CN217115901U

CN217115901U - Two-axis displacement device

Info

Publication number: CN217115901U
Application number: CN202220082949.0U
Authority: CN
Inventors: 龚威; 胡兵; 彭仁强; 江旭初
Original assignee: Shanghai Yinguan Semiconductor Technology Co Ltd
Current assignee: Shanghai Yinguan Semiconductor Technology Co Ltd
Priority date: 2022-01-13
Filing date: 2022-01-13
Publication date: 2022-08-02
Anticipated expiration: 2032-01-13

Abstract

The utility model provides a diaxon displacement device, through the counter-force guide effect combination of first quality piece, second quality piece, third quality piece and fourth quality piece, can turn into the rotation angular displacement that the plane motion subassembly arouses at the displacement in-process, turn into first quality piece and the straight line displacement or the displacement of second quality piece on first horizontal direction poor, perhaps change into the straight line displacement or the displacement of third quality piece and fourth quality piece on the second horizontal direction poor. Compared with the prior art, the scheme realizes the effects of motion recoil and buffering digestion of additional rotating torque, greatly weakens the vibration interference influence on the supporting table in the rotation direction in the motion process of the plane motion assembly, and improves the stability and the positioning precision of the overall motion of the displacement device. Compared with the existing displacement device, the scheme has no problem of reaction delay and does not cause additional vibration impact to the displacement device in the processes of starting and accelerating and decelerating.

Description

Two-axis displacement device

Technical Field

The utility model relates to an accurate motion equipment technical field particularly, relates to a diaxon displacement device.

Background

In the field of manufacturing of precision sports equipment, a large-stroke motion platform technology is a core technology and is always highly valued in the industry. In a large-stroke displacement device, a large reverse acting force is generated by the movement of the displacement device, and particularly, the reverse acting force generated in the acceleration and deceleration stages is larger, so that the positioning accuracy, the reaction speed and the stabilization time of the displacement device are greatly disturbed by the vibration impact influence caused by the reverse acting force, and therefore, a balance mass part needs to be designed to serve as a reverse force guide mechanism to bear the reverse acting force and the reverse displacement of the displacement device and counteract the vibration impact influence generated in the displacement process.

The design of the balance mass part is based on the momentum conservation principle, the driving force of the motor acts on the plane motion assembly to push the plane motion assembly to move, meanwhile, the driving counter force of the motor acts on the balance mass to push the balance mass to move reversely, and the design of the balance mass part can basically eliminate the disturbance transmitted to the device frame.

In the prior art, a displacement device for supporting plane motion through an air floatation device is provided, so that the action of horizontal two-degree-of-freedom reaction force guiding is realized, and the action of a rotation moment on a horizontal plane is also added, and the angular displacement generated by the rotation moment does not meet the angular momentum conservation principle. In order to solve the problem of angular displacement caused by rotation torque, various methods and measures are introduced into each unit in sequence, such as a flywheel mechanism mentioned in patent CN1252542C, a rotary manipulator mentioned in patent CN100526993C, a counter torque mechanism mentioned in patent CN104181778 and the like, and although the measures solve the problem of angular displacement caused by additional rotation torque to a certain extent, the additional mechanisms need to be started and moved repeatedly, so that reaction delay is caused, and additional vibration impact influence is caused on a displacement device in the starting and acceleration and deceleration processes.

SUMMERY OF THE UTILITY MODEL

The utility model provides a diaxon displacement device to the displacement device who solves among the prior art offsets the poor problem of additional rotation moment effect.

In order to solve the problems, the utility model provides a two-axis displacement device, which comprises a support table, a balance mass component and a plane motion component; the balance mass assembly comprises a first mass block, a second mass block, a third mass block and a fourth mass block, the first mass block and the second mass block can be arranged on the support platform in a sliding mode along a first horizontal direction, the first mass block and the second mass block are arranged oppositely in a second horizontal direction, the third mass block and the fourth mass block can be arranged on the support platform in a sliding mode along the second horizontal direction, the third mass block and the fourth mass block are arranged oppositely in the first horizontal direction, and the second horizontal direction is perpendicular to the first horizontal direction; the planar motion assembly comprises a motion table and a driving assembly, the motion table is connected to the first mass block, the second mass block, the third mass block and the fourth mass block in a sliding mode respectively, a stator of the driving assembly is fixed relative to the balancing mass assembly, and a rotor of the driving assembly is fixed relative to the motion table so as to drive the motion table to move along the first horizontal direction and/or the second horizontal direction.

Further, the balance mass assembly further comprises a first guide mechanism, a second guide mechanism, a third guide mechanism and a fourth guide mechanism; the first guide mechanism comprises a first guide rail and a first moving part, the first guide rail is connected to the support table and extends along a first horizontal direction, the first moving part can be matched with the first guide rail in a sliding or rolling mode, and the first moving part is connected with the first mass block; the second guide mechanism comprises a second guide rail and a second moving part, the second guide rail is connected to the support platform and extends along the first horizontal direction, the second moving part can be matched with the second guide rail in a sliding or rolling mode, and the second moving part is connected with the second mass block; the third guide mechanism comprises a third guide rail and a third moving part, the third guide rail is connected to the support platform and extends along the second horizontal direction, the third moving part is matched with the third guide rail in a sliding or rolling manner, and the third moving part is connected with the third mass block; the fourth guide mechanism comprises a fourth guide rail and a fourth moving part, the fourth guide rail is connected to the support platform and extends along the second horizontal direction, the fourth moving part is matched with the fourth guide rail in a sliding or rolling mode, and the fourth moving part is connected with the fourth mass block.

Further, still including preventing floating the subassembly, prevent floating the subassembly and set up on a supporting bench, prevent floating the subassembly and include: the first anti-floating part comprises a first driving motor, a stator of the first driving motor is connected to the supporting table, and a rotor of the first driving motor is connected to one end of the first mass block; the second floating prevention part comprises a second driving motor, a stator of the second driving motor is connected to the supporting platform, and a rotor of the second driving motor is connected to one end of the second mass block; the third floating prevention part comprises a third driving motor, a stator of the third driving motor is connected to the supporting platform, and a rotor of the third driving motor is connected to one end of the third mass block; the fourth prevents floating the portion, and the fourth prevents floating the portion and includes fourth driving motor, and fourth driving motor's stator is connected to the brace table, and fourth driving motor's active cell is connected to the one end of fourth quality piece.

Furthermore, the first anti-floating part also comprises a first elastic mechanism, one end of the first elastic mechanism is connected to the other end of the first mass block, and the other end of the first elastic mechanism is connected to the support platform; the second anti-floating part also comprises a second elastic mechanism, one end of the second elastic mechanism is connected to the other end of the second mass block, and the other end of the second elastic mechanism is connected to the support platform; the third floating prevention part also comprises a third elastic mechanism, one end of the third elastic mechanism is connected to the other end of the third mass block, and the other end of the third elastic mechanism is connected to the support platform; the fourth floating-preventing part further comprises a fourth elastic mechanism, one end of the fourth elastic mechanism is connected to the other end of the fourth mass block, and the other end of the fourth elastic mechanism is connected to the supporting table.

Further, the driving assembly comprises a fifth driving motor, a sixth driving motor, a seventh driving motor, an eighth driving motor, a ninth guiding mechanism and a tenth guiding mechanism; a stator of the fifth driving motor is fixed relative to the first mass block, and a rotor of the fifth driving motor is connected to one end of the ninth guide mechanism; a stator of the sixth driving motor is fixed relative to the second mass block, and a rotor of the sixth driving motor is connected to the other end of the ninth guide mechanism; a stator of the seventh driving motor is fixed relative to the third mass block, and a rotor of the seventh driving motor is connected to one end of the tenth guide mechanism; a stator of the eighth driving motor is fixed relative to the fourth mass block, and a rotor of the eighth driving motor is connected to the other end of the tenth guide mechanism; the ninth guide mechanism extends along the second horizontal direction, and is matched with the motion platform to drive the motion platform to move along the first horizontal direction and guide the motion platform in the second horizontal direction; the tenth guiding mechanism extends along the first horizontal direction, and the tenth guiding mechanism is matched with the moving table to drive the moving table to move along the second horizontal direction and guide the moving table in the first horizontal direction.

