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CN216990328U - Laser processing system for forming composite laser - Google Patents

Laser processing system for forming composite laser Download PDF

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CN216990328U
CN216990328U CN202122606892.8U CN202122606892U CN216990328U CN 216990328 U CN216990328 U CN 216990328U CN 202122606892 U CN202122606892 U CN 202122606892U CN 216990328 U CN216990328 U CN 216990328U
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蒋峰
雷剑
朱之伟
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Suzhou Maxphotonics Co Ltd
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Abstract

本实用新型实施例提供了一种形成复合激光的激光加工系统,包括:至少两个激光模块、一光斑整形器件和一功率控制模块,所述至少两个激光模块通过多根输入光纤与所述光斑整形器件连接并输出一个具有中心光斑和至少一个外围光斑的复合光斑,所述功率控制模块与所述至少两个激光模块电性连接,并被配置为控制所述至少两个激光模块在预设范围内的功率可调,以使所述中心光斑和所述外围光斑形成不同能量比例轮廓。

Figure 202122606892

An embodiment of the present utility model provides a laser processing system for forming a composite laser, comprising: at least two laser modules, a light spot shaping device and a power control module, the at least two laser modules are connected to the at least two laser modules through a plurality of input fibers The light spot shaping device is connected to and outputs a composite light spot with a central light spot and at least one peripheral light spot, the power control module is electrically connected with the at least two laser modules, and is configured to control the at least two laser modules in a pre- The power within the set range is adjustable, so that the central light spot and the peripheral light spot form different energy ratio profiles.

Figure 202122606892

Description

一种形成复合激光的激光加工系统A laser processing system for forming compound laser

技术领域technical field

本实用新型涉及激光技术领域,特别是涉及一种形成复合激光的激光加工系统。The utility model relates to the field of laser technology, in particular to a laser processing system for forming a composite laser.

背景技术Background technique

高功率工业激光材料处理应用领域日新月异,与单个激光光源用于材料加工技术相比,多激光光源复合型高功率激光器可以大大扩展激光加工的范围,极大提升激光加工的质量。比如以新型多芯环形光纤(ring cores fiber)为光波导的激光器用于低飞溅激光焊接可以适应不同的焊接应用场景,提升焊接质量和焊接速度。这类激光器以替换高成本半导体高质量复合焊接系统为基本目标,逐渐向其他高质量激光焊接应用扩展。The application field of high-power industrial laser material processing is changing with each passing day. Compared with the single laser light source used for material processing technology, the multi-laser light source compound high-power laser can greatly expand the scope of laser processing and greatly improve the quality of laser processing. For example, a laser with a new multi-core ring fiber (ring cores fiber) as an optical waveguide for low-spatter laser welding can adapt to different welding application scenarios and improve welding quality and welding speed. The basic goal of this type of laser is to replace high-cost semiconductor high-quality hybrid welding systems, and gradually expand to other high-quality laser welding applications.

目前多激光器的复合激光可以采用空间光学系统,比如偏振或者波长多激光复用系统,或者是基于光纤熔融拉锥合束技术的全光纤信号合束器系统,将多个相同或者不同的光源复合为一个复杂光斑的单光源系统。At present, the multi-laser composite laser can use a spatial optical system, such as a polarization or wavelength multi-laser multiplexing system, or an all-fiber signal beam combiner system based on the fiber fusion and taper beam combining technology to combine multiple identical or different light sources. It is a single light source system with a complex spot.

基于空间光学系统的方案,由于使用复杂的空间光学系统去实现光纤到光纤的光斑变换/复用/耦合,系统长期可靠性存在风险,成本高。The solution based on the space optical system, because the complex space optical system is used to realize the optical spot transformation/multiplexing/coupling from the fiber to the fiber, the long-term reliability of the system is at risk and the cost is high.

基于熔融拉锥的方案,会导致光源的数值孔径损失很大。为补偿拉锥型合束的NA劣化,被迫要求采用高亮度的单横模激光光源和更细的输入光纤芯径,这样不仅限制了每个输入模块的最高功率(一般小于2000W/模块),而且由于单横模激光的强拉曼风险,必须对激光输入/光波导及其系统抗反射做出复杂设计补偿,大大增加了成本,降低长期可靠性。也对一些复杂的应用场景(高反射加工环境)不能很好的适应。The solution based on the fusion taper will result in a large loss of the numerical aperture of the light source. In order to compensate the NA deterioration of the tapered beam combining, it is forced to use a high-brightness single transverse mode laser light source and a thinner input fiber core diameter, which not only limits the maximum power of each input module (generally less than 2000W/module) , and due to the strong Raman risk of single transverse mode laser, complex design compensation must be made for the laser input/optical waveguide and its system anti-reflection, which greatly increases the cost and reduces long-term reliability. It is also not well adapted to some complex application scenarios (high reflection processing environment).

实用新型内容Utility model content

鉴于上述问题,提出了本实用新型实施例以便提供一种克服上述问题或者至少部分地解决上述问题的一种形成复合激光的激光加工系统,包括:In view of the above problems, the embodiments of the present invention are proposed to provide a laser processing system for forming a composite laser that overcomes the above problems or at least partially solves the above problems, including:

至少两个激光模块、一光斑整形器件和一功率控制模块;at least two laser modules, a spot shaping device and a power control module;

所述至少两个激光模块通过多根输入光纤与所述光斑整形器件连接并输出一个具有中心光斑和至少一个外围光斑的复合光斑;The at least two laser modules are connected to the light spot shaping device through a plurality of input fibers and output a composite light spot with a central light spot and at least one peripheral light spot;

所述功率控制模块与所述至少两个激光模块电性连接,并被配置为控制所述至少两个激光模块在预设范围内的功率可调,以使所述中心光斑和所述外围光斑形成不同能量比例轮廓;The power control module is electrically connected to the at least two laser modules, and is configured to control the power of the at least two laser modules to be adjustable within a preset range, so that the central spot and the peripheral spot are Form different energy ratio profiles;

所述光斑整形器件包括带状光纤阵列和光波导,所述带状光纤阵列与所述光波导通过端面耦合并直接连接在一起,所述光纤阵列中的多个输入光纤纤芯与所述光波导的相应波导层对准;The light spot shaping device includes a ribbon optical fiber array and an optical waveguide, the ribbon optical fiber array and the optical waveguide are coupled and directly connected together through end faces, and a plurality of input optical fiber cores in the optical fiber array are connected to the optical waveguide. The corresponding waveguide layer alignment of ;

所述带状光纤阵列由所述多根输入光纤一端按照预设形状并行排列并固定形成,所述光纤阵列中的纤芯直径与所述输入光纤其它部分的纤芯直径保持相同;The ribbon fiber array is formed by arranging and fixing one end of the plurality of input fibers in parallel according to a preset shape, and the core diameter in the fiber array is kept the same as the core diameter of other parts of the input fiber;

所述光波导各波导层的宽度大于所述带状光纤的纤芯直径,所述各波导层的数值孔径大于所述带状光纤的数值孔径;The width of each waveguide layer of the optical waveguide is greater than the core diameter of the ribbon fiber, and the numerical aperture of each waveguide layer is greater than the numerical aperture of the ribbon fiber;

所述光波导具有至少三层波导层,所述输出的复合光斑的中心为高斯光斑,外围为平顶光斑,所述复合光斑的数值孔径小于0.22NA;或The optical waveguide has at least three waveguide layers, the center of the output composite light spot is a Gaussian light spot, and the periphery is a flat-top light spot, and the numerical aperture of the composite light spot is less than 0.22NA; or

所述光波导具有至少四层波导层,所述输出的复合光斑的中心为高斯光斑或平顶光斑,外围为平顶光斑,所述复合光斑的数值孔径小于0.12NA;The optical waveguide has at least four waveguide layers, the center of the output composite light spot is a Gaussian light spot or a flat-top light spot, and the periphery is a flat-top light spot, and the numerical aperture of the composite light spot is less than 0.12NA;

所述光波导由包括多个波导层的整形部和输出部组成,所述整形部的横截面为轴对称分布的非圆形,所述输出部的横截面为圆形;The optical waveguide is composed of a shaping portion including a plurality of waveguide layers and an output portion, the cross-section of the shaping portion is axisymmetrically distributed and non-circular, and the cross-section of the output portion is circular;

所述至少两个激光模块输出具有不同波长的至少第一光束和第二光束;the at least two laser modules output at least a first light beam and a second light beam having different wavelengths;

所述激光模块为小芯径单纤输出全光纤激光模块,所述激光模块的最小输出功率大于2000W,所述芯径范围为14um~100um。The laser module is a single-fiber output all-fiber laser module with a small core diameter, the minimum output power of the laser module is greater than 2000W, and the core diameter ranges from 14um to 100um.

