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CN216954935U - Variable amplification factor optical lever photoelectric measurer - Google Patents

Variable amplification factor optical lever photoelectric measurer Download PDF

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CN216954935U
CN216954935U CN202220732974.9U CN202220732974U CN216954935U CN 216954935 U CN216954935 U CN 216954935U CN 202220732974 U CN202220732974 U CN 202220732974U CN 216954935 U CN216954935 U CN 216954935U
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plane
moving mechanism
axis moving
optical
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张锐
贺东京
黄宇生
周毅
刘文娟
陈磊
徐慧
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Guoke Hansheng Intelligent Technology Shenzhen Co ltd
Changsha Aeronautical Vocational and Technical College
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Changsha Aeronautical Vocational and Technical College
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Abstract

本实用新型提供一种可变放大系数光杠杆光电测量器,用于测量推力器工作时产生冲量,包括光学平台、激光器、安装支架、用于检测微型动力装置冲量的冲量测量装置、第一平面反射镜、转动支架、平面反射镜组和光电位置传感器;平面反射镜组包括用于调整光程大小的位移机构和两个以上相对设置的第二平面反射镜,第二平面镜相对设置在位移机构上,位移机构用于调整第二平面镜之间在X轴方向的距离和Y轴方向上的距离;第一光电位置传感器和第二光电位置传感器用于接收平面反射镜组反射出的光信号;本实用新型能够使得冲量测量装置能够实现跨越多个数量级的大范围微冲量的测量,并且能够通过自动调节光路来调节冲量测量装置的量程。

Figure 202220732974

The utility model provides a variable amplification factor optical lever photoelectric measuring device, which is used for measuring the impulse generated by the thruster during operation, and comprises an optical platform, a laser, a mounting bracket, an impulse measuring device for detecting the impulse of a miniature power device, a first plane Reflector, rotating bracket, plane reflector group and photoelectric position sensor; the plane reflector group includes a displacement mechanism for adjusting the size of the optical path and two or more second plane reflectors arranged oppositely, and the second plane mirrors are relatively arranged on the displacement mechanism On the upper side, the displacement mechanism is used to adjust the distance between the second plane mirrors in the X-axis direction and the distance in the Y-axis direction; the first photoelectric position sensor and the second photoelectric position sensor are used for receiving the light signal reflected by the plane mirror group; The utility model can enable the impulse measuring device to realize the measurement of micro-impulse in a large range spanning multiple orders of magnitude, and can adjust the range of the impulse measuring device by automatically adjusting the optical path.

Figure 202220732974

Description

一种可变放大系数光杠杆光电测量器A variable amplification factor optical lever photoelectric measuring instrument

技术领域technical field

本实用新型涉及光电测量器件技术领域,具体涉及一种可变放大系数光杠杆光电测量器。The utility model relates to the technical field of photoelectric measuring devices, in particular to a variable amplification factor optical lever photoelectric measuring device.

背景技术Background technique

目前,微型冷气推进系统、微型化学推进系统和微型电推进系统因具有突出的特点、优异的性能,而成为能源系统以及推进动力研究的新兴技术领域。At present, micro air-conditioning propulsion system, micro chemical propulsion system and micro electric propulsion system have become the emerging technology fields of energy system and propulsion power research due to their outstanding characteristics and excellent performance.

在进行地面实验过程中,需要利用真空舱为推进系统提供模拟太空工作环境,并将推进系统安装在扭摆式、倒摆式等类型微推力微冲量测量设备上对其输出推力或冲量进行测量。在使用过程中,将测量设备配平、调校好后需要关闭真空舱、抽空;,抽出空气时气流会对测量设备的零部件产生一定的扰动,且由于空气浮力的消失,使得测量设备结构部件发生动作,从而造成测量设备配平失去平衡,测量光路出现一定偏移;如果完成抽真空后发现光路偏移较大需要重新调校光路,则需要反复开舱,调校、抽空过程,由于现有微冲量测量系统光路设计固定,且不具备光路自动调整的能力,极大增加了研究者使用的麻烦。In the process of ground experiments, it is necessary to use a vacuum chamber to provide a simulated space working environment for the propulsion system, and install the propulsion system on torsion pendulum, inverted pendulum and other types of micro-thrust and micro-impulse measurement equipment to measure its output thrust or impulse. In the process of use, the vacuum chamber needs to be closed and evacuated after the measurement equipment is balanced and adjusted; when the air is drawn out, the airflow will cause a certain disturbance to the components of the measurement equipment, and due to the disappearance of air buoyancy, the structural components of the measurement equipment are If an action occurs, the balance of the measurement equipment is unbalanced, and the measurement optical path has a certain deviation; The optical path design of the micro-impulse measurement system is fixed, and it does not have the ability to automatically adjust the optical path, which greatly increases the trouble for researchers to use.

为解决上述技术问题,在中国专利号为202122244859.5,公告日为2022.02.18,该专利文献公开了一种微推力测量装置的激光光路调节装置,该技术方案提供的微推力测量装置的激光光路调节装置,通过所述激光器微调台和所述位置传感器微调台,可以对激光光斑和光电位置传感器PSD进行微米级校准,并且二者均通过电机驱动实现调节,因此可在真空舱外远程遥控操作。In order to solve the above technical problems, the patent number in China is 202122244859.5, and the announcement date is 2022.02.18. This patent document discloses a laser light path adjustment device for a micro thrust measurement device. The technical solution provides a laser optical path adjustment device for the micro thrust measurement device. The device, through the laser fine-tuning stage and the position sensor fine-tuning stage, can perform micron-level calibration on the laser spot and the photoelectric position sensor PSD, and both are adjusted by motor drive, so they can be remotely operated outside the vacuum chamber.

根据该专利文献公开的技术方案,虽然能够解决反复打开真空舱来校准管路的问题,但是量程不可变。而且,该技术方案中的激光光程固定不变,不可调节,因而只能满足一定量级范围微冲量的测量,而现有扭摆的测量量程一般能满足跨2个数量级冲量的测量,而对于最小纳微牛秒量级,最大毫牛秒量级的航天微推力器冲量测量而言,量程不够,并且最小分辨能力不高,测量精度偏低,对于微牛秒及以下量级微小冲量,在该量级冲量作用下测量台架机械响应输出极为微小(扭转角度极小),而在大数量级冲量(如毫牛秒量级冲量)作用下,测量平台力学响应输出大(此时扭转角度相对较大),受所使用传感器测量范围的限制,很难满足不同数量级冲量作用下测量平台力学跨大范围的力学响应输出能测、测的准的测量要求,现有技术需要针对不同数量级冲量的测量对所采用的测量光学器件或者设备结构进行调整或更换,从而成本较高且使用复杂。According to the technical solution disclosed in this patent document, although the problem of repeatedly opening the vacuum chamber to calibrate the pipeline can be solved, the range cannot be changed. Moreover, the laser optical path in this technical solution is fixed and cannot be adjusted, so it can only meet the measurement of micro-impulse in a certain order of magnitude, while the measurement range of the existing torsion pendulum can generally meet the measurement of impulse across two orders of magnitude. For the impulse measurement of aerospace micro-thrusters with the smallest nano-micron-second level and the largest milli-Nu-second level, the range is not enough, the minimum resolution capability is not high, and the measurement accuracy is low. Under the action of this magnitude of impulse, the mechanical response output of the measuring platform is extremely small (the torsion angle is extremely small), while under the action of a large order of magnitude impulse (such as the millisecond-order impulse), the mechanical response output of the measuring platform is large (the torsion angle is at this time). It is relatively large), limited by the measurement range of the sensor used, it is difficult to meet the measurement requirements of the measurement platform mechanics across a large range of mechanical response output under the action of different orders of magnitude impulse. The measurement requires adjustment or replacement of the measurement optics or the device structure, which is costly and complicated to use.

发明内容SUMMARY OF THE INVENTION

本实用新型提供一种可变放大系数光杠杆光电测量器,利用本实用新型的结构,冲量测量装置能够实现跨越多个数量级的大范围微冲量的测量,并且能够通过调节光路来调节冲量测量装置的量程,结构简单。The utility model provides a variable amplification factor optical lever photoelectric measuring device. Using the structure of the utility model, the impulse measuring device can realize the measurement of a large range of micro impulses spanning multiple orders of magnitude, and the impulse measuring device can be adjusted by adjusting the optical path. range, the structure is simple.

为达到上述目的,本实用新型的技术方案是:一种可变放大系数光杠杆光电测量器,用于测量推力器工作时产生的冲量,包括光学平台;光学平台上设有激光器、安装支架、用于检测微型动力装置冲量的冲量测量装置、第一平面反射镜、转动支架、平面反射镜组、第一光电位置传感器、第二光电位置传感器、信号处理电路和控制器。In order to achieve the above-mentioned purpose, the technical scheme of the present utility model is: a variable amplification factor optical lever photoelectric measuring device for measuring the impulse generated when the thruster works, including an optical platform; the optical platform is provided with a laser, a mounting bracket, An impulse measuring device, a first plane mirror, a rotating bracket, a plane mirror group, a first photoelectric position sensor, a second photoelectric position sensor, a signal processing circuit and a controller for detecting the impulse of a micro power device.

激光器用于发出光信号,激光器通过安装支架设置在光学平台上。The laser is used to emit light signals, and the laser is set on the optical table through the mounting bracket.

第一平面反射镜用于反射并调整激光器发出的光信号的反射角度,将激光器射出的光信号反射进入平面反射镜组,第一平面反射镜转动耦合在冲量测量装置上,且第一平面反射镜和冲量测量装置通过转动支架转动设置在光学平台上,第一平面反射镜的转动轴线与第一平面反射镜的反射面平行,且第一平面反射镜位于激光器的照射范围内;推力器耦合在冲量测量装置的摆臂上,在推力器作用下摆臂绕摆臂的转动轴线转动,同时带动第一平面反射镜绕第一平面反射镜的转动轴线进行转动,摆臂转动角度与第一平面反射镜转动角度相同。The first plane mirror is used to reflect and adjust the reflection angle of the optical signal emitted by the laser, and reflect the optical signal emitted by the laser into the plane mirror group. The first plane mirror is rotated and coupled to the impulse measuring device, and the first plane reflects The mirror and the impulse measuring device are rotated and arranged on the optical platform through the rotating bracket, the rotation axis of the first plane mirror is parallel to the reflection surface of the first plane mirror, and the first plane mirror is located in the irradiation range of the laser; the thruster is coupled On the swing arm of the impulse measuring device, under the action of the thruster, the swing arm rotates around the rotation axis of the swing arm, and at the same time drives the first plane mirror to rotate around the rotation axis of the first plane mirror, and the rotation angle of the swing arm is the same as that of the first plane The mirror rotation angle is the same.

平面反射镜组用于接收并放大第一平面反射镜反射出的光信号的光程,平面反射镜组设置在光学平台上,且平面反射镜组的入光端位于第一平面反射镜相对于激光器的另一侧。The plane reflection mirror group is used to receive and amplify the optical path of the light signal reflected by the first plane reflection mirror, the plane reflection mirror group is arranged on the optical platform, and the light incident end of the plane reflection mirror group is located relative to the first plane reflection mirror. the other side of the laser.

第一光电位置传感器和第二光电位置传感器用于接收平面反射镜组反射出的光信号,第一光电位置传感器和第二光电位置传感器分别设置在光学平台位于平面反射镜组出光端的一侧,且第二光电位置传感器位于在第一光电位置传感器远离平面反射镜组的一侧。The first photoelectric position sensor and the second photoelectric position sensor are used to receive the light signal reflected by the plane mirror group, and the first photoelectric position sensor and the second photoelectric position sensor are respectively arranged on the side of the optical platform at the light-emitting end of the plane mirror group, And the second photoelectric position sensor is located on the side of the first photoelectric position sensor away from the plane mirror group.

平面反射镜组,包括用于调整光程大小的位移机构和两组相对设置的第二平面反射镜,两组第二平面反射镜相对设置在位移机构上,位移机构用于调整第二平面反射镜之间在X轴方向的距离和Y轴方向上的距离。The plane mirror group includes a displacement mechanism for adjusting the size of the optical path and two sets of second plane mirrors arranged oppositely. The two groups of second plane mirrors are relatively arranged on the displacement mechanism, and the displacement mechanism is used to adjust the reflection of the second plane The distance between the mirrors in the X-axis direction and the distance in the Y-axis direction.

信号处理电路一端分别与第一光电位置传感器和第二光电位置传感器电性连接,信号处理电路的另一端和控制器电性连接;控制器与位移机构电性连接。One end of the signal processing circuit is electrically connected to the first photoelectric position sensor and the second photoelectric position sensor respectively, and the other end of the signal processing circuit is electrically connected to the controller; the controller is electrically connected to the displacement mechanism.

以上设置,通过激光器发出光信号,光信号依次经过第一平面反射镜、两个以上的第二平面反射镜反射后照射到第一光电位置传感器或第二光电位置传感器上;当进行冲量测量时,冲量测量装置在微型动力装置的作用下发生转动,由于冲量测量装置与第一平面反射镜固定连接且同一转动轴线转动设置,第一平面反射镜随冲量测量装置转动而转动,第一平面反射镜与冲量测量装置转动的角度相同,第一平面反射镜转动后,改变了反射的角度,光信号通过改变角度后的第一平面反射镜反射进入平面反射镜组,随后光信号依次经过第一平面反射镜、两个以上的第二平面反射镜反射后照射到第一光电位置传感器或第二光电位置传感器的检测范围内;信号处理电路将前后两次照射在第一光电位置传感器或第二光电位置传感器的感应到的光信号经过处理后输送到控制器,根据控制器反馈的信息,使用者可以利用控制器控制位移机构控制位移机构调整第二平面反射镜之间的位置关系,改变多个第二平面反射镜之间反射形成的光路,进而放大或缩小光信号的光程大小,从而实现通过调整光路来调节光程。由于微型动力装置由于类型及初始能量级别不同,当其输出冲量处于100nN•s~1N•s跨多数量级范围,当微型动力装置输出冲量很小,此时微冲量测量台架力学相应输出极为微弱,转动角度极为微小,对如此小量级的微小冲量极难实现高精度的精准测量,而通过位移机构增大光路从而放大光程,实现在冲量很小时提高测量精度,直至使得光信号光斑在第一光电位置传感器位移最大,此时第一光电位置传感器输出最大电压信号,同时第二光电位置传感器未接受到光信号照射,也就是说没有信号输出,此时可以达到该量级冲量作用下,既能测,同时测量分辨率又最好。而当微型动力装置产生输出冲量较大,光信号位移过大,超出了第一光电位置传感器的检测范围,此时在第二光电位置传感器上会有信号输出,使用者可以利用控制器控制位移机构控制位移机构调整第二平面反射镜之间的位置关系,改变多个第二平面反射镜之间反射形成的光路,缩小光信号的光程大小,直至激光光斑在第一光电位置传感器位移最大,此时第一光电位置传感器输出最大电压信号,同时第二光电位置传感器未接受到光信号照射,此时可以达到该量级冲量作用下,既能测,同时测量分辨率又最好。通过上述方式,能够使得冲量测量装置能够实现跨越多个数量级的大范围微冲量的测量,且通过根据实际需要调整合适的量程,减小测量误差的影响,提高测量精度,进而提高分辨率;另一方面,平面反射镜组调节光路的结构组成简单,通过平面反射镜组调节光路的光程,克服了现有技术中测量设备光路设置复杂、系统造价成本高的问题。With the above settings, the laser emits an optical signal, and the optical signal is reflected by the first plane mirror and two or more second plane mirrors in turn and then irradiated onto the first photoelectric position sensor or the second photoelectric position sensor; when impulse measurement is performed , the impulse measuring device rotates under the action of the micro power device. Since the impulse measuring device is fixedly connected with the first plane mirror and is rotated on the same axis of rotation, the first plane mirror rotates with the rotation of the impulse measuring device, and the first plane reflects The mirror rotates at the same angle as the impulse measuring device. After the first plane mirror rotates, the angle of reflection changes. The optical signal is reflected into the plane mirror group by the first plane mirror after changing the angle, and then the optical signal passes through the first plane mirror in turn. The plane mirror and two or more second plane mirrors reflect and illuminate the detection range of the first photoelectric position sensor or the second photoelectric position sensor; the signal processing circuit illuminates the first photoelectric position sensor or the second photoelectric position sensor twice before and after. The light signal sensed by the photoelectric position sensor is processed and then sent to the controller. According to the information fed back by the controller, the user can use the controller to control the displacement mechanism to control the displacement mechanism to adjust the positional relationship between the second plane mirrors, changing more The optical path formed by the reflection between the two second plane mirrors further enlarges or reduces the optical path size of the optical signal, so as to realize the adjustment of the optical path by adjusting the optical path. Due to the different types and initial energy levels of the micro-power device, when the output impulse of the micro-power device is in the range of 100nN•s~1N•s spanning many orders of magnitude, when the output impulse of the micro-power device is very small, the corresponding mechanical output of the micro-impulse measuring bench is extremely weak. , the rotation angle is extremely small, and it is extremely difficult to achieve high-precision and accurate measurement of such a small impulse. However, the optical path is enlarged by the displacement mechanism, so as to improve the measurement accuracy when the impulse is small, until the optical signal spot is in the The displacement of the first photoelectric position sensor is the largest. At this time, the first photoelectric position sensor outputs the maximum voltage signal, and the second photoelectric position sensor does not receive the light signal irradiation, that is to say, there is no signal output. At this time, it can reach the impulse of this magnitude. , which can measure and measure the best resolution at the same time. When the output impulse generated by the micro power device is large, the displacement of the optical signal is too large, which exceeds the detection range of the first photoelectric position sensor. At this time, there will be a signal output on the second photoelectric position sensor, and the user can use the controller to control the displacement. Mechanism control The displacement mechanism adjusts the positional relationship between the second plane mirrors, changes the optical path formed by reflection between multiple second plane mirrors, and reduces the optical path size of the optical signal until the laser spot has the largest displacement in the first photoelectric position sensor , at this time, the first photoelectric position sensor outputs the maximum voltage signal, and the second photoelectric position sensor does not receive the light signal irradiation. At this time, it can reach the impulse of this magnitude, which can not only measure, but also has the best measurement resolution. Through the above method, the impulse measurement device can realize the measurement of micro-impulse in a large range spanning multiple orders of magnitude, and by adjusting the appropriate range according to actual needs, the influence of measurement error is reduced, the measurement accuracy is improved, and the resolution is further improved; On the one hand, the structure and composition of adjusting the optical path of the plane mirror group is simple, and the optical path of the optical path is adjusted by the plane reflector group, which overcomes the problems of complicated optical path setting and high system cost of the measuring equipment in the prior art.

进一步地,位移机构包括两个以上的X轴移动机构、两个以上的X轴驱动机构、两个Y轴移动机构和两个以上的Y轴驱动机构,控制器分别与X轴驱动机构和Y轴驱动机构电性连接;两个Y轴移动机构平行设置在光学平台上,每一Y轴移动机构上活动设有一个以上的X轴移动机构;每一X轴移动机构对应设有一个X轴驱动机构和Y轴驱动机构;Y轴驱动机构用于驱动X轴移动机构沿Y轴移动机构长度方向上移动;X轴驱动机构用于驱动第二平面反射镜在X轴方向上移动,从而调节第二平面反射镜之间在X轴方向上的距离;以上设置,当进行X轴方向上的调整时,可通过驱动X轴驱动机构带动X轴移动机构,从而X轴方向上调整第二平面反射镜之间的距离;当进行Y轴方向上的调整时,可通过驱动Y轴驱动机构带动Y轴移动机构,从而Y轴方向上调整第二平面反射镜之间的距离;这样,控制器可通过控制X轴驱动机构和Y轴驱动机构来调整第二平面反射镜之间的相对距离。Further, the displacement mechanism includes two or more X-axis moving mechanisms, two or more X-axis driving mechanisms, two Y-axis moving mechanisms and two or more Y-axis driving mechanisms, and the controller is respectively connected with the X-axis driving mechanism and the Y-axis driving mechanism. The shaft driving mechanism is electrically connected; two Y-axis moving mechanisms are arranged in parallel on the optical table, and each Y-axis moving mechanism is movably provided with more than one X-axis moving mechanism; each X-axis moving mechanism is correspondingly provided with an X-axis Drive mechanism and Y-axis drive mechanism; the Y-axis drive mechanism is used to drive the X-axis moving mechanism to move along the length direction of the Y-axis moving mechanism; the X-axis drive mechanism is used to drive the second plane mirror to move in the X-axis direction, thereby adjusting The distance between the second plane mirrors in the X-axis direction; the above settings, when adjusting in the X-axis direction, the X-axis moving mechanism can be driven by driving the X-axis drive mechanism, so as to adjust the second plane in the X-axis direction. The distance between the mirrors; when adjusting in the Y-axis direction, the Y-axis moving mechanism can be driven by driving the Y-axis drive mechanism to adjust the distance between the second plane mirrors in the Y-axis direction; in this way, the controller The relative distance between the second plane mirrors can be adjusted by controlling the X-axis driving mechanism and the Y-axis driving mechanism.

进一步地,每一Y轴移动机构上设有两个以上的X轴移动机构,每一X轴移动机构对应设有一个X轴驱动机构;每组第二平面反射镜包括两个以上第二平面反射镜,每个X轴移动机构上设有一个第二平面反射镜;Y轴移动机构在光学平台上沿Y轴方向设置,每一个Y轴移动机构上设有两个X轴移动机构,X轴移动机构沿光学平台的X轴方向设置;一Y轴移动机构上的X轴移动机构与另一Y轴移动机构上的X轴移动机构相对设置;通过调节第二平面反射镜之间的距离,使得光信号在每一第二平面反射镜上反射一次;以上设置,由于光信号再同一第二平面反射镜上只反射一次,可通过控制单独控制每一个第二平面反射镜的位置,从而控制光信号每一次反射的位置,这样,可根据实际需要控制并调整光路,使得光路的设计更加灵活可控,可使得光路的设计更加精细。Further, each Y-axis moving mechanism is provided with more than two X-axis moving mechanisms, and each X-axis moving mechanism is correspondingly provided with an X-axis driving mechanism; each group of second plane mirrors includes more than two second planes Reflector, each X-axis moving mechanism is provided with a second plane mirror; Y-axis moving mechanism is arranged along the Y-axis direction on the optical platform, and each Y-axis moving mechanism is provided with two X-axis moving mechanisms The axis moving mechanism is arranged along the X-axis direction of the optical table; the X-axis moving mechanism on one Y-axis moving mechanism and the X-axis moving mechanism on the other Y-axis moving mechanism are arranged oppositely; by adjusting the distance between the second plane mirrors , so that the optical signal is reflected once on each second plane mirror; in the above setting, since the optical signal is only reflected once on the same second plane mirror, the position of each second plane mirror can be controlled independently by controlling, thereby The position of each reflection of the optical signal is controlled, so that the optical path can be controlled and adjusted according to actual needs, making the design of the optical path more flexible and controllable, and making the design of the optical path more refined.

进一步的,每一Y轴移动机构上设有一个的X轴移动机构,每一X轴移动机构对应设有一个X轴驱动机构;每组第二平面反射镜包括一个第二平面反射镜,每个X轴移动机构上设有一个第二平面反射镜;Y轴移动机构在光学平台上沿Y轴方向设置,每一个Y轴移动机构上设有一个X轴移动机构,X轴移动机构沿光学平台的X轴方向设置;一Y轴移动机构上的X轴移动机构与另一Y轴移动机构上的X轴移动机构相对设置;通过调节第二平面反射镜之间的距离,使得光信号在每一第二平面反射镜上反射两次以上;以上设置,由于光信号再同一第二平面反射镜上反射两次以上,控制一侧的第二平面反射镜移动即可完成多个反射点的调整,能够快速调节光程,从而快速完成量程的调节,该设置,只需要使用两个第二平面反射镜即可实现多次反射,结构简单。Further, each Y-axis moving mechanism is provided with an X-axis moving mechanism, and each X-axis moving mechanism is correspondingly provided with an X-axis driving mechanism; each group of second plane mirrors includes a second plane mirror, each Each X-axis moving mechanism is provided with a second plane mirror; the Y-axis moving mechanism is arranged on the optical platform along the Y-axis direction, and each Y-axis moving mechanism is provided with an X-axis moving mechanism, and the X-axis moving mechanism is along the optical axis. The X-axis direction of the platform is set; the X-axis moving mechanism on one Y-axis moving mechanism is set relative to the X-axis moving mechanism on the other Y-axis moving mechanism; by adjusting the distance between the second plane mirrors, the optical signal is Each second plane mirror is reflected more than twice; with the above settings, since the optical signal is reflected on the same second plane mirror more than twice, the movement of the second plane mirror on one side can be controlled to complete the reflection of multiple reflection points. The adjustment can quickly adjust the optical path, so that the adjustment of the range can be quickly completed. In this setting, multiple reflections can be realized only by using two second plane mirrors, and the structure is simple.

进一步地,第二平面反射镜固定设置在X轴移动机构的一端上,X轴驱动机构驱动X轴移动机构在X轴方向上相对于Y移动机构上移动实现调节第二平面反射镜之间在X轴方向上的距离;以上设置,通过第二平面反射镜固定在X轴移动机构的一端上,然后X移动机构相对Y移动机构实现调整第二平面反射镜的移动,结构简单。Further, the second plane mirror is fixedly arranged on one end of the X-axis moving mechanism, and the X-axis driving mechanism drives the X-axis moving mechanism to move relative to the Y-moving mechanism in the X-axis direction to adjust the distance between the second plane mirrors. The distance in the X-axis direction; the above setting, the second plane mirror is fixed on one end of the X-axis moving mechanism, and then the X moving mechanism is relative to the Y moving mechanism to adjust the movement of the second plane mirror, and the structure is simple.

进一步的,所述X轴移动机构上设有镜片夹具,第二平面反射镜通过镜片夹具安装在X轴移动机构上,通过镜片夹具可调节第二平面反射镜与光学平台之间的距离,以上设置,通过镜片夹具调节第二平面反射镜在Z轴方向上的调整,进一步满足激光在第二平面反射镜之间的反射要求。Further, the X-axis moving mechanism is provided with a lens fixture, the second plane mirror is mounted on the X-axis moving mechanism through the lens fixture, and the distance between the second plane reflector and the optical platform can be adjusted through the lens fixture, and the above Setting, the adjustment of the second plane mirror in the Z-axis direction is adjusted by the lens fixture, so as to further meet the reflection requirements of the laser light between the second plane mirrors.

进一步地,所述第二平面反射镜之间相互平行设置,以上设置,使得第二平面反射镜能更好地接收到反射光线。Further, the second plane reflection mirrors are arranged in parallel with each other, and the above arrangement enables the second plane reflection mirror to better receive the reflected light.

附图说明Description of drawings

图1为本实用新型实施例1的原理框图。FIG. 1 is a principle block diagram of Embodiment 1 of the present invention.

图2为本实用新型实施例2的原理框图。FIG. 2 is a principle block diagram of Embodiment 2 of the present invention.

图3为本实用新型中光杠杆测量原理图。Fig. 3 is the measuring principle diagram of the light lever in the utility model.

图4为现有技术中光杠杆测量原理图。FIG. 4 is a schematic diagram of optical lever measurement in the prior art.

附图标记:1、光学平台;2、激光器;21、安装支架;3、冲量测量装置;31、第一平面反射镜;4、平面反射镜组;411、X轴移动机构;412、X轴驱动机构;421、Y轴移动机构;422、Y轴驱动机构;43、第二平面反射镜;51、第一光电位置传感器;52、第二光电位置传感器;61、信号处理电路;62、控制器;7、光路。Reference signs: 1. Optical table; 2. Laser; 21. Mounting bracket; 3. Impulse measuring device; 31. First plane mirror; 4. Plane mirror group; 411, X-axis moving mechanism; 412, X-axis Driving mechanism; 421, Y-axis moving mechanism; 422, Y-axis driving mechanism; 43, second plane mirror; 51, first photoelectric position sensor; 52, second photoelectric position sensor; 61, signal processing circuit; 62, control 7. Optical path.

具体实施方式Detailed ways

下面结合附图和具体实施方式对本实用新型做进一步详细说明。The present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

如图1-图3所示,一种可变放大系数光杠杆光电测量器,用于测量推力器工作时产生的冲量,包括光学平台1(参照图1-图2);光学平台1上设有激光器2、安装支架21、用于检测微型动力装置冲量的冲量测量装置3、第一平面反射镜31、转动支架(图中未示出)平面反射镜组4、第一光电位置传感器51、第二光电位置传感器52、信号处理电路61和控制器62。As shown in Figure 1-Figure 3, a variable amplification factor optical lever photoelectric measuring device is used to measure the impulse generated when the thruster works, including an optical platform 1 (refer to Figure 1-Figure 2); There are a laser 2, a mounting bracket 21, an impulse measuring device 3 for detecting the impulse of a micro power device, a first plane mirror 31, a rotating bracket (not shown in the figure) plane mirror group 4, a first photoelectric position sensor 51, The second photoelectric position sensor 52 , the signal processing circuit 61 and the controller 62 .

激光器2用于发出光信号,激光器2通过安装支架21设置在光学平台1上;冲量测量装置设置在光学平台上且位于激光器2的一侧。The laser 2 is used to emit light signals, and the laser 2 is arranged on the optical table 1 through the mounting bracket 21 ; the impulse measuring device is arranged on the optical table and is located on one side of the laser 2 .

第一平面反射镜31用于反射并调整激光器2发出的光信号的反射角度,将激光器2射出的光信号反射进入平面反射镜组4,第一平面反射镜31转动耦合在冲量测量装置上,第一平面反射镜31的转动轴线与第一平面反射镜31的反射面平行,且第一平面反射镜31位于激光器2的照射范围内;推力器耦合在冲量测量装置3的摆臂上,在推力器作用下摆臂绕摆臂的转动轴线转动,同时带动第一平面反射镜绕第一平面反射镜的转动轴线进行转动,摆臂转动角度与第一平面反射镜转动角度相同。The first plane reflection mirror 31 is used to reflect and adjust the reflection angle of the optical signal emitted by the laser 2, to reflect the optical signal emitted by the laser 2 into the plane reflection mirror group 4, and the first plane reflection mirror 31 is rotatably coupled to the impulse measuring device, The rotation axis of the first plane mirror 31 is parallel to the reflection surface of the first plane mirror 31, and the first plane mirror 31 is located within the irradiation range of the laser 2; the thruster is coupled to the swing arm of the impulse measuring device 3, and is The thruster acts to rotate the lower swing arm around the rotation axis of the swing arm, and drives the first plane mirror to rotate around the rotation axis of the first plane mirror at the same time.

所述冲量测量装置可以是现有技术中的倒摆式、扭摆式、扭丝结构、多摆等多种结构类型的冲量测量装置,本实用新型可将第一平面反射镜安装在现有技术中的各种冲量测量装置中,在推力器作用下摆臂绕摆臂的转动轴线转动,同时带动第一平面反射镜绕第一平面反射镜的转动轴线进行转动,使得第一平面反射镜能够获得与摆臂相同的转动角度,进而能够通过光斑位移差来计算推力。The impulse measuring device can be an impulse measuring device of various structure types such as inverted pendulum type, torsion pendulum type, twisted wire structure, multi-pendulum, etc. in the prior art. The utility model can install the first plane mirror in the prior art. In the various impulse measuring devices in , the swing arm rotates around the rotation axis of the swing arm under the action of the thruster, and at the same time drives the first plane mirror to rotate around the rotation axis of the first plane mirror, so that the first plane mirror can obtain With the same rotation angle as the swing arm, the thrust can be calculated from the difference in spot displacement.

平面反射镜组4用于接收第一平面反射镜31反射出的光信号,并对光信号的光程(即光在媒质传播经历的路程)进行调节,放大或缩小光信号的光程,平面反射镜组4设置在光学平台1上,且平面反射镜组4的入光端位于第一平面反射镜31相对于激光器2的另一侧。The plane reflection mirror group 4 is used to receive the optical signal reflected by the first plane reflection mirror 31, adjust the optical path of the optical signal (that is, the path that light travels through the medium), and amplify or reduce the optical path of the optical signal. The mirror group 4 is arranged on the optical table 1 , and the light incident end of the plane mirror group 4 is located on the other side of the first plane mirror 31 relative to the laser 2 .

第一光电位置传感器51和第二光电位置传感器52用于接收平面反射镜组4反射出的光信号,第一光电位置传感器51和第二光电位置传感器52分别设置在光学平台1位于平面反射镜组4出光端的一侧,且第二光电位置传感器52位于在第一光电位置传感器51远离平面反射镜组4的一侧。The first photoelectric position sensor 51 and the second photoelectric position sensor 52 are used to receive the light signal reflected by the plane mirror group 4. The first photoelectric position sensor 51 and the second photoelectric position sensor 52 are respectively arranged on the optical platform 1 and located at the plane mirror. The second photoelectric position sensor 52 is located on the side of the first photoelectric position sensor 51 away from the plane mirror group 4 .

平面反射镜组4,包括用于调整光程大小的位移机构和两组以上相对设置的第二平面反射镜43,第二平面反射镜相对设置在位移机构上,位移机构用于调整第二平面反射镜之间在X轴方向的距离和Y轴方向上的距离。The plane mirror group 4 includes a displacement mechanism for adjusting the size of the optical path and more than two groups of second plane mirrors 43 arranged oppositely. The second plane mirrors are relatively arranged on the displacement mechanism, and the displacement mechanism is used to adjust the second plane. The distance between the mirrors in the X-axis direction and the distance in the Y-axis direction.

信号处理电路61一端分别与第一光电位置传感器51和第二光电位置传感器52电性连接,信号处理电路61的另一端和控制器62电性连接,信号处理电路61用于将第一光电位置传感器51和第二光电位置传感器52接收的模拟信号转化为数字信号传递给控制器62,用于提供微冲量测量装置冲量与位移对应关系的基本数据;控制器62与位移机构电性连接,根据控制器62接收到信号处理电路61的数字信号利用控制器控制位移机构移动,从而调节第二平面反射镜之间在X轴方向的距离和Y轴方向上的距离。One end of the signal processing circuit 61 is electrically connected to the first photoelectric position sensor 51 and the second photoelectric position sensor 52, respectively, and the other end of the signal processing circuit 61 is electrically connected to the controller 62. The signal processing circuit 61 is used for converting the first photoelectric position The analog signal received by the sensor 51 and the second photoelectric position sensor 52 is converted into a digital signal and transmitted to the controller 62 for providing the basic data of the corresponding relationship between the impulse and the displacement of the micro-impulse measuring device; the controller 62 is electrically connected with the displacement mechanism, according to the The controller 62 receives the digital signal from the signal processing circuit 61 and uses the controller to control the movement of the displacement mechanism, thereby adjusting the distance between the second plane mirrors in the X-axis direction and the distance in the Y-axis direction.

在本实施例中,在使用前,由于第一平面反射镜31通过转动支架转动设置,第一平面反射镜31为平行四边形,需要预先调整在激光器2的出光角度,使得激光器2发出的光信号照射在第一平面反射镜31的中线上,该第一平面反射镜31的中线与转动支架转动中心轴线平行,同时,需要将第一光电位置传感器51和第二光电位置传感器52的感光面与激光器2平行设置,使得激光器2发出并经过平面反射镜组4反射的光信号垂直照射在第一光电位置传感器51或第二光电位置传感器52的感光面上。In this embodiment, before use, since the first plane reflection mirror 31 is rotated and set by the rotating bracket, the first plane reflection mirror 31 is a parallelogram, and the light exit angle of the laser 2 needs to be adjusted in advance, so that the optical signal emitted by the laser 2 It is irradiated on the center line of the first plane mirror 31, and the center line of the first plane mirror 31 is parallel to the rotation center axis of the rotating bracket. The lasers 2 are arranged in parallel, so that the optical signal emitted by the laser 2 and reflected by the plane mirror group 4 is vertically irradiated on the photosensitive surface of the first photoelectric position sensor 51 or the second photoelectric position sensor 52 .

以上设置,通过激光器2发出光信号,光信号依次经过第一平面反射镜31、两个以上的第二平面反射镜43反射后照射到第一光电位置传感器51或第二光电位置传感器52上,形成光路7;当进行冲量测量时,冲量测量装置在微型动力装置的作用下发生转动,由于冲量测量装置3与第一平面反射镜31固定连接且同一转动轴线转动设置,第一平面反射镜31随冲量测量装置3转动而转动,第一平面反射镜31与冲量测量装置3转动的角度相同,第一平面反射镜31转动后,改变了反射的角度,光信号通过改变角度后的第一平面反射镜31反射进入平面反射镜组4,随后光信号依次经过第一平面反射镜31、两个以上的第二平面反射镜43反射后照射到第一光电位置传感器51或第二光电位置传感器52的检测范围内;信号处理电路61将前后两次照射在第一光电位置传感器51或第二光电位置传感器52的感应到的光信号经过处理后输送到控制器62,根据控制器62反馈的信息,使用者利用控制器62控制位移机构调整第二平面反射镜43之间的位置关系,改变多个第二平面反射镜43之间反射形成的光路7,进而放大或缩小光信号的光程大小,从而实现通过调整光路7来调节光程。由于微型动力装置由于类型及初始能量级别不同,当其输出冲量处于100nN•s~1N•s跨多数量级范围,当微型动力装置3输出冲量很小时(如处于微牛秒量级),此时微冲量测量台架力学相应输出极为微弱,转动角度极为微小,对如此小量级的微小冲量极难实现高精度的精准测量,而通过位移机构增大光路从而放大光程,实现在冲量很小时提高测量精度,直至光信号光斑在第一光电位置传感器51位移最大,此时第一光电位置传感器51输出最大电压信号,同时第二光电位置传感器52未接受到光信号照射,也就是说没有信号输出,此时可以达到该量级冲量作用下,既能测,同时测量分辨率又最好。而当微型动力装置产生输出冲量较大(如处于毫牛秒量级),光信号位移过大,超出了第一光电位置传感器51的检测范围,此时在第二光电位置传感器52上会有信号输出,使用者可以利用控制器62控制位移机构控制位移机构调整第二平面反射镜43之间的位置关系,改变多个第二平面反射镜43之间反射形成的光路,缩小光信号的光程大小,直至激光光斑在第一光电位置传感器位移最大,此时第一光电位置传感器输出最大电压信号,同时第二光电位置传感器52未接受到光信号照射,此时可以达到该量级冲量作用下,既能测,同时测量分辨率又最好。通过上述方式,能够使得冲量测量装置3能够实现跨越多个数量级的大范围微冲量的测量,且通过根据实际需要调整合适的量程,减小测量误差的影响,提高测量精度,提高分辨率;另一方面,平面反射镜组调节光路的结构组成简单,通过平面反射镜组调节光路的光程,克服了现有技术中测量设备光路设置复杂、系统造价成本高的问题。With the above settings, the laser 2 emits an optical signal, and the optical signal is reflected by the first plane mirror 31 and two or more second plane mirrors 43 in turn and then irradiated on the first photoelectric position sensor 51 or the second photoelectric position sensor 52, The optical path 7 is formed; when the impulse measurement is performed, the impulse measuring device rotates under the action of the micro power device. Since the impulse measuring device 3 is fixedly connected with the first plane mirror 31 and is rotated on the same rotation axis, the first plane mirror 31 As the impulse measuring device 3 rotates and rotates, the first plane mirror 31 rotates at the same angle as the impulse measuring device 3. After the first plane mirror 31 rotates, the angle of reflection changes, and the optical signal passes through the first plane with the changed angle. The reflector 31 is reflected into the plane reflector group 4 , and then the optical signal is reflected by the first plane reflector 31 and two or more second plane reflectors 43 in turn and then irradiated to the first photoelectric position sensor 51 or the second photoelectric position sensor 52 The signal processing circuit 61 processes the sensed light signals irradiated on the first photoelectric position sensor 51 or the second photoelectric position sensor 52 twice before and after, and then transmits them to the controller 62, according to the information fed back by the controller 62. , the user uses the controller 62 to control the displacement mechanism to adjust the positional relationship between the second plane mirrors 43, change the optical path 7 formed by reflection between the plurality of second plane mirrors 43, and then enlarge or reduce the optical path size of the optical signal , so that the optical path can be adjusted by adjusting the optical path 7 . Due to the different types and initial energy levels of the micro power device, when the output impulse of the micro power device is in the range of 100nN·s~1N·s across many orders of magnitude, when the output impulse of the micro power device 3 is very small (for example, it is in the order of micron seconds), at this time The mechanical corresponding output of the micro-impulse measurement bench is extremely weak, and the rotation angle is extremely small. It is extremely difficult to achieve high-precision and accurate measurement of such a small impulse. However, the optical path is enlarged by the displacement mechanism. Improve the measurement accuracy until the optical signal spot has the largest displacement in the first photoelectric position sensor 51. At this time, the first photoelectric position sensor 51 outputs the maximum voltage signal, and the second photoelectric position sensor 52 does not receive the light signal irradiation, that is to say, there is no signal. At this time, the output can be reached under the action of impulse of this magnitude, which can not only be measured, but also has the best measurement resolution. However, when the output impulse generated by the micro-power device is relatively large (for example, in the order of milli-N seconds), the displacement of the optical signal is too large and exceeds the detection range of the first photoelectric position sensor 51 . Signal output, the user can use the controller 62 to control the displacement mechanism to control the displacement mechanism to adjust the positional relationship between the second plane mirrors 43, change the optical path formed by the reflections between the plurality of second plane mirrors 43, and reduce the light of the optical signal. until the laser spot has the largest displacement at the first photoelectric position sensor, at this time the first photoelectric position sensor outputs the maximum voltage signal, and the second photoelectric position sensor 52 does not receive the light signal irradiation, at this time, the impulse effect of this magnitude can be achieved. It can not only measure, but also has the best measurement resolution. Through the above method, the impulse measurement device 3 can realize the measurement of a large range of micro-impulse spanning multiple orders of magnitude, and by adjusting the appropriate range according to the actual needs, the influence of the measurement error is reduced, the measurement accuracy is improved, and the resolution is improved; On the one hand, the plane mirror group has a simple structure for adjusting the optical path, and the optical path of the optical path is adjusted by the plane mirror group, which overcomes the problems of complicated optical path settings and high system cost in the prior art.

在本实施例中,所述信号处理电路61为现有技术中的数模转换器,第一光电位置传感器51和第二光电位置传感器52为PSD(即激光光斑位移敏感器),通过数模转化器将PSD获取到的模拟信号转化为数字信号输送到控制器62,控制器62根据获取到的数字信号进行显示并在使用者的控制下驱动位移机构移动;控制器62为PLC或MCU。In this embodiment, the signal processing circuit 61 is a digital-to-analog converter in the prior art, and the first photoelectric position sensor 51 and the second photoelectric position sensor 52 are PSDs (ie, laser spot displacement sensors). The converter converts the analog signal obtained by the PSD into a digital signal and sends it to the controller 62. The controller 62 displays the obtained digital signal and drives the displacement mechanism to move under the control of the user; the controller 62 is a PLC or MCU.

经光学平面反射镜组4的反射光信号照射在第一光电位置传感器51或第二光电位置传感器52感光面上,且第一光电位置传感器51或第二光电位置传感器52感光面与入射光信号垂直;光电位置传感器是一种基于横向光电效应的光电位移传感器,感知光信号光斑位移并输出光电流信号,第一次光信号照射在光电位移传感器时产生的电流信号为I1,第一次光信号照射在光电位移传感器时产生的电流信号为I2,光信号在光电位移传感器的光敏面位移的长度为LA(图中未示出),取光电位置传感器感光面中心为原点,则光斑位置差与光电流关系为:XA=LA*(I2-I1)/(I2+I1);此为现有技术中PSD位移信号光电传感器的测量原理,由此关系式可得知,光信号位移量与所输出的电流信号成正比例关系,光斑偏离光电位置传感器的感光面中心越远,输出的电信号幅值越大。The reflected light signal from the optical plane mirror group 4 is irradiated on the photosensitive surface of the first photoelectric position sensor 51 or the second photoelectric position sensor 52, and the photosensitive surface of the first photoelectric position sensor 51 or the second photoelectric position sensor 52 is related to the incident light signal. Vertical; the photoelectric position sensor is a photoelectric displacement sensor based on the lateral photoelectric effect. It senses the light spot displacement of the optical signal and outputs a photocurrent signal. The current signal generated when the light signal is irradiated on the photoelectric displacement sensor for the first time is I1 . The current signal generated when the light signal is irradiated on the photoelectric displacement sensor is I 2 , and the displacement length of the light signal on the photosensitive surface of the photoelectric displacement sensor is LA (not shown in the figure). Taking the center of the photosensitive surface of the photoelectric position sensor as the origin, the light spot The relationship between the position difference and the photocurrent is: X A =LA*(I 2 -I 1 )/(I 2 +I 1 ); this is the measurement principle of the PSD displacement signal photoelectric sensor in the prior art, and this relationship can be obtained It is known that the displacement of the optical signal is proportional to the output current signal. The farther the light spot deviates from the center of the photosensitive surface of the photoelectric position sensor, the greater the output electrical signal amplitude.

现有技术中的光杠杆测量原理如图4所示,激光器产生的一束点激光,经由固定在转动支架上(图中未示出)的第一平面反射镜31反射,照射在光电位位置感器8上形成光斑B;当转动支架偏转角为θ后,转动前后对应法线角度相差θ,反射光线也发生了偏转,偏转前和偏转后两次反射的光信号的角度为2θ,且由原来照射在光电位置传感器8形成的光斑B发生了移动,在光电位置传感器8上形成的光斑C,且由于入射角度和反射角度相等,不难看出,θ与光斑移动距离BC存在以下关系:The optical lever measurement principle in the prior art is shown in Figure 4. A beam of spot laser generated by the laser is reflected by the first plane mirror 31 fixed on the rotating bracket (not shown in the figure), and is irradiated at the photoelectric potential position. The light spot B is formed on the sensor 8; when the deflection angle of the rotating bracket is θ, the corresponding normal angle before and after the rotation is different by θ, and the reflected light is also deflected. The angle of the two reflected light signals before and after the deflection is 2θ, and The light spot B formed by the original irradiation on the photoelectric position sensor 8 has moved, and the light spot C formed on the photoelectric position sensor 8, and since the incident angle and the reflection angle are equal, it is not difficult to see that θ has the following relationship with the light spot moving distance BC:

θ=1/2arctan(BC/AB)=1/2 arctan[(BC*cota)/AD];θ=1/2arctan(BC/AB)=1/2 arctan[(BC*cota)/AD];

其中,AD为第一平面反射镜31到光电位置传感器8的垂直距离,a为激光入射光线与法线的夹角;图4中虚线为转动支架偏转后第一平面反射镜31所处的位置,E为转动支架偏转后第一平面反射镜31的法线。Among them, AD is the vertical distance from the first plane mirror 31 to the photoelectric position sensor 8, a is the angle between the incident laser light and the normal line; the dotted line in FIG. 4 is the position of the first plane mirror 31 after the deflection of the rotating bracket , E is the normal line of the first plane mirror 31 after the rotating bracket is deflected.

由于光斑移动距离BC是可以直接测量的参数,且由光斑位置差与光电流关系可知,光斑移动距离BC越大,第一光电位置传感器所产生的光电流就越大。因此,当转动支架偏转角θ太小时,此时的光斑移动距离BC的值较小,受测量误差影响较大,可通过调节光路放大光程,将光斑移动距离BC放大,直至BC在第一光电位置传感器能够检测的范围内达到最大值,此时光斑移动距离BC所产生的电压信号最大,受测量误差的影响最小,提供微冲量测量装置冲量换算的基本数据,因此换算得出的冲量收测量误差的影响小,从而提高了测量分辨率。Since the spot moving distance BC is a parameter that can be directly measured, and from the relationship between the spot position difference and the photocurrent, the larger the spot moving distance BC, the greater the photocurrent generated by the first photoelectric position sensor. Therefore, when the deflection angle θ of the rotating bracket is too small, the value of the spot moving distance BC is small at this time, which is greatly affected by the measurement error. By adjusting the optical path to enlarge the optical path, the spot moving distance BC can be enlarged until BC is in the first The maximum value within the range that the photoelectric position sensor can detect. At this time, the voltage signal generated by the spot moving distance BC is the largest, and is least affected by the measurement error. It provides the basic data of the impulse conversion of the micro-impulse measuring device. The influence of measurement error is small, thus improving the measurement resolution.

如图3所示,图3为本实用新型应用了上述的光杠杆测量原理(参见图4)的测量系统,包括激光器2、第一平面反射镜31、两个平行相对设置的第二平面反射镜43和光电位置传感器8,假设初始静止时,从第一平面反射镜31到第一光电位置传感器51或第二光电位置传感器52的光路7总长为L0(图中未示出,即从入射点到光电位置传感器上接收点光线的总路程长),冲量测量装置3(参看图1)在微型动力装置(图3中未示出)输出冲量作用下扭转角度θ,图3中虚线为第一平面反射镜31在受到微型动力装置输出冲量作用转动后所处的位置,由于第一平面反射镜31随微型动力装置转动,则第一平面反射镜31转动的角度也为θ,在从静止到运动过程中光电位置传感器8上光信号光斑的位移量为s(相当于图4中的光斑移动距离BC),当第一光电位置传感器51上的光信号光斑的位移量s过小,或第二光电位置传感器52上输出了光电流信号,此时由控制器控制位移机构移动实现调节光程L0,在保证前后两次光信号光斑均落在第一光电位置传感器51上前提下,使得光程L0处于一个较大的值。As shown in FIG. 3, FIG. 3 is a measurement system of the present invention that applies the above-mentioned optical lever measurement principle (see FIG. 4), including a laser 2, a first plane mirror 31, and two parallel opposite plane reflections The mirror 43 and the photoelectric position sensor 8, assuming the initial static state, the total length of the optical path 7 from the first flat mirror 31 to the first photoelectric position sensor 51 or the second photoelectric position sensor 52 is L 0 (not shown in the figure, that is, from the The total path length from the incident point to the receiving point light on the photoelectric position sensor), the impulse measuring device 3 (refer to Fig. 1) is twisted by the angle θ under the action of the output impulse of the micro power device (not shown in Fig. 3), the dotted line in Fig. 3 is The position of the first plane mirror 31 after being rotated by the output impulse of the micro power device, since the first plane mirror 31 rotates with the micro power device, the rotation angle of the first plane mirror 31 is also θ. The displacement of the light signal spot on the photoelectric position sensor 8 is s (equivalent to the moving distance BC of the light spot in FIG. 4 ) during the process of being stationary to moving. When the displacement s of the light signal spot on the first photoelectric position sensor 51 is too small, Or the second photoelectric position sensor 52 outputs a photocurrent signal, at this time, the controller controls the displacement mechanism to move to realize the adjustment of the optical path L 0 , on the premise of ensuring that the two optical signal spots fall on the first photoelectric position sensor 51 , so that the optical path L 0 is at a larger value.

由图4和光杠杆测量原理可知,图3中的光程L0与光信号光斑位移量s有直接关系,光斑位移量在光电位置传感器的检测范围内的前提下,光斑位移量s越大,光电位置传感器所输出的电信号越大,测量误差产生的影响越小,因此光信号光斑位移量s则是直接影响测量系统分辨率,所以,通过本实用新型的平面反射镜组4,可根据实际需要对光程进行调整,能够调整出在光电位置传感器检测范围内,光斑位移量s较大的光程,此时光斑位移量s较大,测量误差产生的影响小,从而提高了测量系统的分辨率。It can be seen from Fig. 4 and the optical lever measurement principle that the optical path L 0 in Fig. 3 is directly related to the light spot displacement s of the optical signal. On the premise that the light spot displacement is within the detection range of the photoelectric position sensor, the larger the light spot displacement s, The larger the electrical signal output by the photoelectric position sensor, the smaller the influence of the measurement error. Therefore, the light spot displacement s of the optical signal directly affects the resolution of the measurement system. It is actually necessary to adjust the optical path, which can be adjusted to the optical path with a large spot displacement s within the detection range of the photoelectric position sensor. At this time, the spot displacement s is large, and the influence of the measurement error is small, thus improving the measurement system. resolution.

在本实施例中,光学平台1所在平面为X轴和Y轴所形成的平面,图1和图2中标示有X轴和Y轴所在的方向。In this embodiment, the plane where the optical table 1 is located is the plane formed by the X axis and the Y axis, and the directions of the X axis and the Y axis are marked in FIG. 1 and FIG. 2 .

位移机构包括两个以上的X轴移动机构411、两个以上的X轴驱动机构412、两个Y轴移动机构421和两个以上的Y轴驱动机构422,控制器62分别与X轴驱动机构412和Y轴驱动机构422电性连接;两个Y轴移动机构421平行且相对设置在光学平台1上,每一Y轴移动机构421上活动设有一个以上的X轴移动机构411;每一X轴移动机构411对应设有一个X轴驱动机构412和Y轴驱动机构422;Y轴驱动机构422用于驱动X轴移动机构411沿Y轴移动机构421长度方向上移动;X轴驱动机构412用于驱动第二平面反射镜43在X轴方向上移动,从而调节第二平面反射镜43之间在X轴方向上的距离;以上设置,当进行X轴方向上的调整时,可通过驱动X轴驱动机构412带动X轴移动机构411,从而X轴方向上调整第二平面反射镜43之间的距离;当进行Y轴方向上的调整时,可通过驱动Y轴驱动机构422带动Y轴移动机构421,从而Y轴方向上调整第二平面反射镜43之间的距离;这样,控制器62可通过控制X轴驱动机构412和Y轴驱动机构422来调整第二平面反射镜43之间的相对距离。The displacement mechanism includes two or more X-axis moving mechanisms 411, two or more X-axis driving mechanisms 412, two Y-axis moving mechanisms 421, and two or more Y-axis driving mechanisms 422. The controller 62 is connected to the X-axis driving mechanism respectively. 412 and the Y-axis driving mechanism 422 are electrically connected; the two Y-axis moving mechanisms 421 are parallel and oppositely arranged on the optical table 1, and each Y-axis moving mechanism 421 is movably provided with more than one X-axis moving mechanism 411; The X-axis moving mechanism 411 is correspondingly provided with an X-axis driving mechanism 412 and a Y-axis driving mechanism 422; the Y-axis driving mechanism 422 is used to drive the X-axis moving mechanism 411 to move along the length direction of the Y-axis moving mechanism 421; the X-axis driving mechanism 412 It is used to drive the second plane mirror 43 to move in the X-axis direction, so as to adjust the distance between the second plane mirrors 43 in the X-axis direction; the above settings, when adjusting in the X-axis direction, can be adjusted by driving The X-axis driving mechanism 412 drives the X-axis moving mechanism 411 to adjust the distance between the second plane mirrors 43 in the X-axis direction; when adjusting in the Y-axis direction, the Y-axis driving mechanism 422 can be driven to drive the Y-axis The moving mechanism 421 adjusts the distance between the second plane mirrors 43 in the Y-axis direction; in this way, the controller 62 can adjust the distance between the second plane mirrors 43 by controlling the X-axis driving mechanism 412 and the Y-axis driving mechanism 422 relative distance.

如图1所示,在实施例1中,每一Y轴移动机构421上设有两个以上的X轴移动机构411,每一X轴移动机构411对应设有一个X轴驱动机构412;每组第二平面反射镜43包括两个第二平面反射镜43,每个X轴移动机构411上设有一个第二平面反射镜43;Y轴移动机构421在光学平台1上沿Y轴方向设置,每一个Y轴移动机构421上设有两个X轴移动机构411,X轴移动机构411沿光学平台1的X轴方向设置;一Y轴移动机构421上的X轴移动机构411与另一Y轴移动机构421上的X轴移动机构411相对间隔设置;通过调节第二平面反射镜43之间的距离,使得光信号在每一第二平面反射镜43上反射一次;以上设置,由于光信号在同一第二平面反射镜43上只反射一次,可通过控制单独控制每一个第二平面反射镜43的位置,从而控制光信号每一次反射的位置,这样,可根据实际需要控制并调整光路7,使得光路7的设计更加灵活可控,可使得光路7的设计更加精细。As shown in FIG. 1, in Embodiment 1, each Y-axis moving mechanism 421 is provided with more than two X-axis moving mechanisms 411, and each X-axis moving mechanism 411 is correspondingly provided with an X-axis driving mechanism 412; The group of second plane mirrors 43 includes two second plane mirrors 43, and each X-axis moving mechanism 411 is provided with a second plane mirror 43; the Y-axis moving mechanism 421 is arranged on the optical table 1 along the Y-axis direction , each Y-axis moving mechanism 421 is provided with two X-axis moving mechanisms 411, and the X-axis moving mechanism 411 is arranged along the X-axis direction of the optical table 1; the X-axis moving mechanism 411 on one Y-axis moving mechanism 421 and the other The X-axis moving mechanisms 411 on the Y-axis moving mechanism 421 are arranged at relative intervals; by adjusting the distance between the second plane mirrors 43, the optical signal is reflected once on each second plane mirror 43; The signal is only reflected once on the same second plane mirror 43, and the position of each second plane mirror 43 can be individually controlled by control, thereby controlling the position of each reflection of the optical signal. In this way, the optical path can be controlled and adjusted according to actual needs. 7. The design of the optical path 7 is made more flexible and controllable, and the design of the optical path 7 can be made more refined.

在实施例1中,当前后两次的光信号没有同时落在第一光电位置传感器51或第二光电位置传感器52上输出了电信号,此时信号处理电路的数字信号无法正常显示,使用者看到此信息时确定需要缩短光程,通过控制器控制X轴驱动机构412和Y轴驱动机构422,调节两组第二平面反射镜43之间的相对位置,使得光信号仅落在每组第二平面反射镜43的一个第二平面反射镜43上,即光信号在每组第二平面反射镜43上仅形成一次反射,同时缩短两组第二平面反射镜43中形成反射的两个第二平面反射镜43在X轴的方向上的距离,这样就可以缩短光程;这样,通过改变了在两组第二平面反射镜43中的光路,缩短了光程,从而缩短了前后两次光信号的位移差,使得前后两次光信号均落在第一光电位置传感器51或第二光电位置传感器52上。In Embodiment 1, the current and last two optical signals do not fall on the first photoelectric position sensor 51 or the second photoelectric position sensor 52 at the same time and output an electrical signal. At this time, the digital signal of the signal processing circuit cannot be displayed normally, and the user When seeing this information, it is determined that the optical path needs to be shortened, and the X-axis driving mechanism 412 and the Y-axis driving mechanism 422 are controlled by the controller to adjust the relative positions between the two groups of second plane mirrors 43, so that the optical signal only falls in each group On one second plane mirror 43 of the second plane mirrors 43 , that is, the optical signal is only reflected once on each group of the second plane mirrors 43 , and at the same time, the two groups of second plane mirrors 43 that form the reflection are shortened. The distance between the second plane mirrors 43 in the direction of the X axis can shorten the optical path; in this way, by changing the optical paths in the two groups of second plane mirrors 43, the optical path is shortened, thereby shortening the front and rear two The displacement difference of the secondary optical signal makes the two optical signals before and after both fall on the first photoelectric position sensor 51 or the second photoelectric position sensor 52 .

若当前后两次的光信号同时落在第一光电位置传感器51,但是信号处理电路的数字信号非常小,使用者看到此信息时,判断光斑位移量在第一光电位置传感器51的检测范围内但光斑位移量过小,确定需要扩大光程,通过控制器控制X轴驱动机构412和Y轴驱动机构422,调节两组第二平面反射镜43之间的相对位置,使得光信号落在每组第二平面反射镜43的两个第二平面反射镜43上,即光信号在每组第二平面反射镜43上形成两次反射,同时扩大两组第二平面反射镜43中形成反射的相对的第二平面反射镜43在X轴的方向上的距离这样就可以扩大光程;这样,通过改变了在两组第二平面反射镜43中的光路,扩大了光程,从而扩大了前后两次光信号的位移差,使得前后两次光信号能放大地显示在第一光电位置传感器51或第二光电位置传感器52上,提高测量精度。If the first and last two optical signals fall on the first photoelectric position sensor 51 at the same time, but the digital signal of the signal processing circuit is very small, when the user sees this information, it is determined that the displacement of the light spot is within the detection range of the first photoelectric position sensor 51 However, the displacement of the light spot is too small, it is determined that the optical path needs to be expanded, and the X-axis driving mechanism 412 and the Y-axis driving mechanism 422 are controlled by the controller to adjust the relative position between the two groups of second plane mirrors 43, so that the optical signal falls within On the two second plane mirrors 43 of each group of second plane mirrors 43 , that is, the optical signal forms two reflections on each group of second plane mirrors 43 , and at the same time expands the two groups of second plane mirrors 43 to form reflections The distance of the opposite second plane mirrors 43 in the direction of the X axis can thus expand the optical path; in this way, by changing the optical paths in the two groups of second plane mirrors 43, the optical path is enlarged, thereby expanding the The difference in displacement between the two optical signals before and after enables the two optical signals before and after to be displayed on the first photoelectric position sensor 51 or the second photoelectric position sensor 52 in an enlarged manner, thereby improving the measurement accuracy.

如图2所示,在实施例2中,位移机构包括每一Y轴移动机构421上设有一个的X轴移动机构411,每一X轴移动机构411对应设有一个X轴驱动机构412;每组第二平面反射镜43包括一个第二平面反射镜43,每个X轴移动机构411上设有一个第二平面反射镜43;Y轴移动机构421在光学平台1上沿Y轴方向设置,每一个Y轴移动机构421上设有一个X轴移动机构411,X轴移动机构411沿光学平台1的X轴方向设置;一Y轴移动机构421上的X轴移动机构411与另一Y轴移动机构421上的X轴移动机构411相对设置;且一X轴移动机构411上的第二平面反射镜43与另一X轴移动机构411上的第二平面反射镜43具有相互重合的对立区域,通过调节第二平面反射镜43之间的距离,使得光信号在每一第二平面反射镜43上反射两次以上;以上设置,由于光信号再同一第二平面反射镜43上反射两次以上,控制一侧的第二平面反射镜43移动即可完成多个反射点的调整,能够快速调节光程,从而快速完成量程的调节。As shown in FIG. 2, in Embodiment 2, the displacement mechanism includes an X-axis moving mechanism 411 provided on each Y-axis moving mechanism 421, and each X-axis moving mechanism 411 is correspondingly provided with an X-axis driving mechanism 412; Each group of second plane mirrors 43 includes a second plane mirror 43, and each X-axis moving mechanism 411 is provided with a second plane mirror 43; the Y-axis moving mechanism 421 is arranged on the optical table 1 along the Y-axis direction , each Y-axis moving mechanism 421 is provided with an X-axis moving mechanism 411, and the X-axis moving mechanism 411 is arranged along the X-axis direction of the optical table 1; The X-axis moving mechanisms 411 on the axis moving mechanism 421 are arranged opposite to each other; and the second plane mirror 43 on one X-axis moving mechanism 411 and the second plane mirror 43 on the other X-axis moving mechanism 411 have overlapping opposites area, by adjusting the distance between the second plane mirrors 43, so that the optical signal is reflected on each second plane mirror 43 more than twice; The adjustment of multiple reflection points can be completed by controlling the movement of the second plane mirror 43 on one side, and the optical path can be adjusted quickly, so that the adjustment of the range can be completed quickly.

在实施例2中,当前后两次的光信号没有同时落在第一光电位置传感器51或第二光电位置传感器52上输出了电信号,此时信号处理电路的数字信号无法正常显示,使用者看到此信息时确定需要缩短光程,通过控制器控制X轴驱动机构412和Y轴驱动机构422,调节两组第二平面反射镜43之间的相对位置,即减少两组第二平面反射镜43之间重合位置大小,使得光信号在每组第二平面反射镜43上仅形成一次反射,同时缩短两组第二平面反射镜43中形成反射的两个第二平面反射镜43在X轴的方向上的距离这样就可以缩短光程;这样,通过改变了在两组第二平面反射镜43中的光路,缩短了光程,从而缩短了前后两次光信号的位移差,使得前后两次光信号均落在第一光电位置传感器51或第二光电位置传感器52上。In the second embodiment, the current and last two optical signals do not fall on the first photoelectric position sensor 51 or the second photoelectric position sensor 52 at the same time and output electrical signals. At this time, the digital signals of the signal processing circuit cannot be displayed normally, and the user When seeing this information, it is determined that the optical path needs to be shortened, and the X-axis drive mechanism 412 and the Y-axis drive mechanism 422 are controlled by the controller to adjust the relative positions between the two groups of second plane mirrors 43, that is, to reduce the two groups of second plane reflections The size of the overlapping position between the mirrors 43 is such that the optical signal is only reflected once on each group of the second plane mirrors 43, and at the same time, the two second plane mirrors 43 forming the reflection in the two groups of the second plane mirrors 43 are shortened at X The distance in the direction of the axis can thus shorten the optical path; in this way, by changing the optical path in the two sets of second plane mirrors 43, the optical path is shortened, thereby shortening the displacement difference of the two optical signals before and after, so that the front and rear Both optical signals fall on the first photoelectric position sensor 51 or the second photoelectric position sensor 52 .

若当前后两次的光信号有同时落在第一光电位置传感器51或第二光电位置传感器52上,但是信号处理电路的数字信号非常小,使用者看到此信息时确定需要扩大光程,通过控制器控制X轴驱动机构412和Y轴驱动机构422,调节两组第二平面反射镜43之间的相对位置,即增大两组第二平面镜43的重合区域,使得光信号在每组第二平面反射镜43上形成多次反射,同时扩大两组第二平面反射镜43在X轴的方向上的距离这样就可以扩大光程;这样,通过改变了在两组第二平面反射镜43中的光路,扩大了光程,从而扩大了前后两次光信号的位移差,使得前后两次光信号能放大地显示在第一光电位置传感器51或第二光电位置传感器52上,提高测量精度。所述X轴移动机构411和Y轴移动机构421可以为丝杆或滑轨滑槽结构。If the current and last two optical signals fall on the first photoelectric position sensor 51 or the second photoelectric position sensor 52 at the same time, but the digital signal of the signal processing circuit is very small, the user determines that the optical path needs to be expanded when he sees this information, The X-axis drive mechanism 412 and the Y-axis drive mechanism 422 are controlled by the controller to adjust the relative positions between the two groups of second plane mirrors 43 , that is, to increase the overlapping area of the two groups of second plane mirrors 43 , so that the optical signal in each group Multiple reflections are formed on the second plane reflection mirror 43, and the distance of the two groups of second plane reflection mirrors 43 in the direction of the X axis can be enlarged at the same time, so that the optical path can be enlarged; The optical path in 43 expands the optical path, thereby expanding the displacement difference between the two optical signals before and after, so that the two optical signals before and after can be amplified and displayed on the first photoelectric position sensor 51 or the second photoelectric position sensor 52, improving the measurement precision. The X-axis moving mechanism 411 and the Y-axis moving mechanism 421 may be screw or slide rail chute structures.

对于第二平面反射镜43与X轴移动机构411的连接关系,在本实施例中,X轴移动机构411和Y轴移动机构421均为滑轨滑槽结构(图中未示出),Y轴移动机构421的滑轨固定设置在光学平台1上,Y轴移动机构421的滑轨滑动设置在Y轴移动机构421的滑槽内,Y轴驱动机构422用于驱动Y轴移动机构421的滑轨在Y轴移动机构421的滑槽内滑动;X轴移动机构411的滑槽固定设置Y轴移动机构421的滑轨上,X轴移动机构411的滑轨滑动设置在X轴移动机构411的滑槽内,X轴移动机构411用于驱动X轴移动机构411的滑轨在X轴移动机构411的滑槽内滑动。在第二平面反射镜43设置在X轴移动机构411的滑轨上,通过X轴驱动机构412驱动X轴移动机构411的滑轨在X轴移动机构411的滑槽内滑动,从而在X轴方向上相对于Y移动机构上移动,从而实现调节第二平面反射镜43之间在X轴方向上的距离。Regarding the connection relationship between the second plane mirror 43 and the X-axis moving mechanism 411 , in this embodiment, the X-axis moving mechanism 411 and the Y-axis moving mechanism 421 are both slide rail chute structures (not shown in the figure), and Y The sliding rail of the axis moving mechanism 421 is fixedly arranged on the optical table 1, the sliding rail of the Y-axis moving mechanism 421 is slidably arranged in the sliding groove of the Y-axis moving mechanism 421, and the Y-axis driving mechanism 422 is used to drive the Y-axis moving mechanism 421. The sliding rail slides in the chute of the Y-axis moving mechanism 421 ; the sliding groove of the X-axis moving mechanism 411 is fixedly arranged on the sliding rail of the Y-axis moving mechanism 421 , and the sliding rail of the X-axis moving mechanism 411 is slidably arranged on the X-axis moving mechanism 411 In the chute, the X-axis moving mechanism 411 is used to drive the slide rail of the X-axis moving mechanism 411 to slide in the chute of the X-axis moving mechanism 411 . The second plane mirror 43 is arranged on the slide rail of the X-axis moving mechanism 411, and the X-axis driving mechanism 412 drives the slide rail of the X-axis moving mechanism 411 to slide in the slide groove of the X-axis moving mechanism 411, so that the X-axis moving mechanism 411 slides on the slide rail. The direction moves relative to the Y moving mechanism, so as to adjust the distance between the second plane mirrors 43 in the X-axis direction.

所述X轴移动机构411上设有镜片夹具,镜片夹具采用现有技术中的夹具即可实现,第二平面反射镜43通过镜片夹具安装在X轴移动机构411上,通过镜片夹具可调节第二平面反射镜43与光学平台1之间的距离,即可以在Z轴上调节第二平面反射镜43;以上设置,一方面可通过位移机构对第二平面反射镜43进行X轴和Y轴方向上的调整;另一方面可通过镜片夹具调节第二平面反射镜43在Z轴方向上的调整,进一步满足激光在第二平面反射镜43之间的反射要求。The X-axis moving mechanism 411 is provided with a lens fixture, and the lens fixture can be realized by using a fixture in the prior art. The second plane mirror 43 is mounted on the X-axis moving mechanism 411 through the lens fixture, and the second plane mirror 43 can be adjusted through the lens fixture. The distance between the two plane mirrors 43 and the optical table 1, that is, the second plane mirror 43 can be adjusted on the Z axis; the above settings, on the one hand, the second plane mirror 43 can be adjusted by the displacement mechanism on the X axis and the Y axis. Adjustment in the direction; on the other hand, the adjustment of the second plane mirror 43 in the Z-axis direction can be adjusted by the lens holder, so as to further meet the reflection requirements of the laser light between the second plane mirrors 43 .

所述第二平面反射镜43之间相互平行设置。The second plane mirrors 43 are arranged parallel to each other.

Claims (7)

1.一种可变放大系数光杠杆光电测量器,用于测量推力器工作时产生的冲量,其特征在于:包括光学平台;光学平台上设有激光器、安装支架、用于检测微型动力装置冲量的冲量测量装置、第一平面反射镜、转动支架、平面反射镜组、第一光电位置传感器、第二光电位置传感器、信号处理电路和控制器;1. a variable amplification factor optical lever photoelectric measuring device, for measuring the impulse that thruster produces when working, it is characterized in that: comprise optical platform; Be provided with laser, mounting bracket on the optical platform, be used to detect the impulse of miniature power unit The impulse measuring device, the first plane mirror, the rotating support, the plane mirror group, the first photoelectric position sensor, the second photoelectric position sensor, the signal processing circuit and the controller; 激光器用于发出光信号,激光器通过安装支架设置在光学平台上;冲量测量装置设置在光学平台上且位于激光器的一侧;The laser is used to emit light signals, and the laser is arranged on the optical platform through the mounting bracket; the impulse measuring device is arranged on the optical platform and is located on one side of the laser; 第一平面反射镜用于反射并调整激光器发出的光信号的反射角度,将激光器射出的光信号反射进入平面反射镜组,第一平面反射镜转动耦合在冲量测量装置上,第一平面反射镜的转动轴线与第一平面反射镜的反射面平行,且第一平面反射镜位于激光器的照射范围内;推力器耦合在冲量测量装置的摆臂上,在推力器作用下摆臂绕摆臂的转动轴线转动,同时带动第一平面反射镜绕第一平面反射镜的转动轴线进行转动,摆臂转动角度与第一平面反射镜转动角度相同;The first plane mirror is used to reflect and adjust the reflection angle of the optical signal emitted by the laser, and reflect the optical signal emitted by the laser into the plane mirror group. The first plane mirror is rotated and coupled to the impulse measuring device. The first plane mirror The axis of rotation is parallel to the reflection surface of the first plane mirror, and the first plane mirror is located within the irradiation range of the laser; the thruster is coupled to the swing arm of the impulse measuring device, and the swing arm rotates around the swing arm under the action of the thruster The axis rotates, and at the same time, the first plane mirror is driven to rotate around the rotation axis of the first plane mirror, and the rotation angle of the swing arm is the same as the rotation angle of the first plane mirror; 平面反射镜组用于接收并放大第一平面反射镜反射出的光信号的光程,平面反射镜组设置在光学平台上,且平面反射镜组的入光端位于第一平面反射镜相对于激光器的另一侧;The plane reflection mirror group is used to receive and amplify the optical path of the light signal reflected by the first plane reflection mirror, the plane reflection mirror group is arranged on the optical platform, and the light incident end of the plane reflection mirror group is located relative to the first plane reflection mirror. the other side of the laser; 第一光电位置传感器和第二光电位置传感器用于接收平面反射镜组反射出的光信号,第一光电位置传感器和第二光电位置传感器分别设置在光学平台位于平面反射镜组出光端的一侧,且第二光电位置传感器位于在第一光电位置传感器远离平面反射镜组的一侧;The first photoelectric position sensor and the second photoelectric position sensor are used to receive the light signal reflected by the plane mirror group, and the first photoelectric position sensor and the second photoelectric position sensor are respectively arranged on the side of the optical platform at the light-emitting end of the plane mirror group, and the second photoelectric position sensor is located on the side of the first photoelectric position sensor away from the plane mirror group; 平面反射镜组,包括用于调整光程大小的位移机构和两组相对设置的第二平面反射镜,两组第二平面反射镜相对设置在位移机构上,位移机构用于调整第二平面反射镜之间在X轴方向的距离和Y轴方向上的距离;The plane mirror group includes a displacement mechanism for adjusting the size of the optical path and two sets of second plane mirrors arranged oppositely. The two groups of second plane mirrors are relatively arranged on the displacement mechanism, and the displacement mechanism is used to adjust the reflection of the second plane The distance between the mirrors in the X-axis direction and the distance in the Y-axis direction; 信号处理电路一端分别与第一光电位置传感器和第二光电位置传感器电性连接,信号处理电路的另一端和控制器电性连接;控制器与位移机构电性连接。One end of the signal processing circuit is electrically connected to the first photoelectric position sensor and the second photoelectric position sensor respectively, and the other end of the signal processing circuit is electrically connected to the controller; the controller is electrically connected to the displacement mechanism. 2.根据权利要求1所述的一种可变放大系数光杠杆光电测量器,其特征在于:位移机构包括两个以上的X轴移动机构、两个以上的X轴驱动机构、两个Y轴移动机构和两个以上的Y轴驱动机构,控制器分别与X轴驱动机构和Y轴驱动机构电性连接;2. a kind of variable amplification factor optical lever photoelectric measuring device according to claim 1 is characterized in that: displacement mechanism comprises more than two X-axis moving mechanisms, more than two X-axis drive mechanisms, two Y-axis The moving mechanism and two or more Y-axis drive mechanisms, the controller is electrically connected with the X-axis drive mechanism and the Y-axis drive mechanism respectively; 两个Y轴移动机构平行设置在光学平台上,每一Y轴移动机构上活动设有一个以上的X轴移动机构;每一X轴移动机构对应设有一个X轴驱动机构和Y轴驱动机构;Y轴驱动机构用于驱动X轴移动机构沿Y轴移动机构长度方向上移动;X轴驱动机构用于驱动第二平面反射镜在X轴方向上移动,从而调节第二平面反射镜之间在X轴方向上的距离。Two Y-axis moving mechanisms are arranged in parallel on the optical table, and each Y-axis moving mechanism is movably provided with more than one X-axis moving mechanism; each X-axis moving mechanism is correspondingly provided with an X-axis driving mechanism and a Y-axis driving mechanism ; The Y-axis driving mechanism is used to drive the X-axis moving mechanism to move along the length direction of the Y-axis moving mechanism; the X-axis driving mechanism is used to drive the second plane mirror to move in the X-axis direction, so as to adjust the distance between the second plane mirrors Distance in the X-axis direction. 3.根据权利要求1所述的一种可变放大系数光杠杆光电测量器,其特征在于:每一Y轴移动机构上设有两个以上的X轴移动机构,每一X轴移动机构对应设有一个X轴驱动机构;每组第二平面反射镜包括两个以上第二平面反射镜,每个X轴移动机构上设有一个第二平面反射镜;Y轴移动机构在光学平台上沿Y轴方向设置,每一个Y轴移动机构上设有两个X轴移动机构,X轴移动机构沿光学平台的X轴方向设置;一Y轴移动机构上的X轴移动机构与另一Y轴移动机构上的X轴移动机构相对设置;通过调节第二平面反射镜之间的距离,使得光信号在每一第二平面反射镜上反射一次。3. a kind of variable amplification factor optical lever photoelectric measuring device according to claim 1 is characterized in that: each Y-axis moving mechanism is provided with more than two X-axis moving mechanisms, and each X-axis moving mechanism corresponds to There is an X-axis drive mechanism; each group of second plane mirrors includes more than two second plane mirrors, and each X-axis moving mechanism is provided with a second plane mirror; the Y-axis moving mechanism is located along the optical table. Set in the Y-axis direction, each Y-axis moving mechanism is provided with two X-axis moving mechanisms, and the X-axis moving mechanisms are arranged along the X-axis direction of the optical table; the X-axis moving mechanism on one Y-axis moving mechanism is connected to the other Y-axis moving mechanism. The X-axis moving mechanisms on the moving mechanism are relatively arranged; by adjusting the distance between the second plane mirrors, the optical signal is reflected once on each of the second plane mirrors. 4.根据权利要求1所述的一种可变放大系数光杠杆光电测量器,其特征在于:每一Y轴移动机构上设有一个的X轴移动机构,每一X轴移动机构对应设有一个X轴驱动机构;每组第二平面反射镜包括一个第二平面反射镜,每个X轴移动机构上设有一个第二平面反射镜;Y轴移动机构在光学平台上沿Y轴方向设置,每一个Y轴移动机构上设有一个X轴移动机构,X轴移动机构沿光学平台的X轴方向设置;一Y轴移动机构上的X轴移动机构与另一Y轴移动机构上的X轴移动机构相对设置;通过调节第二平面反射镜之间的距离,使得光信号在每一第二平面反射镜上反射两次以上。4. a kind of variable amplification factor optical lever photoelectric measuring device according to claim 1 is characterized in that: each Y-axis moving mechanism is provided with an X-axis moving mechanism, and each X-axis moving mechanism is correspondingly provided with An X-axis drive mechanism; each group of second plane mirrors includes a second plane mirror, and each X-axis moving mechanism is provided with a second plane mirror; the Y-axis moving mechanism is arranged on the optical platform along the Y-axis direction , each Y-axis moving mechanism is provided with an X-axis moving mechanism, and the X-axis moving mechanism is arranged along the X-axis direction of the optical table; the X-axis moving mechanism on one Y-axis moving mechanism and the X-axis moving mechanism on the other Y-axis moving mechanism The shaft moving mechanisms are relatively arranged; by adjusting the distance between the second plane mirrors, the optical signal is reflected more than twice on each of the second plane mirrors. 5.根据权利要求2所述的一种可变放大系数光杠杆光电测量器,其特征在于:第二平面反射镜固定设置在X轴移动机构的一端上,X轴驱动机构驱动X轴移动机构在X轴方向上相对于Y移动机构上移动实现调节第二平面反射镜之间在X轴方向上的距离。5. a kind of variable magnification factor optical lever photoelectric measuring device according to claim 2 is characterized in that: the second plane mirror is fixedly arranged on one end of the X-axis moving mechanism, and the X-axis driving mechanism drives the X-axis moving mechanism Moving in the X-axis direction relative to the Y moving mechanism realizes adjusting the distance between the second plane mirrors in the X-axis direction. 6.根据权利要求2所述的一种可变放大系数光杠杆光电测量器,其特征在于:所述X轴移动机构上设有镜片夹具,第二平面反射镜通过镜片夹具安装在X轴移动机构上,通过镜片夹具可调节第二平面反射镜与光学平台之间的距离。6. A variable magnification optical lever photoelectric measuring device according to claim 2, characterized in that: the X-axis moving mechanism is provided with a lens fixture, and the second plane mirror is installed on the X-axis to move through the lens fixture. Mechanically, the distance between the second plane mirror and the optical table can be adjusted through the lens holder. 7.根据权利要求1所述的一种可变放大系数光杠杆光电测量器,其特征在于:所述第二平面反射镜之间相互平行设置。7 . The variable magnification optical lever photoelectric measuring device according to claim 1 , wherein the second plane mirrors are arranged in parallel with each other. 8 .
CN202220732974.9U 2022-03-31 2022-03-31 Variable amplification factor optical lever photoelectric measurer Expired - Fee Related CN216954935U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116124344A (en) * 2023-01-04 2023-05-16 中国科学院力学研究所 Micro-thrust measuring device based on Roberval balance structure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116124344A (en) * 2023-01-04 2023-05-16 中国科学院力学研究所 Micro-thrust measuring device based on Roberval balance structure
CN116124344B (en) * 2023-01-04 2024-04-09 中国科学院力学研究所 Micro-thrust measuring device based on Roberval balance structure

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