CN217776641U - Large-plane gantry type disc repairing machine - Google Patents

Abstract

The utility model relates to a semiconductor production facility technical field discloses a dish machine is repaiied to big plane planer-type, which comprises a frame, the seat is adjusted under the top fixedly connected with of frame, the inside threaded connection of seat has the angle modulation screw down, the surface threaded connection of angle modulation screw has fixation nut, the top of seat is adjusted down and is provided with the upper adjusting seat, the inside of adjusting the seat on is provided with the measuring head. The utility model has the advantages of it is following and effect: the crossbeam guide rail can be followed rotatory round pin at certain angle within range internal rotation, and the measuring head is the amesdial, and when the adjustment angle modulation screw, the amesdial is shown for the indicating value of adjustment, changes original cantilever structure and be both ends bearing structure, makes the overall stability of device obtain fundamental change, near distal end's deformation amount of deflection greatly reduced when repairing the dish, makes the lathe tool can not appear the shake phenomenon again, and the condition that equipment was beaten the sword no longer takes place easily, has improved the life of lathe tool greatly.

Description

Large-plane gantry type disc repairing machine

Technical Field

The utility model relates to a semiconductor production facility technical field, in particular to dish machine is repaiied to big plane planer-type.

Background

The semiconductor refers to a material with electric conductivity between a conductor and an insulator at normal temperature. Semiconductors are used in the fields of integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power conversion, and the like, and are very important for scientific and economic development.

The chemical mechanical polishing technology is the only technology which can realize the global planarization of the surface of the wafer in the integrated circuit manufacture at present, the final quality and cost of the chip are directly influenced by the chemical mechanical polishing effect, the semiconductor wafer is gradually planarized by combining the grinding of the grinding and polishing solution, because the disk surface is gradually consumed in the grinding process, after the disk surface is ground to a certain degree, the disk surface condition is changed, the disk surface of a lower disk is required to be trimmed, and the device for trimming the disk surface of the lower disk is a disk trimming machine.

In the actual use process, to ensure excellent disc repairing quality, the straightness stability of a guide rail and a guide rail arm of a disc repairing machine must be ensured, and the diameter of a lower disc of the conventional grinding equipment is about 2m to 3m, which means that in the actual disc repairing process, a cantilever of the disc repairing machine is maximally extended by about 1m, on one hand, the cantilever is overlong to naturally cause stress deformation of the cantilever, and on the other hand, the overlong cantilever also enables a disc repairing turning tool to shake, so that the quality of a remote disc repairing is poor; the repair turning tool is not damaged, and the service life of the tool is short; in addition, in the process of repairing the disc, the grinding disc cannot be repaired into a standard disc shape, such as an S-shaped disc shape or a concave-convex disc shape, due to the deformation difference of the cantilever at the far end and the near section of the cantilever.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a dish machine is repaiied to big plane planer-type has the overall stability that makes the dish machine of repairing and obtains fundamental change, and the deformation amount of deflection greatly reduced of nearly distal end when repairing the dish makes the effect of repairing the jigger sword and can not appear the shake phenomenon again.

The above technical purpose of the present invention can be achieved by the following technical solutions: the utility model provides a large plane planer-type repair dish machine, includes the frame, the top fixedly connected with of frame is adjusting the seat down, the inside threaded connection of adjusting the seat down has the angle modulation screw, the surface threaded connection of angle modulation screw has fixation nut, the top of adjusting the seat down is provided with adjusts the seat, the inside of adjusting the seat on is provided with the measuring head, the inside threaded connection of adjusting the seat on has the fixation screw, the top of adjusting the seat on is provided with the crossbeam guide rail, the surface of crossbeam guide rail is provided with removes mounting platform, the bottom of removing mounting platform is provided with the lathe tool, the one end of crossbeam guide rail is rotated and is connected with the swivel pin, a side of crossbeam guide rail is provided with servo motor, the bottom of crossbeam guide rail is provided with grinding device.

