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CN217278960U - High-resolution X-ray flat panel detector - Google Patents

High-resolution X-ray flat panel detector Download PDF

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Publication number
CN217278960U
CN217278960U CN202221089746.0U CN202221089746U CN217278960U CN 217278960 U CN217278960 U CN 217278960U CN 202221089746 U CN202221089746 U CN 202221089746U CN 217278960 U CN217278960 U CN 217278960U
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resolution
flat panel
panel detector
ray flat
scintillation screen
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安康
陈研
毛世平
丁雨憧
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Chongqing University
CETC 26 Research Institute
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Chongqing University
CETC 26 Research Institute
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Abstract

本实用新型涉及一种高分辨X射线平板探测器,包括荧光反射层、闪烁屏、阵列准直器、光锥、CCD/CMOS图像传感器、数据采集与传输系统,通过屏蔽外壳实现探测器的封装。该探测器使用新型GAGG:Ce单晶闪烁体制成闪烁屏,在闪烁屏与光锥之间增加阵列准直器以限制闪烁屏可输出的荧光角度范围,达到降低荧光串扰、提升探测器空间分辨率的目的,与普通光锥耦合X射线平板探测器相比,该探测器性能稳定,在使用同等厚度闪烁屏的情况下,可实现更高的探测空间分辨率。

Figure 202221089746

The utility model relates to a high-resolution X-ray flat panel detector, which comprises a fluorescent reflection layer, a scintillation screen, an array collimator, a light cone, a CCD/CMOS image sensor, a data acquisition and transmission system, and the detector is packaged through a shielding shell. . The detector uses a new type of GAGG:Ce single crystal scintillator to make a scintillation screen. An array collimator is added between the scintillation screen and the light cone to limit the range of fluorescence angles that the scintillation screen can output, so as to reduce fluorescence crosstalk and improve the spatial resolution of the detector. Compared with the common light cone coupled X-ray flat panel detector, the detector has stable performance and can achieve higher detection spatial resolution when using the same thickness of the scintillation screen.

Figure 202221089746

Description

一种高分辨X射线平板探测器A high-resolution X-ray flat panel detector

技术领域technical field

本实用新型涉及辐射探测技术领域,特别是一种高分辨X射线平板探测器。The utility model relates to the technical field of radiation detection, in particular to a high-resolution X-ray flat panel detector.

背景技术Background technique

X射线探测器是X射线计算机层析成像(CT)系统的重要组成部分,随着微/纳米焦点射线源CT的广泛应用,对具有更高空间分辨率的X射线探测器的需求越来越迫切。基于光锥耦合CCD/CMOS型X射线平板探测器在具有较好的抗辐射能力的同时,又能实现较高的空间分辨率,是实验室高空间分辨率X射线探测的首选探测器。当前应用的光锥耦合CCD/CMOS型X射线平板探测器产品所能达到的实际空间分辨率与CCD/CMOS图像传感器的光学分辨极限值仍存在较大差距,造成这种差距的主要因素是X射线入射闪烁屏后像元间的射线散射与荧光串扰。对于管电压小于160kV的微/纳米焦点X射线源而言,相邻像元射线散射串扰较小,荧光串扰是主要因素,抑制荧光串扰是提高空间分辨率的最有效方法。然而,由于像元尺寸太小,无法通过在闪烁屏像元间增加反光层等常规方法实现荧光串扰隔离。目前提高光锥耦合CCD/CMOS型X射线平板探测器空间分辨率的方法是通过减小闪烁屏厚度以降低荧光串扰,但减小闪烁屏厚度会降低闪烁屏的X射线能量沉积,导致探测效率的降低。X-ray detectors are an important part of X-ray computed tomography (CT) systems. With the wide application of micro/nano focal ray source CT, there is an increasing demand for X-ray detectors with higher spatial resolution. urgent. The CCD/CMOS X-ray flat-panel detector based on light cone coupling has good radiation resistance and can achieve high spatial resolution. It is the first choice for laboratory X-ray detection with high spatial resolution. There is still a big gap between the actual spatial resolution that can be achieved by the currently used light cone-coupled CCD/CMOS X-ray flat panel detector products and the optical resolution limit of the CCD/CMOS image sensor. The main factor causing this gap is the X-ray Radiation scattering and fluorescence crosstalk between pixels after rays incident on a scintillation screen. For micro/nano focus X-ray sources with tube voltage less than 160kV, the ray scattering crosstalk between adjacent pixels is small, and the fluorescence crosstalk is the main factor. Suppressing the fluorescence crosstalk is the most effective method to improve the spatial resolution. However, because the pixel size is too small, conventional methods such as adding a reflective layer between the pixels of the scintillation screen cannot achieve fluorescence crosstalk isolation. At present, the method to improve the spatial resolution of light cone-coupled CCD/CMOS X-ray flat panel detectors is to reduce the thickness of the scintillation screen to reduce fluorescence crosstalk, but reducing the thickness of the scintillation screen will reduce the X-ray energy deposition of the scintillation screen, resulting in detection efficiency. decrease.

