CN217492625U - A dual-function casting mold of electromagnetic heating and water cooling - Google Patents
A dual-function casting mold of electromagnetic heating and water cooling Download PDFInfo
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Abstract
Description
技术领域technical field
本实用新型涉及一种电磁加热和水冷双功能浇铸模具及浇铸方法,属于浇铸方法技术领域。The utility model relates to an electromagnetic heating and water cooling dual-function casting mould and a casting method, belonging to the technical field of casting methods.
背景技术Background technique
金属靶材是半导体领域使用的核心材料之一,尤其是大吨位靶材(1000kg以上),目前国内靶材存在一些列问题:1、本体金属的纯度问题,通常只达到4N,100ppm的杂质含量具有较大的不稳定性;2、常规敞口熔炼无法很精准的控制氧含量,也无法脱出易挥发杂质;3、由于铸锭尺寸巨大,浇铸后芯部持续高温,1000kg以上铸锭浇铸后2小时内芯部仍为液态,晶粒仍在持续生长,造成芯部晶粒尺寸巨大,可以达到厘米级晶粒,同时还造成内外晶粒尺寸差异巨大;4、坩埚本体高温下对材料的污染。Metal targets are one of the core materials used in the semiconductor field, especially large-tonnage targets (above 1000kg). At present, there are some problems with domestic targets: 1. The purity of the bulk metal usually only reaches 4N, 100ppm impurity content It has great instability; 2. Conventional open smelting cannot precisely control the oxygen content, nor can it remove volatile impurities; 3. Due to the huge size of the ingot, the core continues to be high temperature after casting, and the ingot of more than 1000kg is cast after casting. The core is still in liquid state within 2 hours, and the grains continue to grow, resulting in a huge grain size of the core, which can reach centimeter-level grains, and also causes a huge difference in the size of the inner and outer grains; Pollution.
现在使用的浇铸模具,具有如下的问题:1、使用前需要烘模,例如铜铸造,模具需要使用烘包器烘到380-400℃;2、在真空炉的操作中,由于需要烘模,需要设置双室,模具烘完后才能吊入锭模室组装,费时费力,天然气烘包热效率还低;3、锭模本体需要做很厚,增加潜热,对冷却速度的提升微乎其微;4、冒口无法加热,会造成锭子的缩口很深,缩口无法使用需切除,造成成品率下降。The casting molds currently used have the following problems: 1. The molds need to be baked before use, such as copper casting, and the molds need to be baked to 380-400°C with a baking oven; 2. In the operation of the vacuum furnace, due to the need to bake the molds, It is necessary to set up double chambers, and the mold can be hung into the ingot mold chamber after drying, which is time-consuming and labor-intensive, and the thermal efficiency of the natural gas drying bag is still low; 3. The ingot mold body needs to be made very thick, increasing the latent heat, and the cooling rate is minimally improved; 4. The mouth cannot be heated, which will result in a deep shrinkage of the spindle, and the shrinkage cannot be used and needs to be removed, resulting in a decrease in the yield.
为了解决现有的浇铸模具在浇铸大吨位靶材时,模具存在的问题,本领域技术人员一直在研究改进浇铸的模具。In order to solve the problems existing in the existing casting molds when casting large-tonnage targets, those skilled in the art have been studying and improving the casting molds.
实用新型内容Utility model content
针对现有技术中存在的问题,提供一种电磁加热和水冷双功能浇铸模具,并基于设计的浇铸模具设计了相应的浇铸方法。Aiming at the problems existing in the prior art, a dual-function casting mold of electromagnetic heating and water cooling is provided, and a corresponding casting method is designed based on the designed casting mold.
本实用新型是通过如下的技术方案,解决上述技术问题:The utility model solves the above-mentioned technical problems through the following technical solutions:
一种电磁加热和水冷双功能浇铸模具,包括底座,均安装在底座上的锭模本体和浇注管,以及安装锭模本体上方的冒口,其特殊之处在于,所述锭模本体的锭模壳体的壳壁内部设置有螺旋状的水道,锭模壳体上设置有水道的进口及出口,锭模壳体的外侧设置电磁感应加热的螺旋铜管A。An electromagnetic heating and water-cooling dual-function casting mold includes a base, an ingot mold body and a pouring tube installed on the base, and a riser above the ingot mold body. A spiral water channel is arranged inside the shell wall of the mold shell, the inlet and outlet of the water channel are arranged on the ingot mold shell, and a spiral copper tube A heated by electromagnetic induction is arranged on the outside of the ingot mold shell.
在上述技术方案的基础上,本申请对上述技术方案,做出如下的完善及改进:On the basis of the above-mentioned technical solutions, the application makes the following improvements and improvements to the above-mentioned technical solutions:
进一步,所述冒口的冒口外壳的外侧设置电磁感应加热的螺旋铜管B。Further, the outer side of the riser shell of the riser is provided with a spiral copper tube B heated by electromagnetic induction.
进一步,所述浇注管的外侧壁上设置有电磁感应加热的螺旋铜管。Further, a spiral copper tube heated by electromagnetic induction is arranged on the outer side wall of the pouring tube.
