CN218711045U - Etching device - Google Patents

Abstract

An corrosion device is provided, which includes an upper frame and a lower frame, and the upper frame includes an upper front bar, an upper rear bar, an upper left bar, an upper right bar, a plurality of left vertical bars, a plurality of right vertical bars, a plurality of A left wire support and a plurality of right wire supports, each left wire support is used to provide wire support at the left end from the left, each right wire support is used to provide wire support at the right end from the right, the lower frame includes a lower front rod, lower rear rod, lower left rod, lower right rod, multiple front and rear supports, and multiple lower line supports; the adjacent two front and rear supports on the lower left rod are used to To provide point support or line support, the lower line support on the lower left pole is used to provide line support from the lower side at the left end; the adjacent two front and rear supports on the lower right pole are used to provide line support from the front and rear directions at the right end Provides point support or line support, the lower line support on the lower left pole is used to provide line support from the underside at the right end. Accordingly, it is possible to simultaneously etch a plurality of objects to be etched.

Description

corrosion device

technical field

The present disclosure relates to the field of surface treatment, and more particularly to an etching device.

Background technique

In crystal preparation, surface etching of raw ingots or prepared wafer ingots is often required, especially in batch-scale large-scale preparation processes. In order to adapt to the etching of large-scale prepared raw material ingots or prepared crystal ingots in the same etching bath, it is necessary to develop an etching device.

Utility model content

In view of the problems in the background technology, the purpose of the present disclosure is to provide an etching device, which can simultaneously etch raw material ingots or prepared crystal ingots in a large-scale production process, thereby improving the etching efficiency.

Thus, in some embodiments, an etching device includes an upper frame and a lower frame, the upper frame includes an upper front bar, an upper rear bar, an upper left bar, an upper right bar, a plurality of left vertical bars, a plurality of Right vertical bar, a plurality of left line supports and a plurality of right line supports, the upper front bar, the upper rear bar, the upper left bar and the upper right bar encircle a hollow rectangle, and the plurality of left vertical bars are vertical from the upper left bar Extending downwards, a plurality of left vertical bars are spaced apart from both ends of the upper left bar in the front and rear direction and the plurality of left vertical bars are spaced apart from each other in the front and rear direction to form a left opening penetrating in the left and right directions, and the plurality of right vertical bars Extending vertically downward from the upper right bar, each right vertical bar is aligned with a corresponding left vertical bar in the left-right direction, and a plurality of right vertical bars are spaced apart from the two ends of the upper right bar in the front-rear direction, and the plurality of right vertical bars are aligned along the The front and back directions are spaced apart from each other to form right openings penetrating in the left and right directions, each right opening is aligned with a corresponding left opening in the left and right directions, each left line support is arranged on a corresponding left vertical bar, and each left line supports The parts are used to provide line support for the corroded object from the left side at the left end of the corroded object. The right side provides wire support for the corroded object, and the lower frame includes the lower front rod, lower rear rod, lower left rod, lower right rod, multiple front and rear supports, and multiple lower wire supports; lower front rod, lower rear rod , the lower left rod and the lower right rod form a hollow rectangle, the lower front rod is located behind the upper front rod so that the upper front rod can be grasped by the operator without interference, and the lower rear rod is located in front relative to the upper rear rod so that the upper rear rod can be grasped by the operator. The rod is grasped by the operator without interference; the left side of the lower left rod is fixedly connected to the right side of the plurality of left vertical rods; the right side of the lower right rod is fixedly connected to the left side of the plurality of right vertical rods; A plurality of front and rear supports and a plurality of lower line supports are distributed on the upper surface of the lower left bar and the upper surface of the lower right bar in a manner that the front and rear supports and the lower line supports are alternately and spaced along the front and rear directions, and the upper surface of the lower left bar The front and rear support pieces correspond to a left opening and can communicate with the left and right sides corresponding to a left opening, the downline support piece on the lower left bar corresponds to a lower left bar, and the two adjacent front and rear support pieces on the lower left bar It is used to provide point support or line support for the corroded object from both sides of the front and rear direction at the left end of the corroded object, and the lower line support between two adjacent front and rear supports on the lower left bar is used to The left end of the object provides line support for the corroded object from the lower side; the front and rear supports on the lower right bar correspond to a right opening and can connect the left and right sides corresponding to a right opening, and the lower line supports on the lower right bar Corresponding to a lower right bar, the two adjacent front and rear supports on the lower right bar are used to provide point support or line support for the right end of the corroded object from both sides in the front and rear direction at the right end of the corroded object, and the lower left bar The lower line support between the two adjacent front and rear supports on the top is used to provide line support for the eroded object from the lower side at the right end of the eroded object.