Furthermore, the driving assembly further comprises a fifth guide mechanism, a sixth guide mechanism, a seventh guide mechanism and an eighth guide mechanism; the fifth guide mechanism comprises a fifth guide rail and a fifth moving part, the fifth guide rail is connected to the first mass block and extends along the first horizontal direction, the fifth moving part is matched with the fifth guide rail in a sliding or rolling mode, and the fifth moving part is connected with one end of the ninth guide mechanism; the sixth guide mechanism comprises a sixth guide rail and a sixth moving part, the sixth guide rail is connected to the second mass block and extends along the first horizontal direction, the sixth moving part is matched with the sixth guide rail in a sliding or rolling manner, and the sixth moving part is connected with the other end of the ninth guide mechanism; the seventh guide mechanism comprises a seventh guide rail and a seventh moving part, the seventh guide rail is connected to the third mass block and extends along the second horizontal direction, the seventh moving part is matched with the seventh guide rail in a sliding or rolling manner, and the seventh moving part is connected with one end of the tenth guide mechanism; the eighth guide mechanism comprises an eighth guide rail and an eighth moving part, the eighth guide rail is connected to the fourth mass block and extends along the second horizontal direction, the eighth moving part is matched with the eighth guide rail in a sliding or rolling mode, and the eighth moving part is connected with the other end of the tenth guide mechanism.

Furthermore, the plane motion assembly also comprises a connecting frame, and the motion platform is arranged on the connecting frame; the ninth guide mechanism comprises a first guide beam and a ninth mechanical guide rail arranged on the first guide beam, the first guide beam and the ninth mechanical guide rail both penetrate through the connecting frame, and the ninth mechanical guide rail is connected with the connecting frame in a sliding manner; the tenth guide mechanism and the ninth guide mechanism are spaced apart in the vertical direction, the tenth guide mechanism comprises a second guide beam and a tenth mechanical guide rail arranged on the second guide beam, the second guide beam and the tenth mechanical guide rail both penetrate through the connecting frame, and the tenth mechanical guide rail is in sliding connection with the connecting frame; a rotor of the fifth driving motor is connected to one end of the first guide beam, and a rotor of the sixth driving motor is connected to the other end of the first guide beam; and a rotor of the seventh driving motor is connected to one end of the second guide beam, and a rotor of the eighth driving motor is connected to the other end of the second guide beam.

Further, the first mass block comprises a first main body and a first supporting beam which is convexly arranged on the first main body, the first supporting beam extends along the first horizontal direction, a stator of the fifth driving motor is arranged on the first main body, and a fifth guide rail of the fifth guide mechanism is arranged on the first supporting beam; the second mass block comprises a second main body and a second supporting beam which is convexly arranged on the second main body, the second supporting beam extends along the first horizontal direction, a stator of a sixth driving motor is arranged on the second main body, and a sixth guide rail of a sixth guide mechanism is arranged on the second supporting beam; the third mass block comprises a third main body and a third supporting beam which is convexly arranged on the third main body, the third supporting beam extends along the second horizontal direction, a stator of a seventh driving motor is arranged on the third main body, and a seventh guide rail of a seventh guide mechanism is arranged on the third supporting beam; the fourth mass block comprises a fourth main body and a fourth supporting beam protruding from the fourth main body, the fourth supporting beam extends in the second horizontal direction, a stator of the eighth driving motor is arranged on the fourth main body, and an eighth guide rail of the eighth guide mechanism is arranged on the fourth supporting beam.

Further, the first mass comprises a first body and a first connecting plate which are connected with each other, and the first body is slidably connected to the supporting table; the second mass block comprises a second main body and a second connecting plate which are connected with each other, and the second main body is connected to the supporting platform in a sliding mode; the third mass block comprises a third main body and a third connecting plate which are connected with each other, and the third main body is connected to the supporting platform in a sliding mode; the fourth mass block comprises a fourth main body and a fourth connecting plate which are connected with each other, and the fourth main body is connected to the supporting platform in a sliding mode; the first connecting plate and the second connecting plate are vertically spaced from the third connecting plate and the fourth connecting plate; the balance mass assembly further comprises an eleventh guide mechanism and a twelfth guide mechanism, the eleventh guide mechanism extends along the first horizontal direction, and the twelfth guide mechanism extends along the second horizontal direction; the first connecting plate and the second connecting plate are connected in a sliding mode through an eleventh guide mechanism, and the third connecting plate and the fourth connecting plate are connected in a sliding mode through a twelfth guide mechanism.

Furthermore, the first connecting plate is of a U-shaped structure with a first groove, the second connecting plate is of a U-shaped structure with a second groove, and the first groove and the second groove are butted to form a first avoidance hole; the third connecting plate is of a U-shaped structure with a third groove, the fourth connecting plate is of a U-shaped structure with a fourth groove, and the third groove and the fourth groove are butted to form a second avoidance hole; the supporting platform comprises a base and a boss arranged on the base, and the boss is arranged in the first avoidance hole and the second avoidance hole.

Furthermore, the supporting table comprises a base and a boss arranged on the base, and the first guide mechanism, the second guide mechanism, the third guide mechanism and the fourth guide mechanism are all arranged on the base; the two-axis displacement device further comprises a gravity compensation part, the gravity compensation part is arranged on the boss, and the gravity compensation part is matched with the lower side of the plane motion assembly so as to offset at least part of gravity of the plane motion assembly.

Furthermore, the gravity compensation part is an air floatation unit, the air floatation unit comprises an air floatation cushion and an air floatation panel, the air floatation cushion is arranged at the lower side of the motion platform, and the air floatation panel is arranged on the boss; or the gravity compensation part is a magnetic unit which comprises a first magnet array and a second magnet array, the first magnet array is arranged on the lower side of the motion table, the second magnet array is arranged on the boss, and the first magnet array and the second magnet array repel each other.

The two-axis displacement device provided by the scheme can at least produce the following beneficial effects:

through the combination of the reaction force guiding effects of the first mass block, the second mass block, the third mass block and the fourth mass block, the rotation angle displacement caused by the planar motion assembly in the displacement process can be converted into the linear displacement or the displacement difference of the first mass block and the second mass block in the first horizontal direction, or the linear displacement or the displacement difference of the third mass block and the fourth mass block in the second horizontal direction. Compared with the prior art, the scheme realizes the effects of motion recoil and buffering digestion of additional rotating torque, greatly weakens the vibration interference influence on the supporting table in the rotation direction in the motion process of the plane motion assembly, and improves the stability and the positioning precision of the overall motion of the displacement device. Compared with an additional mechanism in the conventional displacement device, the scheme has no problem of reaction delay and does not cause additional vibration impact to the displacement device in the processes of starting and accelerating and decelerating.

And when the planar motion assembly moves along the first horizontal direction, the first mass block and the second mass block move reversely relative to the planar motion assembly in the first horizontal direction to serve as a counterforce guide mechanism, when the planar motion assembly moves along the second horizontal direction, the third mass block and the fourth mass block move reversely relative to the planar motion assembly in the second horizontal direction to serve as a counterforce guide mechanism, therefore, the four mass blocks in the scheme can counteract the vibration impact influence generated by the planar motion assembly in the moving process in the two directions, and when the planar motion assembly in the two-axis displacement device moves in the two mutually perpendicular directions, the vibration impact can be counteracted through the mass blocks, namely counterforce guide of two motion axes is realized.

In addition, the scheme realizes the reaction force guide of the two motion shafts and counteracts the additional rotation moment through a simplified structure, and reduces the manufacturing difficulty and cost while meeting the requirements of displacement stability and precision.

