CN217276600U - A whispering gallery mode microbubble probe resonator and pressure sensing system - Google Patents

Abstract

The utility model discloses a whispering gallery mode microbubble probe resonator, which comprises a micro-nano optical fiber and a whispering gallery mode microbubble cavity, wherein the whispering gallery mode microbubble cavity comprises a deformation wall area and a stress wall area, and the stress of the deformation wall area can be deformed and surrounds on the equatorial plane circumference of the whispering gallery mode microbubble cavity; a probe structure is arranged outside the stress wall area, and the axial direction of the probe structure is vertical to the equatorial plane of the whispering gallery mode micro-bubble cavity; the micro-nano optical fiber is coupled to the deformation wall area of the whispering gallery mode micro-bubble cavity. The whispering gallery mode microbubble probe resonator can be in point contact with a measured target, so that the accuracy of single-point pressure measurement of the measured target is improved. The utility model also discloses a pressure sensing system, including above-mentioned echo wall mode microbubble probe syntonizer.

Description

A whispering gallery mode microbubble probe resonator and pressure sensing system

technical field

The utility model relates to sensing technology, in particular to a whispering gallery mode microbubble probe resonator and a pressure sensing system.

Background technique

In the fields of micro-systems, material testing, biological sample testing, etc., the measurement of tiny physical quantities is very critical. Especially for the measurement of tiny force and displacement, it can not only provide feedback and guidance for users in actual operation, but also convert it into imaging information to image the surface of the object to be measured. In the preparation and assembly of microsystems, since the target object is very small and its mechanical strength is not high, it is often necessary to sense the force generated during operation to guide the operator to complete the operation without damaging the microdevice. In material testing, the measurement of material Young's modulus is very critical, which can be achieved by constant pressing of a standard probe. In the detection of biological samples, the mechanical properties of biological tissues can be obtained by pressing the surface with a standard probe, and the feedback generated by the pressing can also be converted into information of surface topography to realize the imaging of the surface of biological samples.

MEMS Force Sensors (MEMS Force Sensors) are a mature type of mechanical sensors, which can sense and measure force based on MEMS and electrical principles. This type of sensor has many types and wide applications, and is suitable for engineering applications with low precision. However, the nature of electricity dictates that it must have some volume to accommodate the circuit. In order to reduce the volume and ensure the stable operation of the circuit, such sensors generally have packages of specific shapes. In addition, the electrical nature also limits its resistance to electromagnetic interference, chemical corrosion, and inability to work in liquid environments containing electrolytes. These deficiencies largely make such sensors unable to work in some specific environments, and also limit the types of measurement targets. Poor accuracy and response time also make MEMS sensors unsuitable for high-precision micro-system assembly, material testing, scientific research and other scenarios.

As a kind of optical microcavity, the whispering gallery mode microcavity has attracted much attention due to its high quality factor and extremely small mode volume. When the external conditions change, the phase matching condition of the optical whispering gallery mode in the microcavity also changes, which is directly reflected as the resonant peak shift on the resonant spectrum. As a result, the external measurement to be measured is converted into an optical signal and read out. This sensing method has a micron-scale size and uses an optical signal as an information medium, which can achieve extremely high sensitivity and detection lower limit, and is very suitable for high-precision sensing scenarios. Compared with other mechanical sensors, it has the characteristics of easy preparation, low cost and high mechanical strength.

