[go: up one dir, main page]

CN217351625U - Seed crystal clamping device - Google Patents

Seed crystal clamping device Download PDF

Info

Publication number
CN217351625U
CN217351625U CN202221017675.3U CN202221017675U CN217351625U CN 217351625 U CN217351625 U CN 217351625U CN 202221017675 U CN202221017675 U CN 202221017675U CN 217351625 U CN217351625 U CN 217351625U
Authority
CN
China
Prior art keywords
seed crystal
seed
chuck
crystal
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202221017675.3U
Other languages
Chinese (zh)
Inventor
刘景峰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Qifenglanda Optics Technology Development Co ltd
Original Assignee
Beijing Qifenglanda Optics Technology Development Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Qifenglanda Optics Technology Development Co ltd filed Critical Beijing Qifenglanda Optics Technology Development Co ltd
Priority to CN202221017675.3U priority Critical patent/CN217351625U/en
Application granted granted Critical
Publication of CN217351625U publication Critical patent/CN217351625U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The utility model discloses a seed crystal clamping device, which comprises a seed crystal chuck and a seed crystal rod, wherein the seed crystal chuck and the seed crystal rod are detachably and fixedly connected; the bottom of the seed crystal chuck is conical, and the bottom is provided with a seed crystal extending hole; the seed crystal consists of a seed crystal column and a seed crystal head, and the diameter of the seed crystal head is larger than the aperture of the extending hole. The seed crystal clamping device of the utility model is provided with the seed crystal chuck at the bottom end of the seed crystal rod, the bottom of the seed crystal chuck is provided with the extending hole of the seed crystal, and the seed crystal is arranged into a structure with the head diameter larger than the aperture of the extending hole; the seed crystal is more firmly fixed in the growth process, and the occurrence of the accident of crystal falling is effectively avoided.