现亟需一种可实现高效率X射线探测的高分辨探测器。There is an urgent need for a high-resolution detector that can realize high-efficiency X-ray detection.

实用新型内容Utility model content

本实用新型的目的就是提供一种基于荧光串扰准直的高分辨光锥耦合CCD/CMOS型X射线平板探测器,该探测器在闪烁屏荧光输出面与光锥之间增加阵列准直器,限制对超出设定范围闪烁屏串扰荧光的接收,在不降低闪烁屏厚度的情况下提升探测器空间分辨率。The purpose of this utility model is to provide a high-resolution light cone-coupled CCD/CMOS X-ray flat panel detector based on fluorescence crosstalk collimation. The detector adds an array collimator between the fluorescence output surface of the scintillation screen and the light cone. Limits the reception of crosstalk fluorescence beyond the set range of the scintillation screen, improving the spatial resolution of the detector without reducing the thickness of the scintillation screen.

本实用新型的目的是通过这样的技术方案实现的,它包括有荧光反射层、闪烁屏、阵列准直器、光锥、CCD/CMOS图像传感器、数据采集与传输系统、屏蔽外壳;The purpose of the present utility model is achieved through such a technical scheme, which includes a fluorescent reflection layer, a scintillation screen, an array collimator, a light cone, a CCD/CMOS image sensor, a data acquisition and transmission system, and a shielding shell;

所述荧光反射层、闪烁屏、阵列准直器、光锥、CCD/CMOS图像传感器顺序叠加,由无色透明耦合剂连接。The fluorescent reflection layer, the scintillation screen, the array collimator, the light cone, and the CCD/CMOS image sensor are sequentially stacked and connected by a colorless and transparent coupling agent.

进一步地:所述闪烁屏由GAGG:Ce单晶闪烁体制成,其探测平面尺寸不小于光锥感光面尺寸。Further: the scintillation screen is made of GAGG:Ce single crystal scintillator, and the size of its detection plane is not smaller than the size of the light-cone photosensitive surface.

进一步地:所述阵列准直器采用低数值孔径光纤面板制成,其传光面尺寸不小于光锥感光面尺寸。Further: the array collimator is made of a low numerical aperture optical fiber panel, and the size of its light transmission surface is not smaller than the size of the light cone photosensitive surface.

进一步地:所述荧光反射层采用高反射率ESR反射膜制成。Further: the fluorescent reflective layer is made of a high-reflectivity ESR reflective film.

进一步地:所述无色透明耦合剂为高折射率环氧树脂胶。Further: the colorless and transparent coupling agent is high refractive index epoxy resin glue.

进一步地:所述光锥大端与阵列准直器耦合,小端与CCD/CMOS图像传感器耦合。Further: the big end of the light cone is coupled with the array collimator, and the small end is coupled with the CCD/CMOS image sensor.

进一步地:所述屏蔽外壳由高原子序数、高密度金属制成。Further: the shielding shell is made of metal with high atomic number and high density.

进一步地:屏蔽外壳上开设X射线入射窗口,X射线入射窗口采用全碳纤维板制成。Further: an X-ray incident window is provided on the shielding shell, and the X-ray incident window is made of a full carbon fiber board.