，ΔR为探测量引起的腔体形变量。The Chinese patent with the patent number of CN201910039059.4 discloses an optical sensor based on a double-bottle-shaped micro-resonator, including a double-bottle-shaped micro-resonator; a laser; a micro-nano fiber; and an optical detector; wherein, the micro-nano One end of the optical fiber is connected with the laser, and the other end is connected with the optical detector, and the micro-nano fiber is coupled with the double-bottle-shaped micro-resonator, and the micro-nano fiber is connected with the double-bottle-shaped micro-resonator The coupling point is located at the junction point of the two whispering gallery mode optical microcavities; wherein: the double-bottle-shaped micro-resonator is used to pass between the micro-nano optical fiber and the double-bottle-shaped micro-resonator The laser light entering the double-bottle-shaped micro-resonator cavity is coupled to form a whispering-gallery-type optical resonance in the two whispering-gallery-mode optical micro-cavities to obtain a resonance spectrum for detection by the optical sensor; The nanofiber is used for receiving the laser light emitted by the laser, and entering the laser light into the double-bottle-shaped micro-resonator through the coupling, obtaining the resonance spectrum through the coupling, and outputting the resonance spectrum to the optical detector. When the optical sensor detects physical quantities such as pressure, displacement, electric field, or magnetic field, it mainly affects the size of the optical microcavity in the whispering gallery mode. Under the action of these physical quantities, the material of the double-bottle-shaped micro-resonator will deform. The resonant wavelength shift satisfies

, ΔR is the cavity deformation amount caused by the detection amount.

However, the double-bottle-shaped micro-resonator of the above-mentioned optical sensor has a double-bottle-shaped resonant cavity, and the cavity surface is an arc surface. When the same pressure acts on different positions of the resonant cavity, the cavity shape is The variables are different, so it is more suitable for regional pressure measurement such as air pressure and hydraulic pressure, but when used for single-point pressure measurement such as pressure, displacement, target Young's modulus, etc. The difference of the force position affects the measurement accuracy. At the same time, the cavity surface of the resonator is used as the force position. When it is in contact with the measured target, it can only achieve surface contact, but cannot achieve point contact in the true sense, which will also Affects the accuracy of single-point pressure measurement.

Utility model content

In order to solve the above-mentioned deficiencies of the prior art, the present invention provides a whispering gallery mode microbubble probe resonator, which can achieve point contact with the measured target, so as to improve the accuracy of single-point pressure measurement on the measured target.

The utility model also provides a pressure sensing system, comprising the above-mentioned whispering gallery mode microbubble probe resonator.

The technical problem to be solved by this utility model is realized through the following technical solutions:

A whispering gallery mode microbubble probe resonator includes a waveguide and a whispering gallery mode microbubble cavity, and also includes a contact probe, the contact probe is arranged outside the whispering gallery mode microbubble cavity, and its axial direction is perpendicular to the The equatorial plane of the whispering gallery mode microbubble cavity; the cavity wall of the whispering gallery mode microbubble cavity includes a sensitive area and a non-sensitive area, the sensitive area can be deformed by force, and surrounds the whispering gallery mode microbubble cavity on the circumference of the equatorial plane; the waveguide is coupled to the sensitive area of the whispering gallery mode microbubble cavity, and the contact probe is located on the non-sensitive area.

Further, the wall thickness of the sensitive area is smaller than the wall thickness of the non-sensitive area.

Further, the cavity wall of the whispering gallery mode microbubble cavity has the smallest wall thickness at the sensitive area.

Further, the waveguide includes a micro-nano fiber, and the micro-nano fiber is coupled with the sensitive region of the whispering gallery mode microbubble cavity.

Further, the waveguide further includes an incident end fiber and an exit end fiber, the incident end fiber is axially connected to one side of the micro-nano fiber, and the exit end fiber is axially connected to the micro-nano fiber. on the other side.

Further, the micro-nano fiber is parallel to the tangential direction of the equatorial plane of the whispering gallery mode microbubble cavity.

Further, a thin tube structure is connected to the other end of the whispering gallery mode microbubble cavity opposite to the contact probe, and the thin tube structure is also connected to the other end opposite to the whispering gallery mode microbubble cavity. A capillary vertebral portion is connected, and the capillary vertebral portion is further connected with a quartz capillary on the other end opposite to the capillary vertebral portion.

A pressure sensing system, comprising a tunable laser, a spectrometer and the above-mentioned whispering gallery mode microbubble probe resonator, wherein the tunable laser is connected to an incident end of a waveguide of the whispering gallery mode microbubble probe resonator , the spectrometer is connected to the outgoing end of the waveguide of the whispering gallery mode microbubble probe resonator.