Description

Seed crystal clamping device
Technical Field
The utility model belongs to the technical field of crystal growth equipment and specifically relates to a seed crystal clamping device.
Background
Because the growth cycle of the calcium fluoride crystal is longer (about 2 weeks), the requirements on the stability of equipment and accessories are higher in the crystal growth process.
As shown in fig. 1, in the prior art, a molybdenum wire 2 is used for binding a seed crystal 3 to a seed crystal rod 1; the bearing force of the method is small, when the grown crystal 4 is heavy, or the seeding temperature is too high, or the cooling speed is too fast, the molybdenum wire 2 can be broken, so that the seed crystal 3 is separated from the seed crystal rod 1 to cause the crystal 4 to fall off, and the falling of the crystal 4 can not only burst the crystal 4, but also damage the crucible.
In the conventional mode, the contact position of the bottom of the seed rod 1 and the seed crystal 3 is thinned due to the influence of air flow, and the crystal 4 is broken from the position of the thinned part A frequently during the disassembly of the crystal 4, so that the crystal 4 falls off.
In the process of growth, volatile matters on the seed rod 1 are more and begin to fall off along with the increase of time, and in the traditional design mode, deposited particles of the volatile matters directly fall into a crucible, impurities grow into crystals along with the growth, and the quality of the crystals 4 is seriously influenced.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a seed crystal clamping device which has novel and unique structure and convenient use and can firmly fix the seed crystal; the specific technical scheme is as follows:
a seed crystal clamping device comprises a seed crystal chuck and a seed crystal rod, wherein the seed crystal chuck is detachably and fixedly connected with the seed crystal rod; the bottom of the seed chuck is provided with a seed crystal extending hole; the seed crystal consists of a seed crystal column and a seed crystal head, and the diameter of the seed crystal head is larger than the aperture of the extending hole.
Furthermore, an adapter is arranged between the seed crystal chuck and the seed crystal rod; the adapter is made of isostatic graphite.
Furthermore, the upper end of the seed crystal chuck is provided with a wide-mouth structure.
Further, the top end of the wide-mouth structure is provided with a wide-mouth groove.
Further, the seed chuck is made of isostatic pressing graphite.
Furthermore, the bottom of the inner cavity of the seed chuck is funnel-shaped.
The seed crystal clamping device of the utility model is provided with the seed crystal chuck at the bottom end of the seed crystal rod, the bottom of the seed crystal chuck is provided with the extending hole of the seed crystal, and the seed crystal is arranged into a structure that the diameter of the head part is larger than the aperture of the extending hole; the seed crystal is more firmly fixed in the growth process, and the occurrence of the accident of crystal falling is effectively avoided.
Drawings
FIG. 1 is a schematic view of a seed crystal holding apparatus of the prior art;
fig. 2 is a schematic structural view of the seed crystal holding device of the present invention.
In the figure: 1. a seed rod; 2. Molybdenum wire; 3. seed crystal; 31. Seed crystal columns; 32. a seed crystal head; 4. a crystal; 5. an adaptor; 61. a seed chuck; 62. a wide mouth groove; 7. depositing particles; A. a thinned part.
Detailed Description
The present invention will be more fully described with reference to the following examples. The present invention may be embodied in many different forms and should not be construed as limited to the exemplary embodiments set forth herein.
For ease of description, spatially relative terms, such as "upper," "lower," "left," "right," and the like, may be used herein to describe one element or feature's relationship to another element or feature as illustrated in the figures. It will be understood that the spatial terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary term "lower" can encompass both an upper and a lower orientation. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
As shown in fig. 2, the seed crystal holding device in this embodiment includes a seed chuck 61 and a seed rod 1, the seed chuck 61 and the seed rod 1 may be detachably and fixedly connected in the form of a snap joint, a threaded connection or a pin, etc., so as to conveniently detach the seed crystal 3 from the seed rod 1 and prevent the generated crystal 4 from falling off in the growing device.
The bottom of the seed chuck 61 is provided with an outlet hole for the seed crystal 3. The seed crystal consists of a seed crystal column 31 and a seed crystal head 32, and the diameter of the seed crystal head 32 is larger than the aperture of the extending hole at the bottom of the seed chuck 61. When the seed crystal chuck is installed, the seed crystal column 31 is arranged at the lower part, the seed crystal head part 32 is arranged at the upper part, the seed crystal column 31 extends out of the extending hole at the bottom part of the seed crystal chuck 61, and the seed crystal head part 32 is clamped at the upper end of the extending hole. The structure has large bearing capacity, and can effectively avoid falling off caused by large weight of the crystal 4. By changing the diameter of the seed crystal (3-60 mm), calcium fluoride crystals weighing less than 40kg can be grown.
The seed crystal rod 1 is generally made of a high-strength and high-temperature-resistant molybdenum rod; in order to avoid the volatile substances generated by the seed crystal from corroding the seed crystal rod 1, an adapter piece 5 is arranged between the seed crystal chuck 61 and the seed crystal rod 1; the adapter 5 adopts the isotropic isostatic pressing graphite without directionality, so that the phenomenon that the seed crystal 3 is cracked due to overlarge stress caused by uneven heat transfer of the adapter 5 can be reduced.
The use of isotropic graphite for the seed chuck 61 reduces the possibility of excessive stress cracking of the seed crystal 3 due to uneven heat transfer from the seed chuck 61.
The top of the seed crystal chuck 61 adopts a wide-mouth design, and the design has the advantages that air flow can not be directly blown on the adaptor 5 and the seed rod 1, so that the adaptor 5 and the seed rod 1 cannot be connected at an excessively high temperature and deform, and deposited particles 7 formed by volatile matters on the adaptor 5 and the seed rod 1 are reduced. Even the deposited particles 7 of volatiles can fall into this wide-mouth groove adapter 5 and the seed rod 1.
The bottom of the inner cavity of the seed chuck 61 adopts a funnel-shaped design; correspondingly, the seed crystal column 31 and the seed crystal head 32 are also provided with a conical transition section; the seed crystal head 32 can be tightly matched with the upper end of the extending hole, and the gas flow is prevented from generating overheating at the bottom positions of the seed crystal 3 and the seed holder 61 to cause local thinning of the seed crystal, thereby causing the falling of the seed crystal 3.
The adaptor 5 adopts a necking design with large diameters at the upper end and the lower end and small diameter at the middle part, so that the aim of the design is to obtain the connection position between the seed rod 1 and the adaptor 5 by less heat transfer; and the overheating deformation is reduced.
When in use, the adaptor 5 is fixedly connected with the seed rod 1 through threads; then the seed crystal column 31 of the seed crystal 3 is inserted into the extending hole from the seed crystal chuck 61; then, the seed chuck 61 is fixedly connected to the adaptor 5 by means of a screw.
After the seed crystal 3 generates the crystal 4 with the design requirement, the seed chuck 61 is firstly dismounted from the adapter 5; then, the tail end of the seed crystal column 31 is separated from the crystal 4; the seed crystal 3 is taken out from the seed chuck 61, and at the same time, the crystal 4 is obtained.
By using the seed crystal clamping device in the embodiment, the bearing capacity is large, the seed crystal chuck 61 is firmly connected with the seed crystal rod 1, and the seed crystal chuck cannot fall off in the production process. The seed rod 1 is not directly contacted with the seed rod 1, and a thinned part A cannot be generated; the seed crystal rod 1 and the crystal 4 are firmly connected and are not easy to separate. In addition, the deposition particles 7 of the volatile matter can be caught by the wide groove 62 of the seed chuck 61, and the contamination of the product by the deposition particles 7 can be avoided.
The above examples are only for illustrating the present invention, and besides, there are many different embodiments, which can be conceived by those skilled in the art after understanding the idea of the present invention, and therefore, they are not listed here.