Drawings

The accompanying drawings, which form a part of the present application, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:

fig. 1 is a schematic structural diagram of a two-axis displacement device according to an embodiment of the present invention;

FIG. 2 shows an exploded view of a portion of the mechanism of FIG. 1;

FIG. 3 shows an exploded view of the two-axis displacement apparatus of FIG. 1;

FIG. 4 is a schematic view of the displacement of the planar motion assembly in the two-axis displacement device of FIG. 1 in a first horizontal direction;

FIG. 5 is a schematic view showing the moving distances of the respective parts in the two-axis displacement apparatus of FIG. 4;

FIG. 6 shows a schematic displacement diagram of the planar motion assembly in the two-axis displacement device of FIG. 1 in a second horizontal direction;

fig. 7 is a schematic view showing the moving distance of each part in the two-axis displacement apparatus of fig. 6;

fig. 8 is a schematic structural diagram of a two-axis displacement device according to a second embodiment of the present invention;

FIG. 9 shows an exploded view of a portion of the mechanism of FIG. 8;

fig. 10 is a schematic structural diagram of a two-axis displacement device according to a third embodiment of the present invention;

fig. 11 is a schematic structural diagram of a two-axis displacement device according to a fourth embodiment of the present invention;

fig. 12 shows an exploded view of the two-axis displacement device of fig. 11.

Wherein the figures include the following reference numerals:

10. a two-axis displacement device;

1. a support table; 101. a base; 102. a boss;

2. a balance mass assembly;

201. a first mass block; 2011. a first body; 2012. a first support beam; 2013. a first connecting plate;

211. a first guide mechanism;

202. a second mass block; 2021. a second body; 2022. a second corbel; 2023. a second connecting plate;

212. a second guide mechanism;

203. a third mass block; 2031. a third body; 2032. a third corbel; 2033. a third connecting plate;

213. a third guide mechanism;

204. a fourth mass block; 2041. a fourth body; 2042. a fourth corbel; 2043. a fourth connecting plate;

214. a fourth guide mechanism;

205. an eleventh guide mechanism; 206. a twelfth guide mechanism; 207. a first avoidance hole; 208. a second avoidance hole;

3. a planar motion assembly;

301. a motion stage;

302. a drive assembly;

312. a fifth drive motor; 322. a sixth drive motor; 332. a seventh drive motor; 342. an eighth drive motor;

3021. a fifth guide mechanism; 3022. a sixth guide mechanism; 3023. a seventh guide mechanism; 3024. an eighth guide mechanism;

352. a ninth guide mechanism; 3521. a first guide beam; 3522. a ninth mechanical guide rail;

362. a tenth guide mechanism; 3621. a second guide beam; 3622. a tenth mechanical guide;

303. a connecting frame;

511. a first drive motor; 521. a first elastic mechanism;

512. a second drive motor; 522. a second elastic mechanism;

513. a third drive motor; 523. a third elastic mechanism;

514. a fourth drive motor; 524. a fourth elastic mechanism;

61. an air flotation unit; 611. an air-floating cushion; 612. an air flotation panel;

62. a magnetic unit; 621. a first array of magnets; 622. a second array of magnets.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It is to be understood that the embodiments described are only some embodiments of the invention, and not all embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

Example one

As shown in fig. 1, a first embodiment of the present invention provides a two-axis displacement device 10, which includes a support table 1, a balance mass assembly 2, and a plane motion assembly 3; the balance mass assembly 2 comprises a first mass block 201, a second mass block 202, a third mass block 203 and a fourth mass block 204, wherein the first mass block 201 and the second mass block 202 can be arranged on the support platform 1 in a sliding manner along a first horizontal direction, the first mass block 201 and the second mass block 202 are arranged oppositely in a second horizontal direction, the third mass block 203 and the fourth mass block 204 can be arranged on the support platform 1 in a sliding manner along the second horizontal direction, the third mass block 203 and the fourth mass block 204 are arranged oppositely in the first horizontal direction, and the second horizontal direction is perpendicular to the first horizontal direction; the planar motion assembly 3 comprises a motion table 301 and a driving assembly 302, the motion table 301 is slidably connected to the first mass block 201, the second mass block 202, the third mass block 203 and the fourth mass block 204, respectively, a stator of the driving assembly 302 is fixed relative to the balance mass assembly 2, and a mover of the driving assembly 302 is fixed relative to the motion table 301 to drive the motion table 301 to move along the first horizontal direction and/or the second horizontal direction.

In the drawing, the upper right corner is a rectangular coordinate system, X denotes a first horizontal direction, Y denotes a second horizontal direction, Z denotes a vertical direction, Rx denotes a circumferential direction of X, Ry denotes a circumferential direction of Y, and Rz denotes a circumferential direction of Z.

According to the two-axis displacement device 10 provided by the scheme, through the combination of the reaction force guiding effects of the first mass block 201, the second mass block 202, the third mass block 203 and the fourth mass block 204 in the balance mass assembly, the rotation angle displacement caused by the plane motion assembly 3 in the displacement process can be converted into the linear displacement or the displacement difference of the first mass block 201 and the second mass block 202 in the first horizontal direction X, or the linear displacement or the displacement difference of the third mass block 203 and the fourth mass block 204 in the second horizontal direction Y. Compared with the prior art, the scheme realizes the effects of motion recoil and buffering digestion of additional rotating moment, greatly weakens the vibration interference influence on the supporting table 1 in the Rz rotating direction in the motion process of the planar motion assembly 3, and improves the stability and positioning accuracy of the overall motion of the displacement device. Compared with an additional mechanism in the conventional displacement device, the scheme has no problem of reaction delay and does not cause additional vibration impact to the displacement device in the processes of starting and accelerating and decelerating.

Moreover, when the planar motion assembly 3 moves along the first horizontal direction, the first mass block 201 and the second mass block 202 move in the opposite direction relative to the planar motion assembly 3 in the first horizontal direction, and serve as a reaction force guiding mechanism, when the planar motion assembly 3 moves along the second horizontal direction, the third mass block 203 and the fourth mass block 204 move in the opposite direction relative to the planar motion assembly 3 in the second horizontal direction, and serve as a reaction force guiding mechanism, so that the four mass blocks in the scheme can counteract the vibration impact influence generated by the planar motion assembly 3 in the moving process in the two directions X and Y, and the planar motion assembly 3 in the two-axis displacement device can counteract the vibration impact through the mass blocks when moving in the two mutually perpendicular directions, that is, reaction force guiding of two motion axes is realized. In addition, the scheme realizes the reaction force guide of the two motion shafts and counteracts the additional rotation moment through a simplified structure, and reduces the manufacturing difficulty and cost while meeting the displacement stability and precision.

As shown in fig. 2, the balance mass assembly 2 further includes a first guide mechanism 211, a second guide mechanism 212, a third guide mechanism 213, and a fourth guide mechanism 214; the first guide mechanism 211 includes a first guide rail connected to the support table 1 and extending in the first horizontal direction, and a first moving portion slidably or rollably engaged with the first guide rail, the first moving portion being connected to the first mass block 201; the second guide mechanism 212 includes a second guide rail connected to the support table 1 and extending in the first horizontal direction, and a second moving portion slidably or rollably engaged with the second guide rail, the second moving portion being connected with the second mass 202; the third guide mechanism 213 includes a third guide rail connected to the support table 1 and extending in the second horizontal direction, and a third moving portion slidably or rollably engaged with the third guide rail, the third moving portion being connected to the third mass block 203; the fourth guide mechanism 214 includes a fourth guide rail connected to the support table 1 and extending in the second horizontal direction, and a fourth moving portion slidably or rollably engaged with the fourth guide rail, which is connected with the fourth mass 204.

By adopting the guide mechanism, the corresponding mass block can be guided, so that the mass block can slide stably and smoothly. And, the guiding mechanism of above-mentioned structure is mechanical guide rail, does not need to rely on atmospheric pressure just can normally use like this, so this scheme is applicable to the vacuum environment. The scheme can be used in atmospheric environment and vacuum environment, and the application range of the displacement device is greatly improved. In practical application, the scheme can be used in the form of a mechanical guide rail.