进一步,所述底座的外侧壁上设置有电磁感应加热的螺旋铜管,并且在底座的的壳壁内部设置有螺旋状的水道。Further, a spiral copper tube heated by electromagnetic induction is arranged on the outer side wall of the base, and a helical water channel is arranged inside the shell wall of the base.
进一步,所述底座上设置有锭模本体安装槽和浇注管安装槽,锭模本体安装槽和浇注管安装槽之间设置有流道。Further, the base is provided with an ingot mold body mounting groove and a pouring pipe mounting groove, and a flow channel is provided between the ingot mold body mounting groove and the pouring pipe mounting groove.
电磁感应加热的螺旋铜管、螺旋铜管A和螺旋铜管B都有相应的进口和出口。The electromagnetic induction heating spiral copper tube, spiral copper tube A and spiral copper tube B have corresponding inlets and outlets.
一种使用电磁加热和水冷双功能浇铸模具的浇铸方法,其特征在于,包括如下步骤:A casting method using electromagnetic heating and water cooling dual-function casting mould is characterized in that, comprising the following steps:
步骤1、预热:熔炼快要浇铸的时候,开启电磁感应加热,对锭模本体上的螺旋通管A、冒口上的的螺旋铜管B、浇注管上的螺旋铜管、底座的螺旋铜管进行电磁感应加热,将模具加热到0-00℃,确保浇铸后铸锭的表面质量,因为电磁加热的持续可调性和温度监控可以非常准确的控制温度范围在很小的范围内波动,控制不同炉次锭子表面质量的高品质和一致性;
步骤2、浇铸,不同材质控制熔体的温度在熔点以上80-150℃不等进行浇铸,浇铸速度根据成分及容量不同控制在10-90s内完成浇铸,将熔炼的金属液由浇注管注入,金属液经过底座上的流道注入锭模本体,底铸工艺有助于熔体的充型,减少缺陷产生;
上表为:不同材质控制熔体的温度。The above table is: different materials control the temperature of the melt.
步骤3,浇铸完成,10min表面凝壳,同时铸锭顶部冒口处补缩完成,停止电磁感应加热,同时电磁感应加热的螺旋铜管内部持续流动并加大水压(压力从0.2MPa提升到0.5MPa以上)高流速,提高换热增强冷却温度梯度,同时,向水道内通水,通水压力0.5MPa以上,形成持续冷源。双水道高压力大流量冷却通道可提供从锭模外壁到内壁50-80℃/mm的温度梯度,促进内部快速结晶,使内部晶粒正常不至于生长过大,同时内外一致。
本申请设计的电磁加热和水冷双功能浇铸模具及浇铸方法,具有如下优点:The electromagnetic heating and water cooling dual-function casting mold and casting method designed in this application have the following advantages:
1、模具的冒口、锭模本体、底座甚至包括浇铸管都设置了电磁感应加热的螺旋铜管,整套模具可以在最初装炉的时候整体组装完成,这样的话真空炉一个腔体就足够了;1. The riser of the mold, the body of the ingot mold, the base and even the casting tube are equipped with electromagnetic induction heating spiral copper tubes. The whole set of molds can be assembled as a whole when the furnace is initially installed. In this case, one cavity of the vacuum furnace is enough. ;
2、熔炼快要浇铸的时候,开启线圈的电磁感应加热,将模具加热到380-400℃,确保浇铸后铸锭的表面质量。因为电磁加热的持续可调性和温度监控可以非常准确的控制温度范围在很小的范围内波动,控制不同炉次锭子表面质量的高品质和一致性;2. When the smelting is about to be cast, the electromagnetic induction heating of the coil is turned on, and the mold is heated to 380-400 ° C to ensure the surface quality of the ingot after casting. Because of the continuous adjustability and temperature monitoring of electromagnetic heating, the temperature range can be very accurately controlled to fluctuate within a small range, and the high quality and consistency of the surface quality of the ingots in different heats can be controlled;
3、浇铸完成后10min表面凝壳后,停止电磁感应加热,同时感应线圈内部持续流动并加大水压高流速,形成持续冷源,促进内部快速结晶,使内部晶粒正常不至于生长过大,同时内外一致;晶粒内外一致可减少之后的锻造破碎难度;获得内外晶粒一致,且晶粒尺寸控制在500-1000微米的细小范围内,避免了晶粒内外差异造成的最终产品的晶粒不一致和粗大。3. After 10 minutes after the casting is completed, the surface is solidified, and the electromagnetic induction heating is stopped. At the same time, the inside of the induction coil continues to flow and the water pressure and high flow rate are increased to form a continuous cold source, which promotes rapid internal crystallization, so that the internal grains will not grow too large. , at the same time, the inside and outside are consistent; the inner and outer grains are consistent to reduce the difficulty of subsequent forging and crushing; the inner and outer grains are obtained, and the grain size is controlled within a small range of 500-1000 microns, avoiding the difference between the inner and outer grains of the final product. Inconsistent and coarse grains.