By adopting the technical scheme, when the disc repairing mechanism works specifically, the whole disc repairing mechanism can be moved to a proper position, the levelness of the beam guide rail is adjusted, the beam guide rail is kept parallel to a grinding platform of grinding equipment, then a special measuring tool is utilized to measure the surface flatness of the grinding equipment, a detailed disc repairing scheme is calculated and planned, the angle of the beam guide rail is adjusted to a proper disc repairing angle, after the adjustment is finished, specific disc repairing parameters such as feed amount, feed speed, lower disc rotating speed and the like can be set, finally the initial setting of all the parameters is checked, the disc repairing can be started, the beam guide rail is also a set of sliding guide rail, the movable mounting platform mounted on the sliding guide rail is driven by a servo motor, reciprocating motion can be controlled, when the angle modulation screw was made the adjustment, the crossbeam guide rail can be followed rotatory round pin at certain angle within range internal rotation, the measuring head is the amesdial, when adjusting the angle modulation screw, the amesdial shows for the indicating value of adjustment, change original cantilever structure and be both ends bearing structure, because the difference of its structural rigidity, make the overall stability of device obtain fundamental change, near distal end 'S deformation amount of deflection greatly reduced when repairing the dish, make the lathe tool can not appear the shake phenomenon again, the condition of equipment unclamping no longer takes place easily, the life of lathe tool has been improved greatly, near distal end' S stability is improved, make the disk face of repairing no longer appear S-shaped or concave-convex type.

The utility model discloses a further set up to: flexible groove has been seted up to the inner wall of frame, the inner wall fixedly connected with cylinder in flexible groove, the output fixedly connected with telescopic link of cylinder.

Through adopting above-mentioned technical scheme, the staff is repairing the dish and makes the actuating cylinder that can start for the telescopic link is at the outside extension of flexible groove.

The utility model discloses a further set up to: the one end fixedly connected with bellows of telescopic link, the bottom fixedly connected with slider of bellows, the bottom fixedly connected with spout of flexible inslot wall.

Through adopting above-mentioned technical scheme, the slider that drives bellows bottom slides in the spout, pushes out the flexible groove with bellows.

The utility model discloses a further set up to: the air box is characterized in that a fan is arranged inside the air box, an air inlet pipe is arranged on one side face of the fan, and an air outlet pipe is arranged at the top of the fan.

By adopting the technical scheme, the fan is started by a worker, and the fan runs inside to drive airflow to enter from the air inlet pipe and then blow out from the air outlet pipe.

The utility model discloses a further set up to: the outer surface of the air box is provided with an air inlet, and the top of the air box is fixedly connected with an air outlet cover.

Through adopting above-mentioned technical scheme, the air current blows from going out the fan housing, blows to the abrasive disc of grinding device to when repairing the dish or repair the dish after, cool down grinding device dispels the heat, avoid repairing a dish in-process and make the grinding device high temperature, can regain the flexible groove with bellows after the use.

The utility model discloses a further set up to: the number of the air boxes is two, and the outer surface of the sliding block is in sliding connection with the sliding groove.

Through adopting above-mentioned technical scheme, two bellows are bloied simultaneously, and under the rotation of grinding equipment, the area and the scope that make grinding equipment bottom receive the air current and blow are bigger.

The beneficial effects of the utility model are that:

1. the utility model can move the whole trimming disc mechanism to a proper position when in use and work particularly through the matching arrangement between the frame, the lower adjusting seat, the angle adjusting screw, the fixed nut, the upper adjusting seat, the measuring head, the fixed screw, the beam guide rail, the movable mounting platform, the turning tool, the rotating pin, the servo motor and the grinding equipment, the levelness of the beam guide rail is adjusted to ensure that the beam guide rail is parallel to the grinding platform of the grinding equipment, then the surface planeness of the grinding equipment is measured by using a special measuring tool to calculate and plan a detailed trimming disc scheme, the angle of the beam guide rail is adjusted to a proper trimming disc angle, and after the adjustment is finished, specific trimming disc parameters such as feed amount, feed speed, lower disc rotating speed and the like can be set, and the initial setting of all parameters is checked finally, can begin to implement and repair the dish, crossbeam guide rail self also is one set of sliding guide, install the removal mounting platform on sliding guide under servo motor ' S drive, reciprocating motion about can, when the adjustment is made to the angle modulation screw, crossbeam guide rail can follow rotatory round pin at certain angle within range internal rotation, the measuring head is the amesdial, when adjusting the angle modulation screw, the amesdial makes the demonstration for the adjustment, it is both ends bearing structure to change original cantilever structure, because the difference of its structural rigidity, make the overall stability of device obtain fundamental change, near distal end ' S deformation amount of deflection greatly reduced when repairing the dish, make the lathe tool can no longer appear the shake phenomenon, the condition that the equipment was beaten the sword is no longer easy to take place, the life of lathe tool has been improved greatly, near distal end ' S stability is improved, make the S-shaped or the dished type of finishing no longer appear.