Further, a control computing device is also included, and the control computing device is respectively connected in communication with the tunable laser and the spectrometer.

Further, the control computing device is a personal computer, an industrial control host or a mobile terminal.

The utility model has the following beneficial effects: the whispering gallery mode microbubble probe resonator is provided with a special deformation wall area and a force wall area on the cavity wall of the whispering gallery mode microbubble cavity, and the force wall area passes through The probe structure directly acts on the pressure, and translates along the pressure direction when the force is applied. Cause the equatorial plane radius of the whispering gallery mode microbubble cavity to change, limit the action position of the pressure on the probe structure, and limit the action direction of the pressure to the axial direction of the probe structure, avoiding the equatorial plane The amount of radius change is different due to the force direction and force position. At the same time, the probe structure can realize point contact with the measured target, which is suitable for the pressure, displacement and target Young's modulus generated by contact pressing. Equivalent single-point pressure measurement, and the axial direction of the probe structure is perpendicular to the equatorial plane of the whispering gallery mode microbubble cavity, which can cause the largest equatorial plane radius change under the smallest force, and has a very small measurement lower limit.

Description of drawings

1 is an axial cross-sectional view of a whispering gallery mode microbubble probe resonator provided by the utility model;

2 is a sectional view of the equatorial plane of a whispering gallery mode microbubble probe resonator provided by the utility model;

Fig. 3 is the force schematic diagram of the whispering gallery mode microbubble probe resonator provided by the utility model;

4 is a schematic diagram of the principle of the pressure sensing system provided by the present invention;

5 is a step diagram of a method for preparing a whispering gallery mode microbubble probe resonator by using a carbon dioxide laser provided by the present invention;

6 is a schematic diagram of a quartz capillary in a method for preparing a whispering gallery mode microbubble probe resonator using carbon dioxide laser provided by the present invention;

7 is a schematic diagram of forming a thin tube structure in a method for preparing a whispering gallery mode microbubble probe resonator by using a carbon dioxide laser provided by the present invention;

8 is a schematic diagram of forming a whispering gallery mode microbubble cavity in a method for preparing a whispering gallery mode microbubble probe resonator by a carbon dioxide laser provided by the present invention;

9 is a schematic diagram of forming a contact probe in a method for preparing a whispering gallery mode microbubble probe resonator by using a carbon dioxide laser provided by the present invention.

Detailed ways

The present invention will be described in detail below with reference to the accompanying drawings and embodiments, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary, and are intended to be used to explain the present invention, but should not be construed as a limitation of the present invention.

In the description of the present invention, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical" , "horizontal", "top", "bottom", "inside", "outside" and other indications of orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, only for the convenience of describing the present utility model and simplifying the description , rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation on the present invention.

Furthermore, the terms "first", "second" and "third" are used for descriptive purposes only, and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, a feature defined as "first", "second", "third" may expressly or implicitly include one or more of that feature. In the description of the present invention, "plurality" means two or more, unless otherwise expressly and specifically defined.

In the present utility model, unless otherwise expressly specified and limited, terms such as "installation", "connection", "connection", "fixation", "arrangement" and the like should be understood in a broad sense, for example, it may be a fixed connection, or It can be a detachable connection or an integrated body; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can also be the internal communication of two elements or the interaction of the two elements relation. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

Example 1

As shown in Figures 1 and 2, a whispering gallery mode microbubble probe resonator includes a waveguide 1, a whispering gallery mode microbubble cavity 23 and a contact probe 24, the contact probe 24 is arranged in the whispering gallery mode Outside the microbubble cavity 23, its axial direction is perpendicular to the equatorial plane of the whispering gallery mode microbubble cavity 23; the cavity wall of the whispering gallery mode microbubble cavity 23 includes a sensitive area 231 and a non-sensitive area 232, the sensitive area 231 can be deformed by force, and surrounds the equatorial circumference of the whispering gallery mode microbubble cavity 23; the waveguide 1 is coupled to the sensitive area 231 of the whispering gallery mode microbubble cavity 23, and the contact probe 24 on the non-sensitive area 232 .