Further, above-mentioned displacement device still includes prevents floating the subassembly, prevents floating the subassembly setting on a supporting bench 1, prevents floating the subassembly and includes: the first floating preventing part comprises a first driving motor 511, a stator of the first driving motor 511 is connected to the supporting table 1, and a rotor of the first driving motor 511 is connected to one end of the first mass block 201 in the first horizontal direction; the second floating prevention part comprises a second driving motor 512, a stator of the second driving motor 512 is connected to the support table 1, and a rotor of the second driving motor 512 is connected to one end of the second mass block 202 in the first horizontal direction; a third floating prevention part, wherein the third floating prevention part comprises a third driving motor 513, a stator of the third driving motor 513 is connected to the support table 1, and a rotor of the third driving motor 513 is connected to one end of the third mass block 203 in the second horizontal direction; and a fourth floating prevention part, wherein the fourth floating prevention part comprises a fourth driving motor 514, a stator of the fourth driving motor 514 is connected to the support platform 1, and a rotor of the fourth driving motor 514 is connected to one end of the fourth mass block 204 in the second horizontal direction. The first floating prevention part, the second floating prevention part, the third floating prevention part and the fourth floating prevention part respectively play a role in safety limiting and a role in buffer recovery on the first mass block 201, the second mass block 202, the third mass block 203 and the fourth mass block 204.

Further, the first float prevention part further comprises a first elastic mechanism 521, one end of the first elastic mechanism 521 is connected to the other end of the first mass block 201 in the first horizontal direction, and the other end of the first elastic mechanism 521 is connected to the support table 1; the second float prevention part further comprises a second elastic mechanism 522, one end of the second elastic mechanism 522 is connected to the other end of the second mass block 202 in the first horizontal direction, and the other end of the second elastic mechanism 522 is connected to the support table 1; the third float prevention part further comprises a third elastic mechanism 523, one end of the third elastic mechanism 523 is connected to the other end of the third mass block 203 in the second horizontal direction, and the other end of the third elastic mechanism 523 is connected to the support table 1; the fourth float prevention part further comprises a fourth elastic mechanism 524, one end of the fourth elastic mechanism 524 is connected to the other end of the fourth mass 204 in the second horizontal direction, and the other end of the fourth elastic mechanism 524 is connected to the support table 1.

The elastic mechanism in the anti-floating part can apply a force to the central balance point to the corresponding mass block through the elastic deformation of the elastic mechanism, the force is not influenced by the power-on and power-off of the driving motor, and particularly after the power-off of the driving motor, the elastic mechanism can drive the mass block to move to the vicinity of the central balance point instead of randomly staying in the stroke edge area, so that the initialization efficiency is favorably improved. The elastic mechanism and the mass block are in limit matching, namely the elastic mechanism is arranged on a moving path of the corresponding mass block, a gap is reserved between the mass block and the elastic mechanism in an initial position, and the elastic mechanism abuts against the elastic mechanism when the moving position of the mass block is large, so that the elastic mechanism can limit the moving range of the mass block and can apply elastic force opposite to the moving direction to the mass block to drive the balance mass part to move to the vicinity of a central balance point.

As shown in fig. 3, the driving assembly 302 includes a fifth driving motor 312, a sixth driving motor 322, a seventh driving motor 332, an eighth driving motor 342, a ninth guiding mechanism 352, and a tenth guiding mechanism 362; the stator of the fifth driving motor 312 is fixed relative to the first mass block 201, and the mover of the fifth driving motor 312 is connected to one end of the ninth guiding mechanism 352; a stator of the sixth driving motor 322 is fixed relative to the second mass block 202, and a mover of the sixth driving motor 322 is connected to the other end of the ninth guiding mechanism 352; the stator of the seventh driving motor 332 is fixed relative to the third mass 203, and the mover of the seventh driving motor 332 is connected to one end of the tenth guiding mechanism 362; a stator of the eighth driving motor 342 is fixed relative to the fourth mass block 204, and a mover of the eighth driving motor 342 is connected to the other end of the tenth guiding mechanism 362; the ninth guiding mechanism 352 extends along the second horizontal direction, and the ninth guiding mechanism 352 is matched with the moving platform 301 to drive the moving platform 301 to move along the first horizontal direction and guide the moving platform 301 in the second horizontal direction; the tenth guiding mechanism 362 extends along the first horizontal direction, and the tenth guiding mechanism 362 cooperates with the moving stage 301 to move the moving stage 301 along the second horizontal direction and guide the moving stage 301 in the first horizontal direction.

The fifth driving motor 312, the sixth driving motor 322, the seventh driving motor 332, and the eighth driving motor 342 provide power for the movement of the motion stage 301, the tenth guiding mechanism 362 provides guidance in the first horizontal direction for the motion stage 301 when the ninth guiding mechanism 352 drives the motion stage 301 to move in the first horizontal direction, and the ninth guiding mechanism 352 provides guidance in the first horizontal direction for the motion stage 301 when the tenth guiding mechanism 362 drives the motion stage 301 to move in the second horizontal direction.

Further, the driving assembly 302 further includes a fifth guide mechanism 3021, a sixth guide mechanism 3022, a seventh guide mechanism 3023, and an eighth guide mechanism 3024; the fifth guiding mechanism 3021 includes a fifth guide rail connected to the first mass 201 and extending in the first horizontal direction, and a fifth moving portion slidably or rollably engaged with the fifth guide rail, which is connected to one end of the ninth guiding mechanism 352; the sixth guide 3022 includes a sixth guide rail connected to the second mass 202 and extending in the first horizontal direction, and a sixth moving portion slidably or rollably engaged with the sixth guide rail, which is connected to the other end of the ninth guide 352; the seventh guide mechanism 3023 includes a seventh guide rail connected to the third mass 203 and extending in the second horizontal direction, and a seventh moving portion slidably or rollably engaged with the seventh guide rail, which is connected to one end of the tenth guide mechanism 362; the eighth guide mechanism 3024 includes an eighth guide rail connected to the fourth mass 204 and extending in the second horizontal direction, and an eighth moving portion slidably or rollably engaged with the eighth guide rail, which is connected to the other end of the tenth guide mechanism 362.

The fifth guide mechanism 3021, the sixth guide mechanism 3022, the seventh guide mechanism 3023, and the eighth guide mechanism 3024 guide the movement of the ninth guide mechanism 352 and the tenth guide mechanism 362, thereby guiding the moving stage 301 and ensuring a smooth movement of the moving stage 301.

The fifth driving motor 312, the sixth driving motor 322, the seventh driving motor 332, the eighth driving motor 342, the fifth guide mechanism 3021, the sixth guide mechanism 3022, the seventh guide mechanism 3023, and the eighth guide mechanism 3024 are disposed along the periphery of the support table 1, so that the middle region left by the support table 1 is the movement region of the moving table 301, the moving table 301 has a large movement range, and the compactness of the entire structure of the device is improved.

Further, the plane movement assembly 3 further comprises a connecting frame 303, and the movement table 301 is arranged on the connecting frame 303; the ninth guiding mechanism 352 comprises a first guiding beam 3521 and a ninth mechanical guide rail 3522 arranged on the first guiding beam 3521, the first guiding beam 3521 and the ninth mechanical guide rail 3522 both penetrate through the connecting frame 303, and the ninth mechanical guide rail 3522 is slidably connected with the connecting frame 303; the tenth guiding mechanism 362 and the ninth guiding mechanism 352 are spaced apart in the vertical direction, the tenth guiding mechanism 362 includes a second guide beam 3621 and a tenth machine rail 3622 disposed on the second guide beam 3621, both the second guide beam 3621 and the tenth machine rail 3622 pass through the connecting frame 303, and the tenth machine rail 3622 is slidably connected with the connecting frame 303; a mover of the fifth driving motor 312 is connected to one end of the first guide beam 3521, and a mover of the sixth driving motor 322 is connected to the other end of the first guide beam 3521; a mover of the seventh driving motor 332 is connected to one end of the second guide beam 3621, and a mover of the eighth driving motor 342 is connected to the other end of the second guide beam 3621.

With the above arrangement, the ninth guide 352 and the tenth guide 362 are disposed in a cross shape, so that the movement of the moving stage 301 in two directions perpendicular to each other can be realized. In this embodiment, two sides of the first guide beam 3521 are respectively provided with a set of ninth mechanical guide rails 3522, two sides of the second guide beam 3621 are respectively provided with a set of tenth mechanical guide rails 3622, and the two sets of ninth mechanical guide rails 3522 and the two sets of tenth mechanical guide rails 3622 can ensure the smooth operation of the moving platform 301. In some other embodiments, one or more sets of ninth machine guide rails 3522 may be disposed on the first guide beam 3521, and one or more sets of tenth machine guide rails 3622 may be disposed on the second guide beam 3621.

Further, the first mass 201 includes a first main body 2011 and a first supporting beam 2012 protruding from the first main body 2011, the first supporting beam 2012 extends in the first horizontal direction, the stator of the fifth driving motor 312 is disposed on the first main body 2011, and the fifth guide rail of the fifth guiding mechanism 3021 is disposed on the first supporting beam 2012; the second mass block 202 includes a second main body 2021 and a second beam 2022 convexly disposed on the second main body 2021, the second beam 2022 extends along the first horizontal direction, a stator of the sixth driving motor 322 is disposed on the second main body 2021, and a sixth guide rail of the sixth guiding mechanism 3022 is disposed on the second beam 2022; the third mass 203 includes a third body 2031 and a third beam 2032 convexly disposed on the third body 2031, the third beam 2032 extends in the second horizontal direction, a stator of the seventh drive motor 332 is disposed on the third body 2031, and a seventh guide rail of the seventh guide mechanism 3023 is disposed on the third beam 2032; the fourth mass 204 includes a fourth main body 2041 and a fourth supporting beam 2042 protruding from the fourth main body 2041, the fourth supporting beam 2042 extends along the second horizontal direction, a stator of the eighth driving motor 342 is disposed on the fourth main body 2041, and an eighth guide rail of the eighth guiding mechanism 3024 is disposed on the fourth supporting beam 2042.

With the above arrangement, the arrangement of the fifth drive motor 312, the sixth drive motor 322, the seventh drive motor 332, the eighth drive motor 342, the fifth guide mechanism 3021, the sixth guide mechanism 3022, the seventh guide mechanism 3023, and the eighth guide mechanism 3024 is facilitated, and it is ensured that the rotary angular displacement or the motion impact can be transmitted to the balance mass assembly when the moving table 301 moves, so that the rotary angular displacement or the motion impact is offset, and the displacement accuracy and the stability of the moving table 301 are improved.

Further, the two-axis displacement apparatus 10 further includes a power amplifier for driving the currents of the coil arrays of the first driving motor 511, the second driving motor 512, the third driving motor 513, the fourth driving motor 514, the fifth driving motor 312, the sixth driving motor 322, the seventh driving motor 332, and the eighth driving motor 342 to react with the magnet arrays, so as to cause at least the balance mass assembly to displace in the first horizontal direction and the second horizontal direction, and the planar motion assembly 3 to displace by a long distance in the first horizontal direction and the second horizontal direction.

As shown in fig. 4, after the current is applied to the rotor coil arrays of the fifth driving motor 312 and the sixth driving motor 322, the rotor coil arrays act on the stator magnet arrays to generate a lorentz force along the first horizontal direction X, act on the ninth guiding mechanism 352, act on the moving table 301 through the ninth guiding mechanism 352, and push the moving table 301 to displace along the first horizontal direction; meanwhile, the reaction force of the lorentz force acts on the first mass block 201 and the second mass block 202, and pushes the first mass block 201 and the second mass block 202 to displace in the first horizontal direction and the opposite direction of the motion table 301, respectively.

The displacement of the first mass block 201 from the central balance point position in the first horizontal direction triggers the stress response of the first anti-drift portion, which causes the compression amount or the elongation amount of the elastic body in the first elastic mechanism 521 (not shown in fig. 4) to change, and generates a thrust force in the direction opposite to the displacement direction of the first mass block 201, which causes the tendency of the first mass block 201 to move back to the central balance point position; meanwhile, the mover coil array of the first driving motor 511 is energized with current, and acts on the stator magnet array to generate a lorentz force along the first horizontal direction, so as to act on the first mass block 201, push the first mass block 201 to generate a slow movement return trend towards the central equilibrium point position, and slowly prevent the first mass block 201 from further deviating and displacing, or slowly push the first mass block 201 to return to the central equilibrium point position.

Similarly, the displacement of the second mass 202 in the first horizontal direction from the position of the central balance point triggers the stress response of the second float guard, which causes the compression or elongation of the elastic body in the second elastic mechanism 522 (not shown in fig. 4) to change, generating a thrust in the direction opposite to the displacement direction of the second mass 202, causing the tendency of the second mass 202 to move back to the position of the central balance point; meanwhile, the mover coil array of the second driving motor 512 is energized with current, and acts on the stator magnet array to generate a lorentz force along the first horizontal direction, so as to act on the second mass block 202, and push the second mass block 202 to generate a slow movement return trend towards the central balance point position, thereby slowly preventing the second mass block 202 from further deviating and displacing, or slowly pushing the second mass block 202 to return to the central balance point position.

As shown in FIG. 5, the mass of the moving stage 301 of the planar motion assembly 3 is m ₁ The mass of the ninth guiding mechanism 352 is m ₂ The first mass 201 has a mass M ₁ The second mass 202 has a mass M ₂ The planar motion assembly 3 is offset from the center line in the first horizontal direction by a distance l ₁ The span between the first mass 201 and the second mass 202 is L ₁ The planar motion component 3 is displaced X along the first horizontal direction, and accordingly, the recoil displacement of the first mass block 201 along the first horizontal direction X is X ₁ The recoil displacement of the second mass block 202 along the first horizontal direction X is X ₂ And calculating according to the momentum theorem and the force balance theorem to obtain the following formula:

m ₁ *x+m ₂ *x＝M ₁ *X ₁ +M ₂ *X ₂ ；

[(1-l ₁ /L ₁ )m ₁ *x+m ₂ *x]/2＝M ₁ *X ₁ ；

[(1+l ₁ /L ₁ )m ₁ *x+m ₂ *x]/2＝M2*X ₂ 。

thus, deviated along a first level by the plane movement assembly 3Deflection angle displacement T in the Rz direction caused by movement displacement of the direction's center line ₁ (radian) in which M ₁ ＝M ₂ From the above formula, one can derive:

T ₁ ＝(X ₂ -X ₁ )/L ₁ ＝m ₁ *x*l ₁ /(M ₁ *L ₁ *L ₁ )。

from the above formula, it can be found that the planar motion assembly 3 is moved in the Rz direction by the rotational angular displacement T in the first horizontal direction from the first horizontal direction center line ₁ And is converted into a linear displacement difference of the first mass 201 and the second mass 202 in the first horizontal direction.

As shown in fig. 6, after the current is applied to the mover coil arrays of the seventh driving motor 332 and the eighth driving motor 342, the mover coil arrays act on the stator magnet arrays to generate a lorentz force along the second horizontal direction, the lorentz force acts on the tenth guiding mechanism 362, and acts on the moving platform 301 through the tenth guiding mechanism 362 to push the moving platform 301 to displace along the second horizontal direction; meanwhile, the reaction force of the lorentz force acts on the third mass block 203 and the fourth mass block 204, and pushes the third mass block 203 and the fourth mass block 204 to displace in the direction opposite to the moving table 301 along the second horizontal direction.

The third mass block 203 displaces from the position of the central balance point along the second horizontal direction, so as to trigger the stress response of the third drift prevention part, so that the compression amount or the elongation amount of the elastic body in the third elastic mechanism 523 (not shown in fig. 6) changes, a thrust force in the direction opposite to the displacement direction of the third mass block 203 is generated, and the trend of the third mass block 203 moving and returning to the position of the central balance point is caused; meanwhile, the mover coil array of the third driving motor 513 (not shown in fig. 6) is energized to act on the stator magnet array to generate a lorentz force along the second horizontal direction, which acts on the third mass 203 to push the third mass 203 to generate a slow returning motion trend toward the central equilibrium point position, so as to slowly prevent the third mass 203 from further deviating displacement, or slowly push the third mass 203 to return to the central equilibrium point position.