2. The utility model discloses, through flexible groove, the cylinder, the telescopic link, bellows, the slider, the spout, the fan, the air-supply line, go out the tuber pipe, air intake and play cooperation setting between the fan housing, can make this device when using, the staff is repairing a set and makes the starting cylinder, make the telescopic link outwards extend at flexible groove, the slider that drives bellows bottom slides in the spout, release flexible groove with bellows, the staff starts the fan, fan inside operation driving air current gets into from the air-supply line, blow off from going out the tuber pipe again, the air current blows off from going out the fan housing, blow to the abrasive disc of grinding device, thereby repair when the dish or repair after the dish, cool down grinding device dispels the heat, avoid repairing a set in-process and make the grinding device high temperature, can withdraw flexible groove with bellows after the use.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is an enlarged schematic view of the structure of the present invention at A in FIG. 1;

FIG. 3 is an enlarged schematic view of the structure of the present invention at B in FIG. 1;

FIG. 4 is a schematic view of the structure of the bellows of the present invention.

In the figure, 1, a frame; 2. a lower adjustment seat; 3. an angle adjusting screw; 4. fixing a nut; 5. an upper adjusting seat; 6. a measuring head; 7. fixing screws; 8. a cross beam guide rail; 9. moving the mounting platform; 10. turning a tool; 11. a rotation pin; 12. a servo motor; 13. a grinding device; 14. a telescopic groove; 15. a cylinder; 16. a telescopic rod; 17. a bellows; 18. a slider; 19. a chute; 20. a fan; 21. an air inlet pipe; 22. an air outlet pipe; 23. an air inlet; 24. and (7) an air outlet cover.

Detailed Description

The technical solution of the present invention will be clearly and completely described below with reference to specific embodiments. It is to be understood that the disclosed embodiments are merely exemplary of the invention, and are not intended to limit the invention to the precise embodiments disclosed. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.