The whispering gallery mode microbubble cavity 23 in the whispering gallery mode microbubble probe resonator has a high quality factor and a small mode volume. When an optical signal of a specific wavelength is coupled by the waveguide 1 from the equatorial plane into the In the case of the whispering gallery mode microbubble cavity 23, if the optical signal satisfies the phase matching condition, that is, the optical path is equal to an integer multiple of the wavelength, continuous total reflection will occur on the equatorial plane of the whispering gallery mode microbubble cavity 23, and then from The coupling point is re-emitted out of the whispering gallery mode microbubble cavity 23, and the resonance spectrum of the optical signal in the whispering gallery mode microbubble cavity 23 is related to the equatorial radius of the whispering gallery mode microbubble cavity 23, as shown in Figure 3 As shown, when the whispering gallery mode microbubble cavity 23 is compressed by force, the radius of the equatorial plane of the whispering gallery mode microbubble cavity 23 also changes, which in turn causes the resonant spectrum to shift. The equatorial radius change of the whispering gallery mode microbubble cavity 23 is related to ΔR, and the equatorial radius change ΔR of the whispering gallery mode microbubble cavity 23 is also related to the whispering gallery mode microbubble cavity 23 . The compression degree is related, and the compression degree of the whispering gallery mode microbubble cavity 23 is related to the magnitude of the pressure F, so it can be calculated by the shift degree of the resonance spectrum. The magnitude of the pressure F.

The whispering gallery mode microbubble probe resonator is provided with a contact probe 24, and the contact probe 24 is in contact with a single point on the measured object and is stressed, which can realize the pressure, displacement, target The pressure measurement at a single point, such as the modulus, is limited, and the action position of the pressure is limited to the contact probe 24, and the action direction of the pressure is limited to the axial direction of the contact probe 24, so as to avoid the whispering gallery mode The variation of the radius of the equatorial plane of the microbubble cavity 23 is different due to the force direction and the force position, and the axial direction of the contact probe 24 is perpendicular to the equatorial plane of the whispering gallery mode microbubble cavity 23, which can be The maximum equatorial radius change is caused under the minimum force, and it has a very small lower limit of measurement; at the same time, a special sensitive area 231 and a non-sensitive area 232 are set on the cavity wall of the whispering gallery mode microbubble cavity 23 . The non-sensitive area 232 directly acts on the pressure through the contact probe 24, and translates along the pressure direction when the pressure is applied. Deformation occurs when the pressure is pressed down, thereby causing the equatorial radius of the whispering gallery mode microbubble cavity 23 to change.

The non-sensitive area 2321 will also be deformed by a certain amount of force, or not deformed, depending on the wall thickness of the non-sensitive area 232, the greater the wall thickness of the non-sensitive area 232, the deformation under force. When the contact probe 24 acts on the pressure, part of the pressure causes the deformation of the non-sensitive area 232, and the remaining part is transmitted to the sensitive area 231, causing the deformation of the sensitive area 231 , the deformation of the non-sensitive area 232 is much smaller than the deformation of the sensitive area 231 , so it can be ignored, and it is considered that the sensitive area 231 bears all the pressure.

The wall thickness of the sensitive area 231 is smaller than the wall thickness of the non-sensitive area 232, so that when the contact probe 24 is pressed by the object to be measured, the deformation of the non-sensitive area 232 when subjected to force is as small as possible Or not deformed, and translates toward the sensitive area 231 along the force direction, and the sensitive area 231 is deformed by the translational extrusion of the non-sensitive area 232 .

Preferably, the wall thickness of the cavity wall of the whispering gallery mode microbubble cavity 23 is the smallest at the sensitive area 231 .

The waveguide 1 includes a micro-nano fiber 12, and the micro-nano fiber 12 is coupled with the sensitive region 231 of the whispering gallery mode microbubble cavity 23, so that the optical signal in the micro-nano fiber 12 can be coupled into the The whispering gallery mode microbubble cavity 23 and the optical signals in the whispering gallery mode microbubble cavity 23 can be coupled into the micro-nano fiber 12 .

The waveguide 1 further includes an incident end fiber 11 and an exit end fiber 13, the incident end fiber 11 is axially connected to one side of the micro-nano fiber 12, and the exit end fiber 13 is axially connected to the micro-nano fiber 12. on the other side of the nanofiber 12 .

The incident end fiber 11, the micro-nano fiber 12 and the output end fiber 13 all include a core and a cladding, the cladding is clad on the outer peripheral wall of the core, and the cladding and the cladding are in sequence. The core and the core are also connected in sequence; the core and the cladding have different refractive indices, so that the optical signal can pass through the interface between the core and the cladding Total reflection occurs at the incident end fiber 11 , the micro-nano fiber 12 and the exit end fiber 13 along the axial direction.

The micro-nano fiber 12 is parallel to the tangential direction of the equatorial plane of the whispering gallery mode microbubble cavity 23 .

The whispering gallery mode microbubble cavity 23 is connected with a thin tube structure 22 on the other end opposite to the contact probe 24 , and the thin tube structure 22 is connected to the other end opposite to the whispering gallery mode microbubble cavity 23 The capillary vertebral portion 21 is also connected, and the capillary vertebral portion 21 is also connected with a quartz capillary 22 on the other end opposite to the capillary vertebral portion 21; Both the microbubble cavity 23 and the contact probe 24 are formed by the quartz capillary 2, and they are coaxial.

Embodiment 2

As shown in FIG. 4, a pressure sensing system includes the whispering gallery mode microbubble probe resonator described in Embodiment 1, and

a tunable laser for emitting an optical signal into the waveguide of the whispering gallery mode microbubble probe resonator;

a spectrometer, used for collecting the optical signal emitted from the waveguide of the whispering gallery mode microbubble probe resonator, and converting the collected optical signal into the resonance spectrum of the whispering gallery mode microbubble probe resonator;

Control computing means for controlling the tunable laser to emit light signals into the waveguide 1 of the whispering gallery mode microbubble probe resonator, and controlling the spectrometer to collect data from the whispering gallery mode microbubble probe resonator Then, the pressure is calculated according to the resonance spectrum analysis of the whispering gallery mode microbubble probe resonator converted by the spectrometer.

Specifically, when measuring the pressure F, the tunable laser first emits an optical signal into the optical fiber 11 at the incident end of the waveguide 1, and the optical signal is coupled into the whispering gallery mode through the micro-nano fiber 12 of the waveguide 1 In the cavity of the microbubble cavity 23, the wavelength of the optical signal is modulated to satisfy the phase matching condition of the whispering gallery mode microbubble cavity 23, so that the modulated optical signal is in the equatorial plane of the whispering gallery mode microbubble cavity 23. A continuous total reflection occurs on the surface of the waveguide, which causes the resonance of the whispering gallery mode and is re-coupled into the micro-nano fiber 12 of the waveguide 1. Finally, the spectrometer collects the optical signal emitted from the output fiber 13 of the waveguide 1 and analyzes it to obtain the The resonant spectrum of the whispering gallery mode microbubble cavity 23 is described; the contact probe 24 is contacted and pressed with multiple points on the standard object, causing the equatorial surface radius of the whispering gallery mode microbubble cavity 23 to change to different degrees to obtain There are multiple resonance spectra with different offset degrees, and the relationship curve between the offset degree of the resonance spectrum and the size of the pressure F is calculated; the contact probe 24 is contacted and pressed with a single point on the measured target, and the measured object is obtained. Measure the resonance spectrum at this point of the target, and finally calculate the pressure F at this point on the measured target according to the shift degree of the resonance spectrum at this point and the relationship curve between the shift degree of the resonance spectrum and the pressure F size.

The tunable laser is connected to the incident end fiber 11 of the waveguide 1, the spectrometer is connected to the exit end fiber 13 of the waveguide 1, and the control computing device is respectively connected to the tunable laser and the spectrometer for communication. .

Embodiment 3

As shown in FIG. 5 , a method for preparing the whispering gallery mode microbubble probe resonator described in Embodiment 1 by using a carbon dioxide laser includes the following steps:

S100 : Adjust the spot position of the carbon dioxide laser, and position the spot of the carbon dioxide laser on a first pre-position of a quartz capillary 2 as shown in FIG. 6 .

In this step S100, the quartz capillary 2 has a lumen 31 with openings at both ends.

The position of the first pre-positioning on the quartz capillary 2 can be determined according to the overall length of the whispering gallery mode microbubble probe resonator. The spot position is positioned on the quartz capillary 2, and then the spot position of the carbon dioxide laser is moved along the axial direction of the quartz capillary 2, so that the spot position of the carbon dioxide laser is positioned on the quartz capillary 2. On the first reservation.

S200 : Adjust the spot power of the carbon dioxide laser, so that the spot of the carbon dioxide laser heats and softens the first pre-positioning of the quartz capillary 2 .

In this step S200, the carbon dioxide laser is emitted by a laser light source, and the spot power of the carbon dioxide laser is adjusted by controlling the working power of the laser light source, or an attenuation unit is set on the output path of the carbon dioxide laser, The carbon dioxide laser is subjected to optical attenuation by controlling the attenuation unit to adjust the spot power of the carbon dioxide laser.

S300: After driving the two ends of the quartz capillary 2 to translate axially away from each other, the first pre-positioning of the quartz capillary 2 is thinned to form a thin tube structure 22 as shown in FIG. 7 , Turn off the CO2 laser.

In this step S300 , after the first predetermined position of the quartz capillary 2 is heated and softened by the carbon dioxide laser, during the process of the two ends of the quartz capillary 2 moving away from each other in the axial direction, the first predetermined position At the same time, the tube wall will gradually become thinner and converge toward the center of the tube cavity 31 of the quartz capillary 2 to form the thin tube structure 22 . The inner diameter and outer diameter of the thin tube structure 22 are smaller than the inner diameter and outer diameter of the quartz capillary 2 , and both sides of the capillary structure 22 are connected to the quartz capillary 2 on both sides through a capillary vertebra 21 .

400 : Fill the quartz capillary 2 with gas, adjust the spot position of the carbon dioxide laser, and position the spot of the carbon dioxide laser on the second predetermined position of the capillary structure 22 .

In this step 400, gas is pumped into the lumen 31 of the quartz capillary 2 from one end face of the quartz capillary 2 through a gas pump, and the spot position of the carbon dioxide laser is positioned from the first pre-positioning at the same time. move to the second pre-position of the thin tube structure 22 .

The distance between the second pre-positioning and the two ends of the thin tube structure 22 depends on the required cavity length of the whispering gallery mode microbubble cavity 23 .

Therefore, before step 400, the following steps are also included:

One end of the quartz capillary 2 is connected to an air pump.

Wherein, connecting one end face of the quartz capillary 2 to an air pump may be performed in any step before step 400 .

In this embodiment, the air pump is connected to one end face of the quartz capillary 2 before adjusting the spot position of the carbon dioxide laser to the first predetermined position of the quartz capillary 2 in step S100.

S500: Restart the carbon dioxide laser to heat and soften the second pre-position of the thin tube structure 22, and at the same time cause the gas at the second pre-position to be heated and expand, so that the thin tube structure 22 is in the second pre-position After a whispering gallery mode microbubble cavity 23 as shown in FIG. 8 is formed at the pre-position, the carbon dioxide laser is turned off.

In this step S500, after the gas is pumped in from the quartz capillary 2 connected to one end face of the gas pump, it passes through the thin tube structure 22 and flows out from the quartz capillary 2 on the other end face. When the gas at the position is heated and expands, due to the small inner diameter of the thin tube structure 22, the speed of the gas flowing out from the quartz capillary 2 on the other end face through the thin tube structure 22 is limited, so that the second pre-positioned position is limited. The air pressure increases rapidly, which is much higher than the external air pressure, and then the thin tube structure 22 or the quartz capillary 2 close to the gas-filled end face is expanded at the second pre-position to form the whispering gallery mode microbubble cavity twenty three.

The tube wall of the quartz capillary 2 forms the cavity wall of the whispering gallery mode microcavity 23, and the tube cavity of the quartz capillary 2 forms the resonance cavity of the whispering gallery mode microbubble cavity 23; The stress decreases from the middle of the second pre-positioning to both sides, so that the cavity wall of the whispering gallery mode microbubble cavity 23 gradually becomes thinner from the equator to both sides, so as to form a surrounding of the whispering gallery mode microbubble cavity A sensitive area 231 as shown in Figures 1 and 2 on the circumference of the equatorial plane of The non-sensitive area 232 is not deformed by force or the deformation amount is small, which is negligible compared with the deformation amount of the sensitive area 231 .

S600: Adjust the spot position of the carbon dioxide laser, and position the spot of the carbon dioxide laser on a third predetermined point of the thin tube structure 22, where the third predetermined point is located in the whispering gallery mode microbubble cavity 23 At the same time, the gas in the quartz capillary 2 is released.

In this step S600, the spot position of the carbon dioxide laser is moved forward or backward in the axial direction from the waveguide 1 and the whispering gallery mode microbubble cavity 23 to the position of the whispering gallery mode microbubble cavity 23 On one side, the gas in the quartz capillary 2 is released by the gas pump.

Wherein, the distance between the third predetermined point and the whispering gallery mode microbubble cavity 23 may be determined by the required length of the contact probe.

S700 : Restart the carbon dioxide laser to heat and soften the third predetermined point of the thin tube structure 22 .

S800 : Drive the two ends of the quartz capillary 2 to translate opposite to each other in the axial direction respectively, so as to break the third predetermined point of the thin tube structure 22 , so that the broken thin tube structure 22 is microscopically in the whispering gallery mode. A contact probe 24 as shown in FIG. 9 is formed on the bubble cavity 23 .

In this step S800, after the thin tube structure 22 is heated and softened by the carbon dioxide laser, in the process that the two ends of the quartz capillary 2 are respectively moved away from each other in the axial direction, the tube wall of the thin tube structure 22 It gradually becomes thinner, and at the same time converges toward the center of the lumen 31 inside, and finally breaks to form the contact probe 24 .

The contact probe 24 is located on the non-sensitive area 232 of the whispering gallery mode microbubble cavity 23 , and its axial direction is perpendicular to the equatorial plane of the whispering gallery mode microbubble cavity 23 .

After the fabrication of the contact probe 24 is completed, the air pump on one end of the quartz capillary 2 can be removed.

S900 : Coupling a waveguide 1 with the circumference of the equatorial plane of the whispering gallery mode microbubble cavity 23 .

In this step S900, the waveguide 1 includes a micro-nano fiber 12, and the micro-nano fiber 12 is coupled with the sensitive area 231 on the equatorial plane of the whispering gallery mode microbubble cavity 23, so that the micro-nano fiber 12 The optical signal in the whispering gallery mode microbubble cavity 23 can be coupled into the whispering gallery mode microbubble cavity 23 , and the optical signal in the whispering gallery mode microbubble cavity 23 can be coupled into the micro-nano fiber 12 .

The waveguide 1 further includes an incident end fiber 11 and an exit end fiber 13, the incident end fiber 11 is axially connected to one side of the micro-nano fiber 12, and the exit end fiber 13 is axially connected to the micro-nano fiber 12. on the other side of the nanofiber 12 .

The incident end fiber 11, the micro-nano fiber 12 and the output end fiber 13 all include a core and a cladding, the cladding is clad on the outer peripheral wall of the core, and the cladding and the cladding are in sequence. The core and the core are also connected in sequence; the core and the cladding have different refractive indices, so that the optical signal can pass through the interface between the core and the cladding Total reflection occurs at the incident end fiber 11 , the micro-nano fiber 12 and the exit end fiber 13 along the axial direction.

The micro-nano fiber 12 is parallel to the tangential direction of the equatorial plane of the whispering gallery mode microbubble cavity 23 .