Similarly, the displacement of the fourth mass 204 in the second horizontal direction from the position of the central balance point triggers the stress response of the fourth float prevention part, which causes the compression amount or the elongation amount of the elastic body in the fourth elastic mechanism 524 (not shown in fig. 6) to change, and generates a thrust in the direction opposite to the displacement direction of the fourth mass 204, which causes the fourth mass 204 to have a tendency of moving back to the position of the central balance point; meanwhile, the mover coil array of the fourth driving motor 514 (not shown in fig. 6) is energized to act on the stator magnet array to generate a lorentz force along the second horizontal direction, which acts on the fourth mass 204 to push the fourth mass 204 to generate a slow returning movement trend toward the central equilibrium point position, so as to slowly prevent the fourth mass 204 from further deviating and displacing, or slowly push the fourth mass 204 to return to the central equilibrium point position.

Through the counter-force guide effect of the balance mass component 2, according to the momentum theorem and the mass ratio of the four mass blocks to the plane motion component 3, the large-stroke displacement of the plane motion component 3 is converted into the small-stroke displacement of the mass blocks, the moving recoil and the buffering digestion are realized in the displacement device, the vibration interference influence on the supporting table 1 in the moving process of the plane motion component 3 in the first horizontal direction and the second horizontal direction is greatly weakened, and the stability and the positioning precision of the overall movement of the displacement device are improved.

Through the combination of the reaction force guiding effects of the balance mass assembly 2, the rotational angular displacement Rz of the balance mass assembly in the vertical direction, which is caused by the planar motion assembly 3 in the displacement process, can be converted into the linear displacement or the displacement difference of the first mass block 201 and the second mass block 202 in the first horizontal direction X, or the linear displacement or the displacement difference of the third mass block 203 and the fourth mass block 204 in the second horizontal direction; the digestion effects of movement recoil and buffering in the Rz direction are realized, the vibration interference influence on the supporting table 1 in the Rz direction in the movement process of the planar movement assembly 3 is greatly weakened, and the stability and the positioning accuracy of the overall movement of the displacement device are improved.

As shown in fig. 7, plane motionThe mass of the moving table 301 of the assembly 3 is m ₁ The tenth guide 362 has a mass m ₃ The third mass 203 has a mass M ₃ The fourth mass 204 has a mass M ₄ The planar motion assembly 3 is offset from the center line in the second horizontal direction by a distance l ₂ The span between the third mass 203 and the fourth mass 204 is L ₂ The planar motion component 3 is displaced Y along the second horizontal direction, and the corresponding recoil displacement of the third mass block 203 along the second horizontal direction is Y ₁ The recoil displacement of the fourth mass block 204 along the second horizontal direction is Y ₂ And calculating according to the momentum theorem and the force balance theorem to obtain the following formula:

m ₁ *y+m ₃ *y＝M ₃ *Y ₁ +M ₄ *Y ₂ ；

[(1-l ₂ /L ₂ )m ₁ *y+m ₃ *y]/2＝M ₃ *Y ₁ ；

[(1+l ₂ /L ₂ )m ₁ *y+m ₃ *y]/2＝M ₄ *Y ₂ 。

therefore, the deflection angle displacement T in the Rz direction caused by the movement displacement of the planar moving assembly 3 from the center line in the second horizontal direction ₂ (radian) in which M ₃ ＝M ₄ From the above formula, one can derive:

T ₂ ＝(Y ₂ -Y ₁ )/L ₂ ＝m ₁ *y*l ₂ /(M ₃ *L ₂ *L ₂ )。

from the above formula, it can be found that the rotational angular displacement T in the Rz direction of the movement of the planar motion assembly 3 in the second horizontal direction from the second horizontal direction center line ₂ And converted into a linear displacement difference of the third mass 203 and the fourth mass 204 in the second horizontal direction.

Example two

Referring to fig. 8 and 9, the two-axis displacement device 10 of the present embodiment is different from the first embodiment only in the structure of the balance mass assembly 2. Specifically, in this embodiment, the first mass 201 further includes a first connecting plate 2013 interconnected with the first body 2011, the second mass 202 further includes a second connecting plate 2023 interconnected with the second body 2021, the third mass 203 further includes a third connecting plate 2033 interconnected with the third body 2031, and the fourth mass 204 further includes a fourth connecting plate 2043 interconnected with the fourth body 2041; the first connecting plate 2013 and the second connecting plate 2023 are vertically spaced from the third connecting plate 2033 and the fourth connecting plate 2043; the balancing mass assembly 2 further comprises an eleventh guide 205 and a twelfth guide 206, the eleventh guide 205 extending in the first horizontal direction and the twelfth guide 206 extending in the second horizontal direction; the first link plate 2013 and the second link plate 2023 are slidably coupled by the eleventh guide mechanism 205, and the third link plate 2033 and the fourth link plate 2043 are slidably coupled by the twelfth guide mechanism 206.

The first mass 201, the second mass 202, the third mass 203 and the fourth mass 204 have no interference or collision with each other all the time in the moving process, and all the interference or collision with the planar moving assembly 3 does not exist.

Compared with the first embodiment, in the first embodiment, the first mass block 201, the second mass block 202, the third mass block 203 and the fourth mass block 204 are respectively extended in the horizontal direction, and the eleventh guide mechanism 205 and the twelfth guide mechanism 206 are added, so that the idle space below the planar motion assembly 3 is reasonably utilized to increase the volume and the mass of the four mass blocks, and the deflection moment between the first mass block 201 and the second mass block 202, which is caused by the bias of the mass center and the stress point, and the deflection moment between the third mass block 203 and the fourth mass block 204, which is caused by the bias of the mass center and the stress point, are partially offset.

The above deflection moment, from the perspective of the first mass block 201, includes both the gravity bending moment formed on the vertical surface between the center of mass of the first mass block 201 and the supporting point of the first guiding mechanism 211 due to the gravity factor, and the inertia torque formed on the horizontal surface between the center of mass of the first mass block 201 and the output shaft of the fifth driving motor 312 due to the acceleration and deceleration inertia factors; similarly, the deflection moments of the second, third and

fourth masses

202, 203, 204 include the respective bending moment of gravity on the vertical plane and the respective moment of inertia on the horizontal plane.

The above function of counteracting the deflection moment is that, from the perspective of the first mass block 201, the first mass block 201 and the second mass block 202 interact through the eleventh guide mechanism 205, a moment with the same magnitude and the opposite direction to the gravity bending moment borne by the first mass block 201 is provided on the vertical surface, and two inertia torques with opposite directions caused by the same and almost the same motion acceleration directions of the first mass block 201 and the second mass block 202 on the horizontal plane counteract each other or partially counteract each other at the connected eleventh guide mechanism 205; likewise, the second mass 202, the third mass 203 and the fourth mass 204 act to counteract the deflection moment, similarly to the first mass 201.

EXAMPLE III

As shown in fig. 10, the two-axis displacement apparatus 10 of the present embodiment is different from the first embodiment in the structure of the supporting platform 1 and has a gravity compensation part. Specifically, in this embodiment, the supporting table 1 further includes a base 101 and a boss 102 disposed on the base 101, and the first guide mechanism 211, the second guide mechanism 212, the third guide mechanism 213, and the fourth guide mechanism 214 are disposed on the base 101; the displacement device further comprises a gravity compensation portion, which is arranged on the boss 102 and cooperates with the underside of the planar motion assembly 3 to counteract at least a part of the gravity of the planar motion assembly 3. Through setting up gravity compensation portion, can offset at least some gravity of plane motion subassembly 3, especially be used for offsetting the gravity of motion platform 301, can avoid like this because the influence that gravity caused, improved motion platform 301 motion in-process in the position accuracy and the stability of vertical direction, make displacement device's motion more accurate steady.

Further, in the present embodiment, the gravity compensation portion is an air floating unit 61, the air floating unit 61 includes an air floating pad 611 and an air floating panel 612, the air floating pad 611 is disposed on the lower side of the moving stage 301, and the air floating panel 612 is disposed on the boss 102.

The air floating unit 61 mainly plays a role of gravity compensation, and through the supporting force of the air film rigidity between the air floating pad 611 and the air floating panel 612, the gravity of all or part of the planar motion assembly 3, especially the motion table 301, is offset, the influence of the bending deformation of the tenth guide mechanism 362 and the ninth guide mechanism 352 caused by the gravity is reduced, and the position precision and the stability of the motion table 301 in the vertical direction in the motion process are improved.