Referring to fig. 1-4, a large plane gantry type disc repairing machine comprises a frame 1, a lower adjusting seat 2 is fixedly connected to the top of the frame 1, an angle adjusting screw 3 is connected to the inner thread of the lower adjusting seat 2, a fixing nut 4 is connected to the outer surface thread of the angle adjusting screw 3, an upper adjusting seat 5 is arranged on the top of the lower adjusting seat 2, a measuring head 6 is arranged inside the upper adjusting seat 5, a fixing screw 7 is connected to the inner thread of the upper adjusting seat 5, a cross beam guide rail 8 is arranged on the top of the upper adjusting seat 5, a movable mounting platform 9 is arranged on the outer surface of the cross beam guide rail 8, a turning tool 10 is arranged at the bottom of the movable mounting platform 9, a rotating pin 11 is rotatably connected to one end of the cross beam guide rail 8, a servo motor 12 is arranged on one side surface of the cross beam guide rail 8, a grinding device 13 is arranged at the bottom of the cross beam guide rail 8, and during specific work, the whole disc repairing mechanism can be moved to a proper position, the levelness of the beam guide rail 8 is adjusted to ensure that the beam guide rail 8 is kept parallel to a grinding platform of the grinding equipment 13, then a special measuring tool is utilized to measure the surface flatness of the grinding equipment 13 to calculate and plan a detailed disc repairing scheme, the angle of the beam guide rail 8 is adjusted to a proper disc repairing angle, after the adjustment is finished, specific disc repairing parameters such as feed amount, feed speed, lower disc rotating speed and the like can be set, finally, the initial setting of all the parameters is checked, the disc repairing can be implemented, the beam guide rail 8 is also a set of sliding guide rail, a movable mounting platform 9 arranged on the sliding guide rail can reciprocate left and right under the driving of a servo motor 12, when the angle adjusting screw 3 is adjusted, the beam guide rail 8 can rotate in a certain angle range along a rotating pin 11, the measuring head 6 is a dial indicator, when the angle adjusting screw 3 is adjusted, the dial indicator displays an adjusted indication value, an original cantilever structure is changed into a two-end supporting structure, the integral stability of the device is fundamentally changed due to the difference of structural rigidity, the deformation deflection of the near end and the far end is greatly reduced when a disc is repaired, the phenomenon of shaking of a turning tool 10 can not occur any more, the situation of knife beating of equipment can not occur easily any more, the service life of the turning tool 10 is greatly prolonged, the stability of the near end and the far end is improved, the S-shaped or concave-convex shape of the repaired disc surface can not occur any more, the inner wall of the rack 1 is provided with a telescopic groove 14, the inner wall of the telescopic groove 14 is fixedly connected with a cylinder 15, the output end of the cylinder 15 is fixedly connected with a telescopic rod 16, a worker can start the cylinder 15 when the disc is repaired, the telescopic rod 16 extends outwards in the telescopic groove 14, one end of the telescopic rod 16 is fixedly connected with a bellows 17, and the bottom of the bellows 17 is fixedly connected with a slide block 18, the bottom of the inner wall of the telescopic slot 14 is fixedly connected with a sliding slot 19, a sliding block 18 at the bottom of the bellows 17 is driven to slide in the sliding slot 19, the bellows 17 is pushed out of the telescopic slot 14, a fan 20 is arranged inside the bellows 17, an air inlet pipe 21 is arranged on one side surface of the fan 20, an air outlet pipe 22 is arranged on the top of the fan 20, a worker starts the fan 20, air flow is driven to enter from the air inlet pipe 21 and then blow out from the air outlet pipe 22 by operation inside the fan 20, an air inlet 23 is arranged on the outer surface of the bellows 17, an air outlet cover 24 is fixedly connected with the top of the bellows 17, the air flow blows out from the air outlet cover 24 and blows to a grinding disc of the grinding equipment 13, therefore, when the grinding equipment 13 is subjected to heat dissipation and cooling during disc repairing or after the disc repairing is finished, the temperature of the grinding equipment 13 is prevented from being too high during the disc repairing process, the bellows 17 can be retracted into the telescopic slot 14 after use, the number of the bellows 17 is two, the outer surface of the sliding block 18 is connected with the sliding slot 19, the two air boxes 17 blow air simultaneously, so that the area and the range of the bottom of the grinding equipment 13 blown by the air flow are larger under the rotation of the grinding equipment 13.