Claims (4)

1. A seed crystal clamping device is characterized by comprising a seed crystal chuck and a seed crystal rod, wherein the seed crystal chuck is detachably and fixedly connected with the seed crystal rod; the bottom of the seed crystal chuck is provided with a seed crystal extending hole; the seed crystal comprises a seed crystal column and a seed crystal head, the diameter of the seed crystal head is larger than the aperture of the extending hole, a wide-mouth structure is arranged at the upper end of the seed crystal chuck, and a wide-mouth groove is arranged at the top end of the wide-mouth structure.
2. A seed holder as claimed in claim 1, wherein an adapter is provided between the seed chuck and the seed shaft; the adapter is made of isostatic graphite.
3. A seed holder as set forth in claim 1 wherein the seed chuck is made of isostatically pressed graphite.
4. A seed holder as claimed in claim 1, wherein the bottom of the interior chamber of the seed chuck is funnel shaped.
CN202221017675.3U 2022-04-29 2022-04-29 Seed crystal clamping device Active CN217351625U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202221017675.3U CN217351625U (en) 2022-04-29 2022-04-29 Seed crystal clamping device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221017675.3U CN217351625U (en) 2022-04-29 2022-04-29 Seed crystal clamping device

Publications (1)

Publication Number Publication Date
CN217351625U true CN217351625U (en) 2022-09-02

Family

ID=83057367

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202221017675.3U Active CN217351625U (en) 2022-04-29 2022-04-29 Seed crystal clamping device

Country Status (1)

Country Link
CN (1) CN217351625U (en)

Similar Documents

Publication Publication Date Title
US5108720A (en) Float zone processing of particulate silicon
CN217351625U (en) Seed crystal clamping device
CN111074347A (en) Seed crystal growth device
CN111876823A (en) Combined sleeve of single crystal furnace and single crystal furnace
CN202492611U (en) Holding device for single crystals for zone melting furnace
CN1600905A (en) Heavily doped method and doping equipment for developing silicon single-crystal straight pulled
CN112853480A (en) Seed crystal pasting jig, flow guide assembly and method for pasting seed crystal on edge
CN202595336U (en) Seed crystal clamping structure
US20160122875A1 (en) Chemical vapor deposition reactor with filament holding assembly
CN201268729Y (en) Seed crystal clamping device
CN101724892A (en) Seed crystal clamping device
US4594127A (en) Method and apparatus for growing crystals
CN208532964U (en) A kind of single crystal growing furnace and quartzy multiple feeding device
US5427057A (en) Self-clamping holder for polysilicon rod used in floating-zone single-crystal growth method
CN217869193U (en) Be used for high-efficient production facility of monocrystalline silicon crystal pulling
TWI588289B (en) Manufacturing apparatus for depositing a material and a socket for use therein
CN216156011U (en) Guide cylinder for pulling silicon single crystal by single crystal furnace
US20230265583A1 (en) Cz crucible
CN201962415U (en) Graphite electrode structure capable of reducing inner surface quality defects of electric arc quartz crucible
CN214327135U (en) Three-petal type double-taper graphite clamping petal
KR20150115920A (en) Gas distributor for a siemens reactor
CN212895082U (en) Crucible for growth of large-size kilogram-level silicon carbide single crystal
CN206799792U (en) Semiconductor grade silicon single crystal furnace seed crystal chuck device
CN209367813U (en) A kind of silane thermal decomposition process production electronic-grade polycrystalline silicon thermal decomposition furnace graphite chuck
CN217867484U (en) But top device of quick replacement

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant