CN216410347U - Mass flowmeter calibration system - Google Patents
Mass flowmeter calibration system Download PDFInfo
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- CN216410347U CN216410347U CN202123129572.4U CN202123129572U CN216410347U CN 216410347 U CN216410347 U CN 216410347U CN 202123129572 U CN202123129572 U CN 202123129572U CN 216410347 U CN216410347 U CN 216410347U
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- 230000001105 regulatory effect Effects 0.000 claims abstract description 39
- 238000001914 filtration Methods 0.000 claims abstract description 38
- 238000000053 physical method Methods 0.000 claims abstract description 26
- 238000005259 measurement Methods 0.000 claims abstract description 25
- 239000000463 material Substances 0.000 claims description 4
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- 238000012360 testing method Methods 0.000 abstract description 5
- 239000007789 gas Substances 0.000 description 77
- 230000001276 controlling effect Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
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Abstract
The utility model discloses a mass flowmeter calibration system, comprising: the gas source module is used for outputting gas for measurement; the pressure regulating and filtering module is connected with the gas source module and is used for filtering and regulating the pressure of the gas output by the gas source module; the electronic measurement module is connected with the pressure regulating and filtering module and is used for measuring the flowmeter to be measured; the physical measurement module is connected with the pressure regulating and filtering module and is used for measuring the flowmeter to be measured; and the control module is connected with the pressure regulating and filtering module, the electronic measuring module and the physical measuring module. The utility model makes up the blank of the calibration of the domestic high-precision gas mass flowmeter, and calibrates the gas mass flowmeter by combining a physical test mode and an electronic test mode, thereby ensuring the calibration accuracy.
Description
Technical Field
The utility model relates to the technical field of flowmeter calibration, in particular to a mass flowmeter calibration system.
Background
At present, the domestic calibration of the high-precision gas mass flow meter is blank, and the high-precision gas mass flow meter cannot be accurately calibrated, so that the high-precision gas mass calibration can only be carried out by means of foreign calibration technology, the correction service of 12-inch chip production is met, the calibration precision of the existing high-precision gas mass flow meter is not high, and the accurate calibration is difficult to realize.
SUMMERY OF THE UTILITY MODEL
According to an embodiment of the present invention, there is provided a mass flowmeter calibration system including:
the gas source module is used for outputting gas for measurement;
the pressure regulating and filtering module is connected with the gas source module and is used for filtering and regulating the pressure of the gas output by the gas source module;
the electronic measurement module is connected with the pressure regulating and filtering module and is used for measuring the flowmeter to be measured;
the physical measurement module is connected with the pressure regulating and filtering module and is used for measuring the flowmeter to be measured;
and the control module is connected with the pressure regulating and filtering module, the electronic measuring module and the physical measuring module.
Further, the gas source module comprises:
and the gas steel cylinder is connected with the pressure regulating and filtering module and is used for outputting measured gas.
Further, the pressure regulating filtering module comprises:
one end of the first pressure regulator is connected with the air source module;
one end of the first pressure transmitter is connected with the other end of the first pressure regulator, and the first pressure transmitter is in signal connection with the control module;
the filtering component is connected with the other end of the first pressure transmitter and is used for filtering gas;
one end of the second pressure regulator is connected with the filtering component;
one end of the temperature transmitter is connected with the other end of the second voltage regulator, and the temperature transmitter is in signal connection with the control module;
and one end of the second pressure transmitter is connected with the other end of the temperature transmitter, the other end of the second pressure transmitter is connected with the electronic measurement module and the physical measurement module, and the second pressure transmitter is in signal connection with the control module.
Further, the filter assembly comprises:
one end of the gas filter is connected with the other end of the first pressure transmitter;
one end of the first manual valve is connected with the other end of the gas filter;
one end of the gas purifier is connected with the other end of the first manual valve;
and one end of the second manual valve is connected with the other end of the gas purifier, and the other end of the second manual valve is connected with one end of the second pressure regulator.
Further, the electronic measurement module comprises:
one end of the first pneumatic valve is connected with the pressure regulating and filtering module, and the first pneumatic valve is electrically connected with the control module;
one end of the first calibration material placing level is connected with the other end of the first pneumatic valve and used for placing a flowmeter to be measured;
one end of the second pneumatic valve is connected with the other end of the first calibration position, and the second pneumatic valve is electrically connected with the control module;
and the flow meter is connected with the other end of the second pneumatic valve and is in signal connection with the control module.
Further, the physical measurement module comprises:
one end of the third pneumatic valve is connected with the pressure regulating filtering module;
one end of the second calibration material level is connected with the other end of the third pneumatic valve and is used for placing a flowmeter to be measured;
one end of the fourth pneumatic valve is connected with the other end of the second calibration material level, and the fourth pneumatic valve is electrically connected with the control module;
one end of the vacuum physical measurement box is connected with the other end of the fourth pneumatic valve;
the vacuumizing assembly is connected with the vacuum physical measuring box and the control module and is used for vacuumizing the vacuum physical measuring box;
one end of the fifth pneumatic valve is connected with the vacuum physical measurement box, and the fifth pneumatic valve is electrically connected with the control module;
and the pressure signal sensor is connected with the other end of the fifth pneumatic valve and is in signal connection with the control module.
Furthermore, the number of the fifth pneumatic valves is matched with that of the pressure signal sensors, and the number of the fifth pneumatic valves and the number of the pressure signal sensors can be multiple.
Further, the evacuation assembly includes:
one end of the vacuum valve is connected with the vacuum physical measuring box, and the vacuum valve is electrically connected with the control module;
and the vacuum pump is connected with the other end of the vacuum valve.
Further, the control module includes: and the controller is connected with the pressure regulating filtering module and the electronic measuring module physical measuring module.
According to the mass flowmeter calibration system disclosed by the embodiment of the utility model, the blank of calibration of a domestic high-precision gas mass flowmeter is made up, the gas mass flowmeter is calibrated by using a mode of combining physical test and electronic test, and the calibration accuracy is ensured.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and are intended to provide further explanation of the claimed technology.
Drawings
Fig. 1 is a block diagram of the overall configuration of a mass flow meter calibration system according to an embodiment of the present invention.
Detailed Description
The present invention will be further explained by describing preferred embodiments of the present invention in detail with reference to the accompanying drawings.
First, a mass flow meter calibration system according to an embodiment of the present invention will be described with reference to fig. 1, which is used for calibration of a mass flow meter and has a wide application range.
As shown in fig. 1, the mass flowmeter calibration system according to the embodiment of the present invention includes an air source module, a pressure-regulating filter module, an electronic measurement module, a physical measurement module, and a control module.
Specifically, as shown in fig. 1, in this embodiment, the gas source module is used for outputting gas for measurement, the gas adopts nitrogen, the pressure regulating filter module is connected with the gas source module, the gas for outputting the gas source module is filtered and pressure regulated, the electronic measurement module is connected with the pressure regulating filter module, the flowmeter for measurement is measured by using the electronic measurement mode, the physical measurement module is connected with the pressure regulating filter module, the flowmeter for measurement is measured by using the physical measurement mode, the calibration is performed by using the electronic measurement and physical measurement dual modes, the calibration accuracy can be greatly ensured, the control module is connected with the pressure regulating filter module, the electronic measurement module and the physical measurement module are connected, and the control module is used for controlling and displaying the measurement data.
Further, as shown in fig. 1, in the present embodiment, the gas source module includes: and the gas steel cylinder 11 is connected with the pressure regulating and filtering module and used for storing the measured gas and outputting the measured gas.
Further, as shown in fig. 1, in this embodiment, the pressure-regulating filtering module includes: a first pressure regulator 21, a first pressure transmitter 22, a filter assembly, a second pressure regulator 24, a temperature transmitter 25, and a second pressure transmitter 26. One end of a first pressure regulator 21 is connected with an air source module, the first pressure regulator 21 is used for regulating primary pressure, one end of a first pressure transmitter 22 is connected with the other end of the first pressure regulator 21, the first pressure transmitter 22 is in signal connection with a control module, the first pressure transmitter 22 is used for transmitting detected pressure data to the control module, a filtering component is connected with the other end of the first pressure transmitter 22 and is used for filtering gas and purifying the gas, one end of a second pressure regulator 24 is connected with the filtering component, the second pressure regulator 24 is used for regulating secondary pressure, one end of a temperature transmitter 25 is connected with the other end of the second pressure regulator 24, the temperature transmitter 25 is in signal connection with the control module, the temperature transmitter 25 is used for transmitting detected temperature data to the control module, one end of the second pressure transmitter 26 is connected with the other end of the temperature transmitter 25, the other end of the second pressure transmitter 26 is connected with the electronic measurement module and the physical measurement module, the second pressure transmitter 26 is in signal connection with the control module, and the second pressure transmitter 26 is used for transmitting the detected pressure data to the control module.
Further, as shown in fig. 1, in the present embodiment, the filter assembly includes: a gas filter 231, a first manual valve 232, a gas purifier 233, and a second manual valve 234. One end of the gas filter 231 is connected with the other end of the first pressure transmitter 22, the gas filter 231 is used for filtering particles in gas source gas, one end of the first manual valve 232 is connected with the other end of the gas filter 231, the first manual valve 232 is used for controlling on-off of gas delivery, one end of the gas purifier 233 is connected with the other end of the first manual valve 232, the gas purifier 233 is used for purifying the gas source gas, the purity is greater than or equal to 99.99999%, one end of the second manual valve 234 is connected with the other end of the gas purifier 233, the other end of the second manual valve 234 is connected with one end of the second pressure regulator 24, and the second manual valve 234 is used for controlling on-off of gas delivery.
Further, as shown in fig. 1, in the present embodiment, the electronic measurement module includes: a first pneumatic valve 31, a first calibration position 32, a second pneumatic valve 33, and a flow meter 34. The one end of first pneumatic valve 31 links to each other with the pressure regulating filtration module, first pneumatic valve 31 and control module electric connection, first pneumatic valve 31 is used for controlling the break-make of gas transmission, the one end of the first calibration position level 32 links to each other with the other end of first pneumatic valve 31, a flowmeter for placing the awaiting measuring, the one end of second pneumatic valve 33 links to each other with the other end of the first calibration position level 32, second pneumatic valve 33 and control module electric connection, second pneumatic valve 33 is used for controlling the break-make of gas transmission, flowmeter 34 links to each other with the other end of second pneumatic valve 33, flowmeter 34 and control module signal connection, flowmeter 34 is used for detecting the calibration the flowmeter that awaits measuring.
Further, as shown in fig. 1, in this embodiment, the physical measurement module includes: a third pneumatic valve 41, a second calibration position 42, a fourth pneumatic valve 43, a vacuum physics measurement box 44, an evacuation assembly, a fifth pneumatic valve 46, and a pressure signal sensor 47. One end of a third pneumatic valve 41 is connected with the pressure regulating and filtering module, the third pneumatic valve 41 is used for controlling the on-off of gas delivery, one end of a second calibration position 42 is connected with the other end of the third pneumatic valve 41 and is used for placing a flowmeter to be tested, one end of a fourth pneumatic valve 43 is connected with the other end of the second calibration position 42, the fourth pneumatic valve 43 is electrically connected with the control module, the fourth pneumatic valve 43 is used for controlling the on-off of gas delivery, one end of a vacuum physical measurement box 44 is connected with the other end of the fourth pneumatic valve 43, a vacuumizing assembly is connected with the vacuum physical measurement box 44 and the control module and is used for vacuumizing the vacuum physical measurement box 44, one end of a fifth pneumatic valve 46 is connected with the vacuum physical measurement box 44, the fifth pneumatic valve 46 is electrically connected with the control module, a pressure signal sensor 47 is connected with the other end of the fifth pneumatic valve 46, the pressure signal sensor 47 is in signal communication with the control module for transmitting sensed pressure data to the controller 51.
Further, as shown in fig. 1, in the present embodiment, the number of the fifth pneumatic valves 46 and the number of the pressure signal sensors 47 are matched, and each of the fifth pneumatic valves and the pressure signal sensors may be plural, so that the detection can be performed according to the difference of the pressure, and the pressure signal sensors are adapted to the respective pressure ranges.
Further, as shown in fig. 1, in the present embodiment, the vacuum pumping assembly includes: a vacuum valve 451 and a vacuum pump 452. One end of the vacuum valve 451 is connected to the vacuum physical measurement box 44, the vacuum valve 451 is electrically connected to the control module, the vacuum pump 452 is connected to the other end of the vacuum valve 451, and the vacuum pump 452 operates to evacuate the interior of the vacuum physical measurement box 44 when the vacuum valve 451 is opened.
Further, as shown in fig. 1, in this embodiment, the control module includes: and the controller 51 is connected with the pressure regulating filtering module and the electronic measuring module physical measuring module, and is used for controlling equipment, processing data and displaying the processed data.
When in use, the first manual valve 232 and the second manual valve 234 are opened, the gas cylinder 11 delivers gas, the delivered gas is primarily pressure-regulated by the first pressure regulator 21, the pressure is regulated to 10BAR, the gas filters particulate matters in the gas by the gas filter 231, the filtered gas is purified by the gas purifier 233, the gas flowmeter to be measured is placed at the first calibration level 32, the first pneumatic valve 31 and the second pneumatic valve 33 are opened, the purified gas is secondarily pressure-regulated by the second pressure regulator 24, the gas flows into the gas flowmeter to be measured, the gas flowmeter 34 is calibrated by the gas flowmeter to be measured, data is sent to the controller 51, electronic measurement is completed, the first pneumatic valve 31 and the second pneumatic valve 33 are closed, and the gas flowmeter to be measured is placed at the second calibration level 42, at this time, the vacuum valve 451 is opened, the vacuum pump 452 operates to vacuumize the interior of the vacuum physical measurement box 44 to a pressure value of 5mTorr, the vacuum valve 451 is closed, then the third pneumatic valve 41, the fourth pneumatic valve 43 and the fifth pneumatic valve 46 are opened, gas circulates, the third pneumatic valve 41, the fourth pneumatic valve 43 and the fifth pneumatic valve 46 are closed after ventilation is performed for 1min, the detected value is sent to the controller 51 through the pressure signal sensor 47, the controller 51 calculates the actual gas flow rate within 1min, then the vacuum physical measurement box 44 is vacuumized again to a pressure value of 5mTorr, the third pneumatic valve 41, the fourth pneumatic valve 43 and the fifth pneumatic valve 46 are opened, gas circulates, the third pneumatic valve 41, the fourth pneumatic valve 43 and the fifth pneumatic valve 46 are closed after ventilation is performed for 2min, the detected value is sent to the controller 51 through the pressure signal sensor 47, the controller 51 calculates the actual gas flow within 2min, compares the difference between the actual gas flow within 1min and the actual gas flow within 2min to obtain the actual gas flow, and then compares the actual gas flow with the gas flow measured by the electronic measurement mode, wherein the error between the actual gas flow and the gas flow measured by the electronic measurement mode is less than 10%, and the flow is changed to be the calibration completion.
In the above, with reference to fig. 1, the mass flowmeter calibration system according to the embodiment of the utility model is described, the scheme makes up the blank of calibration of a domestic high-precision gas mass flowmeter, and the gas mass flowmeter is calibrated by using a mode of combining physical and electronic tests, so that the calibration accuracy is ensured.
It should be noted that, in the present specification, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
While the present invention has been described in detail with reference to the preferred embodiments, it should be understood that the above description should not be taken as limiting the utility model. Various modifications and alterations to this invention will become apparent to those skilled in the art upon reading the foregoing description. Accordingly, the scope of the utility model should be determined from the following claims.
Claims (9)
1. A mass flow meter prover system comprising:
the gas source module is used for outputting gas for measurement;
the pressure regulating and filtering module is connected with the gas source module and is used for filtering and regulating the pressure of the gas output by the gas source module;
the electronic measurement module is connected with the pressure regulating and filtering module and is used for measuring the flowmeter to be measured;
the physical measurement module is connected with the pressure regulating and filtering module and is used for measuring the flowmeter to be measured;
and the control module is connected with the pressure regulating and filtering module, the electronic measuring module and the physical measuring module.