由于采用了上述技术方案,本实用新型具有如下的优点:采用新型高光产额GAGG:Ce单晶闪烁体制作闪烁屏,解决了传统CsI(TI)容易潮解、性能不稳定的问题,解决了传统GOS(Tb)闪烁体不透明导致的荧光探测效率低的问题,保障X射线探测转换效率的同时提高了闪烁屏的稳定性;加入阵列准直器,抑制了荧光串扰范围,在不降低闪烁屏厚度、保障X射线探测效率的情况下,提高了探测器的空间分辨率。Due to the adoption of the above-mentioned technical solutions, the utility model has the following advantages: the scintillation screen is made of a novel high-light-yield GAGG:Ce single crystal scintillator, which solves the problems of easy deliquescence and unstable performance of the traditional CsI (TI), and solves the problem of The problem of low fluorescence detection efficiency caused by the opacity of GOS(Tb) scintillator ensures the conversion efficiency of X-ray detection and improves the stability of the scintillation screen; adding an array collimator suppresses the fluorescence crosstalk range without reducing the thickness of the scintillation screen , Under the condition of ensuring the X-ray detection efficiency, the spatial resolution of the detector is improved.

本实用新型的其他优点、目标和特征在某种程度上将在随后的说明书中进行阐述,并且在某种程度上,基于对下文的考察研究对本领域技术人员而言将是显而易见的,或者可以从本实用新型的实践中得到教导。本实用新型的目标和其他优点可以通过下面的说明书来实现和获得。Other advantages, objects and features of the present invention will be set forth in the description that follows, and to the extent that will be apparent to those skilled in the art based on a study of the following, or may be Lessons are learned from the practice of the present invention. The objectives and other advantages of the present invention may be realized and attained by the following description.

附图说明Description of drawings

本实用新型的附图说明如下。The accompanying drawings of the present utility model are described as follows.

图1为本实用新型探测器结构剖面图。FIG. 1 is a cross-sectional view of the detector structure of the present invention.

图中:1.荧光反射层;2.闪烁屏;3.阵列准直器;4.光锥;5.CCD/CMOS图像传感器;6.数据采集与传输系统;7.屏蔽外壳;8.X射线入射窗口。In the figure: 1. Fluorescent reflection layer; 2. Scintillation screen; 3. Array collimator; 4. Light cone; 5. CCD/CMOS image sensor; 6. Data acquisition and transmission system; 7. Shielding shell; 8. X Ray entrance window.

具体实施方式Detailed ways

下面结合附图和实施例对本实用新型作进一步说明。The utility model will be further described below in conjunction with the accompanying drawings and embodiments.

如图1所示,一种高分辨X射线平板探测器,包括荧光反射层1、闪烁屏2、阵列准直器3、光锥4、CCD/CMOS图像传感器5、数据采集与传输系统6、屏蔽外壳7;As shown in FIG. 1, a high-resolution X-ray flat panel detector includes a fluorescent reflection layer 1, a scintillation screen 2, an array collimator 3, a light cone 4, a CCD/CMOS image sensor 5, a data acquisition and transmission system 6, shield shell 7;

所述荧光反射层1、闪烁屏2、阵列准直器3、光锥4、CCD/CMOS图像传感器5顺序叠加,由无色透明耦合剂连接。The fluorescent reflection layer 1 , the scintillation screen 2 , the array collimator 3 , the light cone 4 , and the CCD/CMOS image sensor 5 are sequentially stacked and connected by a colorless and transparent coupling agent.

所述闪烁屏2由GAGG:Ce单晶闪烁体制成,其探测平面尺寸不小于光锥4感光面尺寸。The scintillation screen 2 is made of GAGG:Ce single crystal scintillator, and the size of its detection plane is not smaller than the size of the photosensitive surface of the light cone 4 .

该实施例中,GAGG:Ce单晶闪烁体具有结构稳定、光产额高的优点,利用GAGG:Ce单晶闪烁体制作闪烁屏,解决了传统CsI(TI)容易潮解、性能不稳定的问题,解决了传统GOS(Tb)闪烁体不透明导致的荧光探测效率低的问题,保障X射线探测转换效率的同时提高了闪烁屏的稳定性。In this embodiment, the GAGG:Ce single crystal scintillator has the advantages of stable structure and high light yield. The use of GAGG:Ce single crystal scintillator to make a scintillation screen solves the problems that the traditional CsI(TI) is easy to deliquescence and has unstable performance. , which solves the problem of low fluorescence detection efficiency caused by the opacity of traditional GOS (Tb) scintillators, and improves the stability of the scintillation screen while ensuring the conversion efficiency of X-ray detection.

如图1所示,所述阵列准直器3采用低数值孔径光纤面板制成,其传光面尺寸不小于光锥4感光面尺寸。As shown in FIG. 1 , the array collimator 3 is made of a low numerical aperture optical fiber panel, and the size of its light transmission surface is not smaller than the size of the photosensitive surface of the light cone 4 .

该实施例中,阵列准直器采用工艺成熟、价格低廉的低数值孔径光纤面板制成,阵列准直器抑制了荧光串扰范围,在不降低闪烁屏厚度、保障X射线探测效率的情况下,提高了探测器的空间分辨率。In this embodiment, the array collimator is made of a low numerical aperture optical fiber panel with mature technology and low price. The array collimator suppresses the fluorescence crosstalk range, without reducing the thickness of the scintillation screen and ensuring the X-ray detection efficiency. Improves the spatial resolution of the detector.

所述荧光反射层1采用高反射率ESR反射膜制成。The fluorescent reflection layer 1 is made of a high reflectivity ESR reflection film.

所述无色透明耦合剂为高折射率环氧树脂胶。The colorless and transparent coupling agent is high-refractive-index epoxy resin glue.

所述光锥4大端与阵列准直器3耦合,小端与CCD/CMOS图像传感器5耦合。The big end of the light cone 4 is coupled with the array collimator 3 , and the small end is coupled with the CCD/CMOS image sensor 5 .

所述屏蔽外壳7由高原子序数、高密度金属制成。The shielding shell 7 is made of high atomic number, high density metal.

屏蔽外壳7上开设X射线入射窗口8,X射线入射窗口8采用全碳纤维板制成。The shielding shell 7 is provided with an X-ray incident window 8, and the X-ray incident window 8 is made of a full carbon fiber board.

最后说明的是,以上实施例仅用以说明本实用新型的技术方案而非限制,尽管参照较佳实施例对本实用新型进行了详细说明,本领域的普通技术人员应当理解,可以对本实用新型的技术方案进行修改或者等同替换,而不脱离本技术方案的宗旨和范围,其均应涵盖在本实用新型的权利要求范围当中。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should The technical solutions are modified or equivalently replaced without departing from the purpose and scope of the technical solutions, and they should all be included in the scope of the claims of the present invention.

Claims (8)

1. A high-resolution X-ray flat panel detector is characterized in that: the device comprises a fluorescent reflecting layer (1), a scintillation screen (2), an array collimator (3), a light cone (4), a CCD/CMOS image sensor (5), a data acquisition and transmission system (6) and a shielding shell (7);
the fluorescent reflecting layer (1), the scintillation screen (2), the array collimator (3), the light cone (4) and the CCD/CMOS image sensor (5) are sequentially overlapped and connected by a colorless transparent coupling agent.
2. A high resolution X-ray flat panel detector as claimed in claim 1 wherein: the scintillation screen (2) is made of a GAGG Ce monocrystal scintillator, and the size of a detection plane of the scintillation screen is not smaller than that of a light sensitive surface of the light cone (4).
3. The high-resolution X-ray flat panel detector according to claim 1, wherein: the array collimator (3) is made of a low numerical aperture optical fiber panel, and the size of a light transmission surface of the array collimator is not smaller than that of a light sensing surface of the light cone (4).
4. The high-resolution X-ray flat panel detector according to claim 1, wherein: the fluorescent reflection layer (1) is made of ESR reflection films with high reflectivity.
5. The high-resolution X-ray flat panel detector according to claim 1, wherein: the colorless transparent coupling agent is epoxy resin glue with high refractive index.
6. The high-resolution X-ray flat panel detector according to claim 1, wherein: the large end of the light cone (4) is coupled with the array collimator (3), and the small end of the light cone is coupled with the CCD/CMOS image sensor (5).
7. The high-resolution X-ray flat panel detector according to claim 1, wherein: the shielding shell (7) is made of high atomic number and high density metal.
8. The high-resolution X-ray flat panel detector according to claim 1 or 7, wherein: an X-ray incidence window (8) is arranged on the shielding shell (7), and the X-ray incidence window (8) is made of an all-carbon fiber plate.
CN202221089746.0U 2022-05-07 2022-05-07 High-resolution X-ray flat panel detector Expired - Fee Related CN217278960U (en)

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