CN217948240U

CN217948240U - Crucible coating device

Info

Publication number: CN217948240U
Application number: CN202221691613.0U
Authority: CN
Inventors: 蔡达; 徐安; 王亚晔; 关治军
Original assignee: Suzhou Victory Precision Manufacture Co Ltd
Current assignee: Suzhou Victory Precision Manufacture Co Ltd
Priority date: 2022-07-01
Filing date: 2022-07-01
Publication date: 2022-12-02
Anticipated expiration: 2032-07-01

Abstract

The utility model discloses a crucible coating device, include: the rotary table cooling mechanism comprises a rotary table and a driving assembly for driving the rotary table to rotate, a plurality of limiting grooves are formed in the rotary table, and cooling water flow channels are formed in the bottom of the limiting grooves on the rotary table; the plurality of boron nitride crucibles are respectively arranged in the corresponding limiting grooves, gaskets are arranged at the bottoms of the boron nitride crucibles, and gaps are reserved between the gaskets and the inner walls of the limiting grooves. The utility model provides a crucible coating device can improve crucible life, reduction in production cost.

Description

Crucible coating device

Technical Field

The utility model relates to the technical field of coating equipment, in particular to a crucible coating device.

Background

At present, an electronic gun of an evaporation machine is used for aluminizing, and the electronic gun is mainly used for boron nitride crucibles and graphite crucibles. The boron nitride crucible has the defects that the boron nitride crucible is cracked when being contacted with a copper disc cooling system during evaporation, and the cost of the boron nitride crucible is higher than that of other materials, so that the cracking is easy to cause the rise of the cost; the graphite crucible has the defects that the graphite crucible is used for about 2-3 times, the graphite crucible expands and cracks due to the permeation of aluminum, and the aluminum climbs to the outside of the crucible in severe cases, so that the loss of the aluminum material is synchronously increased; the coating devices can not plate thick in the same heat, so that some products can not be manufactured smoothly.

From the material, the graphite crucible can not be continuously and repeatedly coated for a long time; the boron nitride crucible can be repeatedly coated without contacting a cooling system, and the coating thickness is about 2 times of that of the graphite crucible.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a crucible coating device improves the life of crucible when guaranteeing coating thickness.

Based on the above problem, the utility model provides a technical scheme is:

a crucible coating apparatus comprising:

the rotary table cooling mechanism comprises a rotary table and a driving assembly for driving the rotary table to rotate, a plurality of limiting grooves are formed in the rotary table, and cooling water flow channels are formed in the bottom of the limiting grooves on the rotary table;

and the plurality of boron nitride crucibles are respectively arranged in the corresponding limiting grooves, and the bottoms of the boron nitride crucibles are provided with gaskets.

In some embodiments, the gasket is provided with a crucible limiting groove matched with the bottom of the boron nitride crucible.

In some embodiments, the crucible limiting groove penetrates from the upper end face to the lower end face of the gasket, and a supporting step for placing the boron nitride crucible is formed.

In some embodiments, a gap is formed between the gasket and the inner wall of the limiting groove, and the distance between the gasket and the inner wall of the limiting groove is 0.5-1 mm.

In some embodiments, the distance between the upper end of the boron nitride crucible and the inner wall of the limiting groove is 1.5-3 mm.

In some of these embodiments, the shim has a thickness of 3 to 5mm.

In some embodiments, the distance between the supporting step and the upper end face of the gasket is 1-2 mm.

In some embodiments, the turntable includes a turntable part and a pillar disposed at a lower end of the turntable part, the cooling water channel is disposed at a bottom of the turntable part, and the pillar is provided with a cooling water inlet and a cooling water outlet which are communicated to the cooling water channel.

In some embodiments, the driving assembly includes a motor, a driving wheel disposed at a power output end of the motor, a driven wheel disposed on the pillar, and a transmission belt connecting the driving wheel and the driven wheel.