Compared with the first embodiment or the second embodiment, the air floating unit 61 is added in the first embodiment, so that the effect of gravity compensation on the plane motion assembly 3 can be achieved, and the influence caused by gravity deformation can be eliminated; because the air flotation unit 61 needs to be filled with positive pressure gas, the displacement device adopting the air flotation unit 61 as a gravity compensation mode cannot be applied to a vacuum working condition environment, and therefore the application range of the embodiment is limited to a certain extent.

Example four

Referring to fig. 11 and 12, the two-axis displacement apparatus 10 of the present embodiment is different from the two embodiments in the structure of the balance mass assembly 2 and the support table 1, and has a gravity compensation part. Specifically, in this embodiment, the first connecting plate 2013 is a U-shaped structure with a first groove, the second connecting plate 2023 is a U-shaped structure with a second groove, and the first groove and the second groove are butted to form a first avoiding hole 207; the third connecting plate 2033 has a U-shaped structure with a third groove, the fourth connecting plate 2043 has a U-shaped structure with a fourth groove, and the third groove and the fourth groove are butted to form a second avoidance hole 208; the supporting table 1 includes a base 101 and a boss 102 disposed on the base 101, and the boss 102 is disposed in the first avoiding hole 207 and the second avoiding hole 208. Through the arrangement, the boss 102 can be close to the moving platform 301, and other matching structures can be conveniently arranged between the boss 102 and the moving platform 301.

Further, a gravity compensation portion is disposed between the boss 102 and the moving stage 301, in this embodiment, the gravity compensation portion is a magnetic unit 62, the magnetic unit 62 includes a first magnet array 621 and a second magnet array 622, the first magnet array 621 is disposed on the lower side of the moving stage 301, the second magnet array 622 is disposed on the boss 102, and the first magnet array 621 and the second magnet array 622 repel each other. This applies an upward force to the motion stage 301 by the mutual repulsion of the first and second magnet arrays 621 and 622, thereby offsetting the weight force of the motion stage 301.

In the whole movement process of the planar movement assembly 3, the projection of the first magnet array 621 on the upper surface of the boss 102 is always overlapped with the second magnet array 622, so as to ensure the stability of the magnitude of the repulsive force between the first magnet array 621 and the second magnet array 622.

The upper surface of the boss 102 is preferably a surface parallel to the upper surface of the base 101, and the upper surface of the boss 102 is higher than the upper surface of the base 101, so that the distance between the gravity center of the motion table 301 and the output plane of the driving motor of the planar motion assembly 3 is short, and the control precision is higher.

The gravity compensation mode in the embodiment adopts the magnetic unit 62, and the application of the displacement device under the vacuum working condition is realized by adopting the magnetic suspension gravity compensation mode; meanwhile, because a larger magnetic levitation gap exists between the first magnet array 621 and the second magnet array 622, the difficulty of manufacturing and installation is reduced, and the convenience of maintenance and use is improved.

Specifically, the magnetic unit 62 passes through the first and second grooves, the third and fourth grooves, respectively; in the whole movement process of the planar motion assembly 3, the projection of the first magnet array 621 on the boss 102 is always not intersected with the contour lines of the first groove and the second groove or the third groove and the fourth groove, so as to ensure that no collision occurs between the first magnet array 621 and the first mass 201 and the second mass 202 or between the third mass 203 and the fourth mass 204, or between the first mass 201 and the second mass 202 or between the third mass 203 and the fourth mass 204 and the support table 1.

Through the technical scheme provided by the utility model, can produce following beneficial effect at least:

the utility model provides a technical scheme, through the rotatory moment that arouses with the motion in a direction, on using two quality pieces respectively, and the direction of motion of two quality pieces is parallel to each other and has certain span, reached the rotatory moment and decomposed into a couple effect, turn into the conservation of angular momentum problem in the direction of rotation on the rectilinear direction, compare prior art, solved the not conservation of angular momentum problem in the direction of rotation, improved the resolving power of displacement device's motion measurement control.

The utility model provides a technical scheme, through the structural arrangement form of four quality pieces, two quality pieces of equal distribution on every horizontal direction, the guiding mechanism that every quality piece corresponds all can adopt mechanical guide rail, compares prior art, has both solved the counter-force guide effect on two horizontal directions, has also solved the counter-force guide effect on the direction of rotation, has also guaranteed the suitability of displacement device under the vacuum operating mode equally, the feasibility of high-speed high accelerated motion.

The utility model provides a technical scheme, the design of one of them quality piece is used respectively to driving motor through the plane motion subassembly, and the biasing moment through the skew motion central axis of plane motion subassembly decomposes into both sides driving motor's poor for exerting oneself, forms a pair of couple effect, replaces the rotating torque effect, turns into the angular displacement of direction of rotation linear displacement or displacement on the straight line poor to solve the interference problem that brings because of rotation angular displacement or rotational vibration.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A two-axis displacement device is characterized by comprising a support table (1), a balance mass component (2) and a plane motion component (3);

the balance mass assembly (2) comprises a first mass block (201), a second mass block (202), a third mass block (203) and a fourth mass block (204), wherein the first mass block (201) and the second mass block (202) can be slidably arranged on the support table (1) along a first horizontal direction, the first mass block (201) and the second mass block (202) are oppositely arranged along a second horizontal direction, the third mass block (203) and the fourth mass block (204) can be slidably arranged on the support table (1) along the second horizontal direction, the third mass block (203) and the fourth mass block (204) are oppositely arranged along the first horizontal direction, and the second horizontal direction is perpendicular to the first horizontal direction;

the planar motion assembly (3) comprises a motion table (301) and a driving assembly (302), wherein the motion table (301) is respectively connected to the first mass block (201), the second mass block (202), the third mass block (203) and the fourth mass block (204) in a sliding manner, a stator of the driving assembly (302) is fixed relative to the balance mass assembly, and a rotor of the driving assembly (302) is fixed relative to the motion table (301) so as to drive the motion table (301) to move along the first horizontal direction and/or the second horizontal direction.

2. Two-axis displacement device according to claim 1, characterized in that the balancing mass assembly (2) further comprises a first guide means (211), a second guide means (212), a third guide means (213) and a fourth guide means (214);

the first guide mechanism (211) comprises a first guide rail and a first moving part, the first guide rail is connected to the support table (1) and extends along the first horizontal direction, the first moving part can be matched with the first guide rail in a sliding or rolling mode, and the first moving part is connected with the first mass block (201);

the second guide mechanism (212) comprises a second guide rail connected to the support table (1) and extending in the first horizontal direction, and a second moving portion slidably or rollably cooperating with the second guide rail, the second moving portion being connected with the second mass (202);

the third guide mechanism (213) comprises a third guide rail connected to the support table (1) and extending in the second horizontal direction, and a third moving portion slidably or rollably engaged with the third guide rail, the third moving portion being connected with the third mass (203);

the fourth guide mechanism (214) includes a fourth guide rail connected to the support table (1) and extending in the second horizontal direction, and a fourth moving portion slidably or rollably engaged with the fourth guide rail, the fourth moving portion being connected with the fourth mass (204).

3. Two-axis displacement device according to claim 1, further comprising an anti-drift assembly provided on the support table (1), the anti-drift assembly comprising:

a first float prevention part comprising a first driving motor (511), wherein a stator of the first driving motor (511) is connected to the support table (1), and a rotor of the first driving motor (511) is connected to one end of the first mass block (201);

a second float prevention part, which comprises a second driving motor (512), wherein the stator of the second driving motor (512) is connected to the support platform (1), and the rotor of the second driving motor (512) is connected to one end of the second mass block (202);

a third float prevention part comprising a third drive motor (513), a stator of the third drive motor (513) being connected to the support table (1), a mover of the third drive motor (513) being connected to one end of the third mass (203);

a fourth float prevention part, wherein the fourth float prevention part comprises a fourth driving motor (514), a stator of the fourth driving motor (514) is connected to the support platform (1), and a rotor of the fourth driving motor (514) is connected to one end of the fourth mass block (204).