2. The mass flow meter calibration system of claim 1, wherein the gas source module comprises:
and the gas steel cylinder is connected with the pressure regulating and filtering module and used for outputting the measured gas.
3. The mass flow meter prover system of claim 1 wherein the pressure regulating filter module comprises:
one end of the first pressure regulator is connected with the gas source module;
one end of the first pressure transmitter is connected with the other end of the first pressure regulator, and the first pressure transmitter is in signal connection with the control module;
the filter assembly is connected with the other end of the first pressure transmitter and is used for filtering gas;
one end of the second pressure regulator is connected with the filtering component;
one end of the temperature transmitter is connected with the other end of the second voltage regulator, and the temperature transmitter is in signal connection with the control module;
and one end of the second pressure transmitter is connected with the other end of the temperature transmitter, the other end of the second pressure transmitter is connected with the electronic measurement module and the physical measurement module, and the second pressure transmitter is in signal connection with the control module.
4. The mass flow meter calibration system of claim 3, wherein the filter assembly comprises:
one end of the gas filter is connected with the other end of the first pressure transmitter;
a first manual valve, one end of which is connected with the other end of the gas filter;
one end of the gas purifier is connected with the other end of the first manual valve;
and one end of the second manual valve is connected with the other end of the gas purifier, and the other end of the second manual valve is connected with one end of the second pressure regulator.
5. The mass flow meter calibration system of claim 1, wherein the electronic measurement module comprises:
one end of the first pneumatic valve is connected with the pressure regulating and filtering module, and the first pneumatic valve is electrically connected with the control module;
one end of the first calibration material placing level is connected with the other end of the first pneumatic valve and used for placing the flowmeter to be measured;
one end of the second pneumatic valve is connected with the other end of the first calibration position, and the second pneumatic valve is electrically connected with the control module;
and the flowmeter is connected with the other end of the second pneumatic valve and is in signal connection with the control module.
6. The mass flow meter calibration system of claim 1, wherein the physical measurement module comprises:
one end of the third pneumatic valve is connected with the pressure regulating filtering module;
one end of the second calibration device is connected with the other end of the third pneumatic valve and is used for placing the flowmeter to be measured;
one end of the fourth pneumatic valve is connected with the other end of the second calibration object level, and the fourth pneumatic valve is electrically connected with the control module;
one end of the vacuum physical measurement box is connected with the other end of the fourth pneumatic valve;
the vacuumizing assembly is connected with the vacuum physical measuring box and the control module and is used for vacuumizing the vacuum physical measuring box;
one end of the fifth pneumatic valve is connected with the vacuum physical measurement box, and the fifth pneumatic valve is electrically connected with the control module;
and the pressure signal sensor is connected with the other end of the fifth pneumatic valve and is in signal connection with the control module.
7. The mass flow meter calibration system of claim 6 wherein said fifth pneumatic valve and said pressure signal sensor are matched in number and can each be plural.
8. The mass flow meter calibration system of claim 6, wherein the evacuation assembly comprises:
one end of the vacuum valve is connected with the vacuum physical measuring box, and the vacuum valve is electrically connected with the control module;
and the vacuum pump is connected with the other end of the vacuum valve.
9. The mass flow meter calibration system of claim 1, wherein the control module comprises: and the controller is connected with the pressure regulating filtering module, the electronic measuring module and the physical measuring module.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123129572.4U CN216410347U (en) | 2021-12-14 | 2021-12-14 | Mass flowmeter calibration system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123129572.4U CN216410347U (en) | 2021-12-14 | 2021-12-14 | Mass flowmeter calibration system |
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| CN216410347U true CN216410347U (en) | 2022-04-29 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114235103A (en) * | 2021-12-14 | 2022-03-25 | 愿慎新材料科技(上海)有限公司 | Mass flowmeter calibration system |
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2021
- 2021-12-14 CN CN202123129572.4U patent/CN216410347U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114235103A (en) * | 2021-12-14 | 2022-03-25 | 愿慎新材料科技(上海)有限公司 | Mass flowmeter calibration system |
| CN114235103B (en) * | 2021-12-14 | 2024-11-15 | 愿慎新材料科技(上海)有限公司 | Mass Flow Meter Calibration System |
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