In some embodiments, each left wire support is a triangular pyramid; each right wire support is a triangular pyramid.

In some embodiments, each front and rear support member is a cone, and the two opposite generatrices of the same diameter of the cone are used to provide point supports for two adjacent corroded objects at the front side and the rear side along the front-back direction.

In some embodiments, each front and rear support member is a polygonal pyramid, and the two radially opposite edges of the polygonal pyramid are used to provide wire support for the object to be corroded.

In some embodiments, the polygonal pyramids are triangular pyramids.

In some embodiments, the two edges of the triangular pyramid are respectively used to provide line supports for two adjacent corroded objects along the front side and the rear side of the front-back direction, and the other edge of the triangular pyramid is located on the side of the triangular pyramid. The inner side of the left and right directions of the two edges.

In some embodiments, the polygonal pyramid is a quadrangular pyramid, and the two diagonal edges of the quadrangular pyramid are used to respectively provide line support for two adjacent corroded objects along the front side and the rear side of the front-back direction.

In some embodiments, each front and rear support member is a cylinder, and two opposite generatrices of the same diameter of the cylinder are used to respectively provide line support for two adjacent corroded objects along the front and rear sides of the cylinder.

In some embodiments, the lower wire support is a triangular pyramid, and the top edge of the triangular pyramid is used to provide wire support for the corroded object from the lower side along the up-down direction.

In some embodiments, the corrosion device further includes a plurality of foot pads, and the plurality of foot pads are distributed under the lower front rod, the lower rear rod, the lower left rod, and the lower right rod and are spaced apart from each other.

The beneficial effects of the present disclosure are as follows: In the corrosion device, multiple corroded objects can be corroded at the same time, which improves the corrosion efficiency, and makes good use of the raw material ingots or prepared ingots in the large-scale production process in the background art Corrosion of crystal ingots (same batch or different batches).

Description of drawings

FIG. 1 is an exploded view of an embodiment of an etching apparatus according to the present disclosure.

Fig. 2 is an assembled perspective view of Fig. 1, in which the object to be corroded is not shown.

Figure 3 is an assembled perspective view of an object being eroded.

4 is an assembled perspective view of another embodiment of an etching apparatus according to the present disclosure, with one object being eroded shown.

5 is an assembled perspective view of yet another embodiment of an etching apparatus according to the present disclosure, with one object being eroded shown.

6 is an assembled perspective view of yet another embodiment of an etching apparatus according to the present disclosure, with one object being eroded shown.

Wherein, the reference signs are explained as follows:

100 corrosion device 18 right wire support

D1 front and rear direction 19a left opening

D2 left and right direction 19b right opening

D3 up and down direction 2 lower frame

1 upper frame body 21 lower front rod

11 up front bar 22 down rear bar

12 upper back bar 23 lower left bar

13 up left bar 24 down right bar

14 upper right rod 25 front and rear support pieces

15 Left vertical rod 26 Bottom line support piece

16 right vertical bar 3 feet pad

17 left line support 200 corroded objects

Detailed ways

The drawings illustrate embodiments of the disclosure and it is to be understood that the disclosed embodiments are merely examples of the disclosure, which may be embodied in various forms and therefore specific details disclosed herein should not be construed as limiting. , but merely as a basis for the claims and as a representative basis for teaching one of ordinary skill in the art to variously employ the present disclosure.

It should be noted that, in this document, expressions such as up, down, left, right, front and back, which are used to describe the actions and configurations of the various parts of the etching device 100, are not absolute but relative directions, and when These expressions are suitable when the parts of the etching apparatus 100 are in the postures shown in the figure, but when these postures are changed, these directions should be interpreted differently corresponding to the changes in the postures.

