提供了一种抗静电的切割保护胶带,所述保护胶带由上至下包括第一抗静电涂层1、基材膜层2、胶黏剂层3、底材膜层4、第二抗静电涂层5。This embodiment provides an antistatic cutting protective tape, which includes a first
所述基材膜层厚度为75微米;所述底材膜层的厚度为50微米;所述胶黏剂层的厚度为40微米;所述胶黏剂层为抗静电胶黏剂。The thickness of the substrate film layer is 75 microns; the thickness of the substrate film layer is 50 microns; the thickness of the adhesive layer is 40 microns; the adhesive layer is an antistatic adhesive.
所述底材膜层为PET膜。The substrate film layer is a PET film.
所述基材膜层为PVC基材膜。The base film layer is a PVC base film.
实施例2Example 2
本实施例提供了一种抗静电的切割保护胶带,所述保护胶带由上至下包括第一抗静电涂层1、基材膜层2、胶黏剂层3、底材膜层4、第二抗静电涂层5。This embodiment provides an antistatic cutting protective tape, which includes a first
所述基材膜层厚度为70微米;所述底材膜层的厚度为40微米;所述胶黏剂层的厚度为30微米;所述胶黏剂层为抗静电胶黏剂。The thickness of the substrate film layer is 70 microns; the thickness of the substrate film layer is 40 microns; the thickness of the adhesive layer is 30 microns; the adhesive layer is an antistatic adhesive.
所述底材膜层为PET膜。The substrate film layer is a PET film.
所述基材膜层为PO基材膜。The substrate film layer is a PO substrate film.
实施例3Example 3
本实施例提供了一种抗静电的切割保护胶带,所述保护胶带由上至下包括第一抗静电涂层1、基材膜层2、胶黏剂层3、底材膜层4、第二抗静电涂层5。This embodiment provides an antistatic cutting protective tape, which includes a first
所述基材膜层厚度为80微米;所述底材膜层的厚度为60微米;所述胶黏剂层的厚度为60微米;所述胶黏剂层为抗静电胶黏剂。The thickness of the substrate film layer is 80 microns; the thickness of the substrate film layer is 60 microns; the thickness of the adhesive layer is 60 microns; the adhesive layer is an antistatic adhesive.
所述底材膜层为PET膜。The substrate film layer is a PET film.
所述基材膜层为PET基材膜。The base film layer is a PET base film.
对比例1Comparative example 1
对比例1提供了一种抗静电的切割保护胶带,对比例1与实施例1的区别在于,所述基材膜层厚度为30微米。Comparative Example 1 provides an antistatic cutting protection tape, the difference between Comparative Example 1 and Example 1 is that the thickness of the substrate film layer is 30 microns.
对比例2Comparative example 2
对比例2提供了一种抗静电的切割保护胶带,对比例1与实施例1的区别在于,所述基材膜层厚度为150微米。Comparative Example 2 provides an antistatic cutting protection tape. The difference between Comparative Example 1 and Example 1 is that the film thickness of the substrate is 150 microns.
对比例3Comparative example 3
对比例3提供了一种抗静电的切割保护胶带,对比例1与实施例1的区别在于,所述胶黏剂层的厚度为120微米。Comparative Example 3 provides an antistatic cutting protection tape. The difference between Comparative Example 1 and Example 1 is that the thickness of the adhesive layer is 120 microns.
对比例4Comparative example 4
对比例4提供了一种抗静电的切割保护胶带,对比例1与实施例1的区别在于,所述胶黏剂层的非抗静电胶黏剂。Comparative Example 4 provides an antistatic cutting protection tape. The difference between Comparative Example 1 and Example 1 lies in that the adhesive layer is non-antistatic adhesive.
性能评价performance evaluation
对实施例1-3、对比例1-3提供的具有抗静电的切割保护胶带贴在晶圆上,将晶圆传送至切割设备中进行切割,在切割完成后去除胶带,对切割工艺中有关晶圆是否出现裂痕或崩碎、传送过程中是否出现位移、掉落,及是否有残胶出现的现象进行记录,记录结果见表1。The antistatic dicing protection tape provided by Examples 1-3 and Comparative Examples 1-3 is attached to the wafer, and the wafer is sent to the cutting device for cutting, and the tape is removed after the cutting is completed. Record whether the wafer is cracked or broken, whether there is displacement or drop during the transfer process, and whether there is residual glue. The recording results are shown in Table 1.
表1Table 1
前述的实例仅是说明性的,用于解释本实用新型所述方法的一些特征。所附的权利要求旨在要求可以设想的尽可能广的范围,且本文所呈现的实施例仅是根据所有可能的实施例的组合的选择的实施方式的说明。因此,申请人的用意是所附的权利要求不被说明本实用新型的特征的示例的选择限制。在权利要求中所用的一些数值范围也包括了在其之内的子范围,这些范围中的变化也应在可能的情况下解释为被所附的权利要求覆盖。The foregoing examples are illustrative only, and are used to explain some features of the method described in the present invention. The appended claims are intended to claim the broadest scope conceivable and the embodiments presented herein are merely illustrations of selected implementations according to all possible combinations of embodiments. Accordingly, it is the Applicant's intent that the appended claims not be limited by the selection of examples illustrating the features of the invention. Certain numerical ranges used in the claims also include sub-ranges therein, and changes within these ranges should also be construed as being covered by the appended claims where possible.
Claims (10)
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