4. Two-axis displacement device according to claim 3,

the first anti-floating part further comprises a first elastic mechanism (521), one end of the first elastic mechanism (521) is connected to the other end of the first mass block (201), and the other end of the first elastic mechanism (521) is connected to the support platform (1);

the second anti-floating part further comprises a second elastic mechanism (522), one end of the second elastic mechanism (522) is connected to the other end of the second mass block (202), and the other end of the second elastic mechanism (522) is connected to the support table (1);

the third floating prevention part further comprises a third elastic mechanism (523), one end of the third elastic mechanism (523) is connected to the other end of the third mass block (203), and the other end of the third elastic mechanism (523) is connected to the support table (1);

the fourth float-preventing part further comprises a fourth elastic mechanism (524), one end of the fourth elastic mechanism (524) is connected to the other end of the fourth mass block (204), and the other end of the fourth elastic mechanism (524) is connected to the support platform (1).

5. Two-axis displacement device according to claim 1, characterized in that the drive assembly (302) comprises a fifth drive motor (312), a sixth drive motor (322), a seventh drive motor (332), an eighth drive motor (342), a ninth guide (352) and a tenth guide (362);

the stator of the fifth driving motor (312) is fixed relative to the first mass block (201), and the rotor of the fifth driving motor (312) is connected to one end of the ninth guiding mechanism (352);

the stator of the sixth driving motor (322) is fixed relative to the second mass block (202), and the rotor of the sixth driving motor (322) is connected to the other end of the ninth guiding mechanism (352);

the stator of the seventh driving motor (332) is fixed relative to the third mass block (203), and the mover of the seventh driving motor (332) is connected to one end of the tenth guiding mechanism (362);

the stator of the eighth driving motor (342) is fixed relative to the fourth mass block (204), and the rotor of the eighth driving motor (342) is connected to the other end of the tenth guiding mechanism (362);

the ninth guide mechanism (352) extends along the second horizontal direction, and the ninth guide mechanism (352) is matched with the moving table (301) to drive the moving table (301) to move along the first horizontal direction and guide the moving table (301) in the second horizontal direction;

the tenth guide mechanism (362) extends along the first horizontal direction, and the tenth guide mechanism (362) is matched with the moving table (301) to drive the moving table (301) to move along the second horizontal direction and guide the moving table (301) in the first horizontal direction.

6. Two-axis displacement device according to claim 5, characterized in that the drive assembly (302) further comprises a fifth guide mechanism (3021), a sixth guide mechanism (3022), a seventh guide mechanism (3023) and an eighth guide mechanism (3024);

the fifth guide mechanism (3021) comprises a fifth guide rail connected to the first mass (201) and extending in the first horizontal direction, and a fifth moving part slidably or rollably engaged with the fifth guide rail, the fifth moving part being connected with one end of the ninth guide mechanism (352);

the sixth guide mechanism (3022) includes a sixth guide rail connected to the second mass (202) and extending in the first horizontal direction, and a sixth moving portion slidably or rollably engaged with the sixth guide rail, the sixth moving portion being connected to the other end of the ninth guide mechanism (352);

the seventh guide mechanism (3023) includes a seventh guide rail connected to the third mass (203) and extending in the second horizontal direction, and a seventh moving portion slidably or rollably engaged with the seventh guide rail, the seventh moving portion being connected to one end of the tenth guide mechanism (362);

the eighth guide mechanism (3024) includes an eighth guide rail connected to the fourth mass (204) and extending in the second horizontal direction, and an eighth moving portion slidably or rollably engaged with the eighth guide rail, which is connected to the other end of the tenth guide mechanism (362).

7. Two-axis displacement device according to claim 5,

the plane motion assembly (3) further comprises a connecting frame (303), and the motion platform (301) is arranged on the connecting frame (303);

the ninth guiding mechanism (352) comprises a first guiding beam (3521) and a ninth mechanical guide rail (3522) arranged on the first guiding beam (3521), the first guiding beam (3521) and the ninth mechanical guide rail (3522) both penetrate through the connecting frame (303), and the ninth mechanical guide rail (3522) is connected with the connecting frame (303) in a sliding mode;

the tenth guiding mechanism (362) and the ninth guiding mechanism (352) are spaced apart in a vertical direction, the tenth guiding mechanism (362) comprises a second guide beam (3621) and a tenth machine rail (3622) arranged on the second guide beam (3621), the second guide beam (3621) and the tenth machine rail (3622) both penetrate through the connecting frame (303), and the tenth machine rail (3622) is slidably connected with the connecting frame (303);

a mover of the fifth driving motor (312) is connected to one end of the first guide beam (3521), and a mover of the sixth driving motor (322) is connected to the other end of the first guide beam (3521);

a mover of the seventh driving motor (332) is connected to one end of the second guide beam (3621), and a mover of the eighth driving motor (342) is connected to the other end of the second guide beam (3621).

8. Two-axis displacement device according to claim 6,

the first mass block (201) comprises a first main body (2011) and a first support beam (2012) convexly arranged on the first main body (2011), the first support beam (2012) extends along the first horizontal direction, a stator of the fifth driving motor (312) is arranged on the first main body (2011), and a fifth guide rail of the fifth guide mechanism (3021) is arranged on the first support beam (2012);

the second mass block (202) comprises a second main body (2021) and a second beam (2022) convexly arranged on the second main body (2021), the second beam (2022) extends along the first horizontal direction, a stator of the sixth driving motor (322) is arranged on the second main body (2021), and a sixth guide rail of the sixth guiding mechanism (3022) is arranged on the second beam (2022);

the third mass block (203) includes a third body (2031) and a third corbel (2032) convexly disposed on the third body (2031), the third corbel (2032) extends in the second horizontal direction, a stator of the seventh driving motor (332) is disposed on the third body (2031), and a seventh guide rail of the seventh guiding mechanism (3023) is disposed on the third corbel (2032);

the fourth mass block (204) includes a fourth main body (2041) and a fourth beam (2042) convexly disposed on the fourth main body (2041), the fourth beam (2042) extends along the second horizontal direction, a stator of the eighth driving motor (342) is disposed on the fourth main body (2041), and an eighth guide rail of the eighth guiding mechanism (3024) is disposed on the fourth beam (2042).

9. Two-axis displacement device according to any one of claims 1 to 8,

-said first mass (201) comprises a first body (2011) and a first connection plate (2013) connected to each other, said first body (2011) being slidingly connected to said support table (1); -said second mass (202) comprises a second body (2021) and a second connection plate (2023) connected to each other, said second body (2021) being slidingly connected to said support bench (1); -said third mass (203) comprises a third body (2031) and a third connection plate (2033) connected to each other, said third body (2031) being slidingly connected to said support table (1); the fourth mass (204) comprises a fourth body (2041) and a fourth connecting plate (2043) connected to each other, the fourth body (2041) being slidingly connected to the support table (1); the first and second connection plates (2013, 2023) are vertically spaced apart from the third and fourth connection plates (2033, 2043);

the balance mass assembly further comprises an eleventh guide mechanism (205) and a twelfth guide mechanism (206), the eleventh guide mechanism (205) extending in the first horizontal direction, the twelfth guide mechanism (206) extending in the second horizontal direction; the first connecting plate (2013) and the second connecting plate (2023) are slidably connected by the eleventh guide mechanism (205), and the third connecting plate (2033) and the fourth connecting plate (2043) are slidably connected by the twelfth guide mechanism (206).

10. Two-axis displacement device according to claim 9, characterized in that the first connection plate (2013) is of U-shaped configuration with a first groove, the second connection plate (2023) is of U-shaped configuration with a second groove, the first groove and the second groove are butted to form a first relief hole (207); the third connecting plate (2033) is of a U-shaped structure with a third groove, the fourth connecting plate (2043) is of a U-shaped structure with a fourth groove, and the third groove and the fourth groove are butted to form a second avoidance hole (208); the supporting table (1) comprises a base (101) and a boss (102) arranged on the base (101), wherein the boss (102) is arranged in a first avoiding hole (207) and a second avoiding hole (208).