Before step S100, the method further includes the following steps:

Correct the focusing degree of the carbon dioxide laser, so that the light spot of the carbon dioxide laser can evenly cover the circumference of the tube wall at the same position of the quartz capillary 2, and at the same time, the two ends of the quartz capillary 2 are respectively set in the first three-dimensional on the displacement platform and the second three-dimensional displacement platform.

When the light spot of the carbon dioxide laser can evenly cover the circumference of the tube wall at the same position of the quartz capillary 2 , the carbon dioxide laser can uniformly heat the entire tube wall of the quartz capillary 2 at the same position.

In step S100, step 400 and step S600, both ends of the quartz capillary 2 are moved in the same direction by the driving of the first three-dimensional displacement platform and the second three-dimensional moving platform to move relative to the spot position of the carbon dioxide laser , and then adjust the action point of the spot position of the carbon dioxide laser on the quartz capillary 2, and in steps S300 and S800, the first three-dimensional displacement platform and the second three-dimensional displacement platform are driven along the axial direction. moving, so as to form a pulling force opposite to the two ends of the quartz capillary 2 in the axial direction.

Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the embodiments of the present utility model rather than limit them. Although the embodiments of the present utility model have been described in detail with reference to the preferred Personnel should understand that the technical solutions of the embodiments of the present invention can still be modified or equivalently replaced, and these modifications or equivalent replacements cannot make the modified technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. A whispering gallery mode microbubble probe resonator comprises a waveguide and a whispering gallery mode microbubble cavity, and is characterized by further comprising a contact probe, wherein the contact probe is arranged outside the whispering gallery mode microbubble cavity and is axially vertical to an equatorial plane of the whispering gallery mode microbubble cavity; the cavity wall of the whispering gallery mode micro-bubble cavity comprises a sensitive area and a non-sensitive area, wherein the sensitive area is deformable under stress and surrounds the circumference of the equatorial plane of the whispering gallery mode micro-bubble cavity; the waveguide is coupled to a sensitive region of the whispering gallery mode microbubble cavity, and the contact probe is located on the non-sensitive region.

2. The whispering gallery mode microbubble probe resonator of claim 1, wherein the wall thickness of the sensitive region is less than the wall thickness of the non-sensitive region.

3. The whispering gallery mode microbubble probe resonator of claim 2, wherein a wall thickness of a cavity wall of the whispering gallery mode microbubble cavity at the sensitive region is minimal.

4. The whispering gallery mode microbubble probe resonator of claim 1, wherein the waveguide comprises a micro-nanofiber coupled to a sensitive region of the whispering gallery mode microbubble cavity.

5. The whispering gallery mode microbubble probe resonator of claim 4, wherein the waveguide further comprises an incident end fiber and an exit end fiber, the incident end fiber is axially connected to one side of the micro-nano fiber, and the exit end fiber is axially connected to the other side of the micro-nano fiber.

6. The whispering gallery mode microbubble probe resonator of claim 4, wherein the micro-nano optical fiber is parallel to an equatorial plane tangential direction of the whispering gallery mode microbubble cavity.

7. The whispering gallery mode microbubble probe resonator of claim 1, wherein the whispering gallery mode microbubble cavity is connected to a thin tube structure at the other end opposite to the contact probe, the thin tube structure is further connected to a capillary cone portion at the other end opposite to the whispering gallery mode microbubble cavity, and the capillary cone portion is further connected to a quartz capillary tube at the other end opposite to the capillary cone portion.

8. A pressure sensing system comprising a tunable laser connected to an input end of a waveguide of a whispering gallery mode microbubble probe resonator, a spectrometer connected to an output end of the waveguide of the whispering gallery mode microbubble probe resonator, and the whispering gallery mode microbubble probe resonator of any of claims 1-7.

9. The pressure sensing system of claim 8, further comprising a control computing device in communication with the tunable laser and spectrometer, respectively.

10. The pressure sensing system of claim 9, wherein the control computing device is a personal computer, an industrial control host, or a mobile terminal.

Images