附图说明Description of drawings
图1为本申请的一种电磁加热和水冷双功能浇铸模具的立体结构示意图;Fig. 1 is the three-dimensional structure schematic diagram of a kind of electromagnetic heating and water-cooling dual-function casting mould of the application;
图2为图1的正视图;Fig. 2 is the front view of Fig. 1;
图3为锭模本体的剖视图;3 is a cross-sectional view of an ingot mold body;
图4为冒口的结构示意图。Figure 4 is a schematic diagram of the structure of the riser.
附图标记记录如下:底座-1,锭模本体-2,浇注管-3,冒口-4,Reference numerals are recorded as follows: base-1, ingot mold body-2, pouring tube-3, riser-4,
锭模壳体-2.1,水道-2.2,螺旋铜管A-2.3,冒口外壳-4.1,螺旋铜管B-4.2。Ingot mold shell-2.1, water channel-2.2, spiral copper tube A-2.3, riser shell-4.1, spiral copper tube B-4.2.
具体实施方式Detailed ways
以下实施例结合附图,仅是为了对权利要求书中所记载的技术方案加以说明,并非是对权利要求保护范围的限制。The following embodiments in conjunction with the accompanying drawings are only intended to illustrate the technical solutions described in the claims, and are not intended to limit the protection scope of the claims.
结合附图1-4,一种电磁加热和水冷双功能浇铸模具,包括底座1,均安装在底座1上的锭模本体2和浇注管3,以及安装锭模本体2上方的冒口4,所述锭模本体2的锭模壳体2.1的壳壁内部设置有螺旋状的水道2.2,锭模壳体2.1的外侧设置电磁感应加热的螺旋铜管A2.3;In conjunction with accompanying drawing 1-4, a kind of electromagnetic heating and water-cooling dual-function casting mold, including
其中,所述冒口4的冒口外壳4.1的外侧设置电磁感应加热的螺旋铜管B4.2;Wherein, the outer side of the riser shell 4.1 of the
所述浇注管3的外侧壁上设置有电磁感应加热的螺旋铜管;The outer side wall of the pouring
所述底座1的外侧壁上设置有电磁感应加热的螺旋铜管,并且在底座1的的壳壁内部设置有螺旋状的水道;且底座1上设置有锭模本体安装槽和浇注管安装槽,锭模本体安装槽和浇注管安装槽之间设置有流道。The outer side wall of the
上述的电磁加热和水冷双功能浇铸模具的浇铸方法,包括如下步骤:The casting method of the above-mentioned electromagnetic heating and water-cooling dual-function casting mould comprises the following steps:
步骤1、预热:熔炼快要浇铸的时候,开启电磁感应加热,对锭模本体2上的螺旋通管A2.3、冒口4上的的螺旋铜管B4.2、浇注管3上的螺旋铜管、底座1的螺旋铜管进行电磁感应加热,将模具加热到380-400℃,确保浇铸后铸锭的表面质量,因为电磁加热的持续可调性和温度监控可以非常准确的控制温度范围在很小的范围内波动,控制不同炉次锭子表面质量的高品质和一致性;
步骤2、浇铸,不同材质控制熔体的温度在熔点以上80-150℃不等进行浇铸,浇铸速度根据成分及容量不同控制在10-90s内完成浇铸,将熔炼的金属液由浇注管注入,金属液经过底座上的流道注入锭模本体2,底铸工艺有助于熔体的充型,减少缺陷产生;
步骤3,浇铸完成,10min表面凝壳后,停止电磁感应加热,同时电磁感应加热的螺旋铜管内部持续流动并加大水压(压力从0.2MPa提升到0.5MPa以上)高流速,提高换热增强冷却温度梯度,同时,向水道内通水,通水压力0.5MPa以上,形成持续冷源。双水道高压力大流量冷却通道可提供从锭模外壁到内壁50-80℃/mm的温度梯度,促进内部快速结晶,使内部晶粒正常不至于生长过大,同时内外一致。Step 3: After the casting is completed, after 10 minutes the surface is solidified, the electromagnetic induction heating is stopped. At the same time, the inside of the electromagnetic induction heating spiral copper tube continues to flow and the water pressure is increased (the pressure is increased from 0.2MPa to more than 0.5MPa) and the high flow rate increases the heat exchange. The cooling temperature gradient is enhanced, and at the same time, water is passed into the water channel, and the water pressure is above 0.5MPa, forming a continuous cold source. The double-channel high-pressure and high-flow cooling channel can provide a temperature gradient of 50-80°C/mm from the outer wall of the ingot mold to the inner wall, which promotes rapid internal crystallization, so that the internal grains will not grow too large, and the inside and outside are consistent.
以上所述仅为本实用新型的较佳实施例,并不用以限制本实用新型,凡在本实用新型的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本实用新型的保护范围之内。The above are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included in the present invention. within the scope of protection of the utility model.
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CN114985687B (en) * | 2022-07-06 | 2025-02-14 | 烟台扶摇特导新材料科技有限公司 | Electromagnetic heating and water cooling dual-function casting mold and casting method |
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