Referring to FIGS. 1 to 6 , an etching device 100 includes an upper frame 1 and a lower frame 2 .

The upper frame body 1 includes an upper front bar 11, an upper rear bar 12, an upper left bar 13, an upper right bar 14, a plurality of left vertical bars 15, a plurality of right vertical bars 16, a plurality of left line supports 17 and a plurality of right The wire support 18, the upper front bar 11, the upper rear bar 12, the upper left bar 13 and the upper right bar 14 enclose a hollow rectangle. A plurality of left vertical bars 15 extend vertically downward from the upper left bar 13, the plurality of left vertical bars 15 are spaced apart from both ends of the upper left bar 13 in the front-rear direction D1 and the plurality of left vertical bars 15 are spaced apart from each other in the front-rear direction D1 to form a left opening 19a penetrating in the left-right direction D2. A plurality of right vertical bars 16 extend vertically downward from the upper right bar 14, and each right vertical bar 16 is aligned with a corresponding left vertical bar 15 in the left-right direction D2, and the front-rear direction of the plurality of right vertical bars 16 and the upper right bar 14 Both ends of D1 are spaced apart and a plurality of right vertical rods 16 are spaced apart from each other along the front-to-back direction D1 to form right openings 19b penetrating in the left-right direction D2, each right opening 19b and a corresponding left opening 19a in the left-right direction D2 align. Each left wire support 17 is disposed on a corresponding left vertical bar 15 , and each left wire support 17 is used to provide wire support for the eroded object 200 from the left side at the left end of the eroded object 200 . Each right wire support 18 is disposed on a corresponding right vertical bar 16 , and each right wire support 18 is used to provide wire support for the eroded object 200 from the right side at the right end of the eroded object 200 .

The lower frame body 2 includes a lower front bar 21 , a lower rear bar 22 , a lower left bar 23 , a lower right bar 24 , a plurality of front and rear supports 25 and a plurality of lower thread supports 26 .

The lower front bar 21 , the lower rear bar 22 , the lower left bar 23 and the lower right bar 24 form a hollow rectangle. The lower front bar 21 is located at the rear relative to the upper front bar 11 so that the upper front bar 11 can be grasped by the operator without interference, and the lower rear bar 22 is located in front of the upper rear bar 12 so that the upper rear bar 12 can be grasped by the operator without interference grip. The left side of the lower left bar 23 is fixedly connected with the right sides of the left vertical bars 15 . The right side of the lower right bar 24 is fixedly connected with the left side of the plurality of right vertical bars 16 . A plurality of front and rear support members 25 and a plurality of lower wire support members 26 are distributed on the upper surface of the lower left bar 23 and the lower right bar 24 in such a manner that the front and rear support members 25 and the lower wire support members 26 are alternately and spaced apart in the front and rear direction D1. On the surface. The front and rear support members 25 on the lower left bar 23 correspond to a left opening 19a and can communicate with the left and right sides of the corresponding left opening 19a. The lower thread support member 26 on the lower left bar 23 corresponds to a lower left bar 23, and The two adjacent front and rear supports 25 on the rod 23 are used to provide point support or line support for the corroded object 200 from both sides of the front and rear direction D1 at the left end of the corroded object 200, and the adjacent two on the lower left rod 23 The lower wire support 26 between the two front and rear supports 25 serves to provide wire support for the eroded object 200 from the lower side at the left end of the eroded object 200 . The front and rear support members 25 on the lower right rod 24 correspond to a right opening 19b and can communicate with the left and right sides of the corresponding right opening 19b. The two adjacent front and rear supports 25 on the rod 24 are used to provide point support or line support for the right end of the corroded object 200 from both sides of the front and rear direction D1 at the right end of the corroded object 200, and the lower left rod 23 on the The lower wire support 26 between adjacent two front and rear supports 25 is used to provide wire support for the eroded object 200 from the lower side at the right end of the eroded object 200 .

It should be noted that the etching device 100 will be placed in an etching solution tank (not shown) for etching operation during actual application. For example, the etching device 100 shown in FIGS. The liquid bath performs etching, whereby the entire surface of the object to be etched 200 is etched.