In the utility model, through the matching arrangement between the frame 1, the lower adjusting seat 2, the angle adjusting screw 3, the fixing nut 4, the upper adjusting seat 5, the measuring head 6, the fixing screw 7, the crossbeam guide rail 8, the movable mounting platform 9, the turning tool 10, the rotating pin 11, the servo motor 12 and the grinding equipment 13, the device can move the whole disc trimming mechanism to a proper position during specific work, the levelness of the crossbeam guide rail 8 is adjusted, the crossbeam guide rail 8 is parallel to the grinding platform of the grinding equipment 13, then the surface planeness of the grinding equipment 13 is measured by using a special measuring tool to calculate and plan a detailed disc trimming scheme, the angle of the crossbeam guide rail 8 is adjusted to a proper disc trimming angle, after the adjustment is finished, specific disc trimming parameters can be set, such as the feed amount, the feed speed, the lower disc rotating speed and the like, and finally the initial setting of all parameters is checked, the disc repairing can be started, the beam guide rail 8 is also a set of sliding guide rail, the movable mounting platform 9 arranged on the sliding guide rail can reciprocate left and right under the drive of the servo motor 12, when the angle adjusting screw 3 is adjusted, the beam guide rail 8 can rotate in a certain angle range along the rotating pin 11, the measuring head 6 is a dial indicator, when the angle adjusting screw 3 is adjusted, the dial indicator displays the adjusted indication value, the original cantilever structure is changed into a two-end supporting structure, the integral stability of the device is fundamentally changed due to the difference of the structural rigidity, the near-far deformation deflection is greatly reduced when the disc is repaired, the shaking phenomenon of the turning tool 10 can not occur any more, the tool repairing situation can not occur easily any more, the service life of the turning tool 10 is greatly prolonged, the near-far stability is improved, the S-shaped or concave-convex type of the disc surface to be repaired can not occur any more, through flexible groove 14, cylinder 15, telescopic link 16, bellows 17, slider 18, spout 19, fan 20, the air-supply line 21, go out the tuber pipe 22, the cooperation setting between air intake 23 and the play fan housing 24, can make this device when using, the staff makes the startable cylinder 15 repairing the dish, make telescopic link 16 outwards extend at flexible groove 14, the slider 18 that drives bellows 17 bottom slides in spout 19, release flexible groove 14 with bellows 17, the staff starts fan 20, the inside operation of fan 20 drives air current and gets into from air-supply line 21, blow out from going out the tuber pipe 22 again, the air current blows out from a play fan housing 24, blow to the abrasive disc of abrasive apparatus 13, thereby when repairing the dish or after repairing the dish, cool down the abrasive apparatus 13 with dispelling the heat, avoid repairing the dish in-process to make abrasive apparatus 13 high temperature, can withdraw flexible groove 14 with bellows 17 after the use.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. The utility model provides a dish machine is repaiied to big plane planer-type, includes frame (1), its characterized in that: the angle adjusting mechanism is characterized in that a lower adjusting seat (2) is fixedly connected to the top of the rack (1), an angle adjusting screw (3) is connected to the inner thread of the lower adjusting seat (2), a fixing nut (4) is connected to the outer surface of the angle adjusting screw (3), an upper adjusting seat (5) is arranged at the top of the lower adjusting seat (2), a measuring head (6) is arranged inside the upper adjusting seat (5), a fixing screw (7) is connected to the inner thread of the upper adjusting seat (5), a beam guide rail (8) is arranged at the top of the upper adjusting seat (5), a movable mounting platform (9) is arranged on the outer surface of the beam guide rail (8), a turning tool (10) is arranged at the bottom of the movable mounting platform (9), a rotating pin (11) is rotatably connected to one end of the beam guide rail (8), a servo motor (12) is arranged on one side of the beam guide rail (8), and grinding equipment (13) is arranged at the bottom of the beam guide rail (8).

2. The large-plane gantry type disc repairing machine according to claim 1, wherein: the inner wall of frame (1) has seted up flexible groove (14), the inner wall fixedly connected with cylinder (15) in flexible groove (14), the output fixedly connected with telescopic link (16) of cylinder (15).

3. The large-plane gantry type disc repairing machine according to claim 2, characterized in that: one end fixedly connected with bellows (17) of telescopic link (16), the bottom fixedly connected with slider (18) of bellows (17), the bottom fixedly connected with spout (19) of flexible groove (14) inner wall.

4. The large-plane gantry type disc repairing machine according to claim 3, wherein: the air box is characterized in that a fan (20) is arranged inside the air box (17), an air inlet pipe (21) is arranged on one side face of the fan (20), and an air outlet pipe (22) is arranged at the top of the fan (20).

5. The large-plane gantry type disc repairing machine according to claim 3, wherein: the outer surface of bellows (17) is provided with air intake (23), the top fixedly connected with of bellows (17) goes out fan housing (24).

6. The large-plane gantry type disc repairing machine according to claim 3, wherein: the number of the air boxes (17) is two, and the outer surface of the sliding block (18) is connected with the sliding groove (19) in a sliding mode.

Images