In some embodiments, the plurality of limiting grooves are evenly distributed at intervals along the circumferential direction of the turntable.

Compared with the prior art, the utility model has the advantages that:

the use of the boron nitride crucible can improve the aluminized thickness of a single crucible, the gasket is arranged at the bottom of the boron nitride crucible, the cracking problem caused by the cold and hot temperature difference during evaporation after the contact between the boron nitride crucible and the turntable cooling system can be reduced, the service life of the crucible is prolonged, and the production cost is reduced while the product quality is improved.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the description of the embodiments are briefly introduced below, the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic structural view of an embodiment of a crucible coating device of the present invention;

fig. 2 is a top view of a turntable according to an embodiment of the present invention;

FIG. 3 is a view showing a state of placement of a boron nitride crucible according to an embodiment of the present invention;

fig. 4 is a schematic structural diagram of a gasket according to an embodiment of the present invention;

wherein:

1. a turntable; 1-1, a turntable part; 1-1a and a limiting groove; 1-1b, a cooling water flow channel; 1-2, a strut; 1-2a and a cooling water inlet; 1-2b and a cooling water outlet;

2. a boron nitride crucible;

3. a gasket; 3-1, crucible limiting grooves; 3-2, supporting a step;

4. a motor;

5. a driving wheel;

6. a driven wheel;

7. a transmission belt;

A. the distance between the gasket and the inner wall of the limiting groove;

B. the distance between the upper end of the crucible and the inner wall of the limiting groove;

C. the thickness of the gasket;

D. the distance between the supporting step and the upper end face of the gasket.

Detailed Description

The above-described scheme is further illustrated below with reference to specific examples. It should be understood that these examples are for illustrative purposes and are not intended to limit the scope of the present invention. The conditions used in the examples may be further adjusted according to the conditions of the particular manufacturer, and the conditions not specified are generally conditions used in routine experiments.

Referring to fig. 1 and 2, a schematic structural diagram of the embodiment of the present invention provides a crucible coating apparatus, which includes a turntable cooling mechanism and a plurality of boron nitride crucibles 2 disposed on the turntable cooling mechanism.

The turntable cooling mechanism comprises a turntable 1 and a driving assembly for driving the turntable 1 to rotate, the turntable 1 is a copper turntable, a plurality of limiting grooves 1-1a are formed in the turntable 1, the limiting grooves 1-1a are evenly distributed at intervals along the circumferential direction of the turntable 1, and cooling water flow channels 1-1b are formed in the bottom, located on the limiting grooves 1-1a, of the turntable 1.

Specifically, the turntable 1 comprises a turntable part 1-1 and a support 1-2 arranged at the lower end of the turntable part 1-1, a cooling water flow channel 1-1b is arranged at the bottom of the turntable part 1-1, a cooling water inlet 1-2a and a cooling water outlet 1-2b communicated with the cooling water flow channel 1-1b are arranged on the support 1-2, and cooling water is introduced into the cooling water flow channel 1-1b through the cooling water inlet 1-2a so as to cool the boron nitride crucible 2 of the turntable 1.

The driving assembly comprises a motor 4, a driving wheel 5 arranged at the power output end of the motor 4, a driven wheel 6 arranged on the support 1-2 and a transmission belt 7 connecting the driving wheel 5 and the driven wheel 6, the driving wheel 5 is driven by the motor 4 to rotate so as to drive the driven wheel 6 to rotate, and then the turntable part 1-1 is driven to rotate, so that the evaporation material in the boron nitride crucible 2 is rotated to the evaporation position of the electron gun for evaporation during evaporation operation.

Referring to fig. 3 and 4, a plurality of boron nitride crucibles 2 are respectively arranged in corresponding limiting grooves 1-1a, a gasket 3 is arranged at the bottom of each boron nitride crucible 2, a gap is formed between each gasket 3 and the inner wall of each limiting groove 1-1a, the gap is arranged to facilitate taking of the gasket 3, so that an isolation layer is formed between each boron nitride crucible 2 and the corresponding rotary table 1, contact between each boron nitride crucible 2 and the corresponding rotary table 1 is reduced, and further, the problem of cracking caused by cold and hot temperature difference during evaporation is reduced, preferably, the gasket 3 is a graphite gasket.