In the etching device 100, a plurality of objects to be etched can be etched simultaneously, which improves the etching efficiency, and makes good use of the raw material ingots or prepared crystal ingots (same batch or different batches) of corrosion.

As shown in Figures 3 to 6, the lower, left, front and rear sides of the corroded object 200 at the left end are supported by corresponding lines and/or points, and the corroded object 200 is supported at the lower, right The side, the front side and the rear side are supported by corresponding lines or points, so that the corroded object 200 is stably supported in the upper frame body 1 and the lower frame body 2. Due to the adoption of line supports and/or point supports, the corroded The supported area of the object 200 is small, and the corroded sufficiency of the corroded object 200 is improved.

In the corrosion device 100, the adjacent two left openings 19a at the left end of the object to be corroded 200 can allow the corrosion liquid in the corrosion liquid tank to pass through to contact the left end of the object to be corroded 200, and the corresponding openings at the right end of the object to be corroded 200 Adjacent to the two right openings 19b, the corrosion solution in the corrosion solution tank can pass through to contact the right end of the object to be corroded 200, that is to say, the left end of the object to be corroded 200 spans the two adjacent left openings 19a, and the object to be corroded 200 The right end of the right end spans the adjacent two right openings 19b, the adjacent two left openings 19a, the adjacent two right openings 19b and the lower front bar 21, the lower rear bar 22, the lower left bar 23 and the lower right bar 24. The hollow part is connected. This connected passage for the flow of the corrosive liquid improves the fluidity of the corrosive liquid, thereby improving the adequacy of the corrosion. In addition, the heat generated during the corrosion process will be accompanied by the entire connected corrosive liquid and the corrosive liquid tank. The wall of the groove can effectively dissipate heat.

In the corrosion device 100, the positions and lengths occupied by the left line support 17 and the right line support 18 can be properly adjusted according to the support stability, that is, the left line support 17 and the right line support 18 respectively cooperate with the corresponding front and rear The supporting member 25 is used to stabilize the corroded object 200 in an upright/close to upright posture.

In one example, as shown in FIGS. 1 to 6 , each left wire support 17 is a triangular pyramid; each right wire support 18 is a triangular pyramid.

In the corrosion device 100 , the height of the front and rear support members 25 is based on stably supporting the corroded object 200 so that the corroded object 200 is in an upright/close to upright posture.

In one example, as shown in FIGS. 1 to 3 , each front and rear support member 25 is a cone, and the opposite two generatrices of the same diameter of the cone are used for adjacent front and rear sides along the front and rear direction D1 respectively. Two corroded objects 200 provide point support.

In another example, as shown in FIGS. 4 and 5 , each front and rear support member 25 is a polygonal pyramid, and the two radially opposite edges of the polygonal pyramid are used to provide linear support for the object 200 to be eroded. Specifically, in FIG. 4 , the polygonal pyramid is a quadrangular pyramid, and the two edges on the diagonal of the quadrangular pyramid are used to provide linear support for two adjacent corroded objects 200 along the front and rear sides of the front-back direction D1 respectively. . In Fig. 5, the polygonal pyramid is a triangular pyramid. The two edges of the triangular pyramid are respectively used to provide line supports for the two adjacent corroded objects 200 along the front side and the rear side of the front-back direction D1, and the other edge of the triangular pyramid is located between the two edges of the triangular pyramid. The inner side of D2 in the left-right direction.

In yet another example, as shown in FIG. 6 , each front and rear support member 25 is a cylinder, and the opposite two generatrixes of the same diameter of the cylinder are used for the front and rear sides of the front and rear direction D1 respectively to serve as two adjacent support members. The erosion object 200 provides wire support.

In the corrosion device 100, the distance between adjacent front and rear support members 25 can be set to allow the corroded object 200 to move slightly in the front and rear direction D1, and the distance between the left and right line support members 17 and 18 opposite to each other can be set To allow the corroded object 200 to be able to move slightly in the left-right direction D2, through the interval in the front-rear direction D1 and the interval in the left-right direction D2 set in this way, the operator grasps the upper front rod 11 and the upper rear rod 12 to shake during the corrosion process The corrosion device 100 makes the object to be corroded slightly move in the front-rear direction D1 and the left-right direction D2, so that the supporting positions in the front-rear direction D1 and the left-right direction D2 change, so that the corresponding surface of the corroded object 200 is corroded more fully.