本实用新型实施例包括以下优点:The embodiments of the present utility model include the following advantages:

基于阵列光纤(ribbon fibers)直接连接技术,一方面可以避免空间光学复用系统的高成本以及长期可靠性风险。另一方面采用非光纤熔融拉锥技术进行输入端的制作,可以摆脱光纤熔融拉锥技术的复杂工艺和为管理光斑亮度损失而导致对输入光源的特殊要求。并且若要使用光纤熔融拉锥技术进行连接,则需要使用直径较大的光纤进行拉锥,而使用大光纤则难以兼容激光器单模块技术。Based on the direct connection technology of ribbon fibers, on the one hand, the high cost and long-term reliability risks of spatial optical multiplexing systems can be avoided. On the other hand, using the non-fiber fusion taper technology to manufacture the input end can get rid of the complex process of the fiber fusion taper technology and the special requirements for the input light source to manage the brightness loss of the spot. And if you want to use the fiber fusion taper technology for connection, you need to use a larger diameter fiber for taper, and using a large fiber is difficult to be compatible with the laser single module technology.

附图说明Description of drawings

图1是本实用新型实施例提供的一种激光光斑整形器件的结构框图;1 is a structural block diagram of a laser spot shaping device provided by an embodiment of the present invention;

图2是本实用新型实施例带状光纤阵列与波导层连接的示意图;2 is a schematic diagram of the connection between the ribbon fiber array and the waveguide layer according to the embodiment of the present invention;

图3A是带状光纤阵列与楔形光波导端面耦合的示意图;3A is a schematic diagram of the coupling of a ribbon fiber array and a wedge-shaped optical waveguide end face;

图3B是带状光纤阵列与长方体光波导端面耦合的示意图;3B is a schematic diagram of the coupling between the ribbon fiber array and the end face of the cuboid optical waveguide;

图4是为本实用新型实施例另一角度的带状光纤阵列与波导层连接的示意图;4 is a schematic diagram of the connection between the ribbon fiber array and the waveguide layer from another angle of the embodiment of the present utility model;

图5是三包层光纤的截面图;5 is a cross-sectional view of a triple-clad optical fiber;

图6是三包层光纤的剖面图;6 is a cross-sectional view of a triple-clad optical fiber;

图7是三包层光纤的折射率示意图;7 is a schematic diagram of the refractive index of a three-clad optical fiber;

图8是传能光纤的截面图;8 is a cross-sectional view of an energy-transmitting optical fiber;

图9是传能光纤的剖面图;9 is a cross-sectional view of an energy-transmitting optical fiber;

图10是传能光纤的折射率示意图;Figure 10 is a schematic diagram of the refractive index of the energy transmission fiber;

图11是本实用新型实施例提供的一种激光光斑整形器件制作方法的步骤流程图;11 is a flow chart of the steps of a method for fabricating a laser spot shaping device provided by an embodiment of the present invention;

图12是本实用新型实施例提供的一种激光加工系统的结构框图;12 is a structural block diagram of a laser processing system provided by an embodiment of the present invention;

图13是本实用新型实施例提供的一种激光加工方法的步骤流程图。FIG. 13 is a flow chart of steps of a laser processing method provided by an embodiment of the present invention.

具体实施方式Detailed ways

为使本实用新型的上述目的、特征和优点能够更加明显易懂,下面结合附图和具体实施方式对本实用新型作进一步详细的说明。In order to make the above objects, features and advantages of the present utility model more clearly understood, the present utility model will be described in further detail below with reference to the accompanying drawings and specific embodiments.

参照图1,示出了本实用新型实施例提供的一种激光光斑整形器件的结构框图,具体可以包括:Referring to FIG. 1, a structural block diagram of a laser spot shaping device provided by an embodiment of the present invention is shown, which may specifically include:

沿中心光轴依次设置的输入端10和整形端11,所述输入端10设有与多个激光光源分别连接的多根输入光纤组成的光纤阵列,所述整形端11设有具有多个波导层的光波导,所述光纤阵列中多根输入光纤的纤芯与所述光波导的多个波导层分别对准并耦合连接,所述多个激光光源经由所述光纤阵列输出的光束在通过所述光波导时进行输出光斑的压缩整形。An input end 10 and a shaping end 11 are arranged in sequence along the central optical axis. The input end 10 is provided with an optical fiber array composed of a plurality of input fibers respectively connected to a plurality of laser light sources, and the shaping end 11 is provided with a plurality of waveguides. The optical waveguide layer of the optical fiber array, the cores of the multiple input optical fibers in the optical fiber array are respectively aligned and coupled to the multiple waveguide layers of the optical waveguide, and the light beams output by the multiple laser light sources through the optical fiber array pass through the optical fiber array. Compression and shaping of the output light spot is performed during the optical waveguide.

在本实用新型实施例中,所述激光光源可以是输出具有不同波长的激光光束的至少两个激光模块,也可以是输出具有相同波长的激光光束的至少两个激光模块。In the embodiment of the present invention, the laser light source may be at least two laser modules outputting laser beams with different wavelengths, or at least two laser modules outputting laser beams with the same wavelength.

在本实用新型实施例中,所述光纤阵列是由所述多根输入光纤按照预设形状排列后固定形成,所述光纤阵列中的输入光纤纤芯直径与非固定部分的输入光纤纤芯直径相同,所述光纤阵列中的纤芯端面与光轴平面垂直。In the embodiment of the present invention, the optical fiber array is formed by arranging the plurality of input optical fibers in a preset shape and then fixing them. Similarly, the end face of the fiber core in the fiber array is perpendicular to the plane of the optical axis.

光纤阵列可以是指将多根光纤并行排成一排或多排组成的阵列,示例性地,可以采用与多个激光光源分别连接的三根输入光纤排成一排,组成带状光纤阵列;也可以并行排列成其它预设的形状,例如,七根输入光纤可以排成二/三层结构的多边形光纤阵列等。同时,多根输入光纤排列后固定的方式可以包括多种。示例性地,可以采用光纤夹具将多根输入光纤固定排列,也可以将多根输入光纤放入扁形孔玻璃管进行固定排列,还可以通过胶水将多根输入光纤固定排列等其它非熔融拉锥方式,本实用新型实施例对此不做限定,通过上述直接固定光纤组合的方式,光纤阵列中的纤芯直径与非固定部分直径相比也没有发生改变,减少了因熔融拉锥带来的损耗。An optical fiber array may refer to an array formed by arranging multiple optical fibers in parallel in one row or multiple rows. Exemplarily, three input optical fibers connected to multiple laser light sources may be arranged in a row to form a ribbon optical fiber array; It can be arranged in parallel in other preset shapes, for example, seven input fibers can be arranged in a polygonal fiber array of two/three-layer structure, etc. At the same time, the ways in which the plurality of input fibers are arranged and fixed may include various methods. Exemplarily, a plurality of input fibers can be fixedly arranged by using a fiber optic clamp, or a plurality of input fibers can be placed in a flat-hole glass tube for fixed arrangement, and a plurality of input fibers can also be fixedly arranged by glue and other non-melting tapers. This is not limited in the embodiments of the present invention. By the above-mentioned method of directly fixing the optical fiber combination, the core diameter in the optical fiber array does not change compared with the diameter of the non-fixed part, which reduces the damage caused by the fusion taper. loss.

整形端11包括一个具有多个波导层的光波导,不同的波导层可以为不同的传输介质,用于对输入的光线进行整形,同时还包括与所述光波导连接的输出端,所述输出端为多包层单纤光纤或多芯光纤的任一一种,所述光波导可以直接为所述输出端的一部分,或通过熔接、焊接或机械结构与所述输出端连接在一起。The shaping end 11 includes an optical waveguide with multiple waveguide layers, and different waveguide layers can be different transmission media for shaping the input light, and also includes an output end connected to the optical waveguide, the output The end is either a multi-clad single-fiber fiber or a multi-core fiber, and the optical waveguide can be directly a part of the output end, or be connected to the output end by fusion, welding or mechanical structure.