In order to limit the boron nitride crucible 2, a crucible limiting groove 3-1 matched with the bottom of the boron nitride crucible 2 is formed in the gasket 3, so that the boron nitride crucible 2 is prevented from sliding in the turntable 1 in the rotating process of the turntable 1, and the boron nitride crucible 2 is kept in the central position of the limiting groove 1-1 a.

Specifically, the crucible limiting groove 3-1 penetrates from the upper end face to the lower end face of the gasket 3, and a supporting step 3-1 for placing the boron nitride crucible 2 is formed, in this example, the distance a between the gasket 3 and the inner wall of the limiting groove 1-1a is 0.5-1 mm, the distance B (distance in the horizontal direction) between the upper end of the boron nitride crucible 2 and the inner wall of the limiting groove 1-1a is 1.5-3 mm, the thickness C of the gasket 3 is 3-5 mm, and the distance D between the supporting step 3-2 and the upper end face of the gasket 3 is 1-2 mm.

The utility model discloses a work engineering does:

firstly, placing a graphite gasket into a limiting groove, wherein a supporting step faces upwards; then, putting the boron nitride crucible into the graphite gasket, and confirming that the boron nitride crucible cannot be contacted with the turntable and is stable and immovable; finally, aluminum particles are added into the boron nitride crucible, and evaporation operation is carried out in a vacuum chamber.

The graphite gasket is arranged between the boron nitride crucible and the rotary table, so that the contact between the boron nitride crucible and the rotary table can be reduced, the cracking problem caused by the cold and hot temperature difference during evaporation is avoided, the thickness of the coating is protected, and the production cost is reduced.

The above-mentioned embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and the protection scope of the present invention cannot be limited thereby. All equivalent changes and modifications made according to the spirit of the present invention should be covered by the protection scope of the present invention.

Claims

1. A crucible coating device is characterized by comprising:

the rotary table cooling mechanism comprises a rotary table and a driving assembly for driving the rotary table to rotate, a plurality of limiting grooves are formed in the rotary table, and cooling water flow channels are formed in the bottom of the limiting grooves in the rotary table;

2. The crucible coater according to claim 1, wherein: and the gasket is provided with a crucible limiting groove matched with the bottom of the boron nitride crucible.

3. The crucible coater according to claim 2, wherein: the crucible limiting groove penetrates from the upper end face to the lower end face of the gasket, and a supporting step for placing the boron nitride crucible is formed.

4. The crucible coater according to claim 3, wherein: a gap is reserved between the gasket and the inner wall of the limiting groove, and the distance between the gasket and the inner wall of the limiting groove is 0.5-1 mm.

5. The crucible coater according to claim 3, wherein: the distance between the upper end of the boron nitride crucible and the inner wall of the limiting groove is 1.5-3 mm.

6. The crucible coater according to claim 3, wherein: the thickness of the gasket is 3-5 mm.

7. The crucible coater according to claim 3, wherein: the distance between the supporting step and the upper end face of the gasket is 1-2 mm.

8. The crucible coater according to claim 1, wherein: the rotary disc comprises a rotary disc part and a support arranged at the lower end of the rotary disc part, the cooling water flow channel is arranged at the bottom of the rotary disc part, and a cooling water inlet and a cooling water outlet communicated to the cooling water flow channel are formed in the support.

9. The crucible coater according to claim 8, wherein: the driving assembly comprises a motor, a driving wheel arranged at the power output end of the motor, a driven wheel arranged on the support column and a transmission belt connected with the driving wheel and the driven wheel.

10. The crucible coating device according to claim 1, wherein: the plurality of limiting grooves are evenly distributed at intervals along the circumferential direction of the rotary disc.