In the corrosion device 100, the height of the lower wire support member 26 is lower than that of the front and rear support members 25, the height of the lower wire support member 26 on the lower left bar 23 is lower than the lower end of the left wire support member 17, and the upper end of the lower right bar 24. The height of the lower thread support member 26 is lower than the lower end of the right thread support member 18, so as to avoid interference in the structure and fully exert the corresponding thread support.

In one example, as shown in FIGS. 1 to 6 , the lower wire support member 26 is a triangular pyramid, and the top edge of the triangular pyramid is used to provide wire support for the corroded object 200 from the lower side along the up-down direction D3.

Referring to FIGS. 1 to 6 , the corrosion device 100 further includes a plurality of foot pads 3 distributed under the lower front rod 21 , the lower rear rod 22 , the lower left rod 23 and the lower right rod 24 and spaced apart from each other. A plurality of foot pads 3 increases the interval between the tank bottom of the corrosive liquid tank and the lower frame 2, and the distance between the plurality of foot pads 3 increases the radial inner corrosion liquid and the plurality of foot pads 3 3, the communication of the corrosive liquid on the radially outer side, so that the heat generated during the corrosion process in the corrosive liquid tank can be effectively dissipated along with the connected corrosive liquid and the tank wall of the corrosive liquid tank.

It should be noted that the materials of the upper frame 1 , the lower frame 2 and the foot pad 3 are all corrosion-resistant materials, such as but not limited to polypropylene.

It should be noted that, as shown in the figure, the eroded object 200 is a cuboid block, but it is not limited thereto, and may also be a cube block. The etched object 200 may be any suitable etched object, such as but not limited to a raw material block or a crystal block.

The above detailed description describes a number of exemplary embodiments, but there is no intention herein to be limited to the expressly disclosed combinations. Accordingly, unless otherwise stated, various features disclosed herein may be combined together to form additional combinations not shown for the sake of brevity.

Claims (10)

1. An etching device (100) is used for being placed in an etching solution tank for etching operation and is characterized by comprising an upper frame body (1) and a lower frame body (2),

the upper frame body (1) comprises an upper front rod (11), an upper rear rod (12), an upper left rod (13), an upper right rod (14), a plurality of left vertical rods (15), a plurality of right vertical rods (16), a plurality of left line supporting pieces (17) and a plurality of right line supporting pieces (18),

the upper front rod (11), the upper rear rod (12), the upper left rod (13) and the upper right rod (14) are enclosed into a hollow rectangle,

a plurality of left vertical bars (15) extending vertically downward from the upper left rod (13), the plurality of left vertical bars (15) being spaced apart from both ends of the upper left rod (13) in the front-rear direction (D1) and the plurality of left vertical bars (15) being spaced apart from each other in the front-rear direction (D1) to form a left opening (19 a) penetrating in the left-right direction (D2),

a plurality of right vertical bars (16) extending vertically downward from the upper right bar (14), each right vertical bar (16) being aligned with a corresponding one of the left vertical bars (15) in the left-right direction (D2), the plurality of right vertical bars (16) being spaced apart from both ends of the upper right bar (14) in the front-rear direction (D1) and the plurality of right vertical bars (16) being spaced apart from each other in the front-rear direction (D1) to form right openings (19 b) penetrating in the left-right direction (D2), each right opening (19 b) being aligned with a corresponding one of the left openings (19 a) in the left-right direction (D2),

each left wire support (17) is provided on a corresponding one of the left vertical rods (15), each left wire support (17) is used to provide wire support for the object to be corroded (200) from the left side at the left end of the object to be corroded (200),

each right wire support (18) is provided on a corresponding one of the right vertical bars (16), each right wire support (18) for providing wire support for the eroded object (200) from the right side at the right end of the eroded object (200),

the lower frame body (2) comprises a lower front rod (21), a lower rear rod (22), a lower left rod (23), a lower right rod (24), a plurality of front and rear supporting pieces (25) and a plurality of lower line supporting pieces (26);