所述光波导可以选用不同类型的光纤直接加工得到,示例性地,可以采用多单芯光纤或多芯光纤的裸露光纤头加工为光波导,其它部分则为输出端。其中单芯光纤可以为三包层光纤、双包层传能光纤中的至少一种,多芯光纤可以为环形光纤。某些场景下,光波导也可以选用单独的透明介质,如光学石英玻璃加工成预设的形状后再通过焊接或熔接等方式与输出端即多单芯光纤或多芯光纤连接在一起。The optical waveguide can be directly processed by selecting different types of optical fibers. Exemplarily, the optical waveguide can be processed by using a multi-single-core optical fiber or a bare fiber tip of a multi-core optical fiber, and the other part is the output end. The single-core optical fiber can be at least one of a triple-clad optical fiber and a double-clad energy-transmitting optical fiber, and the multi-core optical fiber can be a ring optical fiber. In some scenarios, the optical waveguide can also be a separate transparent medium, such as optical quartz glass, which is processed into a preset shape and then connected to the output end, that is, a multi-single-core optical fiber or a multi-core optical fiber by welding or welding.

在本实用新型实施例中,可以依据光波导的结构尺寸,选择相应的输入光纤尺寸。其中,所述光纤阵列在光纤排列方向的宽度,应小于或等于光波导的最外层的直径,以使各根输入光纤可以位于光波导的对应波导层范围内。示例性的,所述输入光纤采用双包层光纤,纤芯直径范围为14um~100um,则每根输入光纤的最外层包层直径小于或等于与其耦合的光波导直径的1/3,或者小于最外包层直径减去20um,且所述输入光纤的纤芯NA小于光波导的波导层NA。In the embodiment of the present invention, the corresponding input fiber size can be selected according to the structure size of the optical waveguide. Wherein, the width of the fiber array in the fiber arrangement direction should be less than or equal to the diameter of the outermost layer of the optical waveguide, so that each input fiber can be located within the range of the corresponding waveguide layer of the optical waveguide. Exemplarily, the input fiber is a double-clad fiber with a core diameter ranging from 14um to 100um, and the diameter of the outermost cladding of each input fiber is less than or equal to 1/3 of the diameter of the optical waveguide coupled to it, or It is less than the diameter of the outermost cladding minus 20um, and the core NA of the input fiber is smaller than the waveguide layer NA of the optical waveguide.

一种可以工作的光纤组合是:所述输入光纤纤芯直径为14um~50um,包层直径为90um,所述光波导是360标准传能光纤,纤芯直径为100um,外包层直径为360um。A workable optical fiber combination is: the input fiber core diameter is 14um-50um, the cladding diameter is 90um, the optical waveguide is a 360 standard energy transmission fiber, the core diameter is 100um, and the outer cladding diameter is 360um.

另一种可以工作的光纤组合是,所述输入光纤纤芯直径为14um~50um,包层直径为90um;所述光波导为三包层光纤,纤芯直径、内包层直径、外包层直径依次为100um/300um/360um。Another optical fiber combination that can work is that the input fiber has a core diameter of 14um-50um and a cladding diameter of 90um; the optical waveguide is a triple-clad fiber, the core diameter, the inner cladding diameter, and the outer cladding diameter are sequentially It is 100um/300um/360um.

又一种可以工作的光纤组合是,所述输入光纤纤芯直径为14um~50um,包层直径为90um;所述光波导为环形光纤,纤芯直径、外纤芯直径依次为100um/360um。Another workable optical fiber combination is that the input fiber core diameter is 14um-50um, and the cladding diameter is 90um; the optical waveguide is a ring fiber, the core diameter and the outer core diameter are 100um/360um in sequence.

如采用更多波导层的光波导,则采用更多数量的输入光纤组成带状光纤阵列,但是具体选用多少根输入光纤或者选用多少波导层的光波导,可以根据需求选择。If optical waveguides with more waveguide layers are used, a larger number of input fibers are used to form a ribbon fiber array, but how many input fibers or how many optical waveguides with waveguide layers are selected can be selected according to requirements.

光纤阵列与光波导可以为熔接连接、焊接连接,还可以为通过机械机构固定连接,例如通过耦合器将带状光纤阵列与光波导连接。The optical fiber array and the optical waveguide can be connected by welding, welding, or fixedly connected by a mechanical mechanism, such as connecting the ribbon fiber array and the optical waveguide through a coupler.

在本实用新型实施例中,激光光斑整形器件包括沿中心光轴依次设置的输入端和整形端,输入端设有与多个激光光源分别连接的多根输入光纤组成的光纤阵列,整形端设有具有多个波导层的光波导,光纤阵列中多根输入光纤的纤芯与光波导的多个波导层分别对准并耦合连接,多个激光光源经由光纤阵列输出的光束在通过光波导时进行输出光斑的压缩整形。输入端与整形端可以基于阵列光纤连接技术直接连接,一方面可以避免空间光学复用系统的高成本以及长期可靠性风险;另一方面采用非光纤熔融拉锥技术制作的输入端,可以摆脱光纤熔融拉锥技术的复杂工艺和为管理光斑亮度损失而导致对输入光源的特殊要求。In the embodiment of the present utility model, the laser spot shaping device includes an input end and a shaping end arranged in sequence along the central optical axis, the input end is provided with an optical fiber array composed of a plurality of input optical fibers respectively connected with a plurality of laser light sources, and the shaping end is provided with There is an optical waveguide with multiple waveguide layers, the cores of multiple input fibers in the fiber array are aligned and coupled to the multiple waveguide layers of the optical waveguide, and the beams output by multiple laser light sources through the fiber array pass through the optical waveguide. Compression shaping of the output light spot is performed. The input end and the shaping end can be directly connected based on the array fiber connection technology. On the one hand, the high cost and long-term reliability risk of the spatial optical multiplexing system can be avoided; The complex process of fused taper technology and the management of spot brightness loss result in special requirements for the input light source.

同时,若要使用光纤熔融拉锥技术进行连接,则需要使用直径较大的光纤进行拉锥,而使用大光纤则难以兼容激光器单模块技术。由于对输入光源要求的降低,可以直接利用当前市场上通用的高功率单模块多模激光光源,用极少多模激光模块(2,3个4000w激光光源,)复合出高功率的复合激光,相对现有技术中用熔融拉锥技术需要6~8个激光模块实现6000W叠加6000W的复合激光,极大降低了复合激光的成本,简化系统控制。At the same time, if you want to use the fiber fusion taper technology for connection, you need to use a larger diameter fiber for taper, and using a large fiber is difficult to be compatible with the laser single module technology. Due to the reduction of the requirements for the input light source, the high-power single-module multi-mode laser light source commonly used in the current market can be directly used, and a high-power composite laser can be composited with very few multi-mode laser modules (2, 3 4000w laser light sources,). Compared with the prior art, the fusion taper technology requires 6 to 8 laser modules to achieve 6000W superimposed 6000W composite laser, which greatly reduces the cost of the composite laser and simplifies system control.

此外,本实用新型实施例不仅可以用传统的多芯光纤作为光波导,更可以采用在非复合光系统中通用的三包层光纤以及标准360传能光纤作为光波导,大大降低了成本,方便用户的激光维护和更新。In addition, the embodiment of the present invention can not only use the traditional multi-core optical fiber as the optical waveguide, but also can use the three-clad optical fiber and the standard 360 energy-transmitting optical fiber commonly used in the non-composite optical system as the optical waveguide, which greatly reduces the cost and is convenient. Laser maintenance and updates for users.

在本实用新型实施例中,所述光波导为沿中心光轴对称分布且具有非圆形横截面的透明介质,所述光波导的端面与光轴平面垂直。In the embodiment of the present invention, the optical waveguide is a transparent medium that is symmetrically distributed along the central optical axis and has a non-circular cross section, and the end face of the optical waveguide is perpendicular to the plane of the optical axis.

示例性地,所述光波导可以为沿中心光轴对称的光楔形状,也可以为轴对称的其它多面体,如正方体、长方体。Exemplarily, the optical waveguide may be in the shape of an optical wedge that is symmetrical along the central optical axis, or may be other axisymmetrical polyhedrons, such as a cube or a rectangular parallelepiped.

示例性地,可以采用多包层单芯光纤或多芯光纤如环形光纤制作成光楔光纤,与带状光纤阵列直接耦合连接,其中,光楔端面垂直于光轴平面,形状接近与其耦合的带状光纤阵列的端面形状,呈近椭圆形,沿光楔端面向上下两侧延伸为斜面,所述斜面与所述端面的交集为两条与光轴平面平行的线段,所述两条线段之间的最短距离大于或等于所述带状光纤阵列中纤芯的直径。Exemplarily, a multi-clad single-core fiber or a multi-core fiber such as a ring fiber can be used to make an optical wedge fiber, which is directly coupled and connected to the ribbon fiber array, wherein the end face of the optical wedge is perpendicular to the plane of the optical axis, and the shape is close to the one that is coupled to it. The end face shape of the ribbon optical fiber array is nearly elliptical, and extends along the upper and lower sides of the optical wedge end face to be inclined planes. The intersection of the inclined plane and the end face is two line segments parallel to the optical axis plane. The two line segments The shortest distance between them is greater than or equal to the diameter of the fiber cores in the ribbon fiber array.

参照图2所示为本实用新型实施例带状光纤阵列与光楔光纤连接的示意图。图2中,以平行于多根输入光纤排列,即平行于光轴平面的角度观察,因此观察到的是单根输入光纤,其他的输入光纤可以理解为被所能观察到的输入光纤遮挡。实际上,光纤阵列中的各根输入光纤端面都与光楔光纤的端面对准。Referring to FIG. 2, it is a schematic diagram showing the connection between the ribbon fiber array and the optical wedge fiber according to the embodiment of the present invention. In Figure 2, it is observed at an angle parallel to the multiple input fibers, that is, parallel to the plane of the optical axis. Therefore, a single input fiber is observed, and other input fibers can be understood as being blocked by the observed input fibers. In fact, the end faces of each input fiber in the fiber array are aligned with the end faces of the wedge fibers.

从输入光纤的纤芯输出的激光,入射到光波导后,一部分被光楔的端面反射回光波导中,相当于增大了光波导的接收角,可以使得更多入射角度的激光能够在光波导中传输,可以提高光波导的集光能力,对光束进行整形,实现对入射光的数值孔径NA进行压缩。After the laser output from the core of the input fiber is incident on the optical waveguide, a part of it is reflected back into the optical waveguide by the end face of the optical wedge, which is equivalent to increasing the receiving angle of the optical waveguide, which enables lasers with more incident angles to be able to operate in the optical waveguide. The transmission in the waveguide can improve the light-gathering ability of the optical waveguide, shape the light beam, and realize the compression of the numerical aperture NA of the incident light.

在本实用新型实施例中,所述光波导的横截面为沿光轴对称分布的非圆形界面,所述非圆界面可以是由平行线段和圆弧组成的对称形状,例如,除了上述实施例中提到的光楔形状;光波导也可以是由线段组成的正多边形,还可以是沿光轴对称分布横截面为矩形的长方体形状,长方体光波导在实际应用中具有更好的集光能力。参照图3A所示为带状光纤阵列与楔形光波导端面耦合的示意图,光波导的横截面为由平行线段和圆弧组成的对称形状;参照图3B所示为带状光纤阵列与长方体光波导端面耦合的示意图,光波导的横截面为长方体形状。In the embodiment of the present invention, the cross section of the optical waveguide is a non-circular interface symmetrically distributed along the optical axis, and the non-circular interface may be a symmetrical shape composed of parallel line segments and circular arcs. For example, in addition to the above implementation The optical wedge shape mentioned in the example; the optical waveguide can also be a regular polygon composed of line segments, or a rectangular parallelepiped shape with a rectangular cross-section symmetrically distributed along the optical axis. The rectangular optical waveguide has better light collection in practical applications. ability. Referring to FIG. 3A, it is a schematic diagram of the coupling between the ribbon fiber array and the end face of the wedge-shaped optical waveguide. The cross section of the optical waveguide is a symmetrical shape composed of parallel line segments and circular arcs. Referring to FIG. 3B, the ribbon fiber array and the cuboid optical waveguide are shown. Schematic diagram of end-face coupling, the cross-section of the optical waveguide is in the shape of a cuboid.

通过将光波导的横截面加工为沿中心光轴对称分布的椭圆形或多边形,可以使得光波导的中心位于几何中央,使得射入光波导的激光在各个方向都能对称反射。参照图4所示为本实用新型实施例另一角度的带状光纤阵列与波导层连接的示意图,其中,光波导的端面为沿光轴对称分布的近椭圆形,以便更好的与阵列光纤中的输入光纤端面耦合。图4中以垂直于多根输入光纤排列的角度观察,因此观察到多根输入光纤。其中输入光纤的数量为三根,位于中间的输入光纤对准光波导的中心波导层;两侧的输入光纤,对准光波导外侧的波导层。By processing the cross section of the optical waveguide into an ellipse or a polygon symmetrically distributed along the central optical axis, the center of the optical waveguide can be located at the geometric center, so that the laser light entering the optical waveguide can be reflected symmetrically in all directions. Referring to FIG. 4, it is a schematic diagram of the connection between the ribbon fiber array and the waveguide layer from another angle of the embodiment of the present invention, wherein the end face of the optical waveguide is a nearly elliptical shape symmetrically distributed along the optical axis, so as to better connect with the array fiber. Input fiber end-face coupling in . Viewed at an angle perpendicular to the arrangement of the multiple input fibers in Figure 4, the multiple input fibers are thus observed. The number of input fibers is three, and the input fibers in the middle are aligned with the central waveguide layer of the optical waveguide; the input fibers on both sides are aligned with the waveguide layers outside the optical waveguide.

在本实用新型实施例中,由于光纤阵列中采用了小型光纤,所述输入光纤的直径小于波导层,所述光波导的波导层与所述带状光纤阵列中输入光纤纤芯可以为中心对准和/或偏心对准。In the embodiment of the present invention, since small optical fibers are used in the optical fiber array, the diameter of the input optical fiber is smaller than that of the waveguide layer, and the waveguide layer of the optical waveguide and the core of the input optical fiber in the ribbon optical fiber array can be aligned at the center. alignment and/or eccentric alignment.

在中心对准的情况下,从带状光纤阵列中输入光纤纤芯传输的激光,可以全部传输至相应的波导层中,使得输出激光功率最大。In the case of center alignment, the laser light transmitted from the input fiber core from the ribbon fiber array can all be transmitted to the corresponding waveguide layer, so that the output laser power is maximized.

在偏心对准的情况下,从带状光纤阵列中输入光纤纤芯传输的激光,可以全部传输至相应的波导层中,也可以传输至相应的至少两个波导层中,通过调整偏心程度,可以调整输出激光的功率和光斑形状。In the case of eccentric alignment, the laser light transmitted from the fiber core input from the ribbon fiber array can be all transmitted to the corresponding waveguide layer, or can be transmitted to at least two corresponding waveguide layers. By adjusting the degree of eccentricity, The power and spot shape of the output laser can be adjusted.

参照图5所示为三包层光纤的截面图,参照图6所示为三包层光纤的剖面图,三包层光纤包括纤芯、第一包层(内包层)、第二包层(外包层),第一包层可以为熔石英内包层,第二包层可以为掺F石英包层,第一包层的厚度大于第二包层的厚度。示例性地,纤芯直径、内包层直径、外包层直径依次为100um/300um/360um。图7为三包层光纤的折射率示意图,三包层光纤在纤芯、内包层传输激光,其中纤芯、第一包层、第二包层的折射率依次减小。在采用三包层光纤与波导层连接的情况下,三包层光纤可以达到小于0.12NA的效果,且三包层光纤成本低,可以降低激光光斑整形器件的成本。5 is a cross-sectional view of a three-clad optical fiber, and FIG. 6 is a cross-sectional view of a three-clad optical fiber. The three-clad optical fiber includes a core, a first cladding (inner cladding), a second cladding ( Outer cladding), the first cladding layer can be a fused silica inner cladding layer, the second cladding layer can be an F-doped quartz cladding layer, and the thickness of the first cladding layer is greater than that of the second cladding layer. Exemplarily, the diameter of the core, the diameter of the inner cladding, and the diameter of the outer cladding are 100um/300um/360um in sequence. Figure 7 is a schematic diagram of the refractive index of the three-cladding fiber. The three-cladding fiber transmits laser light in the core and the inner cladding, wherein the refractive indices of the core, the first cladding, and the second cladding decrease in turn. When the triple-clad fiber is connected to the waveguide layer, the triple-clad fiber can achieve an effect of less than 0.12 NA, and the cost of the triple-clad fiber is low, which can reduce the cost of the laser spot shaping device.

参照图8所示为传能光纤的截面图,参照图9所示为传能光纤的剖面图,传能光纤包括纤芯、第一包层(内包层)、第二包层(外包层),第一包层可以为掺F石英包层,第二包层可以为熔石英包层,第一包层的厚度小于第二包层的厚度。示例性地,纤芯直径为100um,外包层直径为360um。图10为传能光纤的折射率示意图,传能光纤在纤芯、第二包层传输激光,纤芯和第二包层可以具有大致相同的折射率,第一包层的折射率低于纤芯和第二包层。在采用传能光纤与波导层连接的情况下,传能光纤可以达到小于0.22NA的效果。Referring to FIG. 8, it is a cross-sectional view of an energy-transmitting optical fiber, and referring to FIG. 9, it is a cross-sectional view of an energy-transmitting optical fiber. The energy-transmitting optical fiber includes a core, a first cladding (inner cladding), and a second cladding (outer cladding). , the first cladding layer can be a F-doped quartz cladding layer, the second cladding layer can be a fused silica cladding layer, and the thickness of the first cladding layer is smaller than that of the second cladding layer. Exemplarily, the core diameter is 100um and the outer cladding diameter is 360um. Figure 10 is a schematic diagram of the refractive index of the energy transmission fiber. The energy transmission fiber transmits laser light in the core and the second cladding. The core and the second cladding may have approximately the same refractive index, and the refractive index of the first cladding is lower than that of the fiber. core and second cladding. In the case of using an energy-transmitting optical fiber to connect with the waveguide layer, the energy-transmitting optical fiber can achieve an effect of less than 0.22 NA.

