CN217316464U - Novel laser beam repairing machine workbench - Google Patents
Novel laser beam repairing machine workbench Download PDFInfo
- Publication number
- CN217316464U CN217316464U CN202123444684.9U CN202123444684U CN217316464U CN 217316464 U CN217316464 U CN 217316464U CN 202123444684 U CN202123444684 U CN 202123444684U CN 217316464 U CN217316464 U CN 217316464U
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- China
- Prior art keywords
- standing groove
- laser beam
- platform
- fixedly connected
- utility
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Links
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 230000007547 defect Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000008439 repair process Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
The utility model discloses a novel laser beam patching machine workstation, including place the platform, the standing groove has been seted up at place the platform's top, the equal fixedly connected with triangular support plate in four corners of standing groove, four L of the bottom fixedly connected with of standing groove shape spacing, the bottom of standing groove is located four L shape spacing and is equipped with three support thimble, the outside fretwork of standing groove, the beneficial effects of the utility model: this device easy operation is convenient, can carry on spacingly to the mask version of different models through standing groove and the spacing strip of L shape, and the servo motor that the rethread bottom set up finely tunes the mask version, makes the display image clearer, improves accurate nature.
Description
The technical field is as follows:
the utility model belongs to the technical field of the mask plate-making, in particular to novel laser beam patching machine workstation.
The background art comprises the following steps:
the mask is an integrated circuit design pattern formed by a chromium film on a quartz substrate, and aims to transfer the designed integrated circuit pattern to a wafer by using mask projection shrink, in the mask production and manufacturing process, defect repair is an important process, especially when the integrated circuit process is developed to a 7 nanometer technology node, the pattern is complex and various along with the smaller and smaller feature size of the pattern, the requirement on the defect is stricter and stricter, if the defect exists on the mask, the defect is repeatedly etched on the wafer through the process flow treatment of photoetching and the like, and finally the integrated circuit is abnormal in open circuit and short circuit, so that the yield of the chip is reduced, and if the defect is not repaired and the scrapped treatment, the production cost is increased, and the product delivery period is influenced.
The utility model has the following contents:
the utility model aims at providing a novel laser beam repair machine workstation just lies in providing for solving above-mentioned problem, can carry on spacingly to the mask version of different models through standing groove and the spacing strip of L shape, and the servo motor that the rethread bottom set up finely tunes the mask version, makes the display image more clear, improves accurate nature.
In order to solve the above problem, the utility model provides a technical scheme:
the utility model provides a novel laser beam patching machine workstation, includes place the platform, the standing groove has been seted up at place the platform's top, the equal fixedly connected with triangular support board in four corners of standing groove, four L of the bottom fixedly connected with of standing groove shape spacing, the bottom of standing groove is located and is equipped with three support thimble between four L shape spacing, the outside fretwork of standing groove.
As a preferred technical scheme of the utility model, place the platform's bottom is equipped with three servo motor, servo motor's output and support thimble threaded connection.
As a preferred technical scheme of the utility model, place platform's outside is equipped with the controller, and this controller is equipped with toggle switch, No. two toggle switch and fine setting knob, controller and three servo motor electric connection.
The utility model has the advantages that: this device easy operation is convenient, can carry on spacingly to the mask version of different models through standing groove and the spacing strip of L shape, and the servo motor that the rethread bottom set up finely tunes the mask version, makes the display image clearer, improves accurate nature.
Description of the drawings:
for ease of illustration, the invention is described in detail by the following detailed description and accompanying drawings.
Fig. 1 is a schematic perspective view of the present invention;
fig. 2 is a schematic sectional view of the present invention.
In the figure: 1. placing a platform; 2. an L-shaped limiting strip; 3. a placement groove; 4. a triangular support plate; 5. supporting the thimble; 6. a servo motor; 7. a first toggle switch; 8. a second toggle switch; 9. and (6) finely adjusting a knob.