the lower front rod (21), the lower rear rod (22), the lower left rod (23) and the lower right rod (24) enclose a hollow rectangle,

the lower front lever (21) is located rearward relative to the upper front lever (11) so that the upper front lever (11) is gripped by an operator without interference, and the lower rear lever (22) is located forward relative to the upper rear lever (12) so that the upper rear lever (12) is gripped by the operator without interference;

the left side surface of the lower left rod (23) is fixedly connected with the right side surfaces of the left vertical rods (15);

the right side surface of the lower right rod (24) is fixedly connected with the left side surfaces of the plurality of right vertical rods (16);

a plurality of front and rear supports (25) and a plurality of lower linear supports (26) are distributed on the upper surface of the lower left bar (23) and the upper surface of the lower right bar (24) in such a manner that the front and rear supports (25) and the lower linear supports (26) are alternately and spaced apart in the front-rear direction (D1),

the front and rear supports (25) on the lower left rod (23) correspond to one left opening (19 a) and enable the left and right sides of the corresponding one left opening (19 a) to communicate with each other, the lower line support (26) on the lower left rod (23) corresponds to one lower left rod (23), two adjacent front and rear supports (25) on the lower left rod (23) are used for providing point support or line support for the corroded object (200) from the front and rear direction (D1) sides at the left end of the corroded object (200), and the lower line support (26) between two adjacent front and rear supports (25) on the lower left rod (23) is used for providing line support for the corroded object (200) from the lower side at the left end of the corroded object (200);

the front and rear supports (25) on the lower right rod (24) correspond to one right opening (19 b) and enable the left and right sides of the corresponding one right opening (19 b) to communicate with each other, the lower line support (26) on the lower right rod (24) corresponds to one lower right rod (24), two adjacent front and rear supports (25) on the lower right rod (24) are used for providing point support or line support for the right end of the corroded object (200) from the two sides in the front-rear direction (D1) at the right end of the corroded object (200), and the lower line support (26) between two adjacent front and rear supports (25) on the lower left rod (23) is used for providing line support for the corroded object (200) from the lower side at the right end of the corroded object (200);

wherein the object (200) to be etched is a crystal block.

2. The etching apparatus according to claim 1,

each left line supporting piece (17) is a triangular pyramid;

each right line support (18) is a triangular pyramid.

3. The etching apparatus according to claim 1,

each of the front and rear supports (25) is a cone, and opposite generatrices of the same diameter of the cone are used for providing point support for the adjacent two corroded objects (200) along the front side and the rear side of the front and rear directions (D1).

4. The etching apparatus according to claim 1,

each of the front and rear supports (25) is a polygonal pyramid having two diametrically opposite edges for providing line support to the subject to be eroded (200).

5. The etching apparatus according to claim 4,

the polygonal pyramid is a triangular pyramid.

6. The etching apparatus according to claim 5,

two edges of the triangular pyramid are respectively used for providing line support for two adjacent corroded objects (200) along the front side and the rear side of the front-back direction (D1), and the other edge of the triangular pyramid is positioned at the inner side of the left-right direction (D2) of the two edges of the triangular pyramid.

7. The etching apparatus according to claim 4,

the polygonal pyramid is a rectangular pyramid, and two edges on a diagonal line of the rectangular pyramid are used for providing line support for two adjacent corroded objects (200) along a front side and a rear side of the front-rear direction (D1).

8. The etching apparatus according to claim 1,

each of the front and rear supports (25) is a cylindrical body, and two opposite generatrices of the same diameter of the cylindrical body are used for providing line support for the adjacent two corroded objects (200) along the front side and the rear side of the front and rear directions (D1).

9. The etching apparatus according to claim 1,

the lower line support (26) is a triangular pyramid whose top edge is used to provide line support for the object (200) to be eroded from the lower side in the up-down direction (D3).

10. The etching apparatus according to claim 1,

the corrosion device (100) further comprises a plurality of foot pads (3), wherein the foot pads (3) are distributed below the lower front rod (21), the lower rear rod (22), the lower left rod (23) and the lower right rod (24) and are spaced from each other.

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