参照图11,示出了本实用新型实施例提供的一种激光光斑整形器件制作方法的步骤流程图,所述方法具体可以包括如下步骤:Referring to FIG. 11 , a flowchart of steps of a method for manufacturing a laser spot shaping device provided by an embodiment of the present invention is shown, and the method may specifically include the following steps:

步骤1101,获取多根与多个激光光源分别连接的输入光纤,将所述输入光纤按照预设形状并行排列后固定形成光纤阵列。Step 1101: Obtain a plurality of input optical fibers respectively connected to a plurality of laser light sources, arrange the input optical fibers in parallel according to a preset shape, and then fix them to form an optical fiber array.

在本实用新型一种可选实施例中,所述步骤1101可以包括如下子步骤:In an optional embodiment of the present invention, the step 1101 may include the following sub-steps:

子步骤S11,利用光纤夹具,将所述输入光纤排列组成预设形状并固定,所述输入光纤的纤芯之间保持预设间隙,通过热熔、胶水或外部固定装置固定后形成光纤阵列,所述光纤阵列中的纤芯直径与所述输入光纤非固定部分的纤芯直径相同。Sub-step S11, using an optical fiber fixture to arrange the input optical fibers into a preset shape and fix them, maintain a preset gap between the cores of the input optical fibers, and form an optical fiber array after being fixed by hot melting, glue or an external fixing device, The core diameter in the fiber array is the same as the core diameter of the non-fixed portion of the input fiber.

子步骤S12,利用光纤切割设备切割所述光纤阵列得到平整光滑的光纤阵列端面,且所述光纤阵列中的纤芯端面与光轴平面垂直。In sub-step S12, the optical fiber array is cut by an optical fiber cutting device to obtain a flat and smooth end face of the optical fiber array, and the end face of the fiber core in the optical fiber array is perpendicular to the plane of the optical axis.

光纤夹具可以包括两个可相互配合的夹持件,夹持件具有凹槽,光纤可以被容纳在凹槽中,凹槽的间隔可以根据实际需要制定,从而使得光纤可以按照预设间隙排列成一排并固定,然后可以采用标准带状光纤切割设备切割光纤阵列,得到平整的光纤阵列端面。例如,预设间隙可以为零,即输入光纤的涂覆层紧密连接,裸光纤(不包括涂覆层的光纤)之间有间隙。The fiber optic clamp can include two cooperating clamping parts, the clamping parts have grooves, the optical fibers can be accommodated in the grooves, and the interval of the grooves can be made according to actual needs, so that the optical fibers can be arranged in a preset gap. Then, the fiber array can be cut by standard ribbon fiber cutting equipment to obtain a flat fiber array end face. For example, the preset gap can be zero, ie, the coating of the input fiber is closely connected, and there is a gap between the bare fiber (fiber not including the coating).

在本实用新型另一种可选实施例中,所述步骤1101可以包括如下子步骤:In another optional embodiment of the present invention, the step 1101 may include the following sub-steps:

子步骤S21,将所述多根输入光纤纤芯紧密排列成预设形状,放入一变形孔毛细玻璃管内;Sub-step S21, the multiple input optical fiber cores are closely arranged into a preset shape, and put into a deformed hole capillary glass tube;

子步骤S22,将所述多根输入光纤纤芯和所述玻璃管熔接连成一体,形成固定的光纤阵列,所述光纤阵列中的纤芯直径与所述输入光纤非固定部分的纤芯直径相同;Sub-step S22, the multiple input optical fiber cores and the glass tube are welded into one body to form a fixed optical fiber array, and the core diameter in the optical fiber array is the same as the core diameter of the non-fixed portion of the input optical fiber. same;

具体的,可以利用火研磨工艺,将多根输入光纤纤芯和玻璃管熔接连成一体,形成固定的光纤阵列。Specifically, a fire grinding process can be used to fuse and connect a plurality of input optical fiber cores and glass tubes to form a fixed optical fiber array.

子步骤S23,利用光纤切割设备切割所述光纤阵列得到平整光滑的光纤阵列端面,且所述光纤阵列中的纤芯端面与光轴平面垂直。Sub-step S23, the optical fiber array is cut by an optical fiber cutting device to obtain a flat and smooth end face of the optical fiber array, and the end face of the fiber core in the optical fiber array is perpendicular to the plane of the optical axis.

参照图11所示本实用新型实施例中为通过变形孔毛细玻璃管形成带状光纤阵列的示意图。具体的,可以采用扁形孔玻璃管,将三根输入光纤放入其中,火研磨工艺将三根输入光纤的外表面熔接连成一体,此时裸光纤之间是紧密排列为一排,可以用光纤切割刀处理得到平整的光纤阵列端面,所述端面垂直于光轴平面。Referring to FIG. 11, it is a schematic diagram of forming a ribbon optical fiber array by deforming a capillary glass tube in an embodiment of the present invention. Specifically, a flat-hole glass tube can be used, three input optical fibers can be put into it, and the outer surfaces of the three input optical fibers can be fused and connected into one by the fire grinding process. The knife processing obtains a flat end face of the optical fiber array, and the end face is perpendicular to the plane of the optical axis.

步骤1102,获取一具有多个波导层的光波导。Step 1102, obtaining an optical waveguide with multiple waveguide layers.

示例性地,可以获取单芯光纤或多芯光纤作为光波导,其中单芯光纤可以为三包层光纤、双包层传能光纤中的至少一种。Exemplarily, a single-core optical fiber or a multi-core optical fiber can be obtained as an optical waveguide, wherein the single-core optical fiber can be at least one of a triple-clad optical fiber and a double-clad energy-transmitting optical fiber.

在本实用新型一种可选实施例中,所述的方法还可以包括:将所述光波导沿端面两侧抛磨加工成沿中心光轴对称分布且具有非圆形横截面的几何形状;对所述光波导端面进行抛光或者平面光纤切割处理,使得所述光波导端面平整光滑且与光轴平面垂直。In an optional embodiment of the present invention, the method may further include: polishing the optical waveguide along both sides of the end face into a geometric shape that is symmetrically distributed along the central optical axis and has a non-circular cross-section; The end face of the optical waveguide is polished or the plane fiber is cut, so that the end face of the optical waveguide is flat and smooth and perpendicular to the plane of the optical axis.

在一种示例中,可以将光波导加工为光楔形状,光楔端面为一垂直面,两侧为斜面。具体的,可以先将光波导的端面加工为垂直面,然后再从端面中相对光波导的中心向外加工出两个斜面,所述斜面与所述端帽的交集为对称的两条平行线段,所述两条线段至光波导的中心的距离大于输入光纤纤芯的半径。例如,可以在端面两侧抛磨或者用飞秒激光,CO2激光精细加工为斜面,使得端面中间保持为垂直面,两侧为对称的斜面。光楔端面在水平方向和垂直方向均为轴对称,可以保证纤芯位于光楔端面的几何中央。光楔端面为接近椭圆表面,也要抛光或者平面光纤切割(平面离解)处理。In one example, the optical waveguide can be processed into an optical wedge shape, the end face of the optical wedge is a vertical plane, and the two sides are inclined planes. Specifically, the end face of the optical waveguide can be processed into a vertical plane, and then two inclined planes are processed outward from the end face relative to the center of the optical waveguide, and the intersection of the inclined plane and the end cap is two symmetrical parallel line segments , the distance from the two line segments to the center of the optical waveguide is greater than the radius of the input fiber core. For example, it can be polished on both sides of the end face or finely processed by a femtosecond laser and CO2 laser into a bevel, so that the middle of the end face is kept as a vertical plane, and the two sides are symmetrical bevels. The end face of the optical wedge is axisymmetric in both the horizontal and vertical directions, which can ensure that the fiber core is located in the geometric center of the end face of the optical wedge. The end face of the optical wedge is close to the elliptical surface, and also needs to be polished or processed by plane fiber cutting (plane dissociation).

从激光入射方向看,光波导的光楔端面为近椭圆形状的表面,使得光楔端面为在水平和垂直方向都为轴对称的端面。在实际中,光楔也可以被加工为其他轴对称的形状,例如立方体,本实用新型实施例对此不做限定。Viewed from the incident direction of the laser light, the wedge end face of the optical waveguide is a nearly elliptical surface, so that the wedge end face is an axisymmetric end face in both the horizontal and vertical directions. In practice, the optical wedge may also be processed into other axisymmetric shapes, such as a cube, which is not limited in this embodiment of the present invention.

通过将光波导的端面加工为光楔或其它形状,使得各根输入光纤中传输的激光在进入光波导时按照特定方向进行折射,一方面实现了输入光束的NA压缩,减少输出NA,提升光纤复用的填充率,最终提升输出光源的亮度,也降低了对输入光源的亮度要求;同时,这种将光纤加工成光楔或其它形状的设计,可以放大反向光的NA,将反向光挤出光纤,也大大提升了器件/系统的抗高反性能。By processing the end face of the optical waveguide into an optical wedge or other shape, the laser light transmitted in each input fiber is refracted in a specific direction when entering the optical waveguide. On the one hand, the NA compression of the input beam is realized, the output NA is reduced, and the fiber is improved. The multiplexed filling rate ultimately increases the brightness of the output light source and reduces the brightness requirements for the input light source; at the same time, the design of processing the optical fiber into a wedge or other shapes can amplify the NA of the reversed light and reverse the The optical extrusion of the optical fiber also greatly improves the anti-high reflection performance of the device/system.

另一方面,激光束的空间强度分布呈高斯分布,即高斯光束,而在很多激光技术的应用中希望激光光强是均匀分布的,通过对光斑压缩整形处理,可以达到输出光纤完全兼容现有技术应用。On the other hand, the spatial intensity distribution of the laser beam is a Gaussian distribution, that is, a Gaussian beam. In the application of many laser technologies, the laser light intensity is expected to be uniformly distributed. By compressing and reshaping the light spot, the output fiber can be fully compatible with existing technology application.

通过对光波导的端面进行抛光或者平面光纤切割处理,可以避免端面粗糙有缺陷,而导致激光漏出。By polishing the end face of the optical waveguide or cutting the plane fiber, the rough and defective end face can be prevented from causing laser leakage.

步骤1103,将所述光纤阵列中多个输入光纤的纤芯与所述光波导的多个波导层分别对准耦合。Step 1103: Align and couple the cores of multiple input fibers in the fiber array with the multiple waveguide layers of the optical waveguide, respectively.

示例性地,可以采用功率监控熔接方法得到最优对准点。可以检测光波导的各个波导层输出激光的功率,根据各波导层的激光功率判断是否对准。Illustratively, the optimal alignment point may be obtained using a power monitoring welding method. The power of the laser output from each waveguide layer of the optical waveguide can be detected, and whether alignment is determined according to the laser power of each waveguide layer.

示例性地,可以预先为输入端和光波导在尺寸上留足够的公差,便于两端对准。Exemplarily, the input end and the optical waveguide can be dimensionally left with sufficient tolerance to facilitate the alignment of the two ends.

在本实用新型一种可选实施例中,所述步骤1103可以包括如下子步骤:In an optional embodiment of the present invention, the step 1103 may include the following sub-steps:

子步骤S31,将所述光纤阵列中每个纤芯与所述光波导的相应波导层的中间部分耦合对准,使得输出的单束激光保持在所述一个相应波导层内传输;Sub-step S31, coupling and aligning each fiber core in the optical fiber array with the middle portion of the corresponding waveguide layer of the optical waveguide, so that the output single beam of laser light is maintained and transmitted in the one corresponding waveguide layer;

在带状光纤阵列中输入光纤的纤芯与光波导的相应波导层的中间部分耦合对准的情况下,从带状光纤阵列中输入光纤纤芯传输的激光,可以全部传输至相应的波导层中,使得输出激光功率最大。Under the condition that the core of the input fiber in the ribbon fiber array is coupled and aligned with the middle part of the corresponding waveguide layer of the optical waveguide, the laser light transmitted from the input fiber core in the ribbon fiber array can be all transmitted to the corresponding waveguide layer , to maximize the output laser power.

或,子步骤S32,将所述光纤阵列中至少一个纤芯与所述光波导的相应波导层的非中间部分耦合对准,使得所述输入光纤输出的单束激光至少保持在两个波导层内传输。Or, in sub-step S32, at least one fiber core in the optical fiber array is coupled and aligned with the non-intermediate portion of the corresponding waveguide layer of the optical waveguide, so that the single-beam laser output from the input fiber is kept in at least two waveguide layers internal transmission.

在带状光纤阵列中输入光纤纤芯与光波导的相应波导层的非中间部分耦合对准的情况下,从带状光纤阵列中输入光纤纤芯传输的激光,可以部分传输至相应的波导层中,通过调整偏心程度,可以调整输出激光的功率和光斑形状。In the case where the input fiber core in the ribbon fiber array is coupled and aligned with the non-intermediate portion of the corresponding waveguide layer of the optical waveguide, the laser light transmitted from the input fiber core in the ribbon fiber array can be partially transmitted to the corresponding waveguide layer , by adjusting the degree of eccentricity, the power and spot shape of the output laser can be adjusted.

步骤1104,将所述光纤阵列与所述光波导通过熔接、焊接或机械结构连接在一起。Step 1104, connecting the optical fiber array and the optical waveguide together by welding, welding or mechanical structure.

可以将带状光纤阵列与光波导直接熔接或焊接在一起,也可以通过机械机构将带状光纤阵列与光波导固定连接,例如通过耦合器将输入端与整形端连接。The ribbon fiber array and the optical waveguide can be directly fused or welded together, or the ribbon fiber array and the optical waveguide can be fixedly connected by a mechanical mechanism, for example, the input end and the shaping end can be connected through a coupler.

示例性地,可以采用带状光纤熔接机,将带状光纤阵列与述光波导熔接。也可以采用特殊的熔接设备比如火焰,激光或者标准熔接机配合定制化的熔接参数直接熔接。完全摈弃光纤熔融拉锥工艺,最大限度减少熔融拉锥工艺对光纤变形污染所照成的光斑质量变差,或者光纤漏光,光纤污染而发热的现象。Exemplarily, a ribbon fiber fusion splicer can be used to fuse the ribbon fiber array with the optical waveguide. Direct welding can also be performed using special welding equipment such as flame, laser or standard welding machines with customized welding parameters. Completely abandon the optical fiber fusion taper process, and minimize the deterioration of the light spot quality caused by the fusion taper process to the deformation and pollution of the optical fiber, or the optical fiber leaks light, and the optical fiber is polluted and heated.

在本实用新型实施例中,可以获取多根与多个激光光源分别连接的输入光纤,将输入光纤按照预设形状并行排列后固定形成光纤阵列;获取一具有多个波导层的光波导;将光纤阵列中多个输入光纤的纤芯与光波导的多个波导层分别对准耦合;将光纤阵列与光波导通过熔接、焊接或机械结构连接在一起。多个激光光源输出的激光,通过输入光纤传输至光波导,通过光波导对光束进行整形从而输出复合激光。输入端与整形端可以基于阵列光纤(ribbon fibers)直接连接,一方面可以避免空间光学复用系统的高成本以及长期可靠性风险。另一方面采用非光纤熔融拉锥技术制作输入端,可以摆脱光纤熔融拉锥技术的复杂工艺和为管理光斑亮度损失而导致对输入光源的特殊要求。并且若要使用光纤熔融拉锥技术进行连接,则需要使用直径较大的光纤进行拉锥,而使用大光纤则难以兼容激光器单模块技术。In the embodiment of the present invention, a plurality of input fibers connected to a plurality of laser light sources can be obtained, the input fibers are arranged in parallel according to a preset shape and then fixed to form an optical fiber array; an optical waveguide with a plurality of waveguide layers is obtained; The cores of multiple input optical fibers in the optical fiber array are respectively aligned and coupled with the multiple waveguide layers of the optical waveguide; the optical fiber array and the optical waveguide are connected together by welding, welding or mechanical structure. The laser light output by the multiple laser light sources is transmitted to the optical waveguide through the input fiber, and the beam is shaped by the optical waveguide to output the composite laser. The input end and the shaping end can be directly connected based on ribbon fibers. On the one hand, the high cost and long-term reliability risk of the spatial optical multiplexing system can be avoided. On the other hand, using the non-fiber fusion taper technology to make the input end can get rid of the complex process of the fiber fusion taper technology and the special requirements for the input light source to manage the brightness loss of the spot. And if you want to use the fiber fusion taper technology for connection, you need to use a larger diameter fiber for taper, and using a large fiber is difficult to be compatible with the laser single module technology.

参照图12所示为本实用新型实施例还公开了一种激光加工系统的结构框图,激光加工系统可以包括:多个激光模块120、激光光斑整形器件121和功率控制模块122;Referring to FIG. 12, an embodiment of the present invention also discloses a structural block diagram of a laser processing system. The laser processing system may include: a plurality of laser modules 120, a laser spot shaping device 121, and a power control module 122;

所述多个激光模块120输出的激光束在通过所述激光光斑整形器件121时实现光斑整形,并输出具有一个中心光斑和至少一个外围光斑的复合光斑;The laser beams output by the plurality of laser modules 120 realize spot shaping when passing through the laser spot shaping device 121, and output a composite spot having a central spot and at least one peripheral spot;

所述功率控制模块122与所述激光模块120连接,并被配置为控制所述多个激光模块120在预设范围内的功率可调,以使所述中心光斑和所述外围光斑形成不同能量比例轮廓的复合光斑输出。The power control module 122 is connected to the laser module 120 and is configured to control the power of the plurality of laser modules 120 to be adjustable within a preset range, so that the central spot and the peripheral spot form different energies Composite spot output for proportional profiles.

其中,激光光斑整形器件121可以参照前述实施例,本实施例对此不再赘述。For the laser spot shaping device 121, reference may be made to the foregoing embodiments, which will not be repeated in this embodiment.

参照图13所示为本实用新型实施例还公开了一种激光加工方法,包括:Referring to FIG. 13, the embodiment of the present invention also discloses a laser processing method, including:

步骤1301,输出按照预设形状排列的多个光束;Step 1301, outputting a plurality of light beams arranged according to a preset shape;

步骤1302,对所述多个光束进行压缩整形,并输出具有一中心光斑和至少一外围光斑的复合光斑;Step 1302, compressing and shaping the plurality of light beams, and outputting a composite light spot having a central light spot and at least one peripheral light spot;

步骤1303,控制所述多个光束的功率值在预设范围内可调,以使所述复合光斑的中心光斑和外围光斑形成不同能量比例的轮廓;Step 1303, controlling the power values of the plurality of light beams to be adjustable within a preset range, so that the center light spot and the peripheral light spot of the composite light spot form contours with different energy ratios;

其中,步骤1301中,参照前述实施例,所述多个光束可以为并行的带状输出,也可以是其它形状的光束组合输出。Wherein, in step 1301, referring to the foregoing embodiment, the plurality of beams may be output in parallel strips, or may be combined output of beams of other shapes.

步骤1302中,所述多个光束中的至少一束在进入光波导的整形部分时,光线在光波导中产生多次反射,最后实现所述复合光斑的压缩整形输出,其中,所述中心光斑位于所述外围光斑的中心,所述中心光斑呈高斯或平顶分布,所述外围光斑呈平顶分布。In step 1302, when at least one of the multiple light beams enters the shaping part of the optical waveguide, the light is reflected multiple times in the optical waveguide, and finally the compression and shaping output of the composite light spot is realized, wherein the central light spot is Located at the center of the peripheral light spot, the central light spot has a Gaussian or flat-top distribution, and the peripheral light spot has a flat-top distribution.

步骤1303中,配合独特的电控技术,中心和外围环形光斑功率在一定范围以内可调;In step 1303, with the unique electronic control technology, the power of the central and peripheral annular light spots can be adjusted within a certain range;

步骤1304,依据输入的待加工工件的材质、加工要求及加工环境参数,调整第一光束的功率值以调整第一光束照射到工件的光斑能量分布,和/或,调整第二光束的功率值以调整第二光束照射到工件的光斑能量分布,进行激光熔覆、切割或焊接。Step 1304, according to the input material of the workpiece to be processed, processing requirements and processing environment parameters, adjust the power value of the first beam to adjust the spot energy distribution of the first beam irradiating the workpiece, and/or adjust the power value of the second beam Laser cladding, cutting or welding is performed by adjusting the light spot energy distribution of the second beam irradiated to the workpiece.

本实用新型实施例的工艺,采用与多个激光光源分别连接的多根输入光纤,形成带状光纤阵列;采用多包层光纤作为光波导,并将光波导的端面加工为光楔端面;将带状光纤阵列与光波导的垂直面对准,使带状光纤阵列的各个输入光纤的纤芯,分别从垂直面耦合至所述光波导的波导层中;在耦合完成后,将带状光纤阵列与光波导熔接,以使多个激光光源通过输入光纤输出的激光经过光波导形成复合激光。利用本实用新型实施例的工艺,光波导的纤芯可以输出高斯光斑或平顶光斑,预设包层中输出环形的平顶光斑。In the process of the embodiment of the present invention, a plurality of input optical fibers respectively connected with a plurality of laser light sources are used to form a ribbon optical fiber array; a multi-clad optical fiber is used as an optical waveguide, and the end face of the optical waveguide is processed into an optical wedge end face; The ribbon fiber array is aligned with the vertical plane of the optical waveguide, so that the cores of each input fiber of the ribbon fiber array are respectively coupled into the waveguide layer of the optical waveguide from the vertical plane; after the coupling is completed, the ribbon fiber The array is welded with the optical waveguide, so that the laser light output by the multiple laser light sources through the input fiber passes through the optical waveguide to form a composite laser. Using the process of the embodiment of the present invention, the core of the optical waveguide can output a Gaussian light spot or a flat-top light spot, and a ring-shaped flat-top light spot is output in the preset cladding.

需要说明的是,对于方法实施例,为了简单描述,故将其都表述为一系列的动作组合,但是本领域技术人员应该知悉,本实用新型实施例并不受所描述的动作顺序的限制,因为依据本实用新型实施例,某些步骤可以采用其他顺序或者同时进行。其次,本领域技术人员也应该知悉,说明书中所描述的实施例均属于优选实施例,所涉及的动作并不一定是本实用新型实施例所必须的。It should be noted that, for the sake of simple description, the method embodiments are described as a series of action combinations, but those skilled in the art should know that the embodiments of the present invention are not limited by the described action sequence, Because according to embodiments of the present invention, certain steps may be performed in other sequences or simultaneously. Secondly, those skilled in the art should also know that the embodiments described in the specification are all preferred embodiments, and the actions involved are not necessarily required by the embodiments of the present invention.

本说明书中的各个实施例均采用递进的方式描述,每个实施例重点说明的都是与其他实施例的不同之处,各个实施例之间相同相似的部分互相参见即可。The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments, and the same and similar parts between the various embodiments may be referred to each other.

本领域内的技术人员应明白,本实用新型实施例的实施例可提供为方法、装置、或计算机程序产品。因此,本实用新型实施例可采用完全硬件实施例、完全软件实施例、或结合软件和硬件方面的实施例的形式。而且,本实用新型实施例可采用在一个或多个其中包含有计算机可用程序代码的计算机可用存储介质(包括但不限于磁盘存储器、CD-ROM、光学存储器等)上实施的计算机程序产品的形式。It should be appreciated by those skilled in the art that the embodiments of the present invention may be provided as a method, an apparatus, or a computer program product. Accordingly, embodiments of the present invention may take the form of an entirely hardware embodiment, an entirely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, embodiments of the present invention may take the form of a computer program product implemented on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, etc.) having computer-usable program code embodied therein .

本实用新型实施例是参照根据本实用新型实施例的方法、终端设备(系统)、和计算机程序产品的流程图和/或方框图来描述的。应理解可由计算机程序指令实现流程图和/或方框图中的每一流程和/或方框、以及流程图和/或方框图中的流程和/或方框的结合。可提供这些计算机程序指令到通用计算机、专用计算机、嵌入式处理机或其他可编程数据处理终端设备的处理器以产生一个机器,使得通过计算机或其他可编程数据处理终端设备的处理器执行的指令产生用于实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能的装置。Embodiments of the present invention are described with reference to flowcharts and/or block diagrams of methods, terminal devices (systems), and computer program products according to embodiments of the present invention. It will be understood that each flow and/or block in the flowchart illustrations and/or block diagrams, and combinations of flows and/or blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to the processor of a general purpose computer, special purpose computer, embedded processor or other programmable data processing terminal equipment to produce a machine that causes the instructions to be executed by the processor of the computer or other programmable data processing terminal equipment Means are created for implementing the functions specified in the flow or flows of the flowcharts and/or the blocks or blocks of the block diagrams.

这些计算机程序指令也可存储在能引导计算机或其他可编程数据处理终端设备以特定方式工作的计算机可读存储器中,使得存储在该计算机可读存储器中的指令产生包括指令装置的制造品,该指令装置实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能。These computer program instructions may also be stored in a computer readable memory capable of directing a computer or other programmable data processing terminal equipment to operate in a particular manner, such that the instructions stored in the computer readable memory result in an article of manufacture comprising instruction means, the The instruction means implement the functions specified in the flow or flow of the flowcharts and/or the block or blocks of the block diagrams.

这些计算机程序指令也可装载到计算机或其他可编程数据处理终端设备上,使得在计算机或其他可编程终端设备上执行一系列操作步骤以产生计算机实现的处理,从而在计算机或其他可编程终端设备上执行的指令提供用于实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能的步骤。These computer program instructions can also be loaded on a computer or other programmable data processing terminal equipment, so that a series of operational steps are performed on the computer or other programmable terminal equipment to produce a computer-implemented process, thereby executing on the computer or other programmable terminal equipment The instructions executed on the above provide steps for implementing the functions specified in the flowchart or blocks and/or the block or blocks of the block diagrams.

尽管已描述了本实用新型实施例的优选实施例,但本领域内的技术人员一旦得知了基本创造性概念,则可对这些实施例做出另外的变更和修改。所以,所附权利要求意欲解释为包括优选实施例以及落入本实用新型实施例范围的所有变更和修改。While the preferred embodiments of the present invention have been described, additional changes and modifications to these embodiments may occur to those skilled in the art once the basic inventive concepts are known. Therefore, the appended claims are intended to be construed to include the preferred embodiment and all changes and modifications that fall within the scope of the embodiments of the present invention.

最后,还需要说明的是,在本文中,诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来,而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且,术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含,从而使得包括一系列要素的过程、方法、物品或者终端设备不仅包括那些要素,而且还包括没有明确列出的其他要素,或者是还包括为这种过程、方法、物品或者终端设备所固有的要素。在没有更多限制的情况下,由语句“包括一个……”限定的要素,并不排除在包括所述要素的过程、方法、物品或者终端设备中还存在另外的相同要素。Finally, it should also be noted that in this document, relational terms such as first and second are used only to distinguish one entity or operation from another, and do not necessarily require or imply these entities or there is any such actual relationship or sequence between operations. Moreover, the terms "comprising", "comprising" or any other variation thereof are intended to encompass non-exclusive inclusion such that a process, method, article or terminal device that includes a list of elements includes not only those elements, but also a non-exclusive list of elements. other elements, or also include elements inherent to such a process, method, article or terminal equipment. Without further limitation, an element defined by the phrase "comprises a..." does not preclude the presence of additional identical elements in the process, method, article, or terminal device that includes the element.

本文中应用了具体个例对本实用新型的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本实用新型的方法及其核心思想;同时,对于本领域的一般技术人员,依据本实用新型的思想,在具体实施方式及应用范围上均会有改变之处,综上所述,本说明书内容不应理解为对本实用新型的限制。The principles and implementations of the present utility model are described herein using specific examples. The descriptions of the above embodiments are only used to help understand the method and the core idea of the present utility model; meanwhile, for those skilled in the art, according to The idea of the present invention will have changes in the specific implementation and application scope. To sum up, the content of this specification should not be construed as a limitation to the present invention.

Claims (10)

1.一种形成复合激光的激光加工系统,其特征在于,包括:1. A laser processing system for forming a composite laser is characterized in that, comprising: 至少两个激光模块、一光斑整形器件和一功率控制模块;at least two laser modules, a spot shaping device and a power control module; 所述至少两个激光模块通过多根输入光纤与所述光斑整形器件连接并输出一个具有中心光斑和至少一个外围光斑的复合光斑;The at least two laser modules are connected to the light spot shaping device through a plurality of input fibers and output a composite light spot with a central light spot and at least one peripheral light spot; 所述功率控制模块与所述至少两个激光模块电性连接,并被配置为控制所述至少两个激光模块在预设范围内的功率可调,以使所述中心光斑和所述外围光斑形成不同能量比例轮廓。The power control module is electrically connected to the at least two laser modules, and is configured to control the power of the at least two laser modules to be adjustable within a preset range, so that the central spot and the peripheral spot are Form different energy ratio profiles. 2.根据权利要求1所述的激光加工系统,其特征在于,所述光斑整形器件包括带状光纤阵列和光波导,所述带状光纤阵列与所述光波导直接熔接在一起,所述光纤阵列中的多个输入光纤纤芯与所述光波导的相应波导层对准耦合。2 . The laser processing system according to claim 1 , wherein the light spot shaping device comprises a ribbon fiber array and an optical waveguide, the ribbon fiber array and the optical waveguide are directly fused together, and the fiber array is fused together. 3 . A plurality of input fiber cores in the optical waveguide are aligned and coupled with respective waveguide layers of the optical waveguide. 3.根据权利要求2所述的激光加工系统,其特征在于,所述光波导各波导层的宽度大于所述输入光纤的纤芯直径,所述各波导层的数值孔径大于所述带状光纤的数值孔径。3 . The laser processing system according to claim 2 , wherein the width of each waveguide layer of the optical waveguide is larger than the core diameter of the input fiber, and the numerical aperture of each waveguide layer is larger than the ribbon fiber. 4 . numerical aperture. 4.根据权利要求2所述的激光加工系统,其特征在于,所述带状光纤阵列由所述多根输入光纤一端并行排列并固定形成,所述输入光纤在所述光纤阵列中的纤芯直径与所述输入光纤其它部分的纤芯直径保持相同,所述光波导由包括多个波导层的整形部和输出部组成,所述整形部为沿中心光轴对称的光楔,所述光楔的端面为近椭圆形或矩形。4 . The laser processing system according to claim 2 , wherein the ribbon fiber array is formed by arranging and fixing one end of the plurality of input fibers in parallel, and the core of the input fibers in the fiber array is 4 . The diameter is kept the same as the core diameter of other parts of the input optical fiber. The optical waveguide consists of a shaping part including a plurality of waveguide layers and an output part. The shaping part is an optical wedge symmetrical along the central optical axis. The end face of the wedge is nearly elliptical or rectangular. 5.根据权利要求4所述的激光加工系统,其特征在于,所述光波导的整形部为输出部延伸而出的部分加工而成,所述输出部为三包层单芯光纤、双包层传能光纤或多芯光纤中的任一一种。5 . The laser processing system according to claim 4 , wherein the shaping part of the optical waveguide is processed by the part extending from the output part, and the output part is a triple-clad single-core fiber, a double-clad fiber, and a double-clad fiber. 6 . Either layered energy transfer fiber or multi-core fiber. 6.根据权利要求5所述的激光加工系统,其特征在于,所述光波导的整形部和输出部为焊接、熔接、套接或机械固定中的任一一种。6 . The laser processing system according to claim 5 , wherein the shaping part and the output part of the optical waveguide are any one of welding, welding, socketing or mechanical fixing. 7 . 7.根据权利要求2所述的激光加工系统,其特征在于,所述光波导具有至少三层波导层,所述输出的复合光斑的中心为高斯光斑,外围为平顶光斑,所述复合光斑的数值孔径小于 0.22NA。7. The laser processing system according to claim 2, wherein the optical waveguide has at least three waveguide layers, the center of the output composite light spot is a Gaussian light spot, and the periphery is a flat-top light spot, and the composite light spot is The numerical aperture is less than 0.22NA. 8.根据权利要求2所述的激光加工系统,其特征在于,所述光波导具有至少四层波导层,所述输出的复合光斑的中心为高斯光斑或平顶光斑,外围为平顶光斑,所述复合光斑的数值孔径小于0.12NA。8 . The laser processing system according to claim 2 , wherein the optical waveguide has at least four waveguide layers, the center of the output composite light spot is a Gaussian spot or a flat-top spot, and the periphery is a flat-top spot, 9 . The numerical aperture of the composite light spot is less than 0.12NA. 9.根据权利要求1所述的激光加工系统,其特征在于,所述激光模块为小芯径单纤输出全光纤激光模块,所述激光模块的最小输出功率大于2000W,所述芯径范围为14um ~100um。9 . The laser processing system according to claim 1 , wherein the laser module is a single-fiber output all-fiber laser module with small core diameter, the minimum output power of the laser module is greater than 2000W, and the core diameter range is 1000W. 10 . 14um ~100um. 10.根据权利要求1所述的激光加工系统,其特征在于,所述至少两个激光模块输出具有不同波长的至少第一光束和第二光束。10. The laser processing system of claim 1, wherein the at least two laser modules output at least a first beam and a second beam having different wavelengths.
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