The specific implementation mode is as follows:
example 1
As shown in fig. 1, the following technical solutions are adopted in the present embodiment: a novel laser beam repairing machine workbench comprises a placing platform 1, wherein a placing groove 3 is formed in the top of the placing platform 1, triangular supporting plates 4 are fixedly connected to four corners of the placing groove 3, and four L-shaped limiting strips 2 are fixedly connected to the bottom of the placing groove 3;
can place the mask version that 5 inches need be repaired between L shape spacing 2, can place the mask version that 6 inches need be repaired on the triangular support plate 4 of standing groove 3 inside, realize the nimble purpose of repairing of workstation, when needs take out the change to the mask version, can snatch the mask version from the groove of fretwork all around, convenient operation avoids needing to prize and gets the material.
Example 2
As shown in fig. 2, the following technical solutions are adopted in the present embodiment:
the bottom of standing groove 3 is located and is equipped with three support thimble 5 between four L shape spacing 2, the outside fretwork of standing groove 3, and the bottom of place platform 1 is equipped with three servo motor 6, and servo motor 6's output and support thimble 5 threaded connection, the outside of place platform 1 is equipped with the controller, and this controller is equipped with toggle switch 7, toggle switch 8 and fine setting knob 9 No. one, controller and the 6 electric connection of three servo motor.
The servo motor 6 at the bottom of the placing platform 1 is controlled by the controller, three supporting thimbles 5 are driven to rise to the initial height set by the first toggle switch 7 at the same speed, after the repairing work of a repairing product mask plate completely separated from the triangular supporting plate 4 of the mask plate placing platform 1 is finished, the blanking is started, the second toggle switch 8 is opened, three supporting thimbles 5 are driven to fall to the set initial position at the same speed, the repairing product mask plate is completely seated on the triangular supporting plate 4 of the mask plate placing platform 1, when the reference point of the mask plate needing repairing is searched, the image is not clear, the supporting thimbles 5 near the reference point can be adjusted under the fine adjustment knob 9 which can finely and independently control the servo motor 6, the imaging of the reference point of the product is clear, and the upper and lower positions of the supporting thimbles 5 near the three reference points on the surface of the product are sequentially and independently adjusted, so that the three reference points are imaged clearly.
The basic principles and main features of the present invention and the advantages of the present invention have been shown and described above, and it should be understood by those skilled in the art that the present invention is not limited by the above embodiments, which are only illustrative, but also various changes and modifications may be made without departing from the spirit and scope of the present invention, which fall within the scope of the present invention as claimed, which is defined by the appended claims and their equivalents.
Claims (3)
1. The utility model provides a novel laser beam patching machine workstation, its characterized in that, includes place platform (1), standing groove (3) have been seted up at the top of place platform (1), the equal fixedly connected with triangular support board (4) in four corners of standing groove (3), four L of the bottom fixedly connected with of standing groove (3) shape spacing (2), the bottom of standing groove (3) is located and is equipped with three support thimble (5) between four L shape spacing (2), the outside fretwork of standing groove (3).
2. The workbench of the laser beam repairing machine of claim 1, wherein: the bottom of the placing platform (1) is provided with three servo motors (6), and the output ends of the servo motors (6) are in threaded connection with the supporting thimbles (5).
3. The workbench of the laser beam repairing machine as claimed in claim 2, wherein: the placing platform is characterized in that a controller is arranged outside the placing platform (1), the controller is provided with a first toggle switch (7), a second toggle switch (8) and a fine adjustment knob (9), and the controller is electrically connected with three servo motors (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123444684.9U CN217316464U (en) | 2021-12-31 | 2021-12-31 | Novel laser beam repairing machine workbench |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123444684.9U CN217316464U (en) | 2021-12-31 | 2021-12-31 | Novel laser beam repairing machine workbench |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217316464U true CN217316464U (en) | 2022-08-30 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123444684.9U Active CN217316464U (en) | 2021-12-31 | 2021-12-31 | Novel laser beam repairing machine workbench |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217316464U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114310007A (en) * | 2021-12-31 | 2022-04-12 | 无锡中微掩模电子有限公司 | Novel laser beam repairing machine workbench |
-
2021
- 2021-12-31 CN CN202123444684.9U patent/CN217316464U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114310007A (en) * | 2021-12-31 | 2022-04-12 | 无锡中微掩模电子有限公司 | Novel laser beam repairing machine workbench |
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